U.S. patent application number 16/000371 was filed with the patent office on 2018-10-04 for low resistance contact structures for trench structures.
The applicant listed for this patent is INTERNATIONAL BUSINESS MACHINES CORPORATION. Invention is credited to Praneet Adusumilli, Alexander Reznicek, Oscar van der Straten, Chih-Chao Yang.
Application Number | 20180286958 16/000371 |
Document ID | / |
Family ID | 58558994 |
Filed Date | 2018-10-04 |
United States Patent
Application |
20180286958 |
Kind Code |
A1 |
Adusumilli; Praneet ; et
al. |
October 4, 2018 |
LOW RESISTANCE CONTACT STRUCTURES FOR TRENCH STRUCTURES
Abstract
An electrical device including at least one contact surface and
an interlevel dielectric layer present atop the electrical device,
wherein the interlevel dielectric layer includes at least one
trench to the at least one contact surface of the electrical
device. A conformal titanium liner is present on the sidewalls of
the trench and is in direct contact with the at least one contact
surface. The conformal titanium liner may be composed of 100 wt. %
titanium, and may have a thickness ranging from 10 .ANG. to
100.ANG..
Inventors: |
Adusumilli; Praneet;
(Albany, NY) ; Reznicek; Alexander; (Troy, NY)
; van der Straten; Oscar; (Guilderland Center, NY)
; Yang; Chih-Chao; (Glenmont, NY) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
Armonk |
NY |
US |
|
|
Family ID: |
58558994 |
Appl. No.: |
16/000371 |
Filed: |
June 5, 2018 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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15226143 |
Aug 2, 2016 |
10032721 |
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16000371 |
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14919201 |
Oct 21, 2015 |
9960240 |
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15226143 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 23/5283 20130101;
H01L 23/53266 20130101; H01L 29/41791 20130101; H01L 29/41783
20130101; H01L 29/401 20130101; H01L 21/76846 20130101; H01L
29/66795 20130101; H01L 21/76897 20130101; H01L 27/1211 20130101;
H01L 21/76855 20130101; H01L 29/456 20130101; H01L 23/53252
20130101; H01L 29/0649 20130101; H01L 21/76843 20130101; H01L
23/53238 20130101; H01L 21/28518 20130101; H01L 29/785 20130101;
H01L 23/535 20130101; H01L 27/0886 20130101; H01L 21/76841
20130101; H01L 23/485 20130101; H01L 21/76877 20130101 |
International
Class: |
H01L 29/417 20060101
H01L029/417; H01L 23/528 20060101 H01L023/528; H01L 21/768 20060101
H01L021/768; H01L 23/535 20060101 H01L023/535; H01L 29/66 20060101
H01L029/66; H01L 29/78 20060101 H01L029/78; H01L 29/06 20060101
H01L029/06; H01L 23/532 20060101 H01L023/532; H01L 23/485 20060101
H01L023/485 |
Claims
1. A contact comprising: a conformal titanium liner present on the
sidewalls of a trench and is in direct contact with the at least
one contact surface; and a metal fill comprising ruthenium (Ru),
rhodium (Rh), iridium (Jr), osmium (Os), molybdenum (Mo), copper
(Cu) or a combination thereof fills the at least one trench, and is
in direct contact with the conformal titanium liner.
2. The contact device of claim 1, wherein the conformal titanium
liner comprises 100 wt. % titanium.
3. The contact device of claim 1, wherein the conformal titanium
liner comprises a thickness ranging from 10 .ANG. to 100 .ANG..
4. The contact device of claim 1, wherein the contact is to a field
effect transistor.
5. The contact of claim 4, wherein a channel region of the field
effect transistor is provided by a fin structure.
6. The contact of claim 5, wherein the contact surface is provided
by source and drain region portions of the field effect transistor
that are present on portions of the fin structure at opposing sides
of the channel region.
7. The contact of claim 6, wherein the contact surface comprises a
metal semiconductor alloy region that is in direct contact with the
conformal titanium liner.
8. A contact comprising: a conformal titanium liner of
substantially 100 wt. % titanium present on sidewalls of a trench
and is in direct contact with at least one contact surface; and a
metal fill comprising ruthenium (Ru), rhodium (Rh), iridium (Ir),
osmium (Os), molybdenum (Mo), copper (Cu) or a combination thereof
fills the at least one trench.
9. The contact of claim 8, wherein the conformal titanium liner
comprises a thickness ranging from 10 .ANG. to 100 .ANG..
10. The contact of claim 8, wherein the contact is to a field
effect transistor.
11. The contact of claim 10, wherein a channel region of the field
effect transistor is provided by a fin structure.
12. The contact of claim 11, wherein the contact surface is
provided by source and drain region portions of the field effect
transistor that are present on portions of the fin structure at
opposing sides of the channel region.
13. The contact of claim 12, wherein the contact surface comprises
a metal semiconductor alloy region that is in direct contact with
the conformal titanium liner.
14. A contact comprising: a metal semiconductor alloy region that
is in direct contact with at least one contact surface; a conformal
titanium liner present on the sidewalls of the trench and is in
direct contact with the metal semiconductor alloy region that is
atop the at least one contact surface; and a metal fill comprising
ruthenium (Ru), rhodium (Rh), iridium (Ir), osmium (Os), molybdenum
(Mo), copper (Cu) or a combination thereof fills the at least one
trench, and is in direct contact with the conformal titanium
liner.
15. The contact of claim 14, wherein the conformal titanium liner
comprises 100 wt. % titanium.
16. The contact of claim 14, wherein the conformal titanium liner
comprises a thickness ranging from 10 .ANG. to 100 .ANG..
17. The contact of claim 14, wherein the contact is to a field
effect transistor.
18. The contact of claim 17, wherein a channel region of the field
effect transistor is provided by a fin structure.
19. The contact of claim 18, wherein the contact surface is
provided by source and drain region portions of the field effect
transistor that are present on portions of the fin structure at
opposing sides of the channel region.
