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Treatment solution supply apparatus and substrate treatment system Grant 10,807,027 - Ichino , et al. October 20, 2 | 2020-10-20 |
Method for producing L-amino acid Grant 10,767,200 - Suzuki , et al. Sep | 2020-09-08 |
Treatment Solution Supply Apparatus And Substrate Treatment System App 20190076763 - ICHINO; Katsunori ;   et al. | 2019-03-14 |
Method for Producing L-Amino Acid App 20190040429 - Suzuki; Kisho ;   et al. | 2019-02-07 |
Coating and developing apparatus and method, and storage medium Grant 9,460,947 - Matsuoka , et al. October 4, 2 | 2016-10-04 |
Coating and developing apparatus and method Grant 9,417,529 - Matsuoka , et al. August 16, 2 | 2016-08-16 |
Coating And Developing Apparatus And Method App 20150219994 - MATSUOKA; Nobuaki ;   et al. | 2015-08-06 |
Coating and developing apparatus and method Grant 8,985,880 - Matsuoka , et al. March 24, 2 | 2015-03-24 |
Coating and developing apparatus and method Grant 8,888,387 - Matsuoka , et al. November 18, 2 | 2014-11-18 |
Coating And Developing Apparatus And Method, And Storage Medium App 20140327890 - MATSUOKA; Nobuaki ;   et al. | 2014-11-06 |
Apparatus and method of application and development Grant 8,863,373 - Matsuoka , et al. October 21, 2 | 2014-10-21 |
Coating and developing apparatus and method, and storage medium Grant 8,817,225 - Matsuoka , et al. August 26, 2 | 2014-08-26 |
Coating and developing apparatus Grant 8,740,481 - Matsuoka , et al. June 3, 2 | 2014-06-03 |
Coating And Developing Apparatus App 20130329199 - MATSUOKA; Nobuaki ;   et al. | 2013-12-12 |
Coating and developing apparatus and coating and developing method Grant 8,568,043 - Matsuoka October 29, 2 | 2013-10-29 |
Coating and developing apparatus Grant 8,534,936 - Matsuoka , et al. September 17, 2 | 2013-09-17 |
Coating and developing apparatus, coating and developing method and non-transitory tangible medium Grant 8,506,186 - Hayashi , et al. August 13, 2 | 2013-08-13 |
Coating and developing apparatus, coating and developing method and non-transitory tangible medium Grant 8,480,319 - Hayashi , et al. July 9, 2 | 2013-07-09 |
Coating and developing apparatus and method, and storage medium Grant 8,419,299 - Matsuoka , et al. April 16, 2 | 2013-04-16 |
Coating/developing device and method Grant 8,408,158 - Akimoto , et al. April 2, 2 | 2013-04-02 |
Coating/developing apparatus and coating/developing method Grant 8,342,761 - Matsuoka January 1, 2 | 2013-01-01 |
Coating and developing apparatus, substrate processing method, and storage medium Grant 8,313,257 - Matsuoka , et al. November 20, 2 | 2012-11-20 |
Coating and developing apparatus Grant 8,302,556 - Akimoto , et al. November 6, 2 | 2012-11-06 |
Substrate processing apparatus and substrate processing method Grant 8,268,384 - Matsuoka , et al. September 18, 2 | 2012-09-18 |
Coating And Developing Apparatus, Coating And Developing Method And Non-transitory Tangible Medium App 20120063765 - HAYASHI; Shinichi ;   et al. | 2012-03-15 |
Coating And Developing Apparatus And Method, And Storage Medium App 20120057861 - Matsuoka; Nobuaki ;   et al. | 2012-03-08 |
Coating And Developing Apparatus, Coating And Developing Method And Non-transitory Tangible Medium App 20120057862 - HAYASHI; Shinichi ;   et al. | 2012-03-08 |
Coating And Developing Apparatus And Method App 20120013859 - Matsuoka; Nobuaki ;   et al. | 2012-01-19 |
Coating And Developing Apparatus And Method, And Storage Medium App 20120015307 - MATSUOKA; Nobuaki ;   et al. | 2012-01-19 |
