U.S. patent application number 14/807875 was filed with the patent office on 2015-12-03 for system and method for generating extreme ultraviolet light.
This patent application is currently assigned to GIGAPHOTON INC.. The applicant listed for this patent is Gigaphoton Inc.. Invention is credited to Tsukasa HORI, Kouji KAKIZAKI, Osamu WAKABAYASHI, Tatsuya YANAGIDA.
Application Number | 20150351209 14/807875 |
Document ID | / |
Family ID | 46877332 |
Filed Date | 2015-12-03 |
United States Patent
Application |
20150351209 |
Kind Code |
A1 |
HORI; Tsukasa ; et
al. |
December 3, 2015 |
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
Abstract
A system includes a chamber, a laser beam apparatus configured
to generate a laser beam to be introduced into the chamber, a laser
controller for the laser beam apparatus to control at least a beam
intensity and an output timing of the laser beam, and a target
supply unit configured to supply a target material into the
chamber, the target material being irradiated with the laser beam
for generating extreme ultraviolet light.
Inventors: |
HORI; Tsukasa;
(Hiratsuka-shi, JP) ; KAKIZAKI; Kouji;
(Hiratsuka-shi, JP) ; YANAGIDA; Tatsuya;
(Hiratsuka-shi, JP) ; WAKABAYASHI; Osamu;
(Hiratsuka-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Gigaphoton Inc. |
Tochigi |
|
JP |
|
|
Assignee: |
GIGAPHOTON INC.
Tochigi
JP
|
Family ID: |
46877332 |
Appl. No.: |
14/807875 |
Filed: |
July 23, 2015 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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13492067 |
Jun 8, 2012 |
9113540 |
|
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14807875 |
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PCT/JP2011/052767 |
Feb 9, 2011 |
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13492067 |
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Current U.S.
Class: |
250/504R |
Current CPC
Class: |
H01S 3/094026 20130101;
H05G 2/003 20130101; H01S 3/2232 20130101; H01S 3/10061 20130101;
H01S 3/1643 20130101; H01S 3/1636 20130101; H01S 3/1106 20130101;
H01S 3/2383 20130101; H01S 3/02 20130101; H05G 2/005 20130101; H01S
3/131 20130101; H01S 3/2316 20130101; H05G 2/008 20130101 |
International
Class: |
H05G 2/00 20060101
H05G002/00; H01S 3/10 20060101 H01S003/10; H01S 3/02 20060101
H01S003/02; H01S 3/223 20060101 H01S003/223; H01S 3/094 20060101
H01S003/094; H01S 3/11 20060101 H01S003/11; H01S 3/131 20060101
H01S003/131; H01S 3/16 20060101 H01S003/16 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 19, 2010 |
JP |
2010-034889 |
Nov 29, 2010 |
JP |
2010-265789 |
Jan 27, 2011 |
JP |
2011-015691 |
Jun 15, 2011 |
JP |
2011-133111 |
Claims
1-11. (canceled)
12. A system comprising: a laser beam apparatus configured to
generate a laser beam; and a target supply unit configured to
supply a target material to be irradiated with the laser beam for
generating extreme ultraviolet light, wherein the laser beam
apparatus is configured to: generate a first pre-pulse laser beam
with which the target material is irradiated, the first pre-pulse
laser beam having a pulse duration of less than 1 ns, generate a
second pre-pulse laser beam with which the target material
irradiated with the first pre-pulse laser beam is irradiated, and
generate a main pulse laser beam with which the target material
irradiated with the second pre-pulse laser beam is irradiated.
13. The system according to claim 12, wherein the laser beam
apparatus includes a CO.sub.2 laser apparatus.
14. The system according to claim 12, wherein the laser beam
apparatus comprises: a first laser apparatus configured to generate
the first pre-pulse laser beam with which the target material is
irradiated; a second laser apparatus configured to generate the
second pre-pulse laser beam with which the target material
irradiated with the first pre-pulse laser beam is irradiated; and a
third laser apparatus configured to generate the main pulse laser
beam with which the target material irradiated with the second
pre-pulse laser beam is irradiated.
15. The system according to claim 14, wherein the first and second
laser apparatuses are configured to generate laser beams each
having a first wavelength, and the third laser apparatus is
configured to generate a laser beam having a second wavelength
longer than the first wavelength.
16. The system according to claim 15, wherein the first laser
apparatus is a first YAG laser apparatus; the second laser
apparatus is a second YAG laser apparatus; and the third laser
apparatus is a CO.sub.2 laser apparatus.
17. The system according to claim 12, wherein the laser beam
apparatus comprises: a first laser apparatus configured to generate
the first pre-pulse laser beam with which the target material is
irradiated and the second pre-pulse laser beam with which the
target material irradiated with the first pre-pulse laser beam is
irradiated; and a second laser apparatus configured to generate the
main pulse laser beam with which the target material irradiated
with the second pre-pulse laser beam is irradiated.
18. The system according to claim 17, wherein the first laser
apparatus is configured to generate a laser beam having a first
wavelength, and the second laser apparatus is configured to
generate a laser beam having a second wavelength longer than the
first wavelength.
19. The system according to claim 18, wherein the first laser
apparatus is a YAG laser apparatus; and the second laser apparatus
is a CO.sub.2 laser apparatus.
20. The system according to claim 18, wherein the first laser
apparatus is a fiber laser apparatus; and the second laser
apparatus is a CO.sub.2 laser apparatus.
21. The system according to claim 12, wherein the laser beam
apparatus includes a mode-locked laser apparatus.
22. The system according to claim 21, wherein the mode-locked laser
apparatus is a Ti:sapphire laser.
23. The system according to claim 21, wherein the mode-locked laser
apparatus is a fiber laser.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application is a continuation of U.S. patent
application Ser. No. 13/492,0687, filed on Jun. 8, 2012, which is a
continuation-in-part of International Application No.
PCT/JP2011/052767, with an international filing date of Feb. 9,
2011, which claims priority from Japanese Patent Application No.
2010-034889 filed Feb. 19, 2010, Japanese Patent Application No.
2010-265789 filed Nov. 29, 2010, and Japanese Patent Application
No. 2011-015691 filed Jan. 27, 2011. The present application
further claims priority from Japanese Patent Application No.
2011-133111 filed Jun. 15, 2011.
BACKGROUND
[0002] 1. Technical Field
[0003] This disclosure relates to a system and a method for
generating extreme ultraviolet (EUV) light.
[0004] 2. Related Art
[0005] In recent years, semiconductor production processes have
become capable of producing semiconductor devices with increasingly
fine feature sizes, as photolithography has been making rapid
progress toward finer fabrication. In the next generation of
semiconductor production processes, microfabrication with feature
sizes at 60 nm to 45 nm, and further, microfabrication with feature
sizes of 32 nm or less will be required. In order to meet the
demand for microfabrication with feature sizes of 32 nm or less,
for example, an exposure apparatus is needed in which a system for
generating EUV light at a wavelength of approximately 13 nm is
combined with a reduced projection reflective optical system.
[0006] Three kinds of systems for generating EUV light are known in
general, which include a Laser Produced Plasma (LPP) type system in
which plasma is generated by irradiating a target material with a
laser beam, a Discharge Produced Plasma (DPP) type system in which
plasma is generated by electric discharge, and a Synchrotron
Radiation (SR) type system in which orbital radiation is used.
SUMMARY
[0007] A system according to one aspect of this disclosure may
include a chamber, a laser beam apparatus configured to generate a
laser beam to be introduced into the chamber, a laser controller
for the laser beam apparatus to control at least a beam intensity
and an output timing of the laser beam, and a target supply unit
configured to supply a target material into the chamber. The target
material may be irradiated with the laser beam for generating
extreme ultraviolet light.
[0008] A system according to another aspect of this disclosure may
include a chamber, a laser beam apparatus configured to output a
laser beam into the chamber, a laser controller for the laser beam
apparatus to control energy of the laser beam to achieve a
predetermined fluence, and a target supply unit configured to
supply a target material into the chamber. The target material may
be irradiated with the laser beam for generating extreme
ultraviolet light.
[0009] A method according to yet another aspect of this disclosure
for generating extreme ultraviolet light in a system that includes
a laser beam apparatus, a laser controller, a chamber, and a target
supply unit may include supplying a target material into the
chamber in a form of a droplet, irradiating the target material
with a pre-pulse laser beam from the laser beam apparatus, and
irradiating the target material having been irradiated with the
pre-pulse laser beam with a main pulse laser beam from the laser
beam apparatus in a range of 0.5 .mu.s to 3 .mu.s after the target
material is irradiated with the pre-pulse laser beam.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] FIG. 1 schematically illustrates an exemplary configuration
of an EUV light generation system according to one embodiment of
this disclosure.
[0011] FIG. 2 is a conceptual diagram showing a droplet being
irradiated with a pre-pulse laser beam.
[0012] FIGS. 3A through 3C show simulation results of diffusion
when a molten tin droplet is irradiated with a pre-pulse laser
beam.
[0013] FIG. 3D is a photograph capturing a molten tin droplet being
irradiated with a pre-pulse laser beam.
[0014] FIG. 4A schematically shows a molten tin droplet being
irradiated with a pre-pulse laser beam, as viewed in the direction
perpendicular to the beam axis.
[0015] FIG. 4B schematically shows a molten tin droplet being
irradiated with a pre-pulse laser beam, as viewed in the direction
of the beam axis.
[0016] FIGS. 5A through 5H show the simulation results of diffusion
when a molten tin droplet having a diameter of 60 .mu.m is
irradiated with a pre-pulse laser beam.
[0017] FIG. 5I shows the spot size of a main pulse laser beam.
[0018] FIG. 6 shows a diffusion diameter of a diffused target
generated when a molten tin droplet having a diameter of 60 .mu.m
is irradiated with a pre-pulse laser beam and a conversion
efficiency (CE) corresponding to a timing at which the diffused
target is irradiated with a main pulse laser beam.
[0019] FIGS. 7A through 7H show the simulation results of diffusion
when a molten tin droplet having a diameter of 10 .mu.m is
irradiated with a pre-pulse laser beam.
[0020] FIG. 7I shows the spot size of a main pulse laser beam.
[0021] FIG. 8 shows a diffusion diameter of a diffused target
generated when a molten tin droplet having a diameter of 10 .mu.m
is irradiated with a pre-pulse laser beam and a conversion
efficiency (CE) corresponding to a timing at which the diffused
target is irradiated with a main pulse laser beam.
[0022] FIG. 9 schematically illustrates an exemplary configuration
of an EUV light generation system according to a first
embodiment.
[0023] FIG. 10 schematically illustrates an exemplary configuration
of an EUV light generation system according to a second
embodiment.
[0024] FIG. 11 schematically illustrates an exemplary configuration
of an EUV light generation system according to a third
embodiment.
[0025] FIGS. 12A through 12F show a droplet being irradiated with a
first pre-pulse laser beam and a diffused target being irradiated
with a second pre-pulse laser beam.
[0026] FIG. 13 schematically illustrates an exemplary configuration
of an EUV light generation system according to a modification of
the third embodiment.
[0027] FIG. 14 schematically illustrates an exemplary configuration
of an EUV light generation system according to a fourth
embodiment.
[0028] FIG. 15 schematically illustrates an exemplary configuration
of a Ti:sapphire laser configured to output a pre-pulse laser beam
in an EUV light generation system according to a fifth
embodiment.
[0029] FIG. 16 schematically illustrates an exemplary configuration
of a fiber laser configured to output a pre-pulse laser beam in an
EUV light generation system according to a sixth embodiment.
[0030] FIG. 17A is a table showing irradiation conditions of a
pre-pulse laser beam in the EUV light generation system of any one
of the embodiments.
[0031] FIG. 17B is a table showing irradiation conditions of a main
pulse laser beam in the EUV light generation system of any one of
the embodiments.
[0032] FIG. 18 schematically illustrates an exemplary configuration
of an EUV light generation system according to a seventh
embodiment.
[0033] FIG. 19A is a conceptual diagram showing a droplet being
irradiated with a linearly-polarized pre-pulse laser beam.
[0034] FIG. 19B shows the simulation result of diffusion of the
droplet.
[0035] FIG. 20A is a conceptual diagram showing a droplet being
irradiated with a linearly-polarized pre-pulse laser beam.
[0036] FIG. 20B shows the simulation result of diffusion of the
droplet.
[0037] FIG. 21 is a graph showing absorptivity of a P-polarization
component and an S-polarization component of a laser beam by a
molten tin droplet.
[0038] FIGS. 22A through 22F show a droplet being irradiated with a
circularly-polarized pre-pulse laser beam and a diffused target
being irradiated with a main pulse laser beam according to a
seventh embodiment.
[0039] FIGS. 23A through 23F show a droplet being irradiated with
an unpolarized pre-pulse laser beam and a diffused target being
irradiated with a main pulse laser beam according to the seventh
embodiment.
[0040] FIGS. 24A through 24F show a droplet being irradiated with a
radially-polarized pre-pulse laser beam and a diffused target being
irradiated with a main pulse laser beam according to the seventh
embodiment.
