U.S. patent application number 15/053161 was filed with the patent office on 2017-08-31 for packaging method and structure.
The applicant listed for this patent is Taiwan Semiconductor Manufacturing Company, Ltd.. Invention is credited to Ming-Da Cheng, Ching-Hua Hsieh, Chung-Shi Liu, Chen-Hua Yu.
Application Number | 20170250091 15/053161 |
Document ID | / |
Family ID | 59680298 |
Filed Date | 2017-08-31 |
United States Patent
Application |
20170250091 |
Kind Code |
A1 |
Yu; Chen-Hua ; et
al. |
August 31, 2017 |
Packaging Method and Structure
Abstract
A system and method for manufacturing a semiconductor device are
provided. In an embodiment a first semiconductor device and a
second semiconductor device are encapsulated with an encapsulant. A
dielectric layer is formed over the encapsulant, the first
semiconductor device, and the second semiconductor device. The
dielectric layer is planarized in order to reset the planarity of
the dielectric layer.
Inventors: |
Yu; Chen-Hua; (Hsin-Chu,
TW) ; Hsieh; Ching-Hua; (Hsin-Chu, TW) ; Liu;
Chung-Shi; (Hsin-Chu, TW) ; Cheng; Ming-Da;
(Jhubei City, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Hsin-Chu |
|
TW |
|
|
Family ID: |
59680298 |
Appl. No.: |
15/053161 |
Filed: |
February 25, 2016 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 2224/04105
20130101; H01L 24/19 20130101; H01L 2224/12105 20130101; H01L
21/76877 20130101; H01L 21/4846 20130101; H01L 21/561 20130101;
H01L 21/76814 20130101; H01L 23/5389 20130101; H01L 2924/1432
20130101; H01L 23/3121 20130101; H01L 2924/1434 20130101; H01L
24/20 20130101; H01L 2924/18162 20130101; H01L 2224/2518 20130101;
H01L 21/56 20130101; H01L 2224/32225 20130101; H01L 2924/1431
20130101; H01L 21/568 20130101; H01L 2224/92244 20130101; H01L
2224/73267 20130101 |
International
Class: |
H01L 21/56 20060101
H01L021/56; H01L 21/768 20060101 H01L021/768; H01L 21/48 20060101
H01L021/48 |
Claims
1. A method of manufacturing a semiconductor device, the method
comprising: encapsulating a first semiconductor device and a second
semiconductor device with an encapsulant; applying a dielectric
material over the first semiconductor device and the second
semiconductor device after the encapsulating the first
semiconductor device and the second semiconductor device, the
dielectric material having a non-planar surface facing away from
the first semiconductor device and the second semiconductor device;
patterning the dielectric material to form a first opening exposing
a first contact on the first semiconductor device and a second
opening exposing a second contact on the second semiconductor
device; forming a conductive material in the first opening, in the
second opening, and extending along the non-planar surface of the
dielectric material; planarizing the dielectric material after the
applying the dielectric material, the planarizing removing the
non-planar surface of the dielectric material and portions of the
conductive material extending along the non-planar surface of the
dielectric material; and forming a redistribution layer over the
dielectric material after the planarizing the dielectric material,
wherein the redistribution layer is in electrical connection with
the first semiconductor device and the second semiconductor
device.
2. The method of claim 1, wherein the forming the redistribution
layer forms the redistribution layer in electrical contact with the
first contact and the second contact.
3. The method of claim 2, wherein the patterning the dielectric
material further comprises exposing the dielectric material to a
patterned energy source.
4. The method of claim 3, wherein the patterning the dielectric
material further comprises developing the dielectric material.
5. The method of claim 1, wherein the encapsulating the first
semiconductor device and the second semiconductor device is
performed using a compression, transfer or immersion molding
process.
6. The method of claim 5, further comprising performing a second
planarization process when the encapsulating the first
semiconductor device and the second semiconductor device is
performed using a compression or immersion molding process.
7. The method of claim 1, wherein the forming the redistribution
layer further comprises: forming a seed layer within an opening of
the dielectric material; and plating a conductive material within
the opening of the dielectric material.
8. A method of manufacturing a semiconductor device, the method
comprising: encapsulating a first semiconductor device and a second
semiconductor device with an encapsulant; applying a dielectric
material over the first semiconductor device, the second
semiconductor device, and the encapsulant, wherein the dielectric
material has a non-planar surface facing away from the first
semiconductor device and the second semiconductor device;
patterning the dielectric material to form a first opening to a
first contact on the first semiconductor device and a second
opening to a second contact on the second semiconductor device;
forming a conductive material over the dielectric material, the
conductive material having a first portion filling the first
opening, a second portion filling the second opening, and a third
portion extending along the non-planar surface of the dielectric
material; and planarizing the dielectric material and the
conductive material such that top surfaces of the dielectric
material, the first portion of the conductive material, and the
second portion of the conductive material are level, wherein, after
the planarizing the dielectric material and the conductive
material, the third portion of the conductive material is removed,
the first portion of the conductive material is isolated from the
second portion of the conductive material within the dielectric
material, and the dielectric material has an increased
planarity.
9. The method of claim 8, wherein the encapsulating the first
semiconductor device and the second semiconductor device is
performed using a transfer molding process, an immersion molding
process, or a compression molding process.
10. The method of claim 9, further comprising planarizing the
encapsulant when the encapsulating the first semiconductor device
and the second semiconductor device is performed using an immersion
molding process or a compression molding process.
11. The method of claim 8, further comprising forming a
redistribution layer over the dielectric material.
12. The method of claim 11, further comprising: depositing a seed
layer over the dielectric material, the first contact, and the
second contact, wherein at least a portion of the seed layer is
planar and parallel with a major surface of the first semiconductor
device; and plating the redistribution layer onto the seed
layer.
13. The method of claim 8, wherein the dielectric material is a
photosensitive polybenzoxazole.
14. The method of claim 13, wherein the patterning the dielectric
material further comprises: exposing the dielectric material to a
patterned energy source; and developing the dielectric
material.
15. A method of manufacturing a semiconductor device, the method
comprising: applying a photosensitive polybenzoxazole over a first
semiconductor device, a second semiconductor device, and an
encapsulant between the first semiconductor device and the second
semiconductor device, wherein the photosensitive polybenzoxazole
has a non-planar surface after the applying the photosensitive
polybenzoxazole; patterning the photosensitive polybenzoxazole to
form an first opening and a second opening through the
photosensitive polybenzoxazole; forming a first conductive material
in the first opening, in the second opening, and extending along
the non-planar surface of the photosensitive polybenzoxazole; and
resetting the planarity of the photosensitive polybenzoxazole using
a planarization process, the planarization process removing the
non-planar surface of the photosensitive polybenzoxazole and
portions of the first conductive material extending along the
non-planar surface of the photosensitive polybenzoxazole, wherein
top surfaces of the first conductive material in the first opening,
the first conductive material in the second opening, and the
photosensitive polybenzoxazole are level after the planarization
process.
16. The method of claim 15, further comprising depositing a seed
layer into the first opening and the second opening after the
resetting the planarity of the photosensitive polybenzoxazole.
17. The method of claim 15, further comprising depositing the first
conductive material into the first opening and the second opening
prior to the resetting the planarity of the photosensitive
polybenzoxazole.
