Wakabayashi; Osamu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Wakabayashi; Osamu.The latest application filed is for "laser processing method and laser processing system".
Company Profile
23.200.200
- Wakabayashi; Osamu - Oyama JP
- WAKABAYASHI; Osamu - Oyama-shi JP
- Wakabayashi; Osamu - Hiratsuka JP
- WAKABAYASHI; Osamu - Hiratsuka City JP
- Wakabayashi; Osamu - Tochigi JP
- WAKABAYASHI; Osamu - Hiratsuka-shi JP
- Wakabayashi; Osamu - Tokyo JP
- Wakabayashi; Osamu - Tochigi-ken JP
- Wakabayashi; Osamu - Kanagawa JP
Patent Activity
| Patent | Date |
|---|---|
| Laser gas regenerating apparatus and electronic device manufacturing method Grant 11,451,003 - Tsushima , et al. September 20, 2 | 2022-09-20 |
| Data analyzer, semiconductor manufacturing system, data analysis method, and semiconductor manufacturing method Grant 11,353,857 - Igarashi , et al. June 7, 2 | 2022-06-07 |
| Maintenance management method for lithography system, maintenance management apparatus, and computer readable medium Grant 11,353,801 - Abe , et al. June 7, 2 | 2022-06-07 |
| Wavelength converter Grant 11,271,360 - Fuchimukai , et al. March 8, 2 | 2022-03-08 |
| Laser apparatus and method for manufacturing optical element Grant 11,264,773 - Tei , et al. March 1, 2 | 2022-03-01 |
| Laser Processing Method And Laser Processing System App 20220050382 - KAKIZAKI; Koji ; et al. | 2022-02-17 |
| Laser system Grant 11,217,962 - Arakawa , et al. January 4, 2 | 2022-01-04 |
| Laser processing method and laser processing system Grant 11,194,255 - Kakizaki , et al. December 7, 2 | 2021-12-07 |
| Method For Manufacturing Semiconductor Crystalline Thin Film And Laser Annealing System App 20210366710 - IMOKAWA; Kaname ; et al. | 2021-11-25 |
| Gas Laser Apparatus, And Electronic Device Manufacturing Method App 20210367390 - TEI; Daisuke ; et al. | 2021-11-25 |
| Gas laser apparatus and magnetic bearing control method Grant 11,162,530 - Miki , et al. November 2, 2 | 2021-11-02 |
| Machine Learning Method, Consumable Management Apparatus, And Computer Readable Medium App 20210333788 - ABE; Kunihiko ; et al. | 2021-10-28 |
| Laser Processing Apparatus And Method For Processing Workpiece App 20210252634 - SHIMBORI; Masashi ; et al. | 2021-08-19 |
| Gas laser apparatus Grant 11,081,850 - Suzuki , et al. August 3, 2 | 2021-08-03 |
| Laser System And Method For Manufacturing Electronic Device App 20210226414 - MIURA; Taisuke ; et al. | 2021-07-22 |
| Laser System And Electronic Device Manufacturing Method App 20210226411 - MIURA; Taisuke ; et al. | 2021-07-22 |
| Laser System And Electronic Device Manufacturing Method App 20210194215 - MIURA; Taisuke ; et al. | 2021-06-24 |
| Gas Laser Device App 20210167568 - UMEDA; Hiroshi ; et al. | 2021-06-03 |
| Maintenance Management Method For Lithography System, Maintenance Management Apparatus, And Computer Readable Medium App 20210117931 - ABE; Kunihiko ; et al. | 2021-04-22 |
| Gas laser apparatus Grant 10,971,883 - Suzuki , et al. April 6, 2 | 2021-04-06 |
| Laser device Grant 10,965,087 - Miyamoto , et al. March 30, 2 | 2021-03-30 |
| Extreme ultraviolet light generation system Grant 10,932,350 - Yanagida , et al. February 23, 2 | 2021-02-23 |
| Laser Processing Apparatus, Laser Processing System, And Laser Processing Method App 20210046584 - SUWA; Akira ; et al. | 2021-02-18 |
| Laser gas purifying system and laser system Grant 10,892,592 - Suzuki , et al. January 12, 2 | 2021-01-12 |
| Laser gas regeneration system and laser system Grant 10,879,664 - Yashiro , et al. December 29, 2 | 2020-12-29 |
| Laser Gas Regenerating Apparatus And Electronic Device Manufacturing Method App 20200403371 - TSUSHIMA; Hiroaki ; et al. | 2020-12-24 |
| EUV light generator Grant 10,863,613 - Okazaki , et al. December 8, 2 | 2020-12-08 |
| Laser Gas Management System, Method For Manufacturing Electronic Device, And Method For Controlling Excimer Laser System App 20200366049 - TSUSHIMA; Hiroaki ; et al. | 2020-11-19 |
| Extreme ultraviolet light generation system Grant 10,842,010 - Yabu , et al. November 17, 2 | 2020-11-17 |
| Laser apparatus Grant 10,797,465 - Miyamoto , et al. October 6, 2 | 2020-10-06 |
| Laser Processing Method And Laser Processing System App 20200290156 - SUWA; Akira ; et al. | 2020-09-17 |
| Extreme ultraviolet light generation apparatus Grant 10,764,986 - Nagai , et al. Sep | 2020-09-01 |
| Laser Irradiation Method And Laser Irradiation System App 20200266105 - IKENOUE; Hiroshi ; et al. | 2020-08-20 |
| Beam transmission system, exposure device, and illumination optical system of the exposure device Grant 10,739,686 - Suzuki , et al. A | 2020-08-11 |
| Laser Radiation System And Method For Manufacturing Electronic Device App 20200249452 - Kind Code | 2020-08-06 |
| Laser Radiation System App 20200251359 - Kind Code | 2020-08-06 |
| Gas Laser Apparatus App 20200244029 - SUZUKI; Natsushi ; et al. | 2020-07-30 |
| Laser processing system and laser processing method Grant 10,710,194 - Kakizaki , et al. | 2020-07-14 |
| Laser Processing Method And Laser Processing System App 20200209760 - KAKIZAKI; Koji ; et al. | 2020-07-02 |
