Patent | Date |
---|
Degassing chamber and semiconductor processing apparatus Grant 11,328,940 - Jia , et al. May 10, 2 | 2022-05-10 |
Electrostatic chuck and method for manufacturing protrusions thereof Grant 11,309,208 - Ye , et al. April 19, 2 | 2022-04-19 |
Electrostatic Chuck And Method For Manufacturing Protrusions Thereof App 20210005496 - YE; Hua ;   et al. | 2021-01-07 |
Annealing method, process chamber and annealing apparatus Grant 10,886,142 - Bai , et al. January 5, 2 | 2021-01-05 |
Magnetic thin film deposition chamber and thin film deposition apparatus Grant 10,622,145 - Yang , et al. | 2020-04-14 |
Annealing Method, Process Chamber And Annealing Apparatus App 20190259628 - BAI; Zhimin ;   et al. | 2019-08-22 |
Magnetron and magnetron sputtering device Grant 10,381,202 - Yang , et al. A | 2019-08-13 |
Magnetic Thin Film Deposition Chamber And Thin Film Deposition Apparatus App 20190244754 - YANG; Yujie ;   et al. | 2019-08-08 |
Magnetic Thin Film Laminated Structure Deposition Method, Magnetic Thin Film Laminated Structure And Micro-inductance Device App 20190244736 - YANG; Yujie ;   et al. | 2019-08-08 |
Degassing Chamber And Semiconductor Processing Apparatus App 20190221454 - JIA; Qiang ;   et al. | 2019-07-18 |
Degassing Method, Degassing Chamber, And Semiconductor Processing Apparatus App 20190218660 - YE; Hua ;   et al. | 2019-07-18 |
Hot plate and substrate processing equipment using the same Grant 10,287,686 - Zhao , et al. | 2019-05-14 |
Magnetron And Magnetron Sputtering Device App 20170011894 - YANG; Yujie ;   et al. | 2017-01-12 |
Apparatuses and methods for atomic layer deposition Grant 8,747,556 - Lam , et al. June 10, 2 | 2014-06-10 |
Apparatuses And Methods For Atomic Layer Deposition App 20140087091 - Lam; Hyman W.H. ;   et al. | 2014-03-27 |
Vapour Chamber And Substrate Processing Equipment Using Same App 20130269614 - Zhao; Mengxin ;   et al. | 2013-10-17 |
Apparatuses and methods for atomic layer deposition Grant 8,293,015 - Lam , et al. October 23, 2 | 2012-10-23 |
Rotating Bed to Reduce the Risk of Developing Pressure Ulcers App 20120036637 - Wang; Hougong ;   et al. | 2012-02-16 |
Thin film deposition Grant 7,884,032 - Ye , et al. February 8, 2 | 2011-02-08 |
Physical Vapor Deposition Chamber Having An Adjustable Target App 20080116067 - Lavitsky; Ilya ;   et al. | 2008-05-22 |
Thin film deposition App 20070099438 - Ye; Mengqi ;   et al. | 2007-05-03 |
Physical vapor deposition chamber having a rotatable substrate pedestal App 20060096857 - Lavitsky; Ilya ;   et al. | 2006-05-11 |
Physical vapor deposition chamber having an adjustable target App 20060096851 - Lavitsky; Ilya ;   et al. | 2006-05-11 |
Semiconductor wafer preheating Grant 7,006,888 - Wang , et al. February 28, 2 | 2006-02-28 |
Method of application of electrical biasing to enhance metal deposition Grant 6,913,680 - Zheng , et al. July 5, 2 | 2005-07-05 |
Method and apparatus for processing substrates in a system having high and low pressure areas App 20040166697 - Wang, Hougong ;   et al. | 2004-08-26 |
Method and apparatus for processing substrates in a system having high and low pressure areas Grant 6,672,864 - Wang , et al. January 6, 2 | 2004-01-06 |
Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature Grant 6,610,189 - Wang , et al. August 26, 2 | 2003-08-26 |
Apparatus and method for improving throughput in a cluster tool for semiconductor wafer processing App 20030131458 - Wang, Hougong ;   et al. | 2003-07-17 |
Semiconductor wafer preheating App 20030133773 - Wang, Hougong ;   et al. | 2003-07-17 |
Method and apparatus for processing substrates in a system having high and low pressure areas App 20030044742 - Wang, Hougong ;   et al. | 2003-03-06 |
Method of reducing particle density in a cool down chamber App 20030013312 - Wang, Hougong ;   et al. | 2003-01-16 |
Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature App 20020084189 - Wang, Hougong ;   et al. | 2002-07-04 |
Reflow chamber and process Grant 6,299,689 - Wang , et al. October 9, 2 | 2001-10-09 |
Central coil design for ionized metal plasma deposition Grant 6,077,402 - Hong , et al. June 20, 2 | 2000-06-20 |
Thermally sprayable powder materials having an alloyed metal phase and a solid lubricant ceramic phase and abradable seal assemblies manufactured therefrom Grant 5,976,695 - Hajmrle , et al. November 2, 1 | 1999-11-02 |
Ceramic coated metallic insulator particularly useful in a plasma sputter reactor Grant 5,879,523 - Wang , et al. March 9, 1 | 1999-03-09 |