U.S. patent application number 15/291871 was filed with the patent office on 2018-04-12 for select transistors with tight threshold voltage in 3d memory.
This patent application is currently assigned to SanDisk Technologies LLC. The applicant listed for this patent is SanDisk Technologies LLC. Invention is credited to Yingda Dong, Jayavel Pachamuthu, Liang Pang.
Application Number | 20180102375 15/291871 |
Document ID | / |
Family ID | 59923571 |
Filed Date | 2018-04-12 |
United States Patent
Application |
20180102375 |
Kind Code |
A1 |
Pang; Liang ; et
al. |
April 12, 2018 |
SELECT TRANSISTORS WITH TIGHT THRESHOLD VOLTAGE IN 3D MEMORY
Abstract
Disclosed herein is a 3D memory with a select transistor, and
method for fabricating the same. The select transistor may have a
conductive floating gate, a conductive control gate, a first
dielectric between the conductive floating gate and the conductive
control gate, and a second dielectric between a body and the
conductive floating gate. In one aspect, a uniform gate dielectric
is formed using lateral epitaxial growth in a recess adjacent a
crystalline semiconductor select transistor body, followed by
forming the gate dielectric from the epitaxial growth. Techniques
help to prevent, or at least reduce, a leakage current between the
select transistor control gate and the select transistor body
and/or the semiconductor substrate below the select transistor.
Therefore, select transistors having a substantially uniform
threshold voltage, on current, and S-factor are achieved. Also,
select transistors have a high on-current and a steep sub-threshold
slope.
Inventors: |
Pang; Liang; (Fremont,
CA) ; Pachamuthu; Jayavel; (San Jose, CA) ;
Dong; Yingda; (San Jose, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SanDisk Technologies LLC |
Plano |
TX |
US |
|
|
Assignee: |
SanDisk Technologies LLC
Plano
TX
|
Family ID: |
59923571 |
Appl. No.: |
15/291871 |
Filed: |
October 12, 2016 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 27/11556 20130101;
H01L 27/11565 20130101; H01L 21/0262 20130101; H01L 27/11519
20130101; H01L 27/11582 20130101; H01L 29/40114 20190801; H01L
29/40117 20190801; H01L 27/11553 20130101; H01L 27/11524 20130101;
H01L 27/1157 20130101; H01L 21/02532 20130101; H01L 27/1158
20130101; H01L 29/66825 20130101; H01L 29/66833 20130101 |
International
Class: |
H01L 27/115 20060101
H01L027/115; H01L 29/66 20060101 H01L029/66; H01L 21/02 20060101
H01L021/02; H01L 21/28 20060101 H01L021/28 |
Claims
1. An apparatus, comprising: a semiconductor substrate having a
major surface; a select transistor comprising: a body formed from a
solid pillar of semiconductor in contact with the semiconductor
substrate; a conductive floating gate that is completely surrounded
by insulators in direct contact with the conductive floating gate;
a conductive control gate; a first dielectric between the
conductive floating gate and the conductive control gate; and a
second dielectric between the body and the conductive floating
gate; and a string of memory cells that extends vertically with
respect to the major surface of the semiconductor substrate, the
string having a string channel, wherein the solid pillar of
semiconductor of the select transistor is in contact with the
string channel.
2. The apparatus of claim 1, wherein the conductive floating gate
surrounds the solid pillar of semiconductor.
3. The apparatus of claim 1, wherein the conductive floating gate
comprises polysilicon.
4. The apparatus of claim 1, wherein the conductive floating gate
comprises metal.
5. The apparatus of claim 1, wherein the solid pillar of
semiconductor is single crystalline silicon.
6. The apparatus of claim 1, wherein the memory cells each comprise
a dielectric charge storage region.
7. The apparatus of claim 1, further comprising a common source
line, wherein the string of memory cells is a NAND string, the
select transistor is a source side select transistor configured to
connect one end of the NAND string to the common source line.
8. A method of fabricating a 3D memory array, comprising: forming a
select transistor adjacent to a semiconductor substrate having a
major surface, forming the select transistor comprising: forming a
solid pillar of semiconductor in contact with the semiconductor
substrate, the solid pillar being a body of the select transistor;
forming a gate dielectric adjacent the solid pillar of
semiconductor; forming a conductive floating gate adjacent the gate
dielectric, wherein the gate dielectric is between the between the
body and the conductive floating gate; forming an inter-gate
dielectric adjacent the conductive floating gate; forming a
conductive control gate adjacent the inter-gate dielectric, wherein
the inter-gate dielectric is between the conductive floating gate
and the conductive control gate, wherein the conductive floating
gate is completely surrounded by insulators in direct contact with
the conductive floating gate; and forming a string of memory cells
that extends vertically with respect to the major surface of the
semiconductor substrate, comprising forming a string channel in
contact with the solid pillar of semiconductor of the select
transistor.
9. The method of claim 8, wherein forming the conductive floating
gate comprises forming conductive floating surrounding the solid
pillar of semiconductor.
10. The method of claim 9, wherein forming the solid pillar of
semiconductor in contact with the semiconductor substrate and
forming the gate dielectric adjacent the solid pillar of
semiconductor comprises: epitaxially growing a crystalline
semiconductor in contact with the semiconductor substrate; and
oxidizing the epitaxially grown crystalline semiconductor to form
the gate dielectric from oxidized crystalline semiconductor, the
solid pillar of semiconductor is formed from remaining oxidized
epitaxially grown crystalline semiconductor.
11. The method of claim 9, further comprising: forming a plurality
of alternating layers of insulator material and sacrificial
material above the semiconductor substrate; forming an opening
through the alternating layers of the insulator material and the
sacrificial material to the semiconductor substrate, wherein
forming the solid pillar of semiconductor in contact with the
semiconductor substrate comprises epitaxially growing crystalline
semiconductor on the semiconductor substrate; removing a layer of
the sacrificial material to expose a sidewall of the epitaxially
grown crystalline semiconductor, removing the layer leaves a
recess; and forming the conductive floating gate in the recess.
12. The method of claim 11, wherein forming the string of memory
cells comprises forming a dielectric film in the opening, the
dielectric film is configured as charge storage regions of the
memory cells.
13. The method of claim 8, wherein the solid pillar of
semiconductor is single crystal silicon.
14. The method of claim 8, wherein forming the conductive floating
gate comprises forming the conductive floating gate from
polysilicon.
15. The method of claim 8, wherein forming the conductive floating
gate comprises forming the conductive floating gate from metal.
16. The method of claim 8, wherein forming the string of memory
cells comprises forming a NAND string.
17.-20. (canceled)
21. A non-volatile memory system, comprising: a semiconductor
substrate having a major surface; a string select transistor
comprising: a body formed from a solid pillar of semiconductor in
contact with the semiconductor substrate; a conductive control
gate; a conductive floating gate; an inter-gate dielectric that
provides electrical isolation between the conductive floating gate
and the conductive control gate; and a gate dielectric that
provides electrical isolation between the body and the conductive
floating gate; and a NAND string of memory cells that extends
vertically with respect to the major surface of the semiconductor
substrate, the NAND string having a NAND string channel, wherein
the solid pillar of semiconductor of the string select transistor
is in contact with the NAND string channel.
22. (canceled)
23. The non-volatile memory system of claim 21, wherein the memory
cells of the NAND string each comprise a dielectric charge storage
region.
24. The non-volatile memory system of claim 21, further comprising
a common source line, wherein the string select transistor is a
source side select transistor configured to connect one end of the
NAND string to the common source line.
Description
BACKGROUND
[0001] The present technology relates to non-volatile memory.
[0002] Recently, ultra high density storage devices have been
proposed using a 3D stacked memory structure having strings of
memory cells. One such storage device is sometimes referred to as a
Bit Cost Scalable (BiCS) architecture. For example, a 3D NAND
stacked memory device can be formed from an array of alternating
conductor and insulator layers. In one technique, a memory hole is
drilled in the layers to define many memory layers simultaneously.
A NAND string is then formed by filling the memory hole with
appropriate materials. Control gates of the memory cells are
provided by the conductor layers. Select gates are formed at either
end of the memory hole.
BRIEF DESCRIPTION OF THE DRAWINGS
[0003] Like-numbered elements refer to common components in the
different figures.
[0004] FIG. 1A shows a possible threshold voltage distribution of
select transistors having a main lobe, and a hump lobe.
[0005] FIG. 1B shows a threshold voltage distribution of one
embodiment of select transistors.
[0006] FIG. 1C depicts possible on current for select transistors
to help illustrate a possible problem with select transistors in 3D
memory.
[0007] FIG. 1D shows possible curves for the subthreshold swing
(S-factor) for select transistors to help illustrate a possible
problem with select transistors in 3D memory.
[0008] FIG. 1E shows possible curves for the select transistor on
current at a reference voltage to help illustrate a possible
problem with select transistors in 3D memory.
[0009] FIG. 2A is a circuit representation of one embodiment of a
NAND string.
[0010] FIG. 2B is a circuit representation of one embodiment of a
NAND string in which a select gate has a floating gate.
[0011] FIG. 2C is a perspective view of a 3D stacked non-volatile
memory device.
[0012] FIG. 3 is a perspective view of a portion of a three
dimensional monolithic memory structure.
[0013] FIG. 4A is a block diagram explaining one example
organization of memory structure.
[0014] FIG. 4B depicts a plurality of circles that represent the
vertical columns.
[0015] FIG. 4C depicts a portion of an embodiment of three
dimensional memory structure showing a cross-sectional view along
line AA of FIG. 4B.
[0016] FIG. 5A depicts a close-up view of one embodiment of region
467 of FIG. 4C.
[0017] FIG. 5B depicts a cross-sectional view of the column 432 of
FIG. 5A along line 509.
[0018] FIG. 5C depicts a close-up view of another embodiment of
region 467 of FIG. 4C.
[0019] FIG. 5D depicts a cross-sectional view of the column 432 of
FIG. 5C along line 519.
[0020] FIG. 6A depicts a cross sectional view of region 429 of FIG.
4C that includes a portion of vertical column 432.
[0021] FIG. 6B depicts a cross-sectional view of the column 432 of
FIG. 6A along line 609.
[0022] FIG. 7A shows electrical connections between of one
embodiment the NAND strings and a bit line and a local source
line.
[0023] FIG. 7B shows electrical connections between of another
embodiment the NAND strings and a bit line and a local source
line.
[0024] FIG. 8 is a flowchart of one embodiment of a process of
fabricating a 3D memory array in which a select transistor has a
floating gate.
[0025] FIG. 9 is a flowchart of one embodiment of a process of
fabricating a 3D memory array in which a select transistor has a
floating gate.
[0026] FIGS. 10A-10K depict results after embodiments of various
steps of process 900.
[0027] FIG. 11 is a flowchart of one embodiment of a process of
fabricating a 3D memory array.
[0028] FIGS. 12A-12F depict results after embodiments of various
steps of process 1100.
DETAILED DESCRIPTION
[0029] Disclosed herein is a 3D memory with a select transistor,
and method for fabricating the same. The select transistor is a
source side select transistor for vertically oriented NAND strings,
in one embodiment. The threshold voltage of the source side select
transistor can be impacted by variations in the 3D memory
fabrication process. FIG. 1A shows a possible threshold voltage
distribution of select transistors having a main lobe 2, and a hump
lobe 4, to illustrate a possible problem. The main lobe 2
represents select transistors having a normal threshold voltage.
