U.S. patent application number 12/855524 was filed with the patent office on 2010-12-30 for coating and developing apparatus.
This patent application is currently assigned to TOKYO ELECTRON LIMITED. Invention is credited to Masami AKIMOTO, Shinichi Hayashi, Yasushi Hayashida, Hikaru Ito, Yoshio Kimura, Nobuaki Matsuoka, Issei Ueda.
Application Number | 20100326353 12/855524 |
Document ID | / |
Family ID | 36907616 |
Filed Date | 2010-12-30 |
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United States Patent
Application |
20100326353 |
Kind Code |
A1 |
AKIMOTO; Masami ; et
al. |
December 30, 2010 |
COATING AND DEVELOPING APPARATUS
Abstract
Provided is a coating and developing apparatus composed of an
assembly of plural unit blocks. A first unit-block stack and a
second unit-block stack are arranged at different positions with
respect to front-and-rear direction. Unit blocks for development,
each of which comprises plural processing units including a
developing unit that performs developing process after exposure and
a transfer device that transfers a substrate among the processing
units, are arranged at the lowermost level. Unit blocks for
application, or coating, each of which comprises plural processing
units including a coating unit that performs application process
before exposure and a transfer device that transfers a substrate
among the processing units, are arranged above the unit blocks for
development. Unit blocks for application are arranged in both the
first and second unit-block stacks. Unit blocks for application
which a wafer goes through are determined depending on the layering
positional relationship between an antireflective film and a resist
film. An exposed wafer goes only through the unit block for
development without going through any one of the unit blocks for
application.
Inventors: |
AKIMOTO; Masami; (Koshi-Shi,
JP) ; Hayashi; Shinichi; (Koshi-Shi, JP) ;
Hayashida; Yasushi; (Koshi-Shi, JP) ; Matsuoka;
Nobuaki; (Koshi-Shi, JP) ; Kimura; Yoshio;
(Koshi-Shi, JP) ; Ueda; Issei; (Koshi-Shi, JP)
; Ito; Hikaru; (Minato-ku, JP) |
Correspondence
Address: |
OBLON, SPIVAK, MCCLELLAND MAIER & NEUSTADT, L.L.P.
1940 DUKE STREET
ALEXANDRIA
VA
22314
US
|
Assignee: |
TOKYO ELECTRON LIMITED
Tokyo
JP
|
Family ID: |
36907616 |
Appl. No.: |
12/855524 |
Filed: |
August 12, 2010 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
11342616 |
Jan 31, 2006 |
7793609 |
|
|
12855524 |
|
|
|
|
Current U.S.
Class: |
118/620 |
Current CPC
Class: |
H01L 21/67184 20130101;
H01L 21/67207 20130101; H01L 21/67173 20130101; H01L 21/67745
20130101; H01L 21/67178 20130101 |
Class at
Publication: |
118/620 |
International
Class: |
B05C 9/12 20060101
B05C009/12 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 1, 2005 |
JP |
2005-025509 |
Claims
1. A coating and developing apparatus comprising a carrier block, a
process block, and an interface block connectable to an exposure
apparatus, wherein the coating and developing apparatus is
configured, upon connection of said coating and developing
apparatus with the exposure apparatus, to perform operations
including: transferring a substrate carried into the carrier block
by using a carrier to the process block; coating the substrate with
a coating film including a resist film in the process block;
sending the substrate to the exposure apparatus through the
interface block; developing the substrate, which has been exposed
and returned to the process block through the interface block, in
the process block; and then transferring the substrate to the
carrier block, wherein: the process block includes a plurality of
substrate treatment lines each for carrying out a series of
treatment on a substrate, each of the substrate treatment lines
being arranged vertically at different levels, and each of the
substrate treatment lines horizontally extending between a
carrier-block side and an interface-block side of the process
block; each of the substrate treatment lines includes: a first
transfer area located on the carrier-block side, and a second
transfer area located on the interface-block side, each of the
transfer areas extending in a first horizontal direction from the
carrier-block side to the interface-block side; a first group of
processing units disposed to face the first transfer area and each
configured to process a substrate, and second group of processing
units disposed to face the second transfer area and each configured
to process a substrate; a first main conveyer provided in the first
transfer area to transfer a substrate between the first group of
the processing units, and a second main conveyer provided in the
second transfer area to transfer a substrate between the second
group of the processing units, the first and second main conveyers
being arranged such that a substrate can be transferred between the
first and second main conveyers.
2. The coating and developing apparatus according to claim 1,
wherein, in plan view, a layout of the first group of the
processing units and the first main conveyer is approximately the
same as a layout of the second group of the processing units and
the second main conveyer.
3. The coating and developing apparatus according to claim 2,
further comprising means for supplying a clean gas into the
transfer areas and for discharging the gas from the transfer areas,
respectively.
4. The coating and developing apparatus according to claim 2,
further comprising a substrate transfer mechanism disposed in the
carrier block to access a carrier held in the carrier block and any
one of the first main conveyers of the substrate treatment lines at
different levels to transfer a substrate between the carrier and
said one first main conveyer.
5. The coating and developing apparatus according to claim 4,
further comprising a plurality of transfer units which are
accessible by the first main conveyers of the substrate treatment
lines, respectively, and are accessible by the substrate transfer
mechanism, wherein each of the transfer units is configured to
allow a substrate to be placed thereon and the substrate transfer
mechanism transfers a substrate through one of the transfer
units.
6. The coating and developing apparatus according to claim 1,
further comprising means for supplying a clean gas into the
transfer areas and for discharging the gas from the transfer areas,
respectively.
7. The coating and developing apparatus according to claim 1,
further comprising a substrate transfer mechanism disposed in the
carrier block to access a carrier held in the carrier block and any
one of the first main conveyers of the substrate treatment lines at
different levels to transfer a substrate between the carrier and
said one first main conveyer.
8. The coating and developing apparatus according to claim 7,
further comprising a plurality of transfer units which are
accessible by the first main conveyers of the substrate treatment
lines, respectively, and are accessible by the substrate transfer
mechanism, wherein each of the transfer units is configured to
allow a substrate to be placed thereon and the substrate transfer
mechanism transfers a substrate through one of the transfer
units.
9. A coating and developing apparatus comprising a carrier block, a
process block, and an interface block connectable to an exposure
apparatus, wherein the coating and developing apparatus is
configured, upon connection of said coating and developing
apparatus with the exposure apparatus, to perform operations
including: transferring a substrate carried into the carrier block
by using a carrier to the process block; coating the substrate with
a coating film including a resist film in the process block;
sending the substrate to the exposure apparatus through the
interface block; developing the substrate, which has been exposed
and returned to the process block through the interface block, in
the process block; and then transferring the substrate to the
carrier block, wherein: the process block includes a plurality of
treating blocks arranged horizontally; each of the treating blocks
having a plurality of levels, and a plurality of processing units
are arranged on each of the levels, and a main conveyer is provided
for each of the level for transferring a substrate to and from the
processing units on each of the levels; wherein a series of
treatments are performed on a substrate while the substrate is
transferred between the main conveyers of the treating blocks
positioned adjacent to each other on the same level.