Coating And Developing Apparatus App 20120008936 - Matsuoka; Nobuaki ;   et al. | 2012-01-12 |
Coating And Developing Apparatus And Method App 20120009528 - MATSUOKA; Nobuaki ;   et al. | 2012-01-12 |
Liquid processing apparatus, liquid processing method and storage medium Grant 8,038,769 - Matsuoka October 18, 2 | 2011-10-18 |
Heating apparatus, coating and development apparatus, and heating method Grant 8,025,925 - Fukuoka , et al. September 27, 2 | 2011-09-27 |
Coating And Developing Apparatus, Substrate Processing Method, And Storage Medium App 20110211825 - MATSUOKA; Nobuaki ;   et al. | 2011-09-01 |
Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium Grant 7,997,813 - Matsuoka , et al. August 16, 2 | 2011-08-16 |
Liquid Processing Apparatus, Liquid Processing Method And Storage Medium App 20110143645 - Matsuoka; Nobuaki | 2011-06-16 |
Coating and developing apparatus, substrate processing method, and storage medium Grant 7,955,011 - Matsuoka , et al. June 7, 2 | 2011-06-07 |
Solid-state image capturing apparatus and electric information device Grant 7,952,627 - Morimoto , et al. May 31, 2 | 2011-05-31 |
Coating And Developing Apparatus And Coating And Developing Method App 20110086316 - MATSUOKA; Nobuaki | 2011-04-14 |
Liquid processing apparatus, liquid processing method and storage medium Grant 7,914,613 - Matsuoka March 29, 2 | 2011-03-29 |
Coating/developing Apparatus And Coating/developing Method App 20110043773 - MATSUOKA; Nobuaki | 2011-02-24 |
Apparatus And Method Of Application And Development App 20110032494 - MATSUOKA; Nobuaki ;   et al. | 2011-02-10 |
Substrate Processing Apparatus And Substrate Processing Method App 20110014562 - MATSUOKA; Nobuaki ;   et al. | 2011-01-20 |
Coating and developing system, coating and developing method and storage medium Grant 7,871,211 - Matsuoka , et al. January 18, 2 | 2011-01-18 |
Coating And Developing Apparatus App 20100326353 - AKIMOTO; Masami ;   et al. | 2010-12-30 |
Coating And Developing Apparatus App 20100300353 - AKIMOTO; Masami ;   et al. | 2010-12-02 |
Apparatus and method of application and development Grant 7,841,072 - Matsuoka , et al. November 30, 2 | 2010-11-30 |
Developing apparatus, developing method, coating and developing system and storage medium Grant 7,828,488 - Matsuoka November 9, 2 | 2010-11-09 |
Substrate processing apparatus and substrate processing method Grant 7,819,080 - Matsuoka , et al. October 26, 2 | 2010-10-26 |
Coating and developing apparatus Grant 7,793,609 - Akimoto , et al. September 14, 2 | 2010-09-14 |
Coating and developing system, coating and developing method and storage medium Grant 7,789,577 - Matsuoka , et al. September 7, 2 | 2010-09-07 |
Solution treatment apparatus and solution treatment method Grant 7,736,498 - Matsuoka , et al. June 15, 2 | 2010-06-15 |
Coating and developing apparatus, and coating and developing method Grant 7,661,894 - Matsuoka , et al. February 16, 2 | 2010-02-16 |
Liquid processing method and liquid processing apparatus Grant 7,640,885 - Nakashima , et al. January 5, 2 | 2010-01-05 |
Coater/developer, coating/developing method, and storage medium Grant 7,591,601 - Matsuoka , et al. September 22, 2 | 2009-09-22 |
Solution Treatment Apparatus And Solution Treatment Method App 20090214759 - Matsuoka; Nobuaki ;   et al. | 2009-08-27 |
Solution treatment apparatus and solution treatment method Grant 7,547,614 - Matsuoka , et al. June 16, 2 | 2009-06-16 |
Heat treating apparatus, heat treating method, and storage medium Grant 7,527,497 - Matsuoka May 5, 2 | 2009-05-05 |
