U.S. patent application number 09/754499 was filed with the patent office on 2002-07-04 for method and associated apparatus to mechanically enhance the deposition of a metal film within a feature.
This patent application is currently assigned to Applied Materials, Inc.. Invention is credited to Chen, Fusen, Dixit, Girish, Wang, Hougong, Zheng, Bo.
Application Number | 20020084189 09/754499 |
Document ID | / |
Family ID | 25035080 |
Filed Date | 2002-07-04 |
United States Patent
Application |
20020084189 |
Kind Code |
A1 |
Wang, Hougong ; et
al. |
July 4, 2002 |
Method and associated apparatus to mechanically enhance the
deposition of a metal film within a feature
Abstract
A method and associated apparatus of electroplating an object
and filling small features. The method comprises immersing the
plating surface into an electrolyte solution and mechanically
enhancing the concentration of metal ions in the electrolyte
solution in the features. In one embodiment, the mechanical
enhancement comprises mechanically vibrating the plating surface.
In another embodiment, the mechanical enhancement comprises
mechanically vibrating the electrolyte solution. In a further
embodiment, the mechanical enhancement comprises increasing the
pressure applied to the electrolyte solution.
Inventors: |
Wang, Hougong; (Pleasanton,
CA) ; Zheng, Bo; (San Jose, CA) ; Dixit,
Girish; (San Jose, CA) ; Chen, Fusen;
(Saratoga, CA) |
Correspondence
Address: |
Patent Counsel
APPLIED MATERIALS, INC.
P.O. Box 450-A
Santa Clara
CA
95052
US
|
Assignee: |
Applied Materials, Inc.
|
Family ID: |
25035080 |
Appl. No.: |
09/754499 |
Filed: |
January 3, 2001 |
Current U.S.
Class: |
205/98 ; 204/222;
205/137; 205/146; 236/69 |
Current CPC
Class: |
C25D 21/10 20130101;
C25D 17/001 20130101; C25D 7/123 20130101; C25D 5/08 20130101; C25D
5/20 20130101; C25D 5/003 20130101 |
Class at
Publication: |
205/98 ; 205/137;
205/146; 236/69; 204/222 |
International
Class: |
C25D 021/06; C25D
021/16; C25D 017/00 |
Claims
What is claimed is:
1. A method of electroplating a plating surface of an object, the
plating surface having features, the method comprising: immersing
the plating surface into an electrolyte solution; and mechanically
enhancing the concentration of metal ions in the electrolyte
solution contained in the features.
2. The method of claim 1, wherein the electrolyte solution is
contained in an electrolyte cell.
3. The method of claim 1, wherein the mechanical enhancement
comprises mechanically vibrating the plating surface relative to
the electrolyte solution.
4. The method of claim 1, wherein the mechanical enhancement
comprises mechanically displacing the electrolyte solution relative
to the electrolyte solution.
5. The method of claim 4, wherein the electrolyte solution is
mechanically displaced in a direction substantially perpendicular
to the plating surface.
6. The method of claim 1, wherein the mechanical enhancement
comprises applying pressure to the electrolyte solution, wherein
the electrolyte solution is in contact with the plating
surface.
7. A computer readable medium that stores software containing a
program which when executed by one or more processors, performs a
method comprising: immersing the plating surface into an
electrolyte solution; and mechanically enhancing the concentration
of metal ions in the electrolyte solution contained in the
features.
8. The computer readable medium of claim 7, wherein the electrolyte
solution is contained in an electrolyte cell.
9. The computer readable medium of claim 7, wherein the mechanical
enhancement comprises mechanically vibrating the plating surface
relative to the electrolyte solution.
10. The computer readable medium of claim 7, wherein the mechanical
enhancement comprises mechanically displacing the electrolyte
solution relative to the plating surface.
11. The computer readable medium of claim 10, wherein the
electrolyte solution is mechanically displaced in a direction
substantially perpendicular to the plating surface.
12. The computer readable medium of claim 7, wherein the mechanical
enhancement comprises applying pressure to the electrolyte
solution, wherein the electrolyte solution is in contact with the
plating surface.
13. An apparatus that electroplates a metal film on a seed layer of
a substrate, the plating surface having features, the apparatus
comprising: a substrate holder configured to hold a substrate
having features, and a seed layer formed within the features,
wherein the substrate holder immerses the seed layer in an
electrolyte solution; and a vibration system configured to
mechanically vibrate the substrate relative to the electrolyte
solution to enhance the concentration of metal ions in the
electrolyte solution contained in the features.
14. The apparatus of claim 13, wherein the electrolyte solution is
contained in an electrolyte cell.
15. The apparatus of claim 13, wherein the vibration system is
configured to vibrate the substrate.
16. The apparatus of claim 13, wherein the vibration system is
configured to mechanically displace the electrolyte solution
relative to the substrate.
17. The apparatus of claim 16, wherein the electrolyte solution is
mechanically displaced in a direction substantially perpendicular
to the seed layer on the substrate.
18. The apparatus of claim 13, wherein the vibration system
comprises a piezoelectric driver.
19. The apparatus of claim 13, wherein the vibration system
comprises a mechanical oscillatory device.
20. The apparatus of claim 13, wherein the vibration system is
applied for a duration of less than about 10 seconds.
21. The apparatus of claim 13, wherein the vibration system applies
vibration in the kHz or mHz range.
22. The apparatus of claim 13, wherein the vibration system has an
amplitude of less than or equal to about 10.mu. (microns).
23. An apparatus that electroplates a metal film on a seed layer of
a substrate, the plating surface having features, the apparatus
comprising: a substrate holder configured to hold a substrate
having features, and a seed layer formed within the features,
wherein the substrate holder immerses the seed layer in an
electrolyte solution; and a vibration system configured to
mechanically vibrate the electrolyte solution relative to the
substrate to enhance the concentration of metal ions in the
electrolyte solution contained in the features.
24. The apparatus of claim 23, wherein the electrolyte solution is
contained in an electrolyte cell.
25. The apparatus of claim 23, wherein the vibration system is
configured to vibrate the substrate.
26. The apparatus of claim 23, wherein the vibration system is
configured to mechanically displace the electrolyte solution
relative to the substrate.
27. The apparatus of claim 26, wherein the electrolyte solution is
mechanically displaced in a direction substantially perpendicular
to the seed layer on the substrate.
28. The apparatus of claim 23, wherein the vibration system
comprises a piezoelectric driver.
29. The apparatus of claim 23, wherein the vibration system
comprises a mechanical oscillatory device.
30. The apparatus of claim 23, wherein the vibration system is
applied for a duration of less than about 10 seconds.
31. The apparatus of claim 23, wherein the vibration system applies
vibration in the kHz or mHz range.
32. The apparatus of claim 23, wherein the vibration system has an
amplitude of less than or equal to about 10.mu. (microns).
33. An apparatus that electroplates a metal film on a seed layer of
a substrate, the plating surface having features, the apparatus
comprising: a substrate holder configured to hold a substrate
having features, and a seed layer formed within the features,
wherein the substrate holder immerses the seed layer in an
electrolyte solution; and a pressure inducing device configured to
apply pressure to the electrolyte solution in which the substrate
is immersed to enhance the concentration of metal ions in the
electrolyte solution contained in the feature.
34. The apparatus of claim 33, wherein the pressure inducing device
applies a pressure of above about 1.1 atmospheres to the
electrolyte solution.
35. The apparatus of claim 34, wherein the pressure inducing device
applied a pressure of about 2 atmospheres to the electrolyte
solution.
36. The apparatus of claim 34, wherein the pressure inducing device
applies a pressure of below about 10 atmospheres to the electrolyte
solution.
37. A method for electroplating a metal film on a seed layer of a
substrate, the plating surface having features, the method
comprising: immersing a substrate having features in an electrolyte
solution, wherein a seed layer is formed within the features; and
applying pressure to the electrolyte solution in which the
substrate is immersed to enhance the concentration of metal ions in
the electrolyte solution contained in the features.
38. The method of claim 37, wherein the pressure applied to the
electrolyte solution is above about 1.1 atmospheres.
39. The method of claim 38, wherein the pressure applied to the
electrolyte solution is about 2 atmospheres.
Description
BACKGROUND OF THE DISCLOSURE
[0001] 1.Field of the Invention
[0002] The invention relates to metal film deposition. More
particularly, the invention relates to enhancing deposition of a
metal film within a feature on a substrate.
[0003] 2. Description of the Background Art
[0004] As circuit densities increase, the widths of features, such
as vias, trenches, and electric contacts, as well as the width of
the dielectric materials between these features, decrease. However,
the height of the dielectric layers remains substantially constant.
Therefore, the aspect ratios of the features, i.e., the features
height or depth divided by its width, increases. The concurrent
reduction of width and increase in aspect ratio of the features
poses a challenge to traditional metal film deposition techniques
and processes because reliable formation of interconnect features
are required to increase circuit density, to permit greater power
density endured by interconnect features, and to improve the
quality of individually processed substrates.
[0005] Electroplating, previously limited in integrated circuit
design to the fabrication of lines on circuit boards, is now being
used to deposit metal films, such as copper, within features formed
in substrates. Electroplating, in general, can be performed using a
variety of techniques. One embodiment of an electroplating metal
film deposition process involves initially depositing a diffusion
barrier layer over the feature surface by a process such as
physical vapor deposition (PVD) or chemical vapor deposition (CVD).
