loadpatents
Patent applications and USPTO patent grants for Kakizaki; Kouji.The latest application filed is for "laser system".
Patent | Date |
---|---|
Laser system Grant 11,350,515 - Igarashi , et al. May 31, 2 | 2022-05-31 |
Laser System App 20200337145 - IGARASHI; Hironori ;   et al. | 2020-10-22 |
Laser Processing Method And Laser Processing System App 20200290156 - SUWA; Akira ;   et al. | 2020-09-17 |
Laser processing system and laser processing method Grant 10,710,194 - Kakizaki , et al. | 2020-07-14 |
Laser system or laser exposure system Grant 10,495,890 - Wakabayashi , et al. De | 2019-12-03 |
Laser Processing System And Laser Processing Method App 20190283177 - KAKIZAKI; Kouji ;   et al. | 2019-09-19 |
Laser Processing System And Laser Processing Method App 20190283179 - KAKIZAKI; Kouji ;   et al. | 2019-09-19 |
Laser Apparatus And Laser Processing System App 20190245321 - KAKIZAKI; Kouji ;   et al. | 2019-08-08 |
System and method for generating extreme ultraviolet light Grant 10,306,743 - Hori , et al. | 2019-05-28 |
System And Method For Generating Extreme Ultraviolet Light App 20190141826 - HORI; Tsukasa ;   et al. | 2019-05-09 |
System and method for generating extreme ultraviolet light Grant 10,251,255 - Hori , et al. | 2019-04-02 |
System And Method For Generating Extreme Ultraviolet Light App 20190037677 - HORI; Tsukasa ;   et al. | 2019-01-31 |
Excimer laser apparatus and excimer laser system Grant 10,177,520 - Asayama , et al. J | 2019-01-08 |
System and method for generating extreme ultraviolet light Grant 10,117,317 - Hori , et al. October 30, 2 | 2018-10-30 |
Excimer laser device Grant 10,103,509 - Kakizaki , et al. October 16, 2 | 2018-10-16 |
Gas laser device and condenser Grant 10,096,966 - Suwa , et al. October 9, 2 | 2018-10-09 |
Laser system Grant 10,074,958 - Wakabayashi , et al. September 11, 2 | 2018-09-11 |
Excimer laser chamber device Grant 10,050,403 - Katsuumi , et al. August 14, 2 | 2018-08-14 |
Laser system Grant 9,966,721 - Kakizaki , et al. May 8, 2 | 2018-05-08 |
System And Method For Generating Extreme Ultraviolet Light App 20180110116 - HORI; Tsukasa ;   et al. | 2018-04-19 |
Excimer Laser Device App 20180102622 - KAKIZAKI; Kouji ;   et al. | 2018-04-12 |
Excimer Laser Apparatus And Excimer Laser System App 20180048109 - ASAYAMA; Takeshi ;   et al. | 2018-02-15 |
System and method for generating extreme ultraviolet light Grant 9,877,378 - Hori , et al. January 23, 2 | 2018-01-23 |
Laser System And Laser Annealing Apparatus App 20180019141 - OHKUBO; Tomoyuki ;   et al. | 2018-01-18 |
Gas laser device and control method therefor Grant 9,853,410 - Asayama , et al. December 26, 2 | 2017-12-26 |
Excimer laser apparatus and excimer laser system Grant 9,837,780 - Asayama , et al. December 5, 2 | 2017-12-05 |
Excimer Laser Chamber Device App 20170346252 - KATSUUMI; Hisakazu ;   et al. | 2017-11-30 |
Laser Device App 20170338620 - ARAKAWA; Masaki ;   et al. | 2017-11-23 |
Lasersystem Grant 9,812,841 - Onose , et al. November 7, 2 | 2017-11-07 |
Laser System App 20170302050 - KAKIZAKI; Kouji ;   et al. | 2017-10-19 |
Exposure apparatus Grant 9,791,780 - Onose , et al. October 17, 2 | 2017-10-17 |
Laser Irradiation Device App 20170248782 - KAKIZAKI; Kouji ;   et al. | 2017-08-31 |
Preliminary ionization discharge device and laser apparatus Grant 9,748,727 - Kakizaki , et al. August 29, 2 | 2017-08-29 |
