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Optical assembly having a thermally conductive component
Grant 11,194,119 - Kaller , et al. December 7, 2 | 2021-12-07 |
Method and device for the correction of imaging defects
Grant 11,003,088 - Sorg , et al. May 11, 2 | 2021-05-11 |
Method And Device For The Correction Of Imaging Defects
App 20200233314 - Sorg; Franz ; et al. | 2020-07-23 |
Method and device for the correction of imaging defects
Grant 10,620,543 - Sorg , et al. | 2020-04-14 |
Optical Assembly Having A Thermally Conductive Component
App 20200103771 - Kaller; Julian ; et al. | 2020-04-02 |
Optical assembly having a thermally conductive component
Grant 10,509,336 - Kaller , et al. Dec | 2019-12-17 |
Method And Device For The Correction Of Imaging Defects
App 20190302627 - Sorg; Franz ; et al. | 2019-10-03 |
Microlithographic projection exposure apparatus and measuring device for a projection lens
Grant 10,345,710 - Ehrmann , et al. July 9, 2 | 2019-07-09 |
Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant manner
Grant 10,197,925 - Kugler , et al. Fe | 2019-02-05 |
Optical Module For A Microlithography Objective Holding Optical Elements With Supporting Device Located In Non-equidistant Manner
App 20180373007 - Kugler; Jens ; et al. | 2018-12-27 |
Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner
Grant 9,977,228 - Kugler , et al. May 22, 2 | 2018-05-22 |
Optical Assembly Having A Thermally Conductive Component
App 20170261867 - Kaller; Julian ; et al. | 2017-09-14 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20170082930 - Ehrmann; Albrecht ; et al. | 2017-03-23 |
Exposure apparatus and measuring device for a projection lens
Grant 9,436,095 - Ehrmann , et al. September 6, 2 | 2016-09-06 |
Replacement Apparatus For An Optical Element
App 20160041475 - Kugler; Jens ; et al. | 2016-02-11 |
Method And Device For The Correction Of Imaging Defects
App 20160026094 - Sorg; Franz ; et al. | 2016-01-28 |
Replacement apparatus for an optical element
Grant 9,081,296 - Kugler , et al. July 14, 2 | 2015-07-14 |
Replacement Apparatus For An Optical Element
App 20150070789 - Kugler; Jens ; et al. | 2015-03-12 |
Replacement apparatus for an optical element
Grant 8,902,519 - Kugler , et al. December 2, 2 | 2014-12-02 |
Optical Module For A Microlithography Objective Holding And Supporting Devices
App 20140268381 - Kugler; Jens ; et al. | 2014-09-18 |
Optical Module For An Objective
App 20140254036 - Kugler; Jens ; et al. | 2014-09-11 |
Optical module for a microlithography objective including holding and supporting devices
Grant 8,711,331 - Kugler , et al. April 29, 2 | 2014-04-29 |
Device For The Low-deformation Replaceable Mounting Of An Optical Element
App 20140063628 - Sorg; Franz ; et al. | 2014-03-06 |
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
Grant 8,659,745 - Limbach , et al. February 25, 2 | 2014-02-25 |
Device for the low-deformation replaceable mounting of an optical element
Grant 8,582,081 - Sorg , et al. November 12, 2 | 2013-11-12 |
Replacement Apparatus For An Optical Element
App 20130279029 - Kugler; Jens ; et al. | 2013-10-24 |
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations
App 20130278911 - Limbach; Guido ; et al. | 2013-10-24 |
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
Grant 8,542,346 - Limbach , et al. September 24, 2 | 2013-09-24 |
Replacement apparatus for an optical element
Grant 8,488,261 - Kugler , et al. July 16, 2 | 2013-07-16 |
Projection objective with diaphragms
Grant 8,488,104 - Dieckmann , et al. July 16, 2 | 2013-07-16 |
Exposure Apparatus And Measuring Device For A Projection Lens
App 20130120723 - Ehrmann; Albrecht ; et al. | 2013-05-16 |
Exposure apparatus and measuring device for a projection lens
Grant 8,330,935 - Ehrmann , et al. December 11, 2 | 2012-12-11 |
Method And Device For The Correction Of Imaging Defects
App 20120176591 - Sorg; Franz ; et al. | 2012-07-12 |
Method and device for the correction of imaging defects
Grant 8,159,648 - Sorg , et al. April 17, 2 | 2012-04-17 |