20. The contact of claim 14, wherein the metal semiconductor alloy
is a silicide.
Description
BACKGROUND
Technical Field
[0001] The present disclosure relates to electrical devices, such
as semiconductor field effect transistors. The present disclosure
further relates to processing of materials suitable for the
contacts to semiconductor devices.
Description of the Related Art
[0002] Semiconductor field effect transistors (FETs) continue to
get smaller because of technological improvements in semiconductor
fabrication processes. The technological improvements have enabled
aggressive down-scaling of FETs, and the aggressive down-scaling
has resulted in increased density of electrical components on
integrated circuits. However, as FETs get smaller, challenges arise
that can negatively impact their utility and performance. One
challenge often encountered in semiconductor fabrication, which
arises due to down-scaling of FETs, is the ability to provide FETs
with low contact resistance. A contact is an interface material
between a FET substrate and interconnect wiring, wherein the
interconnect wiring is routed to connect a FET to other integrated
circuit components distributed on the surface of the substrate. A
contact can enhance electrical current flow (i.e., reduce
resistance) between substrate and interconnect wiring. However, as
surface area of contacts decrease, due to the aggressive
down-scaling, contact resistance can increase and cause a reduction
of FET performance, such as a reduction in transistor switching
speed.
SUMMARY
[0003] In one embodiment, a method of forming a contact to an
electrical device is provided that includes forming a titanium
liner on sidewalls of a trench structure and a base surface of the
trench provided by a contact surface of the electrical device; and
filling the trench with a metal fill comprising ruthenium (Ru),
rhodium (Rh), iridium (Ir), osmium (Os), molybdenum (Mo), copper
(Cu) or a combination thereof.
[0004] In another aspect, an electrical device is provided that
includes at least one contact surface and an interlevel dielectric
layer present atop the electrical device, wherein the interlevel
dielectric layer includes at least one trench to the at least one
contact surface of the electrical device. In some embodiments, a
conformal titanium liner is present on the sidewalls of the trench
and is in direct contact with the at least one contact surface. A
metal fill comprising ruthenium (Ru), rhodium (Rh), iridium (Ir),
osmium (Os), molybdenum (Mo), copper (Cu) or a combination thereof
fills the at least one trench, and is in direct contact with the
conformal titanium liner.
[0005] In another embodiment, a semiconductor device is provided
that includes a fin structure providing a channel region of the
semiconductor device, wherein source and drain regions that are
positioned on opposing sides of the channel region are present on
source and drain portions of the fin structure. A gate structure
may be present on the channel region of the semiconductor device.
Contacts to at least the source regions and drain regions can
include a conformal titanium liner that is present on the sidewalls
of a trench through an interlevel dielectric to the source and
drain regions, and a metal fill comprising ruthenium (Ru), rhodium
(Rh), iridium (Ir), osmium (Os), molybdenum (Mo), copper (Cu) or a
combination thereof.
[0006] In yet another aspect, the present disclosure provides a
method of forming a contact to an electric device that includes
forming a liner of tantalum or tantalum nitride on sidewalls of a
trench structure and a base surface of the trench provided by a
contact surface of the electrical device. An copper fill promoting
liner comprising ruthenium (Ru), rhodium (Rh), iridium (Ir), osmium
(Os), molybdenum (Mo), copper (Cu) or a combination thereof may
then be formed on the liner of tantalum or tantalum nitride. A
metal fill comprising a copper containing metal fills the at least
one trench. In some embodiments, when the contact surface of the
electrical device is not alloyed with a semiconductor material,
e.g., not silicided, the liner of the tantalum or tantalum nitride
may be in direct contact with the contact surface of the electrical
device. In another embodiment, when the contact surface of the
electrical device includes a metal and semiconductor alloy, such as
titanium silicide, a semiconductor alloying layer may be formed
between the contact surface of the electrical device and the liner
of tantalum or tantalum nitride.
[0007] In another aspect of the present disclosure, an electrical
device is provided that includes at least one contact surface and
an interlevel dielectric layer present atop the electrical device,
wherein the interlevel dielectric layer includes at least one
trench to the at least one contact surface of the electrical
device. A liner of tantalum or tantalum nitride can be present on
sidewalls of the trench structure and a base surface of the trench
provided by the contact surface of the electrical device. In some
embodiments, an copper fill promoting liner comprising ruthenium
(Ru), rhodium (Rh), iridium (Ir), osmium (Os), molybdenum (Mo),
copper (Cu) or a combination thereof is in direct contact with the
liner of tantalum or tantalum nitride. A metal fill comprising a
copper containing metal fills the at least one trench and is
present directly on the copper fill promoting liner. In some
embodiments, when the contact surface of the electrical device is
not alloyed with a semiconductor material, e.g., not silicided, the
liner of the tantalum or tantalum nitride may be in direct contact
with the contact surface of the electrical device. In another
embodiment, when the contact surface of the electrical device
includes a metal and semiconductor alloy, such as titanium
silicide, a semiconductor alloying layer may be present between the
contact surface of the electrical device and the liner of tantalum
or tantalum nitride.
BRIEF DESCRIPTION OF DRAWINGS
[0008] The following detailed description, given by way of example
and not intended to limit the disclosure solely thereto, will best
be appreciated in conjunction with the accompanying drawings,
wherein like reference numerals denote like elements and parts, in
which:
[0009] FIG. 1 is a side cross-sectional view depicting one
embodiment to contact trenches to the conductive features of a
semiconductor device, in accordance with present disclosure.
[0010] FIG. 2 is a side cross-sectional view depicting one
embodiment of depositing a titanium liner layer in the contact
trenches that are depicted in FIG. 1, in accordance with one
embodiment of the present disclosure.
[0011] FIG. 3 is a side cross-sectional view depicting one
embodiment of depositing a ruthenium containing fill atop the
titanium liner that is depicted in FIG. 2.