[0041] FIGS. 25A through 25F show a droplet being irradiated with
an azimuthally-polarized pre-pulse laser beam and a diffused target
being irradiated with a main pulse laser beam according to the
seventh embodiment.
[0042] FIGS. 26A and 26B are diagrams for discussing a method for
measuring the degree of linear-polarization.
[0043] FIG. 27 shows a first example of a polarization converter in
the seventh embodiment.
[0044] FIGS. 28A through 28C show a second example of a
polarization converter in the seventh embodiment.
[0045] FIGS. 29A and 29B show a third example of a polarization
converter in the seventh embodiment.
[0046] FIG. 30 shows a fourth example of a polarization converter
in the seventh embodiment.
[0047] FIG. 31 schematically illustrates an exemplary configuration
of an EUV light generation system according to an eighth
embodiment.
[0048] FIGS. 32A through 32C schematically illustrates an exemplary
configuration of a laser apparatus configured to output a pre-pulse
laser beam in an EUV light generation system according to a ninth
embodiment.
[0049] FIGS. 33A through 33C schematically illustrates an exemplary
configuration of a laser apparatus configured to output a pre-pulse
laser beam in an EUV light generation system according to a
modification of the ninth embodiment.
[0050] FIGS. 34A and 34B show an example of a polarization
converter in the ninth embodiment.
[0051] FIG. 35 is a graph on which the obtained conversion
efficiency (CE) in accordance with a fluence of a pre-pulse laser
beam is plotted.
[0052] FIG. 36 is a graph showing the result of an experiment for
generating a diffused target in an EUV light generation system.
[0053] FIG. 37 is a graph on which the obtained conversion
efficiency (CE) for the corresponding delay time since a droplet is
irradiated with a pre-pulse laser beam until a diffused target is
irradiated by a main pulse laser beam is plotted for differing
diameters of the droplet.
DESCRIPTION OF PREFERRED EMBODIMENTS
[0054] Hereinafter, selected embodiments of this disclosure will be
described in detail with reference to the accompanying drawings.
The embodiments to be described below are merely illustrative in
nature and do not limit the scope of this disclosure. Further, the
configuration(s) and operation(s) described in each embodiment are
not all essential in implementing this disclosure. Note that like
elements are referenced by like reference numerals and characters,
and duplicate descriptions thereof will be omitted herein.
Contents
1. General Configuration
2. Diffusion of Droplet
2.1 Disc-Shaped or Dish-Shaped Diffusion
2.2 Torus-Shaped Diffusion
2.3 Diffusion of Large Droplet
2.4 Diffusion of Small Droplet
3. First Embodiment
4. Second Embodiment
5. Third Embodiment
6. Fourth Embodiment
7. Fifth Embodiment
8. Sixth Embodiment
9. Irradiation Conditions of Laser Beams
10. Seventh Embodiment
10.1 Overview of Polarization Control
10.2 Examples of Polarization Control
10.3 Examples of Polarization Converter
11. Eighth Embodiment
12. Ninth Embodiment
13. Control of Fluence
14. Control of Delay Time
1. General Configuration
[0055] FIG. 1 schematically illustrates an exemplary configuration
of an EUV light generation system according to an embodiment of
this disclosure. The EUV light generation system of this embodiment
may be of an LPP type. As shown in FIG. 1, the EUV light generation
system may include a chamber 1, a target supply unit 2, a driver
laser 3, an EUV collector mirror 5, and an EUV light generation
controller 7.
[0056] The chamber 1 may be a vacuum chamber, and the EUV light is
generated inside the chamber 1. The chamber 1 may be provided with
an exposure apparatus connection port 11 and a window 12. The EUV
light generated inside the chamber 1 may be outputted to an
external processing apparatus, such as an exposure apparatus
(reduced projection reflective optical system), through the
exposure apparatus connection port 11. A laser beam outputted from
the driver laser 3 may enter the chamber 1 through the window
12.
[0057] The target supply unit 2 may be configured to supply a
target material, such as tin (Sn) and lithium (Li), used to
generate the EUV light, into the chamber 1 at a timing specified by
a droplet controller 8. The target material inside the target
supply unit 2 may be outputted through a target nozzle 13 in the
form of droplets DL. The droplet DL may, for example, be 10 .mu.m
to 100 .mu.m (inclusive) in diameter. Of a plurality of droplets DL
supplied into the chamber 1, ones that are not irradiated with a
laser beam may be collected into a target collection unit 14.
[0058] The driver laser 3 is configured to output a laser beam used
to excite the target material. The driver laser 3 may be a master
oscillator power amplifier type laser apparatus. The laser beam
from the driver laser 3 may be a pulse laser beam with a pulse
duration of a few to a few tens of nanoseconds and a repetition
rate of 10 kHz to 100 kHz. In this embodiment, the driver laser 3
may be configured to output a pre-pulse laser beam and a main pulse
laser beam. As the driver laser 3, a combination of a Yttrium
Aluminum Garnet (YAG) laser apparatus for outputting a pre-pulse
laser beam and a CO.sub.2 laser apparatus for outputting a main
pulse laser beam may be used. However, this embodiment is not
limited thereto, and any suitable laser apparatus may be used.
[0059] Each of the pre-pulse laser beam and the main pulse laser
beam from the driver laser 3 may be reflected by a laser beam
focusing optical system that includes a high-reflection mirror 15a
and an off-axis paraboloidal mirror 15b, and enter the chamber 1
through the window 12. Inside the chamber 1, each of the pre-pulse
laser beam and the main pulse laser beam may be focused in a plasma
generation region PS.
[0060] When the droplet DL is irradiated with the pre-pulse laser
beam, the droplet DL may be diffused into fine particles. In this
specification, a target material in a state where fine particles of
a droplet DL are diffused may be referred to as a diffused target.
The diffused target may be irradiated with the main pulse laser
beam. Upon being irradiated with the main pulse laser beam, the
target material constituting the diffused target may be excited by
the energy of the main pulse laser beam. With this, the target
material may be turned into plasma, and rays of light at various
wavelengths including the EUV light may be emitted from the
plasma.
[0061] The EUV collector mirror 5 may be configured to selectively
reflect light at a predetermined wavelength (e.g., EUV light at a
central wavelength of approximately 13.5 nm) among rays of light at
various wavelengths emitted from the plasma. The EUV collector
mirror 5 may have a spheroidal concave surface on which a
multilayer reflective film formed of a molybdenum (Mo) layer and a
silicon (Si) layer laminated alternately is formed. The EUV
collector mirror 5 may be positioned such that a first focus of the
spheroidal surface lies in the plasma generation region PS and a
second focus thereof lies in an intermediate focus region IF. With
this, the EUV light reflected by the EUV collector mirror 5 may be
focused at the second focus, and outputted to an external exposure
apparatus.
[0062] The EUV light generation controller 7 may be configured to
output an oscillation trigger signal and a laser beam intensity
setting signal to the driver laser 3. With this, the EUV light
generation controller 7 may control the beam intensity and the
generation timing of the pre-pulse laser beam such that a droplet
supplied into the chamber 1 is transformed into a desired diffused
target. Further, the EUV light generation controller 7 may control
the beam intensity and the generation timing of the main pulse
laser beam such that plasma in a desired condition may be generated
from the diffused target upon being irradiated with the main pulse
laser beam.
[0063] The oscillation trigger signal may be outputted based on an
oscillation trigger detection signal from an exposure apparatus
controller 9, and the generation timing of the laser beams by the
driver laser 3 may be controlled accordingly. The laser beam
intensity setting signal may be outputted based on the oscillation
trigger detection signal from the exposure apparatus controller 9
and an EUV pulse energy detection signal from either an EUV light
detector 16 or the exposure apparatus controller 9. The laser beam
intensity setting signal may be outputted to the driver laser 3 in
order to control the beam intensity of the laser beams. The EUV
light generation controller 7 may include a trigger counter 7a and
a timer 7b, and may count the number of oscillation trigger
detection signals per unit time. The laser beam intensity setting
signal may be outputted based on the EUV pulse energy detection
signal and the number of counted oscillation trigger detection
signals.
2. Diffusion of Droplet
[0064] Diffusion of a droplet upon being irradiated with a
pre-pulse laser beam will now be discussed. FIG. 2 is a conceptual
diagram showing a droplet being irradiated with a pre-pulse laser
beam. In FIG. 2, the droplet is viewed in a direction perpendicular
to the beam axis (Z-direction) of the pre-pulse laser beam.
[0065] As shown in FIG. 2, when the pre-pulse laser beam is focused
on the droplet DL, laser ablation may occur at a surface of the
droplet DL that has been irradiated with the pre-pulse laser beam.
As a result, a shock wave may occur from the surface of the droplet
DL irradiated with the pre-pulse laser beam toward the interior of
the droplet DL due to the energy by the laser ablation. This shock
wave may propagate throughout the droplet DL. The droplet DL may
not be broken up when the beam intensity of the pre-pulse laser
beam is weak. However, when the beam intensity of the pre-pulse
laser beam is equal to or greater than a first predetermined value
(e.g., 1.times.10.sup.9 W/cm.sup.2), the droplet DL may be broken
up by this shock wave.
2.1 Disc-Shaped or Dish-Shaped Diffusion
[0066] FIGS. 3A through 3C show the simulation results of diffusion
of a molten tin droplet being irradiated with a pre-pulse laser
beam. FIG. 3D is a photograph capturing a molten tin droplet being
irradiated with a pre-pulse laser beam under the condition that is
identical to that in the simulation shown in FIG. 3C. In each of
FIGS. 3A through 3D, the droplet is viewed in a direction
perpendicular to the beam axis of the pre-pulse laser beam
(Z-direction). Further, in FIGS. 3A through 3C, the spot size of
the main pulse laser beam and the beam intensity of the pre-pulse
laser beam striking the droplet DL are indicated. In FIG. 3B, a
diffusion diameter Dd of the diffused target and an irradiation
spot size Dm of the main pulse laser beam are indicated.
[0067] As shown in FIG. 3A, when the beam intensity of the
pre-pulse laser beam is 6.4.times.10.sup.8 W/cm.sup.2, the droplet
is hardly diffused. On the other hand, as shown in FIG. 3B, when
the beam intensity of the pre-pulse laser beam is
1.6.times.10.sup.9 W/cm.sup.2 (2.5 times greater than the beam
intensity in the simulation shown in FIG. 3A), the droplet is
broken up. The broken-up droplet is turned into numerous minute
particles and forms a diffused target. These minute particles may
be diffused in a disc-shape as viewed in the Z-direction. Further,
as shown in FIG. 3C, when the beam intensity of the pre-pulse laser
beam is 5.5.times.10.sup.9 W/cm.sup.2 (8.6 times greater than the
beam intensity in the simulation shown in FIG. 3A), the droplet is
broken up, and the minute particles of the broken-up droplet may be
diffused in a dish-shape. As can been seen from the comparison
between FIG. 3C and FIG. 3D, the state of the actual diffusion of
the minute particles were similar to the simulation result.
[0068] In the case shown in FIG. 3A, it is speculated that even
when the droplet is irradiated with the main pulse laser beam, a
large portion of the energy of the main pulse laser beam is not
absorbed by the droplet, whereby a high CE may not be obtained.
That is, with respect to the size of the target material after
being irradiated with the pre-pulse laser beam, the irradiation
spot size of the main pulse laser beam is too large. Accordingly, a
large portion of the main pulse laser beam may not strike the
droplet and may not be used to generate plasma. On the other hand,
in the cases shown in FIGS. 3B and 3C, the droplet is diffused in
the irradiation spot of the main pulse laser beam, whereby a large
portion of the main pulse laser beam may be used to generate
plasma. Further, a diffused target may have a greater total surface
area than a single droplet. As shown below, when a single droplet
is broken into n.sup.3 smaller pieces, the radius of a smaller
piece may become (1/n) of the radius of the original droplet. Here,
the total surface area of the smaller pieces may be n times greater
than the surface area of the original droplet.
[0069] When the radius of an undiffused droplet is r, a volume
V.sub.1 of the undiffused droplet may be expressed in Expression
(1) below.
V.sub.1=4.pi.r.sup.3/3 (1)
[0070] A total volume V.sub.2 of n.sup.3 smaller pieces each having
a radius (r/n) may be expressed in Expression (2) below.
V.sub.2=n.sup.3.times.4.pi.(r/n).sup.3/3 (2)
[0071] The total volume V.sub.2 of n.sup.3 smaller pieces each
having the radius (r/n) may be equal to the volume V.sub.1 of the
undiffused droplet having the radius r (V.sub.2=V.sub.1).
[0072] A surface area S.sub.1 of the undiffused droplet having the
radius r may be expressed in Expression (3) below.
S.sub.1=4.pi.r.sup.2 (3)
[0073] A total surface area S.sub.2 of n.sup.3 smaller pieces each
having the radius (r/n) may be expressed in Expression (4)
below.