18. The method of claim 17, further comprising filling the first
opening and the second opening with a second conductive material
prior to resetting the planarity of the photosensitive
polybenzoxazole.
19. The method of claim 18, further comprising forming a
redistribution layer over the photosensitive polybenzoxazole and in
electrical connection with the second conductive material.
20. The method of claim 15, wherein the resetting the planarity of
the photosensitive polybenzoxazole further comprises performing a
chemical mechanical polishing process.
Description
BACKGROUND
[0001] Since the invention of the integrated circuit (IC), the
semiconductor industry has experienced rapid growth due to
continuous improvements in the integration density of various
electronic components (i.e., transistors, diodes, resistors,
capacitors, etc.). For the most part, this improvement in
integration density has come from repeated reductions in minimum
feature size, which allows more components to be integrated into a
given area.
[0002] These integration improvements are essentially
two-dimensional (2D) in nature, in that the volume occupied by the
integrated components is essentially on the surface of the
semiconductor wafer. Although dramatic improvement in lithography
has resulted in considerable improvement in 2D IC formation, there
are physical limits to the density that can be achieved in two
dimensions. One of these limits is the minimum size needed to make
these components. Also, when more devices are put into one chip,
more complex designs are utilized.
[0003] In an attempt to further increase circuit density,
integrating separate chips into one or more packages has been
investigated. However, such integration has led to multiple issues
being identified. As such, in order to continue to further
integrate multiple chips into the same package and also to help
reduce the size of the overall device, additional improvements in
the manufacturing process are needed.
BRIEF DESCRIPTION OF THE DRAWINGS
[0004] Aspects of the present disclosure are best understood from
the following detailed description when read with the accompanying
figures. It is noted that, in accordance with the standard practice
in the industry, various features are not drawn to scale. In fact,
the dimensions of the various features may be arbitrarily increased
or reduced for clarity of discussion.
[0005] FIG. 1 illustrates an encapsulation of a first semiconductor
device and a second semiconductor device with an encapsulant in
accordance with some embodiments.
[0006] FIG. 2 illustrates a planarization of a dielectric layer
over the encapsulant in accordance with some embodiments.
[0007] FIG. 3 illustrates a seed layer and a first photoresist in
accordance with some embodiments.
[0008] FIG. 4 illustrates a formation of redistribution layer in
accordance with some embodiments.
[0009] FIG. 5 illustrates a formation of a conductive material over
the dielectric layer in accordance with some embodiments.
[0010] FIG. 6 illustrates a planarization of the conductive
material and the dielectric layer in accordance with some
embodiments.
[0011] FIG. 7 illustrates a formation of a seed layer over the
conductive material in accordance with some embodiments.
[0012] FIG. 8 illustrates a formation of a redistribution layer in
accordance with some embodiments.
[0013] FIG. 9 illustrates a compression or immersion molding
process in accordance with some embodiments.
[0014] FIG. 10 illustrates a formation of a dielectric layer in
accordance with some embodiments.
[0015] FIG. 11 illustrates a planarization of a dielectric layer in
accordance with some embodiments.
[0016] FIG. 12 illustrates a formation of a redistribution layer in
accordance with some embodiments.
[0017] FIG. 13 illustrates a formation of a conductive material
over the dielectric layer in accordance with some embodiments.
[0018] FIG. 14 illustrates a planarization of a dielectric layer in
accordance with some embodiments.
[0019] FIG. 15 illustrates a formation of a redistribution layer in
accordance with some embodiments.
DETAILED DESCRIPTION
[0020] The following disclosure provides many different
embodiments, or examples, for implementing different features of
embodiments. Specific examples of components and arrangements are
described below to simplify the present disclosure. These are, of
course, merely examples and are not intended to be limiting. For
example, the formation of a first feature over or on a second
feature in the description that follows may include embodiments in
which the first and second features are formed in direct contact,
and may also include embodiments in which additional features may
be formed between the first and second features, such that the
first and second features may not be in direct contact. In
addition, the present disclosure may repeat reference numerals
and/or letters in the various examples. This repetition is for the
purpose of simplicity and clarity and does not in itself dictate a
relationship between the various embodiments and/or configurations
discussed.
[0021] Further, spatially relative terms, such as "beneath,"
"below," "lower," "above," "upper" and the like, may be used herein
for ease of description to describe one element or feature's
relationship to another element(s) or feature(s) as illustrated in
the figures. The spatially relative terms are intended to encompass
different orientations of the device in use or operation in
addition to the orientation depicted in the figures. The apparatus
may be otherwise oriented (rotated 90 degrees or at other
orientations) and the spatially relative descriptors used herein
may likewise be interpreted accordingly.
[0022] With reference now to FIG. 1, there is illustrated an
intermediate product in a process of forming, e.g., a package 100.
As illustrated in FIG. 1, the intermediate structure comprises a
carrier substrate 101, a temporary adhesive layer 103, a die attach
film (DAF) 105, a first semiconductor device 107, a second
semiconductor device 109, a first contact pad 111, a second contact
pad 113, a first passivation layer 115, and a second passivation
layer 117. The carrier substrate 101 comprises, for example,
silicon based materials, such as glass or silicon oxide, or other
materials, such as aluminum oxide, combinations of any of these
materials, or the like. The carrier substrate 101 is planar in
order to accommodate an attachment of semiconductor devices such as
the first semiconductor device 107 and the second semiconductor
device 109.
[0023] The temporary adhesive layer 103 is placed on the carrier
substrate 101 in order to assist in the adherence of overlying
structures (e.g., the DAF 105). In an embodiment the temporary
adhesive layer 103 may comprise a light-to-heat conversion (LTHC)
layer or an ultra-violet glue, which loses its adhesive properties
when exposed to ultra-violet light. However, other types of
adhesives, such as pressure sensitive adhesives, radiation curable
adhesives, epoxies, combinations of these, or the like, may also be
used. The temporary adhesive layer 103 may be placed onto the
carrier substrate 101 in a semi-liquid or gel form, which is
readily deformable under pressure.
[0024] Once the temporary adhesive layer 103 has been placed, the
first semiconductor device 107 and the second semiconductor device
109 may be placed onto the carrier substrate 101 using, e.g., the
DAF 105. In an embodiment the DAF 105 is placed over the backside
of the first semiconductor device 107 and the second semiconductor
device 109 and is utilized in order to provide additional adhesion.
In an embodiment the DAF 105 is an epoxy resin, a phenol resin,
acrylic rubber, silica filler, or a combination thereof, and is
applied using a lamination technique. However, any other suitable
alternative material and method of formation may alternatively be
utilized.
[0025] Once the DAF 105 has been applied to the first semiconductor
device 107 and the second semiconductor device 109, the first
semiconductor device 107 and the second semiconductor device 109
may be placed onto the carrier substrate 101. In an embodiment the
first semiconductor device 107 and the second semiconductor device
109 may each be a semiconductor device designed for an intended
purpose such as being a logic die, a central processing unit (CPU)
die, a memory die, combinations of these, or the like. In an
embodiment the first semiconductor device 107 and the second
semiconductor device 109 comprise integrated circuit devices, such
as transistors, capacitors, inductors, resistors, first
metallization layers (not shown), and the like, therein, as desired
for a particular functionality. In an embodiment the first
semiconductor device 107 and the second semiconductor device 109
are designed and manufactured to work in conjunction with or
concurrently with each other, although they may alternatively be
designed to work separately from each other. In another embodiment,
the first semiconductor device 107 and the second semiconductor
device 109 may also be the same as each other, providing identical
functionalities.