10. The coating and developing apparatus according to claim 9,
wherein each of the treating blocks has a housing for collectively
accommodating the processing units and the main conveyers included
in each of the treating blocks.
11. The coating and developing apparatus according to claim 10,
wherein the levels of each of the treating blocks are partitioned
from each other, and each of the main conveyers are provided in
respective transfer areas, said coating and developing apparatus
further comprising means for supplying a clean gas into each of the
transfer areas and for discharging the gas from each of the
transfer areas.
12. The coating and developing apparatus according to claim 10,
further comprising a substrate transfer mechanism disposed in the
carrier block to transfer a substrate between a carrier held in the
carrier block and any one of the main conveyers on the respective
levels in one of the treating blocks on a carrier-block side.
13. The coating and developing apparatus according to claim 12,
further comprising a plurality of transfer units provided between
the main conveyers on the respective levels in said one treating
block on a carrier-block side and the substrate transfer mechanism
in the carrier block, wherein each of the transfer units is
configured to allow a substrate to be placed thereon and the
substrate transfer mechanism transfers a substrate through one of
the transfer units.
14. The coating and developing apparatus according to claim 9,
wherein the levels of each of the treating blocks are partitioned
from each other, and each of the main conveyers are provided in
respective transfer areas, said coating and developing apparatus
further comprising means for supplying a clean gas into each of the
transfer areas and for discharging the gas from each of the
transfer areas.
15. The coating and developing apparatus according to claim 9,
further comprising a substrate transfer mechanism disposed in the
carrier block to transfer a substrate between a carrier held in the
carrier block and any one of the main conveyers on the respective
levels in one of the treating blocks on a carrier-block side.
16. The coating and developing apparatus according to claim 15,
further comprising a plurality of transfer units provided between
the main conveyers on the respective levels in said one treating
block on a carrier-block side and the substrate transfer mechanism
in the carrier block, wherein each of the transfer units is
configured to allow a substrate to be placed thereon and the
substrate transfer mechanism transfers a substrate through one of
the transfer units.
17. A coating and developing apparatus comprising a carrier block,
a process block, and an interface block connectable to an exposure
apparatus, wherein the coating and developing apparatus is
configured, upon connection of said coating and developing
apparatus with the exposure apparatus, to perform operations
including: transferring a substrate carried into the carrier block
by using a carrier to the process block; coating the substrate with
a coating film including a resist film in the process block;
sending the substrate to the exposure apparatus through the
interface block; developing the substrate, which has been exposed
and returned to the process block through the interface block, in
the process block; and then transferring the substrate to the
carrier block, wherein: the process block includes a first
unit-block stack arranged adjacent to the carrier block and a
second unit-block stack arranged adjacent to the first unit-block
stack and also adjacent to the interface block; the first
unit-block stack includes a plurality of coating unit-blocks
arranged at different levels, each of the coating unit-blocks
including coating units each configured to form a coating film on a
substrate, heat-treating units each configured to heat-treat a
substrate and a main conveyer for transferring a substrate between
the coating units and the heat-treating units in the coating
unit-block; the second unit-block stack includes a developing
unit-block including developing units each configured to develop a
substrate, heat-treating units each configured to heat-treat a
substrate and a main conveyer for transferring a substrate between
the developing units and the heat-treating units in the developing
unit-block; the carrier block includes a substrate transfer
mechanism configured to transfer a substrate between a carrier held
in the carrier block and any one of the main conveyers in the
coating unit-blocks on the respective levels; and each of the main
conveyers in the coating unit-blocks is provided to transfer a
substrate to and from the main conveyer on the same level in the
second unit-block stack; and the interface block includes a
substrate transfer mechanism configured to transfer a substrate to
and from any one of the main conveyers in the second unit-block
stack.
18. The coating and developing apparatus according to claim 17,
wherein the coating unit-blocks include a first coating unit-block
having a coating unit configured to apply a resist solution to form
a resist film on a substrate, and a second coating unit-block
having a coating unit configured to form a bottom anti-reflective
film on the substrate before forming the resist film.
19. The coating and developing apparatus according to claim 17,
wherein the second unit-block stack includes a unit-block having a
coating unit configured to form a top anti-reflective film on the
substrate after forming a resist film.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of U.S. application Ser.
No. 11/342,616, filed Jan. 31, 2006, which claims priority under 35
U.S.C. 119 to Japanese Application No. 2005-025509, filed Feb. 1,
2005, the entire contents of both of which are incorporated herein
by reference.
TECHNICAL FIELD
[0002] The present invention relates to a coating and developing
apparatus that performs a resist liquid coating process and a
developing process after exposure to a substrate such as a
semiconductor wafer or an LCD substrate (a glass substrate for a
liquid crystal display).
BACKGROUND ART
[0003] In fabricating a semiconductor device or a LCD substrate, a
resist pattern is formed on a substrate with the use of
photolithography technique. In order to form a resist pattern on a
semiconductor water (hereinafter referred simply to "wafer"), the
wafer is coated with a resist liquid to form a resist film on the
wafer, the resist film is exposed with the use of photomask, and
then the resist film is subjected to a developing process. In
general, the resist pattern formation is carried out by a resist
pattern forming system composed of a coating and developing
apparatus that coats and develops a resist and an exposure
apparatus connected to the coating and developing apparatus.
[0004] JP2004-193597A discloses a coating and developing apparatus,
which is schematically shown in FIG. 11. A carrier 10 holding
therein plural wafers W is carried into a carrier stage 11 in a
carrier block 1A, and the wafer W in the carrier 10 is transferred
to a process block 1B by a transfer arm 12. The wafer W is conveyed
to a coating unit 13A in the process block 1B where the wafer W is
coated with a resist liquid, and then the wafer W is conveyed to an
exposure apparatus 1D through an interface block 1C.
[0005] The exposed wafer is returned to the process block 1B where
the wafer is subjected to a developing process in a developing unit
13B, and then the wafer is returned to the original carrier 10.
Reference sign 14 (14a to 14c) denotes unit stacks, each provided
with a heating unit and a cooling unit for heating and/or cooling a
wafer W before and after the process performed by a coating unit
13A and/or developing unit 13B, and a transfer stage. In the
process block 1B, the wafer W is transferred among the coating unit
13A, the developing unit 13B and the unit stacks 14a to 14c by
transfer means 15A and 15B disposed in the process block 1B. In
this case, all the wafers are transferred according to a
transferring schedule specifying the timing at which each wafer is
carried into respective units.