| Mirror For Extreme Ultraviolet Light And Extreme Ultraviolet Light Generating Apparatus App 20200209759 - WAKABAYASHI; Osamu ; et al. | 2020-07-02 |
| Mirror For Extreme Ultraviolet Light And Extreme Ultraviolet Light Generating Apparatus App 20200209755 - HONDA; Yoshiyuki ; et al. | 2020-07-02 |
| Mirror For Extreme Ultraviolet Light And Extreme Ultraviolet Light Generating Apparatus App 20200209444 - WAKABAYASHI; Osamu ; et al. | 2020-07-02 |
| Excimer laser apparatus Grant 10,673,200 - Fujimaki , et al. | 2020-06-02 |
| Gas laser apparatus Grant 10,666,008 - Suzuki , et al. | 2020-05-26 |
| Extreme Ultraviolet Light Generation System App 20200150543 - YANAGIDA; Tatsuya ; et al. | 2020-05-14 |
| Laser annealing device Grant 10,651,049 - Ikenoue , et al. | 2020-05-12 |
| Wavelength Converter App 20200136339 - FUCHIMUKAI; Atsushi ; et al. | 2020-04-30 |
| Data Analyzer, Semiconductor Manufacturing System, Data Analysis Method, And Semiconductor Manufacturing Method App 20200133249 - IGARASHI; Yutaka ; et al. | 2020-04-30 |
| Laser doping apparatus and laser doping method Grant 10,629,438 - Ohkubo , et al. | 2020-04-21 |
| Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator Grant 10,629,414 - Iwamoto , et al. | 2020-04-21 |
| System and method for generating extreme ultraviolet light, and laser apparatus Grant 10,630,042 - Yanagida , et al. | 2020-04-21 |
| Laser System App 20200112137 - ARAKAWA; Masaki ; et al. | 2020-04-09 |
| Line narrowed laser apparatus Grant 10,615,565 - Furusato , et al. | 2020-04-07 |
| Solid-state laser device, solid-state laser system, and laser device for exposure device Grant 10,587,089 - Onose , et al. | 2020-03-10 |
| Laser Apparatus, Laser Apparatus Management System, And Laser Apparatus Management Method App 20200067259 - MASUDA; Hiroyuki ; et al. | 2020-02-27 |
| Laser Apparatus For Generating Extreme Ultraviolet Light App 20200068695 - NAGANO; Hitoshi ; et al. | 2020-02-27 |
| Laser Apparatus And Method For Manufacturing Optical Element App 20200067257 - TEI; Daisuke ; et al. | 2020-02-27 |
| Extreme ultraviolet light generation system Grant 10,555,408 - Yanagida , et al. Fe | 2020-02-04 |
| Gas Laser Apparatus And Magnetic Bearing Control Method App 20200025247 - MIKI; Masaharu ; et al. | 2020-01-23 |
| Euv Light Generator App 20190394868 - OKAZAKI; Shinji ; et al. | 2019-12-26 |
| System and method for generating extreme ultraviolet light employing laser pulse including pedestal Grant 10,512,148 - Nagano , et al. Dec | 2019-12-17 |
| Laser system or laser exposure system Grant 10,495,890 - Wakabayashi , et al. De | 2019-12-03 |
| Laser doping device and semiconductor device manufacturing method Grant 10,475,650 - Ikenoue , et al. Nov | 2019-11-12 |
| Grating, method for manufacturing grating, and method for recycling grating Grant 10,466,414 - Miyamoto , et al. No | 2019-11-05 |
| Laser unit Grant 10,447,001 - Taniyama , et al. Oc | 2019-10-15 |
| Extreme Ultraviolet Light Generation System App 20190313519 - YABU; Takayuki ; et al. | 2019-10-10 |
| Solid-state Laser Device, Solid-state Laser System, And Laser Device For Exposure Device App 20190305508 - ONOSE; Takashi ; et al. | 2019-10-03 |
| Laser Processing System And Laser Processing Method App 20190283179 - KAKIZAKI; Kouji ; et al. | 2019-09-19 |
| Laser Processing System And Laser Processing Method App 20190283177 - KAKIZAKI; Kouji ; et al. | 2019-09-19 |
| Laser Doping Apparatus And Laser Doping Method App 20190252190 - OHKUBO; Tomoyuki ; et al. | 2019-08-15 |
| Laser Apparatus And Laser Processing System App 20190245321 - KAKIZAKI; Kouji ; et al. | 2019-08-08 |
| Device for controlling temperature of cooling water Grant 10,371,469 - Kawasuji , et al. | 2019-08-06 |
| Solid-state laser device, solid-state laser system, and laser device for exposure device Grant 10,374,382 - Onose , et al. | 2019-08-06 |
| Laser Gas Regeneration System And Laser System App 20190237928 - YASHIRO; Masanori ; et al. | 2019-08-01 |
| Target Supply Device, Target Material Refining Method, Recording Medium Having Target Material Refining Program Recorded Therein App 20190237303 - IWAMOTO; Fumio ; et al. | 2019-08-01 |
| Laser Apparatus App 20190181607 - MIYAMOTO; Hirotaka ; et al. | 2019-06-13 |
| Laser Device App 20190173258 - MIYAMOTO; Hirotaka ; et al. | 2019-06-06 |
| Extreme ultraviolet light generation apparatus Grant 10,314,152 - Nagai , et al. | 2019-06-04 |
| System and method for generating extreme ultraviolet light Grant 10,306,743 - Hori , et al. | 2019-05-28 |
| Laser Device And Laser Anneal Device App 20190157120 - TANAKA; Satoshi ; et al. | 2019-05-23 |
| Gas Laser Device App 20190148905 - UMEDA; Hiroshi ; et al. | 2019-05-16 |
| Laser system Grant 10,290,992 - Umeda , et al. | 2019-05-14 |
| System And Method For Generating Extreme Ultraviolet Light App 20190141826 - HORI; Tsukasa ; et al. | 2019-05-09 |
| Line narrowed laser apparatus Grant 10,283,927 - Furusato , et al. | 2019-05-07 |
| Projector and image light projection method Grant 10,268,109 - Wakabayashi | 2019-04-23 |
| Solid-state laser system Grant 10,256,594 - Onose , et al. | 2019-04-09 |