S.sub.2=n.sup.3.times.4.pi.(r/n).sup.2=n.times.4.pi.r.sup.2 (4)
[0074] Accordingly, the total surface area S.sub.2 of n.sup.3
smaller pieces each having the radius (r/n) is n times greater than
the surface area S.sub.1 of the undiffused droplet having the
radius r.
[0075] In this way, in the cases shown in FIGS. 3B and 3C, the
droplet may be diffused, and the total surface area may be
increased. As a result, the energy of the main pulse laser beam may
be absorbed efficiently by the diffused small particles. With this,
a larger portion of the diffused small particles may be turned into
plasma, and EUV light with higher energy may be obtained.
Accordingly, a high CE may be obtained.
[0076] In either of the cases shown in FIGS. 3B and 3C, the
diffused target has such a shape that the length in the direction
of the beam axis of the pre-pulse laser beam is shorter than the
length in the direction perpendicular to the beam axis of the
pre-pulse laser beam. The diffused target having such a shape may
be irradiated with the main pulse laser beam traveling
substantially along the same path as the pre-pulse laser beam.
Since the diffused target may be irradiated with the main pulse
laser beam more uniformly, the main pulse laser beam may be
absorbed efficiently by the target material.
[0077] The diffusion diameter Dd of the diffused target may be
equal to or smaller than the irradiation spot size Dm of the main
pulse laser beam. Because of this size, the entire diffused target
may be irradiated with the main pulse laser beam, and thus a larger
portion of the diffused target may be turned into plasma. As a
result, generation of debris of the target material may be
suppressed.
[0078] Further, the diffusion diameter Dd of the diffused target
may be equal to or closer to the irradiation spot size Dm of the
main pulse laser beam. With this, a larger portion of the energy of
the main pulse laser beam may be absorbed by the diffused target,
whereby a higher CE may be obtained. Although FIG. 3B shows that
the position of the beam waist of the main pulse laser beam
substantially coincides with the position of the diffused target,
this disclosure is not limited thereto. That is, the position of
the beam waist of the main pulse laser beam and the position of the
diffused target do not necessarily have to coincide with each
other. In this disclosure, the irradiation spot size Dm may be
interpreted as a diameter of a cross-section of the main pulse
laser beam at or around the position at which the diffused target
is irradiated with the main pulse laser beam.
[0079] Although a case where the main pulse laser beam has a
circular cross-section and the cross-section of the diffused target
is circular has been described, this disclosure is not limited
thereto. For example, a cross-section area of the main pulse laser
beam may be larger than a maximum cross-section area of the
diffused target.
2.2 Torus-Shaped Diffusion
[0080] FIGS. 4A and 4B schematically show a molten tin droplet
having been irradiated with the pre-pulse laser beam. In FIG. 4A,
the diffused target is viewed in a direction perpendicular to the
beam axes of the pre-pulse laser beam and the main pulse laser beam
(Z-direction). In FIG. 4B, the diffused target is viewed in a
direction of the beam axes of the pre-pulse laser beam and the main
pulse laser beam. In FIG. 4B, an outer diameter Dout of a
torus-shaped diffused target and the irradiation spot size Dm of
the main pulse laser beam are indicated.
[0081] As described with reference to FIG. 2, when the pre-pulse
laser beam is focused on the droplet DL, laser ablation may occur
at the surface of the droplet DL. Here, when the beam intensity of
the pre-pulse laser beam is equal to or greater than a second
predetermined value (e.g., 6.4.times.10.sup.9 W/cm.sup.2), the
droplet DL may be broken up, and a torus-shaped diffused target as
shown in FIGS. 4A and 4B may be formed. The torus-shaped diffused
target may be diffused symmetrically about the beam axis of the
pre-pulse laser beam and into a torus-shape.
[0082] For example, for generating a torus-shaped diffused target,
the beam intensity of the pre-pulse laser beam may be in the range
of 6.4.times.10.sup.9 W/cm.sup.2 to 3.2.times.10.sup.10 W/cm.sup.2
(inclusive), and the diameter of the droplet may be in the range of
12 .mu.m and 40 .mu.m (inclusive).
[0083] Irradiation of the torus-shaped diffused target with the
main pulse laser beam will now be described. A torus-shaped
diffused target may be formed in 0.5 .mu.s to 2.0 .mu.s after a
droplet is irradiated with a pre-pulse laser beam. Accordingly, the
diffused target may preferably be irradiated with the main pulse
laser beam in the above time span after the droplet is irradiated
with the pre-pulse laser beam.
[0084] Further, as shown in FIGS. 4A and 4B, the torus-shaped
diffused target has such a shape that the length in the direction
of the beam axis of the pre-pulse laser beam is shorter than the
length in the direction perpendicular to the beam axis of the
pre-pulse laser beam. The diffused target having such a shape may
be irradiated with the main pulse laser beam traveling
substantially along the same path as the pre-pulse laser beam. With
this, the diffused target may be irradiated with the main pulse
laser beam more efficiently, and thus the main pulse laser beam may
be absorbed efficiently by the target material. Accordingly, the CE
in the LPP type EUV light generation system may be improved. The CE
of approximately 3% was obtained through an experiment under the
above conditions.
[0085] For example, it is speculated that when a torus-shaped
diffused target is irradiated with a main pulse laser beam of a
Gaussian beam intensity distribution, plasma is emitted
cylindrically from the torus-shaped diffused target. Then, the
plasma diffused toward the inner portion of the cylinder may be
trapped therein. Accordingly, high-temperature, high-density plasma
may be generated, and the CE may be improved. Here, "torus-shape"
means an annular shape, but the diffused target does not
necessarily have to be perfectly annular in shape, and may be
substantially annular in shape.
[0086] Further, the irradiation spot size Dm of the main pulse
laser beam may preferably be in the following relationship with the
outer diameter Dout of the torus-shaped diffused target.
Dm.gtoreq.Dout
With this relationship, the entire torus-shaped diffused target may
be irradiated with the main pulse laser beam, and a larger portion
of the diffused target may be turned into plasma. As a result,
generation of debris of the target material may be reduced.
2.3 Diffusion of Large Droplet
[0087] FIGS. 5A through 5H show the simulation result of diffusion
when a molten tin droplet having a diameter of 60 .mu.m is
irradiated with a pre-pulse laser beam. In each of FIGS. 5A through
5D, the droplet or the diffused target is viewed in a direction
(X-direction) perpendicular to the beam axis of the pre-pulse laser
beam (Z-direction). FIGS. 5A through 5D respectively show the
states of the target material at timings where a time T is 0 .mu.s,
0.4 .mu.s, 0.8 .mu.s, and 1.4 .mu.s after the droplet DL is
irradiated with the pre-pulse laser beam. In each of FIGS. 5E
through 5H, the droplet or the diffused target is viewed in the
direction (Z-direction) of the beam axis of the pre-pulse laser
beam. FIGS. 5E through 5H respectively show the states of the
target material at timings where a time T is 0 .mu.s, 0.4 .mu.s,
0.8 .mu.s, and 1.4 .mu.s after the droplet DL is irradiated with
the pre-pulse laser beam. FIG. 5I shows the irradiation spot size
of the main pulse laser beam at a position where the diffused
target is irradiated with the main pulse laser beam. Here, the beam
intensity of the pre-pulse laser beam is 1.5.times.10.sup.9
W/cm.sup.2.
[0088] With reference to the simulation results shown in FIGS. 5A
through 5H along with the irradiation spot size of the main pulse
laser beam shown in FIG. 5I, the following can be found. A large
portion of the diffused target may be irradiated with the main
pulse laser beam in approximately 0.4 .mu.s after a droplet is
irradiated with the pre-pulse laser beam. Accordingly, generation
of debris may be reduced if the diffused target is irradiated with
the main pulse laser beam at the above timing.
[0089] A droplet having a diameter of 60 .mu.m may be broken into
small particles and diffused upon being irradiated with a pre-pulse
laser beam. In each of FIGS. 5A through 5D, the maximum value and
the minimum value of a diameter of a small particle in the diffused
target are indicated. With the beam intensity of the pre-pulse
laser beam in this simulation, the maximum value of a diameter of a
small particle in the diffused target is 48.0 .mu.m. That is, the
droplet has not been broken up sufficiently by the pre-pulse laser
beam, and a large portion of the diffused target may not be turned
into plasma even when the diffused target is irradiated with the
main pulse laser beam. This may suggest that a large amount of
debris may be generated. The minimum value of a diameter of a small
particle in the diffused target is 3.7 .mu.m in 0.4 .mu.s, 3.5
.mu.m in 0.8 .mu.s, and 3.1 .mu.m in 1.4 .mu.s, respectively, after
a droplet is irradiated with a pre-pulse laser beam. This suggests
that the more the time T elapses after a droplet is irradiated with
a pre-pulse laser beam, the smaller the diameter of a small
particle becomes, and the number of small particles may increase.
This in turn suggests that in the case where a molten tin droplet
having a diameter of 60 .mu.m is irradiated with a pre-pulse laser
beam, if a diffused target is irradiated with a main pulse laser
beam within a range where the time T after the droplet is
irradiated with the pre-pulse laser beam is between 0.4 .mu.s and
1.4 .mu.s, the CE may be improved further with a longer time T.
[0090] FIG. 6 shows a change over time in the diffusion diameter Dd
of the diffused target when a molten tin droplet having a diameter
of 60 .mu.m is irradiated with the pre-pulse laser beam and a
conversion efficiency when the diffused target is irradiated with a
main pulse laser beam at a given point in time. As shown in FIGS.
5F and 6, the diffusion diameter Dd of the diffused target may
substantially coincide with the irradiation spot size of the main
pulse laser beam in approximately 0.4 .mu.s after the droplet is
irradiated with the pre-pulse laser beam. Accordingly, generation
of debris may be reduced if the diffused target is irradiated with
the main pulse laser beam in 0.4 .mu.s after the droplet is
irradiated with the pre-pulse laser beam (see a white arrow A in
FIG. 6). On the other hand, with reference to FIG. 6, a high CE may
be obtained if the diffused target is irradiated with the main
pulse laser beam in approximately 3 .mu.s after the droplet is
irradiated with the pre-pulse laser beam (see a white arrow B in
FIG. 6). This simulation results suggest that a preferable delay
time for the main pulse laser beam from the irradiation with the
pre-pulse laser beam to reduce generation of debris may differ from
a preferable delay time to obtain a high CE. That is, when a molten
tin droplet having a diameter of 60 .mu.m is irradiated
sequentially with a pre-pulse laser beam and then a main pulse
laser beam, it may be difficult to reduce debris and obtain a high
CE at the same time.
2.4 Diffusion of Small Droplet
[0091] FIGS. 7A through 7H show the simulation results of diffusion
when a molten tin droplet having a diameter of 10 .mu.m is
irradiated with the pre-pulse laser beam. In each of FIGS. 7A
through 7D, the droplet or the diffused target is viewed in a
direction (X-direction) perpendicular to the beam axis of the
pre-pulse laser beam (Z-direction). FIGS. 7A through 7D
respectively show the states of the target material at timings
where a time T is 0 .mu.s, 0.1 .mu.s, 0.25 .mu.s, and 0.5 .mu.s
after the droplet is irradiated with the pre-pulse laser beam. In
each of FIGS. 7E through 7H, the droplet or the diffused target is
viewed in the direction of the beam axis of the pre-pulse laser
beam (Z-direction). FIGS. 7E through 7H respectively show the
states of the target material at timings where a time T is 0 .mu.s,
0.1 .mu.s, 0.25 .mu.s, and 0.5 .mu.s after the droplet is
irradiated with the pre-pulse laser beam. FIG. 7I shows the
irradiation spot size of the main pulse laser beam at a position
where the diffused target is irradiated with the main pulse laser
beam. Here, the beam intensity of the pre-pulse laser beam is
1.5.times.10.sup.9 W/cm.sup.2.
[0092] With reference to the simulation results shown in FIGS. 7A
through 7H along with the irradiation spot size of the main pulse
laser beam shown in FIG. 7I, it can be said that a large portion of
the diffused target may be irradiated with the main pulse laser
beam in 0.1 .mu.s after the droplet is irradiated with the
pre-pulse laser beam. Accordingly, generation of debris may be
reduced if the diffused target is irradiated with the main pulse
laser beam at the above timing.
[0093] As shown in FIGS. 7A through 7D, the maximum value of a
diameter of a small particle in a diffused target is 2.2 .mu.m in
0.1 .mu.s, 1.1 .mu.m in 0.25 .mu.s, and 1.1 .mu.s in 0.5 .mu.s
after the droplet is irradiated with the pre-pulse laser beam. This
suggests that the maximum value of a diameter of a small particle
in a diffused target becomes constant in 0.25 .mu.s after the
droplet is irradiated with the pre-pulse laser beam. The minimum
value of a diameter of a small particle in the diffused target is
0.2 .mu.m in 0.1 .mu.s, 0.2 .mu.m in 0.25 .mu.s, and 0.2 .mu.m in
0.5 .mu.s after the droplet is irradiated with the pre-pulse laser
beam. This suggests that a small particle in a diffused target is
sufficiently small in 0.1 .mu.s after the droplet is irradiated
with the pre-pulse laser beam. This in turn suggests that a higher
CE may be obtained if the diffused target is irradiated with the
main pulse laser beam in 0.1 .mu.s after the droplet is irradiated
with the pre-pulse laser beam.
