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name:-0.029353857040405
name:-0.046360969543457
name:-0.0022671222686768
Ueda; Issei Patent Filings

Ueda; Issei

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ueda; Issei.The latest application filed is for "substrate processing apparatus".

Company Profile
1.37.22
  • Ueda; Issei - Koshi JP
  • Ueda; Issei - Koshi City JP
  • Ueda; Issei - Kumamoto JP
  • Ueda; Issei - Kikuchi-gun JP
  • Ueda; Issei - Koshi-Shi JP
  • Ueda; Issei - Koshi-Machi JP
  • Ueda; Issei - Kumamoto-ken JP
  • Ueda, Issei - Kumamoto-shi JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Substrate processing apparatus
Grant 9,666,463 - Morikawa , et al. May 30, 2		2017-05-30
Substrate transfer device, substrate processing apparatus, and substrate accommodation method
Grant 9,373,531 - Murata , et al. June 21, 2		2016-06-21
Substrate Processing Apparatus
App 20150187621 - Morikawa; Katsuhiro ;   et al.		2015-07-02
Substrate processing apparatus
Grant 8,978,670 - Minamida , et al. March 17, 2		2015-03-17
Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program
Grant 8,845,262 - Murata , et al. September 30, 2		2014-09-30
Substrate Transfer Device, Substrate Processing Apparatus, And Substrate Accommodation Method
App 20140234058 - Murata; Akira ;   et al.		2014-08-21
Substrate processing apparatus
Grant 8,662,811 - Minamida , et al. March 4, 2		2014-03-04
Coating/developing device and method
Grant 8,408,158 - Akimoto , et al. April 2, 2		2013-04-02
Coating and developing apparatus
Grant 8,302,556 - Akimoto , et al. November 6, 2		2012-11-06
Substrate processing system
Grant 8,206,076 - Ueda , et al. June 26, 2		2012-06-26
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium Storing Substrate Processing Program
App 20110311340 - Murata; Akira ;   et al.		2011-12-22
Substrate Processing Apparatus
App 20110103923 - Minamida; Junya ;   et al.		2011-05-05
Substrate Processing Apparatus
App 20110079252 - MINAMIDA; Junya ;   et al.		2011-04-07
Coating And Developing Apparatus
App 20100326353 - AKIMOTO; Masami ;   et al.		2010-12-30
Coating And Developing Apparatus
App 20100300353 - AKIMOTO; Masami ;   et al.		2010-12-02
Coating and developing apparatus
Grant 7,793,609 - Akimoto , et al. September 14, 2		2010-09-14
Substrate Processing System
App 20090003825 - Ueda; Issei ;   et al.		2009-01-01
Coating and developing system and coating and developing method
Grant 7,281,869 - Akimoto , et al. October 16, 2		2007-10-16
Coating and developing system and coating and developing method
Grant 7,267,497 - Akimoto , et al. September 11, 2		2007-09-11
Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning
Grant 7,245,348 - Akimoto , et al. July 17, 2		2007-07-17
Coating and developing system and coating and developing method
Grant 7,241,061 - Akimoto , et al. July 10, 2		2007-07-10
Coating and developing apparatus
App 20070056514 - Akimoto; Masami ;   et al.		2007-03-15
Coating/developing Device And Method
App 20060201423 - Akimoto; Masami ;   et al.		2006-09-14
Coating and developing system and coating and developing method
App 20060165409 - Akimoto; Masami ;   et al.		2006-07-27
Coating and developing system and coating and developing method
App 20060164613 - Akimoto; Masami ;   et al.		2006-07-27
Coating and developing system and coating and developing method
App 20060162858 - Akimoto; Masami ;   et al.		2006-07-27
Coating and developing system and coating and developing method
App 20060162646 - Akimoto; Masami ;   et al.		2006-07-27
Processing system
Grant 6,919,913 - Inada , et al. July 19, 2		2005-07-19
Substrate processing apparatus and substrate processing method
Grant 6,746,197 - Kimura , et al. June 8, 2		2004-06-08
Treatment solution supply method and treatment solution supply unit
Grant 6,726,771 - Ueda April 27, 2		2004-04-27
Substrate processing apparatus and substrate processing method
Grant 6,672,779 - Ueda , et al. January 6, 2		2004-01-06
Substrate processing apparatus and substrate processing method
Grant 6,656,281 - Ueda , et al. December 2, 2		2003-12-02
Substrate treatment system, substrate transfer system, and substrate transfer method
Grant 6,655,891 - Ueda , et al. December 2, 2		2003-12-02
Substrate processing apparatus and substrate processing method
App 20030012575 - Ueda, Issei ;   et al.		2003-01-16
Substrate processing apparatus and substrate processing method
App 20020182040 - Kimura, Yoshio ;   et al.		2002-12-05
Substrate processing apparatus and substrate processing method
Grant 6,471,422 - Ueda , et al. October 29, 2		2002-10-29
Multistage spin type substrate processing system
Grant 6,444,029 - Kimura , et al. September 3, 2		2002-09-03
Substrate processing apparatus and substrate processing method
App 20020118973 - Ueda, Issei ;   et al.		2002-08-29
Substrate processing apparatus and substrate processing method
Grant 6,439,822 - Kimura , et al. August 27, 2		2002-08-27
Substrate treatment system, substrate transfer system, and substrate transfer method
App 20020106268 - Ueda, Issei ;   et al.		2002-08-08
Substrate treatment system, substrate transfer system, and substrate transfer method
Grant 6,425,722 - Ueda , et al. July 30, 2		2002-07-30
Treatment solution supply method and treatment solution supply unit
App 20020092559 - Ueda, Issei		2002-07-18
Substrate processing apparatus
App 20020088544 - Ueda, Issei ;   et al.		2002-07-11
Heat and cooling treatment apparatus and substrate processing system
Grant 6,402,508 - Harada , et al. June 11, 2		2002-06-11
Substrate processing apparatus
Grant 6,402,400 - Ueda , et al. June 11, 2		2002-06-11
Substrate processing apparatus
Grant 6,379,056 - Ueda April 30, 2		2002-04-30
Treatment solution supply method
Grant 6,340,643 - Ueda January 22, 2		2002-01-22
Substrate processing apparatus
Grant 6,290,405 - Ueda September 18, 2		2001-09-18
Treatment solution supply method and treatment solution supply unit
App 20010016427 - Ueda, Issei		2001-08-23
Heat and cooling treatment apparatus and substrate processing system
App 20010013515 - Harada, Koji ;   et al.		2001-08-16
Apparatus for processing a substrate
Grant 6,161,969 - Kimura , et al. December 19, 2		2000-12-19
Substrate processing apparatus having an interface section including two stacked substrate waiting table
Grant 6,126,703 - Akimoto , et al. October 3, 2		2000-10-03
Substrate treatment system, substrate transfer system, and substrate transfer method
Grant 6,074,154 - Ueda , et al. June 13, 2		2000-06-13
Substrate processing system
Grant 5,826,129 - Hasebe , et al. October 20, 1		1998-10-20
Substrate transfer apparatus
Grant 5,711,646 - Ueda , et al. January 27, 1		1998-01-27

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