Exhaust ring for manufacturing semiconductors

Description

FIG. 1: is a front/top/left-side perspective view of an exhaust ring for manufacturing semiconductors showing our new design;

FIG. 2: is a front elevational view thereof;

FIG. 3: is a cross-sectional view taken along line 3--3 in FIG. 2;

FIG. 4: is an enlarged, partial, cross-sectional view taken along line 4--4 in FIG. 3;

FIG. 5: is a rear elevational view thereof;

FIG. 6: is a top plan view thereof;

FIG. 7: is a bottom plan view thereof; and,

FIG. 8: is a right-side elevational view thereof, the left-side elevational view being a mirror image and, therefore, not shown.

The exhaust ring for manufacturing semiconductors is used in a vacuum vessel for manufacturing semiconductors. The through holes in the central band of the exhaust ring for manufacturing semiconductors shown in the front view are passageways for gas. The cross-sectional design of the ring shows that the holes reduce as much as possible the occurrence of a decline in gas flow caused by the adherence of deposits during use. The outer diameter of the exhaust ring for manufacturing semiconductors is about 580 millimeters and the internal diameter is about 400 millimeters It is made of anodized aluminum and other materials.

Claims

We claim the ornamental design for exhaust ring for manufacturing semiconductors, as shown and described.

---

Inventors:	Takahashi; Syuichi (Nirasaki, JP), Sasaki; Yasuharu (Nirasaki, JP)
Assignee:	Tokyo Electron Limited (Tokyo, JP)
Appl. No.:	D/183,538
Filed:	June 12, 2003

---

Foreign Application Priority Data

---

Dec 12, 2002 [JP]			2002-034494

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;D8/399 ;D15/144 ;118/666,715,733 ;219/444.1 ;414/147,217,247,935-941 ;438/482,706,716,758 ;451/285

---

References Cited [Referenced By]

---

U.S. Patent Documents

5310453	May 1994	Fukasawa et al.
D404370	January 1999	Kimura
D404372	January 1999	Ishii
6068441	May 2000	Raaijmakers et al.
6155915	December 2000	Raeder
2003/0017714	January 2003	Taniyama et al.
2003/0124820	July 2003	Johnsgard et al.
2004/0025788	February 2004	Ogasawara et al.
2004/0056017	March 2004	Renken

Primary Examiner: Deshmukh; Prabhakar
Assistant Examiner: Sikder; Selina
Attorney, Agent or Firm: Ladas & Parry