[0094] FIG. 8 shows a change over time in the diffusion diameter Dd
of the diffused target when a molten tin droplet having a diameter
of 10 .mu.m is irradiated with the pre-pulse laser beam and a
conversion efficiency when the diffused target is irradiated with
the main pulse laser beam at a given point in time.
[0095] As shown in FIGS. 7F and 8, the diffusion diameter Dd of the
diffused target may substantially coincide with the irradiation
spot size of the main pulse laser beam in 0.1 .mu.s after the
droplet is irradiated with the pre-pulse laser beam. Accordingly,
generation of debris may be reduced if the diffused target is
irradiated with the main pulse laser beam in 0.1 .mu.s after the
droplet is irradiated with the pre-pulse laser beam (see a white
arrow A in FIG. 8). On the other hand, with reference to FIG. 8, a
high CE may be obtained if the diffused target is irradiated with
the main pulse laser beam in approximately 0.15 .mu.s after the
droplet is irradiated with the pre-pulse laser beam (see a white
arrow B in FIG. 8). The simulation results suggest that a gap
between a preferable delay time for the main pulse laser beam to
reduce debris and a preferable delay time for the main pulse laser
beam to obtain a high CE is relatively small. That is, when a
molten tin droplet having a diameter of 10 .mu.m is irradiated
sequentially with the pre-pulse laser beam and then the main pulse
laser beam, it may be possible to reduce debris and obtain a high
CE at the same time. A molten tin droplet having a diameter of 10
.mu.m may be referred to as a mass-limited target since it is a
target with a minimum mass required for generating desired EUV
light.
3. First Embodiment
[0096] FIG. 9 schematically illustrates an exemplary configuration
of an EUV light generation system according to a first embodiment.
In the EUV light generation system according to the first
embodiment, a beam path of a pre-pulse laser beam from a YAG pulse
laser apparatus 3a and a beam path of a main pulse laser beam from
a CO.sub.2 pulse laser apparatus 3b may be made to substantially
coincide with each other by a beam combiner 15c. That is, in the
first embodiment, the pre-pulse laser beam and the main pulse laser
beam are guided into the chamber 1 along substantially the same
path.
[0097] First, an EUV light emission signal may be inputted to the
EUV light generation controller 7 from the exposure apparatus
controller 9. The EUV light generation controller 7 may be
configured to output a YAG laser beam intensity setting signal to
the YAG pulse laser apparatus 3a. Further, the EUV light generation
controller 7 may be configured to output a CO.sub.2 laser beam
intensity setting signal to the CO.sub.2 pulse laser apparatus
3b.
[0098] In addition, the EUV light generation controller 7 may be
configured to output an EUV light emission trigger signal to a
trigger controller 17. The trigger controller 17 may be configured
to output a droplet output signal to a droplet controller 8. The
droplet controller 8 may input the droplet output signal to the
target supply unit 2, and upon receiving the droplet output signal,
the target supply unit 2 may output a droplet DL through the target
nozzle 13. The trigger controller 17 may be configured to output a
YAG laser oscillation trigger signal to the YAG pulse laser
apparatus 3a. The YAG laser oscillation trigger signal may be
outputted such that the droplet DL is irradiated with the pre-pulse
laser beam at a timing at which the droplet DL reaches the plasma
generation region PS. Further, the trigger controller 17 may be
configured to output a CO.sub.2 laser oscillation trigger signal to
a master oscillator 3d in the CO.sub.2 pulse laser apparatus 3b.
The CO.sub.2 laser oscillation trigger signal may be outputted such
that the diffused target is irradiated with the main pulse laser
beam after a delay time T from the timing at which the droplet DL
is irradiated with the pre-pulse laser beam. Here, the delay time T
is a time required for a desired diffused target to be formed.
[0099] The YAG pulse laser apparatus 3a may be configured to output
the pre-pulse laser beam at a first wavelength based on the YAG
laser beam intensity setting signal from the EUV light generation
controller 7 and the YAG laser oscillation trigger signal from the
trigger controller 17. The pre-pulse laser beam from the YAG pulse
laser apparatus 3a may be expanded in diameter by a beam expander 4
and then be incident on the beam combiner 15c.
[0100] The CO.sub.2 pulse laser apparatus 3b may include the master
oscillator 3d, a preamplifier 3h, a main amplifier 3j, and relay
optical systems 3g, 3i, and 3k respectively disposed downstream
from the master oscillator 3d, the preamplifier 3h, and the main
amplifier 3j. The master oscillator 3d may be configured to output
a seed beam at a second wavelength based on the CO.sub.2 pulse
laser oscillation trigger signal. The seed beam from the master
oscillator 3d may be amplified to desired beam intensity by the
preamplifier 3h and the main amplifier 3j based on the CO.sub.2
laser beam intensity setting signal. The amplified laser beam may
be outputted from the CO.sub.2 pulse laser apparatus 3b as the main
pulse laser beam and be incident on the beam combiner 15c.
[0101] The beam combiner 15c may be configured to transmit the
pre-pulse laser beam at the first wavelength (e.g., 1.06 .mu.m) and
reflect the main pulse laser beam at the second wavelength (e.g.,
10.6 .mu.m). More specifically, the beam combiner 15c may include a
diamond substrate on which a multilayer film having the
aforementioned reflection/transmission properties for the pre-pulse
laser and the main pulse laser is formed. Accordingly, the beam
combiner 15c may serve to make the beam path of the pre-pulse laser
beam and the beam path of the main pulse laser beam coincide with
each other and supply the pre-pulse laser beam and the main pulse
laser beam into the chamber 1 along the same path. Alternatively, a
beam combiner configured to reflect the pre-pulse laser beam at the
first wavelength and transmit the main pulse laser beam at the
second wavelength may be used to make the respective beam paths
coincide with each other.
[0102] The droplet controller 8, the YAG pulse laser apparatus 3a,
and the CO.sub.2 pulse laser apparatus 3b may operate in
synchronization with one another based on the various signals from
the trigger controller 17. With this, the YAG pulse laser apparatus
3a may output the pre-pulse laser beam in synchronization with the
timing at which the droplet supplied into the chamber 1 from the
target supply unit 2 reaches a predetermined region. Then, the
CO.sub.2 pulse laser apparatus 3b may output the main pulse laser
beam in synchronization with the timing at which a desired diffused
target is formed after the droplet is irradiated with the pre-pulse
laser beam.
[0103] According to the first embodiment, the pre-pulse laser beam
and the main pulse laser beam may be guided to the plasma
generation region PS in substantially the same direction
(substantially the same path). Thus, a through-hole formed in the
EUV collector mirror 5 may be made small and need not be formed in
plurality.
[0104] Further, the wavelength (e.g., 1.06 .mu.m) of the pre-pulse
laser beam from the YAG pulse laser apparatus 3a is equal to or
shorter than one-tenth of the wavelength (e.g., 10.6 .mu.m) of the
main pulse laser beam from the CO.sub.2 pulse laser apparatus 3b.
When the wavelength of the pre-pulse laser beam is sufficiently
shorter than the wavelength of the main pulse laser beam, the
following advantages may be speculated.
(1) The absorptivity of the pre-pulse laser beam by the target
material, such as tin, may be higher than that of the main pulse
laser beam. (2) The irradiation spot size of the pre-pulse laser
beam focused on the droplet may be reduced. As a result, a small
droplet DL may be irradiated efficiently with the pre-pulse laser
beam having small pulse energy and be diffused.
4. Second Embodiment
[0105] FIG. 10 schematically illustrates an exemplary configuration
of an EUV light generation system according to a second embodiment.
In the EUV light generation system according to the second
embodiment, the pre-pulse laser beam from the YAG pulse laser
apparatus 3a and the main pulse laser beam from the CO.sub.2 pulse
laser apparatus 3b are guided into the chamber 1 along separate
beam paths.
[0106] The pre-pulse laser beam outputted from the YAG pulse laser
apparatus 3a may be reflected by a high-reflection mirror 15e and
an off-axis paraboloidal mirror 15g. Then, the pre-pulse laser beam
may pass through a through-hole formed in the EUV collector mirror
5, and be focused on a droplet inside the chamber 1 to form a
diffused target.
[0107] The main pulse laser beam outputted from the CO.sub.2 pulse
laser apparatus 3b may be reflected by a high-reflection mirror 15d
and an off-axis paraboloidal mirror 15f. Then, the main pulse laser
beam may pass through another through-hole formed in the EUV
collector mirror 5, and be focused on the diffused target inside
the chamber 1.
[0108] According to the second embodiment, the pre-pulse laser beam
and the main pulse laser beam may be guided through separate
optical systems to the plasma generation region PS. Accordingly,
each of the pre-pulse laser beam and the main pulse laser beam may
be focused to have a desired beam spot with ease. Further, an
optical element, such as a beam combiner, for making the beam paths
of the pre-pulse laser beam and the main pulse laser beam need not
be used. Still, the pre-pulse laser beam and the main pulse laser
beam may strike the droplet DL and the diffused target respectively
in substantially the same direction.
5. Third Embodiment
[0109] FIG. 11 schematically illustrates an exemplary configuration
of an EUV light generation system according to a third embodiment.
In the EUV light generation system according to the third
embodiment, a first pre-pulse laser beam from the YAG pulse laser
apparatus 3a and a second pre-pulse laser beam and the main pulse
laser beam from the CO.sub.2 pulse laser apparatus 3b may be guided
into the chamber 1.
[0110] The CO.sub.2 pulse laser apparatus 3b may include the master
oscillator 3d configured to output the seed beam of the main pulse
laser beam and a master oscillator 3e configured to output a seed
beam of the second pre-pulse laser beam. The seed beam of the
second pre-pulse laser beam from the master oscillator 3e may be
amplified by the preamplifier 3h and the main amplifier 3j to
desired beam intensity. The amplified seed beam may be outputted
from the CO.sub.2 pulse laser apparatus 3b as the second pre-pulse
laser beam, and then be incident on the beam combiner 15c. The seed
beam of the main pulse laser beam from the master oscillator 3d may
also be amplified by the preamplifier 3h and the main amplifier 3j
to desired beam intensity. The amplified seed beam may be outputted
from the CO.sub.2 pulse laser apparatus 3b as the main pulse laser
beam, and then be incident on the beam combiner 15c.
[0111] Each of the master oscillators 3d and 3e may be a
semiconductor laser configured to oscillate in a bandwidth that can
be amplified by a CO.sub.2 gain medium. More specifically, each of
the master oscillators 3d and 3e may include a plurality of quantum
cascade lasers (QCL).
[0112] FIGS. 12A through 12F show a droplet DL being irradiated
with a first pre-pulse laser beam and a diffused target being
irradiated with a second pre-pulse laser beam in the third
embodiment. In each of FIGS. 12A through 12C, the droplet or the
diffused target is viewed in a direction (X-direction)
perpendicular to the beam axes of the first and second pre-pulse
laser beams (Z-direction). FIGS. 12A through 12C respectively show
the states of the target material at delay times T=0, T=t2, and
T=tm (where, 0<t2<tm) after the droplet is irradiated with
the first pre-pulse laser beam. In each of FIGS. 12D through 12F,
the droplet or the diffused target is viewed in the direction of
the beam axes of the first and second pre-pulse laser beams
(Z-direction). FIGS. 12D through 12F respectively show the states
of the target material at delay times T=0, T=t2, and T=tm (where,
0<t2<tm) after the droplet is irradiated with the first
pre-pulse laser beam.
[0113] When a droplet of the target material shown in FIGS. 12A and
12D is irradiated with the first pre-pulse laser beam, the droplet
may be diffused as shown in FIGS. 12B and 12E so that a first
diffused target may be formed. The first diffused target may be
irradiated with the second pre-pulse laser beam when the first
diffused target is diffused to a desired size that is substantially
the same as or smaller than the irradiation spot size of the second
pre-pulse laser beam.
[0114] When the first diffused target is irradiated with the second
pre-pulse laser beam, the first diffused target may be broken into
even smaller particles and be diffused to form a second diffused
target. The second diffused target may be irradiated with the main
pulse laser beam when the second diffused target is diffused to a
desired size that is substantially the same as or smaller than the
irradiation spot size of the main pulse laser beam.
[0115] Since the second diffused target, which includes smaller
particles than those in the first diffused target, is irradiated
with the main pulse laser beam, the energy of the main pulse laser
beam may be absorbed by the second diffused target efficiently.
Because a large portion of the second diffused target may be turned
into plasma, a high CE may be obtained. Further, by controlling the
irradiation spot size of the main pulse laser beam to substantially
coincide with the diffusion diameter of the second diffused target,
a high CE and debris reduction may both be achieved.