[0026] The first contact pad 111 is manufactured on the first
semiconductor device 107 to form electrical connections between the
first semiconductor device 107 and, e.g., first external
connections (not illustrated). In an embodiment the first contact
pad 111 may be formed over and in electrical contact with
electrical routing (not separately illustrated in FIG. 1) within
the first semiconductor device 107. The first contact pad 111 may
comprise aluminum, but other materials, such as copper, may
alternatively be used. The first contact pad 111 may be formed
using a deposition process, such as sputtering, to form a layer of
material (not shown) and portions of the layer of material may then
be removed through a suitable process (such as photolithographic
masking and etching) to form the first contact pad 111. However,
any other suitable process may be utilized to form the first
contact pad 111. The first contact pad 111 may be formed to have a
thickness of between about 0.5 .mu.m and about 4 .mu.m, such as
about 1.45 .mu.m.
[0027] To protect the first contact pad 111, the first passivation
layer 115 may be formed. The first passivation layer 115 may be
formed over the first contact pad 111, and may be made of one or
more suitable dielectric materials such as silicon oxide, silicon
nitride, low-k dielectrics such as carbon doped oxides, extremely
low-k dielectrics such as porous carbon doped silicon dioxide,
combinations of these, or the like. The first passivation layer 115
may be formed through a process such as chemical vapor deposition
(CVD), although any suitable process may be utilized, and may have
a thickness between about 0.5 .mu.m and about 5 .mu.m, such as
about 9.25 K.ANG..
[0028] After the first passivation layer 115 has been formed, an
opening may be made through the first passivation layer 115 by
removing portions of the first passivation layer 115 to expose at
least a portion of the underlying first contact pad 111. The
opening allows for contact between the first contact pad 111 and,
e.g., an overlaying first redistribution layer 401 (not illustrated
in FIG. 1 but illustrated and discussed further below with respect
to FIG. 4). The opening may be formed using a suitable
photolithographic mask and etching process, although any suitable
process to expose portions of the first contact pad 111 may be
used.
[0029] The second contact pad 113 and the second passivation layer
117 may be formed on the second semiconductor device 109 using
similar materials and methods as described above with respect to
the first contact pad 111 and the first passivation layer 115. For
example, the second contact pad 113 may be an aluminum contact pad
formed using a deposition process, and the second passivation layer
117 may be formed using a deposition process and then a patterning
process to expose a portion of the second contact pad 113. However,
any suitable method of manufacture may alternatively be
utilized.
[0030] However, as one of ordinary skill in the art will recognize,
the inclusion of only two semiconductor devices (e.g., the first
semiconductor device 107 and the second semiconductor device 109)
and the illustration of a single contact pad on each one of the
first semiconductor device 107 and the second semiconductor device
109 is intended to be illustrative and is not intended to be
limiting. Rather, any suitable number of semiconductor devices,
with any suitable number of contact pads or other connectors, may
also be utilized. All such configurations are fully intended to be
included within the scope of the embodiments.
[0031] Once attached to the carrier substrate 101, the first
semiconductor device 107 and the second semiconductor device 109
may be encapsulated with an encapsulant 108 in order to provide
protection as well as to provide another surface for further
processing (described further below). In an embodiment the
encapsulant 108 may be a molding compound and may be placed using,
e.g., a transfer or laminate molding process. However, such a
laminate process will also, because of the placement of the
encapsulant 108 between the first semiconductor device 107 and the
second semiconductor device 109, cause planarity related issues
along a surface of the encapsulant 108.
[0032] In an embodiment using the transfer or laminate molding
process, the transfer molding process may be started by initially
placing the first semiconductor device 107 and the second
semiconductor device 109 within a cavity of a molding device (not
illustrated in FIG. 1), and the cavity may be sealed. Once the
first semiconductor device 107 and the second semiconductor device
109 are within the cavity, the material of the encapsulant 108 may
be loaded into a pot and heated until it liquefies, at which point
pressure may be applied to the material of the encapsulant 108
through, e.g., a piston, in order to force the now liquid
encapsulant 108 through an opening within either a sidewall or top
of the cavity and around and between the first semiconductor device
107 and the second semiconductor device 109. In an embodiment the
encapsulant 108 may be a molding compound resin such as polyimide,
PPS, PEEK, PES, a heat resistant crystal resin, combinations of
these, or the like.
[0033] Once the encapsulant 108 has been forced into the cavity
such that the encapsulant 108 encapsulates the region around and
between the first semiconductor device 107 and the second
semiconductor device 109, the encapsulant 108 may be cured in order
to harden the encapsulant 108 for optimum protection. While the
exact curing process is dependent at least in part on the
particular material chosen for the encapsulant 108, in an
embodiment in which molding compound is chosen as the encapsulant
108, the curing could occur through a process such as heating the
encapsulant 108 to between about 100.degree. C. and about
200.degree. C., such as about 150.degree. C. for about 30 minutes
to about 2400 minutes, such as about 60 minutes. Additionally,
initiators and/or catalysts may be included within the encapsulant
108 to better control the curing process.
[0034] However, as one having ordinary skill in the art will
recognize, the curing process described above is merely an
exemplary process and is not meant to limit the current
embodiments. Other curing processes, such as irradiation or even
allowing the encapsulant 108 to harden at ambient temperature, may
alternatively be used. Any suitable curing process may be used, and
all such processes are fully intended to be included within the
scope of the embodiments discussed herein.
[0035] However, because of the transfer molding process, the first
semiconductor device 107, the second semiconductor device 109, and
the encapsulant 108 do not finish the encapsulation process being
planar with each other. In some embodiments, a top surface of the
encapsulant 108 will have an uneven shape extending from the first
semiconductor device 107 to the second semiconductor device 109.
Such a non-planar surface can lead to problems and defects during
the manufacturing of subsequent, overlying layers.
[0036] FIG. 1 also illustrates a placement of a first dielectric
layer 119 over the first semiconductor device 107 and the second
semiconductor device 109. In an embodiment the first dielectric
layer 119 may be a photosensitive polybenzoxazole (PBO), although
any other suitable material, such as polyimide, BCB, epoxy,
silicone, acrylate, phenol resin, siloxane, fluorinated polymer, or
polynorbornene, may alternatively be applied. In an embodiment in
which the first dielectric layer 119 is photosensitive PBO, the
photosensitive PBO may be applied using, e.g., a spin coating
process, a dry-film lamination process, a spray coating process, a
blade coating process, or the like and may have a first thickness
T.sub.1 over the first semiconductor device 107 and the second
semiconductor device 109 of between about 3 .mu.m and about 15
.mu.m, such as about 10 .mu.m.
[0037] However, as can be seen in FIG. 1, with the presence of the
encapsulant 108 that is not planar, and also with the presence of
the first contact pad 111, the second contact pad 113, the first
passivation layer 115 and the second passivation layer 117, the top
surface of the first dielectric layer 119 also has a non-planar
shape that is curved at various points. Such an uneven topography
of the first dielectric layer 119 will work to limit the patterning
capability of overlying layers (such as the first redistribution
layer 401 discussed further below with respect to FIG. 4) as
dimensions are further reduced into the sub-micron regime.