[0012] FIG. 4 is a side cross-sectional view depicting planarizing
the structure depicted in FIG. 3, in accordance with one embodiment
of the present disclosure.
[0013] FIG. 5 is a side cross-sectional view depicting another
embodiment of the present disclosure in which a contact is composed
of a tantalum (Ta) or tantalum nitride (TaN) diffusion barrier, a
ruthenium liner (Ru) and a copper (Cu) fill material.
[0014] FIG. 6 is a side cross-sectional view depicting another
embodiment of the present disclosure in which a contact is composed
of a titanium layer for silicidation of an underlying structure, a
tantalum (Ta) or tantalum nitride (TaN) diffusion barrier, a
ruthenium liner (Ru) and a copper (Cu) fill material.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0015] Detailed embodiments of the claimed structures and methods
are disclosed herein; however, it is to be understood that the
disclosed embodiments are merely illustrative of the claimed
structures and methods that may be embodied in various forms. In
addition, each of the examples given in connection with the various
embodiments is intended to be illustrative, and not restrictive.
Further, the figures are not necessarily to scale, some features
may be exaggerated to show details of particular components.
Therefore, specific structural and functional details disclosed
herein are not to be interpreted as limiting, but merely as a
representative basis for teaching one skilled in the art to
variously employ the methods and structures of the present
disclosure. For purposes of the description hereinafter, the terms
"upper", "lower", "right", "left", "vertical", "horizontal", "top",
"bottom", and derivatives thereof shall relate to the embodiments
of the disclosure, as it is oriented in the drawing figures. The
terms "positioned on" means that a first element, such as a first
structure, is present on a second element, such as a second
structure, wherein intervening elements, such as an interface
structure, e.g. interface layer, may be present between the first
element and the second element. The term "direct contact" means
that a first element, such as a first structure, and a second
element, such as a second structure, are connected without any
intermediary conducting, insulating or semiconductor layers at the
interface of the two elements.
[0016] In some embodiments, the methods and structures disclosed
herein provide low resistance contact structures for middle of the
line (MOL) trench contacts. Previously formed contacts to
semiconductor devices composed of tungsten (W) typically employ a
halide based tungsten (W) precursor, such as tungsten-hexafluoride.
It has been determined that a tungsten or tungsten based fill
requires a thick titanium nitride (TiN) diffusion barrier layer
(also referred to as diffusion barrier liner), e.g., greater than 3
nm in thickness, to avoid fluorine diffusion and to avoid the
attack of an underlayer, such as a titanium underlayer. With
decreasing dimensions, and the requirement of a thicker titanium
nitride (TiN) diffusion layer, it is evident that there is little
space left in the contract trench for the deposition of the contact
material, which can be especially true since the titanium nitride
(TiN) diffusion layer does not scale proportionally with the rest
of the device. Therefore, depositing a TiN diffusion barrier layer
within a trench for forming a contact can leave very little room
for the deposition of tungsten, which provides the electrically
conductive portion of the contact that carries electrical signal to
and from the semiconductor devices, which can disadvantageously
result in a high resistance contact.
[0017] In accordance with at least some of the embodiments of the
present disclosure, the methods and structures provided herein
employ at least one of ruthenium (Ru), rhodium (Rh), iridium (Jr),
osmium (Os), molybdenum (Mo), and copper (Cu) as the contact metal
at the trench silicide (TS) level, i.e., contact to the source and
drain region, of semiconductor devices. Middle of the line (MOL)
structures are also provided that can prevent diffusion and enable
low resistivity metal fills for contacts. In some examples,
ruthenium can be used as copper (Cu) fill enhancement layer or
copper (Cu) reflow enhancement layer. In other examples, instead of
only employing a liner of ruthenium (Ru), rhodium (Rh), iridium
(Jr), osmium (Os), or molybdenum (Mo), the methods and structures
that are disclosed herein propose to fill the whole contact trench
with at least one of ruthenium (Ru), rhodium (Rh), iridium (Jr),
osmium (Os), or molybdenum (Mo), since these materials are suitable
low resistivity metals for providing contacts. In another approach,
the methods and structure of the present disclosure use copper
(Cu). The methods and structures of the present disclosure are now
described with greater detail referring to FIGS. 1-6.
[0018] FIG. 1 illustrates a cross-sectional view of an electrical
device 100 including semiconductor devices 50a, 50b. As used
herein, the term "semiconductor device" refers to an intrinsic
semiconductor material that has been doped, that is, into which a
doping agent has been introduced, giving it different electrical
properties than the intrinsic semiconductor. Doping involves adding
dopant atoms to an intrinsic semiconductor, which changes the
electron and hole carrier concentrations of the intrinsic
semiconductor at thermal equilibrium. Dominant carrier
concentration in an extrinsic semiconductor determines the
conductivity type of the semiconductor. A field effect transistor
(FET) is a semiconductor device in which output current, i.e.,
source-drain current, is controlled by the voltage applied to a
gate structure to the semiconductor device. A field effect
transistor has three terminals, i.e., gate structure, source region
and drain region. In some examples, the field effect transistor may
be a planar device. In a planar device the gate structure is formed
atop an upper surface of the substrate that provides the channel
region of the device, in which source and drain regions are present
on the substrate on opposing sides of the channel region. In other
embodiments, the semiconductor device may be a FinFET semiconductor
device. In a FinFET semiconductor device the channel region of the
semiconductor device is present in a fin structure. As used herein,
a "fin structure" refers to a semiconductor material, which is
employed as the body of a semiconductor device, in which the gate
structure is positioned around the fin structure such that charge
flows down the channel on the two sidewalls of the fin structure
and optionally along the top surface of the fin structure.