The hump lobe 4 represents select transistors whose threshold
voltage is higher than normal (or at least appears to be higher
than normal).
[0030] Embodiments disclosed herein include select transistors in
3D memory having a tight range of threshold voltages, and methods
of forming the same. FIG. 1B shows a threshold voltage distribution
of one embodiment of select transistors. The threshold voltage
distribution 6 is more compact than the one in FIG. 1A. That is,
the threshold voltage range is more narrow than the one in FIG. 1A.
For example, there is not a hump lobe 4 in the threshold voltage
distribution 6 in the embodiment of FIG. 1B. In other words, there
is not a significant number of transistors having an abnormally
high threshold voltage.
[0031] The variance in threshold voltages may result in a variance
in on current of the select transistors. FIG. 1C depicts possible
on current for select transistors to help illustrate a possible
problem with select transistors in 3D memory. Curve 12 is for a
select transistor having a normal threshold voltage (corresponding
to the main lobe 2 in FIG. 1A). Curve 14 is for a select transistor
having an abnormally high threshold voltage (corresponding to the
hump lobe 4 in FIG. 1A). This difference in on current of the
select transistor can negatively impact memory cell operations such
as erase, program, and read. Embodiments disclosed herein provide
for select transistors in 3D memory, and methods of forming select
transistors in a 3D memory, having good uniformity of on current.
For example, the on current of a group of select transistors may be
close to curve 12, without a significant number of select
transistors having an on current similar to curve 14.
[0032] Problems during fabrication can also result in variance of
other parameters of select transistors. FIG. 1D shows possible
curves for the subthreshold swing (S-factor) for select transistors
to help illustrate a possible problem with select transistors in 3D
memory. Curve 32 is a curve of the S-factor for the transistor with
the normal threshold voltage. Curve 34 is a curve of the S-factor
for the transistor with the abnormally high threshold voltage. The
S-factor is the inverse of the subthreshold slope. A steep
subthreshold slope exhibits a faster transition between off (low
current) and on (high current) states, which may be desirable.
Embodiments disclosed herein include select transistors in 3D
memory, and methods of forming select transistors in a 3D memory,
having good uniformity in S-factor. Embodiments disclosed herein
include select transistors in 3D memory, and methods of forming
select transistors in a 3D memory, having a steep subthreshold
slope.
[0033] FIG. 1E shows possible curves for the select transistor on
current at a reference voltage to help illustrate a possible
problem with select transistors in 3D memory. The reference voltage
might be near a voltage that is typically applied to the control
gate of the select transistors during operation to place the select
transistor into a conductive state. Curve 42 is a curve of the on
current for the transistors with the normal threshold voltage 2 of
FIG. 1A. Curve 44 is a curve of the on current for the transistors
with the abnormally high threshold voltage 4 of FIG. 1A. It may be
desirable to have a higher on current. Embodiments disclosed herein
include select transistors in 3D memory, and methods of forming
select transistors in a 3D memory, with a relatively high on
current.
[0034] A possible reason why some of the select transistors may
have an abnormally high threshold voltage (as well as the lower on
current, and higher S-factor) is due to a leakage current between a
control gate of the select transistor and a body of the select
transistor. A leakage current between the control gate of the
select transistor and a semiconductor substrate below the select
transistor could also cause the aforementioned problems. The
leakage current may be due, at least in part, to non-uniformities
in thickness of a gate dielectric of the select transistor. For
example, if the gate dielectric is significantly thinner than
targeted, there could be current leakage when a voltage is applied
to the control gate. The leakage current may be due, at least in
part, to non-uniformities in thickness of a blocking oxide layer
between the transistor control gate and body. The leakage current
may be due, at least in part, to non-uniformities in thickness of a
barrier layer between the control gate and body. Thus, a leakage
current could occur due to various factors. The blocking oxide
layer and barrier layer will be further discussed with respect to
FIG. 5A. This current leakage may result in an increase in select
transistor threshold voltage. Note that the increase in threshold
voltage of the select transistor may be an apparent increase in
threshold voltage, as a result of the leakage current. The current
leakage could also manifest as a lower on current, as well as a
lower S-factor.
[0035] One embodiment disclosed herein includes a method for
fabricating a uniformly thick gate dielectric for the select
transistor in 3D memory. This helps to prevent, or at least reduce,
a leakage current between the select transistor control gate and
the select transistor body. This may also help to prevent, or at
least reduce, a leakage current between the select transistor
control gate and the semiconductor substrate below the select
transistor. Therefore, this embodiment provides for a group of
select transistors having a substantially uniform threshold
voltage, substantially uniform on current, as well as a
substantially uniform S-factor. Also, this embodiment of select
transistors may have a high on-current and a steep sub-threshold
slope.
[0036] In one embodiment, a uniformly thick gate dielectric for the
select transistor is formed as follows. Alternating layers of
insulator material and sacrificial material are formed above a
semiconductor substrate. An opening is formed through the
alternating layers of the insulator material and the sacrificial
material to the semiconductor substrate. A pillar of crystalline
semiconductor is formed in a bottom of the opening in contact with
the semiconductor substrate. This pillar may serve as the body of
the select transistor. A layer of the sacrificial material is
removed to form a recess that exposes a sidewall of the pillar of
crystalline semiconductor. Crystalline semiconductor is formed in
the recess on the sidewall of the pillar of crystalline
semiconductor. The crystalline semiconductor that is formed in the
recess is oxidized. This crystalline semiconductor may serve as a
gate dielectric of the select transistor. A conductor is formed in
the recess adjacent to the oxidized crystalline semiconductor. The
conductor may serve as the control gate of the select transistor. A
memory cell film is formed in the opening above the crystalline
semiconductor. By oxidizing the crystalline semiconductor that is
formed in the recess, the gate dielectric has good uniformity. This
may prevent, or at least reduce, leakage current between the
control gate and the body of the select transistor. This may also
prevent, or at least reduce, leakage current between the control
gate and the semiconductor substrate. Therefore, this embodiment
provides for a group of select transistors having a substantially
uniform threshold voltage, substantially uniform on current, as
well as a substantially uniform S-factor. Also, this embodiment of
select transistors may have a high on-current and a steep
sub-threshold slope.
[0037] One embodiment includes an apparatus comprising a
semiconductor substrate having a major surface, a select
transistor, and a string of memory cells that extends vertically
with respect to the major surface of the semiconductor substrate.
The select transistor has a body formed from a solid pillar of
semiconductor in contact with the semiconductor substrate. The
select transistor also has a conductive floating gate, a conductive
control gate, a first dielectric between the conductive floating
gate and the conductive control gate, and a second dielectric
between the body and the conductive floating gate. The string of
memory cells has a string channel, wherein the body of the select
transistor is in contact with the string channel. Likewise, the
conductive floating gate may help to prevent, or at least reduce,
leakage current between the control gate and the semiconductor
substrate. The conductive floating gate may help to prevent, or at
least reduce, leakage current between the control gate and the body
of the select transistor. Therefore, this embodiment provides for a
group of select transistors having a substantially uniform
threshold voltage, substantially uniform on current, as well as a
substantially uniform S-factor. Also, this embodiment of select
transistors may have a high on-current and a steep sub-threshold
slope.
[0038] As used herein, when an element, component or layer for
example is described as being "on," "connected to," "coupled with,"
or "in contact with" another element, component or layer, it can be
directly on, directly connected to, directly coupled with, in
direct contact with, or intervening elements, components or layers
may be on, connected, coupled or in contact with the particular
element, component or layer, for example. When an element,
component or layer for example is referred to as begin "directly
on", "directly connected to", "directly coupled with", or "directly
in contact with" another element, there are no intervening
elements, components or layers for example.
[0039] A semiconductor region (e.g., substrate or film) may be
roughly classified as crystalline or amorphous. An amorphous
semiconductor region has disordered atomic arrangement and no
crystalline component. An example is a semiconductor region in
which no crystal part exists even in a microscopic region.
Crystalline semiconductor regions include single-crystal and
non-single-crystal semiconductor regions. A non-single crystal
semiconductor region can be crystalline to a different degree. For
instance, a poly-crystalline semiconductor region is comprised of
"grains". Within each grain, the material is in the crystalline
phase. That is, within each grain, the crystalline structure is
oriented in the same way. However, in different grains, the crystal
orientation may be different.
[0040] One example of a non-volatile storage system that can
implement the technology described herein is a flash memory system
that uses the NAND structure, which includes arranging multiple
memory cell transistors in series, sandwiched between two select
transistors. The memory cell transistors in series and the select
transistors are referred to as a NAND string. FIG. 2A is a circuit
representation of a NAND string. The NAND string depicted in FIG.
2A includes four memory cell transistors 100, 102, 104 and 106 in
series and sandwiched between (drain side) select transistor 120
and (source side) select transistor 122. Select transistor 120
connects the NAND string to a bit line 111. Select transistor 122
connects the NAND string to source line 128. The source line 128
may contact the crystalline silicon substrate at a different
locations from the select transistor 122.
[0041] Select transistor 120 is controlled by applying the
appropriate voltages to select line SGD. The select line (SGD) is
connected to a control gate terminal 120CG of the select transistor
120. Select transistor 122 is controlled by applying the
appropriate voltages to select line SGS. The select line (SGS) is
connected to a control gate terminal 122CG of the select transistor
122. Note that there may be more than one select transistor at each
end of the NAND string, which work together as a switch to
connect/disconnect the NAND string to and from the bit line and
source line. For example, there may be multiple select transistors
in series at each end of the NAND string.
[0042] Each of the memory cell transistors 100, 102, 104 and 106
has a control gate (CG) and a charge storage region (CSR). For
example, memory cell transistor 100 has control gate 100CG charge
storage region 1600CSR. Memory cell transistor 102 includes control
gate 102CG and a charge storage region 102CSR. Memory cell
transistor 104 includes control gate 104CG and charge storage
region 104CSR. Memory cell transistor 106 includes a control gate
106CG and a charge storage region 106CSR. Control gate 100CG is
connected to word line WL3, control gate 102CG is connected to word
line WL2, control gate 104CG is connected to word line WL1, and
control gate 106CG is connected to word line WL0.
[0043] Note that although FIG. 2A shows four memory cells in the
NAND string, the use of four memory cells is only provided as an
example. A NAND string can have fewer than four memory cells or
more than four memory cells. The discussion herein is not limited
to any particular number of memory cells in a NAND string. One
embodiment uses NAND strings with some memory cells are used to
store data and one or more of the memory cells are referred to as
dummy memory cells because they do not store data.
[0044] A typical architecture for a flash memory system using a
NAND structure will include many NAND strings. Each NAND string may
be connected to the common source line by its source select
transistor controlled by select line SGS and connected to its
associated bit line by its drain select transistor controlled by
select line SGD. Bit lines may be shared with multiple NAND
strings. The bit line may be connected to a sense amplifier.
