Patent | Date |
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Light control sheets and imaging systems Grant 11,131,896 - Hayashida , et al. September 28, 2 | 2021-09-28 |
Light Control Sheets And Imaging Systems App 20190227354 - HAYASHIDA; Yasushi ;   et al. | 2019-07-25 |
Apparatus and method of application and development Grant 8,863,373 - Matsuoka , et al. October 21, 2 | 2014-10-21 |
Coating/developing device and method Grant 8,408,158 - Akimoto , et al. April 2, 2 | 2013-04-02 |
Coating and developing system control method of controlling coating and developing system Grant 8,377,501 - Hayashida , et al. February 19, 2 | 2013-02-19 |
Coating and developing apparatus, substrate processing method, and storage medium Grant 8,313,257 - Matsuoka , et al. November 20, 2 | 2012-11-20 |
Coating and developing apparatus Grant 8,302,556 - Akimoto , et al. November 6, 2 | 2012-11-06 |
Substrate processing system Grant 8,206,076 - Ueda , et al. June 26, 2 | 2012-06-26 |
Wet-processing apparatus, wet-processing method and storage medium Grant 8,057,114 - Hayashida , et al. November 15, 2 | 2011-11-15 |
Coating and developing system, coating and developing method and storage medium Grant 8,025,023 - Hayashida , et al. September 27, 2 | 2011-09-27 |
Coating And Developing Apparatus, Substrate Processing Method, And Storage Medium App 20110211825 - MATSUOKA; Nobuaki ;   et al. | 2011-09-01 |
Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium Grant 7,997,813 - Matsuoka , et al. August 16, 2 | 2011-08-16 |
Coating and developing apparatus, substrate processing method, and storage medium Grant 7,955,011 - Matsuoka , et al. June 7, 2 | 2011-06-07 |
Apparatus And Method Of Application And Development App 20110032494 - MATSUOKA; Nobuaki ;   et al. | 2011-02-10 |
Substrate processing system and substrate processing method Grant 7,880,859 - Hayashida , et al. February 1, 2 | 2011-02-01 |
Coating and developing system, coating and developing method and storage medium Grant 7,871,211 - Matsuoka , et al. January 18, 2 | 2011-01-18 |
Coating And Developing Apparatus App 20100326353 - AKIMOTO; Masami ;   et al. | 2010-12-30 |
Coating And Developing Apparatus App 20100300353 - AKIMOTO; Masami ;   et al. | 2010-12-02 |
Apparatus and method of application and development Grant 7,841,072 - Matsuoka , et al. November 30, 2 | 2010-11-30 |
Coating and developing apparatus Grant 7,793,609 - Akimoto , et al. September 14, 2 | 2010-09-14 |
Coating and developing system, coating and developing method and storage medium Grant 7,789,577 - Matsuoka , et al. September 7, 2 | 2010-09-07 |
Substrate processing system, and method of control therefor, control program, and storage medium Grant 7,729,798 - Hayashida , et al. June 1, 2 | 2010-06-01 |
Coating method and coating apparatus Grant 7,678,417 - Hara , et al. March 16, 2 | 2010-03-16 |
Substrate Processing System And Substrate Processing Method App 20100063623 - Hayashida; Yasushi ;   et al. | 2010-03-11 |
Coating And Developing System Control Method Of Controlling Coating And Developing System App 20100021621 - Hayashida; Yasushi ;   et al. | 2010-01-28 |
Substrate processing system and substrate processing method Grant 7,645,713 - Hayashida , et al. January 12, 2 | 2010-01-12 |
Coating and developing system, coating and developing method and storage medium Grant 7,597,492 - Hayashida , et al. October 6, 2 | 2009-10-06 |
Coater/developer, coating/developing method, and storage medium Grant 7,591,601 - Matsuoka , et al. September 22, 2 | 2009-09-22 |
Hypoid Gear Device And Final Reduction Gear For Vehicle App 20090084211 - Aoyama; Takayuki ;   et al. | 2009-04-02 |
