Tauchi; Susumu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tauchi; Susumu.The latest application filed is for "plasma processing apparatus".
Company Profile
2.39.38
- Tauchi; Susumu - Tokyo JP
- Tauchi; Susumu - Shunan N/A JP
- Tauchi; Susumu - Shunan-shi JP
- Tauchi; Susumu - Shuunan JP
- Tauchi, Susumu - Tokuyama JP
Patent Activity
| Patent | Date |
|---|---|
| Plasma processing apparatus Grant 10,665,436 - Uemura , et al. | 2020-05-26 |
| Upper chamber for a plasma processing apparatus Grant D812,578 - Uemura , et al. March 13, 2 | 2018-03-13 |
| Upper chamber for a plasma processing apparatus Grant D804,436 - Tauchi , et al. December 5, 2 | 2017-12-05 |
| Cover ring for a plasma processing apparatus Grant D802,790 - Tauchi , et al. November 14, 2 | 2017-11-14 |
| Lower chamber for a plasma processing apparatus Grant D802,545 - Tauchi , et al. November 14, 2 | 2017-11-14 |
| Plasma Processing Apparatus App 20160372305 - UEMURA; Takashi ; et al. | 2016-12-22 |
| Electrode cover for a plasma processing apparatus Grant D770,992 - Tauchi , et al. November 8, 2 | 2016-11-08 |
| Vacuum Processing Apparatus App 20160217976 - UEMURA; Takashi ; et al. | 2016-07-28 |
| Vacuum processing apparatus Grant 9,343,340 - Nogi , et al. May 17, 2 | 2016-05-17 |
| Vacuum processing apparatus and operating method of the same Grant 9,245,780 - Shimomura , et al. January 26, 2 | 2016-01-26 |
| Vacuum Processing System And Vacuum Processing Method Of Semiconductor Processing Substrate App 20150194327 - Tauchi; Susumu ; et al. | 2015-07-09 |
| Vacuum processing apparatus and operating method of vacuum processing apparatus Grant 9,011,065 - Tauchi , et al. April 21, 2 | 2015-04-21 |
| Vacuum Processing Apparatus And Operating Method Of The Same App 20140295672 - Tauchi; Susumu | 2014-10-02 |
| Vacuum processing apparatus and program Grant 8,849,446 - Nakata , et al. September 30, 2 | 2014-09-30 |
| Vacuum processing apparatus Grant 8,747,046 - Isomura , et al. June 10, 2 | 2014-06-10 |
| Vacuum processing apparatus Grant 8,740,011 - Tauchi , et al. June 3, 2 | 2014-06-03 |
| Vacuum processing apparatus and program Grant 8,538,573 - Nakata , et al. September 17, 2 | 2013-09-17 |
| Vacuum Processing Apparatus App 20130183121 - Isomura; Ryoichi ; et al. | 2013-07-18 |
| Vacuum processing apparatus Grant 8,460,467 - Makino , et al. June 11, 2 | 2013-06-11 |
| Vacuum Processing Apparatus And Operating Method Of The Same App 20130142595 - SHIMOMURA; Takahiro ; et al. | 2013-06-06 |
| Vacuum processing apparatus Grant 8,286,822 - Tauchi , et al. October 16, 2 | 2012-10-16 |
| Vacuum Processing Apparatus App 20120163943 - ISOMURA; Ryoichi ; et al. | 2012-06-28 |
| Vacuum Processing Apparatus App 20120091386 - Tauchi; Susumu ; et al. | 2012-04-19 |
| Plasma treatment apparatus and plasma treatment method Grant 8,148,268 - Sato , et al. April 3, 2 | 2012-04-03 |
| Vacuum processor App 20120027542 - Isomura; Ryoichi ; et al. | 2012-02-02 |
| Vacuum Processing Apparatus App 20110318143 - ISOMURA; Ryoichi ; et al. | 2011-12-29 |
| Plasma processing apparatus Grant 8,075,733 - Watanabe , et al. December 13, 2 | 2011-12-13 |
| Vacuum Processing Apparatus App 20110259522 - MAKINO; Akitaka ; et al. | 2011-10-27 |
| Vacuum Processing Apparatus App 20110229289 - Nogi; Keita ; et al. | 2011-09-22 |
| Vacuum Processing Apparatus And Program App 20110217148 - NAKATA; Teruo ; et al. | 2011-09-08 |
| Vacuum Processing Apparatus And Program App 20110218662 - Nakata; Teruo ; et al. | 2011-09-08 |
| Vacuum processing apparatus Grant 7,976,632 - Makino , et al. July 12, 2 | 2011-07-12 |