| Laser System App 20190103724 - ONOSE; Takashi ; et al. | 2019-04-04 |
| System and method for generating extreme ultraviolet light Grant 10,251,255 - Hori , et al. | 2019-04-02 |
| Gas Laser Apparatus App 20190081450 - SUZUKI; Natsushi ; et al. | 2019-03-14 |
| Laser Unit And Non-transitory Computer-readable Storage Medium App 20190081451 - KUROSU; Akihiko ; et al. | 2019-03-14 |
| Gas Laser Apparatus App 20190081449 - SUZUKI; Natsushi ; et al. | 2019-03-14 |
| Gas Laser Apparatus App 20190074654 - SUZUKI; Natsushi ; et al. | 2019-03-07 |
| Gas Laser Apparatus App 20190074655 - SUZUKI; Natsushi ; et al. | 2019-03-07 |
| Narrow band excimer laser apparatus Grant 10,205,297 - Miyamoto , et al. Feb | 2019-02-12 |
| System And Method For Generating Extreme Ultraviolet Light App 20190037677 - HORI; Tsukasa ; et al. | 2019-01-31 |
| Gas Laser Apparatus App 20190020167 - SUZUKI; Natsushi ; et al. | 2019-01-17 |
| Excimer laser apparatus and excimer laser system Grant 10,177,520 - Asayama , et al. J | 2019-01-08 |
| Solid-state Laser Device, Solid-state Laser System, And Laser Device For Exposure Device App 20190006817 - ONOSE; Takashi ; et al. | 2019-01-03 |
| Extreme ultraviolet light generation apparatus Grant 10,172,225 - Suzuki , et al. J | 2019-01-01 |
| Laser unit and non-transitory computer-readable storage medium Grant 10,164,396 - Kurosu , et al. Dec | 2018-12-25 |
| Light beam measurement device, laser apparatus, and light beam separator Grant 10,151,640 - Moriya , et al. Dec | 2018-12-11 |
| Laser Annealing Device App 20180350622 - IKENOUE; Hiroshi ; et al. | 2018-12-06 |
| System And Method For Generating Extreme Ultraviolet Light, And Laser Apparatus App 20180351320 - YANAGIDA; Tatsuya ; et al. | 2018-12-06 |
| Laser Doping Device And Semiconductor Device Manufacturing Method App 20180342397 - IKENOUE; Hiroshi ; et al. | 2018-11-29 |
| Line Narrowed Laser Apparatus App 20180323568 - FURUSATO; Hiroshi ; et al. | 2018-11-08 |
| Beam Transmission System, Exposure Device, And Illumination Optical System Of The Exposure Device App 20180314156 - SUZUKI; Akiyoshi ; et al. | 2018-11-01 |
| System and method for generating extreme ultraviolet light Grant 10,117,317 - Hori , et al. October 30, 2 | 2018-10-30 |
| Excimer laser device Grant 10,103,509 - Kakizaki , et al. October 16, 2 | 2018-10-16 |
| Laser irradiation apparatus Grant 10,092,979 - Suzuki , et al. October 9, 2 | 2018-10-09 |
| Excimer Laser Apparatus App 20180261973 - FUJIMAKI; Yousuke ; et al. | 2018-09-13 |
| System and method for generating extreme ultraviolet light, and laser apparatus Grant 10,074,956 - Yanagida , et al. September 11, 2 | 2018-09-11 |
| Laser system Grant 10,074,958 - Wakabayashi , et al. September 11, 2 | 2018-09-11 |
| Laser Irradiation Apparatus App 20180236602 - Suzuki; Akiyoshi ; et al. | 2018-08-23 |
| Extreme Ultraviolet Light Generation System App 20180242441 - YANAGIDA; Tatsuya ; et al. | 2018-08-23 |
| Laser Gas Purifying System And Laser System App 20180241170 - SUZUKI; Natsushi ; et al. | 2018-08-23 |
| Laser system Grant 10,050,408 - Suzuki , et al. August 14, 2 | 2018-08-14 |
| Gas laser apparatus Grant 10,038,295 - Suzuki , et al. July 31, 2 | 2018-07-31 |
| Alignment system and extreme ultraviolet light generation system Grant 10,027,084 - Moriya , et al. July 17, 2 | 2018-07-17 |
| Narrow Band Excimer Laser Apparatus App 20180198253 - MIYAMOTO; Hirotaka ; et al. | 2018-07-12 |
| Laser System App 20180191124 - UMEDA; Hiroshi ; et al. | 2018-07-05 |
| Laser Gas Purifying System App 20180191122 - SUZUKI; Natsushi ; et al. | 2018-07-05 |
| Laser system Grant 9,991,665 - Umeda , et al. June 5, 2 | 2018-06-05 |
| Extreme ultraviolet light generation apparatus Grant 9,986,629 - Suzuki , et al. May 29, 2 | 2018-05-29 |
| Extreme Ultraviolet Light Generation Apparatus App 20180146536 - SUZUKI; Toru ; et al. | 2018-05-24 |
| Extreme ultraviolet light generation system Grant 9,980,360 - Yanagida , et al. May 22, 2 | 2018-05-22 |
| Projector And Image Light Projection Method App 20180129127 - WAKABAYASHI; Osamu | 2018-05-10 |
| Laser system Grant 9,966,721 - Kakizaki , et al. May 8, 2 | 2018-05-08 |
| Device For Controlling Temperature Of Cooling Water App 20180120041 - KAWASUJI; Yasufumi ; et al. | 2018-05-03 |
| Laser Unit App 20180123308 - TANIYAMA; Minoru ; et al. | 2018-05-03 |
| Line Narrowed Laser Apparatus App 20180123312 - FURUSATO; Hiroshi ; et al. | 2018-05-03 |
| Laser unit and extreme ultraviolet light generating system Grant 9,954,339 - Suganuma , et al. April 24, 2 | 2018-04-24 |
| Excimer laser apparatus and excimer laser system Grant 9,954,340 - Abe , et al. April 24, 2 | 2018-04-24 |
| System And Method For Generating Extreme Ultraviolet Light App 20180110116 - HORI; Tsukasa ; et al. | 2018-04-19 |
| Extreme UV light generation apparatus and method Grant 9,949,354 - Saito , et al. April 17, 2 | 2018-04-17 |
| Excimer Laser Device App 20180102622 - KAKIZAKI; Kouji ; et al. | 2018-04-12 |
| Solid-state laser system and laser apparatus used for exposure apparatus Grant 9,929,529 - Onose , et al. March 27, 2 | 2018-03-27 |