[0006] In the coating and developing apparatus of JP2004-193597A,
since a common transfer means transfers a wafer to units for
processing a wafer before exposure (e.g., a unit for resist film
formation) and also transfers a wafer to units for processing a
wafer after exposure (e.g., a developing unit), it is difficult to
arrange an effective transferring schedule and thus to improve the
throughput. This is contrary to the demands of improving the
throughput of the coating and developing apparatus consistent with
the improvement of the throughput of the exposing apparatus.
[0007] JP2001-176792A (JP3337677B2) discloses a coating and
developing apparatus provided with an area for coating process and
an area for developing process, wherein the areas are vertically
separated from each other, and are provided therein with individual
transfer means.
[0008] A certain kind of resist film requires antireflective
film(s) formed over and/or under the resist film. In this case, if
a unit block (i.e., a block composed of plural processing units)
for forming a resist film, a unit block for forming an
antireflective film before forming the resist film, a unit block
for forming an antireflective film after forming the resist film
and a unit block for developing process are stacked vertically, the
total height of the coating and developing apparatus increases.
Thus, it is difficult to transport the coating and developing
apparatus from the manufacturing maker of the apparatus to the
user. Moreover, the maintenance of the apparatus is difficult.
[0009] On the contrary, if liquid processing units such as a resist
film coating unit and an antireflective film forming units are
arranged in a plane, the footprint of the apparatus drastically
increases.
DISCLOSURE OF THE INVENTION
[0010] The present invention has been made under the foregoing
circumstances, and it is therefore an object of the present
invention to provide a coating and developing apparatus that
achieves reduction in height and length thereof to a reasonable
degree while achieving high transferring efficiency in the
apparatus.
[0011] In order to achieve the objectives, the present invention
provides a coating and developing apparatus comprising a carrier
block, a process block, and an interface block connectable to an
exposure apparatus, wherein the coating and developing apparatus is
configured to: transfer a substrate carried into the carrier block
by using a carrier to the process block; coat the substrate with a
coating film including a resist film in the process block; send the
substrate to the exposure apparatus through the interface block;
develop the substrate, which has been exposed and returned to the
process block through the interface block, in the process block;
and then transfer the substrate to the carrier block, wherein:
[0012] (a) the process block is provided with a plurality of unit
blocks each including: a liquid processing unit for applying a
chemical liquid onto a substrate; a heating unit for heating a
substrate; a cooling unit for cooling a substrate; and a conveyer
for the unit block for transferring a substrate among those units,
and wherein each of the unit blocks is provided therein with a
conveying passage extending from a carrier-block side thereof to an
interface-block side thereof; [0013] (b) the process block is
provided with a first unit-block stack formed by stacking a
plurality of unit blocks and a second unit-block stack formed by
stacking a plurality of unit blocks, wherein the first unit-block
stack is disposed on a carrier-block side and the second unit-block
stack is disposed on a interface-block side; [0014] (c)
intermediate stages are disposed between the first unit-block stack
and the second unit-block stack such that each of the intermediate
stages is disposed between unit blocks located on the same level to
transfer a substrate therebetween; [0015] (d) the first unit-block
stack comprises: a unit block for bottom antireflective film
formation including a liquid processing unit for applying a
chemical liquid for forming a bottom antireflective film to a
substrate before a resist liquid is applied to the substrate; a
unit block for resist film formation including a liquid processing
unit for applying a resist liquid to a substrate; and a unit block
for development including a liquid processing unit for applying a
developing liquid to an exposed substrate to develop the same;
[0016] (e) the second unit-block stack comprises: a unit block for
resist film formation including a liquid processing unit for
applying a resist liquid to a substrate; a unit block for top
antireflective film formation including a liquid processing unit
for applying a chemical liquid for forming a top antireflective
film to a substrate after a resist liquid is applied to the
substrate; and a unit block for development including a liquid
processing unit for applying a developing unit to an exposed
substrate to develop the same; [0017] (f) the unit block for resist
film formation of the second unit-block stack is located on the
same level as that of the unit block for bottom antireflective film
formation of the first unit-block stack; the unit block for top
antireflective film formation of the second unit-block stack is
located on the same level as that of the unit block for resist film
formation of the first unit-block stack; and the unit block for
development of the second unit-block stack is located on the same
level as that of the unit block for development of the first
unit-block stack; [0018] (g) said apparatus has processing modes
including:
[0019] a first processing mode in which an antireflective film is
formed on the substrate in the unit block for bottom antireflective
film formation of the first unit-block stack; the substrate is
transferred through an intermediate stage corresponding to said
unit block for bottom antireflective film formation of the first
unit-block stack to the unit block for resist film formation of the
second unit-block stack; and in which unit block a resist film is
formed on the substrate; and
[0020] a second processing mode in which a resist film is formed on
the substrate in the unit block for resist film formation of the
first unit-block stack; the substrate is transferred through an
intermediate stage corresponding to said unit block for resist film
formation of the first unit-block stack to the unit block for top
antireflective film formation of the second unit-block stack; and
in which unit block an antireflective film is formed on the
substrate.
[0021] In one preferred embodiment, the coating and developing
apparatus further includes a vertically-movable transfer device for
transferring a substrate between the unit block for resist film
formation of the second unit-block stack and the unit block for top
antireflective film formation of the second unit-block stack,
wherein said apparatus has a third processing mode in which: an
antireflective film is formed on the substrate in the unit block
for bottom antireflective film formation of the first unit-block
stack; the substrate is transferred through an intermediate stage
corresponding to said unit block for bottom antireflective film
formation of the first unit-block stack to the unit block for
resist film formation of the second unit-block stack; in which unit
block a resist film is formed on the substrate; from which unit
block the substrate is transferred via the vertically-movable
transfer device to the unit block for top antireflective film
formation of the second unit-block stack; and in which unit block a
top antireflective film is formed on the substrate.
[0022] In one preferred embodiment, the coating and developing
apparatus further includes a vertically-movable transfer device for
transferring a substrate between the unit block for bottom
antireflective film formation of the first unit-block stack and the
unit block for resist film formation of the first unit-block stack,
wherein said apparatus has a fourth processing mode in which: an
antireflective film is formed on the substrate in the unit block
for bottom antireflective film formation of the first unit-block
stack; from which unit block the substrate is transferred via the
vertically-movable transfer device to the unit block for resist
film formation of the first unit-block stack; in which unit block a
resist film is formed on the substrate; the substrate is
transferred through an intermediate stage corresponding to said
unit block for resist film formation to the unit block for top
antireflective film formation of the second unit-block stack; and
in which unit block stack a top antireflective film is formed on
the substrate.
[0023] One of the unit block for development of the first
unit-block stack and the unit block for development of the second
unit-block stack may be replaced with a unit block for inspection
including an inspecting unit for inspecting a surface of a
substrate and a conveyer for the unit block for transferring a
substrate between the inspecting unit and an intermediate
stage.