Projection Objective With Diaphragms
App 20110285979 - Dieckmann; Nils ; et al. | 2011-11-24 |
Replacement Apparatus For An Optical Element
App 20110255181 - Kugler; Jens ; et al. | 2011-10-20 |
Replacement apparatus for an optical element
Grant 7,995,296 - Kugler , et al. August 9, 2 | 2011-08-09 |
Method for shifting a motor vehicle automatic transmission with a hydrodynamic torque converter when the vehicle comes to a stop
Grant 7,959,536 - Eisele , et al. June 14, 2 | 2011-06-14 |
Replacement Apparatus For An Optical Element
App 20100271716 - Kugler; Jens ; et al. | 2010-10-28 |
Replacement apparatus for an optical element
Grant 7,768,723 - Kugler , et al. August 3, 2 | 2010-08-03 |
Reflecting optical element with eccentric optical passageway
Grant 7,760,327 - Scherle , et al. July 20, 2 | 2010-07-20 |
Exposure Apparatus And Measuring Device For A Projection Lens
App 20100141912 - Ehrmann; Albrecht ; et al. | 2010-06-10 |
Lithographic apparatus, device manufacturing method and exchangeable optical element
Grant 7,724,351 - Loopstra , et al. May 25, 2 | 2010-05-25 |
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations
App 20090244509 - Limbach; Guido ; et al. | 2009-10-01 |
Replacement Apparatus for an Optical Element
App 20090168207 - Kugler; Jens ; et al. | 2009-07-02 |
Device For The Low-deformation Replaceable Mounting Of An Optical Element
App 20090122288 - Sorg; Franz ; et al. | 2009-05-14 |
Optical element
Grant 7,529,046 - Schletterer , et al. May 5, 2 | 2009-05-05 |
Replacement apparatus for an optical element
Grant 7,515,363 - Kugler , et al. April 7, 2 | 2009-04-07 |
Device for the low-deformation replaceable mounting of an optical element
Grant 7,471,469 - Sorg , et al. December 30, 2 | 2008-12-30 |
Method And Device For The Correction Of Imaging Defects
App 20080316444 - Sorg; Franz ; et al. | 2008-12-25 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20080309894 - Ehrmann; Albrecht ; et al. | 2008-12-18 |
Method for Shifting a Motor Vehicle Automatic Transmission with a Hydrodynamic Torque Converter When the Vehicle Comes to a Stop
App 20080227600 - Eisele; Markus ; et al. | 2008-09-18 |
Optical Module for an Objective
App 20080198352 - Kugler; Jens ; et al. | 2008-08-21 |
Replacement apparatus for an optical element
App 20070297074 - Kugler; Jens ; et al. | 2007-12-27 |
Replacement apparatus for an optical element
Grant 7,265,917 - Kugler , et al. September 4, 2 | 2007-09-04 |
Optical Element
App 20070201151 - Schletterer; Thomas ; et al. | 2007-08-30 |
Lithographic apparatus, device manufacturing method and exchangeable optical element
App 20070177122 - Loopstra; Erik Roelof ; et al. | 2007-08-02 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20070070316 - Ehrmann; Albrecht ; et al. | 2007-03-29 |
Reflecting optical element with eccentric optical passageway
App 20060262704 - Scherle; Hans-Jurgen ; et al. | 2006-11-23 |
Gearbox control system
Grant 7,131,931 - Lutz , et al. November 7, 2 | 2006-11-07 |
Device for the low-deformation replaceable mounting of an optical element
App 20060158749 - Sorg; Franz ; et al. | 2006-07-20 |
Replacement apparatus for an optical element
App 20050134972 - Kugler, Jens ; et al. | 2005-06-23 |
System for damping oscillations
Grant 6,897,599 - Sorg , et al. May 24, 2 | 2005-05-24 |
Optical element deformation system
Grant 6,844,994 - Melzer , et al. January 18, 2 | 2005-01-18 |
Gearbox control system
App 20040106501 - Lutz, Otto ; et al. | 2004-06-03 |
Oscillation damping system
Grant 6,700,715 - Sorg , et al. March 2, 2 | 2004-03-02 |
Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element
Grant 6,441,975 - Ebert , et al. August 27, 2 | 2002-08-27 |
System for damping oscillations
App 20020109437 - Sorg, Franz ; et al. | 2002-08-15 |
Oscillation damping system
App 20020075574 - Sorg, Franz ; et al. | 2002-06-20 |
Optical element deformation system
App 20020048096 - Melzer, Frank ; et al. | 2002-04-25 |
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