[0045] The charge storage region (CSR) may utilize a non-conductive
dielectric material to store charge in a non-volatile manner. In
one embodiment, a triple layer dielectric formed of
oxide-nitride-oxide ("ONO") is sandwiched between a conductive
control gate and the memory cell channel. As one example, the ONO
is silicon oxide, silicon nitride and silicon oxide. As another
example, the ONO may be Al.sub.2O.sub.3--SiN--SiO.sub.2. In the
direction from the control gate toward the NAND channel, the first
oxide (e.g., Al.sub.2O.sub.3) forms at least a portion of a
blocking layer, which blocks un-desirable tunneling of electrons
from CSR to control gate or from control gate to CSR. The silicon
nitride is a charge trapping layer or charge storage region (CSR),
in one embodiment. The second oxide (e.g., SiO.sub.2) is tunneling
dielectric through which electron can tunnel from the channel to
the CSR during programming. The blocking layer can be a stack of
dielectrics, e.g. Al.sub.2O.sub.3--SiO.sub.2 in the direction from
control gate toward the NAND channel, in one embodiment. The
tunneling layer can be a stack of different dielectric films, e.g.
SiO.sub.2--SiN--SiO.sub.2, in one embodiment. The cell is
programmed by injecting electrons from the cell channel (or NAND
string channel) into the nitride, where they are trapped and stored
in a limited region. This stored charge then changes the threshold
voltage of the cell in a manner that is detectable. The cell may be
erased by injecting holes into the nitride. Cells may be erased by
injecting holes into the nitride where they recombine with
electrons, and thereby "cancel" or reduce the stored charge. Cells
may be also erased by extracting electrons from the nitride, e.g.,
by applying an electric field making electrons tunnel from nitride
to the channel. Cells may be erased by both these mechanisms
combined.
[0046] Numerous types of materials can be used for the charge
storage regions (CSR). In one embodiment, the charge storage
regions are conductive floating gates. As one example, the
conductive floating gate is formed from polysilicon. This may be
heavily doped polysilicon. Other types of non-volatile memory
technologies can also be used.
[0047] FIG. 2B depicts one embodiment of a NAND string having a
source side select transistor with a floating gate 518. The
floating gate 518 may be formed from a variety of conductive
materials including, but not limited to, polysilicon or metal. The
polysilicon may be heavily doped to increase conductivity. The
floating gate is separated from the body of the select transistor
122 by a gate dielectric. A dielectric may separate the floating
gate 518 from the control gate 122CG. The select transistor may be
controlled by applying a suitable voltage to the control gate
122CG. Note that the floating gate 518 is typically not used to
store information as might be the case with a floating gate memory
cell. The presence of the floating gate 518 can help achieve more
uniform properties (e.g., threshold voltage, on current, S-factor)
in source side select transistors in 3D memory. The presence of the
floating gate 518 can help achieve a stronger on current, as well
as a lower S-factor, in source side select transistors in 3D
memory.
[0048] FIG. 2C is a perspective view of a 3D stacked non-volatile
memory device. The 3D memory device 200 includes a substrate 201.
In one embodiment, the substrate 201 is formed from silicon. Thus,
the substrate 201 may be a semiconductor substrate. In some
embodiments, the substrate 201 is crystalline silicon. In some
embodiments, the substrate 201 is single crystal silicon. The
substrate 201 may be a semiconductor wafer. The substrate 201 has a
major surface that extends in the x-y plane. On the substrate are
example blocks BLK0 and BLK1 of memory cells and a peripheral area
206 with circuitry for use by the blocks. The substrate 201 can
also carry circuitry under the blocks, along with one or more lower
metal layers which are patterned in conductive paths to carry
signals of the circuitry. The blocks are formed in an intermediate
region 202 of the memory device. The circuitry associated with
operation of the memory cells may be above or within the substrate
201. In one embodiment, the non-volatile memory device is
monolithically formed in one or more physical levels of arrays of
memory cells having an active area disposed above the substrate
201.
[0049] In an upper region 203 of the memory device, one or more
upper metal layers are patterned in conductive paths to carry
signals of the circuitry. Each block comprises a stacked area of
memory cells, where alternating levels of the stack represent word
lines. In one possible approach, each block has opposing tiered
sides from which vertical contacts extend upward to an upper metal
layer to form connections to conductive paths. An x-y-z coordinate
system is depicted, showing a y-direction (or bit line (BL)
direction), an x-direction (or word line (WL) direction), as well
as a z-direction. While two blocks are depicted as an example,
additional blocks can be used, extending in the x- and/or
y-directions.
[0050] In one possible approach, the length of the plane, in the
x-direction, represents a direction in which signal paths to word
lines extend in the one or more upper metal layers, and the width
of the plane, in the y-direction, represents a direction in which
signal paths to bit lines extend in the one or more upper metal
layers. The z-direction represents a height of the memory
device.
[0051] FIG. 3 is a perspective view of a portion of a three
dimensional monolithic memory structure 350, which includes a
plurality memory cells. For example, FIG. 3 shows a portion of one
block of memory. For example purposes, one of the dielectric layers
is marked as D and one of the conductive layers (also called word
line layers) is marked as W. The number of alternating dielectric
layers and conductive layers can vary based on specific
implementation requirements. One set of embodiments includes
between 108-216 alternating dielectric layers and conductive
layers, for example, 96 data word line layers, 8 select layers, 4
dummy word line layers and 108 dielectric layers. More or fewer
than 108-216 layers can also be used. The alternating dielectric
layers and conductive layers are divided into "fingers" by local
source lines 344. Note that the local source lines 344 may also be
referred to as local interconnects LI. FIG. 3 only shows two
fingers and two local interconnects LI. The local source lines 344
are conductive elements. Below and the alternating dielectric
layers and word line layers is a substrate 201. Each local source
line 344 is in electrical contact with an n+ diffusion region of
the substrate 201, in one embodiment. Note that the local source
lines 344 each have a major plane that extends in the x-z plane. In
some embodiments, substrate 201 is single crystal silicon.
[0052] Memory holes are formed in the stack of alternating
dielectric layers and conductive layers. For example, one of the
memory holes is marked as MH. Note that in FIG. 3, the dielectric
layers are depicted as see-through so that the reader can see the
memory holes positioned in the stack of alternating dielectric
layers and conductive layers. In one embodiment, NAND strings are
formed by filling the memory hole with materials including a
charge-trapping layer to create a vertical column of memory cells.
Each memory cell can store one or more bits of data.
[0053] The end of the MEI that is connected to the substrate 201 is
used for the body of the source side select transistor, in some
embodiments. The source side select transistor may be used to
connect/disconnect the string of memory cells to/from the local
source lines 344.
[0054] FIG. 4A is a block diagram explaining one example
organization of memory structure 350, which is divided into two
planes 302 and 304. Each plane is then divided into M blocks. In
one example, each plane has about 2000 blocks. However, different
numbers of blocks and planes can also be used. In one embodiment,
for two plane memory, the block IDs are usually such that even
blocks belong to one plane and odd blocks belong to another plane;
therefore, plane 302 includes block 0, 2, 4, 6, . . . and plane 304
includes blocks 1, 3, 5, 7, . . .
[0055] FIGS. 4B-4C depict an example 3D NAND structure. FIG. 4B is
a block diagram depicting a top view of a portion of one block from
memory structure 126. The portion of the block depicted in FIG. 4B
corresponds to portion 306 in block 2 of FIG. 4A. As can be seen
from FIG. 4B, the block depicted in FIG. 4B extends in direction of
332. In one embodiment, the memory array will have 60 layers. Other
embodiments have fewer than or more than 60 layers. However, FIG.
4B only shows the top layer.
[0056] FIG. 4B depicts a plurality of circles that represent the
vertical columns. Each of the vertical columns include multiple
select transistors and multiple memory cells. In one embodiment,
each vertical column implements a NAND string. For example, FIG. 4B
depicts vertical columns 422, 432, 442 and 452. Vertical column 422
implements NAND string 482. Vertical column 432 implements NAND
string 484. Vertical column 442 implements NAND string 486.
Vertical column 452 implements NAND string 488. More details of the
vertical columns are provided below. Since the block depicted in
FIG. 4B extends in the direction of arrow 332, the block includes
more vertical columns than depicted in FIG. 4B.
[0057] FIG. 4B also depicts a set of bit lines 415, including bit
lines 411, 412, 413, 414, . . . 419. FIG. 4B shows twenty four bit
lines because only a portion of the block is depicted. It is
contemplated that more than twenty four bit lines connected to
vertical columns of the block. Each of the circles representing
vertical columns has an "x" to indicate its connection to one bit
line. For example, bit line 414 is connected to vertical columns
422, 432, 442 and 452.
[0058] The block depicted in FIG. 4B includes a set of local source
lines 344a, 344b, 344c, 344d, 344e. Local source lines may also be
referred to as "local interconnects". Local interconnects 344 also
serve to divide each layer of the block into four regions; for
example, the top layer depicted in FIG. 4B is divided into regions
420, 430, 440 and 450, which are referred to as fingers. In the
layers of the block that implement memory cells, the four regions
are referred to as word line fingers that are separated by the
local interconnects. In one embodiment, the word line fingers on a
common level of a block connect together at the end of the block to
form a single word line. In another embodiment, the word line
fingers on the same level are not connected together. In one
example implementation, a bit line only connects to one vertical
column in each of regions 420, 430, 440 and 450. In that
implementation, each block has sixteen rows of active columns and
each bit line connects to four rows in each block. In one
embodiment, all of four rows connected to a common bit line are
connected to the same word line (via different word line fingers on
the same level that are connected together); therefore, the system
uses the source side select lines and the drain side select lines
to choose one (or another subset) of the four to be subjected to a
memory operation (program, verify, read, and/or erase).
[0059] Although FIG. 4B shows each region having four rows of
vertical columns, four regions and sixteen rows of vertical columns
in a block, those exact numbers are an example implementation.
Other embodiments may include more or fewer regions per block, more
or fewer rows of vertical columns per region and more or fewer rows
of vertical columns per block.
[0060] FIG. 4B also shows the vertical columns being staggered. In
other embodiments, different patterns of staggering can be used. In
some embodiments, the vertical columns are not staggered.
[0061] FIG. 4C depicts a portion of an embodiment of three
dimensional memory structure 350 showing a cross-sectional view
along line AA of FIG. 4B. This cross sectional view cuts through
vertical columns 432 and 434 and region 430 (see FIG. 4B). The
structure of FIG. 4C includes four drain side select layers SGD0,
SGD1, SGD2 and SGD3; one source side select layer SGS; four dummy
word line layers DWLL1a, DWLL1b, DWLL2a and DWLL2b; and forty eight
data word line layers WLL0-WLL47 for connecting to data memory
cells. Other embodiments can implement more or fewer than four
drain side select layers, more than one source side select layer,
more or fewer than four dummy word line layers, and more or fewer
than forty eight word line layers (e.g., 96 word line layers).
Vertical columns 432 and 434 are depicted protruding through the
drain side select layers, source side select layer, dummy word line
layers and word line layers. In one embodiment, each vertical
column comprises a NAND string. For example, vertical column 432
comprises NAND string 484. Below the vertical columns and the
layers listed below is semiconductor substrate 201. The substrate
201 is single crystal silicon, in some embodiments. The local
source lines 344b, 344c are in direct electrical contact with an n+
region of the substrate 201, in this embodiment. The NAND string of
vertical column 432 has a source end at a bottom of the stack and a
drain end at a top of the stack. As in agreement with FIG. 4B, FIG.