[0038] Once placed over the first semiconductor device 107 and the
second semiconductor device 109, the first dielectric layer 119 may
be patterned and developed in order to expose portions of the first
contact pad 111 and the second contact pad 113. In an embodiment in
which the first dielectric layer 119 in photosensitive PBO, the
patterning may be performed by initially exposing the first
dielectric layer 119 to an energy source to form an exposed region
and an unexposed region within the first dielectric layer 119. In
an embodiment the exposure may be initiated by placing the first
semiconductor device 107 and the second semiconductor device 109
(with the first dielectric layer 119) into an imaging device (not
separately illustrated in FIG. 1) for exposure. The imaging device
may comprise a support plate, an energy source, a patterned mask
between the support plate and the energy source, and various
optics. In an embodiment the support plate is a surface to which
the first semiconductor device 107 and the second semiconductor
device 109 may be placed or attached to and which provides support
and control to the first semiconductor device 107 and the second
semiconductor device 109 during exposure of the first dielectric
layer 119. Additionally, the support plate may be movable along one
or more axes, as well as providing any desired heating or cooling
to the first semiconductor device 107 and the second semiconductor
device 109 in order to prevent temperature gradients from affecting
the exposure process.
[0039] In an embodiment the energy source supplies energy such as
light to the first dielectric layer 119 in order to induce a
reaction within the first dielectric layer 119, which chemically
alters those portions of the first dielectric layer 119 to which
the energy impinges. In an embodiment the energy may be
electromagnetic radiation, such as g-rays (with a wavelength of
about 436 nm), i-rays (with a wavelength of about 365 nm),
ultraviolet radiation, far ultraviolet radiation, x-rays, electron
beams, or the like. The energy source may be a source of the
electromagnetic radiation, and may be a KrF excimer laser light
(with a wavelength of 248 nm), an ArF excimer laser light (with a
wavelength of 193 nm), a F2 excimer laser light (with a wavelength
of 157 nm), or the like, although any other suitable source of
energy, such as mercury vapor lamps, xenon lamps, carbon arc lamps
or the like, may alternatively be utilized.
[0040] The patterned mask is located between the energy source and
the first dielectric layer 119 in order to block portions of the
energy to form a patterned energy prior to the energy actually
impinging upon the first dielectric layer 119. In an embodiment the
patterned mask may comprise a series of layers (e.g., substrate,
absorbance layers, anti-reflective coating layers, shielding
layers, etc.) to reflect, absorb, or otherwise block portions of
the energy from reaching those portions of the first dielectric
layer 119 which are not desired to be illuminated. The desired
pattern may be formed in the patterned mask by forming openings
through the patterned mask in the desired shape of
illumination.
[0041] Optics may be used to concentrate, expand, reflect, or
otherwise control the energy as it leaves the energy source, is
patterned by the patterned mask, and is directed towards the first
dielectric layer 119. In an embodiment the optics comprise one or
more lenses, mirrors, filters, combinations of these, or the like
to control the energy along its path. Elements of the optics (e.g.,
individual lenses, mirrors, etc.) may also be located at any
location between the energy source (where the energy is generated)
and the first dielectric layer 119.
[0042] In an embodiment the first semiconductor device 107 and the
second semiconductor device 109 are placed on the support plate.
Once the pattern has been aligned to the first semiconductor device
107 and the second semiconductor device 109, the energy source
generates the desired energy (e.g., light) which passes through the
patterned mask and the optics on its way to the first dielectric
layer 119. The patterned energy impinges upon portions of the first
dielectric layer 119, chemically altering the first dielectric
layer 119 in those portions that were illuminated through the
patterned mask.
[0043] Once exposed the first dielectric layer 119 is developed in
order to separate the exposed region from the unexposed region. In
an embodiment the first dielectric layer 119 is developed using,
e.g., a developer (not separately illustrated in FIG. 1), such as
an aqueous basic developer such as tetramethylammonium hydroxide
(TMAH). Alternatively, the developer may comprise a base in an
aqueous solution such as an inorganic alkali such as potassium
hydroxide, sodium hydroxide, or ammonia water. Alternatively, a
primary amine such as ethylamine or n-propylamine, a secondary
amine such as diethylamine or di-n-propylamine, a tertiary amine
such as triethylamine, an alcoholamine such as triethanolamine, a
quaternary ammonium salt such as tetraethylammonium hydroxide,
combinations of these, and the like may be utilized.
[0044] Additionally, after the first dielectric layer 119 has been
developed, the first dielectric layer 119 may be cured in order to
harden the first dielectric layer 119. While the exact curing
process is dependent at least in part on the particular material
chosen for the first dielectric layer 119, in an embodiment in
which photosensitive polybenzoxazole is utilized as the first
dielectric layer 119, the curing could occur through a process such
as heating the first dielectric layer 119 to between about
150.degree. C. and about 350.degree. C., such as about 230.degree.
C. for about 1800 sec to about 14400 sec, such as about 3600
sec.
[0045] However, as one having ordinary skill in the art will
recognize, the curing process described above is merely an
exemplary process and is not meant to limit the current
embodiments. Other curing processes, such as irradiation or even
allowing the encapsulant 108 to harden at ambient temperature, may
alternatively be used. Any suitable curing process may be used, and
all such processes are fully intended to be included within the
scope of the embodiments discussed herein.
[0046] However, as illustrated in FIG. 1, when the first dielectric
layer 119 is placed over the first semiconductor device 107 (with
the first contact pad 111), the second semiconductor device 109
(with the second contact pad 113), and the encapsulant 108, the
unevenness of these surfaces will cause the top surface of the
first dielectric layer 119 to also be uneven and not be planar.
Such unevenness can cause problems during the application and
manufacturing of overlying layers.
[0047] As such, FIG. 2 illustrates a first planarization process
(represented in FIG. 2 by the label 200) of the first dielectric
layer 119 after the patterning of the first dielectric layer 119.
In an embodiment the first planarization process 200 may be
performed using, e.g., a chemical mechanical polishing (CMP)
process whereby an abrasive platen 201 may, e.g., be rotatably
applied to the first dielectric layer 119 in order to mechanically
grind and remove the first dielectric layer 119. In an embodiment
the platen may be rotated at a speed of between about 20 rpm and
about 600 rpm, such as about 100 rpm.
[0048] In order to assist in the removal process, a CMP slurry 203
may additionally be added in addition to the simple grinding
process of the platen 201. In an embodiment the CMP slurry 203 may
comprise abrasives such as silica, alumina and ceria which will
work in conjunction with the platen 201 to grind and remove the
first dielectric layer 119. The abrasives within the CMP slurry 203
may have a concentration of between about 0.2% and about 5%, such
as about 0.5%, although any suitable combination may alternatively
be utilized.
[0049] Additionally, a chemical reactant may be added to the CMP
slurry 203 in order to help react the first dielectric layer 119
into a material which is more easily removable by the platen 201
and the abrasives. As such, while the material of the chemical
reactant is dependent at least in part upon the material chosen for
the first dielectric layer 119, in an embodiment in which the first
dielectric layer 119 is a photosensitive PBO, the chemical reactant
may be a reactant such as hydrogen peroxide at a concentration of
less than about 5%, such as about 0.5%. However, any suitable
reactants at any suitable concentration may alternatively be
utilized.