| Light Beam Measurement Device, Laser Apparatus, And Light Beam Separator App 20180052059 - MORIYA; Masato ; et al. | 2018-02-22 |
| Excimer Laser Apparatus And Excimer Laser System App 20180048109 - ASAYAMA; Takeshi ; et al. | 2018-02-15 |
| Device for controlling temperature of cooling water Grant 9,891,012 - Kawasuji , et al. February 13, 2 | 2018-02-13 |
| Mirror device Grant 9,882,334 - Suzuki , et al. January 30, 2 | 2018-01-30 |
| Target producing apparatus Grant 9,883,574 - Iwamoto , et al. January 30, 2 | 2018-01-30 |
| Laser Unit And Non-transitory Computer-readable Storage Medium App 20180026414 - KUROSU; Akihiko ; et al. | 2018-01-25 |
| System and method for generating extreme ultraviolet light Grant 9,877,378 - Hori , et al. January 23, 2 | 2018-01-23 |
| Laser System And Laser Annealing Apparatus App 20180019141 - OHKUBO; Tomoyuki ; et al. | 2018-01-18 |
| Laser System App 20180013258 - UMEDA; Hiroshi ; et al. | 2018-01-11 |
| Gas laser device and control method therefor Grant 9,853,410 - Asayama , et al. December 26, 2 | 2017-12-26 |
| Laser Doping Apparatus And Laser Doping Method App 20170365475 - OHKUBO; Tomoyuki ; et al. | 2017-12-21 |
| Laser apparatus Grant 9,847,618 - Nogiwa , et al. December 19, 2 | 2017-12-19 |
| Light source apparatus and data processing method Grant 9,841,684 - Tanaka , et al. December 12, 2 | 2017-12-12 |
| Light beam measurement device, laser apparatus, and light beam separator Grant 9,835,495 - Moriya , et al. December 5, 2 | 2017-12-05 |
| Excimer laser apparatus and excimer laser system Grant 9,837,780 - Asayama , et al. December 5, 2 | 2017-12-05 |
| Spheroidal Mirror Reflectivity Measuring Apparatus For Extreme Ultraviolet Light App 20170336282 - KOBAYASHI; Yohei ; et al. | 2017-11-23 |
| Solid-state Laser Apparatus, Fiber Amplifier System, And Solid-state Laser System App 20170338617 - ZHAO; Zhigang ; et al. | 2017-11-23 |
| Laser Device App 20170338620 - ARAKAWA; Masaki ; et al. | 2017-11-23 |
| Solid-state Laser System And Laser Apparatus Used For Exposure Apparatus App 20170338619 - ONOSE; Takashi ; et al. | 2017-11-23 |
| Laser unit and non-transitory computer-readable storage medium Grant 9,825,417 - Kurosu , et al. November 21, 2 | 2017-11-21 |
| Lasersystem Grant 9,812,841 - Onose , et al. November 7, 2 | 2017-11-07 |
| Laser system Grant 9,806,490 - Umeda , et al. October 31, 2 | 2017-10-31 |
| Laser System App 20170302050 - KAKIZAKI; Kouji ; et al. | 2017-10-19 |
| Exposure apparatus Grant 9,791,780 - Onose , et al. October 17, 2 | 2017-10-17 |
| Gas Laser Apparatus App 20170288361 - SUZUKI; Natsushi ; et al. | 2017-10-05 |
| Solid-state Laser System App 20170279241 - ONOSE; Takashi ; et al. | 2017-09-28 |
| Extreme Ultraviolet Light Generating System, Extreme Ultraviolet Light Generating Method, And Thomson Scattering Measurement System App 20170280545 - TOMITA; Kentaro ; et al. | 2017-09-28 |
| Grating, Method For Manufacturing Grating, And Method For Recycling Grating App 20170248758 - MIYAMOTO; Hirotaka ; et al. | 2017-08-31 |
| Laser Irradiation Device App 20170248782 - KAKIZAKI; Kouji ; et al. | 2017-08-31 |
| Gas laser apparatus Grant 9,722,384 - Suzuki , et al. August 1, 2 | 2017-08-01 |
| Laser apparatus Grant 9,711,934 - Wakabayashi , et al. July 18, 2 | 2017-07-18 |
| Laser Apparatus For Generating Extreme Ultraviolet Light App 20170196072 - NAGANO; Hitoshi ; et al. | 2017-07-06 |
| Laser apparatus and extreme ultraviolet light generation system Grant 9,667,019 - Moriya , et al. May 30, 2 | 2017-05-30 |
| Light Source System, Beam Transmission System, And Exposure Apparatus App 20170149198 - WAKABAYASHI; Osamu ; et al. | 2017-05-25 |
| Laser Device App 20170149199 - TEI; Daisuke ; et al. | 2017-05-25 |
| Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target Grant 9,661,730 - Ueda , et al. May 23, 2 | 2017-05-23 |
| Laser unit and extreme ultraviolet light generating system Grant 9,647,406 - Suganuma , et al. May 9, 2 | 2017-05-09 |
| Laser apparatus and method of controlling laser apparatus Grant 9,647,415 - Tsushima , et al. May 9, 2 | 2017-05-09 |
| Method of controlling wavelength of laser beam and laser apparatus Grant 9,647,411 - Matsunaga , et al. May 9, 2 | 2017-05-09 |
| Laser Irradiation Apparatus And Laser Irradiation Method App 20170103895 - WATANABE; Yousuke ; et al. | 2017-04-13 |
| Extreme ultraviolet light generation apparatus Grant 9,622,332 - Suzuki , et al. April 11, 2 | 2017-04-11 |
| Light Source Device And Projector App 20170097560 - MATSUBARA; Masateru ; et al. | 2017-04-06 |
| Laser System App 20170093119 - SUZUKI; Akiyoshi ; et al. | 2017-03-30 |
| Light Source Device And Projector App 20170082912 - WAKABAYASHI; Osamu ; et al. | 2017-03-23 |
| Laser apparatus Grant 9,601,893 - Kakizaki , et al. March 21, 2 | 2017-03-21 |
| Laser System App 20170070023 - UMEDA; Hiroshi ; et al. | 2017-03-09 |
| Laser System App 20170063024 - KAKIZAKI; Kouji ; et al. | 2017-03-02 |
| System And Method For Generating Extreme Ultraviolet Light, And Laser Apparatus App 20170063020 - YANAGIDA; Tatsuya ; et al. | 2017-03-02 |
| Laser System App 20170063025 - WAKABAYASHI; Osamu ; et al. | 2017-03-02 |
