SASAKI; Yasuharu

Patent Applications and Registrations

Patent applications and USPTO patent grants for SASAKI; Yasuharu.The latest application filed is for "substrate support".

Company Profile

27.62.75

SASAKI; Yasuharu - Miyagi JP
SASAKI; Yasuharu - Kurokawa-gun Miyagi
Sasaki; Yasuharu - Nirasaki JP
SASAKI; Yasuharu - Nirasaki City JP
Sasaki; Yasuharu - Nirasaki-shi JP
Sasaki; Yasuharu - Yamanashi JP
Sasaki; Yasuharu - Machida JP
Sasaki; Yasuharu - Tsukui-gun JP
Sasaki; Yasuharu - Hokkaido JP
Sasaki; Yasuharu - Chuo-ku Sapporo-shi Hokkai-do 064-0918 JP
Sasaki; Yasuharu - Nobeoka JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Support App 20220285138 - YAMAGUCHI; Shin ; et al.	2022-09-08
Stage and plasma processing apparatus Grant 11,437,223 - Sasaki , et al. September 6, 2	2022-09-06
Plasma processing apparatus and plasma processing method Grant 11,417,500 - Sasaki , et al. August 16, 2	2022-08-16
Electrostatic Chuck, Focus Ring, Support Base, Plasma Processing Apparatus, And Plasma Processing Method App 20210366694 - SASAKI; Yasuharu ; et al.	2021-11-25
Substrate Support And Substrate Processing Apparatus App 20210327741 - NAGAYAMA; Akira ; et al.	2021-10-21
Mounting Base, Substrate Processing Device, Edge Ring, And Edge Ring Transfer Method App 20210327688 - SASAKI; Yasuharu ; et al.	2021-10-21
Edge Ring, Stage And Substrate Processing Apparatus App 20210319987 - CHIBA; Ryo ; et al.	2021-10-14
Focus Ring And Substrate Processing Apparatus App 20210316416 - TOMIOKA; Taketoshi ; et al.	2021-10-14
Substrate Support And Plasma Processing Apparatus App 20210305025 - TAMURA; Hajime ; et al.	2021-09-30
Electrostatic chuck, substrate processing apparatus, and substrate holding method Grant 11,133,759 - Sasaki September 28, 2	2021-09-28
Plasma Processing Apparatus, Semiconductive Member, And Semiconductive Ring App 20210280397 - KUROSAWA; Yoichi ; et al.	2021-09-09
Plasma Processing Apparatus And Plasma Processing Method App 20210233794 - MATSUYAMA; Shoichiro ; et al.	2021-07-29
Dechuck control method and plasma processing apparatus Grant 11,037,815 - Sasaki , et al. June 15, 2	2021-06-15
Plasma processing apparatus and plasma processing method Grant 11,004,717 - Matsuyama , et al. May 11, 2	2021-05-11
Plasma Processing Apparatus And Plasma Processing Method App 20210118647 - SASAKI; Junichi ; et al.	2021-04-22
Mounting Table And Plasma Processing Apparatus App 20210082733 - SASAKI; Yasuharu ; et al.	2021-03-18
Plasma Processing Apparatus, Electrostatic Attraction Method, And Electrostatic Attraction Program App 20210074522 - MATSUYAMA; Shoichiro ; et al.	2021-03-11
Plasma processing apparatus Grant 10,910,252 - Sasaki , et al. February 2, 2	2021-02-02
Substrate Processing Apparatus And Substrate Support App 20210005495 - SASAKI; Yasuharu ; et al.	2021-01-07
Power feed structure and plasma processing apparatus Grant 10,886,108 - Sasaki , et al. January 5, 2	2021-01-05
Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program Grant 10,879,050 - Matsuyama , et al. December 29, 2	2020-12-29
Stage And Plasma Processing Apparatus App 20200402777 - SASAKI; Yasuharu ; et al.	2020-12-24
Electrostatic Chuck, Support Platform, And Plasma Processing Apparatus App 20200388472 - TAKAYAMA; Masato ; et al.	2020-12-10
Plasma Processing Apparatus App 20200373130 - Tanikawa; Takehiro ; et al.	2020-11-26
Electrostatic attraction method Grant 10,832,930 - Hirai , et al. November 10, 2	2020-11-10
Electrostatic chucking method and substrate processing apparatus Grant 10,825,709 - Sasaki , et al. November 3, 2	2020-11-03
Stage And Substrate Processing Apparatus App 20200335384 - CHIBA; Ryo ; et al.	2020-10-22
Mounting Stage, Substrate Processing Device, and Edge Ring App 20200194239 - SASAKI; Yasuharu ; et al.	2020-06-18