Laser chamber Grant 9,722,385 - Ikeda , et al. August 1, 2 | 2017-08-01 |
Laser apparatus Grant 9,601,893 - Kakizaki , et al. March 21, 2 | 2017-03-21 |
Laser System App 20170063025 - WAKABAYASHI; Osamu ;   et al. | 2017-03-02 |
Laser System App 20170063024 - KAKIZAKI; Kouji ;   et al. | 2017-03-02 |
Gas Laser Device And Condenser App 20170033527 - SUWA; Akira ;   et al. | 2017-02-02 |
System And Method For Generating Extreme Ultraviolet Light App 20170019983 - HORI; Tsukasa ;   et al. | 2017-01-19 |
Laser Chamber App 20160365696 - TSUSHIMA; Hiroaki ;   et al. | 2016-12-15 |
Gas Laser Device And Control Method Therefor App 20160359291 - ASAYAMA; Takeshi ;   et al. | 2016-12-08 |
Two-beam interference apparatus and two-beam interference exposure system Grant 9,507,248 - Okazaki , et al. November 29, 2 | 2016-11-29 |
Lasersystem App 20160344158 - ONOSE; Takashi ;   et al. | 2016-11-24 |
System and method for generating extreme ultraviolet light Grant 9,497,842 - Hori , et al. November 15, 2 | 2016-11-15 |
Laser System Or Laser Exposure System App 20160313564 - WAKABAYASHI; Osamu ;   et al. | 2016-10-27 |
Laser Chamber App 20160308324 - IKEDA; Hiroyuki ;   et al. | 2016-10-20 |
Excimer Laser Apparatus And Excimer Laser System App 20160254634 - ASAYAMA; Takeshi ;   et al. | 2016-09-01 |
Extreme ultraviolet light source apparatus Grant 9,429,847 - Nishisaka , et al. August 30, 2 | 2016-08-30 |
Laser Apparatus App 20160190763 - KAKIZAKI; Kouji ;   et al. | 2016-06-30 |
Exposure Apparatus App 20160187788 - ONOSE; Takashi ;   et al. | 2016-06-30 |
Extreme Ultraviolet Light Source Apparatus App 20160187787 - NISHISAKA; Toshihiro ;   et al. | 2016-06-30 |
Preliminary Ionization Discharge Device And Laser Apparatus App 20160172817 - KAKIZAKI; Kouji ;   et al. | 2016-06-16 |
Method of controlling laser apparatus and laser apparatus Grant 9,350,133 - Wakabayashi , et al. May 24, 2 | 2016-05-24 |
System And Method For Generating Extreme Ultraviolet Light App 20160128172 - HORI; Tsukasa ;   et al. | 2016-05-05 |
Laser apparatus Grant 9,331,450 - Asayama , et al. May 3, 2 | 2016-05-03 |
Extreme ultraviolet light source apparatus Grant 9,332,625 - Nishisaka , et al. May 3, 2 | 2016-05-03 |
System and method for generating extreme ultraviolet light Grant 9,265,136 - Hori , et al. February 16, 2 | 2016-02-16 |
System And Method For Generating Extreme Ultraviolet Light App 20150351209 - HORI; Tsukasa ;   et al. | 2015-12-03 |
System and method for generating extreme ultraviolet light Grant 9,167,678 - Hori , et al. October 20, 2 | 2015-10-20 |
Extreme Ultraviolet Light Source Apparatus App 20150245457 - NISHISAKA; Toshihiro ;   et al. | 2015-08-27 |
System and method for generating extreme ultraviolet light Grant 9,113,540 - Hori , et al. August 18, 2 | 2015-08-18 |
Optical device, and laser chamber and gas laser apparatus using the same Grant 9,093,814 - Kumazaki , et al. July 28, 2 | 2015-07-28 |
Laser Apparatus App 20150194781 - ASAYAMA; Takeshi ;   et al. | 2015-07-09 |
Method Of Controlling Laser Apparatus And Laser Apparatus App 20150188274 - Wakabayashi; Osamu ;   et al. | 2015-07-02 |
Extreme ultraviolet light source apparatus Grant 9,052,615 - Nishisaka , et al. June 9, 2 | 2015-06-09 |
System And Method For Generating Extreme Ultraviolet Light App 20150123019 - HORI; Tsukasa ;   et al. | 2015-05-07 |
Laser apparatus Grant 8,989,225 - Kakizaki , et al. March 24, 2 | 2015-03-24 |
