Yanagida; Tatsuya

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yanagida; Tatsuya.The latest application filed is for "extreme ultraviolet light generating system and electronic device manufacturing method".

Company Profile

10.50.58

Yanagida; Tatsuya - Oyama JP
YANAGIDA; Tatsuya - Oyama-shi JP
Yanagida; Tatsuya - Hiratsuka JP
YANAGIDA; Tatsuya - Hiratsuka City JP
YANAGIDA; Tatsuya - Hiratsuka-shi JP
YANAGIDA; Tatsuya - Tochigi JP
Yanagida; Tatsuya - Oita JP
Yanagida; Tatsuya - Miyazaki JP
Yanagida; Tatsuya - Kanagawa JP
Yanagida; Tatsuya - Ehime JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Extreme ultraviolet light generating system and electronic device manufacturing method Grant 11,226,565 - Yanagida January 18, 2	2022-01-18
Extreme ultraviolet light generation system Grant 10,932,350 - Yanagida , et al. February 23, 2	2021-02-23
Extreme Ultraviolet Light Generating System And Electronic Device Manufacturing Method App 20200363729 - YANAGIDA; Tatsuya	2020-11-19
Extreme ultraviolet light generation method Grant 10,667,375 - Yanagida	2020-05-26
Extreme Ultraviolet Light Generation System App 20200150543 - YANAGIDA; Tatsuya ; et al.	2020-05-14
Thomson scattering measurement system and EUV light generation system Grant 10,627,287 - Kouge , et al.	2020-04-21
System and method for generating extreme ultraviolet light, and laser apparatus Grant 10,630,042 - Yanagida , et al.	2020-04-21
Extreme ultraviolet light generating apparatus using differing laser beam diameters Grant 10,582,601 - Yanagida	2020-03-03
Laser Apparatus For Generating Extreme Ultraviolet Light App 20200068695 - NAGANO; Hitoshi ; et al.	2020-02-27
Extreme ultraviolet light generation system Grant 10,555,408 - Yanagida , et al. Fe	2020-02-04
System and method for generating extreme ultraviolet light employing laser pulse including pedestal Grant 10,512,148 - Nagano , et al. Dec	2019-12-17
Thomson Scattering Measurement System And Euv Light Generation System App 20190293488 - KOUGE; Kouichiro ; et al.	2019-09-26
Extreme Ultraviolet Light Generation Apparatus App 20190239329 - YANAGIDA; Tatsuya	2019-08-01
System and method for generating extreme ultraviolet light Grant 10,306,743 - Hori , et al.	2019-05-28
Extreme Ultraviolet Light Generation Method App 20190159327 - YANAGIDA; Tatsuya	2019-05-23
Droplet Detector And Euv Light Generation Device App 20190150260 - YANAGIDA; Tatsuya	2019-05-16
System And Method For Generating Extreme Ultraviolet Light App 20190141826 - HORI; Tsukasa ; et al.	2019-05-09
System and method for generating extreme ultraviolet light Grant 10,251,255 - Hori , et al.	2019-04-02
System And Method For Generating Extreme Ultraviolet Light App 20190037677 - HORI; Tsukasa ; et al.	2019-01-31
Extreme ultraviolet light generation apparatus Grant 10,172,225 - Suzuki , et al. J	2019-01-01
System And Method For Generating Extreme Ultraviolet Light, And Laser Apparatus App 20180351320 - YANAGIDA; Tatsuya ; et al.	2018-12-06
System and method for generating extreme ultraviolet light Grant 10,117,317 - Hori , et al. October 30, 2	2018-10-30
System and method for generating extreme ultraviolet light, and laser apparatus Grant 10,074,956 - Yanagida , et al. September 11, 2	2018-09-11
Extreme Ultraviolet Light Generating Apparatus App 20180255631 - YANAGIDA; Tatsuya	2018-09-06
Extreme Ultraviolet Light Generation System App 20180242441 - YANAGIDA; Tatsuya ; et al.	2018-08-23
Extreme ultraviolet light generation apparatus Grant 9,986,629 - Suzuki , et al. May 29, 2	2018-05-29
Extreme Ultraviolet Light Generation Apparatus App 20180146536 - SUZUKI; Toru ; et al.	2018-05-24
Extreme ultraviolet light generation system Grant 9,980,360 - Yanagida , et al. May 22, 2	2018-05-22
System And Method For Generating Extreme Ultraviolet Light App 20180110116 - HORI; Tsukasa ; et al.	2018-04-19