BRIEF DESCRIPTION OF DRAWINGS
[0024] FIG. 1 is a schematic top plan view of a coating and
developing apparatus in a first embodiment of the present
invention;
[0025] FIG. 2 is a schematic perspective view of the coating and
developing apparatus shown in FIG. 1;
[0026] FIG. 3 is a schematic longitudinal cross-sectional view of
the coating and developing apparatus shown in FIG. 1;
[0027] FIG. 4 is a schematic perspective view showing the structure
of one unit block in the coating and developing apparatus shown in
FIG. 1;
[0028] FIG. 5 shows a schematic top plan view and a schematic
cross-sectional view of a coating unit shown in FIG. 4;
[0029] FIG. 6 is an explanatory drawing showing the flow of a wafer
in the coating and developing apparatus shown in FIG. 1;
[0030] FIG. 7 is a schematic longitudinal cross-sectional view of a
coating and developing apparatus in a second embodiment of the
present invention;
[0031] FIG. 8 is a schematic top plan view of a coating and
developing apparatus in a third embodiment of the present
invention;
[0032] FIG. 9 is a schematic longitudinal cross-sectional view of
the coating and developing apparatus shown in FIG. 8;
[0033] FIG. 10 is a schematic longitudinal cross-sectional view of
a coating and developing apparatus in a fourth embodiment of the
present invention; and
[0034] FIG. 11 is a schematic top plan view of a conventional
coating and developing apparatus.
DESCRIPTION OF REFERENCE SIGNS
[0035] W: Semiconductor wafer
20: Carrier
C: Transfer arm
[0036] S1: Carrier block S2: Process block S3: Interface block S4:
Exposure apparatus
A1 to A7: Main arm
[0037] 31: Coating unit 41: First unit-block stack 42: Second
unit-block stack TRS6 to TRS8: Intermediate stage 61: Transfer arm
(Vertically-movable transfer device) 62: Interface arm
(Vertically-movable transfer device) 63: Transfer arm
(Vertically-movable transfer device) 50: Control unit B1 to B7:
Unit block
BEST MODE FOR CARRYING OUT THE INVENTION
[0038] A first embodiment of the coating and developing apparatus
according to the present invention will be described with reference
to FIGS. 1 to 6. In the first embodiment, the coating and
developing apparatus according to the present invention is
connected to an exposure apparatus and is constituted as a part of
a resist pattern forming system. For the convenience of the
explanation, the positive X-direction in the drawings is referred
to as left direction; the negative X-direction is referred to as
right direction; the positive Y-direction is referred to as front
direction; and the negative Y-direction is referred to as rear
direction. As shown in FIG. 1, the coating and developing apparatus
includes: a carrier block S1 for receiving and delivering a
hermetically-closed carrier 20, holding plural (e.g., 13) wafers W
(i.e., substrates) therein, into and from the coating and
developing apparatus; a process block S2 for performing a coating
process and a developing process to the wafers W; and an interface
block S3. The coating and developing apparatus is connected to an
exposure apparatus S4 via the interface block S3.
[0039] The carrier block S1 is provided with: a stage 21 adapted to
hold plural carriers 20 thereon; openings formed in a wall in front
of the stage 21; and a transfer arm C for removing a wafer W from
the carrier 20 through the opening. A shutter is assigned to each
of the openings 22 to close the same. The transfer arm C is capable
of moving toward and away from transfer stages TRS1, TRS2 and TRS 3
(described later), or moving in Y-directions; moving vertically;
rotating about a vertical axis; and moving along the carrier
arranging direction, or X-directions, in order to transfer a wafer
W to and from the transfer stages TRS1, TRS2 and TRS 3.
[0040] The process block S2 enclosed by an enclosure is connected
to the carrier block S1 at the front end of the process block S2.
The process block S2 includes a first unit-block stack 41 disposed
near the carrier block S1 and a second unit-block stack 42 disposed
near the interface block S3. Each of the unit-block stacks are
constituted by stacking plural unit blocks vertically, which will
be described later. Each of the unit blocks is provided therein
with a wafer transfer passage (transfer area) extending linearly
from the process block S2 side to the interface block S3 side.
[0041] The first unit-block stack 41 is constituted by stacking: a
unit block for development (DEV layer) B1 for applying a developing
liquid to an exposed wafer W to perform a developing process; a
unit block for resist film formation (COT layer) B2 for coating a
wafer W with a resist liquid; and a unit block for bottom
antireflective film formation (BCT layer) B3 for coating a chemical
liquid for forming a bottom antireflective film on a wafer before
coated with a resist liquid, wherein these unit blocks B1, B2 and
B3 are stacked in that order from the bottom. The second unit-block
stack 42 is constituted by stacking: a unit block for development
(DEV layer) B4 for applying a developing liquid to an exposed wafer
W to perform a developing process; a unit block for top
antireflective film formation (TCT layer) B5 for coating a chemical
liquid for forming a top antireflective film on a wafer after
coated with a resist liquid; and a unit block for resist film
formation (COT layer) B6 for coating a wafer W with a resist
liquid, wherein these unit blocks B4, B5 and B6 are stacked in that
order from the bottom. Note that the term "layer" and the term
"unit block" has the same meaning, and that either one of these
terms are used hereinafter depending on the circumstances for the
sake of convenience of explanation. The DEV layer B1, the COT layer
B2 and the BCT layer B3 are positioned at the same level as those
of the DEV layer B4, the TCT layer B5 and the COT layer B6,
respectively.
[0042] Intermediate stages TRS6, TRS7 and TRS8, serving as transfer
stages, are arranged between the first unit-block stack 41 and the
second unit-block stack 42. The intermediate stages TRS6, TRS7 and
TRS8 are arranged at positions respectively corresponding to the
unit blocks B1, B2 and B3 (B4, B5 and B6); in other words, each of
the intermediate stages TRS6, TRS7 and TRS8 are arranged at a
position to and from which each of main arms (described later)
provided in the corresponding unit blocks can transfer a wafer W.
The intermediate stages TRS6, TRS7 and TRS8 are stacked vertically
to constitute a unit stack U6.
[0043] Next, the structure of the unit blocks B1 to B6 will be
described. Each of the unit blocks B1 to B6 includes: a liquid
processing unit (i.e., coating unit, described later) for applying
a chemical liquid to a wafer W; various heating unit(s) and cooling
unit(s) that performs a pre-treatment and a post-treatment for the
treatment performed by the liquid processing unit; a main arm (A1
to A6) that transfers a wafer W between the liquid processing unit
and the heating and cooling units.
