loadpatents
Patent applications and USPTO patent grants for Ueda; Issei.The latest application filed is for "substrate processing apparatus".
Patent | Date |
---|---|
Substrate processing apparatus Grant 9,666,463 - Morikawa , et al. May 30, 2 | 2017-05-30 |
Substrate transfer device, substrate processing apparatus, and substrate accommodation method Grant 9,373,531 - Murata , et al. June 21, 2 | 2016-06-21 |
Substrate Processing Apparatus App 20150187621 - Morikawa; Katsuhiro ;   et al. | 2015-07-02 |
Substrate processing apparatus Grant 8,978,670 - Minamida , et al. March 17, 2 | 2015-03-17 |
Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program Grant 8,845,262 - Murata , et al. September 30, 2 | 2014-09-30 |
Substrate Transfer Device, Substrate Processing Apparatus, And Substrate Accommodation Method App 20140234058 - Murata; Akira ;   et al. | 2014-08-21 |
Substrate processing apparatus Grant 8,662,811 - Minamida , et al. March 4, 2 | 2014-03-04 |
Coating/developing device and method Grant 8,408,158 - Akimoto , et al. April 2, 2 | 2013-04-02 |
Coating and developing apparatus Grant 8,302,556 - Akimoto , et al. November 6, 2 | 2012-11-06 |
Substrate processing system Grant 8,206,076 - Ueda , et al. June 26, 2 | 2012-06-26 |
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium Storing Substrate Processing Program App 20110311340 - Murata; Akira ;   et al. | 2011-12-22 |
Substrate Processing Apparatus App 20110103923 - Minamida; Junya ;   et al. | 2011-05-05 |
Substrate Processing Apparatus App 20110079252 - MINAMIDA; Junya ;   et al. | 2011-04-07 |
Coating And Developing Apparatus App 20100326353 - AKIMOTO; Masami ;   et al. | 2010-12-30 |
Coating And Developing Apparatus App 20100300353 - AKIMOTO; Masami ;   et al. | 2010-12-02 |
Coating and developing apparatus Grant 7,793,609 - Akimoto , et al. September 14, 2 | 2010-09-14 |
Substrate Processing System App 20090003825 - Ueda; Issei ;   et al. | 2009-01-01 |
Coating and developing system and coating and developing method Grant 7,281,869 - Akimoto , et al. October 16, 2 | 2007-10-16 |
Coating and developing system and coating and developing method Grant 7,267,497 - Akimoto , et al. September 11, 2 | 2007-09-11 |
Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning Grant 7,245,348 - Akimoto , et al. July 17, 2 | 2007-07-17 |
Coating and developing system and coating and developing method Grant 7,241,061 - Akimoto , et al. July 10, 2 | 2007-07-10 |
Coating and developing apparatus App 20070056514 - Akimoto; Masami ;   et al. | 2007-03-15 |
Coating/developing Device And Method App 20060201423 - Akimoto; Masami ;   et al. | 2006-09-14 |
Coating and developing system and coating and developing method App 20060165409 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing system and coating and developing method App 20060164613 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing system and coating and developing method App 20060162858 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing system and coating and developing method App 20060162646 - Akimoto; Masami ;   et al. | 2006-07-27 |
Processing system Grant 6,919,913 - Inada , et al. July 19, 2 | 2005-07-19 |
Substrate processing apparatus and substrate processing method Grant 6,746,197 - Kimura , et al. June 8, 2 | 2004-06-08 |
Treatment solution supply method and treatment solution supply unit Grant 6,726,771 - Ueda April 27, 2 | 2004-04-27 |
Substrate processing apparatus and substrate processing method Grant 6,672,779 - Ueda , et al. January 6, 2 | 2004-01-06 |
Substrate processing apparatus and substrate processing method Grant 6,656,281 - Ueda , et al. December 2, 2 | 2003-12-02 |
Substrate treatment system, substrate transfer system, and substrate transfer method Grant 6,655,891 - Ueda , et al. December 2, 2 | 2003-12-02 |
Substrate processing apparatus and substrate processing method App 20030012575 - Ueda, Issei ;   et al. | 2003-01-16 |
Substrate processing apparatus and substrate processing method App 20020182040 - Kimura, Yoshio ;   et al. | 2002-12-05 |
Substrate processing apparatus and substrate processing method Grant 6,471,422 - Ueda , et al. October 29, 2 | 2002-10-29 |
Multistage spin type substrate processing system Grant 6,444,029 - Kimura , et al. September 3, 2 | 2002-09-03 |
Substrate processing apparatus and substrate processing method App 20020118973 - Ueda, Issei ;   et al. | 2002-08-29 |
Substrate processing apparatus and substrate processing method Grant 6,439,822 - Kimura , et al. August 27, 2 | 2002-08-27 |
Substrate treatment system, substrate transfer system, and substrate transfer method App 20020106268 - Ueda, Issei ;   et al. | 2002-08-08 |
Substrate treatment system, substrate transfer system, and substrate transfer method Grant 6,425,722 - Ueda , et al. July 30, 2 | 2002-07-30 |
Treatment solution supply method and treatment solution supply unit App 20020092559 - Ueda, Issei | 2002-07-18 |
Substrate processing apparatus App 20020088544 - Ueda, Issei ;   et al. | 2002-07-11 |
Heat and cooling treatment apparatus and substrate processing system Grant 6,402,508 - Harada , et al. June 11, 2 | 2002-06-11 |
Substrate processing apparatus Grant 6,402,400 - Ueda , et al. June 11, 2 | 2002-06-11 |
Substrate processing apparatus Grant 6,379,056 - Ueda April 30, 2 | 2002-04-30 |
Treatment solution supply method Grant 6,340,643 - Ueda January 22, 2 | 2002-01-22 |
Substrate processing apparatus Grant 6,290,405 - Ueda September 18, 2 | 2001-09-18 |
Treatment solution supply method and treatment solution supply unit App 20010016427 - Ueda, Issei | 2001-08-23 |
Heat and cooling treatment apparatus and substrate processing system App 20010013515 - Harada, Koji ;   et al. | 2001-08-16 |
Apparatus for processing a substrate Grant 6,161,969 - Kimura , et al. December 19, 2 | 2000-12-19 |
Substrate processing apparatus having an interface section including two stacked substrate waiting table Grant 6,126,703 - Akimoto , et al. October 3, 2 | 2000-10-03 |
Substrate treatment system, substrate transfer system, and substrate transfer method Grant 6,074,154 - Ueda , et al. June 13, 2 | 2000-06-13 |
Substrate processing system Grant 5,826,129 - Hasebe , et al. October 20, 1 | 1998-10-20 |
Substrate transfer apparatus Grant 5,711,646 - Ueda , et al. January 27, 1 | 1998-01-27 |
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