A seed layer is then deposited on the substrate over the diffusion
barrier layer by PVD or CVD. Finally, the metal film is deposited
on the seed layer by electroplating. The metal film layer can be
planarized by a process such as chemical mechanical polishing (CMP)
to define conductive interconnect features.
[0006] Deposition of the metal film during electroplating is
accomplished by providing an electric current between the seed
layer on the substrate and a separate anode. Both the anode and the
substrate seed layer are immersed in an electrolyte solution
containing metal ions that are to be deposited on to the seed
layer. The anode also generates metal ions in the electrolyte
solution. FIGS. 2A and 2B show cross sectional views of the
progression of a deposited metal film, such as copper, within a
single feature 202 on substrate 200 that is representative of all
of the features formed on the seed layer. FIG. 2A shows a substrate
having undergone PVD or CVD processing in which a seed layer 2000
has been deposited on all the surfaces of feature 202 including the
horizontal field 204, the walls 206, and the bottom 208. FIG. 2B
shows the substrate 200 having an electroplated metal film 215
deposited on the seed layer 2000. To provide uniform electric
characteristics, it is important to deposit a substantially even
metal film 215 on those portions of the seed layer 2000 that extend
over the horizontal field 204. It is also important to deposit a
metal film that completely fills the feature 202 without any voids
or air gaps in the feature.
[0007] As the dimensions of the features decrease below sub-micron
dimensions, the dynamics associated with supplying metal ions
within the electrolyte solution into the features becomes difficult
to control. Due to the small opening (e.g., throat of the feature),
one of the technical challenges involves depositing more metal ions
into the features through the throat to form the metal film. Ion
starvation resulting from the concentration of the metal ions
supplied into the features to replace the metal ions that leave
deposited as metal film in the features is limited. As such, the
concentration of metal ions in the electrolyte solution contained
within the features requires rejuvenation. "Ion-starvation", as
shown in FIG. 2B, often occurs during plating of features having a
small dimension (i.e. less than 1 .mu.m) in which insufficient
metal ions are supplied to within the feature to limit the
concentration of metal ions in the feature. Because of
ion-starvation in the feature, the metal film deposition rate at
the throat of the channel 212 exceeds the metal film deposition
rate on the walls 206 or bottom 208 of the feature, and frequently
creates a void 214 within the feature 202. Completely filling the
features 202 with metal film is difficult because of the minute
size of the features, because the features are oriented at
different angles, and because an increased charge density causes
more deposition at the edges and corners (i.e. at throat 212) of
the features. An overhang of the seed layer 220 also leads to the
void 214. The electrical characteristics of features having a void
is unpredictable, and parts having features formed with voids are
not suitable for use in a reliable electronic device.
[0008] It is desirable to use high metal film deposition rates,
within the features and in the field surrounding the features, both
for higher processing throughput and for increased utilization of
the associated processing equipment. The deposition rates are
largely a function of the bias voltage applied to the substrate.
However, if the initial bias voltage applied to the substrate is
too high, there is an increased tendency to choke off the feature
at throat 212. Therefore, the initial bias voltage in present
electroplating systems is often reduced to approximately 0.8 volts
until such times that the features have started to fill.
[0009] In a so-called "bottom-up" electromagnetic field that is
applied through the electrolyte solution between an anode and a
seed layer during a bottom-up deposition process, the current
density and the associated metal film deposition rate on of the
bottom 208 exceeds that on the horizontal field 204 or the walls
206. The goal of bottom-up deposition is to completely fill a
feature with metal film yielding a substrate 200 having filled
features. After the feature is completely filled, all further metal
film deposition will increase the depth of the horizontal field
204.
[0010] Such bottom-up deposition processes are difficult to achieve
in practice minute size features (in the sub-micron range). During
plating in features having small dimensions, it is make it
difficult to replace metal ions in the electrolyte solution that
are deposited during the plating, to maintain a sufficient metal
ion concentration within the electrolyte solution in the feature.
As the metal ions are deposited on the surfaces of the features as
metal film, the concentration of metal ions remaining in the
electrolyte solution within the feature decreases. Maintaining the
concentration of metal ions in the electrolyte solution within the
feature is therefore important during the metal deposition process
to provide the desired deposition rate of metal film within the
features.
[0011] One technique for minimizing deposits that close off a
throat 212 before the remainder if the feature is filled is to
apply an alternative series of deposition and etch steps, i.e.
dep-etch steps. Each deposit portion of the cycle deposits metal
ions from the electrolyte solution into the features 202 and on to
the horizontal field 204, while, unfortunately, also creating
buildup at throat 212. Each etch cycle then partially etches the
metal film in the horizontal field 204 on the substrate to keep the
throat open. The deposits forming on the wall 206 and the bottom
208 are etched at a lower rate, during the etch cycle, than those
on the horizontal field 204 as a result of the minute size of the
features. However, the dep-etch technique is time consuming and
substantially reduces throughput of substrates.
[0012] Therefore, there remains a need for an ECP system that
enhances the concentration of metal ions contained in the
electrolyte solution within the features and increases the
deposition rate within those features, resulting in improved
overall processing throughput.
SUMMARY OF THE INVENTION
[0013] In one aspect, a method and associated apparatus of
electroplating an object that has small features is provided. The
method comprises immersing the plating surface into an electrolyte
solution and mechanically enhancing the concentration of metal ions
in the electrolyte solution contained in the features. In one
embodiment, the mechanical enhancement comprises mechanically
vibrating the plating surface. In another embodiment, the
mechanical enhancement comprises mechanically vibrating the
electrolyte solution. In a further embodiment, the mechanical
enhancement comprises increasing the pressure applied to the
electrolyte solution.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The teachings of the present invention can be readily
understood by considering the following detailed description in
conjunction with the accompanying drawings, in which:
[0015] FIG. 1 shows a side cross sectional view of an
electro-chemical plating (ECP) device, including one embodiment of
a vibratory inducement device;
[0016] FIG. 2A shows a side cross sectional view of a substrate
including a feature such as a via or trench;
[0017] FIG. 2B shows the substrate of FIG. 2A with a deposited
metal film;
[0018] FIG. 3A shows a side cross-sectional view of one embodiment
of a substrate holder system associated with the FIG. 1 ECP
device;
[0019] FIG. 3B shows a cross sectional view of the head assembly
included in the substrate holder system of FIG. 3A;
[0020] FIG. 4 shows an embodiment of a vibratory inducement device
located within the head assembly of the substrate holder system
shown in FIG. 3A;
[0021] FIGS. 5A-5H show a partial cross sectional view of an
exemplary progression of head assembly motions during a metal film
deposition process;
[0022] FIGS. 6A-6D show a cross sectional view of an exemplary
progression of an electroplating chamber having one embodiment
capable of applying pressure to the chamber;
[0023] FIG. 7 shows a block diagram of an embodiment of the logic
performed by a controller during operation of the head assembly
through the progression shown in FIGS. 5A to 5H; and
[0024] FIG. 8 shows an embodiment of a vibratory inducement device
located within the head assembly.
[0025] To facilitate understanding, identical reference numerals
have been used, where possible, to designate elements that are
common to the figures.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
[0026] After considering the following description, those skilled
in the art will clearly realize that the teachings of this
invention can be readily utilized in metal film deposition
applications, and more particularly to methods of enhancing the
deposition rate of a metal film on a seed layer formed on
horizontal fields and within features formed in a substrate
200.
[0027] In this disclosure, the term "enhancing" the concentration
of metal ions in the feature refers to increasing or rejuvenating
the depleted concentration of metal ions in the feature, or
otherwise increasing the concentration of metal ions in the feature
to a level that approaches, equals, or exceeds the concentration of
metal ions in the electrolyte solution outside the opening of the
feature.
[0028] Enhancing the concentration of copper ions within the
electrolyte solution that is contained within the small features
during the initial phases of metal ion deposition improves the
metal film deposition within the features, improves bottom-up
deposition integrity, and limits the generation of voids, i.e.
spaces, being formed within the features.
[0029] Several embodiments are described in this disclosure in
which the concentration of metal ions in the electrolyte solution
contained in the features is enhanced by either applying relative
vibration between the electrolyte solution and the substrate 200 or
by applying pressure to the electrolyte solution. To provide an
adequate background or these embodiments, a metal film deposition
process using an electrochemical deposition (ECP) system, i.e. as
10 in FIG. 1, is described. A substrate holder system including a
head assembly contained within the ECP device, and the operation of
the substrate older system is then described. The embodiments of
vibrational and pressure-based devices that enhance the
concentration of the metal ions within the electrolyte solution
contained in the features are then described.
[0030] 1. Electroplating Cell Configuration
[0031] FIG. 1 illustrates one embodiment of an ECP system 10 that
enhances metal film deposition on the seed layer formed in the
features 202 and on the horizontal fields 204. The ECP System 10
includes a process cell or electrolyte cell 12 having an upper
opening 13, a removable substrate holder system 14 that secures a
substrate 200 in such a manner that the substrate 200 can be
pivoted into and away from the electrolyte cell 12, and an anode 16
mounted near the bottom portion of the electrolyte cell 12.
[0032] The substrate holder system 14 shown in FIG. 1 is simplified
for ease of display. One embodiment of the substrate holder system
14 includes a head portion 64 that can hold and rotate a substrate
200 when the substrate is immersed in the electrolyte solution
contained in the electrolyte cell 12. The head portion assembly 64
can be displaced vertically, and angled to position the substrate
200 in a desired attitude to assist in the loading and unloading of
the substrate 200 into the ECP System 10. The head portion 64 may
provide additional movement, such as rotational movement of the
substrate, during the processing and/or the drying of the
substrates. The substrate holder system 14 is pivotably mounted
above the upper opening in a manner suitable for either the
substrate 200 immersion or removal. The head portion can also be
displaced to a position where substrates can be loaded or unloaded
by a robot.
