| Patent | Date |
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Method For Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures
App 20220310825 - Margetis; Joe ; et al. | 2022-09-29 |
Method for depositing a group IV semiconductor and related semiconductor device structures
Grant 11,374,112 - Margetis , et al. June 28, 2 | 2022-06-28 |
Method And Device For Depositing Silicon Onto Substrates
App 20220130668 - Tolle; John ; et al. | 2022-04-28 |
Pre-clean chamber and process with substrate tray for changing substrate temperature
Grant 11,264,255 - Tolle , et al. March 1, 2 | 2022-03-01 |
Method For Depositing Boron And Gallium Containing Silicon Germanium Layers
App 20210375622 - Lima; Lucas Petersen Barbosa ; et al. | 2021-12-02 |
Temperature-controlled flange and reactor system including same
Grant 11,168,395 - Sreeram , et al. November 9, 2 | 2021-11-09 |
Reactor system for sublimation of pre-clean byproducts and method thereof
Grant 11,053,585 - Tolle , et al. July 6, 2 | 2021-07-06 |
Method for selectively depositing a Group IV semiconductor and related semiconductor device structures
Grant 11,018,002 - Margetis , et al. May 25, 2 | 2021-05-25 |
Method for depositing a group IV semiconductor and related semiconductor device structures
Grant 11,004,977 - Tolle , et al. May 11, 2 | 2021-05-11 |
Methods For Selective Deposition Utilizing N-type Dopants And/or Alternative Dopants To Achieve High Dopant Incorporation
App 20210035802 - Tolle; John ; et al. | 2021-02-04 |
Method For Cleaning Quartz Epitaxial Chambers
App 20200385861 - Deye; Gregory ; et al. | 2020-12-10 |
Gas-phase Reactor System And Method Of Using Same
App 20200340138 - Tolle; John ; et al. | 2020-10-29 |
Method and system for in situ formation of gas-phase compounds
Grant 10,787,741 - Tolle , et al. September 29, 2 | 2020-09-29 |
Temperature-controlled Flange And Reactor System Including Same
App 20200224309 - Sreeram; Sonti ; et al. | 2020-07-16 |
Methods for forming a silicon germanium tin layer and related semiconductor device structures
Grant 10,685,834 - Bhargava , et al. | 2020-06-16 |
Machine Learning Platform For Processing Data Maps
App 20200150305 - Guevara Diaz; Jorge Luis ; et al. | 2020-05-14 |
Temperature-controlled flange and reactor system including same
Grant 10,612,136 - Sreeram , et al. | 2020-04-07 |
Reactor System For Sublimation Of Pre-clean Byproducts And Method Thereof
App 20200102648 - Tolle; John ; et al. | 2020-04-02 |
Method For Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures
App 20200083375 - Tolle; John ; et al. | 2020-03-12 |
Method for depositing a group IV semiconductor and related semiconductor device structures
Grant 10,541,333 - Tolle , et al. Ja | 2020-01-21 |
Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures
Grant 10,535,516 - Kohen , et al. Ja | 2020-01-14 |
Temperature-controlled Flange And Reactor System Including Same
App 20200002811 - Sreeram; Sonti ; et al. | 2020-01-02 |
Reactor system for sublimation of pre-clean byproducts and method thereof
Grant 10,519,541 - Tolle , et al. Dec | 2019-12-31 |
Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber
Grant 10,510,536 - Kohen , et al. Dec | 2019-12-17 |
Pre-clean Chamber And Process With Substrate Tray For Changing Substrate Temperature
App 20190333793 - TOLLE; JOHN ; et al. | 2019-10-31 |
Methods for forming silicon-containing epitaxial layers and related semiconductor device structures
Grant 10,446,393 - Bhargava , et al. Oc | 2019-10-15 |
Method Of Depositing A Co-doped Polysilicon Film On A Surface Of A Substrate Within A Reaction Chamber
App 20190304780 - Kohen; David ; et al. | 2019-10-03 |
Formation of epitaxial layers via dislocation filtering
Grant 10,388,509 - Margetis , et al. A | 2019-08-20 |
Pre-clean chamber and process with substrate tray for changing substrate temperature
Grant 10,373,850 - Tolle , et al. | 2019-08-06 |
Method For Depositing A Semiconductor Structure On A Surface Of A Substrate And Related Semiconductor Structures
App 20190237327 - Kohen; David ; et al. | 2019-08-01 |