[0019] In the embodiment that is depicted in FIG. 1, the electrical
device 100 includes two semiconductor devices, e.g., a first
semiconductor device 50a having a first conductivity type, such as
n-type conductivity, e.g., n-FinFET, and a second semiconductor
device having a second conductivity type, such as a p-type
conductivity, e.g., p-FinFET. Although the semiconductor devices
provided are FinFETs, in which the fin structures are formed from
the semiconductor on insulator (SOI) layer of a semiconductor on
insulator (SOI) substrate, the present disclosure is not limited to
only this example. Any semiconductor device may provide the contact
surface that the contacts are formed to. For example, the
semiconductor device may be a planar FET or may be a bipolar
junction transistor. In other examples, it is not necessary that
the contacts disclosed herein are formed to semiconductor devices,
as any electrical device is suitable for use with the methods and
structures disclosed herein, such as memory devices, e.g., RAM,
MRAM and flash memory, and passive devices, e.g., resistors and
capacitors.
[0020] Referring to FIG. 1, the semiconductor devices 50a, 50b may
be present on a substrate 10, e.g., semiconductor substrate. For
example, the first semiconductor device 50a may be present in a
first region of the substrate 10 and the second semiconductor
device 50b may be present in a second region of the substrate 10.
In the embodiment that is depicted in FIG. 1, the semiconductor
devices 50a, 50b are FinFETs, in which the fin structures 9 are
provided by the semiconductor on insulator (SOI) layer of an SOI
substrate. In this example, the SOI layer has been patterned and
etched to provide the fin structures 9, wherein the SOI layer may
be a semiconductor material, such as silicon (Si). It is noted,
that silicon (Si) as a material for the fin structures 9 is only
one example of a suitable semiconductor material for the fin
structures 9. It is not intended that the present disclosure be
limited to only this example, as any type IV semiconductor, e.g.,
including germanium containing semiconductors, and type III-V
compound semiconductor materials, e.g., gallium arsenic, can be
suitable for the fin structures. The SOI layer that provides the
fin structure 9 may be present atop a dielectric layer 8 that can
be referred to as a buried oxide (BOX) layer. In one example, the
dielectric layer 8 can be composed of silicon oxide, but other
dielectrics may be equally suitable. A supporting substrate 7 can
be present underlying the dielectric layer 8, which can be composed
of a semiconductor material that is the same or different from the
SOI layer. For example, the supporting substrate 7 may be composed
of a silicon containing material, such as silicon (Si).
[0021] It is noted that it is not necessary that the substrate used
for forming the semiconductor devices 50a, 50b be an SOI substrate.
For example, the substrate 7 may be a bulk substrate. Further, as
noted above, the substrate 7 is not necessarily processed to
provide a fin structure including semiconductor device, as the
semiconductor devices that may incorporate the contacts of the
present disclosure may be any type of semiconductor device, e.g.,
planar FETs.
[0022] In the embodiment that is depicted in FIG. 1, each of the
semiconductor devices 50a, 50b may include a gate structure 11, a
source region 12 and a drain region 13. The gate structure 11 may
further include a gate dielectric and a gate conductor that is
composed of poly-silicon and/or metal layer. The gate dielectric
layer can comprise an oxide, such as silicon dioxide, hafnium
oxide, zirconium oxide, or a combination thereof, such as hafnium
oxide disposed on silicon dioxide. The gate dielectric layer can be
deposited on a channel portion of the fin structures 9 utilizing a
variety of deposition techniques, which can include chemical vapor
deposition (CVD), or atomic layer deposition (ALD). The gate
conductor can comprise a metal layer that can include, but is not
limited to, aluminum (Al), hafnium (Hf), lanthanum (La), tantalum
(Ta), titanium (Ti), or zirconium (Zr). The metal layer for the
gate conductor can be deposited on the gate dielectric layer
utilizing a CVD technique, a physical vapor deposition (PVD)
technique, or any other deposition technique. Furthermore, in some
embodiments, if a gate conductor comprises a metal layer, a
poly-silicon layer can be deposited on the metal layer. Subsequent
to formation of poly-silicon and/or metal layer, a gate dielectric
spacer 14 may be formed on the sidewalls of the gate structure 11.
The gate dielectric spacer 14 can comprise nitride, oxide, or any
other dielectric material.
[0023] The source region 12 and drain region 13 are present on
opposing sides of the channel region that the gate structure 11 is
present on. The source and drain regions 12, 13 are typically doped
to a conductivity type that provides the conductivity type of the
semiconductor device 50a, 50b. For example, the source region 12
and drain region 13 of the first semiconductor device 50a may be
doped n-type to provide an n-type FinFET, and the source region 12
and drain region 13 of the second semiconductor device 50b may be
doped p-type to provide a p-type FinFET. In the embodiment that is
depicted in FIG. 1, the source region 12 and drain region 13 may be
formed on the source and drain region portions of the fin structure
9.
[0024] In one embodiment, the source regions 12 and drain regions
13 may be formed using an epitaxial growth process to form in-situ
n-type or p-type doped semiconductor material on the source and
drain region portions of the fin structures 9 followed by
annealing, wherein the annealing can cause the dopants from the
in-situ n-type or p-type epitaxial semiconductor material to
diffuse into the source and drain region portions of the fin
structures 9. The source regions 12 and drain regions 13 may also
be formed using ion implantation. Forming the gate structures 11
prior to forming the source and drain regions 12, 13 is known as
gate first processing. The methods disclosed herein are not limited
to only this example, as gate last processing may also be employed
to form the semiconductor devices 50a, 50b. In gate last
processing, a dummy gate is formed on the channel region of the
semiconductor device; the source and drain regions are formed; the
dummy gate is removed; and a functional gate structure is formed in
the space previously occupied by the dummy gate.