[0033] In one embodiment, controller 2002 controls the electric
current/voltage supplied to the anode 16 and a contact ring 9. The
contact ring 9 is adapted to contact a seed layer formed on a
substrate 200 that has been loaded in the head portion. In a
simplified embodiment, a power supply can be used instead of the
controller 2002, and the power supply can be manually operated by a
skilled operator.
[0034] Although a semiconductor substrate is disclosed herein as
the object being electroplated, it is envisioned that different
embodiments of the system can be used to deposite metal ions on any
substrate, object, or wafer having features formed on a plating
surface and/or seed layer. In this disclosure, the term "ECP" is
intended to be applied to any system in which a metal film is
deposited on a surface under the effect of an electromagnetic
field.
[0035] The electrolyte cell 12 comprises an anode base 90 and an
upper electrolyte cell 92. The anode 16 is mounted to the anode
base 90 by anode supports 94. One or more feed throughs, that may
be contained in the anode supports, supply electrical power to the
anode. Alternatively, the sides of the anode may be mounted to the
interior sides of the electrolyte cell 12. The upper electrolyte
cell 92 is configured to ensure that electric flux lines extending
from the anode are substantially perpendicular to the substrate
200. The substantially perpendicular electric flux lines thus
enhance the uniformity of the metal ion deposition across the seed
layer on the substrate 200. The upper electrolyte cell 92 is
removably attached to anode base 90 by fasteners, and the upper
electrolyte cell 92 can be removed for anode replacement and/or
repair.
[0036] The electrolyte solution carries the metallic ions generated
by the anode 16 to the seed layer on the substrate 200. The flow of
metal ions within the electrolyte solution extends up to the
cathode, and some of the metal ions flow around the cathode. A
hydrophilic membrane 89 may be fashioned as a bag to surround the
anode 16 that is closed around the anode except for the various
pipes or connectors that connect to the anode. Alternatively, the
hydrophilic membrane could be mounted to extend horizontally across
the electrolyte cell 12 above the anode in which the hydrophilic
membrance extends around, e.g., a bracket that conforms to, and is
removably secured to, the inner periphery of the electrolyte cell.
The reaction of the electrolyte solution with the anode results in
the generation of metal ions into the electrolyte. The material of
the hydrophilic membrane 89 is selected to filter any particles or
unwanted material dislodged from the anode 16 into the electrolyte
solution, while permitting metal ions, such as copper, generated by
anode 16 to pass from the anode 16 to the substrate 200.
[0037] Electrolyte solution is supplied to electrolyte cell 12 via
electrolyte input port 80. The displaced electrolyte solution in
the electrolyte cell 12 overflows the annular lip 82 into a catch
drain 83, that in turn drains into electrolyte output 88 that is
fluidly coupled to a recirculation/refreshing element 87. The
recirculation/refreshing element 87 recirculates the electrolyte
solution contained in the electrolyte cell 12 that has been
discharged to the electrolyte output 88 and refreshes the chemicals
contained within the electrolyte solution. The use of refreshed
electrolyte solution ensures that sufficient chemicals are
contained within the electrolyte solution to perform the metal film
deposition process. In this disclosure, the term "seed layer" is
used interchangeably with the term "plating surface" as those
surfaces on the substrate on which the metal ions deposit. If there
is no recirculation within the electrolyte cell 12, eventually the
depletion region will expand until no copper ions are within
sufficient distance to be attracted to the seed layer. The
refreshed electrolyte solution input at electrolyte inlet port 80
provides a generally upward flow of electrolyte solution within the
electrolyte cell 12 that overflows the annular lip 82.
[0038] One embodiment of the chemical reactions that occur in the
embodiment of ECP system shown in FIG. 1 may be subdivided into
whether a positive bias is applied between the anode and the seed
layer to effect plating metal film on the substrate, or whether a
negative bias is applied between the anode and the seed layer to
effect deplating metal film on the substrate. An ECP system 10 is
shown in U.S. patent application Ser. No. 09/289,074, filed Apr. 8,
1999, and entitled "ELECTROCHEMICAL DEPOSITION SYSTEM"
(incorporated herein by reference in its entirety). If a sufficient
positive bias is being applied so the voltage of the seed layer is
below the voltage of the anode to effect plating on the substrate
the following exemplary chemical reactions occur:
[0039] Anode chemical reaction
2H.sub.2O.fwdarw.O.sub.2+4H.sup.30+4e.sup.-
[0040] Cathode (seed layer) chemical reaction
Cu.sup.+++2e.sup.-.fwdarw.Cu
[0041] If a sufficient negative bias is applied so the voltage of
the seed layer exceeds the voltage of the anode by a sufficient
level to effect deplating copper from the seed layer, the following
exemplary chemical reactions occur:
[0042] Anode chemical reaction
Cu.fwdarw.Cu.sup.+++2e.sup.-
[0043] Cathode (seed layer) chemical reaction
Cu.sup.+++2e.sup.-.fwdarw.Cu
[0044] The refreshed electrolyte solution output from the
recirculation/refreshing element 87 is applied to the inlet port 80
to define a closed loop that supplies and recirculates the
electrolyte solution contained within the electrolyte cell 12.
[0045] The controller 2002 shown in the embodiment of FIG. 1
controls electric voltage and/or current supplied to the anode 16
and the plating surface of the substrate/cathode 200. The
controller 2002 comprises a central processing unit (CPU) 260, a
memory 262, a circuit portion 265, an input output interface (I/O)
264, and a bus, that is not shown. The controller 2002 may be a
general-purpose computer, a microprocessor, a microcontroller, or
any other known suitable type of computer or controller. The CPU
260 performs the processing and arithmetic operations for the
controller 2002, and controls the operation of the voltage applied
to the anode 16, the plating surface 15 of the substrate 200, and
the operation of the substrate holder system 14.
[0046] The memory 262 includes random access memory (RAM) and read
only memory (ROM) that together store the computer programs,
operands, operators, dimensional values, system processing
temperatures and configurations, and other parameters that control
the electroplating operation. The bus, not shown, provides for
digital information transmissions between CPU 260, circuit portion
265, memory 262, and I/O 264. The bus also connects I/O 264 to the
portions of the ECP system 10 that either receive digital
information from, or transmit digital information to, controller
2002.
[0047] I/O 264 provides an interface to control the transmissions
of digital information between each of the components in controller
2002. Circuit portion 265 comprises all of the other user interface
devices, such as display and keyboard, system devices, and other
accessories associated with the controller 2002. While one
embodiment of digital controller 2002 is described herein, other
embodiments of digital controllers, as well as analog controllers,
could function well in this application, and are within the
intended scope of the invention.
[0048] 2. Substrate Support Assembly
[0049] FIG. 3A is a partial cross sectional view of one embodiment
of a substrate holder system 14 that is capable of translating a
substrate holder assembly 2450 in the horizontal and vertical
directions. The embodiment of a substrate holder system 14 shown in
FIG. 3A also provides for tilting of the substrate at an angle ox
from horizontal in addition to translation in horizontal and a
vertical directions. This embodiment of substrate holder assembly
provides for rotation of the substrate during immersion of the
substrate into the electrolyte solution where the substrate is held
by the substrate holder assembly 2450. The substrate holder system
14 includes a rotatable head assembly 2410 and a head assembly
frame 2452. The head assembly frame 2452 includes a mounting post
2454, a shaft 2453, a post cover 2455, a cantilever arm 2456, a
cantilever arm actuator 2457, and a pivot joint 2459. The mounting
post 2454 is mounted onto the body of the mainframe, and the post
cover 2455 covers a top portion of the mounting post 2454.
[0050] In one embodiment, the mounting post 2454 provides
rotational movement, in a direction indicated by arrow A1, to allow
for rotation of the head assembly frame 2452 about a substantially
vertical axis which extends through the mounting post 2454. Such
motion is generally provided to align the head assembly 2410 with
the electrolyte cell.
[0051] One end of the cantilever arm 2456 is pivotally connected to
the shaft 2453 of the cantilever arm actuator 2457. The cantilever
arm actuator 2457 is, for example, a pneumatic cylinder, a
lead-screw actuator, a servo-motor, or other type actuator. The
cantilever arm 2456 is pivotally connected to the mounting slide
2460 at the pivot joint 2459. The cantilever arm actuator 2457 is
mounted to the mounting post 2454. The pivot joint 2459 is
rotatably mounted to the post cover 2455 so that the cantilever arm
2456 can pivot about the post cover at the pivot joint. Actuation
of the cantilever arm actuator 2457 provides pivotal movement, in a
direction indicated by arrow A2, of the cantilever arm 2456 about
the pivot joint 2459. Alternatively, a rotary motor may be provided
as a cantilever arm actuator 2457, wherein output of a rotary motor
is connected directly between the post cover 2455 and the pivot
joint 2459. The rotary motor output effects rotation of the
cantilever arm 2456 and the head assembly 2410 about the pivot
joint.
[0052] The rotatable head assembly 2410 is attached to a mounting
slide 2460 of the head assembly frame 2452, and the mounting slide
2460 is disposed at the distal end of the cantilever arm 2456.