| Extreme Ultraviolet Light Generation Apparatus App 20170064800 - NAGAI; Shinji ; et al. | 2017-03-02 |
| Target Supply Device, Target Material Refining Method, Recording Medium Having Target Material Refining Program Recorded Therein, And Target Generator App 20170053780 - IWAMOTO; Fumio ; et al. | 2017-02-23 |
| Extreme Ultraviolet Light Generation Apparatus App 20170055336 - NAGAI; Shinji ; et al. | 2017-02-23 |
| Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system Grant 9,578,730 - Abe , et al. February 21, 2 | 2017-02-21 |
| System for generating extreme ultra violet light Grant 9,574,935 - Moriya , et al. February 21, 2 | 2017-02-21 |
| Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light Grant 9,570,884 - Nowak , et al. February 14, 2 | 2017-02-14 |
| Extreme Ultraviolet Light Generation System App 20170027047 - YANAGIDA; Tatsuya ; et al. | 2017-01-26 |
| System And Method For Generating Extreme Ultraviolet Light App 20170019983 - HORI; Tsukasa ; et al. | 2017-01-19 |
| Chamber for extreme ultraviolet light generation apparatus, and extreme ultraviolet light generation apparatus Grant 9,538,629 - Saito , et al. January 3, 2 | 2017-01-03 |
| Extreme Ultraviolet Light Generation Apparatus App 20160370706 - IMACHI; Naoyoshi ; et al. | 2016-12-22 |
| Gas Laser Device And Control Method Therefor App 20160359291 - ASAYAMA; Takeshi ; et al. | 2016-12-08 |
| Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam Grant 9,510,434 - Mizoguchi , et al. November 29, 2 | 2016-11-29 |
| Two-beam interference apparatus and two-beam interference exposure system Grant 9,507,248 - Okazaki , et al. November 29, 2 | 2016-11-29 |
| System and method for generating extreme ultraviolet light, and laser apparatus Grant 9,509,115 - Yanagida , et al. November 29, 2 | 2016-11-29 |
| Extreme ultraviolet light generation apparatus Grant 9,510,433 - Nagai , et al. November 29, 2 | 2016-11-29 |
| System For Generating Extreme Ultra Violet Light App 20160341601 - MORIYA; Masato ; et al. | 2016-11-24 |
| Lasersystem App 20160344158 - ONOSE; Takashi ; et al. | 2016-11-24 |
| Laser Apparatus App 20160336713 - NOGIWA; Seiji ; et al. | 2016-11-17 |
| Extreme ultraviolet light generation system Grant 9,497,841 - Yanagida , et al. November 15, 2 | 2016-11-15 |
| System and method for generating extreme ultraviolet light Grant 9,497,842 - Hori , et al. November 15, 2 | 2016-11-15 |
| Laser apparatus and method of controlling laser apparatus Grant 9,490,603 - Tsushima , et al. November 8, 2 | 2016-11-08 |
| Excimer Laser Apparatus And Excimer Laser System App 20160322772 - ABE; Tooru ; et al. | 2016-11-03 |
| Laser System Or Laser Exposure System App 20160313564 - WAKABAYASHI; Osamu ; et al. | 2016-10-27 |
| Mirror Device App 20160315439 - SUZUKI; Toru ; et al. | 2016-10-27 |
| Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system Grant 9,468,082 - Hayashi , et al. October 11, 2 | 2016-10-11 |
| Laser Unit And Extreme Ultraviolet Light Generating System App 20160285222 - SUGANUMA; Takashi ; et al. | 2016-09-29 |
| Target Producing Apparatus App 20160270199 - IWAMOTO; Fumio ; et al. | 2016-09-15 |
| System and method for generating extreme ultraviolet light Grant 9,439,275 - Moriya , et al. September 6, 2 | 2016-09-06 |
| Extreme ultraviolet light generating system Grant 9,439,276 - Yabu , et al. September 6, 2 | 2016-09-06 |
| Extreme Ultraviolet Light Generation Apparatus App 20160255707 - UEDA; Atsushi ; et al. | 2016-09-01 |
| Excimer Laser Apparatus And Excimer Laser System App 20160254634 - ASAYAMA; Takeshi ; et al. | 2016-09-01 |
| Extreme ultraviolet light source apparatus Grant 9,429,847 - Nishisaka , et al. August 30, 2 | 2016-08-30 |
| Laser Unit And Non-transitory Computer-readable Storage Medium App 20160248214 - KUROSU; Akihiko ; et al. | 2016-08-25 |
| Gas Laser Apparatus App 20160248215 - SUZUKI; Natsushi ; et al. | 2016-08-25 |
| Laser Apparatus App 20160248219 - WAKABAYASHI; Osamu ; et al. | 2016-08-25 |
| Excimer laser apparatus and excimer laser system Grant 9,425,576 - Abe , et al. August 23, 2 | 2016-08-23 |
| Extreme Ultraviolet Light Generation Apparatus App 20160234920 - SUZUKI; Toru ; et al. | 2016-08-11 |
| Amplifier, laser apparatus, and extreme ultraviolet light generation system Grant 9,407,052 - Wakabayashi , et al. August 2, 2 | 2016-08-02 |
| Extreme ultraviolet light generation system Grant 9,402,297 - Wakabayashi , et al. July 26, 2 | 2016-07-26 |
| Alignment System And Extreme Ultraviolet Light Generation System App 20160204567 - MORIYA; Masato ; et al. | 2016-07-14 |
| Laser beam controlling device and extreme ultraviolet light generating apparatus Grant 9,386,675 - Suzuki , et al. July 5, 2 | 2016-07-05 |
| Laser Apparatus App 20160190763 - KAKIZAKI; Kouji ; et al. | 2016-06-30 |
| Extreme Ultraviolet Light Source Apparatus App 20160187787 - NISHISAKA; Toshihiro ; et al. | 2016-06-30 |
| Exposure Apparatus App 20160187788 - ONOSE; Takashi ; et al. | 2016-06-30 |
| Laser Unit And Extreme Ultraviolet Light Generating System App 20160172814 - SUGANUMA; Takashi ; et al. | 2016-06-16 |
| Optical device, laser apparatus, and extreme ultraviolet light generation system Grant 9,362,703 - Mizoguchi , et al. June 7, 2 | 2016-06-07 |