[0116] Note that, in the third embodiment, a mass limited target
(e.g., a molten tin droplet having a diameter of 10 .mu.m) may
preferably be used.
[0117] In the third embodiment, the target material is irradiated
with the first and second pre-pulse laser beams, and then the
diffused target is irradiated with the main pulse laser beam.
However, this disclosure is not limited thereto, and the target
material may be irradiated with three or more pre-pulse laser
beams.
[0118] Further, in the third embodiment, the first pre-pulse laser
beam is outputted from the YAG pulse laser apparatus 3a, and the
second pre-pulse laser beam and the main pulse laser beam are
outputted from the CO.sub.2 pulse laser apparatus 3b. However, this
disclosure is not limited thereto, and all the laser beams may be
outputted, for example, from a CO.sub.2 laser apparatus.
[0119] Alternatively, the first and second pre-pulse laser beams
may be outputted from a first laser apparatus, and the main pulse
laser beam may be outputted from a second laser apparatus. Here,
the first laser apparatus may be a YAG laser apparatus or a fiber
laser apparatus, and the second laser apparatus may be a CO.sub.2
laser apparatus.
[0120] FIG. 13 schematically illustrates an exemplary configuration
of an EUV light generation system according to a modification of
the third embodiment. The EUV light generation system shown in FIG.
13 may include a first YAG pulse laser apparatus 3m, a second YAG
pulse laser apparatus 3n, and a beam combiner 3p.
[0121] The first and second YAG pulse laser apparatuses 3m and 3n
may each receive the YAG laser beam intensity setting signal from
the EUV light generation controller 7 and the YAG laser oscillation
trigger signal from the trigger controller 17. The first YAG pulse
laser apparatus 3m may be configured to output the first pre-pulse
laser beam, and the first pre-pulse laser beam may be incident on
the beam combiner 3p. The second YAG pulse laser apparatus 3n may
be configured to output the second pre-pulse laser beam, and the
second pre-pulse laser beam may also be incident on the beam
combiner 3p. The beam combiner 3p may be positioned to make the
beam paths of the first and second pre-pulse laser beams coincide
with each other and output the first and second pre-pulse laser
beams toward the beam expander 4.
[0122] Even with this configuration, as in the third embodiment
described with reference to FIG. 11, the first and second pre-pulse
laser beams and the main pulse laser beam may be guided into the
chamber 1. Here, the first and second pre-pulse laser beams may
respectively be outputted from first and second fiber laser
apparatuses.
6. Fourth Embodiment
[0123] FIG. 14 schematically illustrates an exemplary configuration
of an EUV light generation system according to a fourth embodiment.
FIG. 14 shows a sectional view taken along XIV-XIV plane in any of
FIGS. 9 through 11 and 13. An EUV light generation system according
to the fourth embodiment may be similar in configuration to any one
of the first through third embodiments but may differ in that the
EUV light generation system of the fourth embodiment may further
include magnets 6a and 6b. A magnetic field may be generated with
the magnets 6a and 6b inside the chamber 1 and ions generated
inside the chamber 1 may be collected by the magnetic field.
[0124] Each of the magnets 6a and 6b may be an electromagnet that
includes a coil winding and a cooling mechanism of the coil
winding. A power source 6c that is controlled by a power source
controller 6d may be connected to each of the magnets 6a and 6b.
The power source controller 6d may regulate current to be supplied
to the magnets 6a and 6b from the power source 6c so that a
magnetic field in a predetermined direction may be generated in the
chamber 1. A superconductive magnet, for example, may be used as
each of the magnets 6a and 6b. Although two magnets 6a and 6b are
used in this embodiment, a single magnet may be used.
Alternatively, a permanent magnet may be provided in the chamber
1.
[0125] Plasma generated when a target material is irradiated with a
main pulse laser beam may include positive ions and negative ions
(or electrons). The positive and negative ions moving inside the
chamber 1 may be subjected to Lorentz force in the magnetic field,
and thus the ions may move in spiral along magnetic lines of force.
With this, the ionized target material may be trapped in the
magnetic field and collected into ion collection units 19a and 19b
provided in the magnetic field. Accordingly, debris inside the
chamber 1 may be reduced, and deterioration in optical element,
such as the EUV collector mirror 5, due to the debris adhering to
the optical element may be suppressed. In FIG. 14, the magnetic
field is in the direction shown by an arrow, but a similar function
can be achieved even when the magnetic field is oriented in the
opposite direction.
[0126] A mitigation technique for reducing debris adhering to the
optical element is not limited to the use of the magnetic field.
Alternatively, a substance deposited onto the EUV collector mirror
5 may be etched using an etching gas. Debris may be made to react
with hydrogen gas (H.sub.2) or a hydrogen radical (H) in the
magnetic field, and the debris may be removed as a vaporized
compound.
7. Fifth Embodiment
[0127] FIG. 15 schematically illustrates an exemplary configuration
of a Ti:sapphire laser configured to output the pre-pulse laser
beam in an EUV light generation system according to a fifth
embodiment. A Ti:sapphire laser 50a of the fifth embodiment may be
provided outside the chamber 1 as a driver laser for outputting the
pre-pulse laser beam in any one of the first through fourth
embodiments.
[0128] The Ti:sapphire laser 50a may include a laser resonator
formed by a semiconductor saturable absorber mirror 51a and an
output coupler 52a. A concave mirror 53a, a first pumping mirror
54a, a Ti:sapphire crystal 55a, a second pumping mirror 56a, and
two prisms 57a and 58a are provided in this order from the side of
the semiconductor saturable absorber mirror 51a in the optical path
in the laser resonator. Further, the Ti:sapphire laser 50a may
include a pumping source 59a for introducing a pumping beam into
the laser resonator.
[0129] The first pumping mirror 54a may be configured to transmit
the pumping beam from the outside of the laser resonator with high
transmittance and reflect the laser beam inside the laser resonator
with high reflectance. The Ti:sapphire crystal 55a may serve as a
laser medium that undergoes stimulated emission with the pumping
beam. The two prisms 57a and 58a may selectively transmit a laser
beam at a predetermined wavelength. The output coupler 52a may
transmit a part of the laser beam amplified in the laser resonator
and output the amplified laser beam from the laser resonator, and
reflect the remaining part of the laser beam back into the laser
resonator. The semiconductor saturable absorber mirror 51a may have
a reflective layer and a saturable absorber layer laminated
thereon. A part of an incident laser beam of low beam intensity may
be absorbed by the saturable absorber layer, and another part of
the incident laser beam of high beam intensity may be transmitted
through the saturable absorber layer and reflected by the
reflective layer. With this, the pulse duration of the incident
laser beam may be shortened.
[0130] A semiconductor pumped Nd:YVO.sub.4 laser may, for example,
be used as the pumping source 59a. The second harmonic wave from
the pumping source 59a may be introduced into the laser resonator
through the first pumping mirror 54a. The position of the
semiconductor saturable absorber mirror 51a may be adjusted so as
to adjust the resonator length for a predetermined longitudinal
mode. With this mode-locking of the Ti:sapphire laser 50a, a
picosecond pulse laser beam may be outputted through the output
coupler 52a. Here, when the pulse energy is small, the pulse laser
beam may be amplified by a regenerative amplifier.
[0131] According to the fifth embodiment, a target material may be
irradiated with a picosecond pulse laser beam or a pulse laser beam
having a shorter pulse duration. When the target material is
irradiated with a short pulse laser beam, thermal diffusion at the
irradiation portion may be made extremely small. Accordingly,
energy that may be diffused can be used for the ablation effect. As
a result, according to the fifth embodiment, compared to the
nanosecond pulse laser beam, a droplet may be diffused with smaller
pulse energy.
8. Sixth Embodiment
[0132] FIG. 16 schematically illustrates an exemplary configuration
of a fiber laser configured to output the pre-pulse laser beam in
an EUV light generation system according to a sixth embodiment. A
fiber laser 50b of the sixth embodiment may be provided outside the
chamber 1 as a driver laser for outputting the pre-pulse laser beam
in any one of the first through fourth embodiments.
[0133] The fiber laser 50b may include a laser resonator formed by
a high-reflection mirror 51b and a semiconductor saturable absorber
mirror 52b. A grating pair 53b, a first polarization maintenance
fiber 54b, a multiplexer 55b, a separation element 56b, a second
polarization maintenance fiber 57b, and a focusing optical system
58b may be provided in this order from the side of the
high-reflection mirror 51b in the beam path in the laser resonator.
Further, the fiber laser 50b may include a pumping source 59b for
introducing a pumping beam into the laser resonator.
[0134] The multiplexer 55b may be configured to introduce the
pumping beam from the pumping source 59b to the first polarization
maintenance fiber 54b and may transmit a laser beam traveling back
and forth between the first polarization maintenance fiber 54b and
the second polarization maintenance fiber 57b. The first
polarization maintenance fiber 54b may be doped with ytterbium
(Yb), and may undergo stimulated emission with the pumping beam.
The grating pair 53b may selectively reflect a laser beam at a
predetermined wavelength. The semiconductor saturable absorber
mirror 52b may be similar in configuration and function to the
semiconductor saturable absorber mirror 51b in the fifth
embodiment. The separation element 56b may separate a part of the
laser beam amplified in the laser resonator and output the
separated laser beam from the laser resonator and return the
remaining part of the laser beam back into the laser resonator.
This configuration may lead to mode-locking of the fiber laser 50b.
When the pumping beam from the pumping source 59b is introduced
into the multiplexer 55b through an optical fiber, a picosecond
pulse laser beam may be outputted through the separation element
56b.
[0135] According to the sixth embodiment, in addition to the effect
similar to that of the fifth embodiment, the target material may be
irradiated with the pre-pulse laser beam with high precision since
the pre-pulse laser beam is introduced through an optical fiber.
Further, generally, in a fiber laser, the M.sup.2 value that
expresses deviation from an ideal Gaussian distribution of the
laser beam intensity distribution is approximately 1.2. The M.sup.2
value being closer to 1 means that the focusing performance is
high. Accordingly, when a fiber laser is used, a small target may
be irradiated with a pre-pulse laser beam with high precision.
[0136] The shorter the wavelength of a laser beam, the higher the
absorptivity of the laser beam by tin. Accordingly, when the
priority is placed on the absorptivity of the laser beam by tin, a
laser beam at a shorter wavelength may be advantageous. For
example, compared to the fundamental harmonic wave outputted from
an Nd:YAG laser apparatus at a wavelength of 1064 nm, the
absorptivity may increase with the second harmonic wave (a
wavelength of 532 nm), further with the third harmonic wave (a
wavelength of 355 nm), and even further with the fourth harmonic
wave (a wavelength of 266 nm).
[0137] Here, an example where a picosecond pulse laser beam is used
is shown. However, similar effects can be obtained even with a
femtosecond pulse laser beam. Further, a droplet can be diffused
even with a nanosecond pulse laser beam. For example, a fiber laser
with such specifications as a pulse duration of approximately 15
ns, a repetition rate of 100 kHz, pulse energy of 1.5 mJ, a
wavelength of 1.03 .mu.m, and the M.sup.2 value of below 1.5 may be
used as a pre-pulse laser apparatus.
9. Irradiation Conditions of Laser Beam
[0138] FIGS. 17A and 17B are tables showing irradiation conditions
of the laser beams in the EUV light generation system in any one of
the embodiments. When irradiation pulse energy is E (J), a pulse
duration is T (s), and an irradiation spot size is Dm (m), beam
intensity W (W/m.sup.2) of the laser beam may be expressed in
Expression 5 below.
W=E/(T(Em/2).sup.2.pi.) (5)
[0139] FIG. 17A shows four examples (case 1 through case 4) of
irradiation conditions of the pre-pulse laser beam. In the case 1,
the diameter of a molten tin droplet is 60 .mu.m. The irradiation
conditions for diffusing such a droplet and generating a desired
diffused target may be as follows. For example, when the
irradiation spot size Dm is 100 .mu.m, the beam intensity W of the
laser beam at 1.6.times.10.sup.9 W/cm.sup.2 is required. In that
case, the irradiation pulse energy E may be set to 1.9 mJ, and the
pulse duration T may be set to 15 ns. With such a pre-pulse laser
beam, a diffused target as shown in FIG. 3B may be generated.
[0140] In the case 2 shown in FIG. 17A, the diameter of a molten
tin droplet is 10 .mu.m (i.e., a mass-limited target). The
irradiation conditions for diffusing such a droplet and generating
a desired diffused target may be as follows. For example, when the
irradiation spot size Dm is 30 .mu.m, the beam intensity W of the
laser beam at 1.6.times.10.sup.9 W/cm.sup.2 is required. In that
case, the irradiation pulse energy E may be set to 0.17 mJ, and the
pulse duration T may be set to 15 ns. With such a pre-pulse laser
beam, a diffused target as shown in FIG. 7B may be generated.