Rotation of the rotatable head assembly 2410 about the pivot joint
2459 causes tilting of a substrate held within the substrate holder
assembly 2450 of the rotatable head assembly 2410 about the pivot
joint 2459 relative to horizontal. When the cantilever arm actuator
2457 is retracted, the cantilever arm 2456 raises the head assembly
2410 away from the electrolyte cell 12.
[0053] Tilting of the rotatable head assembly 2410 affects tilting
of the substrate relative to the electrolyte cell 12. When the
cantilever arm actuator 2457 is extended, the cantilever arm 2456
moves the head assembly 2410 toward the electrolyte cell 12 to
angle the substrate closer to horizontal. In one embodiment, the
substrate is in a substantially horizontal position during ECP.
[0054] The rotatable head assembly 2410 includes a rotating
actuator 2464 slidably connected to the mounting slide 2460. The
mounting slide 2460 guides the vertical motion of the rotatable
head assembly 2410. A head lift actuator 2458 is disposed on the
mounting slide 2460 to provide motive force for vertical
displacement of the head assembly 2410. The shaft 2468 of the head
lift actuator 2458 is inserted through a lift guide 2466 attached
to the body of the rotating actuator 2464. In one embodiment, the
shaft 2468 is a lead-screw type shaft that moves the lift guide in
a direction indicated by arrow A3, between various vertical
positions. This lifting of the rotatable head assembly 2410 can be
used to remove and/or replace the substrate holder assembly 2450
from the electrolyte cell 12. Removing the substrate from the
process cell is necessary to position the substrate so that a robot
can remove the substrate from the rotatable head assembly 2410.
[0055] The rotating actuator 2464 is connected to the substrate
holder assembly 2450 through the shaft 2470 and rotates the
substrate holder assembly 2450 in a direction indicated by arrow
A4. Rotation of the substrate during the electroplating process
generally enhances the deposition results. In one embodiment, the
head assembly rotates the substrate about the vertical axis of the
substrate between about 0 RPM and about 200 RPM, and preferably
between about 10 and about 40 RPM, during the electroplating
process. Rotation of the substrate at a higher angular velocity may
result in turbulence within the electrolyte solution. The head
assembly can also be rotated as the head assembly is lowered to
position the substrate in contact with the electrolyte solution, as
well as when the head assembly is raised to remove the substrate
from the electrolyte solution in the process cell. The head
assembly can rotate at a high speed, e.g., up to about 2,500 RPM,
after the head assembly is lifted from the process cell, following
the removal from the electrolyte solution to enhance removal of
residual electrolyte solution on the substrate utilizing the
centrifugal force applied to the liquid on the substrate.
[0056] FIG. 3B shows a cross sectional view of one embodiment of
rotatable head assembly 2410 that can provide for the rotation of,
and the rotation of, the substrate contained in the substrate
holder system 14 of the embodiment shown in FIG. 3A. The rotatable
head assembly 2410 allows for lowering of the thrust plate 66 to
position a substrate in contact with the electric contact element
67. The thrust plate can also be raised to provide a space between
the thrust plate 66 and the electric contact element 67 to permit
removal of the substrate from, or insertion of the substrate into,
the rotatable head assembly 2410. The rotatable head assembly 2410
comprises a substrate holder assembly 2450, a rotating actuator
2464, a shaft shield 2763, a shaft 2470, an electric feed through
2767, an electric conductor 2771, and a pneumatic feed through
2773. The rotating actuator 2464 comprises a head rotation housing
2760 and a head rotation motor 2706. The head rotation motor 2706
comprises a coil segment 2775 and a magnetic rotary element 2776.
The hollow coil segment 2775 generates a magnetic field that
rotates the magnetic rotary element 2776 about a vertical axis. The
substrate holder assembly 2450 comprises a fluid shield 2720, a
contact housing 2765 a thrust plate 66, an electric contact element
67, and a spring assembly 2732.
[0057] The contact housing 2765 and the spring assembly 2732 are
generally annular, and these two elements are configured so
rotational motion of one element is transferred to the other
element, and may provide for a combined rotation that is
transferred to the thrust plate 66 and the electric contact element
67. The spring assembly 2732 comprises an upper spring surface
2728, a spring bellow connector 2729, and a lower spring surface
2738. Seal element 2751 seals the fluid passage between the upper
spring surface 2728 and the thrust plate 66. Seal element 2753
seals the fluid passage between the lower spring surface 2738 and
the contact housing 2765.
[0058] Electricity is supplied to the electric contact element 67
that contacts the seed layer on a substrate to provide a desired
voltage between the anode 16 and the substrate seed layer.
Electricity is supplied from the controller 2002 to the electric
contact element 67 via the electric feed through 2767, a conductor
2771, and the contact housing 2765. The electric contact element 67
is disposed in physical and electrical contact with the seed layer
on the substrate. The shaft 2470, the contact housing 2765, the
spring assembly 2732, the thrust plate 66, the electric contact
element 67, the rotary mount 2799, and the substrate 200 secured
between the thrust plate 66 and the electric contact element 67 all
rotate as a unit about a longitudinal axis of the head assembly
2410. The head rotation motor 2706 provides the motive force to
rotate the above elements about its vertical axis.
[0059] A vacuum is controllably supplied to portions of the
rotatable head assembly 2410 by the pneumatic feed through 2773 to
control the position of the thrust plate relative to the electric
contact element 67. The pneumatic feed through 2773 comprises a
controllable vacuum supply 2790, a sleeve member 2792, a fluid
conduit 2794, a circumferential groove 2795, a fluid aperture 2796,
and a fluid passage 2798. The sleeve member 2792 may be a distinct
member, or a portion of the shaft as shown in FIG. 3B. The
circumferential groove 2795 extends within the sleeve member 2792
about the circumference of the shaft 2470. The pneumatic feed
through supplies a vacuum to a pressure reservoir 2740. The
pressure reservoir is configured to maintain either positive air
pressure or vacuum, depending upon the configuration of the head
assembly 2410. The fluid aperture 2796 is in fluid communication
with the circumferential groove. The fluid aperture 2796 extends
axially through the shaft 2470 from the circumferential groove 2795
to the bottom of the shaft 2470. The fluid passage 2798 extends
through the contact housing 2765. The fluid aperture 2796 at the
bottom of the shaft is in fluid communication with the fluid
passage 2798. The inner surface of the sleeve member 2792 has a
small clearance, e.g. about 0.0002 inch, with the outer surface of
the shaft 2470 to allow relative rotation between these two
members.
[0060] A vacuum is applied from the controllable vacuum supply 2790
via the fluid conduit 2794 to the inner surface of the sleeve
member 2792 and the circumferential groove 2795. The vacuum is
applied from the fluid aperture 2796 to the fluid passage 2798 and
the pressure reservoir 2740. Due to the tight clearance between the
sleeve member 2792 and the shaft 2470, a vacuum applied to the
inner surface of the sleeve member 2792 passes via the
circumferential groove 2795 to the fluid aperture 2796. The tight
clearance limits air entering between the sleeve member 2792 and
the outer surface of the shaft 2470. Therefore, the vacuum applied
from the controllable vacuum supply 2790 extends to the pressure
reservoir. A vacuum within the shaft 2470 passes through the fluid
passage 2798 to a pressure reservoir 2740 formed between the spring
assembly 2732 and the contact housing 2765. The vacuum applied by
the controllable vacuum supply 2790 thereby controls the vacuum in
the pressure reservoir 2740.
[0061] The spring bellow connector 2729 combines aspects of a
spring and a bellows. The spring bellow connector 2729 is attached
between the thrust plate 66 and the contact housing 2765. The
spring bellows connector 2729 limits fluid flow between the thrust
plate 66 and the electric contact element 67. The spring bellows
connector 2729 additionally exerts a spring force when axially
displaced, either compressed or extended, from its relaxed shape.
The bias of the spring bellow connector 2729 is used to position
the thrust plate 66 relative to the electric contact element 67.
Any suitable type of bellows or baffle member that has a spring
constant may be used as spring bellow connector 2729.
Alternatively, separate spring and bellows members may be used as
the spring bellow connector 2729. The upper spring surface 2728 is
annular shaped and is sealably connected to the thrust plate 66.
The lower spring surface 2738 is sealably connected to the contact
housing 2765. A pressure reservoir 2740 is defined in the annulus
between the contact housing 2765 and the spring assembly 2732. In
one embodiment, the thrust plate is normally pressed against the
backside of the substrate by the spring tension exerted by the
spring bellow connector 2729. Application of the vacuum within the
pressure chamber 2740 raises spring bellows connector 2729, and
thereby also raises the thrust plate 66.
[0062] FIG. 3B shows an embodiment in which a vacuum supplied by
the controllable vacuum supply 2790 applied to the pressure
reservoir 2740 is provided to upwardly displace the upper spring
surface 2728 of the spring assembly 2732. Alternatively, the spring
assembly 2732 may be configured so pressure applied from a
controllable pressure supply (that replaces the controllable vacuum
supply 2790 in this latter embodiment) applied to the pressure
reservoir displaces the upper spring surface 2728 of the spring
assembly.
[0063] The thrust plate 66 is displaced to a raised position when a
robot, not shown, is loading or unloading a substrate 200 onto the
electric contact element 67. Following insertion by the robot, the
substrate 200 rests upon the electric contact element such that the
periphery of the substrate seed layer rests upon the contact
element. The thrust plate 66 is then lowered firmly against the
back surface of a substrate 200 to ensure a snug contact between
the substrate seed layer and the electric contact element 67. The
electric contact element 67 is arranged to be generally circular to
extend proximate the periphery of the substrate, and support the
substrate at these peripheral locations. Those seed layer locations
on the substrate that are within the peripheral substrate locations
that contact the circular electric contact element will contact the
electrolyte solution when the substrate holder system 14 is
immersed in the electrolyte solution. Electricity can be applied
from the controller 2002 to the seed layer on the substrate 200
through the electric contact element 67.