| Device for controlling laser beam and apparatus for generating extreme ultraviolet light utilizing wavefront adjusters Grant 9,363,878 - Moriya , et al. June 7, 2 | 2016-06-07 |
| Method of controlling laser apparatus and laser apparatus Grant 9,350,133 - Wakabayashi , et al. May 24, 2 | 2016-05-24 |
| Target generation device and extreme ultraviolet light generation apparatus Grant 9,351,388 - Nakano , et al. May 24, 2 | 2016-05-24 |
| Extreme Ultraviolet Light Generation Apparatus And Extreme Ultraviolet Light Generation System App 20160135276 - ABE; Tamotsu ; et al. | 2016-05-12 |
| System And Method For Generating Extreme Ultraviolet Light App 20160128172 - HORI; Tsukasa ; et al. | 2016-05-05 |
| Laser apparatus Grant 9,331,450 - Asayama , et al. May 3, 2 | 2016-05-03 |
| Extreme ultraviolet light source apparatus Grant 9,332,625 - Nishisaka , et al. May 3, 2 | 2016-05-03 |
| Alignment system and extreme ultraviolet light generation system Grant 9,325,150 - Moriya , et al. April 26, 2 | 2016-04-26 |
| Laser beam output control with optical shutter Grant 9,318,864 - Nowak , et al. April 19, 2 | 2016-04-19 |
| Light Beam Measurement Device, Laser Apparatus, And Light Beam Separator App 20160076944 - MORIYA; Masato ; et al. | 2016-03-17 |
| Extreme Ultraviolet Light Generation System App 20160073487 - YANAGIDA; Tatsuya ; et al. | 2016-03-10 |
| Extreme Ultraviolet Light Generating System App 20160066401 - YABU; Takayuki ; et al. | 2016-03-03 |
| Laser apparatus and extreme ultraviolet light generation apparatus Grant 9,271,382 - Moriya , et al. February 23, 2 | 2016-02-23 |
| System and method for generating extreme ultraviolet light Grant 9,265,136 - Hori , et al. February 16, 2 | 2016-02-16 |
| Target Generation Device And Extreme Ultraviolet Light Generation Apparatus App 20160044773 - NAKANO; Masaki ; et al. | 2016-02-11 |
| Laser device for exposure apparatus Grant 9,257,809 - Watanabe , et al. February 9, 2 | 2016-02-09 |
| Extreme Uv Light Generation Apparatus App 20160037616 - SAITO; Takashi ; et al. | 2016-02-04 |
| Laser Annealing Apparatus App 20160035603 - IKENOUE; Hiroshi ; et al. | 2016-02-04 |
| Target supply device Grant 9,233,782 - Ishihara , et al. January 12, 2 | 2016-01-12 |
| Mirror device Grant 9,229,192 - Someya , et al. January 5, 2 | 2016-01-05 |
| Laser Device, And Method Of Controlling Actuator App 20150380893 - MATSUNAGA; Takashi ; et al. | 2015-12-31 |
| Discharge-pumped gas laser device Grant 9,225,139 - Kurosu , et al. December 29, 2 | 2015-12-29 |
| System And Method For Generating Extreme Ultraviolet Light, And Laser Apparatus App 20150351210 - YANAGIDA; Tatsuya ; et al. | 2015-12-03 |
| Extreme Ultraviolet Light Generating Apparatus, Method Of Generating Extreme Ultraviolet Light, Concentrated Pulsed Laser Light Beam Measuring Apparatus, And Method Of Measuring Concentrated Pulsed Laser Light Beam App 20150351211 - MIZOGUCHI; Hakaru ; et al. | 2015-12-03 |
| System And Method For Generating Extreme Ultraviolet Light App 20150351209 - HORI; Tsukasa ; et al. | 2015-12-03 |
| Method Of Controlling Wavelength Of Laser Beam And Laser Apparatus App 20150340837 - MATSUNAGA; Takashi ; et al. | 2015-11-26 |
| Extreme Ultraviolet Light Generation Apparatus And Control Method For Laser Apparatus In Extreme Ultraviolet Light Generation System App 20150342015 - HAYASHI; Hideyuki ; et al. | 2015-11-26 |
| Laser Apparatus And Extreme Ultraviolet Light Generation System App 20150340838 - MORIYA; Masato ; et al. | 2015-11-26 |
| Extreme ultraviolet light generation apparatus Grant 9,198,273 - Igarashi , et al. November 24, 2 | 2015-11-24 |
| Target generation device and extreme ultraviolet light generation apparatus Grant 9,198,272 - Nakano , et al. November 24, 2 | 2015-11-24 |
| Device For Controlling Laser Beam And Apparatus For Generating Extreme Ultraviolet Light App 20150334814 - MORIYA; Masato ; et al. | 2015-11-19 |
| Laser apparatus and extreme ultraviolet light generation system Grant 9,184,551 - Suganuma , et al. November 10, 2 | 2015-11-10 |
| Laser system and laser light generation method Grant 9,184,555 - Yoshino , et al. November 10, 2 | 2015-11-10 |
| Extreme ultraviolet light source apparatus Grant 9,179,534 - Watanabe , et al. November 3, 2 | 2015-11-03 |
| System and method for generating extreme ultraviolet light Grant 9,167,678 - Hori , et al. October 20, 2 | 2015-10-20 |
| Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system Grant 9,153,927 - Nowak , et al. October 6, 2 | 2015-10-06 |
| Extreme Ultraviolet Light Generation System App 20150264793 - WAKABAYASHI; Osamu ; et al. | 2015-09-17 |
| Laser Beam Controlling Device And Extreme Ultraviolet Light Generating Apparatus App 20150264792 - SUZUKI; Toru ; et al. | 2015-09-17 |
| Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus Grant 9,128,391 - Moriya , et al. September 8, 2 | 2015-09-08 |
| System and method for generating extreme ultraviolet light, and laser apparatus Grant 9,130,345 - Yanagida , et al. September 8, 2 | 2015-09-08 |
| Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system Grant 9,131,589 - Hayashi , et al. September 8, 2 | 2015-09-08 |