[0141] In the cases 3 and 4 shown in FIG. 17A, the laser apparatus
as shown in FIG. 15 or 16 is used for outputting the pre-pulse
laser beam. Further, in the cases 3 and 4, the droplet is a
mass-limited target, and the beam intensity W of the laser beam at
1.times.10.sup.10 W/cm.sup.2 is required.
[0142] FIG. 17B shows four examples (case 1 through case 4) of
irradiation conditions of the main pulse laser beam. In the case 1,
the diffusion diameter of a diffused target is 250 .mu.m.
Irradiation conditions for turning such a diffused target into
plasma may be as follows. For example, when the irradiation spot
size Dm is 250 .mu.m, the beam intensity W of the laser beam at
1.0.times.10.sup.10 W/cm.sup.2 is required. In that case, the
irradiation pulse energy E may be set to 100 mJ, and the pulse
duration T may be set to 20 ns. Accordingly, energy required to
turn the diffused target into plasma may be supplied to the
diffused target.
[0143] In the case 2 shown in FIG. 17B, the diffusion diameter of
the diffused target, the irradiation spot size Dm, and the beam
intensity W of the laser beam are the same as in the case 1 shown
in FIG. 17B. In that case, the irradiation pulse energy E may be
set to 150 mJ, and the pulse duration T may be set to 30 ns. With
this, energy required to turn the diffused target into plasma may
be supplied to the diffused target.
[0144] In the case 3 shown in FIG. 17B, the diffusion diameter of a
diffused target is 300 .mu.m. Irradiation conditions for turning
such a diffused target into plasma may be as follows. For example,
when the irradiation spot size Dm is 300 .mu.m, the beam intensity
W of the laser beam at 1.1.times.10.sup.10 W/cm.sup.2 is required.
In that case, the irradiation pulse energy E may be set to 200 mJ,
and the pulse duration T may be set to 25 ns. Thus, energy required
to turn the diffused target into plasma may be supplied to the
diffused target.
[0145] In the case 4 shown in FIG. 17B, the diffusion diameter of a
diffused target is 200 .mu.m. Irradiation conditions for turning
such a diffused target into plasma may be as follows. For example,
when the irradiation spot size Dm is 200 .mu.m, the beam intensity
W of the laser beam at 1.2.times.10.sup.10 W/cm.sup.2 is required.
In that case, the irradiation pulse energy E may be set to 200 mJ,
and the pulse duration T may be set to 50 ns. With this, energy
required to turn the diffused target into plasma may be supplied to
the diffused target.
[0146] As described above, the beam intensity of the pre-pulse
laser beam and the main pulse laser beam may be set by setting the
irradiation pulse energy E and the pulse duration T of the laser
beam.
10. Seventh Embodiment
[0147] FIG. 18 schematically illustrates an exemplary configuration
of an EUV light generation system according to a seventh
embodiment. In the EUV light generation system according to the
seventh embodiment, the polarization state of the pre-pulse laser
beam from a fiber laser apparatus 31 may be controlled by a
polarization converter 20. The polarization converter 20 may be
configured to change the polarization state of the pre-pulse laser
beam into a state other than the linear polarization. The
polarization converter 20 may be provided at a predetermined
position in a beam path between the driver laser and the plasma
generation region PS. In this disclosure, a polarization retarder
is also included in the polarization converter.
[0148] In the seventh embodiment, the fiber laser apparatus 31 may
include a fiber laser controller 31a and the fiber laser 50b
described with reference to FIG. 16 (the sixth embodiment). A
CO.sub.2 pulse laser apparatus 32 may include a CO.sub.2 laser
controller 32a, the master oscillator 3d, the preamplifier 3h, the
main amplifier 3j, and the relay optical systems 3g, 3i, and 3k as
described with reference to FIG. 9 (the first embodiment).
[0149] The EUV light generation controller 7 may output a fiber
laser beam intensity setting signal to the fiber laser controller
31a. Further, the EUV light generation controller 7 may output a
CO.sub.2 laser beam intensity setting signal to the CO.sub.2 laser
controller 32a.
[0150] The trigger controller 17 may output a fiber laser
oscillation trigger signal to the fiber laser 50b. Further, the
trigger controller 17 may output a CO.sub.2 laser oscillation
trigger signal to the master oscillator 3d.
[0151] The fiber laser 50b may be configured to output a pre-pulse
laser beam at a first wavelength based on the fiber laser
oscillation trigger signal. The fiber laser controller 31a may be
configured to control the output intensity of the fiber laser 50b
based on the fiber laser beam intensity setting signal. The
pre-pulse laser beam from the fiber laser 50b may be expanded in
diameter by the beam expander 4. Thereafter, the polarization state
of the pre-pulse laser beam may be changed by the polarization
converter 20, and then the pre-pulse laser beam may be incident on
the beam combiner 15c.
[0152] The master oscillator 3d may be configured to output a seed
beam at a second wavelength based on the CO.sub.2 laser oscillation
trigger signal. The CO.sub.2 laser controller 32a may be configured
to control the output intensity of the preamplifier 3h and the main
amplifier 3j based on the CO.sub.2 laser beam intensity setting
signal. The seed beam from the master oscillator 3d may be
amplified by the preamplifier 3h and the main amplifier 3j to
desired beam intensity.
[0153] In the seventh embodiment, the fiber laser 50b is used to
output the pre-pulse laser beam. This disclosure, however, is not
limited thereto. For example, a YAG laser or a Ti:sapphire laser
may be used to output the pre-pulse laser beam. Alternatively, in a
configuration where two-stage irradiation with the first and second
pre-pulse laser beams is employed, the first pre-pulse laser beam
may be outputted from a fiber laser apparatus capable of achieving
a small spot, and the second pre-pulse laser beam may be outputted
from a YAG laser apparatus or a Ti:sapphire laser apparatus capable
of outputting ultrashort pulse laser beam. Then, the main pulse
laser beam may be outputted from a CO.sub.2 laser apparatus capable
of achieving high power laser beam. That is, a desired number of
pre-pulse laser beams may be outputted from a plurality of separate
laser apparatuses. Further, in accordance with the state of the
diffused target at the time of being irradiated with the second
pre-pulse laser beam, the diffused target may be irradiated with a
plurality of pre-pulse laser beams respectively at different
wavelengths, and with difference spot sizes, energy, and pulse
durations.
10.1 Overview of Polarization Control
[0154] FIGS. 19A and 20A are conceptual diagrams showing a droplet
being irradiated with a linearly-polarized pre-pulse laser beam.
FIGS. 19B and 20B show the simulation result of a droplet being
irradiated with a linearly-polarized pre-pulse laser beam. In FIGS.
19A and 19B, the droplet is viewed in a direction (X-direction)
perpendicular to the polarization direction of the pre-pulse laser
beam. In FIGS. 20A and 20B, the droplet is viewed in a direction of
the beam axis (Z-direction) of the pre-pulse laser beam.
[0155] With reference to FIGS. 19A and 20A, a case where a droplet
is irradiated with a linearly-polarized pre-pulse laser beam will
be discussed. In this case, the droplet may be diffused, and as
shown in FIGS. 19B and 20B, a diffused target may be generated. The
simulation result reveals that the diffused target is diffused
further in a direction (X-direction) perpendicular to the
polarization direction (Y-direction) of the pre-pulse laser beam.
When the diffused target diffused as such is irradiated with the
main pulse laser beam traveling along substantially the same path
as the pre-pulse laser beam, as shown in FIGS. 19B and 20B, the
shape of the diffused target may differ largely from the
cross-sectional shape of the main pulse laser beam. Accordingly, a
large portion of the main pulse laser beam may not be used to
generate plasma.
[0156] Here, a reason why the diffused target is diffused largely
in a direction (X-direction) perpendicular to the polarization
direction of the linearly-polarized pre-pulse laser beam will be
considered. FIG. 21 is a graph showing absorptivity of a
P-polarization component and an S-polarization component of a laser
beam incident on the surface of a molten tin droplet. In the case
shown in FIG. 21, the wavelength of the laser beam is 1.06 .mu.m.
As shown in the graph, the absorptivity of the laser beam may
depend on the angle of incidence and the polarization state of the
laser beam.
[0157] The absorptivity of the P-polarization component of an
incident laser beam is at the highest when the angle of incidence
of the laser beam is 80 to 85 degrees, and gradually decreases as
the angle of incidence shifts from that angle range. On the other
hand, the absorptivity of the S-polarization component is
substantially the same as that of the P-polarization component when
the laser beam is incident on the surface of the molten tin droplet
at substantially 0 degree (i.e., substantially normal incidence),
and decreases as the angle of incidence increases. For example,
when the angle of incidence is equal to or greater than 80 degrees,
the absorptivity of the S-polarization component approximates to
0%.
[0158] Based on such absorptivity properties, it is speculated that
energy of the laser beam is absorbed the most where a
linearly-polarized laser beam is incident on the surface of the
droplet as the P-polarization component at a degree within a range
of 80 to 85 degrees. Portions of the droplet where the laser beam
is incident thereon as the P-polarization component at an angle
within the above range are areas toward the edges of the
irradiation surface in the Y-direction (hereinafter, referred to as
"laser ablation region"). That is, the absorptivity of the laser
beam is high in these areas, and strong laser ablation may occur.
As a result of the reaction of the laser ablation in the laser
ablation regions, a shock wave may propagate toward the inside of
the droplet from the laser ablation regions. This shock wave may
propagate toward the edges of the droplet in the X-direction as
shown in FIG. 20A, and the droplet may be diffused in the
X-direction as shown in FIG. 20B.
[0159] Accordingly, in the seventh embodiment, the polarization
state of the pre-pulse laser beam may be changed into a
polarization state other than the linear polarization using the
polarization converter 20. Further, by controlling the spot size of
the pre-pulse laser beam to be equal to or greater than the
diameter (e.g., 40 .mu.m) of the droplet, the entire irradiation
surface of the droplet may be irradiated with the pre-pulse laser
beam. With this, the droplet may be diffused symmetrically about
the beam axis of the pre-pulse laser beam, and the diffused target
may be irradiated with the main pulse laser beam efficiently.
[0160] The polarization converter 20 may be configured to change
the pre-pulse laser beam into a substantially circularly-polarized
laser beam, a substantially unpolarized laser beam, a substantially
radially-polarized laser beam, a substantially
azimuthally-polarized laser beam, and so forth.
10.2 Examples of Polarization Control
[0161] FIGS. 22A and 22B show a droplet being irradiated with a
circularly-polarized pre-pulse laser beam. FIGS. 22C and 22D show a
diffused target generated when the droplet is irradiated with the
pre-pulse laser beam being irradiated with a main pulse laser beam.
FIGS. 22E and 22F schematically show plasma generated when the
diffused target is irradiated with the main pulse laser beam.
[0162] In a circularly-polarized laser beam, the polarization
vector draws a circle on a plane (X-Y plane) perpendicular to the
beam axis of the laser beam. Further, the polarization state of the
pre-pulse laser beam is circular at any position along the X-Y
plane (see FIGS. 22A and 22B). In the circularly-polarized laser
beam, the ratio of an X-direction polarization component and a
Y-direction polarization component is substantially 1:1. When a
droplet is irradiated with the circularly-polarized pre-pulse laser
beam, the distribution of absorptivity of the pre-pulse laser beam
in the surface of the droplet may be symmetrical about the center
axis of the droplet in the irradiation direction of the laser beam.
As a result, the diffusion state of the droplet may be symmetrical
about the center axis of the droplet, and the shape of the diffused
target may become disc-like (see FIGS. 22C and 22D). This allows
the shape of the diffused target to substantially coincide with the
cross-sectional shape of the main pulse laser beam so that the main
pulse laser beam may be absorbed efficiently by the diffused
target.
[0163] FIGS. 23A and 23B show a droplet being irradiated with an
unpolarized pre-pulse laser beam. FIGS. 23C and 23D show a diffused
target generated when the droplet is irradiated with the pre-pulse
laser beam being irradiated with a main pulse laser beam. FIGS. 23E
and 23F schematically show plasma generated when the diffused
target is irradiated with the main pulse laser beam.
[0164] The pre-pulse laser beam shown in FIG. 23B is substantially
unpolarized. In such an unpolarized laser beam, the ratio of the
X-direction polarization component and the Y-direction polarization
component is substantially 1:1. When a droplet is irradiated with
the unpolarized pre-pulse laser beam, the distribution of
absorptivity of the pre-pulse laser beam in the surface of the
droplet may be symmetrical about the center axis of the droplet in
the irradiation direction of the laser beam. As a result, the
diffusion state of the droplet may be symmetrical about the center
axis of the droplet, and the shape of the diffused target may, for
example, become disc-like. Accordingly, the main pulse laser beam
may be absorbed by the diffused target efficiently.
[0165] FIGS. 24A and 24B show a droplet being irradiated with a
radially-polarized pre-pulse laser beam. FIGS. 24C and 24D show a
diffused target generated when the droplet is irradiated with the
pre-pulse laser beam being irradiated with a main pulse laser beam.
FIGS. 24E and 24F schematically show plasma generated when the
diffused target is irradiated with the main pulse laser beam.