Wavelength converter, wavelength converting device, solid state laser device, and laser system Grant 8,934,510 - Kakizaki , et al. January 13, 2 | 2015-01-13 |
Polarization purity control device and gas laser apparatus provided with the same Grant 8,902,948 - Nagai , et al. December 2, 2 | 2014-12-02 |
Extreme ultraviolet light source apparatus Grant 8,901,524 - Asayama , et al. December 2, 2 | 2014-12-02 |
Polarization purity control device and gas laser apparatus provided with the same Grant 8,891,574 - Nagai , et al. November 18, 2 | 2014-11-18 |
Gas discharge chamber Grant 8,855,167 - Nagai , et al. October 7, 2 | 2014-10-07 |
Optical Device, And Laser Chamber And Gas Laser Apparatus Using The Same App 20140286366 - KUMAZAKI; Takahito ;   et al. | 2014-09-25 |
Extreme ultraviolet light source apparatus Grant 8,841,641 - Kakizaki , et al. September 23, 2 | 2014-09-23 |
Temperature controller for gas laser Grant 8,811,438 - Watanabe , et al. August 19, 2 | 2014-08-19 |
Temperature controller for gas laser Grant 8,787,413 - Watanabe , et al. July 22, 2 | 2014-07-22 |
System And Method For Generating Extreme Ultraviolet Light App 20140183379 - HORI; Tsukasa ;   et al. | 2014-07-03 |
Droplet generation and detection device, and droplet control device Grant 8,710,473 - Mizoguchi , et al. April 29, 2 | 2014-04-29 |
Target output device and extreme ultraviolet light source apparatus Grant 8,710,472 - Ishihara , et al. April 29, 2 | 2014-04-29 |
Extreme ultraviolet light generation apparatus Grant 8,698,112 - Yabu , et al. April 15, 2 | 2014-04-15 |
System And Method For Generating Extreme Ultraviolet Light App 20140077099 - Hori; Tsukasa ;   et al. | 2014-03-20 |
Polarization Purity Control Device And Gas Laser Apparatus Provided With The Same App 20140050239 - NAGAI; Shinji ;   et al. | 2014-02-20 |
Extreme Ultraviolet Light Generation Apparatus App 20140034852 - KAKIZAKI; Kouji ;   et al. | 2014-02-06 |
Extreme Ultraviolet Light Source Apparatus App 20140008554 - ASAYAMA; Takeshi ;   et al. | 2014-01-09 |
Gas Discharge Chamber App 20130322483 - NAGAI; Shinji ;   et al. | 2013-12-05 |
Extreme ultraviolet light source apparatus Grant 8,586,954 - Asayama , et al. November 19, 2 | 2013-11-19 |
Temperature Controller For Gas Laser App 20130294470 - WATANABE; Yukio ;   et al. | 2013-11-07 |
Temperature Controller For Gas Laser App 20130294469 - WATANABE; Yukio ;   et al. | 2013-11-07 |
Extreme ultraviolet light generation apparatus Grant 8,569,722 - Kakizaki , et al. October 29, 2 | 2013-10-29 |
Extreme ultraviolet light source apparatus Grant 8,569,723 - Nagai , et al. October 29, 2 | 2013-10-29 |
Chamber Apparatus And Method Of Maintaining Target Supply Unit App 20130277452 - YABU; Takayuki ;   et al. | 2013-10-24 |
Laser Apparatus App 20130279526 - KAKIZAKI; Kouji ;   et al. | 2013-10-24 |
Extreme ultraviolet light source apparatus Grant 8,558,202 - Yanagida , et al. October 15, 2 | 2013-10-15 |
Extreme Ultraviolet Light Source Apparatus App 20130256567 - KAKIZAKI; Kouji ;   et al. | 2013-10-03 |
Extreme ultraviolet light source apparatus Grant 8,530,869 - Nagai , et al. September 10, 2 | 2013-09-10 |
Extreme ultraviolet light source apparatus Grant 8,530,870 - Kakizaki , et al. September 10, 2 | 2013-09-10 |
Excimer Laser Device App 20130223468 - NAGAI; Shinji ;   et al. | 2013-08-29 |
Laser Apparatus App 20130215916 - KAKIZAKI; Kouji ;   et al. | 2013-08-22 |