| Laser Processing Apparatus And Laser Processing Method App 20150246848 - Ikenoue; Hiroshi ; et al. | 2015-09-03 |
| Extreme Ultraviolet Light Source Apparatus App 20150245457 - NISHISAKA; Toshihiro ; et al. | 2015-08-27 |
| System and method for generating extreme ultraviolet light Grant 9,113,540 - Hori , et al. August 18, 2 | 2015-08-18 |
| Mirror Device App 20150226935 - SOMEYA; Hiroshi ; et al. | 2015-08-13 |
| Target supply apparatus and target supply method Grant 9,097,434 - Yabu , et al. August 4, 2 | 2015-08-04 |
| Laser beam amplifier and laser apparatus using the same Grant 9,099,836 - Nowak , et al. August 4, 2 | 2015-08-04 |
| Laser Apparatus App 20150194781 - ASAYAMA; Takeshi ; et al. | 2015-07-09 |
| Method For Generating Extreme Ultraviolet Light And Device For Generating Extreme Ultraviolet Light App 20150189730 - MORIYA; Masato ; et al. | 2015-07-02 |
| Method Of Controlling Laser Apparatus And Laser Apparatus App 20150188274 - Wakabayashi; Osamu ; et al. | 2015-07-02 |
| Laser apparatus Grant 9,071,036 - Kumazaki , et al. June 30, 2 | 2015-06-30 |
| Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target Grant 9,072,153 - Wakabayashi , et al. June 30, 2 | 2015-06-30 |
| Extreme ultraviolet light generation system utilizing a variation value formula for the intensity Grant 9,072,152 - Wakabayashi , et al. June 30, 2 | 2015-06-30 |
| Laser Apparatus And Method Of Controlling Laser Apparatus App 20150180192 - TSUSHIMA; Hiroaki ; et al. | 2015-06-25 |
| Light Source Apparatus And Data Processing Method App 20150168848 - TANAKA; Hiroshi ; et al. | 2015-06-18 |
| Discharge-pumped gas laser device Grant 9,059,554 - Kurosu , et al. June 16, 2 | 2015-06-16 |
| Extreme ultraviolet light generation by polarized laser beam Grant 9,055,657 - Hori , et al. June 9, 2 | 2015-06-09 |
| Extreme ultraviolet light source apparatus Grant 9,052,615 - Nishisaka , et al. June 9, 2 | 2015-06-09 |
| Mirror device Grant 9,046,651 - Someya , et al. June 2, 2 | 2015-06-02 |
| Target material refinement device and target supply apparatus Grant 9,039,957 - Shiraishi , et al. May 26, 2 | 2015-05-26 |
| Laser Apparatus And Method Of Controlling Laser Apparatus App 20150139258 - TSUSHIMA; Hiroaki ; et al. | 2015-05-21 |
| Slab amplification device, laser apparatus, and extreme ultraviolet light generation system Grant 9,036,251 - Nowak , et al. May 19, 2 | 2015-05-19 |
| System And Method For Generating Extreme Ultraviolet Light App 20150123019 - HORI; Tsukasa ; et al. | 2015-05-07 |
| System And Method For Generating Extreme Ultraviolet Light App 20150123018 - MORIYA; Masato ; et al. | 2015-05-07 |
| Extreme Ultraviolet Light Generation System App 20150102239 - YANAGIDA; Tatsuya ; et al. | 2015-04-16 |
| Extreme Ultraviolet Light Generation Device And Extreme Ultraviolet Light Generation System App 20150083939 - UENO; Yoshifumi ; et al. | 2015-03-26 |
| Laser apparatus Grant 8,989,225 - Kakizaki , et al. March 24, 2 | 2015-03-24 |
| Discharge-pumped Gas Laser Device App 20150055672 - KUROSU; Akihiko ; et al. | 2015-02-26 |
| System and method for generating extreme ultraviolet light Grant 8,957,356 - Moriya , et al. February 17, 2 | 2015-02-17 |
| Laser System And Extreme Ultraviolet Light Generation System App 20150043599 - YANAGIDA; Tatsuya ; et al. | 2015-02-12 |
| Laser Apparatus App 20150028231 - MIZOGUCHI; Hakaru ; et al. | 2015-01-29 |
| Extreme Ultraviolet Light Generation Apparatus App 20150008345 - NAGAI; Shinji ; et al. | 2015-01-08 |
| Target supply device Grant 8,927,951 - Umeda , et al. January 6, 2 | 2015-01-06 |
| Excimer Laser Apparatus And Excimer Laser System App 20150003485 - ABE; Tooru ; et al. | 2015-01-01 |
| Target supply device Grant 8,921,815 - Umeda , et al. December 30, 2 | 2014-12-30 |
| Optical Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20140374605 - MIZOGUCHI; Hakaru ; et al. | 2014-12-25 |
| Two-stage Laser System For Aligners App 20140369373 - WAKABAYASHI; Osamu ; et al. | 2014-12-18 |
| Extreme Ultraviolet Light Generation Apparatus And Control Method For Laser Apparatus In Extreme Ultraviolet Light Generation System App 20140353528 - HAYASHI; Hideyuki ; et al. | 2014-12-04 |
| Polarization purity control device and gas laser apparatus provided with the same Grant 8,902,948 - Nagai , et al. December 2, 2 | 2014-12-02 |
| Chamber apparatus and extreme ultraviolet light generation system Grant 8,901,522 - Ueno , et al. December 2, 2 | 2014-12-02 |
| Laser Apparatus App 20140348189 - NOWAK; Krzysztof ; et al. | 2014-11-27 |
| Laser Apparatus, Laser System, And Extreme Ultraviolet Light Generation Apparatus App 20140346375 - NOWAK; Krzysztof ; et al. | 2014-11-27 |
| Faraday Rotator, Optical Isolator, Laser Apparatus, And Extreme Ultraviolet Light Generation Apparatus App 20140346374 - YANAGIDA; Tatsuya ; et al. | 2014-11-27 |
| Laser Apparatus And Extreme Ultraviolet Light Generation System App 20140348188 - SUGANUMA; Takashi ; et al. | 2014-11-27 |
| Laser Apparatus And Extreme Ultraviolet Light Generation Apparatus App 20140346376 - NOWAK; Krzysztof ; et al. | 2014-11-27 |