Power Feed Structure And Plasma Processing Apparatus App 20200194240 - SASAKI; Yasuharu ; et al.	2020-06-18
Structure Of Mounting Table And Semiconductor Processing Apparatus App 20200185250 - SATOH; Naoyuki ; et al.	2020-06-11
Substrate Support, Plasma Processing Apparatus, And Focus Ring App 20200152428 - SASAKI; Yasuharu ; et al.	2020-05-14
Substrate Support And Plasma Processing Apparatus App 20200152429 - SASAKI; Yasuharu ; et al.	2020-05-14
Placing Table, Positioning Method Of Edge Ring And Substrate Processing Apparatus App 20200144036 - Sasaki; Yasuharu ; et al.	2020-05-07
Substrate Support Assembly, Plasma Processing Apparatus, And Plasma Processing Method App 20200118787 - IKEGAMI; Masashi ; et al.	2020-04-16
Temperature control method Grant 10,591,194 - Sasaki , et al.	2020-03-17
Temperature adjustment method using wet surface in a processing chamber Grant 10,541,158 - Sasaki , et al. Ja	2020-01-21
Plasma Processing Apparatus App 20190326153 - SASAKI; Yasuharu ; et al.	2019-10-24
Electrostatic Chuck, Substrate Processing Apparatus, And Substrate Holding Method App 20190319555 - SASAKI; Yasuharu	2019-10-17
Plasma processing apparatus Grant 10,410,902 - Sasaki , et al. Sept	2019-09-10
Plasma Processing Apparatus And Method For Manufacturing Mounting Stage App 20190267277 - SASAKI; Yasuharu ; et al.	2019-08-29
Plasma processing apparatus Grant 10,388,558 - Sasaki , et al. A	2019-08-20
Support Table, Substrate Processing Apparatus, Substrate Processing System, And Support Manufacturing Method App 20190237307 - SASAKI; Yasuharu	2019-08-01
Electrostatic Chucking Method And Substrate Processing Apparatus App 20190221464 - SASAKI; Yasuharu ; et al.	2019-07-18
Electrostatic chucking method and substrate processing apparatus Grant 10,269,607 - Sasaki , et al.	2019-04-23
Plasma Processing Apparatus And Plasma Processing Method App 20190088523 - MATSUYAMA; Shoichiro ; et al.	2019-03-21
Dechuck Control Method And Plasma Processing Apparatus App 20190074209 - SASAKI; Yasuharu ; et al.	2019-03-07
Electrostatic Attraction Method App 20180366360 - HIRAI; Katsunori ; et al.	2018-12-20
Plasma Processing Apparatus, Electrostatic Attraction Method, And Electrostatic Attraction Program App 20180350565 - MATSUYAMA; Shoichiro ; et al.	2018-12-06
Plasma processing apparatus and plasma processing method Grant 10,141,164 - Sasaki , et al. Nov	2018-11-27
Plasma Processing Apparatus App 20180204756 - Sasaki; Yasuharu ; et al.	2018-07-19
Focus Ring And Substrate Processing Apparatus App 20180182635 - Tsukahara; Toshiya ; et al.	2018-06-28
Plasma Processing Apparatus App 20180158711 - SASAKI; Yasuharu ; et al.	2018-06-07
Method of adsorbing target object on mounting table and plasma processing apparatus Grant 9,953,854 - Sasaki , et al. April 24, 2	2018-04-24
Mounting Table And Plasma Processing Apparatus App 20180090361 - SASAKI; Yasuharu ; et al.	2018-03-29
Temperature Control Method App 20180023871 - SASAKI; Yasuharu ; et al.	2018-01-25
Electrostatic chuck for semiconductor manufacturing equipment Grant D803,802 - Sasaki , et al. November 28, 2	2017-11-28
Electrostatic chuck for semiconductor manufacturing equipment Grant D802,472 - Sasaki , et al. November 14, 2	2017-11-14
Substrate Processing Apparatus And Temperature Adjustment Method App 20170323811 - SASAKI; Yasuharu ; et al.	2017-11-09
Temperature control apparatus, processing apparatus, and temperature control method Grant 9,791,191 - Sasaki , et al. October 17, 2	2017-10-17
Electrostatic chuck for semiconductor manufacturing equipment Grant D795,208 - Sasaki , et al. August 22, 2	2017-08-22
Electrostatic chuck apparatus Grant 9,721,822 - Sasaki , et al. August 1, 2	2017-08-01
Structure Of Mounting Table And Semiconductor Processing Apparatus App 20170207110 - SATOH; Naoyuki ; et al.	2017-07-20