[0166] When a droplet is irradiated with the radially-polarized
pre-pulse laser beam, the distribution of absorptivity of the
pre-pulse laser beam in the surface of the droplet may be
symmetrical about the beam axis of the pre-pulse laser beam. Here,
the beam axis of the pre-pulse laser beam preferably coincides with
the center axis of the droplet. As a result, the diffusion state of
the droplet may be symmetrical about the beam axis of the pre-pulse
laser beam, and the shape of the diffused target may, for example,
become disc-like. Accordingly, the main pulse laser beam may be
absorbed by the diffused target efficiently.
[0167] Further, when the spot size of the pre-pulse laser beam is
controlled to be equal to or greater than the diameter (e.g., 40
.mu.m) of the droplet, the entire irradiation surface of the
droplet may be irradiated with the pre-pulse laser beam incident
thereon mostly as the P-polarization component. Accordingly, the
absorptivity of the pre-pulse laser beam may be increased, and the
energy required to generate a desired diffused target may be kept
small.
[0168] FIGS. 25A and 25B show a droplet being irradiated with an
azimuthally-polarized pre-pulse laser beam. FIGS. 25C and 25D show
a diffused target generated when the droplet is irradiated with the
pre-pulse laser beam being irradiated with a main pulse laser beam.
FIGS. 25E and 25F schematically show plasma generated when the
diffused target is irradiated with the main pulse laser beam.
[0169] When a droplet is irradiated with the azimuthally-polarized
pre-pulse laser beam, the distribution of absorptivity of the
pre-pulse laser beam in the surface of the droplet may be
symmetrical about the beam axis of the pre-pulse laser beam. Here,
the beam axis of the pre-pulse laser beam preferably coincides with
the center axis of the droplet. As a result, the diffusion state of
the droplet may be symmetrical about the beam axis of the pre-pulse
laser beam, and the shape of the diffused target may, for example,
become disc-like. Accordingly, the main pulse laser beam may be
absorbed by the diffused target efficiently.
[0170] In the seventh embodiment, the distribution of the
absorptivity of the pre-pulse laser beam in the surface of the
droplet is made symmetrical about the center axis of the droplet
and/or the beam axis of the pre-pulse laser beam by controlling the
polarization state of the pre-pulse laser beam. However, this
disclosure is not limited thereto. The distribution of the
absorptivity of the pre-pulse laser beam in the surface of the
droplet need not be perfectly symmetrical about the beam axis, but
may be substantially symmetrical. Accordingly, the polarization
state of the pre-pulse laser beam may, for example, be elliptical
as well.
[0171] FIG. 26A schematically illustrates an exemplary
configuration of a device for measuring the degree of linear
polarization. The device may include a polarization prism and a
beam intensity detector. FIG. 26B shows the relationship between
the rotation angle of the polarization prism and the detection
result of the beam intensity detector.
[0172] As shown in FIG. 26A, a linearly-polarized pre-pulse laser
beam from the fiber laser 50b may be changed into an
elliptically-polarized laser beam by the polarization converter 20.
This elliptically-polarized laser beam may be focused by a focusing
optical system 41 and made to be incident on the polarization prism
42. The beam intensity of the laser beam outputted from the
polarization prism 42 may be detected by the beam intensity
detector 43. The polarization prism 42 may be formed by bonding two
refractive crystals such as calcite. The polarization prism 42 may
be used to extract a laser beam of a predetermined polarization
direction as an output laser beam from an input beam in accordance
with the orientation of the bonding surface of the prism. As the
polarization prism 42 is rotated about the beam axis of the
pre-pulse laser beam, the polarization prism 42 may transmit a
laser beam polarized in a direction corresponding to the rotation
angle. In the description below, it is assumed that the
polarization prism 42 may be an ideal prism having a sufficiently
high extinction factor.
[0173] As shown in FIG. 26B, the beam intensity of the output beam
from the polarization prism 42 may change periodically as the
polarization prism 42 is rotated by 180 degrees. Here, as shown in
Expression (6), the degree of linear polarization P may be obtained
from a maximum value Imax and a minimum value Imin of the beam
intensity.
P=(Imax-Imin)/(Imax+Imin).times.100(%) (6)
[0174] The degree of linear polarization P measured by the device
shown in FIG. 26A may be substantially 0% for a laser beam of a
polarization state that is substantially symmetrical about the beam
axis (e.g., circularly-polarized laser beam, unpolarized laser
beam, radially-polarized laser beam, azimuthally-polarized laser
beam). On the other hand, the degree of linear polarization P may
be substantially 100% for a linearly-polarized laser beam. Here,
when the degree of linear polarization P is in the following
ranges, the diffused target may be formed in a desired shape (e.g.,
disc-shape).
[0175] 0%.ltoreq.P<30% (preferable range)
[0176] 0%.ltoreq.P<20% (more preferable range)
[0177] 0%.ltoreq.P<10% (most preferable range)
These ranges may be adjusted with the extinction factor of the
actually-used polarization prism 42 taken into consideration.
10.3 Examples of Polarization Converter
[0178] FIG. 27 shows a first example of a polarization converter in
the seventh embodiment. In FIG. 27, a quarter-wave plate 21 for
converting a linearly-polarized laser beam into a
circularly-polarized laser beam may be used as the polarization
converter.
[0179] The transmissive quarter-wave plate 21 may be a refractive
crystal that provides a phase difference of .pi./2 between a
polarization component parallel to the optic axis of the crystal
and a polarization component perpendicular to the optic axis of the
crystal. As shown in FIG. 27, a linearly-polarized laser beam may
be converted into a circularly-polarized laser beam when the
linearly-polarized laser beam is incident on the quarter-wave plate
21 such that the polarization direction thereof is inclined by 45
degrees with respect to the optic axis of the quarter-wave plate
21. When the polarization direction of the linearly-polarized laser
beam is inclined by 45 degrees in the other direction, the rotation
direction of the circular polarization is reversed. This disclosure
is not limited to the transmissive quarter-wave plate 21, and a
reflective quarter-wave plate may be used as well.
[0180] FIGS. 28A through 28C show a second example of a
polarization converter in the seventh embodiment. FIG. 28A is a
front view of the polarization converter, FIG. 28B is an enlarged
fragmentary sectional view of the polarization converter taken
along a radial direction plane, and FIG. 28C shows one mode for the
use of the polarization converter. In FIGS. 28A through 28C, a
random phase plate 22 for converting a linearly-polarized laser
beam into an unpolarized laser beam may be used as the polarization
control apparatus.
[0181] The transmissive random phase plate 22 may be a transmissive
optical element having a diameter D, on whose input or output
surface minute square regions each having a length d on each side
are formed by randomly arranged recesses and protrusions. The
random phase plate 22 may divide an input beam having the diameter
D into small square beams each having the length d on each side.
With this configuration, the random phase plate 22 may provide a
phase difference of n between a small beam transmitted through a
protrusion 22a and a small beam transmitted through a recess 22b.
The phase difference n may be provided by setting a step .DELTA.t
between the protrusion 22a and the recess 22b as in Expression (7)
below, where the wavelength of the incident laser beam is A, and
the refractive index of the random phase plate 22 is n.sub.1.
.DELTA.t=.lamda./2(n.sub.1-1) (7)
[0182] As shown in FIG. 28C, the transmissive random phase plate 22
may, for example, be provided between the pre-pulse laser apparatus
and the focusing optical system 15. A linearly-polarized laser beam
may be incident on the random phase plate 22, and the laser beam
transmitted through the random phase plate 22 may become
unpolarized. Laser beams polarized in directions perpendicular to
each other do not interfere. Accordingly, when this laser beam is
focused by the focusing optical system 15, the cross-sectional beam
intensity distribution at the focus may not be Gaussian but may be
closer to the top-hat distribution. When a droplet is irradiated
with such a pre-pulse laser beam, the droplet may be diffused
substantially symmetrically about the center axis of the droplet.
Accordingly, the diffused target may become disc-shaped, and the
main pulse laser beam may be absorbed by the diffused target
efficiently.
[0183] This disclosure is not limited to the transmissive random
phase plate 22, and a reflective random phase plate may be used
instead. Further, the protrusion 22a and the recess 22b may be in
any other polygonal shapes, such as a hexagonal shape, a triangular
shape.
[0184] FIGS. 29A and 29B show a third example of a polarization
converter in the seventh embodiment. FIG. 29A is a perspective view
of the polarization converter, and FIG. 29B is a front view of the
polarization converter. FIGS. 29A and 29B show an n-divided wave
plate 23 for converting a linearly-polarized laser beam into a
radially-polarized laser beam.
[0185] The n-divided wave plate 23 may be a transmissive optical
element in which n triangular half-wave plates 231, 232, . . . ,
23n are arranged symmetrically about the beam axis of the laser
beam. Each of the half-wave plates 231, 232, . . . , 23n may be a
refractive crystal that provides a phase difference of n between a
polarization component parallel to the optic axis of the crystal
and a polarization component perpendicular to the optic axis of the
crystal. When a linearly-polarized laser beam is incident on such a
half-wave plate perpendicularly such that the polarization
direction is inclined by an angle .theta. with respect to the optic
axis of the half-wave plate, the laser beam may be outputted from
the half-wave plate with its polarization direction being rotated
by 2.theta..
[0186] For example, the half-wave plate 231 and the half-wave plate
233 may be arranged so that their respective optic axes make an
angle of 45 degrees. Then, the polarization direction of the
linearly-polarized laser beam transmitted through the half-wave
plate 231 and the polarization direction of the linearly-polarized
laser beam transmitted through the half-wave plate 233 may differ
by 90 degrees. In this way, the polarization direction of the
incident laser beam may be changed in accordance with an angle
formed by the optic axis of the half-wave plate and the
polarization direction of the incident laser beam. With this, the
polarization directions of the laser beams transmitted through the
respective half-wave plates may be changed to predetermined
polarization directions. As a result, the re-divided wave plate 23
may convert a linearly-polarized laser beam into a
radially-polarized laser beam. Further, by changing the arrangement
of the half-wave plates in the n-divided wave plate 23, a
linearly-polarized laser beam may be converted into an
azimuthally-polarized laser beam as well.
[0187] FIG. 30 shows a fourth example of a polarization converter
in the seventh embodiment. FIG. 30 shows a phase compensator 24a, a
polarization rotator 24b, and a theta cell 24c for converting a
linearly-polarized laser beam into a radially-polarized laser
beam.
[0188] The theta cell 24c may be an optical element into which a
twisted nematic (TN) liquid crystal is injected, and the liquid
crystal molecules are arranged so as to be twisted from the input
side toward the output side. A linearly-polarized laser beam
incident on the theta cell 24c may be rotated along the twist of
the alignment of the liquid crystal molecules, and a laser beam
linearly-polarized in a direction inclined with respect to the
polarization direction of the input beam may be outputted from the
theta cell 24c. Accordingly, by setting the twisted angle of the
alignment of the liquid crystal molecules in the theta cell 24c so
as to differ in accordance with the azimuth angle direction, the
theta cell 24c may convert a linearly-polarized input beam into a
radially-polarized output beam.
[0189] However, when a linearly-polarized laser beam is converted
into a radially-polarized laser beam only with the theta cell 24c,
the beam intensity may be decreased at a boundary between an upper
half and a lower half of the laser beam outputted from the theta
cell 24c. Accordingly, a phase of the upper half of the laser beam
may be shifted by n by the phase compensator 24a prior to the laser
beam being incident on the theta cell 24c. In FIG. 30, the arrows
indicate that the phases of the input beam are opposite between the
upper and lower halves of the laser beam. The upper half of the
phase compensator 24a may include a TN liquid crystal in which the
alignment of the liquid crystal molecules is twisted by 180 degrees
from the input side toward the output side. In this way, when a
linearly-polarized laser beam in which the phases of the upper and
lower halves are opposite is made to be incident on the theta cell
24c, laser beams of the same phase may be outputted around the
boundary between the upper and lower halves of the output laser
beam. With this, the beam intensity may be prevented from being
decreased at the boundary between the upper and lower halves of the
laser beam outputted from the theta cell 24c.
[0190] The polarization rotator 24b may be configured to rotate the
polarization direction of the linearly-polarized input beam by 90
degrees. When a laser beam of which the polarization direction is
rotated by 90 degrees is made to be incident on the theta cell 24c,
the theta cell 24c may convert the linearly-polarized laser beam
into an azimuthally-polarized laser beam. The polarization rotator
24b may be formed of a TN liquid crystal in which the alignment of
the liquid crystal molecules is twisted by 90 degrees from the
input side toward the output side. In this case, by controlling the
DC voltage applied to the polarization rotator 24b so as to switch
between a state where the alignment of the liquid crystal molecules
are twisted and a state where the alignment is not twisted,
switching between a radially-polarized output beam and an
azimuthally-polarized output beam may be achieved.