Coating and developing system Grant 7,474,377 - Matsuoka , et al. January 6, 2 | 2009-01-06 |
Solid-state image capturing apparatus and electric information device App 20080303929 - Morimoto; Hidenori ;   et al. | 2008-12-11 |
Coating And Developing System, Coating And Developing Method And Storage Medium App 20080268383 - MATSUOKA; Nobuaki ;   et al. | 2008-10-30 |
Developing Apparatus, Developing Method, Coating And Developing System And Storage Medium App 20080267619 - MATSUOKA; Nobuaki | 2008-10-30 |
Coater/developer, Coating/developing Method, And Storage Medium App 20080266532 - MATSUOKA; Nobuaki ;   et al. | 2008-10-30 |
Coating And Developing System, Coating And Developing Method And Storage Medium App 20080241402 - MATSUOKA; Nobuaki ;   et al. | 2008-10-02 |
Coating And Developing System, Coating And Developing Method And Storage Medium App 20080241403 - MATSUOKA; Nobuaki ;   et al. | 2008-10-02 |
Coating and developing system Grant 7,403,260 - Matsuoka , et al. July 22, 2 | 2008-07-22 |
Liquid processing apparatus, liquid processing method and storage medium App 20080060516 - Matsuoka; Nobuaki | 2008-03-13 |
Coating and developing apparatus and coating and developing method Grant 7,322,756 - Akimoto , et al. January 29, 2 | 2008-01-29 |
Coating And Developing Apparatus, Substrate Processing Method, And Storage Medium App 20080014333 - Matsuoka; Nobuaki ;   et al. | 2008-01-17 |
Semiconductor manufacturing apparatus and method Grant 7,287,920 - Hayashi , et al. October 30, 2 | 2007-10-30 |
Liquid processing method and liquid processing apparatus App 20070245953 - Nakashima; Tsunenaga ;   et al. | 2007-10-25 |
Coating and developing system and coating and developing method Grant 7,281,869 - Akimoto , et al. October 16, 2 | 2007-10-16 |
Heat Treating Apparatus, Heat Treating Method, And Storage Medium App 20070218706 - Matsuoka; Nobuaki | 2007-09-20 |
Coating and developing system and coating and developing method Grant 7,267,497 - Akimoto , et al. September 11, 2 | 2007-09-11 |
Substrate processing apparatus and substrate processing method App 20070186850 - Matsuoka; Nobuaki ;   et al. | 2007-08-16 |
Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning Grant 7,245,348 - Akimoto , et al. July 17, 2 | 2007-07-17 |
Coating and developing system and coating and developing method Grant 7,241,061 - Akimoto , et al. July 10, 2 | 2007-07-10 |
Nonvolatile semiconductor memory device with erase voltage measurement Grant 7,224,618 - Matsuoka May 29, 2 | 2007-05-29 |
Substrate treating apparatus App 20070117400 - Matsuoka; Nobuaki ;   et al. | 2007-05-24 |
Coating and developing apparatus, and coating and developing method App 20070089673 - Matsuoka; Nobuaki ;   et al. | 2007-04-26 |
Coating and developing apparatus App 20070056514 - Akimoto; Masami ;   et al. | 2007-03-15 |
Semiconductor storage device, mobile electronic apparatus, and method for controlling the semiconductor storage device Grant 7,139,202 - Matsuoka , et al. November 21, 2 | 2006-11-21 |
Liquid processing method and liquid processing apparatus App 20060233952 - Nakashima; Tsunenaga ;   et al. | 2006-10-19 |
Heating apparatus, coating and development apparatus, and heating method App 20060216665 - Fukuoka; Tetsuo ;   et al. | 2006-09-28 |
Apparatus and method of application and development App 20060213052 - Matsuoka; Nobuaki ;   et al. | 2006-09-28 |
Coating and developing system App 20060201616 - Matsuoka; Nobuaki ;   et al. | 2006-09-14 |