Process for forming a film on a substrate using multi-port injection assemblies
Grant 10,262,859 - Margetis , et al. | 2019-04-16 |
Method For Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures
App 20190027583 - Margetis; Joe ; et al. | 2019-01-24 |
Method For Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures
App 20190027605 - Tolle; John ; et al. | 2019-01-24 |
Method For Selectively Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures
App 20190027584 - Margetis; Joe ; et al. | 2019-01-24 |
Apparatus And Method For Removal Of Oxide And Carbon From Semiconductor Films In A Single Processing Chamber
App 20190019670 - Lin; Xing ; et al. | 2019-01-17 |
Methods For Forming A Silicon Germanium Tin Layer And Related Semiconductor Device Structures
App 20190013199 - Bhargava; Nupur ; et al. | 2019-01-10 |
Semiconductor Processing Apparatus And Methods For Calibrating A Semiconductor Processing Apparatus
App 20180363139 - Rajavelu; Shiva ; et al. | 2018-12-20 |
Methods For Forming Silicon-containing Epitaxial Layers And Related Semiconductor Device Structures
App 20180323059 - Bhargava; Nupur ; et al. | 2018-11-08 |
Reactor System For Sublimation Of Pre-clean Byproducts And Method Thereof
App 20180312968 - Tolle; John ; et al. | 2018-11-01 |
Reactor system for sublimation of pre-clean byproducts and method thereof
Grant 10,053,774 - Tolle , et al. August 21, 2 | 2018-08-21 |
Radial And Thickness Control Via Biased Multi-port Injection Settings
App 20180151358 - Margetis; Joe ; et al. | 2018-05-31 |
Method And System For In Situ Formation Of Gas-phase Compounds
App 20180127876 - Tolle; John ; et al. | 2018-05-10 |
Methods of forming silicon germanium tin films and structures and devices including the films
Grant 9,905,420 - Margetis , et al. February 27, 2 | 2018-02-27 |
Radial and thickness control via biased multi-port injection settings
Grant 9,892,913 - Margetis , et al. February 13, 2 | 2018-02-13 |
Method and system for in situ formation of gas-phase compounds
Grant 9,890,456 - Tolle , et al. February 13, 2 | 2018-02-13 |
Formation Of Epitaxial Layers Via Dislocation Filtering
App 20170372884 - Margetis; Joe ; et al. | 2017-12-28 |
Structures and devices including germanium-tin films and methods of forming same
Grant 9,793,115 - Tolle October 17, 2 | 2017-10-17 |
Radial And Thickness Control Via Biased Multi-port Injection Settings
App 20170278707 - Margetis; Joe ; et al. | 2017-09-28 |
Methods Of Forming Silicon Germanium Tin Films And Structures And Devices Including The Films
App 20170154770 - Margetis; Joe ; et al. | 2017-06-01 |
Methods of forming highly p-type doped germanium tin films and structures and devices including the films
Grant 9,647,114 - Margetis , et al. May 9, 2 | 2017-05-09 |
Methods Of Forming Highly P-type Doped Germanium Tin Films And Structures And Devices Including The Films
App 20170047446 - Margetis; Joe ; et al. | 2017-02-16 |
Reactor System For Sublimation Of Pre-clean Byproducts And Method Thereof
App 20160362783 - Tolle; John ; et al. | 2016-12-15 |
Plasma pre-clean module and process
Grant 9,514,927 - Tolle , et al. December 6, 2 | 2016-12-06 |
Structures And Devices Including Germanium-tin Films And Methods Of Forming Same
App 20160314967 - Tolle; John | 2016-10-27 |
Germanium oxide pre-clean module and process
Grant 9,474,163 - Tolle , et al. October 18, 2 | 2016-10-18 |
Pre-clean Chamber And Process With Substrate Tray For Changing Substrate Temperature
App 20160265112 - TOLLE; JOHN ; et al. | 2016-09-15 |
Plasma Pre-clean Module And Process
App 20160254137 - Tolle; John ; et al. | 2016-09-01 |
Methods of forming films including germanium tin and structures and devices including the films
Grant 9,396,934 - Tolle July 19, 2 | 2016-07-19 |
Germanium Oxide Pre-clean Module And Process
App 20160192502 - Tolle; John ; et al. | 2016-06-30 |
Plasma pre-clean module and process
Grant 9,299,557 - Tolle , et al. March 29, 2 | 2016-03-29 |
Method And System For In Situ Formation Of Gas-phase Compounds
App 20160051964 - Tolle; John ; et al. | 2016-02-25 |
Plasma Pre-clean Module And Process