Focus Ring And Substrate Processing Apparatus App 20170066103 - TOMIOKA; Taketoshi ; et al.	2017-03-09
Mounting table and plasma processing apparatus Grant 9,589,823 - Sasaki , et al. March 7, 2	2017-03-07
Zone temperature control structure Grant 9,484,232 - Sasaki November 1, 2	2016-11-01
Plasma processing method and plasma processing apparatus Grant 9,484,180 - Iwata , et al. November 1, 2	2016-11-01
Electrostatic chuck device Grant 9,412,635 - Sasaki , et al. August 9, 2	2016-08-09
Electrostatic Chucking Method And Substrate Processing Apparatus App 20160189994 - SASAKI; Yasuharu ; et al.	2016-06-30
Substrate mounting stage and surface treatment method therefor Grant 9,214,376 - Higuma , et al. December 15, 2	2015-12-15
Cooling system, substrate processing apparatus having cooling system and cooling method Grant 9,200,826 - Sasaki December 1, 2	2015-12-01
Electrostatic Chuck Apparatus App 20150179492 - Sasaki; Yasuharu ; et al.	2015-06-25
Method Of Adsorbing Target Object On Mounting Table And Plasma Processing Apparatus App 20150135514 - Sasaki; Yasuharu ; et al.	2015-05-21
Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device Grant 9,017,786 - Yoshioka , et al. April 28, 2	2015-04-28
Plasma Processing Apparatus And Plasma Processing Method App 20150090692 - SASAKI; Yasuharu ; et al.	2015-04-02
Electrostatic chuck apparatus Grant 8,981,263 - Sasaki , et al. March 17, 2	2015-03-17
Plasma Processing Method And Plasma Processing Apparatus App 20150069910 - Iwata; Manabu ; et al.	2015-03-12
Temperature control system and temperature control method for substrate mounting table Grant 8,950,469 - Sasaki , et al. February 10, 2	2015-02-10
Electrostatic Chuck Device App 20140376148 - Sasaki; Yasuharu ; et al.	2014-12-25
Temperature Control Apparatus, Processing Apparatus, And Temperature Control Method App 20140345317 - Sasaki; Yasuharu ; et al.	2014-11-27
Mounting Table And Plasma Processing Apparatus App 20140346152 - Sasaki; Yasuharu ; et al.	2014-11-27
Evaluation device and evaluation method for substrate mounting apparatus and evaluation substrate used for the same Grant 8,823,404 - Sasaki September 2, 2	2014-09-02
Substrate mounting table, substrate processing apparatus and substrate temperature control method Grant 8,696,862 - Sasaki April 15, 2	2014-04-15
Substrate Mounting Table, Substrate Processing Apparatus And Temperature Control Method App 20140076515 - SASAKI; Yasuharu	2014-03-20
Apparatus and method for evaluating a substrate mounting device Grant 8,573,836 - Sasaki , et al. November 5, 2	2013-11-05
Cooling System, Substrate Processing Apparatus Having Cooling System And Cooling Method App 20130219934 - Sasaki; Yasuharu	2013-08-29
Mounting table and plasma processing apparatus Grant 8,512,511 - Himori , et al. August 20, 2	2013-08-20
Method And Apparatus For Repairing An Electrostatic Chuck Device, And The Electrostatic Chuck Device App 20120300357 - Yoshioka; Ken ; et al.	2012-11-29
Electrostatic Chuck Apparatus App 20120281334 - Sasaki; Yasuharu ; et al.	2012-11-08
Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device Grant 8,252,132 - Yoshioka , et al. August 28, 2	2012-08-28
Substrate Processing Apparatus And Temperature Adjustment Method App 20120043024 - SASAKI; Yasuharu ; et al.	2012-02-23
Plasma processing apparatus, ring member and plasma processing method Grant 8,043,971 - Sasaki , et al. October 25, 2	2011-10-25
Zone Temperature Control Structure App 20110232888 - SASAKI; Yasuharu	2011-09-29
Evaluation Device And Evaluation Method For Substrate Mounting Apparatus And Evaluation Substrate Used For The Same App 20110181313 - Sasaki; Yasuharu	2011-07-28
Temperature Control System And Temperature Control Method For Substrate Mounting Table App 20110083837 - Sasaki; Yasuharu ; et al.	2011-04-14