[0025] Still referring to FIG. 1, following formation of the
semiconductor devices 50a, 50b, an interlevel dielectric layer 15
is formed. The interlevel dielectric layer 15 may be blanket
deposited over the semiconductor devices 50a, 50b. The interlevel
dielectric layer 15 may be selected from the group consisting of
silicon containing materials such as SiO.sub.2, Si.sub.3N.sub.4,
SiO.sub.xN.sub.y, SiC, SiCO, SiCOH, and SiCH compounds, the
above-mentioned silicon containing materials with some or all of
the Si replaced by Ge, carbon doped oxides, inorganic oxides,
inorganic polymers, hybrid polymers, organic polymers such as
polyamides or SiLK.TM., other carbon containing materials,
organo-inorganic materials such as spin-on glasses and
silsesquioxane-based materials, and diamond-like carbon (DLC), also
known as amorphous hydrogenated carbon, .alpha.-C:H). Additional
choices for the interlevel dielectric layer 15 include any of the
aforementioned materials in porous form, or in a form that changes
during processing to or from being porous and/or permeable to being
non-porous and/or non-permeable. The interlevel dielectric layer 15
may be deposited over the semiconductor devices 50a, 50b utilizing
chemical vapor deposition (CVD), wherein the type of CVD can
include plasma enhanced chemical vapor deposition (PECVD), metal
organic CVD (MOCVD), low pressure CVD or flowable CVD. Spin on
deposition may also be used to deposit some compositions of the
interlevel dielectric layer 15.
[0026] FIG. 1 illustrates the formation of openings 16 (also
referred to as trenches 16) through the interlevel dielectric 15 to
the source and drain region 12, 13 of the semiconductor devices
50a, 50b. The trenches 16 may be formed by employing an etch
process, such as an anisotropic etch process, e.g., reactive ion
etch (RIE). It is noted that reactive ion etch (RIE) is only one
example of an etch process that is suitable for forming the
trenches 16. Other etch processes for forming the trenches 16
through the interlevel dielectric layer 15 may include wet etching,
dry etching, plasma etching, isotropic RIE, anisotropic RIE, ion
milling, or any combination thereof.
[0027] In some embodiments, the trenches 16 may expose an upper
surface of the source region 12 and drain region 13 of the
semiconductor devices 50a, 50b, wherein the width W1 of the
trenches 16 may range from 10 nm to 60 nm. In another embodiment,
the trenches 16 may have a width ranging from 15 nm to 30 nm.
[0028] FIGS. 1-4 depict one embodiment of a method that forms
contacts 200a to an electrical device 50a, 50b, in which the
contacts 200a are composed of a conformal titanium liner 20 and a
fill 25 that is composed of at least one of ruthenium (Ru), rhodium
(Rh), iridium (Jr), osmium (Os), molybdenum (Mo), copper (Cu) or a
combination thereof. The contacts 200a are formed in the trenches
16 that extend through the interlevel dielectric layer 15 to the at
least one contact surface S1, S2 of the electrical device 50a, 50b.
In some embodiments, a conformal titanium liner 20 is present on
the sidewalls of the trench 16, and is in direct contact with the
at least one contact surface S1, S2. The metal fill 25 is in direct
contact with the conformal titanium liner 20.
[0029] FIG. 2 depicts one embodiment of depositing a titanium liner
layer 20 in the contact trenches, i.e., openings 16 through the
interlevel dielectric layer 15, which are depicted in FIG. 1. The
titanium liner layer 20 may be used to form a metal semiconductor
alloy, e.g., silicide, on the contact surfaces S1, S2 of the source
region 12 and drain region 13 of the semiconductor devices 50a,
50b. For example, when the fin structures 9 are composed of a
silicon containing material, such as silicon (Si), the silicide
formed on the contact surfaces S1, S2 that are in direct contact
with the titanium liner layer 20 may be titanium silicide. It is
noted that titanium silicide is only one example of a metal
semiconductor alloy that may be present on the contact surfaces S1,
S2. It has been contemplated that other metals may be present in
the metal semiconductor alloy. For example, the metal semiconductor
alloy may comprise silicides with refractory metals (e.g., nickel,
platinum, or cobalt), rare-earth metals (e.g., erbium, dysprosium,
yttrium), and/or a different phase orientation, and/or a different
ternary form of silicides, and/or a combination thereof.
[0030] The titanium liner layer 20 can be composed of entirely of
titanium (Ti). For example, the titanium liner layer 20 may be 100
wt. % titanium. The titanium liner layer 20 is typically a
conformally deposited layer. The titanium liner layer 20 is
conformally deposited on at least the sidewalls of the trenches 16,
and the contact surfaces S1, S2 at the base of the trenches 16. In
the embodiment that is depicted in FIG. 2, the titanium liner layer
20 is also deposited atop the interlevel dielectric layer 15
between the trenches 16, i.e., openings through the interlevel
dielectric layer 15. The term "conformal" and "conformally
deposited" denotes a layer having a thickness that does not deviate
from greater than or less than 30% of an average value for the
thickness of the layer. In one embodiment, the thickness of the
titanium liner layer 20 may be less than 100 .ANG.. In another
embodiment, the thickness of the titanium liner layer 20 may range
from 10 .ANG. to 30 .ANG..
[0031] The titanium liner layer 20 may be deposited using a
deposition method, such as physical vapor deposition (PVD),
chemical vapor deposition (CVD) or atomic layer deposition. (ALD).
Examples of PVD suitable for forming the titanium liner layer 20
include plating, electroplating, electroless plating, sputtering
and combinations thereof. Examples of sputtering apparatus that may
be suitable for depositing the titanium liner layer 20 include DC
diode type systems, radio frequency (RF) sputtering, magnetron
sputtering and ionized metal plasma (IMP) sputtering.
[0032] As noted above, the titanium liner layer 20 when subjected
to an anneal process can form a metal semiconductor alloy with the
semiconductor material of the contact surface S1, S2 of the
semiconductor devices 50a, 50b.