4C show vertical column 432 connected to Bit Line 414 via bit line
contact 418.
[0062] For ease of reference, drain side select layers SGD0, SGD1,
SGD2 and SGD3; source side select layer SGS; dummy word line layers
DWLL1a, DWLL1b, DWLL2a and DWLL2b; and word line layers WLL0-WLL47
collectively are referred to as the conductive layers. In one
embodiment, the conductive layers are made from a combination of
TiN and Tungsten. In other embodiments, other materials can be used
to form the conductive layers, such as doped polysilicon, metal
such as Tungsten or metal silicide. In some embodiments, different
conductive layers can be formed from different materials.
Alternating with the conductive layers are dielectric layers
DL0-DL57. For example, dielectric layer DL50 is above word line
layer WLL46 and below word line layer WLL47. In one embodiment, the
dielectric layers are made from SiO.sub.2. In other embodiments,
other dielectric materials can be used to form the dielectric
layers.
[0063] The non-volatile memory cells are formed along vertical
columns which extend through alternating conductive and dielectric
layers in the stack. In one embodiment, the memory cells are
arranged in NAND strings. The word line layer WLL0-WLL47 connect to
memory cells (also called data memory cells). Dummy word line
layers DWLL1a, DWLL1b, DWLL2a and DWLL2b connect to dummy memory
cells. A dummy memory cell does not store user data, while a data
memory cell is eligible to store user data. However, structurally
dummy and data memory cells are the same, in some embodiments.
Drain side select layers SGD0, SGD1, SGD2 and SGD3 are used to
electrically connect and disconnect NAND strings from bit lines.
Source side select layer SGS is used to electrically connect and
disconnect NAND strings from the source lines 344b, 344c.
[0064] A region 467 of NAND string 484 is highlighted. FIG. 5A
shows a close up view of one embodiment of region 467. FIG. 5C
shows a close up view of another embodiment of region 467. A region
429 of NAND string 484 is highlighted. FIG. 6A shows a close up
view of one embodiment of region 429.
[0065] FIG. 5A depicts a close-up view of one embodiment of region
467 of FIG. 4C, which includes column 432 of FIG. 4C, showing a
portion of source-side select transistor 520 and a dummy memory
cell 522. FIG. 5B depicts a cross-sectional view of the column 432
of FIG. 5A along line 509. The embodiment of FIGS. 5A/5B is
consistent with the embodiment of FIG. 2A.
[0066] The region 467 shows portions of the dielectric layers DL0
to DL2 and the conductive layers SGS and DWLL2a. In one embodiment,
vertical column 432 includes an inner core layer 470 that is made
of a dielectric, such as SiO.sub.2. Other materials can also be
used. Surrounding inner core 470 is semiconductor channel 471.
Surrounding semiconductor channel 471 is a tunneling dielectric
472. The channel 471 comprises a semiconductor including, but not
limited to, silicon (e.g., polysilicon).
[0067] In one embodiment, tunneling dielectric 472 has an ONO
structure. Surrounding tunneling dielectric 472 is charge trapping
layer 473, such as (for example) Silicon Nitride. Other memory
materials and structures can also be used. Surrounding charge
trapping layer 473 is blocking layer 478. Blocking layer 478
comprise a layer of SiO.sub.2, in one embodiment. Region 477 also
serves as a blocking layer. Note that region 477 is outside of the
memory hole, but could alternatively be inside of the memory hole
adjacent to (e.g., surrounding) layer 478. Region 477 is a layer of
Al.sub.2O.sub.3, in one embodiment. Layers 471, 472, 473, and 478
may be referred to as memory cell films. Note that memory cell film
region of vertical column 432 is consistent with FIG. 6B, in some
embodiments.
[0068] Region 520 represents a portion of the source-side select
transistor 520. The source-side select transistor 520 has a
crystalline semiconductor body 506 in column 432, which extends
partway into semiconductor substrate 201. The crystalline
semiconductor body 506 is crystalline silicon, in one embodiment.
The crystalline semiconductor body 506 is crystalline silicon
germanium, in one embodiment. In some embodiments, the substrate
201 is a single crystal of silicon. In one embodiment, the body 506
is a solid pillar of epitaxial crystalline silicon. By epitaxial
crystalline silicon it is meant that the crystalline silicon has
the same crystalline orientation as the single crystal silicon
substrate. In one embodiment, the crystalline silicon body is
epitaxially grown on the single crystal silicon substrate. By a
"solid" pillar it is meant that the pillar is not hollow and does
not have a filler material in the interior.
[0069] A gate dielectric region 508 is depicted. The gate
dielectric 508 is oxidized semiconductor, in one embodiment. The
gate dielectric 508 formed by oxidizing single crystal
semiconductor (e.g., single crystal silicon), in one embodiment.
Thus, a high quality gate oxide may be formed. In one embodiment,
the gate dielectric 508 is formed by lateral epitaxial growth,
using the body 506 as a crystalline substrate to form a
semiconductor in the recess. Then, the semiconductor in the recess
may be oxidized to form a gate oxide. Alternately, the gate
dielectric 508 may be formed by nitridation, or a combination of
oxidation and nitridation. Thus, gate dielectric 508 may be oxide
semiconductor, nitride semiconductor, or oxynitride semiconductor.
For example, gate dielectric 508 may be silicon oxide, silicon
nitride, or silicon oxynitride. Note that the gate dielectric 508
surrounds the body 506, in this embodiment. Also note that body 506
is aligned with the vertical column 432. Thus, gate dielectric 508
surrounds the portion of the vertical column 432 having the body
506. Further details are discussed below.
[0070] Conductive region 608 serves as a control gate for the
source side select transistor 520. Region 477 and region 508
together serve as at least a portion of a gate dielectric for the
source-side select transistor. For example, region 477 and region
508 may form a "vertical" gate dielectric. In one embodiment,
region 477 is Al.sub.2O.sub.3. Note that conductive region 608 may
surround region 477. Also note that there may be a thin barrier
layer (e.g., titanium nitride) between the conductive region 608
and region 477. The barrier layer is not depicted in FIGS. 5A-5B.
Also note that region 477 may surround the gate dielectric 508.
Dielectric layer DL0 may serve as another portion of the gate
dielectric of the source side select transistor 520. For example,
dielectric layer DL0 may be a "horizontal" gate dielectric.
[0071] Note that it is possible for there to be non-uniformities in
the thickness of the region 477. Also, in some embodiments, there
is a barrier layer (e.g., titanium nitride) between control gate
608 and blocking layer 477. There may be non-uniformities in the
thickness of such a barrier layer. The non-uniformities in
thickness of either (or both) of these layers could potentially
contribute to leakage current of the select transistor. One
possible reason for the leakage current is that the electric field
from the control gate 608 can be much stronger at the corner of the
body 506 in close proximity to the substrate 201. This can result
in leakage current (and/or breakdown) between the control gate 608
and substrate 201 and/or body 506. However, the presence of the
gate oxide 508 can reduce or eliminate such leakage currents.
[0072] Also note that it is possible for the diameter of the body
506 to vary due to variations in the diameter of the memory hole.
If a gate oxide were formed from the outer portion of the body 506,
the thickness of the gate oxide could vary, which could result in
leakage current. However, in the embodiment depicted in FIGS.
5A-5B, region 508 is not formed within the memory hole. Rather, it
is formed outside of the memory hole. Thus, a more uniformly thick
gate oxide can be formed, which can reduce or eliminate leakage
current.
[0073] FIG. 5C depicts a close-up view of one embodiment of region
467 of FIG. 4C, which includes column 432 of FIG. 4C, showing a
portion of source-side select transistor 520 and a dummy memory
cell 522. FIG. 5D depicts a cross-sectional view of the column 432
of FIG. 5A along line 519. The embodiment of FIGS. 5C/5D is
consistent with the embodiment of FIG. 2B, in which the source side
select transistor has a floating gate 518. The region 467 shows
portions of the dielectric layers DL0 to DL2 and the conductive
layers SGS and DWLL2a. The vertical column 432 above (in
z-direction) the source side select transistor may be similar to in
the example of FIG. 5A. Note that the floating gate 518 surrounds
the body 506, in this embodiment. Also note that body 506 is
aligned with the vertical column 432. Thus, the floating gate 518
resides outside of the portion of vertical column 432 having the
body 506.
[0074] Region 530 represents a portion of the source-side select
transistor 530. The source-side select transistor 530 has a
crystalline semiconductor body 506 in column 432, which extends
partway into semiconductor substrate 201. The crystalline
semiconductor body 506 is crystalline silicon, in one embodiment.
The crystalline semiconductor body 506 is crystalline silicon
germanium, in one embodiment. In some embodiments, the substrate
201 is a single crystal of silicon. In one embodiment, the body 506
is a solid pillar of epitaxial crystalline silicon. By a "solid"
pillar it is meant that the pillar is not hollow and does not have
a filler material in the interior. Region 516 is a gate dielectric.
In one embodiment, this is a region 516 is an oxide semiconductor
(e.g., silicon oxide). In one embodiment, this is a region 516 is a
nitride semiconductor (e.g., silicon nitride). In one embodiment,
this is a region 516 is an oxide-nitride semiconductor (e.g.,
silicon oxynitride).
[0075] The source side select transistor has a floating gate 518,
in this embodiment. The floating gate 518 is formed from a
conductive material, such as a heavily doped semiconductor or
metal. Note that the floating gate 518 surrounds the gate
dielectric 516, in this embodiment. Further details are discussed
below.
[0076] Conductive region 608 serves as a control gate for the
source side select transistor 520. Region 477 is a dielectric that
separates the control gate 608 and the floating gate 518. Region
477 in this context may thus be referred to as an "inter-gate"
dielectric. Region 477 may be a high-k dielectric. Herein, "high-k"
dielectric means a material with a dielectric constant greater than
SiO.sub.2. In one embodiment, region 477 includes Al.sub.2O.sub.3.
In one embodiment, region 477 includes ONO (silicon oxide/silicon
nitride/silicon oxide). Note that conductive region 608 may
surround region 477. Also note that region 477 may surround the
floating gate 518.
[0077] Note that a portion of the channel of the source side select
transistor may be in the substrate 201. Dielectric layer DL0 may
serve as a gate dielectric between control gate 608 and substrate
201.
[0078] Similar to the example of FIGS. 5A-5B, there may be
non-uniformities in the thickness of the region 477. Also, in some
embodiments, there is a barrier layer (e.g., titanium nitride)
between control gate 608 and blocking layer 477. There may be
non-uniformities in the thickness of such a barrier layer. The
non-uniformities in thickness of either (or both) of these layers
could potentially contribute to leakage current of the select
transistor 530. However, the presence of the floating gate 518 can
reduce or eliminate such leakage currents.
[0079] Also note that it is possible for the diameter of the body
506 to vary due to variations in the diameter of the memory hole.
Therefore, it is possible for the gate dielectric 516 to have some
non-uniformities in thickness, which could result in leakage
current. However, in the embodiment depicted in FIGS. 5C-5D,
floating gate 518 can reduce or eliminate leakage current. Note
that even if there is some variation in diameter of the body 506,
the presence of floating gate 518 can help to prevent, or at least
reduce, leakage current and/or breakdown of the select transistor
530.