[0064] The substrate holder assembly 2450 is configured to hold a
substrate 200 in a secured position such that the substrate can be
moved between the exchange, dry, and process positions. The thrust
plate 66 can also be biased downwardly to secure substrate 200
against the electric contact element 67. The thrust plate 66 can be
biased upwardly to provide a space between the thrust plate 66 and
the electric contact element 67 through which a substrate can be
inserted by a robot device. In the embodiment shown in FIG. 3B,
upward bias to the thrust plate is provided by a vacuum created
within pressure reservoir 2740 by the controllable vacuum supply
2790. The vacuum in the pressure reservoir 2740 causes the upper
spring surface 2728, the remainder of the spring assembly 2732, and
the attached thrust plate 66 to be displaced upwardly.
[0065] Reducing the vacuum from the controllable vacuum supply 2790
allows the spring bellow connector 2729 to return to its normal
tensioned position by which the upper spring surface 2728 biases
the attached thrust plate 66 into secure contact with substrate 200
positioned on the electric contact element 67. This physical
biasing of the substrate against the electric contact element 67 is
sufficient to enhance the electric contact between the electric
contact element 67 and the seed layer on the substrate 200. The
electric contact element 67 extends about the periphery of the seed
layer on a substrate inserted in the substrate holder assembly, and
is electrically biased relative to the anode 16 shown in the
embodiment of FIG. 1 to effect metal film deposition on the seed
layer. The thrust plate 66, the electric contact element 67, the
spring bellow connector 2729, and a substrate inserted on the
electric contact element all rotate relative to the fluid shield
2720. The fluid shield 2720 remains fixed to the shaft shield 2763
and does not rotate.
[0066] The head rotation motor 2706 is mounted within, and at least
partially extends through, the inner circumference of the hollow
head rotation housing 2760 and is connected to shaft 2470. The
hollow coil segment 2775 is mounted to, and remains substantially
stationary relative to, the inside of the hollow head rotation
housing 2760. The shaft 2470 includes a magnet portion 2776 that
can be rotated about a vertical axis. The magnet portion 2776 is
physically disposed within the hollow portion of the hollow coil
segment 2775. The hollow coil segment 2775 induces rotation in the
magnet portion 2776 and the connected shaft 2470. Bearings 2785 are
provided between shaft shield 2763 and the shaft 2470 to limit
lateral travel of the shaft 2470 during rotation about a vertical
axis. The output of the shaft 2470, at the lower end of the shaft,
provides rotary motion to certain portions of the substrate holder
assembly 2450 including a thrust plate 66 and a substrate 200 held
between the thrust plate and the electric contact element 67, as
described below. The head rotation motor 2706 may be of the type
that produces output rotation in the range from, for example, 0 RPM
to 2500 RPM as controlled by the controller 2002.
[0067] The fluid shield 2720 is optional and may be disposed about
the periphery of, and preferably spaced from, the substrate holder
assembly 2450. The fluid shield contains electrolyte solution or
other matter that may be removed from the substrate or substrate
holder assembly by centrifugal rotation of the substrate holder
assembly 2450 on other adjacent equipment.
[0068] The substrate holder assembly 2450 functions to position the
substrate seed layer relative to the electrolyte solution during
start-up, processing, and removal of the substrate. The operation
of the substrate holder system 14 is controlled by the controller
2002. The controlled operations include the application of a vacuum
to pressure reservoir 2740 to extend or retract the thrust plate
66, the operation and angular velocity of the motor 2706, the
position of the pivot joint 2459 that controls the tilt of the
substrate, and other such mechanical displacements.
[0069] One embodiment of the progression of the substrate holder
system 14 during the metal film deposition process is shown in
FIGS. 5A to 5H. FIG. 7 shows one embodiment of method 2900 for
performing the progression of the substrate holder system 14 shown
in FIGS. 5A to 5H, as controlled by the controller 2002 The
progression of the substrate holder system 14 shown in FIGS. 5A to
5H is to be read in conjunction with the method 2900 shown in FIG.
7. During the progression of FIGS. 5A to 5H, a substrate held in a
substrate holder assembly is immersed into the electrolyte
solution. The substrate is then processed within the electrolyte
solution. Following processing, the substrate holder and the
substrate are removed from the electrolyte solution, and the
substrate is removed from the substrate holder assembly using a
robot.
[0070] FIG. 5A, and block 2902 in FIG. 7, show the substrate holder
system 14 being positioned in an exchange position in which the
thrust plate 66 of the substrate holder assembly is retracted into
a raised position by the creation of a vacuum in the pressure
reservoir 2740. The substrate holder system 14 is positioned in its
exchange position to allow a robot blade (not shown) to insert a
substrate 200 between the electric contact element 67 and the
thrust plate 66.
[0071] As shown in FIG. 5B, and block 2904 in FIG. 7, the substrate
200 is positioned between the thrust plate 66 and the electric
contact element 67. The thrust plate 66 is then lowered to exert a
bias against the backside of substrate 200 to secure and provide a
sufficient electric contact between the plating surface and the
contact element. The thrust plate is lowered with such force to
secure, but not damage by excessive , the substrate 200. The
lowering of the thrust plate is accomplished by decreasing the
vacuum applied within the pressure reservoir 2740 shown in FIG. 3B
to allow the spring bellow connector 2729 to return downwardly to
its pre-set position. During the remaining substrate 200
processing, the thrust plate remains in the lowered biased position
until the thrust plate in the substrate holder assembly is raised
to the exchange position as indicated by FIG. 5H. In those
embodiments of substrate holder system 14 in which the substrate
can be rotated, the substrate holder system starts angular rotation
of the substrate in FIG. 5B about a vertical axis passing through
the substrate, and continues through FIG. 5H. The velocity of
angular rotation may vary through the progression depending upon
whether the substrate is being immersed in the electrolyte
solution, the substrate is being processed, or the substrate is
being removed from the electrolyte solution, or the substrate is
being rotated for drying of the substrate by centrifugal force.
[0072] FIG. 5C, and block 2906 of FIG. 7, shows the substrate
holder assembly 2450 being lowered to a position in which the lift
guide 2466 being translated downward relative to the mounting slide
2460. In this position, the substrate holder assembly supports the
substrate 200 above the electrolyte solution contained in the
electrolyte solution cell 12. The substrate 200 is positioned in
this position prior to its immersion into the electrolyte solution,
and also after the substrate has been removed from the electrolyte
solution. Positioning the substrate 200 in position is part of a
routine such that the substrate 200 can be quickly immersed into
the electrolyte solution.
[0073] FIG. 5D, and block 2908 in FIG. 7, shows the substrate
holder assembly 2450, the rotating actuator 2464, and the head lift
portion 2708 all being tilted as a unit by the head assembly frame
2452 about the pivot joint 2459. A cantilever arm actuator 2457
controllably actuates shaft 2453 and the connected cantilever arm
2456 to effect tilting of the rotatable head assembly 2410, that
holds the substrate, about the pivot joint 2459. The tilting of the
seed layer on the substrate is provided to enhance the immersion of
the seed layer into the electrolyte solution, as shown in FIG.
5E.
[0074] FIG. 5E, and block 2910 of FIG. 7, shows the immersion of
the substrate 200 contained in the rotatable head assembly 2410,
into the electrolyte solution from the dry position. The shaft 2468
is rotated during the immersion of the substrate. During this shaft
rotation, the lift guide 2466 is translated downwardly along the
mounting slide 2460 to cause downward motion of the head assembly
2410. Substrate 200 is tilted from horizontal when the substrate is
immersed in the electrolyte solution to minimize the occurrences of
air bubbles and air bridges trapped underneath the
substrate/substrate holder assembly within the electrolyte
solution. Tilting the substrate upon immersion acts to release some
of the air bubbles trapped under the substrate as the substrate 200
is lowered into the electrolyte solution, and also lets the air
bubbles escape more easily across the tilted substrate face. The
tilted position at which the substrates are immersed in the
electrolyte solution enhance the flow of a meniscus formed between
the electrolyte solution and the substrate, across the surface of
the seed layer on the substrate. In addition, spinning of the
substrate during immersion minimizes the chance that an air bubble
will become attached to any single location on the seed layer.
[0075] As shown in FIG. 5F and block 2912 of FIG. 7, the rotating
actuator 2464, and the mounting slide 2460 are all moved as a unit
by the head assembly frame about the pivot joint 2459 into the
process position. When the head portion is in the process position,
the substrate 200 is held in a substantially horizontal position
within the electrolyte solution. In the process position shown in
block 2914 of FIG. 7, the entire plating surface of the substrate
200 is immersed in the electrolyte solution.
[0076] During the electroplating process, portions of the head
portion 2450 including the contact housing 2765, the thrust plate
66, the electric contact element 67 may be rotated between about 0
and about 200 RPM, preferably from about 20 to about 40 RPM. The
rotation of the substrate 200 enhances uniform deposition of the
metal ions across the plating surface. The metal ions produced by
the reaction between the electrolyte solution and the anode 16 is
deposited on the plating surface of the substrate 200 when the
substrate holder system 14 is in the process position.
