Upper chamber for a plasma processing apparatus

Description

FIG. 1 is a front and top perspective view of an upper chamber for a plasma processing apparatus according to the design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 6; and,

FIG. 9 is a partially enlarged view taken along line 9-9 of FIG. 8.

Claims

CLAIM The ornamental design for an upper chamber for a plasma processing apparatus, as shown and described.

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Inventors:	Tauchi; Susumu (Tokyo, JP), Uemura; Takashi (Tokyo, JP), Sato; Kohei (Tokyo, JP)
Applicant:	Name City State Country Type Hitachi High-Technologies Corporation Minato-ku, Tokyo N/A JP
Assignee:	Hitachi High-Technologies Corporation (Tokyo, JP)
Appl. No.:	D/544,068
Filed:	October 30, 2015

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Foreign Application Priority Data

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Jun 12, 2015 [JP]			2015-013035

Current U.S. Class:	D13/182; D15/138
Current International Class:	1303
Field of Search:	;D13/158-177,179,180,182,199,122,144 ;D10/104.1,108 ;D11/143,144,152 ;D14/216,240,356,509 ;D17/22 ;D23/323,328,333,335,336,337,341,352,357,370,385,386,399,400,499 ;D12/303,315 ;118/50,722,715,724,733 ;205/118,123 ;D9/500,452,454 ;D15/122,199,138 ;D8/16,19,323,399 ;D16/135,219,302 ;D7/367,404,503,523,584,586,624.1,630,640,677 ;D26/24,36,110

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References Cited [Referenced By]

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U.S. Patent Documents

4153907	May 1979	Kofron
D274836	July 1984	Smith
5641375	June 1997	Nitescu
D404369	January 1999	Kawachi
D448729	October 2001	Asao
D491963	June 2004	Doba
D716240	October 2014	Lau
2001/0023821	September 2001	Harris
2001/0035131	November 2001	Sakuma
2004/0069223	April 2004	Tzeng
2012/0018402	January 2012	Carducci
2013/0292254	November 2013	Kumar
2014/0097088	April 2014	Stowell
2016/0307743	October 2016	Brown

Primary Examiner: Asch; Jeffrey D
Assistant Examiner: Bell; Tracey J
Attorney, Agent or Firm: Crowell & Moring LLP