[0080] FIG. 6A depicts a cross sectional view of region 429 of FIG.
4C that includes a portion of vertical column 432. FIG. 6B depicts
a cross-sectional view of the column 432 of FIG. 6A along line 609.
In one embodiment, the vertical columns are round in horizontal
cross section and include four layers; however, in other
embodiments more or fewer than four layers can be included and
other shapes can be used. The layers 470, 471, 472, 472, 478 in the
portion of the vertical column 432 depicted in FIG. 6A are similar
to those at the dummy memory cell 522 in FIG. 5A. There may be some
variance in the thickness of these layers between the top and
bottom portion of the NAND string.
[0081] FIG. 6A depicts dielectric layers DL51, DL50, and DL49, as
well as layers WLL45, WLL46, and WLL47. The word line layer WLL45
includes a word line region 476 surrounded by an aluminum oxide
layer 477. The physical interaction of the word line layer with the
vertical column forms a memory cell, MC45. Thus, a memory cell, in
one embodiment, comprises semiconductor channel 471, tunneling
dielectric 472, charge trapping layer 473, silicon oxide layer
(e.g., SiO.sub.2) 478, aluminum oxide layer 477 and word line
region 476. Together, the aluminum oxide layer 477 and the silicon
oxide layer may be referred to as a blocking layer. In other
architectures, a memory cell may have a different structure;
however, the memory cell would still be the storage unit. Note that
the memory cells may form a part of a vertically oriented NAND
string.
[0082] When a memory cell is programmed, electrons are stored in a
portion of the charge trapping layer 473 which is associated with
the memory cell. These electrons are drawn into the charge trapping
layer 473 from the channel 471, through the tunneling dielectric
472, in response to an appropriate voltage on word line region 476.
The threshold voltage (Vth) of a memory cell is increased in
proportion to the amount of stored charge. In one embodiment, the
programming is achieved through Fowler-Nordheim tunneling of the
electrons into the charge trapping layer. During an erase
operation, the electrons return to the channel or holes are
injected into the charge trapping layer to recombine with
electrons. In one embodiment, erasing is achieved using hole
injection into the charge trapping layer via a physical mechanism
such as gate induced drain leakage (GIDL).
[0083] Although the example memory system discussed above is a
three dimensional memory structure that includes vertical NAND
strings with charge-trapping material, other memory structures can
also be used with the technology described herein. For example, the
charge trapping layer 473 can be replaced with a conductive layer.
In this manner, floating gate memories can also be used.
[0084] The embodiment of FIGS. 6A and 6B may be used with either
the embodiment of select transistor in FIGS. 5A/5B or the
embodiment of select transistor in FIGS. 5C/5D, but is not limited
to use with select transistors in those embodiments. Thus, the
embodiment of FIGS. 6A/6B is consistent with the embodiment of FIG.
2A, as well as with the embodiment of FIG. 2B.
[0085] FIG. 7A shows one embodiment a source side select
transistor, showing how the source side select transistor may
connect/disconnect a local source line 344 to/from a NAND string in
3D memory. The diagram is similar to the embodiment of FIG. 5A/5B,
in which the source side select transistor has a gate dielectric
508 that is "outside" of the vertical column 432. FIG. 7A shows the
bottom portion of column 432. The column 432 has silicon oxide
region 478, charge storage region 473, tunnel dielectric 472,
semiconductor channel 471, and core 470. Dielectric layers DL0 and
DL0 are depicted. Conductive layers SGS and DWLL2a are also
depicted.
[0086] FIG. 7A also depicts a source side select transistor. In
general, the source side select transistor comprises body 506, gate
dielectric 508, control gate 608, horizontal gate dielectric 716,
source region 790. Conductive layer SGS serves as control gate 608,
in this embodiment. A portion of the substrate 201 below horizontal
gate dielectric 716 may be considered to form part of the body. In
this embodiment, the body 506 is formed in the bottom portion of
column 432. Optionally, region 477 could be present adjacent to
SGS, as in FIG. 5A. In that option, region 477 forms a port of the
"vertical" gate dielectric with gate dielectric 508.
[0087] Gate dielectric 508 is depicted on the body 506, but outside
of the column 432. Gate dielectric 508 is formed using lateral
epitaxial growth with body 506 serving as a crystalline substrate
to form a semiconductor, in one embodiment. Then, the gate
dielectric is formed from the epitaxially grown epitaxial
semiconductor. The horizontal cross section along SGS may have
concentric rings, similar to the embodiment of FIG. 5B. For
example, body 506 may be a solid pillar, which is surrounded by
gate dielectric 508, which is surrounded by control gate 608.
[0088] The channel 718 of the source side select transistor has a
vertical component 718v in the body 506 and a horizontal component
718h in the substrate 201. A gate dielectric 716 is depicted on the
surface of the substrate 201. This gate dielectric 716 may serve as
a horizontal portion of the gate dielectric of the source side
select transistor. The gate dielectric 716 could layer DL0.
[0089] Region 790 may act as a source region of the source side
select transistor. Region 790 may be an n+ region. Thus, region 790
can be formed by heavily doping the semiconductor substrate 201.
The n-type impurity can be phosphorous (P), arsenic (As) or a
combination of both, for example.
[0090] The local source line 344 is in electrical contact with the
region 790 of the source side select transistor. The local source
line 344 is formed from metal, in one embodiment. Example metals
include, but are not limited to, titanium, tungsten, copper,
aluminum, and molybdenum. The local source line 344 is electrically
insulated from the conductive layers (e.g., SGS, DWLL2a, etc.) by
insulator 744. Insulator 744 could be, for example, silicon oxide.
The local source line 344 can be electrically connected to the NAND
string channel 471 by the action of the source side select
transistor, when a respective bias is applied to the control gate
608. Note that the local source line 344 may serve as a common
source line for a number of NAND strings.
[0091] Note that the body 506 is not necessarily the entire body
region of the source side select transistor, as a portion of
substrate 201 (e.g., near the horizontal portion of channel 718h
could be considered to form a portion of the body region of the
source side select transistor.
[0092] In some embodiments, there is a single SGS layer in which
the source side select transistor is formed. However, more than one
SGS layer may be used for the source side select transistor.
[0093] FIG. 7B shows one embodiment a source side select
transistor, showing how the source side select transistor may
connect/disconnect a local source line 344 to/from a NAND string.
The diagram is similar to the embodiment of FIG. 5C/5D, in which
the source side select transistor has a floating gate 518. FIG. 7B
shows the bottom portion of column 432. The column 432 has silicon
oxide region 478, charge storage region 473, tunnel dielectric 472,
semiconductor channel 471, and core 470. Dielectric layers DL0 and
DL0 are depicted. Conductive layers SGS and DWLL2a are also
depicted.
[0094] FIG. 7B also depicts a source side select transistor. In
general, the source side select transistor comprises body 506, gate
dielectric 516, floating gate 518, vertical gate dielectric 777,
control gate 608, horizontal gate dielectric 716, and source region
790. Vertical gate dielectric 777 may also be referred to as an
inter-gate dielectric. A portion of the substrate 201 below the
horizontal gate dielectric 716 may be considered to form part of
the body. In this embodiment, body 506 is formed in the bottom
portion of column 432. Gate dielectric 516 is depicted on the body
506. Floating gate 518 is depicted adjacent to gate dielectric 516.
Dielectric region 777 is depicted between floating gate 518 and
control gate 608. Conductive layer SGS server as control gate 608,
in this embodiment. Dielectric region 777 could include a variety
of materials. In one embodiment, dielectric region 777 comprises
Aluminum oxide. In one embodiment, dielectric region 777 comprises
ONO.
[0095] The channel 718 of the source side select transistor has a
vertical component 718v in the body 506 and a horizontal component
718h in the substrate 201. A horizontal gate dielectric 716 is
depicted on the surface of the substrate 201. This horizontal gate
dielectric 716 may serve as a portion of the gate dielectric of the
source side select transistor. The gate dielectric 716 could layer
DL0.
[0096] Region 790 may act as a source region of the source side
select transistor. Region 790 may be an n+ region. Thus, region 790
can be formed by heavily doping the semiconductor substrate 201.
The n-type impurity can be phosphorous (P), arsenic (As) or a
combination of both, for example.
[0097] The local source line 344 is in electrical contact with the
region 790 of the source side select transistor. The local source
line 344 is formed from metal, in one embodiment. Example metals
include, but are not limited to, titanium, tungsten, copper,
aluminum, and molybdenum. The local source line 344 is electrically
insulated from the conductive layers (e.g., SGS, DWLL2a, etc.) by
insulator 744. Insulator 744 could be, for example, silicon oxide.
The local source line 344 can be electrically connected to the NAND
string channel 471 by the action of the source side select
transistor, when a respective bias is applied to the control gate
608. Note that the local source line 344 may serve as a common
source line for a number of NAND strings.
[0098] In some embodiments, there is a single SGS layer in which
the source side select transistor is formed. However, more than one
SGS layer may be used for the source side select transistor.
[0099] FIG. 8 is a flowchart of one embodiment of a process 800 of
fabricating a 3D memory array that has a select transistor having a
floating gate. The floating gate may help to prevent or reduce
current leakage during device operation. Also formed is a string of
memory cells in the 3D memory array. The process 800 may be used to
fabricate devices such as, but not limited to, those depicted in
FIGS. 2B, 2C, 3, 4B, 4C, 5C, 5D, 6A, 6B, and 7B. Note that not all
process steps are described. For example, some etching, cleaning,
doping, and/or annealing steps may be omitted.
[0100] Step 802 includes forming a select transistor adjacent to a
semiconductor substrate 201. The semiconductor substrate 201 is a
crystalline semiconductor in some embodiments. The semiconductor
substrate 201 may be a single crystal. The semiconductor substrate
201 may be silicon, but another semiconductor could be used.
[0101] Step 802 includes sub-steps 802a-802e. In step 802a, a solid
pillar of semiconductor is formed in contact with the semiconductor
substrate. This solid pillar is single crystal semiconductor, in
some embodiments. The semiconductor may be silicon, but another
semiconductor could be used. The solid pillar of semiconductor will
serve as the body 506 of a source side select transistor in a 3D
memory array. In some embodiments, step 802a includes epitaxially
growing a crystalline semiconductor in contact with the
semiconductor substrate.
[0102] Step 802b includes forming a gate dielectric adjacent to the
solid pillar of semiconductor. In one embodiment, step 802c
includes forming the gate dielectric from a portion of the solid
pillar of semiconductor. For example, step 802b may include
oxidizing epitaxially grown crystalline semiconductor to form the
gate dielectric from oxidized crystalline semiconductor. Note that
after the gate dielectric is formed from a portion of the solid
pillar of semiconductor, the semiconductor is converted to a
dielectric. As one example, gate dielectric 516 is formed (see, for
example, FIGS. 5C and 5D).
[0103] Step 802c includes forming a conductive floating gate
adjacent to the gate dielectric. The conductive floating gate might
be formed from silicon, metal, etc. The silicon may be heavily
doped to increase conductivity. As one example, conductive floating
gate 518 is formed (see, for example, FIGS. 5C and 5D). Note that
the conductive floating gate 518 surrounds the solid pillar of
semiconductor, in some embodiments.