Coating/developing Device And Method App 20060201423 - Akimoto; Masami ;   et al. | 2006-09-14 |
Coating and developing system App 20060201615 - Matsuoka; Nobuaki ;   et al. | 2006-09-14 |
Semiconductor manufacturing apparatus and method App 20060194445 - Hayashi; Shinichi ;   et al. | 2006-08-31 |
Solution treatment apparatus and solution treatment method App 20060189103 - Matsuoka; Nobuaki ;   et al. | 2006-08-24 |
Coating and developing system and coating and developing method App 20060165409 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing apparatus and coating and developing method App 20060165408 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing system and coating and developing method App 20060162646 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing system and coating and developing method App 20060162858 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing system and coating and developing method App 20060164613 - Akimoto; Masami ;   et al. | 2006-07-27 |
Semiconductor memory device with pre-sense circuits and a differential sense amplifier Grant 7,072,236 - Matsuoka July 4, 2 | 2006-07-04 |
Semiconductor memory device and portable electronic apparatus Grant 7,050,331 - Matsuoka , et al. May 23, 2 | 2006-05-23 |
Semiconductor memory device and method for programming and erasing a memory cell Grant 7,006,371 - Matsuoka February 28, 2 | 2006-02-28 |
Semiconductor memory device, method for driving the same and portable electronic apparatus Grant 6,992,930 - Matsuoka , et al. January 31, 2 | 2006-01-31 |
Nonvolatile semiconductor memory device App 20060013043 - Matsuoka; Nobuaki | 2006-01-19 |
Nonvolatile semiconductor storage apparatus having reduced variance in resistance values of each of the storage states Grant 6,985,376 - Matsuoka January 10, 2 | 2006-01-10 |
Electrically programmable and electrically erasable semiconductor memory device Grant 6,982,906 - Matsuoka , et al. January 3, 2 | 2006-01-03 |
Method of programming semiconductor memory device having memory cells and method of erasing the same Grant 6,894,929 - Matsuoka , et al. May 17, 2 | 2005-05-17 |
Semiconductor memory device and portable electronic apparatus App 20050041472 - Matsuoka, Nobuaki ;   et al. | 2005-02-24 |
Semiconductor memory device App 20050024967 - Matsuoka, Nobuaki | 2005-02-03 |
Semiconductor storage device, mobile electronic apparatus, and method for controlling the semiconductor storage device App 20040262666 - Matsuoka, Nobuaki ;   et al. | 2004-12-30 |
Semiconductor memory device and method for correcting a reference cell Grant 6,831,872 - Matsuoka December 14, 2 | 2004-12-14 |
Method of programming semiconductor memory device having memory cells and method of erasing the same App 20040228180 - Matsuoka, Nobuaki ;   et al. | 2004-11-18 |
Semiconductor memory device, method for driving the same and portable electronic appararus App 20040222452 - Matsuoka, Nobuaki ;   et al. | 2004-11-11 |
Electrically programmable and electrically erasable semiconductor memory device App 20040223372 - Matsuoka, Nobuaki ;   et al. | 2004-11-11 |
Semiconductor memory device and method for programming and erasing a memory cell App 20040114444 - Matsuoka, Nobuaki | 2004-06-17 |
Semiconductor memory device and method for correcting a reference cell App 20040109353 - Matsuoka, Nobuaki | 2004-06-10 |
Nonvolatile semiconductor storage apparatus App 20040095805 - Matsuoka, Nobuaki | 2004-05-20 |
Raised voltage generation circuit App 20020125936 - Matsuoka, Nobuaki | 2002-09-12 |