App 20150270122 - Tolle; John ; et al. | 2015-09-24 |
Removable Substrate Tray And Assembly And Reactor Including Same
App 20150267295 - Hill; Eric ; et al. | 2015-09-24 |
Doped semiconductor films and processing
Grant 9,099,423 - Weeks , et al. August 4, 2 | 2015-08-04 |
Methods Of Forming Films Including Germanium Tin And Structures And Devices Including The Films
App 20150048485 - Tolle; John | 2015-02-19 |
Doped Semiconductor Films And Processing
App 20150014816 - Weeks; Keith Doran ; et al. | 2015-01-15 |
Tin precursors for vapor deposition and deposition processes
Grant 8,921,207 - Tolle December 30, 2 | 2014-12-30 |
Method for growing Si-Ge semiconductor materials and devices on substrates
Grant 8,821,635 - Kouvetakis , et al. September 2, 2 | 2014-09-02 |
Tin Precursors For Vapor Deposition And Deposition Processes
App 20140087544 - Tolle; John | 2014-03-27 |
Hydride compounds with silicon and germanium core atoms and method of synthesizing same
Grant 8,568,681 - Kouvetakis , et al. October 29, 2 | 2013-10-29 |
Hydride Compounds with Silicon and Germanium Core Atoms and method of Synthesizing Same
App 20120020864 - Kouvetakis; John ; et al. | 2012-01-26 |
Hydride compounds with silicon and germanium core atoms and method of synthesizing same
Grant 7,981,392 - Kouvetakis , et al. July 19, 2 | 2011-07-19 |
Epitaxial growth of group III nitrides on silicon substrates via a reflective lattice-matched zirconium diboride buffer layer
Grant 7,781,356 - Kouvetakis , et al. August 24, 2 | 2010-08-24 |
Superhard dielectric compounds and methods of preparation
App 20090324475 - Kouvetakis; John ; et al. | 2009-12-31 |
Si.sub.xSn.sub.yGe.sub.1-x-y and related alloy heterostructures based on Si, Ge and Sn
Grant 7,598,513 - Kouvetakis , et al. October 6, 2 | 2009-10-06 |
GeSn alloys and ordered phases with direct tunable bandgaps grown directly on silicon
Grant 7,589,003 - Kouvetakis , et al. September 15, 2 | 2009-09-15 |
Materials and optical devices based on group IV quantum wells grown on Si-Ge-Sn buffered silicon
Grant 7,582,891 - Kouvetakis , et al. September 1, 2 | 2009-09-01 |
Materials and Optical Devices Based on Group IV Quantum Wells Grown on Si-Ge-Sn Buffered Silicon
App 20080277647 - Kouvetakis; John ; et al. | 2008-11-13 |
Superhard dielectric compounds and methods of preparation
Grant 7,374,738 - Kouvetakis , et al. May 20, 2 | 2008-05-20 |
Method for Growing Si-Ge Semiconductor Materials and Devices on Substrates
App 20080113186 - Kouvetakis; John ; et al. | 2008-05-15 |
Hydride Compounds With Silicon And Germanium Core Atoms And Method Of Synthesizing Same
App 20070297967 - Kouvetakis; Jonh ; et al. | 2007-12-27 |
Method for preparing Ge.sub.1-x-ySn.sub.xE.sub.y (E=P, As, Sb) semiconductors and related Si-Ge-Sn-E and Si-Ge-E analogs
Grant 7,238,596 - Kouvetakis , et al. July 3, 2 | 2007-07-03 |
Gesn alloys and ordered phases with direct tunable bandgaps grown directly on silicon
App 20070020891 - Kouvetakis; John ; et al. | 2007-01-25 |
Epitaxial growth of group III nitrides on silicon substrates via a reflective lattice-matched zirconium diboride buffer layer
App 20060236923 - Kouvetakis; John ; et al. | 2006-10-26 |
Method for preparing ge1-x-ysnxey (e=p, as, sb) semiconductors and related si-ge-sn-e and si-ge-e analogs
App 20060134895 - Kouvetakis; John ; et al. | 2006-06-22 |
Low temperature epitaxial growth of quaternary wide bandgap semiconductors
Grant 6,911,084 - Kouvetakis , et al. June 28, 2 | 2005-06-28 |
Low temperature epitaxial growth of quartenary wide bandgap semiconductors
App 20040261689 - Tsong, Ignatius S.T. ; et al. | 2004-12-30 |
Superhard dielectric compounds and methods of preparation
App 20040191151 - Kouvetakis, John ; et al. | 2004-09-30 |
Active electronic devices based on gallium nitride and its alloys grown on silicon substrates with buffer layers of SiCAIN
App 20040129200 - Kouvetakis, John ; et al. | 2004-07-08 |
Low temperature epitaxial growth of quaternary wide bandgap semiconductors
App 20030056719 - Kouvetakis, John ; et al. | 2003-03-27 |
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