Coating and developing system Grant 7,474,377 - Matsuoka , et al. January 6, 2 | 2009-01-06 |
Substrate Processing System App 20090003825 - Ueda; Issei ;   et al. | 2009-01-01 |
Coating And Developing System, Coating And Developing Method And Storage Medium App 20080268383 - MATSUOKA; Nobuaki ;   et al. | 2008-10-30 |
Coater/developer, Coating/developing Method, And Storage Medium App 20080266532 - MATSUOKA; Nobuaki ;   et al. | 2008-10-30 |
Coating And Developing System, Coating And Developing Method And Storage Medium App 20080241403 - MATSUOKA; Nobuaki ;   et al. | 2008-10-02 |
Coating And Developing System, Coating And Developing Method And Storage Medium App 20080241402 - MATSUOKA; Nobuaki ;   et al. | 2008-10-02 |
Coating and developing system Grant 7,403,260 - Matsuoka , et al. July 22, 2 | 2008-07-22 |
Coating and developing system, coating and developing method and storage medium App 20080129968 - Hayashida; Yasushi ;   et al. | 2008-06-05 |
Wet-processing apparatus, wet-processing method and storage medium App 20080070164 - Hayashida; Yasushi ;   et al. | 2008-03-20 |
Coating and developing system, coating and developing method and storage medium App 20080026153 - Hayashida; Yasushi ;   et al. | 2008-01-31 |
Coating and developing apparatus and coating and developing method Grant 7,322,756 - Akimoto , et al. January 29, 2 | 2008-01-29 |
Coating And Developing Apparatus, Substrate Processing Method, And Storage Medium App 20080014333 - Matsuoka; Nobuaki ;   et al. | 2008-01-17 |
Coating and developing system and coating and developing method Grant 7,281,869 - Akimoto , et al. October 16, 2 | 2007-10-16 |
Coating and developing system and coating and developing method Grant 7,267,497 - Akimoto , et al. September 11, 2 | 2007-09-11 |
Coating and developing apparatus and coating and developing method Grant 7,262,829 - Hayashida , et al. August 28, 2 | 2007-08-28 |
Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning Grant 7,245,348 - Akimoto , et al. July 17, 2 | 2007-07-17 |
Coating and developing system and coating and developing method Grant 7,241,061 - Akimoto , et al. July 10, 2 | 2007-07-10 |
Coating and developing apparatus App 20070056514 - Akimoto; Masami ;   et al. | 2007-03-15 |
Substrate processing system and substrate processing method App 20060276046 - Hayashida; Yasushi ;   et al. | 2006-12-07 |
Substrated processing system, and method of control therefor, control program and storage medium App 20060228195 - Hayashida; Yasushi ;   et al. | 2006-10-12 |
Apparatus and method of application and development App 20060213052 - Matsuoka; Nobuaki ;   et al. | 2006-09-28 |
Coating and developing system App 20060201615 - Matsuoka; Nobuaki ;   et al. | 2006-09-14 |
Coating and developing system App 20060201616 - Matsuoka; Nobuaki ;   et al. | 2006-09-14 |
Coating/developing Device And Method App 20060201423 - Akimoto; Masami ;   et al. | 2006-09-14 |
Coating and developing apparatus and coating and developing method App 20060183340 - Hayashida; Yasushi ;   et al. | 2006-08-17 |
Coating and developing system and coating and developing method App 20060162858 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing system and coating and developing method App 20060162646 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing system and coating and developing method App 20060164613 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing system and coating and developing method App 20060165409 - Akimoto; Masami ;   et al. | 2006-07-27 |
Coating and developing apparatus and coating and developing method App 20060165408 - Akimoto; Masami ;   et al. | 2006-07-27 |
Exposure apparatus Grant 5,028,955 - Hayashida , et al. July 2, 1 | 1991-07-02 |