[0050] However, while the CMP process that utilizes the platen 201
and the CMP slurry 203 is described above, this description is
intended to be illustrative and is not intended to be limiting.
Rather, any suitable planarization process, such as a physical
grinding process (without the CMP slurry 203 described above) or a
series of one or more etches, may alternatively be utilized. Any
suitable process to planarize the first dielectric layer 119 may be
used, and all such processes are fully intended to be included
within the scope of the embodiments.
[0051] In an embodiment the first planarization process 200 is
utilized to planarize the first dielectric layer 119 and
effectively reset the planarity of the structure. As such, the
planarization process removes the material of the first dielectric
layer 119 (and reduces the thickness of the first dielectric layer
119) until a desired degree of planarity is reached, such as by
reducing the unevenness of the first dielectric layer 119 until the
first dielectric layer 119 has a planarity (the difference in
topography at the surface of the first dielectric layer 119 as by
measured by, e.g., an alpha-step profiler or optical profiler) of
less than about 5 .mu.m, such as about 1 .mu.m. In an embodiment
the planarization process may be continued until the first
dielectric layer 119 has a second thickness T.sub.2 of between
about 0.5 .mu.m and about 10 .mu.m, such as about 5 .mu.m.
[0052] FIG. 3 illustrates that, once the first dielectric layer 119
has been planarized, a first seed layer 301 and a first photoresist
303 are formed over the first dielectric layer 119. In an
embodiment an optional plasma ashing cleaning process may be
utilized prior to the formation of the first seed layer 301 in
order to clean and prepare the first dielectric layer 119 to
receive the first seed layer 301. The plasma ashing cleaning
process may be performed by generating a plasma from a cleaning
precursor such as oxygen or the like and then exposing the first
dielectric layer 119 to the plasma within an inert environment such
as nitrogen, argon, or the like. However, any suitable cleaning
process may alternatively be utilized.
[0053] The first seed layer 301 is a thin layer of a conductive
material that aids in the formation of a thicker layer during
subsequent processing steps. The first seed layer 301 may comprise
a layer of titanium about 700 .ANG. thick followed by a layer of
copper about 3,000 .ANG. thick. The first seed layer 301 may be
created using processes such as sputtering, evaporation, or PECVD
processes, depending upon the desired materials. The first seed
layer 301 may be formed to have a thickness of between about 0.1
.mu.m and about 0.7 .mu.m, such as about 0.4 .mu.m.
[0054] Once the first seed layer 301 has been formed, the first
photoresist 303 may be placed and patterned over the first seed
layer 301. In an embodiment the first photoresist 303 may be placed
on the first seed layer 301 using, e.g., a spin coating technique
to a height of between about 1 .mu.m and about 15 .mu.m, such as
about 7 .mu.m. Once in place, the first photoresist 303 may then be
patterned by exposing the first photoresist 303 to a patterned
energy source (e.g., a patterned light source) so as to induce a
chemical reaction, thereby inducing a physical change in those
portions of the first photoresist 303 exposed to the patterned
light source. A developer is then applied to the exposed first
photoresist 303 to take advantage of the physical changes and
selectively remove either the exposed portion of the first
photoresist 303 or the unexposed portion of the first photoresist
303, depending upon the desired pattern.
[0055] In an embodiment the pattern formed into the first
photoresist 303 is a pattern that will be utilized to form a first
redistribution layer (RDL) 401 (not illustrated in FIG. 3 but
illustrated and discussed further with respect to FIG. 4) on the
first seed layer 301. As such, the first photoresist 303 may be
patterned to expose portions of the first seed layer 301, including
portions of the first seed layer 301 that extend through the first
dielectric layer 119 to make electrical contact with the first
contact pad 111.
[0056] FIG. 4 illustrates that, once the first photoresist 303 has
been patterned, the first redistribution layer 401 is formed on the
first seed layer 301 within the first photoresist 303. In an
embodiment the first redistribution layer 401 comprises one or more
conductive materials, such as copper, tungsten, other conductive
metals, or the like, and may be formed, for example, by
electroplating, electroless plating, or the like. In an embodiment,
an electroplating process is used wherein the first seed layer 301
and the first photoresist 303 are submerged or immersed in an
electroplating solution. The first seed layer 301 surface is
electrically connected to the negative side of an external DC power
supply such that the first seed layer 301 functions as the cathode
in the electroplating process. A solid conductive anode, such as a
copper anode, is also immersed in the solution and is attached to
the positive side of the power supply. The atoms from the anode are
dissolved into the solution, from which the cathode, e.g., the
first seed layer 301, acquires the dissolved atoms, thereby plating
the exposed conductive areas of the first seed layer 301 within the
opening of the first photoresist 303.
[0057] Once the first redistribution layer 401 has been formed
using the first photoresist 303 and the first seed layer 301, the
first photoresist 303 may be removed using a suitable removal
process. In an embodiment, a plasma ashing process may be used to
remove the first photoresist 303, whereby the temperature of the
first photoresist 303 may be increased until the first photoresist
303 experiences a thermal decomposition and may be removed.
However, any other suitable process, such as a wet strip, may
alternatively be utilized. The removal of the first photoresist 303
may expose the underlying portions of the first seed layer 301.
[0058] After the removal of the first photoresist 303 exposes the
underlying first seed layer 301, these portions of the first seed
layer 301 are removed. In an embodiment the exposed portions of the
first seed layer 301 (e.g., those portions that are not covered by
the first redistribution layer 401) may be removed by, for example,
a wet or dry etching process. For example, in a dry etching process
reactants may be directed towards the first seed layer 301, using
the first redistribution layer 401 as a mask. Alternatively,
etchants may be sprayed or otherwise put into contact with the
first seed layer 301 in order to remove the exposed portions of the
first seed layer 301.
[0059] After the first redistribution layer 401 has been formed,
additional manufacturing may be performed over the first
redistribution layer 401. In an embodiment, a third passivation
layer may be formed to cover and protect the first redistribution
layer 401, openings may be formed to portions of the first
redistribution layer 401, and external contacts such as solder
balls or copper pillars may be placed in electrical connection with
the first redistribution layer 401 to provide electrical connection
to external devices such as printed circuit boards or other
packages with other semiconductor devices.
[0060] Additionally, the carrier substrate 101 may be removed and
further processing may be performed on an opposite side of the
first semiconductor device 107 and the second semiconductor device
109 from the first redistribution layer 401. For example,
additional metallization and redistribution layers may be formed
over the back side of the first semiconductor device 107 and the
second semiconductor device 109, and external connections may be
formed in physical or electrical connection with the additional
metallization and redistribution layers over the back side of the
first semiconductor device 107 and the second semiconductor device
109. Finally, if desired, a singulation process may be performed in
order to separate the first semiconductor device 107 and the second
semiconductor device 109, or they may be left unsingulated.
However, any suitable processing may be performed, and all such
processing is fully intended to be included within the scope of the
embodiments.
[0061] Additionally, by resetting the planarity of the first
dielectric layer 119, overlying structures will also be formed on a
more planar surface. As such, defects that would normally be caused
by the non-planarity of the underlying surface can be avoided and
finer lines can be realized (such as finer redistribution lines).
With fewer defects, a more reliable process can be formed, and
larger yields can be realized.