| Vacuum Processing System And Vacuum Processing Method Of Semiconductor Processing Substrate App 20110110751 - TAUCHI; Susumu ; et al. | 2011-05-12 |
| Vacuum Processing System And Vacuum Processing Method Of Semiconductor Processing Substrate App 20110110752 - TAUCHI; Susumu ; et al. | 2011-05-12 |
| Vacuum processing apparatus Grant 7,833,382 - Makino , et al. November 16, 2 | 2010-11-16 |
| Vacuum processing apparatus Grant 7,828,928 - Makino , et al. November 9, 2 | 2010-11-09 |
| Plasma processing apparatus and plasma processing method Grant 7,807,581 - Tauchi , et al. October 5, 2 | 2010-10-05 |
| Vacuum Processing Apparatus App 20100171061 - TAUCHI; Susumu ; et al. | 2010-07-08 |
| Plasma processing apparatus Grant 7,674,351 - Makino , et al. March 9, 2 | 2010-03-09 |
| Plasma Processing Apparatus App 20100043976 - WATANABE; Seiichi ; et al. | 2010-02-25 |
| Vacuum processing apparatus Grant 7,641,069 - Tauchi , et al. January 5, 2 | 2010-01-05 |
| Vacuum Processing Apparatus App 20090165952 - Tauchi; Susumu ; et al. | 2009-07-02 |
| Plasma Treatment Apparatus And Plasma Treatment Method App 20090152242 - Sato; Kohei ; et al. | 2009-06-18 |
| Vacuum processing apparatus App 20090000739 - Makino; Akitaka ; et al. | 2009-01-01 |
| Vacuum Processing Apparatus App 20080317581 - MAKINO; Akitaka ; et al. | 2008-12-25 |
| Plasma Processing Apparatus And Plasma Processing Method App 20080217295 - TAUCHI; SUSUMU ; et al. | 2008-09-11 |
| Plasma processing apparatus Grant 7,416,633 - Makino , et al. August 26, 2 | 2008-08-26 |
| Vacuum Processing Apparatus App 20080145193 - Makino; Akitaka ; et al. | 2008-06-19 |
| Vacuum processing apparatus Grant 7,335,277 - Makino , et al. February 26, 2 | 2008-02-26 |
| Vacuum processing apparatus Grant 7,322,561 - Tauchi , et al. January 29, 2 | 2008-01-29 |
| Cover ring for a plasma processing apparatus Grant D557,425 - Nakamura , et al. December 11, 2 | 2007-12-11 |
| Grounded electrode for a plasma processing apparatus Grant D556,704 - Nakamura , et al. December 4, 2 | 2007-12-04 |
| Vacuum processing apparatus Grant 7,247,207 - Makino , et al. July 24, 2 | 2007-07-24 |
| Vacuum processing apparatus and vacuum processing method Grant 7,194,821 - Edamura , et al. March 27, 2 | 2007-03-27 |
| Vacuum processing apparatus and vacuum processing method App 20060168844 - Edamura; Manabu ; et al. | 2006-08-03 |
| Vacuum processing apparatus App 20060054854 - Tauchi; Susumu ; et al. | 2006-03-16 |
| Plasma processing apparatus App 20060054278 - Makino; Akitaka ; et al. | 2006-03-16 |
| Vacuum processing apparatus App 20060057008 - Tauchi; Susumu ; et al. | 2006-03-16 |
| Plasma processing apparatus App 20050193953 - Makino, Akitaka ; et al. | 2005-09-08 |
| Plasma processing apparatus App 20050194093 - Makino, Akitaka ; et al. | 2005-09-08 |
| Vacuum processing apparatus App 20050051092 - Makino, Akitaka ; et al. | 2005-03-10 |
| Plasma processing apparatus App 20050051089 - Tauchi, Susumu ; et al. | 2005-03-10 |
| Vacuum processing apparatus App 20050051093 - Makino, Akitaka ; et al. | 2005-03-10 |
| Vacuum processing apparatus App 20050051091 - Makino, Akitaka ; et al. | 2005-03-10 |
| Plasma processing apparatus Grant 6,837,937 - Tauchi , et al. January 4, 2 | 2005-01-04 |
| Plasma processing apparatus App 20040040507 - Tauchi, Susumu ; et al. | 2004-03-04 |
| Plasma processing method and plasma processing apparatus App 20030201256 - Tauchi, Susumu ; et al. | 2003-10-30 |
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