[0044] Among the unit blocks B1 to B6, the positional relationship
among the liquid processing unit, the heating and cooling units and
the main arm is the same. In other words, among the unit blocks,
the positional relationship among the wafer-mounting positions
(e.g., the center position of the spin chuck (described later) of
the liquid processing unit, and the center positions of the heating
(or cooling) plates of the heating (or cooling) units are the
same.
[0045] The structure of the unit block will be described taking the
COT layer B2 shown in FIGS. 1 and 4 as an example. Provided at the
center in the COT layer B2 is a wafer transfer area (i.e., transfer
passage) R1 extending in the front-and-rear direction (i.e.,
Y-direction). Arranged on the right side of the transfer area R1 is
a coating unit 31, as the liquid processing unit, having plural
coating portions for coating a resist. Arranged on the left side of
the COT layer B2 are four unit stacks U1, U2, U3 and U4, which are
aligned in the front-and-rear direction. Each of the unit stacks is
composed of vertically-stacked two heating and/or cooling units for
performing a pre-treatment and a post-treatment for the treatment
performed by the coating unit 31. The transfer area R1 is defined
between the coating unit 31 and the unit stacks U1 to U4. Clean air
is sprayed to the transfer area R1 and is discharged therefrom,
thereby to prevent particles from being suspended in the transfer
area R1.
[0046] As shown in FIG. 4, the foregoing processing units for
performing the pre-treatment and the post-treatment includes: a
cooling unit (COL2) for adjusting the temperature of a wafer W to a
designated value before the wafer W is coated with a resist liquid;
and a heating unit (CHP2), or a so-called, pre-baking unit, for
heating a wafer W after coated with a resist liquid. The processing
units such as the cooling unit (COL2) and the heating unit (CHP2)
are enclosed by respective processing containers 52. The side of
each processing container 52 facing the transfer area R1 is
provided therein with a wafer carrying-in-and-out port. Each of the
unit stacks U1 to U4 are constituted by stacking the processing
containers 52. As shown in FIG. 1, each heating unit (CHP2)
includes a heating plate 53, and a cooling plate 54 which also
functions as a transfer arm. The processing units constituting the
unit stacks U1 to U4 includes a hydrophobizing unit (ADH2) that
performs a hydrophobizing treatment by supplying the wafer surface
with an organic gas in order to improve the adhesion of the resist
film to the wafer surface.
[0047] The main arm (conveyer) A2 disposed in the transfer area R1
is capable of: moving toward and away from each processing units in
the COT layer B2, or moving in X-direction; moving vertically;
rotating about a vertical axis; and moving in Y-direction, so that
the main arm A2 can transfer a wafer W to and from any one of the
processing units in the COT layer B2, the transfer stage TRS2 and
the intermediate stage TRS 7.
[0048] As shown in FIGS. 1 and 3, a unit stack U5 is arranged
between the carrier block S1 and the first unit-block stack 41. The
unit stack U5 comprises transfer stages TRS1, TRS2 and TRS 3, which
are stacked vertically. Two transfer stages TRS1, two transfer
stages TRS2 and two transfer stages TRS3 are provided in
correspondence to the unit blocks B1, B2 and B3, respectively. The
main arm (A1 to A3) in each unit block can transfer a wafer W to
and from the corresponding transfer stages. The transfer arm C is
capable of transferring a wafer W to and from any one of the
transfer stages TRS1 to TRS3 constituting the unit stack U5.
[0049] A unit stack U7 is arranged between the second unit-block
stack 42 and the interface block S3. The unit stack U7 comprises
transfer stages TRS9, TRS10 and TRS11, which are stacked
vertically. Two transfer stages TRS9, two transfer stages TRS10 and
two transfer stages TRS11 are provided in correspondence to the
unit blocks B4, B5 and B6 of the second unit-block stack 42,
respectively. The main arm (A4 to A6) in each unit block can
transfer a wafer W to and from the corresponding transfer
stages.
[0050] As shown in FIG. 1, the process block S1 is provided with a
transfer arm (transfer means) 61 near the unit stack U7. The
transfer arm 61 is capable of: moving toward and away from the
transfer stages TRS10 and TRS 11, or in X-direction; and of moving
vertically, so that the transfer arm 61 can transfer a wafer W to
and from the transfer stages TRS10 and TRS11. The transfer arm 61
has a function of transferring a wafer, having been transferred
from the COT layer B6 to the transfer stage TRS11, to the transfer
stage TRS10 corresponding to the TCT layer B5, which will be
described later.
[0051] The exposure apparatus S4 is connected to the front side of
the unit stack U6 of the process block S2 via the interface block
S3. The interface block S3 is provided therein with an interface
arm 62 to transfer a wafer W between the unit stack U7 of the
process block S2 and the exposure apparatus S4. The interface arm
62 serves as a wafer transfer means interposed between the process
block S2 and the exposure apparatus S4. The interface arm 62 is
capable of: moving toward and away from the transfer stages TRS9 to
TRS11, or moving in Y-direction; moving vertically; and rotating
about a vertical axis, so that the interface arm 62 can transfer a
wafer W to and from any one of the transfer stages TRS9 to TRS11 of
the unit stack U7.
[0052] When a wafer W is transferred from the COT layer B6 to the
TCT layer B5, it is advantageous, in view of reducing the load of
the interface arm 62, that the wafer is transferred from the stage
TRS11 to the stage TRS10 by means of the transfer arm 61. In spite
of the above, the transfer arm 61 may be omitted; and a wafer W may
be transferred from the stage TRS11 to TRS10 by means of the
interface arm 62.
[0053] Next, the other unit blocks will be briefly described. As
previously described, the DEV layer B1, the DEV layer B2, the BCT
layer B3 and TCT layer B5 have essentially the same structure as
that of the COT layer B2 and the COT layer B6. The DEV layer B1 and
the DEV layer B2 are different from the BCT layer B3 and TCT layer
B5 in the following respects: the chemical liquid used in the
coating unit 31, or the liquid processing unit (a chemical liquid
for antireflective film formation is used in the BCT layer and the
TCT layer; while a chemical liquid for development, or a developing
liquid is used in the DEV layer); the way how the chemical liquid
is applied; and the process conditions in the heating and cooling
units. The DEV layer B1 are the DEV layer B2 are the same as the
BCT layer B3 and TCT layer B5 in that the main arm (A1, A3, A4, A5)
assigned to each unit block (layer) transfers a wafer W between the
processing units of the unit block, and transfers a wafer W to and
from the transfer stages or the intermediate stages of the unit
stack U5, U6 and U7. Note that, in the TCT layer B5 and the COT
layer B6 of the second unit-block stack 42, in order to expose only
the edge portion of a wafer W prior to the exposure process to be
carried out after completion of the processes performed in these
layers, an edge exposure unit (WEE) is incorporated into the unit
stack U4 of each of these layers.