Temperature Control Method And Temperature Control System For Substrate Mounting Table App 20110079367 - Sasaki; Yasuharu	2011-04-07
Surface treatment method Grant 7,815,492 - Sasaki , et al. October 19, 2	2010-10-19
Method And Apparatus For Repairing An Electrostatic Chuck Device, And The Electrostatic Chuck Device App 20100177455 - Yoshioka; Ken ; et al.	2010-07-15
Mounting Table For Plasma Processing Apparatus App 20100078129 - HIMORI; Shinji ; et al.	2010-04-01
Mounting Table And Plasma Processing Apparatus App 20100071850 - HIMORI; Shinji ; et al.	2010-03-25
Electrostatic chuck Grant 7,646,581 - Sasaki , et al. January 12, 2	2010-01-12
Substrate Mounting Table, Substrate Processing Apparatus And Temperature Control Method App 20090233443 - SASAKI; Yasuharu	2009-09-17
Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage medium Grant 7,582,491 - Sasaki , et al. September 1, 2	2009-09-01
Mounting Stage And Plasma Processing Apparatus App 20090199967 - Himori; Shinji ; et al.	2009-08-13
Substrate Mounting Table, Substrate Processing Apparatus And Substrate Temperature Control Method App 20090194264 - SASAKI; Yasuharu	2009-08-06
Plasma Processing Apparatus, Ring Member And Plasma Processing Method App 20090104781 - Sasaki; Yasuharu ; et al.	2009-04-23
Attracting plate of an electrostatic chuck for semiconductor manufacturing Grant D587,222 - Sasaki , et al. February 24, 2	2009-02-24
Surface Treatment Method App 20080280536 - Sasaki; Yasuharu ; et al.	2008-11-13
Substrate Mounting Stage And Surface Treatment Method Therefor App 20080217291 - HIGUMA; Masakazu ; et al.	2008-09-11
Apparatus And Method For Testing A Temperature Monitoring Substrate App 20080212640 - Sasaki; Yasuharu ; et al.	2008-09-04
Attracting plate of an electrostatic chuck for semiconductor manufacturing Grant D570,310 - Sasaki June 3, 2	2008-06-03
Apparatus And Method For Evaluating A Substrate Mounting Device App 20080098833 - Sasaki; Yasuharu ; et al.	2008-05-01
Method For Diagnosing Electrostatic Chuck, Vacuum Processing Apparatus, And Storage Medium App 20080102209 - SASAKI; Yasuharu ; et al.	2008-05-01
Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor Grant 7,337,745 - Komino , et al. March 4, 2	2008-03-04
Electrostatic Chuck App 20070217114 - Sasaki; Yasuharu ; et al.	2007-09-20
Plasma processing apparatus, and electrode structure and table structure of processing apparatus Grant 7,033,444 - Komino , et al. April 25, 2	2006-04-25
Plasma processing apparatus and mounting unit thereof App 20050274324 - Takahashi, Syuichi ; et al.	2005-12-15
Process for producing Trichoderma harzianum ferm BP-4346 Grant 6,955,912 - Sasaki , et al. October 18, 2	2005-10-18
Plasma processing apparatus, ring member and plasma processing method App 20050103275 - Sasaki, Yasuharu ; et al.	2005-05-19
Chlamydospores and process for producing the same App 20050003514 - Sasaki, Yasuharu ; et al.	2005-01-06
Exhaust ring for manufacturing semiconductors Grant D496,008 - Takahashi , et al. September 14, 2	2004-09-14
Plant activator, process for producing the same, activation method, activity promoter and method for applying the promoter Grant 6,753,295 - Sasaki June 22, 2	2004-06-22
Chlamydospores and process for producing the same App 20030092166 - Sasaki, Yasuharu ; et al.	2003-05-15
Isoquinolinesulfonyl derivatives Grant 4,525,589 - Hidaka , et al. June 25, 1	1985-06-25
6-Quinazolinesulfonyl derivatives and process for preparation thereof Grant 4,510,307 - Hidaka , et al. April 9, 1	1985-04-09
Isoquinolinesulfonyl derivatives and process for the preparation thereof Grant 4,456,757 - Hidaka , et al. June 26, 1	1984-06-26
Cyclic adenosine monophosphate 8-substituted derivatives Grant 4,048,307 - Yokota , et al. September 13, 1	1977-09-13