[0033] FIG. 3 depicts one embodiment of depositing a ruthenium (Ru)
containing fill atop the titanium liner layer 20 that is depicted
in FIG. 2. It is noted that the ruthenium provides the majority of
the contact metal for the contact 200a. Other metals besides
ruthenium (Ru) or may be alloyed with ruthenium (Ru) at this stage
of the present disclosure. Some examples of metals may be alloyed
with or substituted for ruthenium (Ru) include rhodium (Rh),
iridium (Jr), osmium (Os), and molybdenum (Mo). These metals
provide a substitute for conventional tungsten (W), which typically
requires deposition using tungsten based precursors, such as
tungsten-hexafluoride, which typically also requires the use of a
thick titanium nitride (TiN) diffusion barrier. The use of the
thick titanium nitride (TiN) layer and tungsten (W) CVD deposition
disadvantageously limits the amount of contact metal that can be
deposited in the vias. The use of the titanium liner layer 20 and
metal fill 25 comprising ruthenium (Ru), rhodium (Rh), iridium
(Ir), osmium (Os), molybdenum (Mo), copper (Cu) or a combination
thereof overcomes the difficulties of the prior TiN/W contact by
allowing for complete fill of smaller trenches.
[0034] In some embodiments, the metal fill 25 comprising ruthenium
(Ru), rhodium (Rh), iridium (Ir), osmium (Os), molybdenum (Mo),
copper (Cu) or a combination thereof may be deposited using a
physical vapor deposition method. The use of the aforementioned
metals can allow for eliminating the need for halide based CVD
precursors by employing PVD deposition. PVD deposition methods
suitable for forming the metal fill 25 comprising ruthenium (Ru),
rhodium (Rh), iridium (Ir), osmium (Os), molybdenum (Mo), copper
(Cu) or a combination thereof may include plating, electroplating,
electroless plating, sputtering and combinations thereof. Examples
of sputtering apparatus that may be suitable for depositing the
titanium liner layer 20 include DC diode type systems, radio
frequency (RF) sputtering, magnetron sputtering, and ionized metal
plasma (IMP) sputtering. In some embodiments, the metal fill 25
comprising ruthenium (Ru), rhodium (Rh), iridium (Ir), osmium (Os),
molybdenum (Mo), copper (Cu) or a combination thereof may be
deposited using a PVD reflow method. In PVD reflow, and initial
layer of metallic material is first deposited using a process such
as sputtering, wherein after the initial deposition the deposited
material is heated to a softening point at which the material fill
the openings via capillary action. In some embodiments, after the
initial deposition of a conformal or super-conformal film via
sputter deposition, heating to a reflow point is conducted at which
surface diffusion helps the material flow into the via or trench
opening. In other examples, deposition of metal via sputter
deposition is performed at an elevated temperature at which surface
diffusion helps the material flow into the via or trench opening.
This process can be done on top of a reflow enhancement layer.
[0035] In some embodiment, the metal fill 25 comprising ruthenium
(Ru), rhodium (Rh), iridium (Jr), osmium (Os), molybdenum (Mo),
copper (Cu) or a combination thereof may fill the entirety of the
openings 16, and the metal fill 25 may be in direct contact with
the titanium liner layer 20 that is present directly on the
sidewalls of the openings 16 and the contact surfaces S1, S2 of the
source region 12 and drain region 13. In some embodiments, the
metal fill 25 is deposited to overfill the trenches 16 and extend
onto the upper surfaces of the interlevel dielectric layer 15 that
is present between the trenches 16, i.e., openings through the
interlevel dielectric layer 15.
[0036] FIG. 4 depicts planarizing the structure depicted in FIG. 3
so that the upper surface of the metal fill 25 is coplanar with the
upper surface of the interlevel dielectric layer 15. As depicted in
FIG. 4, the planarization process removes the portion of the metal
fill 25 comprising ruthenium (Ru), rhodium (Rh), iridium (Jr),
osmium (Os), molybdenum (Mo), copper (Cu) or a combination thereof
that is present overlying the interlevel dielectric layer 15. The
planarization process also removes the portion of the titanium
liner layer 20 that is present overlying the interlevel dielectric
layer 15 between trench structures 16. The planarization process
may be provided by chemical mechanical planarization (CMP).
[0037] The methods described above with reference to FIGS. 1-4 may
provide an electrical device 100 that includes at least one contact
surface S1, S2 and an interlevel dielectric layer 15 present atop
the electrical device 100, wherein the interlevel dielectric layer
15 includes at least one trench 16 to the at least one contact
surface S1 of the electrical device 100. In some embodiments, a
conformal titanium liner 20 is present on the sidewalls of the
trench 16 and is in direct contact with the at least one contact
surface S1, S2. A metal fill 25 comprising ruthenium (Ru), rhodium
(Rh), iridium (Jr), osmium (Os), molybdenum (Mo), copper (Cu) or a
combination thereof fills the at least one trench 16, and is in
direct contact with the conformal titanium liner 20.
[0038] As noted above, the titanium liner layer 20 may contribute
to silicidation of the contact surfaces S1, S2 of the semiconductor
devices 50a, 50b. Silicidation, i.e., metal and semiconductor
intermixing to form a metal semiconductor alloy, may include and
anneal process. The anneal process for silicidation may include
furnace e annealing, rapid thermal annealing, and/or laser
annealing, which can be conducted at any stage of the
aforementioned process flow.
[0039] FIG. 5 depicts another embodiment of the present disclosure,
in which a contact 200b is provided that is composed of a tantalum
(Ta) or tantalum nitride (TaN) diffusion barrier liner 30, a
ruthenium (Ru) liner 35 and a copper (Cu) fill material 40. The
contact 200b is present within a trench 16 through an interlevel
dielectric layer 15 to the contact surfaces S1, S2 of semiconductor
devices 50a, 50b that are present underlying the interlevel
dielectric layer 15. The semiconductor devices 50a, 50b, the
interlevel dielectric layer 15 and the openings 16 have been
described above with reference to FIG. 1. The tantalum (Ta) or
tantalum nitride (TaN) diffusion barrier liner 30 and the ruthenium
(Ru) liner 35 may be conformal layers.