[0062] FIG. 5 illustrates another embodiment that may be utilized
to compensate for an uneven first dielectric layer 119. In this
embodiment, once the encapsulant 108 has been applied (using, e.g.,
the transfer or lamination molding process), the first dielectric
layer 119 may be applied over the first semiconductor device 107,
the second semiconductor device 109, and the encapsulant 108 and
then patterned, cured, and cleaned (with e.g., a plasma ashing
process) to expose the first contact pad 111 and the second contact
pad 113. However, the unevenness caused by the step height created
by the first contact pad 111, the second contact pad 113, the first
passivation layer 115, and the second passivation layer 117 causes
further unevenness in the overlying first dielectric layer 119
after the first dielectric layer 119 has been applied.
[0063] In this embodiment the unevenness is mitigated by initially
forming a second seed layer 501 and a first conductive material 503
over the first dielectric layer 119 after the plasma cleaning
process and prior to resetting the planarity of the first
dielectric layer 119. In an embodiment the second seed layer 501
may be formed to line the openings through the first dielectric
layer 119 to the first contact pad 111 and the second contact pad
113, and may be formed of similar material and using similar
processes as the first seed layer 301. For example, the second seed
layer 501 may be a layer of titanium followed by a layer of copper
formed using a process such as sputtering. However, any suitable
material and process may alternatively be utilized.
[0064] Once the second seed layer 501 has been formed, the first
conductive material 503 may be formed on the second seed layer 501.
In an embodiment the first conductive material 503 may be formed of
a similar material and using similar processes as the first
redistribution layer 401 (not illustrated in FIG. 5 but illustrated
and described above with respect to FIG. 4). For example, the first
conductive material 503 may be formed of a material such as copper
using a process such as electroplating or electroless plating.
However, any suitable material and process may alternatively be
utilized to form the first conductive material 503.
[0065] In an embodiment the first conductive material 503 is
deposited to completely fill the openings through the first
dielectric layer 119 to the first contact pad 111 and the second
contact pad 113. Additionally, to ensure a complete filling of the
openings to the first contact pad 111 and the second contact pad
113, the first conductive material 503 may be deposited to overfill
the openings and also form a layer over the first dielectric layer
119. In an embodiment the first conductive material 503 may be
deposited to a third thickness T.sub.3 over the first dielectric
layer 119 of between about 0.05 .mu.m and about 7 .mu.m, such as
about 4 .mu.m, although any suitable thickness may be utilized.
[0066] FIG. 6 illustrates a second planarization process
(represented in FIG. 6 by the arrow labeled 600) used to planarize
the first conductive material 503 and the first dielectric layer
119 and to isolate the first conductive material 503 within the
openings of the first dielectric layer 119. In an embodiment the
second planarization process 600 may be performed similar to the
first planarization process 200 (described above with respect to
FIG. 2). For example, a chemical mechanical polishing process that
utilizes the platen 201 along with the CMP slurry 203 may be
utilized, although any suitable planarization process, such as
simple mechanical grinding or a series of one or more etches, may
alternatively be utilized.
[0067] However, because the second planarization process 600 is
utilized to planarize both the first dielectric layer 119 as well
as the first conductive material 503 (and its associated second
seed layer 501), the parameters of the second planarization process
600 may be the same as (if appropriate) or different than the
parameters of the first planarization process 200. For example, in
the second planarization process 600, the platen 201 may be rotated
at a speed of between about 20 rpm and about 600 rpm, such as about
100 rpm. Further, the CMP slurry 203 may utilize an etchant such as
hydrogen peroxide at a concentration of less than about 5%, such as
about 0.5%, and comprise abrasives such as silica, alumina and
ceria at a concentration of between about 0.2% and about 5%, such
as about 0.5%. However, any suitable parameters for the second
planarization process 600 may alternatively be utilized.
[0068] The second planarization process 600 is used to remove the
first conductive material 503 from over the first dielectric layer
119 as well as to planarize the first dielectric layer 119 in order
to reset the planarity of the structure. As such, the first
dielectric layer 119 may be thinned to a fourth thickness T.sub.4
of between about 0.5 .mu.m and about 10 .mu.m, such as about 5
.mu.m. However, any suitable thickness may alternatively be
utilized.
[0069] FIG. 7 illustrates a formation of a third seed layer 701
over the first dielectric layer 119 and also over and in electrical
connection with the first conductive material 503 within the first
dielectric layer 119. In an embodiment the third seed layer 701 may
be formed using similar materials and similar processes as the
first seed layer 301, such as being a material such as titanium and
copper formed using a process such as sputtering. However, any
suitable material or method of formation may alternatively be
utilized.
[0070] FIG. 7 also illustrates a formation of a second photoresist
703 over the third seed layer 701. In an embodiment the second
photoresist 703 may be formed using similar materials and similar
processes as the first photoresist 303 (described above with
respect to FIG. 3). For example, the second photoresist 703 may be
applied, exposed, and developed to form a shape for a second
redistribution layer 801 (not illustrated in FIG. 7 but illustrated
and described below with respect to FIG. 8). However, any suitable
material or process that can be used to mask the third seed layer
701 may alternatively be utilized.
[0071] FIG. 8 illustrates that, once the second photoresist 703 has
been applied and patterned to expose portions of the third seed
layer 701, the second redistribution layer 801 may be formed on top
of the exposed portions of the third seed layer 701. In an
embodiment the second redistribution layer 801 may be formed of
similar materials and using similar processes as the first
redistribution layer 401 (described above with respect to FIG. 4).
For example, the second redistribution layer 801 may be formed of a
material such as copper using a process such as plating or
electroplating, although any suitable material and process may
alternatively be utilized.
[0072] Once the second redistribution layer 801 has been formed
using the second photoresist 703 and the third seed layer 701, the
second photoresist 703 may be removed using a suitable removal
process. In an embodiment, a plasma ashing process may be used to
remove the second photoresist 703, whereby the temperature of the
second photoresist 703 may be increased until the second
photoresist 703 experiences a thermal decomposition and may be
removed. However, any other suitable process, such as a wet strip,
may alternatively be utilized. The removal of the second
photoresist 703 may expose the underlying portions of the third
seed layer 701.
[0073] After the removal of the second photoresist 703 exposes the
underlying third seed layer 701, these portions of the third seed
layer 701 are removed. In an embodiment the exposed portions of the
third seed layer 701 (e.g., those portions that are not covered by
the second redistribution layer 801) may be removed by, for
example, a wet or dry etching process. For example, in a dry
etching process reactants may be directed towards the third seed
layer 701, using the second redistribution layer 801 as a mask.
Alternatively, etchants may be sprayed or otherwise put into
contact with the third seed layer 701 in order to remove the
exposed portions of the third seed layer 701.
[0074] After the second redistribution layer 801 has been formed,
additional manufacturing may be performed over the second
redistribution layer 801. In an embodiment, a third passivation
layer may be formed to cover and protect the second redistribution
layer 801, openings may be formed to portions of the second
redistribution layer 801, and external contacts such as solder
balls or copper pillars may be placed in electrical connection with
the second redistribution layer 801 to provide electrical
connection to external devices such as printed circuit boards or
other packages with other semiconductor devices.