[0104] Step 802d includes forming an inter-gate dielectric adjacent
to the conductive floating gate. In one embodiment, step 802c
includes forming the inter-gate dielectric from ONO. In one
embodiment, step 802c includes forming the inter-gate dielectric
from aluminum oxide. The inter-gate dielectric is formed from a
high-k dielectric, in some embodiments. As one example, region 477
is formed (see, for example, FIGS. 5C and 5D). As another example
inter-gate dielectric 777 is formed (see, for example, FIG.
7B).
[0105] Step 802e includes forming a conductive control gate
adjacent to the inter-gate dielectric. The conductive control gate
might be formed from silicon, metal, etc. The silicon may be
heavily doped to increase conductivity. As one example, conductive
control gate 608 is formed (see, for example, FIGS. 5C and 5D).
[0106] In step 804, a string of memory cells is formed that extend
vertically with respect to a major surface of the semiconductor
substrate 201. Step 804 may include forming a channel 471 of the
string in contact with the solid pillar of semiconductor of the
select transistor. The string may be a NAND string, such as
depicted in FIG. 2B, 3, 6B.
[0107] FIG. 9 is a flowchart of one embodiment of a process 900 of
fabricating a 3D memory array. Process 900 is used to form a select
transistor having a floating gate. Also formed is a string of
memory cells in a 3D memory array. Process 900 is one embodiment of
process 800. The process 900 may be used to fabricate devices such
as, but not limited to, those depicted in FIGS. 2B, 2C, 3, 4B, 4C,
5C, 5D, 6A, 6B, and 7B. Note that not all process steps are
described. For example, some etching, cleaning, doping, and/or
annealing steps may be omitted. FIGS. 10A-10K depict results after
embodiments of various steps of process 900.
[0108] Step 902 includes a stack of alternating layers of oxide and
sacrificial material above a semiconductor substrate 201. The
lowest layer of sacrificial material is amorphous silicon and the
other layers of sacrificial material are silicon nitride, in one
embodiment. All layers of sacrificial material are silicon nitride,
in one embodiment. However, the lowest sacrificial layer of silicon
nitride may be processed in a manner such that it etches faster
than the other sacrificial layers of silicon nitride during step
932. In some embodiments, depositing the sacrificial silicon
nitride layers uses the precursor hexacholorosilane (Si2Cl6) with
ammonia (NH3). In one embodiment, the lowest sacrificial silicon
nitride has a higher wet etch rate than the other sacrificial
layers of silicon nitride. The wet etch rate of the silicon nitride
can be altered by hydrogen content. For example, the hydrogen
content in the lowest sacrificial silicon nitride is at least 5%
higher than the hydrogen content in the other sacrificial layers of
silicon nitride, in one embodiment. The desired hydrogen content
can be achieved by a silicon nitride deposition process using
precursor hexacholorosilane (Si2Cl6) with ammonia (NH3), as one
example.
[0109] The silicon oxide layers could be the dielectric of
dielectric layers DL0-D57 in FIG. 4C. However, rather than
depositing the conductive layers (e.g., SGS, DWLL2a, DWLL2b,
WL0-WL47, DWLL1b, DWLL1a, SGD3-SGD0) the sacrificial material may
be deposited instead. The substrate may be single crystal silicon.
The crystalline silicon substrate may have a major plane that
extends in a horizontal direction. The major plane may extend in
the x/y-plane, as depicted in FIGS. 2C, 3, 4C, 5C, and 7B, for
example. The layers of material may extend in the horizontal
direction with respect to the major plane of the substrate.
[0110] Step 904 includes etching slits in the alternating layers of
oxide and sacrificial material. Step 906 includes filling in the
slits with insulation. Note that later in the process at least a
portion of this insulation will be removed. Note that such slits
could extend for the entire length of a block.
[0111] Step 908 includes etching memory holes through the stack of
alternating layers of the oxide and sacrificial material. Note that
string select transistors (both source and drain side) may be
formed in the memory holes. Note that many such memory holes can be
formed in the stack of alternating layers. A memory hole could
correspond to any of the columns that are depicted in FIG. 4B-4C,
5C-5D, or 6A-6B, for example. A memory hole may extend vertically
through the stack of alternating layers of the oxide and
sacrificial material down to the crystalline semiconductor
substrate 201, as one example. The memory holes may extend partway
into the crystalline semiconductor substrate 201.
[0112] Reactive ion etching can be used to etch the memory holes.
In the memory array area, the memory holes are placed densely. For
example, the memory holes can have a diameter of 70-110 nanometers
(nm) (70-110.times.10.sup.-9 meters). This is an example range;
other ranges could be used. Also note that the diameter could vary
from top to bottom.
[0113] FIG. 10A shows results after one embodiment of step 908.
FIG. 10A shows sacrificial layers (SAC0-SAC6 and SAC 56)
alternating with insulating layers (DL0-DL7 and DL57) in a stack
1000 over a crystalline semiconductor substrate 201. As noted
above, there may be more or fewer layers than in this example.
Sacrificial layers SAC7 through SAC55 are not depicted in FIG. 10A.
Insulating layers DL8 through DL56 are not depicted in FIG. 10A.
FIG. 10A is consistent with formation of the device of FIG. 4C,
which shows two memory holes 432, 434, and two source lines 344b,
344c. The two vertical memory holes (MH) in FIG. 10A correspond to
memory holes 432, 434. In FIG. 10A, regions 1002a, 1002b are where
insulation has been used to fill the slits. The source lines 344b,
344c will eventually be formed in regions 1002a, 1002b.
[0114] The sacrificial layers will eventually be layers SGS,
DWLL2a, DWWL2b, WLL0-WLL47, DWLL1b, DWWL2a, SGD3, SGD2, SGD1, and
SGD0 (note that the aluminum oxide layer 477 may also be formed in
the region vacated by the sacrificial layers in one embodiment).
Sacrificial layer SAC0 is amorphous silicon and sacrificial layers
SAC1-SAC56 are silicon nitride, in one embodiment. Sacrificial
layers SAC0-SAC56 are silicon nitride with layer SAC0 processed in
a manner that it will etch faster than layers SAC1-SAC56 in step
932, in one embodiment.
[0115] The insulating layers are silicon oxide in this embodiment.
The two memory holes (MH) are depicted as extending vertically
through the alternating sacrificial layers and insulating layers.
The memory holes extend down into the semiconductor substrate 201.
Etching the memory holes could etch partway into the semiconductor
substrate 201, as depicted in FIG. 10A. An x-y-z coordinate system
is depicted, showing the direction of formation. The memory holes
each have a major axis that is parallel to the z-axis.
[0116] FIG. 10B shows a cross sectional view of sacrificial layer
SAC56 from FIG. 10A after step 1008, showing one possible pattern
for the memory holes (MH). This is not the only possible pattern.
For example, the memory holes do not need to be staggered as
depicted. An x-y-z coordinate system is depicted, showing the
direction of formation. Note that line A-A' indicates that FIG. 10A
is a cross section along line A-A' of FIG. 10B. Also note that the
memory holes have a circular cross section in the horizontal
direction (e.g., x-y plane), in this example. The memory holes are
not required to be circular in cross section. Note that the memory
holes could be of different diameter in the different layers. For
example, the memory holes could have a smaller diameter at the
lower layers. FIG. 10B shows that the insulation filled slits
1002a, 1002b extend in the x-direction.
[0117] Step 910 includes growing a pillar of crystalline
semiconductor within the memory hole over the semiconductor
substrate 201. Step 910 includes epitaxial growth, in some
embodiments. For example, when the semiconductor substrate 201 is a
single crystal silicon substrate, the substrate 201 may act as a
seed crystal, wherein the substrate 201 locks into one or one
crystallographic orientations with respect to the single crystal
silicon substrate. The semiconductor substrate 201 could be formed
from a semiconductor other than silicon. The pillar may be in
direct contact with the semiconductor substrate 201, or there could
be one or more intervening layers.
[0118] FIG. 10C depicts results after one embodiment of step 910,
showing a pillar 506 of crystalline semiconductor in the bottom of
the memory holes (MH). Note that crystalline semiconductor will
serve as the body 506 of the source side select transistor, and
hence is referenced in FIG. 10C accordingly. The crystalline
semiconductor 506 may cover the vertical sidewalls of the memory
holes near the bottom (e.g., at DL0, sacrificial layer SAC0, and
part of DL1). The pillar of crystalline semiconductor 506 is in
direct contact with a single crystal semiconductor substrate, in
one embodiment.
[0119] Steps 912-924 describe one embodiment for forming a memory
cell film in the memory hole over the pillar of crystalline
semiconductor. Some of the steps may include forming successive
conformal layers of thin film. In one embodiment, layers such as
depicted in FIGS. 5C, 5D, 6A, 6B, and 7B are formed in the memory
hole.
[0120] In step 912, a conformal layer of SiO.sub.2 is formed for a
blocking layer 478. Formation of this layer can be implemented with
atomic layer deposition (ALD), chemical vapor deposition (CVD), but
is not so limited. The conformal layer of SiO.sub.2 may cover the
top of the semiconductor body 506.
[0121] In step 914, a conformal layer of nitride for charge
trapping layer 473 is formed on the conformal layer of SiO.sub.2.
In one embodiment, a nitride such as SiN be deposited as charge
trapping layer 473. The charge trapping layer 473 can be formed,
for example, by chemical vapor deposition (CVD), atomic layer
deposition (ALD), physical vapor deposition (PVD), or any suitable
deposition technique.
[0122] In step 916, tunnel dielectric 472 is deposited as a
conformal layer on the charge trapping layer 473. Thus, the tunnel
dielectric 472 may cover vertical sidewalls of the charge trapping
layer 473, as well as the portion of the charge trapping layer 473
that is on the body 506. The tunnel dielectric 472 can be formed,
for example, by chemical vapor deposition (CVD), atomic layer
deposition (ALD), physical vapor deposition (PVD), or any suitable
deposition technique.
[0123] In one embodiment, forming tunneling dielectric 472 may
include depositing multiple layers, such as SiO.sub.2 and SiON,
with the SiO.sub.2 nearest the charge trapping region (e.g., SiN).
The tunnel dielectric might also include SiO.sub.2 and ISSG
(in-situ steam generation) formed oxide, with the SiO.sub.2 nearest
the charge trapping region. The tunnel dielectric might also
include three layers: SiO.sub.2, SiON, and ISSG formed oxide.
[0124] Step 918 is to deposit a protective layer over the tunnel
dielectric layers. In one embodiment, a layer of silicon oxide is
deposited. This may be deposited using CVD or ALD, as two examples.
The silicon oxide may be about 5 nm in thickness. However, it could
be thicker or thinner. The protective layer may serve to protect
the tunnel dielectric during later etching steps.
[0125] Step 920 includes etching at the bottom of the memory holes
to expose the semiconductor body 506. In one embodiment, this is a
reactive ion etch (RIE). Step 920 may include one or more
anisotropic etch processes to sequentially etched various layers.
The etch may include zero or more isotropic etch processes and zero
or more anisotropic etch processes.