| Amplifier, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20140341248 - WAKABAYASHI; Osamu ; et al. | 2014-11-20 |
| Laser System And Laser Light Generation Method App 20140341239 - Yoshino; Masaya ; et al. | 2014-11-20 |
| Polarization purity control device and gas laser apparatus provided with the same Grant 8,891,574 - Nagai , et al. November 18, 2 | 2014-11-18 |
| Optical device, laser apparatus, and extreme ultraviolet light generation system Grant 8,891,161 - Mizoguchi , et al. November 18, 2 | 2014-11-18 |
| Extreme Ultraviolet Light Generation Apparatus App 20140332700 - IGARASHI; Miwa ; et al. | 2014-11-13 |
| Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam Grant 8,885,680 - Nakarai , et al. November 11, 2 | 2014-11-11 |
| Laser Apparatus And Extreme Ultraviolet Light Generation Apparatus App 20140319388 - MORIYA; Masato ; et al. | 2014-10-30 |
| Extreme ultraviolet light generation apparatus Grant 8,872,142 - Nagai , et al. October 28, 2 | 2014-10-28 |
| Excimer laser apparatus and excimer laser system Grant 8,867,583 - Abe , et al. October 21, 2 | 2014-10-21 |
| Method For Adjusting Spectrum Width Of Narrow-band Laser App 20140307244 - WAKABAYASHI; Osamu ; et al. | 2014-10-16 |
| Laser system and laser light generation method Grant 8,861,558 - Yoshino , et al. October 14, 2 | 2014-10-14 |
| Laser Apparatus App 20140300950 - NOWAK; Krzysztof ; et al. | 2014-10-09 |
| Laser apparatus Grant 8,855,164 - Kawasuji , et al. October 7, 2 | 2014-10-07 |
| Gas discharge chamber Grant 8,855,167 - Nagai , et al. October 7, 2 | 2014-10-07 |
| System and method for generating extreme ultraviolet light Grant 8,847,181 - Moriya , et al. September 30, 2 | 2014-09-30 |
| Target Generation Device And Extreme Ultraviolet Light Generation Apparatus App 20140284502 - NAKANO; Masaki ; et al. | 2014-09-25 |
| Chamber For Extreme Ultraviolet Light Generation Apparatus, And Extreme Ultraviolet Light Generation Apparatus App 20140253716 - SAITO; Takashi ; et al. | 2014-09-11 |
| Device For Controlling Temperature Of Cooling Water App 20140246187 - KAWASUJI; Yasufumi ; et al. | 2014-09-04 |
| Two-stage laser system for aligners Grant 8,817,839 - Wakabayashi , et al. August 26, 2 | 2014-08-26 |
| Laser apparatus, extreme ultraviolet light generation system including the laser apparatus, and method for controlling the laser apparatus Grant 8,811,436 - Miyao , et al. August 19, 2 | 2014-08-19 |
| Holder device, chamber apparatus, and extreme ultraviolet light generation system Grant 8,809,821 - Fujimoto , et al. August 19, 2 | 2014-08-19 |
| Method for adjusting spectral line width of narrow-band laser Grant 8,804,780 - Wakabayashi , et al. August 12, 2 | 2014-08-12 |
| Laser apparatus and extreme ultraviolet light source apparatus Grant 8,804,778 - Wakabayashi , et al. August 12, 2 | 2014-08-12 |
| System And Method For Generating Extreme Ultra Violet Light App 20140203194 - Nagano; Hitoshi ; et al. | 2014-07-24 |
| Target supply device Grant 8,779,402 - Yabu , et al. July 15, 2 | 2014-07-15 |
| Alignment System And Extreme Ultraviolet Light Generation System App 20140191108 - Moriya; Masato ; et al. | 2014-07-10 |
| System And Method For Generating Extreme Ultraviolet Light App 20140183379 - HORI; Tsukasa ; et al. | 2014-07-03 |
| Chamber apparatus and extreme ultraviolet light generation system Grant 8,759,804 - Nishisaka , et al. June 24, 2 | 2014-06-24 |
| Chamber apparatus Grant 8,748,853 - Nagai , et al. June 10, 2 | 2014-06-10 |
| Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system Grant 8,749,876 - Nowak , et al. June 10, 2 | 2014-06-10 |
| Window unit, window device, laser apparatus, and extreme ultraviolet light generation system Grant 8,742,379 - Kameda , et al. June 3, 2 | 2014-06-03 |
| Target Supply Device App 20140138560 - UMEDA; Hiroshi ; et al. | 2014-05-22 |
| Target Supply Device App 20140138561 - UMEDA; Hiroshi ; et al. | 2014-05-22 |
| Extreme Ultraviolet Light Source Apparatus App 20140131587 - WATANABE; Yukio ; et al. | 2014-05-15 |
| System And Method For Generating Extreme Ultraviolet Light, And Laser Apparatus App 20140124685 - YANAGIDA; Tatsuya ; et al. | 2014-05-08 |
| Droplet generation and detection device, and droplet control device Grant 8,710,473 - Mizoguchi , et al. April 29, 2 | 2014-04-29 |
| Extreme ultraviolet light generation apparatus Grant 8,710,474 - Kodama , et al. April 29, 2 | 2014-04-29 |
| Extreme Ultraviolet Light Generation Apparatus App 20140111635 - SUZUKI; Toru ; et al. | 2014-04-24 |
| Discharge-pumped Gas Laser Device App 20140105238 - KUROSU; Akihiko ; et al. | 2014-04-17 |
| Extreme Ultraviolet Light Generation System App 20140084183 - Wakabayashi; Osamu ; et al. | 2014-03-27 |
| System And Method For Generating Extreme Ultraviolet Light App 20140077099 - Hori; Tsukasa ; et al. | 2014-03-20 |
| Polarization Purity Control Device And Gas Laser Apparatus Provided With The Same App 20140050239 - NAGAI; Shinji ; et al. | 2014-02-20 |
| Extreme Ultraviolet Light Generation Apparatus App 20140034852 - KAKIZAKI; Kouji ; et al. | 2014-02-06 |
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