[0040] In the embodiment that is depicted in FIG. 5, the metal of
the fill material that provides the contact metal is copper (Cu),
which when deposited using electrochemical copper plating methods
has better gap fill performance than tungsten (W) contacts that are
formed using chemical vapor deposition. In other examples, the
copper (Cu) fill material may be deposited using a copper reflow
method atop a ruthenium (Ru) liner 35, in which the ruthenium (Ru)
liner 35 provides for a copper fill enhancement. The tantalum (Ta)
or tantalum nitride (TaN) diffusion barrier liner 30 may function
as a barrier to the diffusion of copper from the copper (Cu) fill
material 40.
[0041] The method of forming the contact 200b depicted in FIG. 5
may begin with depositing a tantalum (Ta) or tantalum nitride (TaN)
diffusion barrier liner 30 on the sidewalls of the trench 16, as
well as the base of the trench 16 that is provided by the contact
surfaces S1, S2 of the semiconductor devices 50a, 50b. The tantalum
(Ta) or tantalum nitride (TaN) diffusion barrier liner 30 may be
blanket deposited top the structure depicted in FIG. 1, and similar
to the titanium liner layer 20 depicted in FIG. 2 can be a
conformal layer that is also formed on the upper surface of the
interlevel dielectric layer 15 between the trenches 16.
[0042] The tantalum (Ta) or tantalum nitride (TaN) diffusion
barrier liner 30 may be deposited using a physical vapor deposition
method, such as plating, electroplating, and sputtering. The
tantalum (Ta) or tantalum nitride (TaN) diffusion barrier liner 30
may also be formed using other deposition methods, such as atomic
layer deposition (ALD). The thickness of the tantalum (Ta) or
tantalum nitride (TaN) diffusion barrier liner 30 may range from 30
.ANG. to 50 .ANG.. In another embodiment, the thickness of the
tantalum (Ta) or tantalum nitride (TaN) diffusion barrier liner 30
may range from 10 .ANG. to 30 .ANG..
[0043] In this embodiment, silicidation of the contact surfaces S1,
S2 is not required to be aided by the metal being deposited in the
trenches 16 during the process sequence of forming the contacts
200b. Therefore, the tantalum (Ta) or tantalum nitride (TaN)
diffusion barrier liner 30 may be formed directly on top of the
contact surfaces S1, S2 of the semiconductor devices 50a, 50b. In
some embodiments, a metal semiconductor alloy, e.g., silicide, may
have been formed on the contact surfaces S1, S2 of the
semiconductor devices 50a, 50b before the tantalum (Ta) or tantalum
nitride (TaN) diffusion barrier liner 30 is deposited. Examples of
silicides suitable at this stage of the present disclosure include
titanium silicide, refractory metals (e.g., nickel, platinum, or
cobalt), rare-earth metals (e.g., erbium, dysprosium, yttrium),
and/or a different phase orientation, and/or a different ternary
form of silicides, and/or a combination thereof.
[0044] Following formation of the tantalum (Ta) or tantalum nitride
(TaN) diffusion barrier liner 30, a ruthenium (Ru) liner 35 (also
referred to as copper fill enhancing liner 30) may be deposited
within the trenches 16. The ruthenium (Ru) liner 35 may be employed
as a copper fill enhancement material layer or a copper reflow
enhancement material. The ruthenium (Ru) liner 35 may be composed
of 100 wt. % ruthenium (Ru). In other embodiments, the ruthenium
(Ru) liner 35 may also be composed of rhodium (Rh), iridium (Jr),
osmium (Os), molybdenum (Mo) and a combination thereof. In yet
other embodiments, the ruthenium (Ru) may be substituted with one
of rhodium (Rh), iridium (Jr), osmium (Os), and molybdenum (Mo).
The ruthenium (Ru) liner 35, as well as the above noted substitutes
for the Ru liner 35, may be referred to as a copper fill promoting
liner 35. It is noted that the above noted elements for the copper
fill promoting liner 35 are provided for illustrative purposes
only, and are not intended to limit the present disclosure, as
other metals can be equally suitable.
[0045] The ruthenium (Ru) liner 35 may be deposited using a
physical vapor deposition method, such as plating, electroplating,
and sputtering. The ruthenium (Ru) liner 35 may also be formed
using other deposition methods, such as atomic layer deposition
(ALD). The thickness of the ruthenium (Ru) liner 35 may range from
30 .ANG. to 50 .ANG.. In another embodiment, the ruthenium (Ru)
liner 35 may range from 10 .ANG. to 30 .ANG.. The ruthenium (Ru)
liner layer 35 may be a conformally deposited layer.
[0046] Following deposition of the ruthenium (Ru) liner 35, the
trenches 16 may be filled with a copper (Cu) fill material 40. The
copper (Cu) fill material 40 may comprise 100 wt. % copper. The
copper (Cu) fill material 40 may be deposited using a physical
vapor deposition method. For example, the copper (Cu) fill material
may be deposited using plating, electroplating, electroless
deposition, copper reflow processing or a combination thereof.
Copper reflow is a PVD deposition process, in which an initial
layer of copper (Cu) is first deposited using a process such as
plating or sputtering, wherein after the initial deposition the
deposited material is heated to a softening point at which the
material fill the openings via capillary action.
[0047] Following deposition of the copper (Cu) fill material 40,
the structure may be planarized to provide that the upper surface
of the copper (Cu) fill material 40 is coplanar with the upper
surface of the interlevel dielectric layer 15, as depicted in FIG.
5. The planarization process may also remove the portions of the
ruthenium (Ru) liner 35 and the tantalum (Ta) or tantalum nitride
(TaN) diffusion barrier liner 30 from the upper surface of the
interlevel dielectric layer 15. The planarization process may
include chemical mechanical planarization (CMP).
[0048] FIG. 6 depicts another embodiment of the present disclosure,
in which a contact 200c is composed of a titanium liner layer 45
for silicidation of an underlying structure, a tantalum (Ta) or
tantalum nitride (TaN) diffusion barrier 30, a ruthenium liner (Ru)
35 (also referred to as copper fill promoting layer 35) and a
copper (Cu) fill material 40. The contact 200c that is depicted in
FIG. 6 is formed in trenches 16 through an interlevel dielectric 15
that extend to semiconductor devices 50a, 50b. The trenches 16,
interlevel dielectric 15 and the semiconductor devices 50, 50b have
been described above with reference to FIG. 1.