Extreme ultraviolet light source apparatus Grant 8,507,883 - Endo , et al. August 13, 2 | 2013-08-13 |
Wavelength Converter, Wavelength Converting Device, Solid State Laser Device, And Laser System App 20130202003 - KAKIZAKI; Kouji ;   et al. | 2013-08-08 |
Gas discharge chamber Grant 8,503,499 - Nagai , et al. August 6, 2 | 2013-08-06 |
Chamber apparatus and method of maintaining target supply unit Grant 8,497,489 - Yabu , et al. July 30, 2 | 2013-07-30 |
Temperature controller for gas laser Grant 8,498,317 - Watanabe , et al. July 30, 2 | 2013-07-30 |
Two-beam Interference Apparatus And Two-beam Interference Exposure System App 20130135601 - OKAZAKI; Shinji ;   et al. | 2013-05-30 |
Extreme ultraviolet light source apparatus Grant 8,445,876 - Suganuma , et al. May 21, 2 | 2013-05-21 |
Extreme ultraviolet light source apparatus Grant 8,436,328 - Yanagida , et al. May 7, 2 | 2013-05-07 |
Extreme ultraviolet light source apparatus Grant 8,399,867 - Endo , et al. March 19, 2 | 2013-03-19 |
Apparatus And Method For Measuring And Controlling Target Trajectory In Chamber Apparatus App 20130062539 - HAYASHI; Hideyuki ;   et al. | 2013-03-14 |
System And Method For Generating Extreme Ultraviolet Light App 20120307851 - HORI; Tsukasa ;   et al. | 2012-12-06 |
Apparatus and method for measuring and controlling target trajectory in chamber apparatus Grant 8,324,600 - Hayashi , et al. December 4, 2 | 2012-12-04 |
Temperature Controller For Gas Laser App 20120267343 - WATANABE; Yukio ;   et al. | 2012-10-25 |
System And Method For Generating Extreme Ultraviolet Light App 20120243566 - Hori; Tsukasa ;   et al. | 2012-09-27 |
Extreme Ultraviolet Light Generation Apparatus App 20120217422 - YABU; Takayuki ;   et al. | 2012-08-30 |
Target Supply Device And Extreme Ultraviolet Light Generation Apparatus App 20120205559 - Yabu; Takayuki ;   et al. | 2012-08-16 |
Temperature controller for gas laser Grant 8,238,392 - Watanabe , et al. August 7, 2 | 2012-08-07 |
Extreme Ultraviolet Light Source Apparatus App 20120176036 - ASAYAMA; Takeshi ;   et al. | 2012-07-12 |
Polarization Purity Control Device And Gas Laser Apparatus Provided With The Same App 20120177072 - NAGAI; Shinji ;   et al. | 2012-07-12 |
Extreme Ultraviolet Light Source Apparatus App 20120119116 - KAKIZAKI; Kouji ;   et al. | 2012-05-17 |
Droplet Generation And Detection Device, And Droplet Control Device App 20120104289 - MIZOGUCHI; Hakaru ;   et al. | 2012-05-03 |
Polarization purity control device and gas laser apparatus provided with the same Grant 8,165,181 - Nagai , et al. April 24, 2 | 2012-04-24 |
Extreme Ultraviolet Light Source Apparatus App 20120091893 - YANAGIDA; Tatsuya ;   et al. | 2012-04-19 |
Extreme ultraviolet light source apparatus Grant 8,158,959 - Asayama , et al. April 17, 2 | 2012-04-17 |
Chamber Apparatus And Method Of Controlling Movement Of Droplet In The Chamber Apparatus App 20120085922 - YABU; Takayuki ;   et al. | 2012-04-12 |
Chamber Apparatus And Method Of Maintaining Target Supply Unit App 20110310365 - YABU; Takayuki ;   et al. | 2011-12-22 |
Target Output Device And Extreme Ultraviolet Light Source Apparatus App 20110284774 - ISHIHARA; Takanobu ;   et al. | 2011-11-24 |
Extreme Ultraviolet Light Source Apparatus App 20110266467 - NAGAI; Shinji ;   et al. | 2011-11-03 |
Extreme Ultraviolet Light Source Apparatus App 20110266468 - NAGAI; Shinji ;   et al. | 2011-11-03 |
Laser System App 20110261844 - ABE; Tamotsu ;   et al. | 2011-10-27 |