[0126] Step 922 is a post wet etch clean. This step removes of the
protective layer (from step 918). In one embodiment, a wet etch is
used to remove the silicon oxide protective layer. Also polymer
residues from the etch of step 920 are etched away.
[0127] FIG. 10D shows results after etching to expose the solid
pillar of crystalline semiconductor 506. The etching has created a
gap in the memory cell film at the bottom of the memory holes to
expose the top of semiconductor body 506. The etching has gone
through the horizontal portion of tunnel dielectric layer(s) 472,
through horizontal portion of the charge trapping layer 473, and
through horizontal portion of the silicon oxide 478 at the bottom
of the memory holes.
[0128] Step 924 includes forming semiconductor in the memory holes
for semiconductor channel 471. The semiconductor is silicon, in one
embodiment. However, a different semiconductor such as SiGe, a
III-V material might be used instead. Formation of the
semiconductor can be implemented with atomic layer deposition
(ALD), chemical vapor deposition (CVD), but is not so limited. A
core of silicon oxide may then be formed in step 926 for inner core
470. The dielectric core layer includes a dielectric material such
as silicon oxide or organosilicate glass. The dielectric core layer
can be deposited by a conformal deposition method such as low
pressure chemical vapor deposition (LPCVD), or by a
self-planarizing deposition process such as spin coating. FIG. 10E
depicts results after one embodiment of step 908.
[0129] Step 926 is an optional step of forming a dielectric core
inside of the semiconductor channel 471. The dielectric core layer
includes a dielectric material such as silicon oxide or
organosilicate glass. The dielectric core layer can be deposited by
a conformal deposition method such as low pressure chemical vapor
deposition (LPCVD), or by a self-planarizing deposition process
such as spin coating.
[0130] Step 928 is to remove a horizontal portion of the memory
film outside of the memory holes. The horizontal portion of various
layers can be removed, for example, by a recess etch or a chemical
mechanical planarization (CMP).
[0131] Step 930 is to etch the slits 1002. This removes the
material that was in the slits and is done to allow removal of the
sacrificial silicon nitride and to deposit metal.
[0132] Step 932 includes performing an etch via the slits to
selectively remove the lowermost sacrificial layer (e.g., SAC0).
The etch can involve introducing an etchant via the slits, which
has a higher selectivity for the lowermost sacrificial layer,
removing the lowermost sacrificial layer. However, the other
sacrificial layers are not removed. It is acceptable if the other
sacrificial layers etch to some extent. The etch is not relatively
highly selective of the silicon oxide layers so that the silicon
oxide layers are not substantially removed. In one embodiment, step
932 is a wet etch.
[0133] In one embodiment, the lowermost sacrificial layer (e.g.,
SAC0) is amorphous silicon, the other sacrificial layer are silicon
nitride, and the other layers in the stack 1000 are silicon oxide.
The etch in step 932 is not relatively highly selective of the
silicon oxide so that the silicon oxide is not substantially
removed. Also, the etch is not relatively highly selective of
silicon nitride in this embodiment, so that the other sacrificial
layers are not removed. The etch is selective for the amorphous
silicon such that the lowermost sacrificial layer is removed. The
etch could be a wet etch or a dry etch. For one embodiment of a wet
etch process, trimethyl ammonium hydroxide (TMAH) wet chemical is
used to selectively etch the amorphous silicon layer. In the case
of dry etch process, a chemical dry etch (CDE) process can be used
to selectively remove the amorphous silicon layer with respect to
sacrificial silicon nitride layers. In one embodiment, the
Frontier.RTM. CDE system from Applied Materials, Inc. is used.
[0134] In one embodiment, the lowermost sacrificial layer (e.g.,
SAC0) is silicon nitride that has been processed in a manner to
etch faster than the other silicon nitride sacrificial layers.
Examples of such processing have been discussed in step 902. For
example, the lowest sacrificial silicon nitride has at least 5%
higher hydrogen content than the other sacrificial layers of
silicon nitride, in one embodiment. The etch in step 932 removes
the silicon nitride in the lowermost sacrificial layer while
leaving at least a portion of the silicon nitride for the other
sacrificial layers in place. Also, the etch is not relatively
highly selective of silicon oxide, so that the silicon oxide layers
are not removed.
[0135] FIG. 10F depicts results after one embodiment of step 932.
FIG. 10F shows that the insulation has been removed from the slits.
Also, the lowermost sacrificial layer (SAC0) has been removed
leaving a horizontal recess where the sacrificial layers previously
was. The material in the memory holes may serve as an anchor to
hold the dielectric layers in place. What was sacrificial layer
(SAC0) is now labeled recess layer (REC0).
[0136] In step 934, an impurity is introduced into the slits to
dope the substrate 201 below the slits. An example impurity for the
n+ region is Arsenic. An example doping concentration for the n+
region is 1.times.10.sup.20/cm.sup.3.
[0137] Step 936 includes forming a gate dielectric from the
crystalline semiconductor in the recess. Step 936 may include
oxidation of sidewalls of the pillar of crystalline semiconductor
506 to form gate oxides. Step 936 includes a water vapor generator
(WVG) oxidation process, in one embodiment. Step 936 may include
converting a surface portions of the crystalline semiconductor 506
into a semiconductor oxide portion, a semiconductor nitride
portion, or a semiconductor oxynitride portion by oxidation,
nitridation, or a combination of oxidation and nitridation, of the
physically exposed portions of the semiconductor body 506. For
example, step 936 may include converting a surface portions of
crystalline silicon 506 into a silicon oxide portion, a silicon
nitride portion, or a silicon oxynitride portion by oxidation,
nitridation, or a combination of oxidation and nitridation, of the
physically exposed portions of a silicon body 506. The gate
dielectric 516 may laterally surround a respective semiconductor
body 506. FIG. 10G depicted results after one embodiment of step
936. A gate dielectric region 516 is depicted on sidewall of the
body 506. Note that gate dielectric region 516 may be ring shaped,
as in FIG. 5D.
[0138] Step 938 includes depositing material for a conductive
floating gate in the recess on the sidewall of the pillar of
crystalline semiconductor 506. Step 938 includes depositing silicon
in the bottom recess (RCEO), in one embodiment. The silicon may be
amorphous, as deposited. The silicon may be doped to increase its
conductivity. The doping may be performed as the silicon is being
deposited, or after deposit. In some embodiments, a thermal anneal
is performed at some point to form polysilicon from the deposited
silicon. Another material could be deposited for the conductive
floating gate instead of silicon. For example, a metal might be
deposited.
[0139] FIG. 10H depicts results after one embodiment of step 914,
showing the material for the conductive floating gate 518 deposited
on the body 506. In this example, the conductive floating gate 518
is formed on the gate dielectric region 516. Note that the
conductive floating gate 518 may surround the body, as in the
embodiment of FIG. 5D.
[0140] Optional step 940 includes forming a dielectric in the
recess and adjacent to the conductive floating gate. This is a
high-k dielectric, in some embodiments. In one embodiment, silicon
oxide is deposited, followed by silicon nitride, followed by
silicon oxide. In one embodiment, aluminum oxide is deposited. FIG.
10I depicts results after one embodiment of step 916, showing the
dielectric material 777. Note that the dielectric material 777 may
surround the conductive floating gate 518. Note that step 940 is
not required in that the later deposited block layer (step 944) may
serve as the inter-gate dielectric.
[0141] Step 942 includes removing the other sacrificial layers.
Step 942 includes performing an etch via the slits to remove
portions of the silicon nitride layers, in one embodiment. The etch
can involve introducing an etchant via the slits, which has a
higher selectivity for the silicon nitride, removing the silicon
nitride layers. The wet etch is not relatively highly selective of
the silicon oxide so that the silicon oxide is not substantially
removed. The etch may have a relatively higher selectivity (e.g.,
by a factor of 1000, or more generally, 100 or more) for the
silicon nitride relative than for the silicon oxide. Also note that
the etch should not remove the NAND strings.
[0142] The wet etch should remove essentially the entire silicon
nitride layers wherein the NAND strings are being formed (memory
cell area), so that when the regions of the removed silicon nitride
are replaced in at least part by metal, the metal will extend in
substantially the entire layer in the memory cell area. Thus, word
line layers at different levels should be isolated from one another
and not shorted together. This applies regardless of the etch
method, e.g., whether the etchant is introduced via the slits,
memory holes, other holes or voids, or combinations thereof. The
NAND strings in the memory holes serve as anchors which support the
silicon oxide layers when the silicon nitride is removed by etching
through slits.
[0143] A variety of etching techniques may be used to etch the
silicon nitride. Nitride can be etched in one embodiment, by heated
or hot phosphoric acid (H.sub.3PO.sub.4). As an example, the
boiling point of phosphoric acid varies with the concentration of
the acid. For example, for a range of acid concentration between
79.5%-104.5% the boiling point may vary from 140.degree.
C.-200.degree. C. The etch rate of silicon nitride varies with the
temperature and the concentration of the acid. Since the bath is
operated at high temperature, water readily evaporates from the
solution and the concentration of phosphoric acid changes.
Therefore, this may be considered to be a type of "wet" etch.
However, a wet etch is not necessarily needed for nitride, as other
etching techniques may be applied. In other embodiments, the
sacrificial material in the stack may be something other than
silicon nitride. Therefore a different type of etch process and
etchant may be used.
[0144] FIG. 10J depicts results after one embodiment of step 942.
FIG. 10J shows that all sacrificial layers have now been removed.
The material in the memory holes may serve as an anchor to hold the
dielectric layers in place.
[0145] In optional step 944, a portion of the blocking layer is
formed in the recesses. This portion of the blocking layer is an
Al.sub.2O.sub.3 layer, in one embodiment. This portion of blocking
layer may be deposited by ALD from outside of the memory hole
through the slits.
[0146] Step 946 includes depositing metal (e.g., one or more
layers) in the recesses via the slits. In one embodiment, the metal
is tungsten. This forms a metal/oxide stack. Metal is provided in
the slits to fill the recesses left when the sacrificial material
was removed. Chemical vapor deposition (CVD) or atomic layer
deposition (ALD) could be used to deposit the metal.
[0147] Step 948 is forming material in the slits for the local
source lines (also referred to as local interconnects). Step 948
may include depositing an insulating layer in the slits to cover
vertical sidewalls of the slits. Initially, the insulating layer
may also cover the substrate at the bottom of the slits. The
insulating layer in a slit may be etched to create an opening for
the source line. The substrate 201 is exposed as a result of
etching the insulating layer, in one embodiment. Step 948 may
include depositing one or more conductive fill materials in the
slits. The conductive fill materials serve as the source lines. For
example, a first conductive fill material can include a doped
semiconductor material such as doped polysilicon. The first
conductive fill material might be used in the lower portion of the
slits. A second conductive fill material can include at least one
metallic material such as a combination of a conductive metallic
nitride material (such as TiN) and a metal (such as W, Co, or Ru).
Step 944 may also include one or more etching steps to remove
excess fill material (for both the first and second fill
material).
[0148] FIG. 10K depicts results after one embodiment of step 948.
The recesses in the stack have been filled with a conductive
material. Thus, the recess layers are re-labeled as SGS, DWLL2a,
DWLL2b, WLL0, WLL1, WLL2, WLL3, and SGD0. As the aluminum oxide
layer was described as being optional, it is not depicted in FIG.