[0075] Additionally, the carrier substrate 101 may be removed and
further processing may be performed on an opposite side of the
first semiconductor device 107 and the second semiconductor device
109 from the second redistribution layer 801. For example,
additional metallization and redistribution layers may be formed
over the back side of the first semiconductor device 107 and the
second semiconductor device 109, and external connections may be
formed in physical or electrical connection with the additional
metallization and redistribution layers over the back side of the
first semiconductor device 107 and the second semiconductor device
109. However, any suitable processing may be performed, and all
such processing is fully intended to be included within the scope
of the embodiments.
[0076] By utilizing the second planarization process 600 to
planarize the first dielectric layer 119 and the first conductive
material 503, the unevenness of the first dielectric layer 119
caused by the underlying issues with step heights and the
encapsulant 108 may be mitigated. Additionally, by mitigating the
unevenness of the first dielectric layer 119, the planarity of the
overall structure may be reset. Such a reset helps to ensure that
overlying structures will be formed on a planar surface, and
imperfections associated with non-planar structures can be
mitigated.
[0077] FIG. 9 illustrates that, while the process described above
with respect to FIGS. 1-8 have been described with respect to a
transfer or laminate molding process, this was intended to be
illustrative and is not intended to be limiting. Rather, any
suitable molding process, such as a compression molding process (or
immersion molding process) may alternatively be used. In one such
embodiment, prior to encapsulation, a first conductive connector
903 is formed over the first contact pad 111, and a second
dielectric layer 901 is formed over the first conductive connector
903.
[0078] In an embodiment, the first conductive connector 903 may be
formed by initially applying a seed layer (not separately
illustrated in FIG. 9) along the exposed surfaces, and then placing
and patterning a mask (also not separately illustrated in FIG. 9)
such as a photoresist over the seed layer. Once the mask has been
formed to expose portions of the seed layer where the first
conductive connector 903 is desired, a conductive material such as
copper may be plated onto the exposed seed layer, thereby filling
the openings formed within the mask. The mask may then be
removed.
[0079] Once the first conductive connector 903 has been formed, the
second dielectric layer 901 may be formed over the first conductive
connector 903. In an embodiment the second dielectric layer 901 may
be similar to the first dielectric layer 119, such as by being a
photosensitive polybenzoxazole (PBO) applied using a spin coating
process, although any suitable material or method of manufacture
may be used.
[0080] A third dielectric layer 905 and a second conductive
connector 907 may be formed on the second semiconductor device 109
using similar material and methods as described above with respect
to the second dielectric layer 901 and the first conductive
connector 903, respectively. For example, the second conductive
connector 907 may be formed within the third dielectric layer 905
and in electrical contact with the second contact pad 113 and the
third dielectric layer 905 may be PBO that has been formed over the
second conductive connector 907. However, any suitable material and
method of manufacture may be utilized for the second conductive
connector 907.
[0081] Once the second dielectric layer 901, the third dielectric
layer 905, the first conductive connector 903 and the second
conductive connector 907 have been formed, the first semiconductor
device 107 and the second semiconductor device 109 may be placed on
the carrier substrate 101, and may be encapsulated using, e.g., the
compression molding process or the immersion molding process. In an
embodiment in which a compression molding process is used, the
compression molding process may be started by initially placing the
first semiconductor device 107 and the second semiconductor device
109 within a cavity of a molding device (not illustrated in FIG.
9), and the cavity may be hermetically sealed.
[0082] Once the first semiconductor device 107 and the second
semiconductor device 109 are within the cavity, the encapsulant 108
may be placed within the cavity before the cavity is hermetically
sealed. In an embodiment the encapsulant 108 may be a molding
compound resin such as polyimide, PPS, PEEK, PES, a heat resistant
crystal resin, combinations of these, or the like.
[0083] In an embodiment, the cavity of the molding device is shaped
to place the encapsulant 108 such that it has a thickness that is
greater than the first semiconductor device 107 and the second
semiconductor device 109 so that the encapsulant 108 fully covers
the first semiconductor device 107 and the second semiconductor
device 109 and also fills a space between the first semiconductor
device 107 and the second semiconductor device 109. Once the
encapsulant 108 has been placed into the cavity such that the
encapsulant 108 encapsulates the region around and between the
first semiconductor device 107 and the second semiconductor device
109, the encapsulant 108 may be cured in order to harden the
encapsulant 108 for optimum protection. While the exact curing
process is dependent at least in part on the particular material
chosen for the encapsulant 108, in an embodiment in which molding
compound is chosen as the encapsulant 108, the curing could occur
through a process such as heating the encapsulant 108 to between
about 100.degree. C. and about 200.degree. C., such as about
150.degree. C. for about 30 minutes to about 2400 minutes, such as
about 60 minutes. Additionally, initiators and/or catalysts may be
included within the encapsulant 108 to better control the curing
process.
[0084] However, as one having ordinary skill in the art will
recognize, the curing process described above is merely an
exemplary process and is not meant to limit the current
embodiments. Other curing processes, such as irradiation or even
allowing the encapsulant 108 to harden at ambient temperature, may
alternatively be used. Any suitable curing process may be used, and
all such processes are fully intended to be included within the
scope of the embodiments discussed herein.
[0085] Once in place and cured, the encapsulant 108 may be
planarized to expose the top surfaces of the second dielectric
layer 901, the third dielectric layer 905, the first conductive
connector 903, and the second conductive connector 907 for further
processing. In an embodiment a suitable planarization process, such
as a chemical mechanical polishing process, a physical grinding
process, or a series of one or more etches may be used to planarize
the encapsulant 108 with the second dielectric layer 901, the third
dielectric layer 905, the first conductive connector 903, and the
second conductive connector 907. In an embodiment the planarization
process may be continued until the second dielectric layer 901 has
a fifth thickness T.sub.5 of between about 5 .mu.m and about 30
.mu.m, such as about 20 .mu.m, although any suitable thickness may
be used.
[0086] However, because of the differences in materials, such as
the differences between the encapsulant 108, the second dielectric
layer 901, the third dielectric layer 905, the first conductive
connector 903, and the second conductive connector 907, the
encapsulant 108 does not finish the process being planar. Rather,
in a process known as dishing, a top surface of the encapsulant 108
will have a curved shape extending from the second dielectric later
901 to the third dielectric layer 905. Such a non-planar surface
can lead to problems and defects during the manufacturing of
subsequent, overlying layers. Additionally, during the compression
encapsulation process itself, voids 502 may be formed within the
encapsulant 108. During the planarization process such voids 502
may be exposed, further affecting the planarity of the top surface.
Voids may also be formed by the planarization process due to
lift-off of fillers (e.g., silica) in the encapsulant 108.
[0087] FIG. 10 illustrates a placement of the first dielectric
layer 119 over the second dielectric layer 901 and the third
dielectric layer 905. In an embodiment the first dielectric layer
119 may be applied as described above with respect to FIG. 1. For
example, the first dielectric layer 119 may be a photosensitive PBO
applied using, e.g., a spin coating process and then patterned and
developed in order to expose the first conductive connector 903 and
the second conductive connector 907. However, due to the non-planar
surface of the encapsulant 108, as well as the presence of the
voids 502 within the encapsulant 108, the first dielectric layer
119 in this embodiment as well will not have a planar top
surface.