[0054] Next, the coating unit 31 will be briefly described with
reference to FIG. 5. The coating unit 31 has plural (in the
illustrated embodiment, three) coating portions 301, 302 and 303,
which are enclosed in a common processing container 300. These
coating portions are mounted on a common base 304 and are aligned
in front-and-rear direction (Y-direction).
[0055] The coating portions 301, 302 and 303 have the same
structure, and thus the structure thereof will be described taking
the coating portion 301 as an example. Reference numeral 305
denotes a spin chuck, or a substrate holder. The spin chuck 305 is
adapted to hold a wafer W horizontally by suction. The spin chuck
305 is capable of rotating about a vertical axis and moving
vertically by means of a driving mechanism. A cup 307 surrounds the
spin chuck 305. A drainage system 308 including an exhaust pipe and
a drainage pipe is disposed on the bottom of the cup 307. Reference
numeral 309 denotes a side rinse mechanism for supplying a rinse
liquid to the peripheral edge portion of a wafer W held by the spin
chuck 305. The side rinse mechanism 309 is capable of moving
vertically and rotating about a vertical axis.
[0056] Reference numeral 310 denotes a common supply nozzle
(chemical liquid nozzle) for supplying a coating liquid to the
three coating portions 301, 302 and 303. The supply nozzle 310 is
capable of moving along a guide rail 311 extending in the
longitudinal direction (i.e., the front-and-rear direction, or
Y-direction) of the processing container 300 from a position
outside the cup 307 of the coating portion 301 on one end to a
position outside the cup 307 of the coating portion 301 on the
other end. The supply nozzle 310 is also capable of moving
vertically. Thus, the supply nozzle 310 is capable of supplying a
resist liquid to any one of the center portions of wafers W held by
the spin chucks 305 of the coating portions 301 to 303.
[0057] Reference numeral 313 denotes a stand-by area for the supply
nozzle 310 disposed outside the coating portion 301 on one end.
[0058] Reference numeral 314 denotes a filter unit mounted on the
ceiling of the processing container 300; and reference numeral 315
denotes an exhaust unit mounted on the bottom of the processing
container 300. The atmosphere in the processing container 300 is
discharged by means of the exhaust unit 315 at a predetermined flow
rate while clean air whose temperature and humidity are controlled
is supplied into the processing container 300 through the filter
unit 314 at a predetermined flow rate, whereby clean-air downflow
is formed in the processing container 300 and the pressure in the
processing container 300 is maintained at a value slightly higher
than that in the transfer area R1 for the main arm A2. Reference
numeral 316 denotes wafer carrying-in-and-out ports which are
formed in the side, facing the transfer area R1, of the processing
container 300. The carrying-in-and-out ports 316 correspond to the
coating portions 301, 302 and 303, respectively.
[0059] At the coating unit 31, a wafer W is carried into the
processing container 300 through a carrying-in-and-out port 316,
and is transferred to the spin chuck 315 of one of the coating
portions 301, 302 and 303. The supply nozzle 310 supplies a resist
liquid onto the center portion of the wafer W and the spin chuck
305 rotates, whereby the resist liquid spreads in radial directions
of the wafer W and thus a liquid film of the resist is formed on
the surface of the wafer W. The wafer W, on which the liquid film
of the resist is thus formed, is carried out of the coating unit 31
through the carrying-in-and-out port 316.
[0060] With the coating unit 31, as three coating portions 301 to
303 is arranged in one common processing container 301, the process
atmospheres in respective coating portions are the same. Thus, one
supply nozzle 310 may be shared by the three coating portions to
supply these coating portions with a resist liquid. The arrangement
achieves reduction in the total number of the component parts and
the footprint of the coating unit, as compared with the case where
each of the coating portions 301 to 303 has individual processing
container 300 and supply nozzle 310.
[0061] Referring back to FIG. 1, the coating and developing
apparatus has a control unit 50. Processing modes of the coating
and developing apparatus can be specified by the control unit 50.
The term "processing mode" may be regarded as a set of units which
a wafer W sequentially goes through when the wafer W is transferred
through the process block S2. Specifying of the process mode may be
executed by: (i) sequentially specifying (inputting) the units
which a wafer W should sequentially go through; (ii) sequentially
specifying (inputting) the unit blocks which a wafer W should
sequentially go through; or (iii) selecting a desired process type
from the process menu. In the case (iii), a set of units (or unit
blocks) which a wafer W should go through are determined beforehand
in correspondence to respective process types; upon selecting a
process type from the process menu, a set of units, which a wafer W
should sequentially go through when the wafer W is transferred, is
automatically specified. The control unit 50 may have the following
function: even if a certain unit block is selected to process a
certain wafer W, in a case where the process schedule in a certain
unit of said certain unit block for processing said certain wafer W
overlaps the process schedule for another wafer W, the control unit
50 automatically designates another unit in said certain unit block
having the same function as that of said certain unit in order to
process said certain wafer W.
[0062] The process modes may be illustrated as follows: [0063] (1)
Process mode M1 in which a wafer W is transferred to the BCT layer
B3 of the first unit-block stack 41, and the COT layer B6 of the
second unit-block stack 42, in that order; [0064] (2) Process mode
M2 in which a wafer W is transferred to the COT layer B2 of the
first unit-block stack 41, and the TCT layer B5 of the second
unit-block stack 42, in that order; [0065] (3) Process mode M3 in
which a wafer W is transferred to the BCT layer B3 of the first
unit-block stack 41, the COT layer B6 of the second unit-block
stack 42, and the TCT layer B5 of the second unit-block stack 42,
in that order; [0066] (4) Process mode M4 in which a wafer W is
transferred to the BCT layer B3 of the first unit-block stack 41,
the COT layer B2 of the first unit-block stack 41, and the TCT
layer B5 of the second unit-block stack 42, in that order; [0067]
(5) Process mode M5 in which only the COT layer B2 of the first
unit-block stack 41; and [0068] (6) Process mode M6 in which only
the COT layer B6 of the second unit-block stack 42.
[0069] Although only the processes before exposure are described in
connection with the process modes (1) to (6), it should be noted
that the wafer W is transferred to the exposure apparatus S4 where
the wafer W is exposed, and the wafer W is transferred to the DEV
layer B4 or the DEV layer B1 where the wafer W is developed,
regardless of which process mode is selected.
[0070] Next, the operation of the coating and developing apparatus
will be described. The description will be made assuming that the
process mode M1 is selected by the control unit 50. A carrier 20 is
carried into the carrier block S1 from the outside the apparatus. A
wafer W is removed from the carrier 20 by the transfer arm C. The
wafer W is transferred from the transfer arm C to the transfer
stage TRS3 of the unit stack U5, and then is transferred to the
main arm A3 of the BCT layer B3 of the first unit-block stack 41.