[0049] The titanium liner layer 45 that is depicted in FIG. 6 is
similar to the titanium liner layer 20 that is described above with
reference to FIG. 2. Therefore, the above description of the
titanium liner layer 20 that is provided with reference to FIG. 2
is equally applicable for describing at least one embodiment of the
titanium liner layer 45 that is depicted in FIG. 6. As noted above,
the titanium liner layer 45 may provide a metal that can contribute
to the formation of a metal semiconductor alloy with the contact
surfaces S1, S2 of the semiconductor devices 50a, 50b. For example,
the metal semiconductor alloy that is formed using the titanium
liner layer 45 may be a silicide, e.g., titanium silicide. An
anneal process for interdiffusing the metal from the titanium liner
layer and a semiconductor element from the contact surfaces S1, S2
of the semiconductor devices may be executed at this stage of the
present disclosure or following the formation of any of the
tantalum (Ta) or tantalum nitride (TaN) diffusion barrier 30, the
ruthenium liner (Ru) 35 or the copper (Cu) fill material 40.
[0050] The tantalum (Ta) or tantalum nitride (TaN) diffusion
barrier 30 that is depicted in FIG. 6 is similar to the tantalum
(Ta) or tantalum nitride (TaN) diffusion barrier 30 that is
described above with reference to FIG. 5. Therefore, the above
description of the tantalum (Ta) or tantalum nitride (TaN)
diffusion barrier 30 that is described with reference to FIG. 5 is
equally applicable for describing at least one embodiment of the
tantalum (Ta) or tantalum nitride (TaN) diffusion barrier 30 that
is depicted in FIG. 6. For example, the thickness of the tantalum
(Ta) or tantalum nitride (TaN) diffusion barrier liner 30 may range
from 30 .ANG. to 50 .ANG.. In another embodiment, the thickness of
the tantalum (Ta) or tantalum nitride (TaN) diffusion barrier liner
30 may range from 10 .ANG. to 30 .ANG..
[0051] The ruthenium liner (Ru) 35 that is depicted in FIG. 6 is
similar to the ruthenium liner (Ru) 35 hat is described above with
reference to FIG. 5. Therefore, the above description of the
ruthenium liner (Ru) 35 that is described with reference to FIG. 5
is equally applicable for describing at least one embodiment of the
ruthenium liner (Ru) 35 that is depicted in FIG. 6. For example,
the ruthenium (Ru) liner 35 may be employed as a copper fill
enhancement material layer or a copper reflow enhancement material.
The ruthenium (Ru) liner 35 may be composed of 100 wt. % ruthenium
(Ru). In other embodiments, the ruthenium (Ru) liner 35 may also be
composed of rhodium (Rh), iridium (Ir), osmium (Os), molybdenum
(Mo) and a combination thereof. In yet other embodiments, the
ruthenium (Ru) may be substituted with one of rhodium (Rh), iridium
(Ir), osmium (Os), and molybdenum (Mo). The ruthenium (Ru) liner 35
may be deposited using a physical vapor deposition method, such as
plating, electroplating, and sputtering. The ruthenium (Ru) liner
35 may also be formed using other deposition methods, such as
atomic layer deposition (ALD). The thickness of the ruthenium (Ru)
liner 35 may range from 30 .ANG. to 50 .ANG.. In another
embodiment, the ruthenium (Ru) liner 35 may range from 10 .ANG. to
30 .ANG..
[0052] Referring to FIG. 6, following deposition of the ruthenium
(Ru) liner 35, the trenches 16 may be filled with a copper (Cu)
fill material 40. The copper (Cu) fill material 40 may comprise 100
wt. % copper. The copper (Cu) fill material 40 may be deposited
using a physical vapor deposition method. For example, the copper
(Cu) fill material 40 may be deposited using plating,
electroplating, electroless deposition, copper reflow processing or
a combination thereof. Copper reflow is a PVD deposition process,
in which an initial layer of copper (Cu) is first deposited using a
process such as plating or sputtering, wherein after the initial
deposition the deposited material is heated to a softening point at
which the material fill the openings via capillary action. A
planarization process, such as CMP, may remove the portions of the
copper (Cu) fill material 40, the tantalum (Ta) or tantalum nitride
(TaN) diffusion barrier liner 30, and the ruthenium (Ru) liner 35
that is present on the interlevel dielectric layer 15 between
trenches 16, as described above with reference to FIG. 5.
[0053] The above noted contacts are low resistance contacts. As
used herein, the term low resistance denotes a resistivity for the
contacts having an average area of approximately 700 nm.sup.2 of 45
micro ohms per cm or less. In some embodiments, the resistivity for
the contacts 200a, 200b, 200c that are described above with
reference to FIGS. 1-6, is 40 micro ohms per cm or less, in which
the contacts have an average area of approximately 700
nm.sup.2.
[0054] The methods and structures that have been described above
with reference to FIGS. 1-7 may be employed in any electrical
device including integrated circuit chips. The integrated circuit
chips including the disclosed structures and formed using the
disclosed methods may be integrated with other chips, discrete
circuit elements, and/or other signal processing devices as part of
either (a) an intermediate product, such as a motherboard, or (b)
an end product. The end product can be any product that includes
integrated circuit chips, including computer products or devices
having a display, a keyboard or other input device, and a central
processor.
[0055] While the methods and structures of the present disclosure
have been particularly shown and described with respect to
preferred embodiments thereof, it will be understood by those
skilled in the art that the foregoing and other changes in forms
and details may be made without departing from the spirit and scope
of the present disclosure. It is therefore intended that the
present disclosure not be limited to the exact forms and details
described and illustrated, but fall within the scope of the
appended claims.
* * * * *