Extreme Ultraviolet Light Generation Apparatus App 20110220816 - Kakizaki; Kouji ;   et al. | 2011-09-15 |
Extreme ultraviolet light source apparatus Grant 8,003,963 - Nagai , et al. August 23, 2 | 2011-08-23 |
Laser system Grant 8,000,361 - Abe , et al. August 16, 2 | 2011-08-16 |
Extreme ultraviolet light source apparatus Grant 7,999,241 - Nagai , et al. August 16, 2 | 2011-08-16 |
Excimer Laser Device App 20110164647 - NAGAI; Shinji ;   et al. | 2011-07-07 |
Gas Discharge Chamber App 20110158281 - NAGAI; Shinji ;   et al. | 2011-06-30 |
Optical element for gas laser and gas laser apparatus using the same Grant 7,965,756 - Wakabayashi , et al. June 21, 2 | 2011-06-21 |
Apparatus And Method For Measuring And Controlling Target Trajectory In Chamber Apparatus App 20100294958 - HAYASHI; Hideyuki ;   et al. | 2010-11-25 |
Extreme Ultraviolet Light Source Apparatus App 20100243922 - Asayama; Takeshi ;   et al. | 2010-09-30 |
Temperature Controller For Gas Laser App 20100217444 - Watanabe; Yukio ;   et al. | 2010-08-26 |
Excimer laser device operable at high repetition rate and having high band-narrowing efficiency Grant 7,782,922 - Hori , et al. August 24, 2 | 2010-08-24 |
Extreme Ultraviolet Light Source Apparatus App 20100181503 - Yanagida; Tatsuya ;   et al. | 2010-07-22 |
Extreme Ultraviolet Light Source Apparatus App 20100140512 - SUGANUMA; Takashi ;   et al. | 2010-06-10 |
Extreme Ultraviolet Light Source Apparatus App 20100140513 - Nagai; Shinji ;   et al. | 2010-06-10 |
Polarization Purity Control Device And Gas Laser Apparatus Provided With The Same App 20100128747 - NAGAI; Shinji ;   et al. | 2010-05-27 |
Extreme Ultraviolet Light Source Apparatus App 20100108918 - Nagai; Shinji ;   et al. | 2010-05-06 |
Extreme Ultraviolet Light Source Apparatus App 20100090132 - ENDO; Akira ;   et al. | 2010-04-15 |
Extreme Ultraviolet Light Source Apparatus App 20100078579 - Endo; Akira ;   et al. | 2010-04-01 |
Optical Element For Gas Laser And Gas Laser Apparatus Using The Same App 20100054297 - WAKABAYASHI; Osamu ;   et al. | 2010-03-04 |
Extreme Ultraviolet Light Source Apparatus App 20100051832 - NISHISAKA; Toshihiro ;   et al. | 2010-03-04 |
Laser system App 20090232171 - Abe; Tamotsu ;   et al. | 2009-09-17 |
Excimer laser device operable at high repetition rate and having high band-narrowing efficiency App 20080198891 - Hori; Tsukasa ;   et al. | 2008-08-21 |
Two-stage laser pulse energy control device and two-stage laser system Grant 7,382,816 - Ariga , et al. June 3, 2 | 2008-06-03 |
Laser device for exposure device App 20080095209 - Wakabayashi; Osamu ;   et al. | 2008-04-24 |
Excimer laser device App 20080037609 - NAGAI; Shinji ;   et al. | 2008-02-14 |
Discharge excitation type pulse laser apparatus Grant 7,215,695 - Kakizaki , et al. May 8, 2 | 2007-05-08 |
Two-stage laser pulse energy control device and two-stage laser system App 20060239309 - Ariga; Tatsuya ;   et al. | 2006-10-26 |
Discharge excitation type pulse laser apparatus App 20060078028 - Kakizaki; Kouji ;   et al. | 2006-04-13 |
Gas laser apparatus for lithography Grant 6,922,428 - Tanaka , et al. July 26, 2 | 2005-07-26 |
Gas laser apparatus for lithography App 20040047384 - Tanaka, Satoshi ;   et al. | 2004-03-11 |
Gas laser apparatus for lithography App 20020122449 - Tanaka, Satoshi ;   et al. | 2002-09-05 |
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