System and method for generating extreme ultraviolet light Grant 9,877,378 - Hori , et al. January 23, 2	2018-01-23
Extreme Ultraviolet Light Generating System, Extreme Ultraviolet Light Generating Method, And Thomson Scattering Measurement System App 20170280545 - TOMITA; Kentaro ; et al.	2017-09-28
Laser Apparatus For Generating Extreme Ultraviolet Light App 20170196072 - NAGANO; Hitoshi ; et al.	2017-07-06
System And Method For Generating Extreme Ultraviolet Light, And Laser Apparatus App 20170063020 - YANAGIDA; Tatsuya ; et al.	2017-03-02
Extreme Ultraviolet Light Generation System App 20170027047 - YANAGIDA; Tatsuya ; et al.	2017-01-26
System And Method For Generating Extreme Ultraviolet Light App 20170019983 - HORI; Tsukasa ; et al.	2017-01-19
System and method for generating extreme ultraviolet light, and laser apparatus Grant 9,509,115 - Yanagida , et al. November 29, 2	2016-11-29
Extreme ultraviolet light generation system Grant 9,497,841 - Yanagida , et al. November 15, 2	2016-11-15
System and method for generating extreme ultraviolet light Grant 9,497,842 - Hori , et al. November 15, 2	2016-11-15
Extreme Ultraviolet Light Generation Apparatus App 20160234920 - SUZUKI; Toru ; et al.	2016-08-11
Extreme ultraviolet light generation system Grant 9,402,297 - Wakabayashi , et al. July 26, 2	2016-07-26
System And Method For Generating Extreme Ultraviolet Light App 20160128172 - HORI; Tsukasa ; et al.	2016-05-05
Extreme Ultraviolet Light Generation System App 20160073487 - YANAGIDA; Tatsuya ; et al.	2016-03-10
System and method for generating extreme ultraviolet light Grant 9,265,136 - Hori , et al. February 16, 2	2016-02-16
System And Method For Generating Extreme Ultraviolet Light App 20150351209 - HORI; Tsukasa ; et al.	2015-12-03
System And Method For Generating Extreme Ultraviolet Light, And Laser Apparatus App 20150351210 - YANAGIDA; Tatsuya ; et al.	2015-12-03
Antenna, antenna apparatus, and communication apparatus Grant 9,172,141 - Yamaguchi , et al. October 27, 2	2015-10-27
System and method for generating extreme ultraviolet light Grant 9,167,678 - Hori , et al. October 20, 2	2015-10-20
Extreme Ultraviolet Light Generation System App 20150264793 - WAKABAYASHI; Osamu ; et al.	2015-09-17
System and method for generating extreme ultraviolet light, and laser apparatus Grant 9,130,345 - Yanagida , et al. September 8, 2	2015-09-08
System and method for generating extreme ultraviolet light Grant 9,113,540 - Hori , et al. August 18, 2	2015-08-18
Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target Grant 9,072,153 - Wakabayashi , et al. June 30, 2	2015-06-30
Extreme ultraviolet light generation system utilizing a variation value formula for the intensity Grant 9,072,152 - Wakabayashi , et al. June 30, 2	2015-06-30
System And Method For Generating Extreme Ultraviolet Light App 20150123019 - HORI; Tsukasa ; et al.	2015-05-07
Extreme Ultraviolet Light Generation System App 20150102239 - YANAGIDA; Tatsuya ; et al.	2015-04-16
Laser System And Extreme Ultraviolet Light Generation System App 20150043599 - YANAGIDA; Tatsuya ; et al.	2015-02-12
Faraday Rotator, Optical Isolator, Laser Apparatus, And Extreme Ultraviolet Light Generation Apparatus App 20140346374 - YANAGIDA; Tatsuya ; et al.	2014-11-27
Extreme ultraviolet light source device Grant 8,853,656 - Yanagida , et al. October 7, 2	2014-10-07
Extreme ultraviolet light source apparatus Grant 8,841,641 - Kakizaki , et al. September 23, 2	2014-09-23
System And Method For Generating Extreme Ultra Violet Light App 20140203194 - Nagano; Hitoshi ; et al.	2014-07-24
System And Method For Generating Extreme Ultraviolet Light App 20140183379 - HORI; Tsukasa ; et al.	2014-07-03
Antenna, Antenna Apparatus, And Communication Apparatus App 20140152521 - Yamaguchi; Shuichiro ; et al.	2014-06-05
Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target Grant 8,742,380 - Hori , et al. June 3, 2	2014-06-03
System And Method For Generating Extreme Ultraviolet Light, And Laser Apparatus App 20140124685 - YANAGIDA; Tatsuya ; et al.	2014-05-08
Extreme ultraviolet light source device and method for generating extreme ultraviolet light Grant 8,710,475 - Komori , et al. April 29, 2	2014-04-29
Extreme Ultraviolet Light Generation System App 20140084183 - Wakabayashi; Osamu ; et al.	2014-03-27
System And Method For Generating Extreme Ultraviolet Light App 20140077099 - Hori; Tsukasa ; et al.	2014-03-20
System and method for generating extreme ultraviolet light, and laser apparatus Grant 8,669,543 - Yanagida , et al. March 11, 2	2014-03-11
Antenna, antenna apparatus, and communication apparatus Grant 8,669,909 - Yamaguchi , et al. March 11, 2	2014-03-11
Extreme Ultraviolet Light Source Device And Method For Generating Extreme Ultraviolet Light App 20130284949 - KOMORI; Hiroshi ; et al.	2013-10-31
Extreme ultraviolet light source apparatus Grant 8,558,202 - Yanagida , et al. October 15, 2	2013-10-15
Extreme Ultraviolet Light Source Apparatus App 20130256567 - KAKIZAKI; Kouji ; et al.	2013-10-03
Extreme ultraviolet light source apparatus Grant 8,530,870 - Kakizaki , et al. September 10, 2	2013-09-10
Target Supply Device, Extreme Ultraviolet Light Generation Apparatus, And Method For Supplying Target App 20130221246 - HORI; Tsukasa ; et al.	2013-08-29
Extreme ultraviolet light source apparatus Grant 8,513,630 - Ueno , et al. August 20, 2	2013-08-20
Target Supply Device App 20130186567 - YANAGIDA; Tatsuya ; et al.	2013-07-25
Extreme ultraviolet light source device and method for producing extreme ultraviolet light Grant 8,471,226 - Komori , et al. June 25, 2	2013-06-25
Antenna, Antenna Apparatus, And Communication Apparatus App 20130135165 - YAMAGUCHI; Shuichiro ; et al.	2013-05-30
Extreme ultraviolet light source apparatus Grant 8,436,328 - Yanagida , et al. May 7, 2	2013-05-07
Apparatus And Method For Generating Extreme Ultraviolet Light App 20130105712 - Yanagida; Tatsuya ; et al.	2013-05-02
System And Method For Generating Extreme Ultraviolet Light App 20120307851 - HORI; Tsukasa ; et al.	2012-12-06
Extreme Ultraviolet Light Generation System App 20120305811 - WAKABAYASHI; Osamu ; et al.	2012-12-06
Extreme Ultraviolet Light Generation System App 20120248344 - WAKABAYASHI; Osamu ; et al.	2012-10-04
System And Method For Generating Extreme Ultraviolet Light App 20120243566 - Hori; Tsukasa ; et al.	2012-09-27
System And Method For Generating Extreme Ultraviolet Light, And Laser Apparatus App 20120146507 - Yanagida; Tatsuya ; et al.	2012-06-14
Extreme Ultraviolet Light Source Apparatus App 20120119116 - KAKIZAKI; Kouji ; et al.	2012-05-17
Extreme Ultraviolet Light Source Apparatus App 20120097869 - Ueno; Yoshifumi ; et al.	2012-04-26
Extreme Ultraviolet Light Source Apparatus App 20120091893 - YANAGIDA; Tatsuya ; et al.	2012-04-19
Extreme ultraviolet light source apparatus Grant 8,067,756 - Ueno , et al. November 29, 2	2011-11-29
Extreme Ultraviolet Light Source Device And Method For Producing Extreme Ultraviolet Light App 20110101863 - Komori; Hiroshi ; et al.	2011-05-05
Extreme Ultraviolet Light Source Apparatus App 20100213395 - UENO; Yoshifumi ; et al.	2010-08-26
Extreme Ultraviolet Light Source Apparatus App 20100181503 - Yanagida; Tatsuya ; et al.	2010-07-22
Extreme Ultraviolet Light Source Device App 20100025223 - Yanagida; Tatsuya ; et al.	2010-02-04
Removable Medium Recording/reproducing Device Recording/reproducing Operation Inhibiting Method, Recording Operation Inhibiting Method, Firmware Update Method, And File Containing The Firmware App 20090028012 - Yanagida; Tatsuya ; et al.	2009-01-29