[0077] As shown in FIG. 5G and block 2916 of FIG. 7, the head
portion 2450 is then displaced by the substrate holder system 14
into a drying position after the processing is performed on the
substrate 200. To provide for the displacement between the process
position shown in FIG. 5F and the dry position shown in FIG. 5G,
lift guide 2466 is translationally displaced upwardly relative to
the mounting slide 2460. Additionally, the head assembly 2410 can
be tilted about the pivot joint 2459 (this tilting is not shown) to
enhance the meniscus flow of the electrolyte solution across the
seed layer as the substrate is removed from the electrolyte cell.
When the head portion 2450 is in the dry position, the substrate
may be rotated between about 600 and about 2500 RPM, preferably
about 2000 RPM to dry the substrate 200 by centrifugal action.
Alternatively, the substrate 200 can be transported to a separate
spin-rinse-dry unit.
[0078] As shown in FIG. 5H and block 2918 of FIG. 7, the head
portion 2450 is then raised into the exchange position by the lift
guide 2466 being translationally displaced upwardly relative to the
mounting slide 2460. When the head portion is in the exchange
position, the thrust plate 66 is raised to facilitate removal of
the substrate 200 from the substrate holder assembly. Following the
raising of the thrust pad, a first robot blade, not shown, is
typically inserted between the substrate 200 and the thrust plate
to remove a first processed substrate. Another robot blade inserts
a new substrate to be processed on to the electric contact element.
The thrust pad is then lowered to secure the substrate in position
within the substrate holder assembly. The metal deposition process
depicted in FIGS. 5A to 5H is then performed on the next
substrate.
[0079] There are multiple embodiments disclosed herein that result
in a greater concentration of metal ions contained in the
electrolyte inside the features of an object to be plated. The
increased concentration of metal ions within the features
facilitates bottom-up deposition, and/or improves metal film
deposition uniformity.
[0080] 3. Mechanical Vibratory System
[0081] In certain embodiments of the present invention, it is
desired to vibrate the substrate, e.g. substantially vertically
and/or horizontal, relative to the electrolyte solution. The
vibration comprises repetition of a stroke of several microns
(preferably the stroke is less than about 100.mu.) to enhance the
fluid flow of the electrolyte solution into the features contained
on the plating surfaces. Though in certain embodiments, the
vibration may occur at a rate as low as several cycles per second,
other embodiments may provide the vibration in the kHz or mHz
range. The selection of the particular embodiment depends on the
characteristics of the electrolyte solution and metal ions, the
dimensions of the features, and other such considerations. This
increase in electrolyte solution fluid flow about the substrate
enhances the concentration of metal ions contained within the
electrolyte solution within the features because the flow positions
electrolyte solution containing an enhanced number of metal ions
(this electrolyte solution originated from a location remote from
the depletion region) proximate the throat of the feature. The
metal ions contained in the electrolyte solution can flow within
the electrolyte solution to within the features by diffusion. This
flow enhances the concentration of metal ions within the features
to a concentration approaching, or equal to, the concentration of
the metal ions in the electrolyte solution outside the features.
The increase in the concentration of metal ions in the feature
results in enhanced metal film deposition rate within the
features.
[0082] There are multiple mechanical techniques by which the
concentration of metal ions contained in the electrolyte solution
contained within the features of the plating surface of a substrate
can be increased by vibration. In one embodiment, the substrate 200
is displaced, typically vibrated, relative to the electrolyte
solution. In another embodiment, the electrolyte solution is
vibrated relative to the substrate 200. Both embodiments take the
general form of establishing a vibration between the substrate 200
and the electrolyte solution.
[0083] The mechanical vibrations between the substrate 200 and the
electrolyte solution may be produced by piezoelectric, ultrasonic,
or magsonic sources and performed during the early stage of the ECP
process, prior to the time when most of the metal ions are
deposited on the horizontal field 204 as shown in FIG. 2A. As
typical feature widths decrease and aspect ratios increase, it is
more difficult for an electrolyte solution with sufficient ion
concentration to flow into the feature in the initial few seconds
of the metal film deposition process. The mechanical vibration
applied from the substrate holder system 14 to the substrate 200
enhances electrolyte diffusion in the feature, and improves the
early stage of plating in which the features are being filled by
metal film. Such feature-filling deposition typically occurs within
the first few seconds of metal film deposition.
[0084] Several embodiments of modifications to the substrate holder
system are now described that can be used to vibrate the substrate
200. Vibrational amplitude of the substrate 200 in the range of
tens of microns has a beneficial effect on the metal film
deposition rate during plating operations. FIG. 8 shows one
embodiment of substrate holder System that can vibrate the
substrate 200 relative to the electrolyte solution. Another
embodiment of system that may be used to impart vibration to a
substrate is shown in FIG. 4.
[0085] The vibration of the substrate may be imparted during the
metal film deposition and during the immersion process. During the
immersion of the immersion of the substrate into the electrolyte
solution, a small negative voltage between about 0.5 and about 1.5
volts, preferably about 0.8 volts, is applied to the cathodic seed
layer on the substrate to effect negative biasing of the seed layer
relative to the anode. During the negative biasing the substrate
200 is inserted into the electrolyte solution as shown and
described above in reference to FIGS. 5D and 5F. This small bias is
applied before the substrate 200 is fully electrically loaded to
effect metal ion deposition on the horizontal field 204. This
negative bias voltage is provided to permit bottom-up metal ion
deposition in the features of the seed layer, but not enough to
choke off these features. To accomplish bottom-up deposition during
the initial negative biasing, the concentration of metal ions
contained in the electrolyte solution is enhanced near the bottom
of the feature to enhance the bottom-up deposition before the
features are choked off. This increased metal ion concentration is
accomplished by vibrating the substrate relative to the electrolyte
solution to increase the number of metal ions that are contained
within the features. Though the vibration is described relative to
an approximately 0.8 volt bias, it is envisioned that the vibration
concept applied herein may also be used in conjunction with other
bias process conditions where it is desired to enhance the
concentration of metal ions in the electrolyte solution contained
within the features. After the features are filled, the metal ions
are further deposited on the horizontal field by the "loading" or
massive plating to form the metal film on the substrate seed layer.
The loading is that portion of the biasing which the majority of
thickness of the deposition layer is applied to the horizontal
field 204 in FIG. 2.
[0086] The 0.8 bias voltage applied to the substrate 200 is also
sufficient to compensate for any etching of the substrate seed
layer by the 0.8 volt biasing is applied before the loading of the
substrate 200 within the electrolyte solution compensates for the
acidity of the electrolyte solution. The seed layer deposited on
the substrate 200 will dissolve without this biasing voltage.
[0087] It is important to monitor the copper plating thickness
while vibrating the substrate during the initial portions of the
metal film deposition. If the Cu layer is too thin, the plated Cu
layer as well as the original Cu seed layer will be etched away by
the acidic electrolyte. If the Cu layer is too thick, it will
restrict the throat of the feature 202 thus limiting further
entrance of electrolyte solution and metal ions into the feature.
Therefore it is important to apply a negative bias to the substrate
200 both before and during the mechanical vibration phase. The
frequency and amplitude of mechanical vibration may need to be
adjusted. Excessive vibration may cause delamination of the then
plated Cu layer and/or the seed layer from the underlying Ta or TaN
diffusion barrier layer. Insufficient vibration will not enhance
the migration of Cu ions and other additives to the feature bottom.
A proper vibration level will therefore reduce substrate 200
feature defects.
[0088] The application of mechanical vibration to the substrate 200
to accomplish this bottom-up deposition is now described with
reference to FIGS. 3a and 8. The vibration of the substrate 200 may
be accomplished as shown in FIG. 3a by a vibratory inducing device
702 being positioned at appropriate locations within the substrate
support system such as on the thrust plate 66. In the embodiment
shown in FIG. 8, the vibration inducing device 806 is mounted on
the lift guide 2466. Any vibration inducing device that applies
sufficient vibration to the substrate is within the scope of one
embodiment of vibration inducing device. The desired vibrational
amplitude to the substrate is preferably within the range of 0.2
microns (.mu.) to 100.mu., and more particularly from 0.8.mu. to
8.mu.. In another embodiment of vibration inducing device as shown
in the embodiment of FIG. 1, a vibration is applied to a flow
diffuser to cause a vibration of the electrolyte solution relative
to the substrate. In the embodiment shown in FIG. 1, a flow
diffuser 71 extends across the inner wall of the upper electrolyte
cell 92. A piezoelectric driver 73 that is mounted to the wall of
the electrolyte cell is also mounted to the diffuser 71. The
piezoelectric driver can induce vibration of the electrolyte
solution in the electrolyte cell 12. The vibration of the
electrolyte solution is imparted to the substrate. Vibrating the
electrolyte solution within the electrolyte cell that is applied to
the substrate enhances the supply of metal ions to adjacent the
seed layer. Enhancing the supply of metal ions to the seed layer
(including the features formed in the seed layer) also enhances the
metal film deposition on the seed layer including the seed layer
within the features. The different embodiments of vibratory
inducing devices 702 are applied to the rotatable head assembly
2410 and the mounting slide 2460, even though these embodiments are
illustrative in nature and are not intended to be limiting in
scope.
[0089] In an embodiment of vibratory inducing device shown in FIG.