In the BCT layer B3, the wafer W is sequentially transferred to the
cooling unit (COL, not shown), the antireflective film forming unit
(not shown) and the heating unit (CHP, not shown) in that order by
the main arm A3, whereby a first antireflective film is formed on
the wafer W. Note that the antireflective film forming unit has
essentially the same structure as the coating unit 31 shown in
FIGS. 1, 4 and 5; and although the arrangement of the processing
units in the BCT layer B3 are not shown, those skilled in the art
can readily understand the transferring operation of the wafer W in
the BCT layer B3, since the arrangement of the BCT layer B3 is
essentially the same as that of the COT layer B2 shown in FIG. 4 as
previously described.
[0071] Next, the wafer W is transferred to the intermediate stage
TRS8 of the unit stack U6 by the main arm A3, and then is
transferred to the main arm A6 of the COT layer B6 of the second
unit-block stack 42. In the COT layer B6, the wafer is sequentially
transferred to the hydrophobizing unit (ADH, not shown), the
cooling unit (COL, not shown), the coating unit 31 (not shown) and
the heating unit (CHP, not shown) in that order by the main arm A6,
whereby a resist film is formed on the wafer W. The wafer W is
further transferred by the main arm A6 to the edge exposure unit
(WEE, not shown), in which the peripheral edge portion of the wafer
W is exposed. Thereafter, the wafer W is transferred to the
transfer stage TRS11 by the main arm A6, and is transferred to the
exposure apparatus S4, in which the wafer W is subjected to a
predetermined exposure process. Note that although the arrangement
of the processing units in the COT layer B6 are not shown, those
skilled in the art can readily understand the transferring
operation of the wafer W in the COT layer B6, since the arrangement
of the COT layer B6 is essentially the same as that of the COT
layer B2 shown in FIG. 4 as previously described. In FIG. 6, the
flow of the wafer W in the process mode M1 is shown by solid
arrows.
[0072] The exposed wafer W is transferred to the transfer stage
TRS9 of the unit stack U6 by the interface arm 62, and is received
by the main arm A4 of the DEV layer B4. In the DEV layer B4, the
wafer W is sequentially transferred to the heating nit (PEB, not
shown), the cooling unit (COL, not shown), the developing unit (not
shown) and the heating unit (POST, not shown) in that order by the
main arm A4, whereby the wafer W is subjected to a predetermined
developing process. The wafer W thus developed is transferred to
the main arm Al of the DEV layer B1 through the intermediate stage
TRS6 of the unit stack U6, and then is transferred to the transfer
arm C through the transfer stage TRS1 of the unit stack U5, and is
returned to the original carrier 20 placed on the carrier block S1.
Note that although the arrangement of the processing units in the
DEV layer B4 are not shown, those skilled in the art can readily
understand the transferring operation of the wafer W in the DEV
layer B4, since the arrangement of the DEV layer B4 is essentially
the same as that of the COT layer B2 shown in FIG. 4 as previously
described. Instead of performing the developing process in the DEV
layer B4, the wafer W may be transferred to the DEV layer B1
through the DEV layer B4 and thus may be developed in the DEV layer
B1. As the developing process requires a longer processing time
than the antireflective film forming process and the resist film
forming process, both the DEV layers B1 and B4 are generally
used.
[0073] The description will be made assuming that the process mode
M2 is selected. In this case, a wafer W held in a carrier 20 is
transferred to the transfer stage TRS2 of the unit stack U5 by the
transfer arm C, is received by the main arm A2 of the
[0074] COT layer B2, and is subjected to a resist film forming
process in the COT layer B2. Then, the wafer W is transferred
through the intermediate stage TRS7 of the unit stack U6 to the
main arm AS of the TCT layer B5, in which layer the wafer W is
subjected to a series of process steps identical with the process
steps performed in the BCT layer B3 in the process mode M1, whereby
an antireflective film is formed on the resist film. In FIG. 6, the
flow of the wafer W in the process mode M2 is indicated by
chain-dotted arrows. Then, the wafer W is transferred to the
transfer stage TRS10 of the unit stack U7, and thereafter the wafer
W is subjected to the same transferring operation and process as
those in the process mode M1.
[0075] The description will be made assuming that the process mode
M3 is selected. In this case, an antireflective film is formed on a
wafer W in the BCT layer B3 of the first unit-block stack 41, and
subsequently the wafer W is transferred through the intermediate
stage TRS8 of the unit stack U6 to the COT layer B6 of the second
unit-block stack 42, in which a resist film is formed on the wafer
W. Until this point, the same procedure as that in the process mode
M1 is performed. Then, the wafer W is transferred to the transfer
stage TRS11 of the unit stack U7, and subsequently is transferred
to the transfer stage TRS10 by the transfer arm 61. Thereafter, the
wafer W is received by the main arm A5 of the TCT layer B5, and an
antireflective film is then formed on the resist film formed on the
wafer W in the TCT layer B5. Then, the wafer W is transferred to
the transfer stage TRS10 of the unit stack U7, and thereafter the
wafer W is subjected to the same transfer operation and process as
those in the process mode M2. In FIG. 6, the flow of the wafer W in
the process mode M3 is indicated by broken arrows.
[0076] Next, the description will be made assuming that the process
mode M4 is selected. In this case, although a wafer W is
sequentially transferred to the BCT layer B3 of the first
unit-block stack 41, the COT layer B2 of the first unit-block stack
41 and the TCT layer B5 of the second unit-block stack 42 in that
order, the wafer W is subjected to the same process steps as those
in the process mode M3. If the process mode M5 or the process mode
M6 is selected, only the COT layer B2 or the COT layer B6 is used,
and a wafer W having only a resist film formed thereon is
transferred to the exposure apparatus S4.
[0077] In the foregoing first embodiment: (a) the processing units
relating to a liquid process and the transfer means are integrated
to form a unit block; (b) the unit blocks relating to pre-exposure
coating processes (the COT layers B2 and B6, the BCT layer B3 and
the TCT layer B5) and the unit blocks relating to post-exposure
developing process (the DEV layers B1 and B4) are vertically
separated from each other; (c) the unit blocks for pre-exposure
coating processes are allocated, with respect to the front-and-rear
direction, to the first unit-block stack 41 and the second
unit-block stack 42; (d) the wafer transfer path is different from
each other among the case where an antireflective film is formed
only above the resist film, the case where an antireflective film
is formed only under the resist film and the case where
antireflective films are formed both above and under the resist
film. As a substrate before exposure is transferred by a transfer
means different from a transfer means for transferring a substrate
after exposure in the process block S2, high transferring
efficiency can be achieved. The height of the coating and
processing apparatus can be reduced as compared with the case where
all the unit blocks involving the coating processes are aligned in
one vertical row. Thus, the maintenance of the coating and
developing apparatus can be readily performed. The footprint of the
coating and processing apparatus can be reduced as compared with
the case where all the unit blocks involving the coating processes
are arranged in one layer.