[0191] In this way, the conversion of the polarization state may be
achieved relatively freely by using the phase compensator 24a, the
polarization rotator 24b, and the theta cell 24c. Further, as
described with reference to FIGS. 27 through 29B, when the
polarization direction is to be changed using a wave plate (phase
plate), the wavelength of the laser beam of which the polarization
direction is changed may differ depending on the thickness of the
wave plate. However, as described with reference to FIG. 30, when
the theta cell 24c is used, the polarization direction of an input
beam of a relatively broad bandwidth may be changed. Accordingly,
using the theta cell 24c may make it possible to change the
polarization direction even when the bandwidth of the pre-pulse
laser beam is broad.
11. Eighth Embodiment
[0192] FIG. 31 schematically illustrates the configuration of an
EUV light generation system according to an eighth embodiment. In
the EUV light generation system according to the eighth embodiment,
the polarization state of a pre-pulse laser beam from the fiber
laser apparatus 31 may be controlled by the polarization converter
20, and this pre-pulse laser beam may be guided into the chamber 1
along a beam path that is different from that of the main pulse
laser beam.
12. Ninth Embodiment
[0193] FIGS. 32A through 32C schematically illustrates an exemplary
configuration of a laser apparatus configured to output a pre-pulse
laser beam in an EUV light generation system according to a ninth
embodiment. A laser apparatus 60a of the ninth embodiment may be
provided outside the chamber 1 (see, e.g., FIG. 1) as a driver
laser for outputting a pre-pulse laser beam in any one of the first
through fourth embodiments.
[0194] As shown in FIG. 32A, the laser apparatus 60a may include a
laser resonator that includes a reflective polarization converter
61a and a front mirror 62. A laser medium 63 may be provided in the
laser resonator. Stimulated emission light may be generated from
the laser medium 63 with a pumping beam from a pumping source (not
shown). The stimulated emission light may travel back and forth
between the polarization converter 61a and the front mirror 62 and
be amplified by the laser medium 63. Thereafter, an amplified laser
beam may be outputted from the laser apparatus 60a.
[0195] The polarization converter 61a may be configured to reflect
with high reflectance a laser beam of a predetermined polarization
direction in accordance with the input position on the polarization
converter 61a. In accordance with the reflective properties of the
polarization converter 61a, a radially-polarized laser beam shown
in FIG. 32B or an azimuthally-polarized laser beam shown in FIG.
32C may be amplified in the laser resonator. A part of the
amplified laser beam may be transmitted through the front mirror 62
and outputted as the pre-pulse laser beam.
[0196] According to the ninth embodiment, a polarization converter
may be used as a part of the resonator of the driver laser. With
this, a polarization converter need not be provided in a beam path
between the driver laser and the plasma generation region PS as in
the seventh embodiment.
[0197] FIGS. 33A through 33C schematically illustrates the
exemplary configuration of a laser apparatus configured to output a
pre-pulse laser beam in an EUV light generation system according to
a modification of the ninth embodiment. A laser apparatus 60b of
this modification may include a laser resonator that includes a
rear mirror 61 and a reflective polarization converter 62a. In
accordance with the reflective properties of the polarization
converter 62a, a radially-polarized laser beam shown in FIG. 33B or
an azimuthally-polarized laser beam shown in FIG. 33C may be
amplified in the laser resonator. A part of the amplified laser
beam may be transmitted through the polarization converter 62a and
outputted as the pre-pulse laser beam.
[0198] FIGS. 34A and 34B show an example of a polarization
converter in the ninth embodiment. FIG. 34A is a perspective view
of the polarizer, and FIG. 34B is an enlarged fragmentary sectional
view of a diffraction grating portion of the polarization
converter, taken along the radial direction plane. As shown in FIG.
34A, the reflective polarization converter 61a may be a mirror on
which a concentric circular diffraction grating 611 is formed.
Further, as shown in FIG. 34B, in the polarization converter 61a, a
multilayer film 612 may be formed on a glass substrate 613, and the
diffraction grating 611 may be formed on the multilayer film
612.
[0199] When an azimuthally-polarized laser beam is incident on the
polarization converter 61a configured as such (here, the
polarization direction is substantially parallel to the direction
of the grooves in the diffraction grating 611), the
azimuthally-polarized laser beam may be transmitted through the
diffraction grating 611 and propagated to the multilayer film 612.
On the other hand, when a radially-polarized laser beam is incident
on the polarization converter 61a configured as such (here, the
polarization direction is substantially perpendicular to the
direction of the grooves in the diffraction grating 611), the
radially-polarized laser beam may not be transmitted through the
diffraction grating 611 and may be reflected thereby. In the ninth
embodiment (see FIGS. 32A through 32C), using the polarization
converter 61a configured as such in the laser resonator may make it
possible to output a radially-polarized laser beam.
[0200] Here, when the grooves in the diffraction grating 611 are
formed radially, the polarization converter 61a may reflect an
azimuthally-polarized laser beam with high reflectance. In this
case, the azimuthally-polarized laser beam may be outputted.
Further, forming the diffraction grating 611 on the polarization
converter 62a of the modification (see FIGS. 33A through 33C) of
the ninth embodiment may make it possible to output a
radially-polarized laser beam or an azimuthally-polarized laser
beam.
13. Control of Fluence
[0201] FIG. 35 is a graph on which the obtained conversion
efficiency (CE) in accordance with a fluence (energy per unit area
of a beam cross-section at its focus) of a pre-pulse laser beam is
plotted.
[0202] The measuring conditions are as follows. A molten tin
droplet having a diameter of 20 .mu.m is used as a target material.
A laser beam with a pulse duration of 5 ns to 15 ns outputted from
a YAG pulse laser apparatus is used as a pre-pulse laser beam. A
laser beam with a pulse duration of 20 ns outputted from a CO.sub.2
pulse laser apparatus is used as a main pulse laser beam. The beam
intensity of the main pulse laser beam is 6.0.times.10.sup.9
W/cm.sup.2, and the delay time for the irradiation with the main
pulse laser beam is 1.5 .mu.s after the irradiation with the
pre-pulse laser beam.
[0203] The horizontal axis of the graph shown in FIG. 35 shows a
value in which the irradiation conditions of the pre-pulse laser
beam (pulse duration, energy, spot size) are converted into a
fluence. Further, the vertical axis shows the CE in the case where
the diffused target generated in accordance with the irradiation
conditions of the pre-pulse laser beam is irradiated with the above
main pulse laser beam.
[0204] The measurement results shown in FIG. 35 reveal that
increasing the fluence of the pre-pulse laser beam may improve the
CE (approximately 3%). That is, at least in a range where the pulse
duration of the pre-pulse laser beam is 5 ns to 15 ns, there is a
correlation between the fluence and the CE.
[0205] Accordingly, in the above embodiments, the EUV light
generation controller 7 may be configured to control the fluence,
instead of the beam intensity, of the pre-pulse laser beam. The
measurement results shown in FIG. 35 reveal that the fluence of the
pre-pulse laser beam may preferably be in the range of 10
mJ/cm.sup.2 to 600 mJ/cm.sup.2. The range of 30 mJ/cm.sup.2 to 400
mJ/cm.sup.2 is more preferable. The range of 150 mJ/cm.sup.2 to 300
mJ/cm.sup.2 is even more preferable.
[0206] From the measurement results where the CE is improved when
the fluence of the pre-pulse laser beam is controlled as above, it
is speculated that a droplet is diffused in a disc-shape, a
dish-shape, or a torus-shape under the above conditions. That is,
it is speculated that when a droplet is diffused, the total surface
area is increased, the energy of the main pulse laser beam is
absorbed efficiently by the diffused target, and as a result, the
CE is improved.
14. Control of Delay Time
[0207] FIG. 36 is a graph showing the result of an experiment for
generating a diffused target in an EUV light generation system. In
this experiment, the EUV light generation system of the eighth
embodiment is used. The pre-pulse laser beam may be converted into
a circularly-polarized laser beam by the polarization converter 20.
The horizontal axis in FIG. 36 shows a time that has elapsed since
a droplet is irradiated with a pre-pulse laser beam. The vertical
axis shows a diffusion radius of a diffused target generated when
the droplet is irradiated with the pre-pulse laser beam. The
diffusion radius is a radius of a space where a particle of a
predetermined diameter exists. Changes over time in the diffusion
radius after the irradiation with the pre-pulse laser beam are
plotted for the droplets respectively having diameters of 12 .mu.m,
20 .mu.m, 30 .mu.m, and 40 .mu.m. As seen from FIG. 36, the
diffusion radius has low dependency on the droplet diameter.
Further, the changes over time in the diffusion radius are
relatively gradual in 0.3 .mu.s to 3 .mu.s after a droplet is
irradiated with a pre-pulse laser beam. It is speculated that the
variation in the diffusion radius for each droplet is small during
this time period. Accordingly, if the diffused target is irradiated
with a main pulse laser beam during this time period, the variation
in generated EUV energy may be small between pulses.
[0208] FIG. 37 is a graph on which the obtained conversion
efficiency (CE) for the corresponding delay time since a droplet is
irradiated with a pre-pulse laser beam until a diffused target is
irradiated by a main pulse laser beam is plotted for differing
diameters of the droplet.
[0209] The measuring conditions are as follows. Molten tin droplets
respectively having diameters of 12 .mu.m, 20 .mu.m, 30 .mu.m, and
40 .mu.m are used as the target material. A laser beam with a pulse
duration of 5 ns outputted from a YAG pulse laser apparatus is used
as a pre-pulse laser beam. The fluence of the pre-pulse laser beam
is 490 mJ/cm.sup.2. A laser beam with a pulse duration of 20 ns
outputted from a CO.sub.2 pulse laser apparatus is used as a main
pulse laser beam. The beam intensity of the main pulse laser beam
is 6.0.times.10.sup.9 W/cm.sup.2.
[0210] The measurement results shown in FIG. 37 reveal that the
delay time for the irradiation with the main pulse laser beam may
preferably be in a range of 0.5 .mu.s to 2.5 .mu.s after the
irradiation with the pre-pulse laser beam. However, it is found
that the optimum range of the delay time for the irradiation with
the main pulse laser beam to obtain a high CE differs depending on
the diameter of the droplet.
[0211] When the diameter of the droplet is 12 .mu.m, the delay time
for the irradiation with the main pulse laser beam may preferably
be in a range of 0.5 .mu.s to 2 .mu.s after the irradiation with
the pre-pulse laser beam. The range of 0.6 .mu.s to 1.5 .mu.s is
more preferable. The range of 0.7 .mu.s to 1 .mu.s is even more
preferable.
[0212] When the diameter of the droplet is 20 .mu.m, the delay time
for the irradiation with the main pulse laser beam may preferably
be in a range of 0.5 .mu.s to 2.5 .mu.s after the irradiation with
the pre-pulse laser beam. The range of 1 .mu.s to 2 .mu.s is more
preferable. The range of 1.3 .mu.s to 1.7 .mu.s is even more
preferable.
[0213] When the diameter of the droplet is 30 .mu.m, the delay time
for the irradiation with the main pulse laser beam may preferably
be in a range of 0.5 .mu.s to 4 .mu.s after the irradiation with
the pre-pulse laser beam. The range of 1.5 .mu.s to 3.5 .mu.s is
more preferable. The range of 2 .mu.s to 3 .mu.s is even more
preferable.
[0214] When the diameter of the droplet is 40 .mu.m, the delay time
for the irradiation with the main pulse laser beam may preferably
be in a range of 0.5 .mu.s to 6 .mu.s after the irradiation with
the pre-pulse laser beam. The range of 1.5 .mu.s to 5 .mu.s is more
preferable. The range of 2 .mu.s to 4 .mu.s is even more
preferable.
[0215] In the above description, the driver laser 3 (see FIG. 1)
corresponds to a laser beam generation apparatus configured to
output a pre-pulse laser beam and a main pulse laser beam. The YAG
pulse laser apparatus 3a (see FIGS. 9 through 11) and the fiber
laser apparatus 31 (see FIGS. 18 and 31) correspond to a first
pulse laser apparatus. The CO.sub.2 pulse laser apparatus 3b (see
FIGS. 9 through 11) and the CO.sub.2 pulse laser apparatus 32 (see
FIGS. 18 and 31) correspond to a second pulse laser apparatus. The
EUV light generation controller 7 (see FIG. 1) corresponds to a
laser controller.
[0216] The above-described embodiments and the modifications
thereof are merely examples for implementing this disclosure, and
this disclosure is not limited thereto. Making various
modifications according to the specifications or the like is within
the scope of this disclosure, and other various embodiments are
possible within the scope of this disclosure. For example, the
modifications illustrated for particular ones of the embodiments
can be applied to other embodiments as well (including the other
embodiments described herein).
[0217] The terms used in this specification and the appended claims
should be interpreted as "non-limiting." For example, the terms
"include" and "be included" should be interpreted as "including the
stated elements but not limited to the stated elements." The term
"have" should be interpreted as "having the stated elements but not
limited to the stated elements." Further, the modifier "one (a/an)"
should be interpreted as "at least one" or "one or more."
* * * * *