8, a vertical vibration device 702 is connected directly to the
lift guide 2466. The lift guide 2466 is displaced relative to the
shaft or track 2468. The vertical vibration device 702 comprises a
piezoelectric element having an associated transducer. The output
from the transducer outputs its displacement readings to the
controller 2002 that senses the produced vibration, and ensures
that the vibration remains within the above desired vibratory
ranges. One example of a piezoelectric element that can be used is
commercially available from Piezoelectric Jena located in Jena,
Germany as the series PA 150V stack type actuator. Such
piezoelectric elements are capable of vibrations of about a 50 kHz
frequency range with a stroke of about 8.mu.m. The piezoelectric
elements convert an applied electrical field into mechanical
vibration. Other types of vibratory inducing devices that can
produce such vertical vibratory motions include mechanical cam
devices. The mounting slide 2460 and the rotatable head assembly
2410 may be viewed as a mass that will oscillate in a vertical
direction under the vibrational influence of vibration device 702.
The vibration amplitude and/or frequency of the vibration device
702 may be altered to provide the desired vibration amplitude and
frequency to the substrate 200.
[0090] In another embodiment shown in FIG. 3B, the vibration device
702 such as a piezoelectric driver or mechanical oscillatory device
may be positioned at the thrust plate 66. The thrust plate is
considered a mass. The frequency, amplitude, and the power
consumption calculation valves can be determined based upon known
kinematic-based values. The frequency of the vibration device is
configured to be in the range from a few kilohertz to about 300
kilohertz, but other vibratory ranges can be used and are within
the scope of the present invention. While the above vibratory
inducing devices have been shown connected to the head lift portion
and the thrust plate, other embodiments can be configured by
attaching a vibratory inducing device to other components, e.g. the
substrate holder assembly 2450 such as between 2765 and 2470,
attached to the mounting slide 2460, secured to the rotatable head
assembly 2410, affixed to the head assembly frame 2452, or attached
to any other location where the vibration may be transmitted from
the vibration device to the substrate.
[0091] In another embodiment, the electrolyte solution is displaced
in a reciprocating manner which displaces the electrolyte solution
relative to the substrate 200. The electrolyte solution displacing
device 99 shown in the embodiment of FIG. 1 may operate either
alone, or in combination with other vibratory inducing devices. The
vibratory inducing device 99 includes the flow diffuser 71 and a
vibration actuator 73. In one embodiment, the vibration actuator 73
may be mounted on the inner peripheral wall of the upper
electrolyte cell 92 in a position that imparts vibrational impulses
to the flow diffuser 71. The flow diffuser is sufficiently flexible
to result in the production of a vibrational mode in response to
the vibrations from the vibration actuator 73 having a vertical
amplitude in the micron range, across the width of the electrolyte
cell. The flow diffuser is configured to allow electrolyte solution
to flow there through during normal plating operations (typically
in a generally upward direction). However, the frequencies of the
oscillations applied to the flow diffuser are sufficient to cause
the flow diffuser to import the vibration to the electrolyte
solution in the electrolyte cell. The vibrational impulses within
the electrolyte solution 78 are caused by the vibrational action of
the flow diffuser 71. The vibrational impulses may also be caused
in an alternate embodiment by the direct vibrational action of the
vibrational actuator 73. The vibrating flow diffuser and/or the
vibrating vibrational actuator produce standing waves in the
incompressible electrolyte solution contained within the
electrolytic cell. The standing waves produced by the vibration of
the flow diffuser to the electrolyte solution contained within the
electrolyte cell above the flow diffuser "spread out" throughout
the electrolytic cell and their energies tend to cancel each other
out. In this embodiment, the frequency and amplitude of the
vibration actuator 73 and the flow diffuser 71 shown in FIG. 1 have
to be adjusted to ensure a desired vibrational amplitude of the
electrolyte solution.
[0092] Another embodiment to provide a vibration of the electrolyte
solution relative to the thrust plate 66 occurs by alternating the
level of pressure contained within the pressure reservoir 2740.
When the pressure in the reservoir changes, the thrust plate 66
moves to equalize the counteracting biasing forces supplied by
fluid vacuum in the pressure reservoir 2740 against the spring
assembly 2732.
[0093] Changing the pressures within the pressure reservoir has the
effect of displacing the thrust plate 66 several microns in the
vertical direction. One embodiment of pressure alternating device
800 that can alter the pressure applied to the pressure reservoir
2740 is shown in FIG. 3B. The pressure alternating device 800
comprises a first pressure vessel 802, a second pressure vessel
804, a controllable valve 806, and a valve outlet 808. The first
pressure vessel 802, and the second pressure vessel 804 are
maintained at unequal pressures of P1 and P2, respectively, and are
in fluid communication with respective inlet ports of controllable
valve 806. The sources of the pressure P1 and P2 may be pressurized
fluid, compressors, or any device that applies compressed fluid.
The controllable valve 806 applies the fluid pressure from either
the first pressure vessel 802, the second pressure vessel 804, or
neither the first nor the second pressure vessel to an output port
808. The output port 808 is in fluid communication with the
pressure reservoir 2740. The application of pressure PI to pressure
reservoir 2740 results in the thrust plate 66 being moved to a
different vertical level than when pressure P2 is applied as shown
in FIG. 3. The controllable valve 806, which is preferably an
electrically operated quick-acting valve, such as a solenoid valve,
that cycles between applying pressures P1 and P2 to the pressure
reservoir.
[0094] Such cycling of pressures results in a vibration being
applied to the substrate 200. The frequency of the oscillations is
limited by the operation of the controllable valve 806. It is
envisioned that this embodiment will be capable of operating at
lower frequencies than the other embodiments that include, e.g., a
piezoelectric or electromechanical driver. The pressure difference
between P1 and P2 is sufficient to produce a vibration to the
substrate of between about 0.2 microns (.mu.) and about 100.mu.,
and more particularly from about 0.8.mu. to 1.5.mu., but does not
produce an excessive vibration of the substrate. The operation of
the controllable valve 806 is controlled by controller 2002, shown
in FIG. 1, as described below. There are other embodiments that
provide for vibration of the thrust plate 66, as described
below.
[0095] 4. Pressure Application Embodiment
[0096] Another embodiment by which the metal ion concentration in
the electrolyte solution can be enhanced within the feature
relative to outside the feature, during the early stages of metal
film deposition, involves the application of pressure to the
electrolyte solution. The enhanced metal ion concentration within
the features enhances the metal film deposition on the seed layer
within the features.
[0097] In one embodiment, pressure is created within the
electrolyte solution by temporarily closing all the inlet and
outlet valves to the electrolyte cell, and the substitute holder
system 14 and the substrate forming a sealed surface that is biased
against the electrolyte solution. The pressure established within
the electrolyte solution forces the electrolyte solution containing
metal ions into the features in the substrate under the force
caused by the fluid pressure, thereby enhancing the concentration
of metal ions in the features, compared to where no pressure is
applied to the electrolyte solution. Forcing the metal ions in the
electrolyte solution into the features enhances the injection of
metal ions into the features when the features are in the
sub-micron range. The pressure applied to the electrolyte solution,
that is typically less than about 10 atmosphere and preferably
under about 2 atmosphere, can be utilized to bias the metal ions
into the features formed in the substrate. For example, if the
substrate is displaced against the electrolyte solution to build-up
pressure in the electrolyte solution in the electrolyte cell, then
the electrolyte solution being forced into the features in reaction
to the downward motion of the substrate (caused by the downward
motion of the substrate holder assembly) has a greater tendency to
bias the metal ions within the electrolyte solution into the
features.
[0098] One embodiment of ECP system 10 comprising the progression
involved in deposition shown in FIG. 6A through FIG. 6D. The ECP
system 10 includes the electrolyte cell 12 and a sealable head
assembly 620. The electrolyte cell 12 of FIG. 1 is modified to
permit the application of a pressure to the electrolyte solution 78
contained in the electrolyte cell 12 by controlling the positions
and operations of an outlet port 610, a bleeding valve 612, and the
sealable head assembly 620. The outlet port 610 is an optional
alternative to the annular weir 83 shown in the embodiment of FIG.
1 that permits the escape of electrolyte solution from the
electrolyte cell 12 to create circulation of the electrolyte
solution through the electrolyte cell. Since the duration of the
application of the pressure to the electrolyte solution is
relatively brief to enhance the metal film deposition in the
features the pressure can be applied to the electrolyte solution
for a brief period without any outlet port 610 or bleeding valve
612. An inlet valve 616 is connected to the input port 80, and the
inlet valve 616 can be closed to limit backflow through the input
port when pressure is applied to the electrolyte solution contained
in the electrolyte cell 12.
[0099] To provide for pressurizing the electrolyte solution, the
sealable head assembly 620 forms a sealing arrangement with the
electrolyte cell 12 when lowered to the position shown in FIG. 6C.
The sealing head assembly comprises an annular seal 626 formed from
a sealing, e.g. elastomeric material, that extends about the
electric contact element of the substrate holder assembly 64. The
diameter of the generally circular electric contact element is
configured to support the periphery of the downward-facing front
side of the substrate. Therefore, those seed layer locations on the
substrate that are within the peripheral locations will be in
physical contact with the electrolyte solution when the
substrate/substrate holder assembly is lowered to be immersed in
the electrolyte solution. The external peripheral surface of the
annular seal has a circular dimension similar to that of the inner
surface of the electrolyte cell to be able to create a seal with
the electrolyte cell to be able to pressurize the electrolyte
solution in the electrolyte cell when the substrate/substrate
holder assembly is in the position shown in FIG. 6C.