[0088] FIG. 11 illustrates the use of the first planarization
process 200 in order to reset the planarity of the first dielectric
layer 119 prior to further processing. In this embodiment the first
planarization process 200 may be used as described above with
respect to FIG. 2. For example, the platen 201 may be used with the
CMP slurry 203 in a chemical mechanical polish to react and grind
the first dielectric layer 119 and form a planar top surface that
resets the planarity of the first dielectric layer 119.
[0089] FIG. 12 illustrates that, once the planarity of the first
dielectric layer 119 has been reset, the first redistribution layer
401 may be formed over the first dielectric layer 119 and in
electrical connection with the first conductive connector 903 and
the second conductive connector 907. In an embodiment the first
redistribution layer 401 may be formed as described above with
respect to FIGS. 3 and 4. For example, a plasma ashing cleaning
process may be used first, followed by a deposition of the first
seed layer 301. Once the first seed layer 301 has been formed, the
first photoresist 303 (not separately illustrated in FIG. 12) may
be placed and patterned over the first seed layer 301 in order to
provide a mask for plating the first redistribution layer 401. Once
the first photoresist 303 has been placed and patterned, the first
redistribution layer 401 is plated onto the exposed portions of the
first seed layer 301, the first photoresist 303 is removed, and
exposed portions of the first seed layer 301 (not covered by the
first redistribution layer 401) is removed using, e.g., an etch
process.
[0090] FIG. 13 illustrates another embodiment that may be utilized
to reset the planarity after a compression molding process is
utilized to place the encapsulant 108 between the first
semiconductor device 107 and the second semiconductor device 109.
In an embodiment the second dielectric layer 901 and the third
dielectric layer 905 have already been placed over the first
contact pad 111 and the second contact pad 113, and the first
conductive connector 903 and the second conductive connector 907
have been formed to extend through the second dielectric layer 901
and the third dielectric layer 905 as described above with respect
to FIG. 9. However, any suitable structures, combinations of
structures, or methods of manufacture may be utilized.
[0091] In this embodiment, however, rather than reset the planarity
of the first dielectric layer 119 prior to filling the openings
formed by the patterning of the first dielectric layer 119, the
second seed layer 501 and the first conductive material 503 are
formed as described above with respect to FIG. 5 prior to any
planarization process being performed on the first dielectric layer
119. For example, the second seed layer 501 may be formed to line
the openings through the first dielectric layer 119, and the first
conductive material 503 may be formed on the second seed layer 501
using, e.g., a plating process. However, any suitable materials and
processes may be utilized to fill and overfill the openings that
have been formed through the first dielectric layer 119 to expose
the first conductive connector 903 and the second conductive
connector 907.
[0092] FIG. 14 illustrates that, once the second seed layer 501 and
the first conductive material 503 have been formed, the second
planarization process 600 as described above with respect to FIG. 6
may be performed in order to planarize the first dielectric layer
119, the second seed layer 501, and the first conductive material
503 and to reset the planarity of the structure for further
processing. For example, in an embodiment the platen 201 along with
the CMP slurry 203 may be utilized in order to react and grind the
materials of the first dielectric layer 119, the second seed layer
501 and the first conductive material 503 in order to remove excess
portions of the second seed layer 501 and the first conductive
material 503 from outside of the openings within the first
dielectric layer 119. However, any suitable process of
planarization may be utilized in order to reset the planarity of
these structures.
[0093] FIG. 15 illustrates that, once the planarity of the first
dielectric layer 119 has been reset in this embodiment, the second
redistribution layer 801 may be formed over the first dielectric
layer 119 and in electrical connection with the first conductive
material 503 within the first dielectric layer 119. In an
embodiment the second redistribution layer 801 may be formed as
described above with respect to FIGS. 7 and 8. For example, a
plasma ashing cleaning process may be used first, followed by a
deposition of the third seed layer 701. Once the third seed layer
701 has been formed, the second photoresist 703 (not separately
illustrated in FIG. 15) may be placed and patterned over the third
seed layer 701 in order to provide a mask for plating the second
redistribution layer 801. Once the second photoresist 703 has been
placed and patterned, the second redistribution layer 801 is plated
onto the exposed portions of the third seed layer 701, the second
photoresist 703 is removed, and exposed portions of the third seed
layer 701 (not covered by the second redistribution layer 801) are
removed using, e.g., an etch process.
[0094] By resetting the planarity of the first dielectric layer
119, a smoother surface is present for subsequent processing
operations. By forming a more planar surface, defects and problems
that can occur from a non-planar surface as dimensions are further
reduced may be mitigated or eliminated. As such, more reliable
devices can be made with fewer defects and a larger yield.
[0095] The embodiments discussed above, which are illustrated
utilizing the first semiconductor device 107 and the second
semiconductor device 109, are intended to be illustrative only and
are not intended to be limiting upon the embodiments. Rather, the
embodiments described herein may be implemented in a wide range of
embodiments, such as other fan-out wafer level packages, integrated
fan out wafer level packages, or the like. All such embodiments are
fully intended to be included within the scope of the
embodiments.
[0096] In accordance with an embodiment, a method of manufacturing
a semiconductor device comprising encapsulating a first
semiconductor device and a second semiconductor device with an
encapsulant is provided. A dielectric material is applied over the
first semiconductor device and the second semiconductor device
after the encapsulating the first semiconductor device and the
second semiconductor device. The dielectric material is planarized
after the applying the dielectric material, and a redistribution
layer is formed over the dielectric material after the planarizing
the dielectric material, wherein the redistribution layer is in
electrical connection with the first semiconductor device and the
second semiconductor device.
[0097] In accordance with another embodiment, a method of
manufacturing a semiconductor device comprising encapsulating a
first semiconductor device and a second semiconductor device with
an encapsulant is provided. A dielectric material is applied over
the first semiconductor device, the second semiconductor device,
and the encapsulant, wherein the dielectric material has a
non-planar surface facing away from the first semiconductor device
and the second semiconductor device. The dielectric material is
patterned to form a first opening to a first contact on the first
semiconductor device and a second opening to a second contact on
the second semiconductor device. The first opening and the second
opening are filled with a conductive material, and the dielectric
material and the conductive material are planarized, wherein after
the planarizing the dielectric material and the conductive material
the conductive material is isolated within the dielectric material
and the dielectric material has an increased planarity.
[0098] In accordance with yet another embodiment, a method of
manufacturing a semiconductor device comprising applying a
photosensitive polybenzoxazole over a first semiconductor device, a
second semiconductor device, and an encapsulant between the first
semiconductor device and the second semiconductor device, wherein
the photosensitive polybenzoxazole has a non-planar surface after
the applying the photosensitive polybenzoxazole, is provided. The
photosensitive polybenzoxazole is patterned to form an opening
through the photosensitive polybenzoxazole, and the planarity of
the photosensitive polybenzoxazole is reset using a planarization
process.
[0099] The foregoing outlines features of several embodiments so
that those skilled in the art may better understand the aspects of
the present disclosure. Those skilled in the art should appreciate
that they may readily use the present disclosure as a basis for
designing or modifying other processes and structures for carrying
out the same purposes and/or achieving the same advantages of the
embodiments introduced herein. Those skilled in the art should also
realize that such equivalent constructions do not depart from the
spirit and scope of the present disclosure, and that they may make
various changes, substitutions, and alterations herein without
departing from the spirit and scope of the present disclosure.
* * * * *