10K. However, in one embodiment, there is an aluminum oxide layer
477 outside of the memory holes, as in FIG. 4C.
[0149] The source lines 344 are now formed in the slits. An
insulating layer 744 provides electrical insulation between the
source lines 344 and the conductive layers (SGS, DWLL2a, DWLL2b,
WLL0, WLL1, WLL2, WLL3, and SGD0).
[0150] FIG. 11 is a flowchart of one embodiment of a process 1100
of fabricating a 3D memory array. Process 1100 is used to form a
select transistor in 3D memory. In process 1100 a gate dielectric
for the select transistor is formed in a recess adjacent to the
body. Also formed is a string of memory cells in a 3D memory array.
The process 1100 may be used to fabricate devices such as, but not
limited to, those depicted in FIGS. 2A, 2C, 3, 4B, 4C, 5A, 5B, 6A,
6B, and 7A. The process 110 forms a select transistor in 3D memory
having a uniform vertical gate dielectric, in one embodiment. The
uniform vertical gate dielectric helps to prevent or reduce current
leakage during device operation. Note that not all process steps
are described. For example, some etching, cleaning, doping, and/or
annealing steps may be omitted. Some steps may be similar to those
of process 900, and will not be described in detail. FIGS. 12A-12F
depict results after embodiments of various steps of process
1100.
[0151] In step 1102, a stack of alternating layers of insulating
material and sacrificial material are formed above a semiconductor
substrate. This step may be similar to step 902 in which the lowest
layer of sacrificial material has a different etch selectivity than
that other layers of sacrificial material. However, it is not
required that the lowest sacrificial layer has a different etch
selectivity than that other layers of sacrificial material. In one
embodiment, the insulating material is silicon oxide and the
sacrificial material is silicon nitride.
[0152] Steps 904-930 may be similar to those of process 900.
[0153] Step 1110 includes removing the layers of sacrificial
material, leaving recesses. FIG. 12A depicts results after one
embodiment of step 1110. FIG. 12A shows that the insulation has
been removed from the slits. Also, the silicon nitride in the
sacrificial layers has been removed leaving horizontal recesses
(REC0-REC56) where the sacrificial layers previously were. The
material in the memory holes may serve as an anchor to hold the
dielectric layers in place.
[0154] Step 1110 includes performing an etch via the slits to
remove portions of the silicon nitride layers, in one embodiment.
The etch can involve introducing an etchant via the slits, which
has a higher selectivity for the silicon nitride, removing the
silicon nitride layers. The wet etch is not relatively highly
selective of the silicon oxide so that the silicon oxide is not
substantially removed. The etch may have a relatively higher
selectivity (e.g., by a factor of 1000, or more generally, 100 or
more) for the silicon nitride relative than for the silicon oxide.
Also note that the etch should not remove the NAND strings.
[0155] The wet etch should remove essentially the entire silicon
nitride layers wherein the NAND strings are being formed (memory
cell area), so that when the regions of the removed silicon nitride
are replaced in at least part by metal, the metal will extend in
substantially the entire layer in the memory cell area. Thus, word
line layers at different levels should be isolated from one another
and not shorted together. This applies regardless of the etch
method, e.g., whether the etchant is introduced via the slits,
memory holes, other holes or voids, or combinations thereof. The
NAND strings in the memory holes serve as anchors which support the
silicon oxide layers when the silicon nitride is removed by etching
through slits.
[0156] A variety of etching techniques may be used to etch the
silicon nitride. Nitride can be etched in one embodiment, by heated
or hot phosphoric acid (H.sub.3PO.sub.4). As an example, the
boiling point of phosphoric acid varies with the concentration of
the acid. For example, for a range of acid concentration between
79.5%-94.5% the boiling point may vary from 140.degree.
C.-200.degree. C. The etch rate of silicon nitride varies with the
temperature and the concentration of the acid. Since the bath is
operated at high temperature, water readily evaporates from the
solution and the concentration of phosphoric acid changes.
Therefore, this may be considered to be a type of "wet" etch.
However, a wet etch is not necessarily needed for nitride, as other
etching techniques may be applied. In other embodiments, the
sacrificial material in the stack may be something other than
silicon nitride. Therefore a different type of etch process and
etchant may be used.
[0157] Step 1112 includes forming crystalline semiconductor in the
recess on the sidewall of the pillar of crystalline semiconductor
506. Step 1112 includes lateral epitaxial growth, using the exposed
sidewall of the pillar of crystalline semiconductor 506 as a
crystalline substrate, in one embodiment.
[0158] FIG. 12B depicts results after one embodiment of step 1112.
FIG. 12B shows a close up of region 1201 from FIG. 12A. FIG. 12C
depicts a cross section along line 1202 of FIG. 12B. FIG. 12B
depicts crystalline semiconductor 1208 on the vertical sidewall of
pillar of crystalline semiconductor 506. In one embodiment,
crystalline semiconductor 1208 is crystalline silicon. This may be
single crystal silicon, but that is not a requirement.
[0159] Step 1114 includes processing the crystalline semiconductor
in the recess to form a gate dielectric. Step 1114 may include
oxidation of crystalline semiconductor in the recess to form a gate
oxide. Step 1114 includes a water vapor generator (WVG) oxidation
process, in one embodiment. Step 1114 may include converting
crystalline semiconductor in the recess into a semiconductor oxide
portion, a semiconductor nitride portion, or a semiconductor
oxynitride portion by oxidation, nitridation, or a combination of
oxidation and nitridation, of the physically exposed portions of
the semiconductor body 506. For example, step 1114 may include
converting at least a portion of the crystalline semiconductor in
the recess into a silicon oxide portion, a silicon nitride portion,
or a silicon oxynitride portion by oxidation, nitridation, or a
combination of oxidation and nitridation, of the crystalline
semiconductor in the recess.
[0160] FIG. 12D depicts results after one embodiment of step 1114.
FIG. 12E depicts a cross section along line 1202 of FIG. 12D. The
crystalline semiconductor 1208 has been converted to the gate
dielectric region 508, as described with respect to step 1114.
[0161] Step 1116 includes forming a control gate for the source
side select transistor in the bottom recess. Step 1118 includes
forming control gates for the memory cells in the other recesses.
In one embodiment, the control gates of the source side select
transistor and the memory cells are made from a combination of TiN
and Tungsten. In other embodiments, other materials can be used to
form the control gates, such as doped polysilicon, metal such as
Tungsten or metal silicide.
[0162] FIG. 12F depicts results after one embodiment of step 1118.
The control gates may be formed by depositing metal (e.g., one or
more layers) in the recesses via the slits. In one embodiment, the
metal is tungsten. This forms a metal/oxide stack. Metal is
provided in the slits to fill the recesses left when the
sacrificial material was removed. Chemical vapor deposition (CVD)
or atomic layer deposition (ALD) could be used to deposit the
metal.
[0163] In one embodiment, a portion of the blocking layer is formed
in the recesses prior to forming the control gates. This portion of
the blocking layer is an Al.sub.2O.sub.3 layer, in one embodiment.
This portion of blocking layer may be deposited by ALD from outside
of the memory hole through the slits.
[0164] The common source lines may be formed by depositing an
insulating layer in the slits to cover vertical sidewalls of the
slits. Initially, the insulating layer may also cover the substrate
at the bottom of the slits. The insulating layer in a slit may be
etched to create an opening for the source line. The substrate 201
is exposed as a result of etching the insulating layer, in one
embodiment. One or more conductive fill materials may be deposited
in the slits. The conductive fill materials serve as the source
lines. For example, a first conductive fill material can include a
doped semiconductor material such as doped polysilicon. The first
conductive fill material might be used in the lower portion of the
slits. A second conductive fill material can include at least one
metallic material such as a combination of a conductive metallic
nitride material (such as TiN) and a metal (such as W, Co, or Ru).
One or more etching steps can be performed to remove excess fill
material (for both the first and second fill material).
[0165] FIG. 12F depicts results after one embodiment of step 1118.
Every other layer of the stack has been filled with a conductive
material. Thus, the recess layers are re-labeled as SGS, DWLL2a,
DWLL2b, WLL0, WLL1, WLL2, WLL3, and SGD0. As the aluminum oxide
layer was described as being optional, it is not depicted in FIG.
12F. However, in one embodiment, there is an aluminum oxide layer
477 outside of the memory holes, as in FIG. 4C.
[0166] The source lines 344 are now formed in the slits. An
insulating layer 744 provides electrical insulation between the
source lines 344 and the conductive layers (SGS, DWLL2a, DWLL2b,
WLL0, WLL1, WLL2, WLL3, and SGD0).
[0167] One embodiment disclosed herein includes an apparatus
comprising a semiconductor substrate having a major surface, a
select transistor, and a string of memory cells that extends
vertically with respect to the major surface of the semiconductor
substrate. The select transistor has a body formed from a solid
pillar of semiconductor in contact with the semiconductor
substrate, a conductive floating gate, a conductive control gate, a
first dielectric between the conductive floating gate and the
conductive control gate, and a second dielectric between the body
and the conductive floating gate. The string has a string channel,
wherein the body of the select transistor is in contact with the
string channel.
[0168] One embodiment disclosed herein includes a method of
fabricating a 3D memory array, which comprising forming a select
transistor adjacent to a semiconductor substrate having a major
surface, and forming a string of memory cells that extends
vertically with respect to the major surface of the semiconductor
substrate. Forming the select transistor comprises forming a solid
pillar of semiconductor in contact with the semiconductor
substrate, forming a gate dielectric adjacent the solid pillar of
semiconductor, forming a conductive floating gate adjacent the gate
dielectric, forming an inter-gate dielectric adjacent the
conductive floating gate, and forming a conductive control gate
adjacent the blocking dielectric. Forming the string of memory
cells comprises forming a channel of the string in contact with the
solid pillar of semiconductor of the select transistor.
[0169] One embodiment disclosed herein includes a method of
fabricating a 3D memory array, comprising: forming a plurality of
alternating layers of insulator material and sacrificial material
above a semiconductor substrate; forming an opening through the
alternating layers of the insulator material and the sacrificial
material to the semiconductor substrate; forming a pillar of
crystalline semiconductor in a bottom of the opening in contact
with the semiconductor substrate to form a body of a select
transistor; removing a layer of the sacrificial material to form a
recess that exposes a sidewall of the pillar of crystalline
semiconductor; forming crystalline semiconductor in the recess on
the sidewall of the pillar of crystalline semiconductor; processing
the crystalline semiconductor in the recess to form a gate
dielectric of a select transistor; forming a conductor in the
recess adjacent to the gate dielectric to form a control gate of
the select transistor; and forming a memory cell film in the
opening above the crystalline semiconductor.
[0170] The foregoing detailed description has been presented for
purposes of illustration and description. It is not intended to be
exhaustive or to limit to the precise form disclosed. Many
modifications and variations are possible in light of the above
teaching. The described embodiments were chosen in order to best
explain the principles and practical applications, to thereby
enable others skilled in the art to best utilize the various
embodiments and with various modifications as are suited to the
particular use contemplated. It is intended that the scope be
defined by the claims appended hereto.
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