[0100] A seal is also provided between the electric contact element
and the substrate to seal against fluid escaping between these two
elements. The seal between the electric contact element and the
substrate may be, e.g., an elastomeric, plastic, or similar seal
and may be a unitary circular seal or a multi-element seal. The
sealing action of this seal is enhanced by downward force applied
by the thrust plate. A piston rod 630 is shown connected to upper
cylindrical plate 621 in a manner such that rotational motion
provided by an embodiment of substrate holder system 14 similar to
the embodiment shown in FIG. 1 may be controllably imparted to the
sealing head cylinder 620. No rotation exists between the substrate
holder assembly (including the substrate) and the electrolyte cell
during pressurization of the electrolyte solution, but some
rotation may be imparted during the metal film deposition that
occurs as the substrate holder assembly is displaced to its process
position, following the feature filling. The contact ring 9 and the
thrust plate 66 are provided in the embodiment of the sealable head
assembly 620 shown in FIG. 6. The contact ring and the thrust plate
act to retain a substrate 200 in position to provide electricity to
the plating surface of the substrate, and allow rotation to the
substrate 200 in a similar manner as described relative to the
embodiment shown in FIG. 1.
[0101] FIGS. 6A to 6D show one embodiment of the methodology in
which fluid pressure may be applied to a plating surface of a
substrate 200 to enhance the concentration of metal ions contained
in the electrolyte solution within the features of substrate during
the early stages of metal film deposition.
[0102] In FIG. 6A, a substrate 200 is loaded from a robot blade
(not shown) into the sealable head assembly 620 as described above
relative to the embodiments shown in FIGS. 3A and 3B. The sealable
head assembly 620 is positioned above the electrolyte solution 78
during the insertion of the substrate 200 into the head assembly.
The sealable head assembly 620 is then lowered in the direction
indicated by arrow 63.
[0103] In FIG. 6B, a controlled negative bias is applied to the
substrate 200 to limit excessive plating while the head holding the
substrate is moved to the process position. The substrate 200 may
be rotated during the initial loading by actuation of the head
rotation portion 2706 shown in FIG. 3B, and the head submerges the
substrate 200 into the electrolyte solution 78 by actuation of the
mounting slide 2460 shown in FIG. 3A. This rotation is to cease
prior to a seal being formed between the substrate holder assembly
and the electrolyte cell. This seal effects pressurization of the
electrolyte solution and can be formed when the substrate holder
assembly is stationary relative to the electrolyte cell. During the
substrate immersion phase, the substrate seed layer can be charged
with a small negative or positive voltage relative to the anode to
repel the positively charged metal, e.g. copper ions, relative to
the seed layer and thereby limit the amount of metal film
deposition during the immersion of the seed layer on the substrate
into the electrolyte solution since uniform metal film deposition
on the seed layer is difficult to achieve during the substrate
immersion process. The level of the voltage applied to the seed
layer on the substrate is insufficient to provide de-plating of the
seed layer.
[0104] In FIG. 6C, the electrolyte solution in the electrolyte cell
15 pressurized to enhance the metal film deposition. The
pressurization requires all the inlets and the outlet ports to the
electrolyte cell (excluding the overflow of the electrolyte cell)
to be closed to allow for the pressurization within the cell. The
pressurization process starts with the shut-off valve 616 being
initially closed and the bleeding valve 612 being initially opened.
The combined substrate holder assembly/substrate is downwardly
displaced into a sealed position against the electrolyte solution
stored in the electrolyte cell 12. The bleeding valve 612 is closed
before the substrate holder assembly reaches the sealed position in
which the annular seal 626 forms a sealing contact with the
electrolyte cell 12. During the initial stages of metal film
deposition that occur when the substrate holder assembly is in its
sealed position, electrolyte solution is limited from passing
between the substrate holder assembly and the inner side of the
electrolyte cell by the sealing action of the annular seal 626
against the inner surface of the electrolyte cell. By moving the
sealable head assembly 620 downward, a sufficient and controllable
amount of pressure is established within the electrolyte solution
contained within the electrolyte cell. The pressure established in
the electrolyte solution when the substrate holder assembly is in
its sealed position is sufficient to bias the metal ions contained
in the electrolyte solution into the sub-micron features on the
substrate as the electrolyte solution is biased into the features.
This pressurization of the electrolyte solution can occur in
combination with, or separately from, the vibration of the
electrolyte solution relative to the feature on the substrate, or
the vibration of the substrate relative to the electrolyte
solution, as described in the embodiments shown in, e.g., FIGS. 1,
3A, and 3B to enhance the metal film deposition. The thrust plate
66 is configured to support the backside of the substrate against
the pressure applied to the front (plating) side of the substrate.
As such, the cross-sectional diameter of the thrust plate
preferably should equal, or be only slightly less than, the
diameter of the substrate. The positive pressure (when the
substrate/substrate holder is in the position shown in FIG. 6C) is
applied to the substrate 200 for a period of less than five seconds
in most embodiments, to ensure metal ions contained in the
electrolyte solution is displaced through the electrolyte solution
sufficiently to facilitate metal ions flow into the features more
effectively to deposit as metal film within the features. Since the
metal film deposition rate may vary as a function of the selected
metal ions and recipes used, the file second limit is considered as
exemplary. The pressure may be applied from half a second to ten
seconds or longer depending upon the chemicals included in the
electrolyte solution and the configuration of the features of the
plating surface.
[0105] The amount of pressure selected to be applied within the
embodiment of the electrolyte cell 12, page 28 shown in FIG. 6C
depends upon the chemical composition and properties of the
electrolyte solution, the anode, and the seed layer. In certain ECP
systems, a pressure of a 1.1 atmospheres or greater may be applied
to the electrolyte solution within the electrolyte cell to enhance
the metal film deposition. The pressure applied to the electrolyte
solution is envisioned to be raised to such levels as ten or more
atmospheres may be built up within the electrolyte solution. The 10
atmosphere level is provided because it is envisioned that above
this pressure level it may be difficult to limit the bending of the
substrate, maintain the structure integrity of the fragile
substrate, and limit the sealing action against the electrolyte
solution. It is envisioned hat pressures much higher than this
could be used to enhance the metal film deposition ate. However,
the application of any pressure (of above about 1.1 atmospheres) to
the electrolyte solution that is provided to enhance the metal ion
concentration within the features is within the intended scope of
this embodiment of ECP system. The higher the pressures applied to
the electrolyte solution within the seed layer, the more it becomes
important to ensure the electrolyte cell is structured so it can
withstand the applied pressures of the electrolyte solution.
[0106] The position of the ECP system shown in FIG. 6C is used to
increase the pressure in the electrolyte solution to an
above-atmospheric level during the early stage of the process, but
prior to the massive Cu plating of the horizontal field when the
features are filled. As size of the substrate features, e.g. vias
or trenches, decrease and aspect ratios increase in the substrates,
it becomes more important to apply pressure to the electrolyte
solution to cause the electrolyte solution to flow into the feature
within a several second time frame.
[0107] In the above embodiment, the pressure is described as being
established by the substrate holder assembly/substrate being
displaced toward the electrolyte solution to compress the
electrolyte solution. Any known technique that creates a pressure
in the electrolyte solution may be used. For example, electrolyte
solution may be pumped into the electrolyte cell through the inlet
port 80 shown in FIG. 6A. Other suitable pressure-creating device
may be used to displace the metal ions in the electrolyte solution
to within the features.
[0108] A pressure applied to the electrolyte solution ensures an
electrolyte solution flow into the features that carries sufficient
metal ions into the features that improve the seed layer patching
and copper nuclation at the early stage of the Cu plating. The
application of pressure may also enhance the bottom-up metal film
deposition in the features as described, thereby minimizing the
voids that might otherwise occur in the plated feature.
[0109] In this embodiment, the copper plating process is controlled
during the initial phase that when pressure is applied to the
electrolyte. As described above, the initial copper seed layer can
be removed by the copper etching process by, e.g., a negative bias
voltage being applied between the anode and the seed layer. If the
initial copper seed layer is initially too quickly and too thick,
electrolyte solution will be restricted from entering the feature.
Therefore, there is a need to apply a controlled negative
potential/current to the substrate 200 while applying a
pressure.
[0110] In FIG. 6D, the inlet valve 616 is opened to release the
pressure of the electrolyte solution within the electrolyte cell.
Additionally, the head is returned to the process position and the
substrate holder system 14 may rotate the substrate (in those
embodiments that the substrate is rotated). In those embodiments
that the substrate/substrate holder is rotated, the electrolyte
cell and the annular seal 626 are positioned and configured such
that when the substrate holder is in the process position shown in
FIG. 6D, the annular seal 626 does not contact any portion of the
electrolyte cell. This avoidance of contact between the annular
seal and the electrolyte cell limits friction and abrasion that may
otherwise occur there between. It is also envisioned that some form
of rotary labyrinth seal may be provided between the electrolyte
cell and the electric contact element to provide this sealing.
After the head reaches the process RPM, suitable electric biasing
to apply the massive ECP process is commenced. The pressure is not
necessary in the FIG. 6D portion to force the metal ions into the
features since the features have already been progressively filled
with the deposited metal ions in the FIG. 6D portion.
[0111] The above embodiments shown in FIGS. 1, 3A, 3B, 4, 5A to 5H,
6A to 6D, 7, and 8 have described enhancing the metal film
deposition early in the ECP, i.e. before the massive metal film
deposition that applies a large amount of metal film to the
horizontal surfaces 204 shown in FIG. 2A. It is envisioned that the
embodiments described herein may be applied to any point in the
metal film deposition process that it is desired to enhance metal
film deposition in features.
[0112] Although various embodiments that incorporate the teachings
of the present invention have been shown and described in detail
herein, those skilled in the art can readily devise many other
varied components that still incorporate these teachings.
* * * * *