[0078] In addition, in the foregoing first embodiment, as the
intermediate stage TRS7 or TRS8 is disposed between the unit blocks
of the unit-block stacks 41 and 42 of the same level (between B3
and B6; or between B2 and B5), a wafer W can be transferred between
the unit blocks of the same level by means of the transfer means
arranged in the respective unit blocks. Thus, the provision of a
transfer means exclusively for transferring a wafer W between the
unit-block stacks 41 and 42 is not necessary, simplifying the
structure of the transfer system. In the illustrated embodiment,
although only one intermediate stage TRS7 and only one intermediate
stage TRS8 are provided, each of the intermediate stages TRS7 and
TRS8 may number plural to match the throughput of the respective
unit blocks (between B3 and B6; or between B2 and B5) with each
other. Note that it is enough if each of the stages TRS1 to 11 is
configured so that a wafer is can be temporarily placed thereon and
the main arm can place a wafer thereon and remove a wafer
therefrom.
[0079] FIG. 7 shows an essential part of a coating and developing
apparatus in a second embodiment of the present invention. In the
second embodiment, the exposure apparatus S4 connected to the
coating and developing apparatus is an immersion exposure apparatus
that exposes a wafer W while a liquid film is formed on the surface
of the wafer. Corresponding thereto, the coating and developing
apparatus is further includes a unit block (DCT layer) B7 having a
water-shedding protective film coating unit, or a liquid processing
unit, that forms a water-shedding protective film on a wafer W
before exposure. The DCT layer B7 is disposed in one of the first
and second unit-block stacks 41 and 42 (in the illustrated
embodiment, the second unit-block stack 42). The water-shedding
protective film prevents the liquid from penetrating through the
resist film during the immersion exposure process. The unit block
B7 may be provided with a cleaning unit for removing the protective
film after exposure, for removing particles adhered to the wafer W
before or after exposure, and for removing components adversely
affecting the exposure process.
[0080] In the second embodiment, a wafer W removed from the
transfer stage TRS10 or TRS11 of the unit stack U7 is transferred
by the interface arm 62 (or the transfer arm 61) to the transfer
stage TRS12, then is transferred to the main arm A7 of the DCT
layer B7, and then a water-shedding protective film is formed on
the wafer W in the DCT layer B7. Thereafter, the wafer W is
transferred to the interface arm 62 through the transfer stage
TRS12, and then is transferred to the exposure apparatus S4.
[0081] FIGS. 8 and 9 show an essential part of a coating and
developing apparatus in a third embodiment of the present
invention. In the third embodiment, a transfer arm 63 is arranged
adjacent to the unit stack U6 between the first unit-block stack 41
and the second unit-block stack 42; and the transfer arm 62
arranged adjacent to the unit stack U7 in the first embodiment is
replaced with the transfer arm 63 having the same task as that of
the transfer arm 62. The transfer arm is configured to move
vertically between a level corresponding to the uppermost unit
blocks of the first and the second unit-block stacks 41 and 42 and
a level corresponding to the lowermost unit blocks of the first and
the second unit-block stacks 41 and 42. In the third embodiment,
intermediate stages in the unit stack U6 are used to transfer a
wafer W between unit blocks in the second unit-block stack 42
(e.g., between the COT layer B6 and TCT layer B5) by using the
transfer arm 63. To this end, the unit stack U6 includes: two
intermediate stages TRS 6 stacked up and arranged between the unit
blocks B1 and B4; two intermediate stages TRS 7 stacked up and
arranged between the unit blocks B2 and B5; and two intermediate
stages TRS 8 stacked up and arranged between the unit blocks B3 and
B6. Note that, in FIG. 9, the intermediate stages overlap the
transfer arm 63, and are not shown for the simplicity of the
drawing.
[0082] FIG. 10 shows an essential part of a coating and developing
apparatus in a fourth embodiment of the present invention. In this
embodiment, the first unit-block stack 41 comprises a stack of a
DEV layer B1 and a BCT layer B3, and the second unit-block stack 42
comprises a stack of a TCT layer B5 and a COT layer B6.
[0083] In the foregoing embodiments, the lowermost unit blocks of
the first and second unit-block stacks 41 and 42 are DEV layers,
but are not limited thereto. The lowermost unit block of the second
unit-block stack 42 may be a unit block for inspection. If the
exposure apparatus S4 is an immersion exposure apparatus, a
cleaning unit, or a liquid processing unit, for removing a
water-shedding protective film after exposure, for removing
particles adhered to the wafer W before or after exposure, and for
removing components adversely affecting the exposure process may be
provided in the lowermost unit block of the second unit-block stack
42.
[0084] If the aforementioned unit block is used as a unit block for
inspection, the unit block is provided with inspection units for
inspecting the wafer conditions and a main arm for transferring a
wafer to and from each of the inspection units, in place of the
heating unit and the cooling unit. Inspections to be made before
exposure include an inspection of the coating film thickness and an
inspection of impurities, for example. Inspections to be made after
exposure include an inspection of overlay accuracy, for example. A
unit provided in a unit block for inspection is not limited to an
inspection unit, and may be an alignment-mark detection unit or a
unit for removing a part of the film by a laser beam process.
[0085] Concrete examples of the inspection unit to be provided in
the unit block for inspection are as follows: [0086] a film
thickness inspection unit for measuring the thickness of a film
coated on a wafer W; [0087] an uneven coating inspection unit for
detecting uneven coating of a resist liquid; [0088] a cleaning unit
for clean a substrate before and/or after exposure; [0089] a
defocusing inspection unit for detecting the offset of the pattern
occurred in the exposure apparatus; [0090] a development defect
inspection unit for detecting defects in the development process;
[0091] a comet inspection unit for detecting comets generated on
the surface of a wafer W after coated with a resist liquid
generated due to the existence of bubbles or impurities in the
resist liquid; [0092] a splash-back inspection unit for detecting
splash-backs generated due to the re-attachment of a solvent of a
resist liquid once thrown out from the wafer W surface; [0093] a
common defect inspection unit for detecting a common defect
appearing at the same location on wafer W surfaces and having the
same shape; [0094] a scum inspection unit for detecting resist
residue remaining on a wafer W after development; [0095] a
No-resist/No-development inspection unit (failure inspection unit)
for detecting the failure in executing a resist coating process
and/or a development process; [0096] a line-width measurement unit
for measuring the line width of a resist film formed on a wafer W;
and [0097] an overlay accuracy inspection unit for inspecting the
overlay accuracy between a wafer W exposed by an exposure apparatus
and a photomask by comparing it with a reference value.
[0098] The unit block for inspection may be provided at least one
of the above.
[0099] The coating and developing apparatus according to the
present invention may be such that it performs coating and
developing processes to a substrate other than a semiconductor
wafer, such as a glass substrate (LCD substrate) for a liquid
crystal display.
* * * * *