| Patent | Date |
|---|
Methods And Systems For Forming A Layer Comprising Aluminum, Titanium, And Carbon
App 20220285147 - Chen; Lifu ; et al. | 2022-09-08 |
Deposition of oxide thin films
Grant 11,430,656 - Haukka , et al. August 30, 2 | 2022-08-30 |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
Grant 11,398,382 - Mousa , et al. July 26, 2 | 2022-07-26 |
Wafer Handling Chamber With Moisture Reduction
App 20220165595 - Raisanen; Petri ; et al. | 2022-05-26 |
Structures Including Metal Carbide Material, Devices Including The Structures, And Methods Of Forming Same
App 20220149175 - Raisanen; Petri ; et al. | 2022-05-12 |
Wafer handling chamber with moisture reduction
Grant 11,270,899 - Raisanen , et al. March 8, 2 | 2022-03-08 |
Methods For Depositing A Titanium Aluminum Carbide Film Structure On A Substrate And Related Semiconductor Structures
App 20220051895 - Raisanen; Petri ; et al. | 2022-02-17 |
Structures including metal carbide material, devices including the structures, and methods of forming same
Grant 11,242,598 - Raisanen , et al. February 8, 2 | 2022-02-08 |
Titanium Aluminum And Tantalum Aluminum Thin Films
App 20210399111 - Haukka; Suvi ; et al. | 2021-12-23 |
Methods For Forming A Semiconductor Device Structure And Related Semiconductor Device Structures
App 20210391440 - Zhu; Chiyu ; et al. | 2021-12-16 |
System And Methods For Direct Liquid Injection Of Vanadium Precursors
App 20210371978 - Shero; Eric James ; et al. | 2021-12-02 |
Methods And Systems For Delivery Of Vanadium Compounds
App 20210348267 - Dezelah; Charles ; et al. | 2021-11-11 |
Methods Of Forming Structures Including Vanadium Boride And Vanadium Phosphide Layers
App 20210335612 - Deminskyi; Petro ; et al. | 2021-10-28 |
Method Of Forming Chromium Nitride Layer And Structure Including The Chromium Nitride Layer
App 20210327715 - Xie; Qi ; et al. | 2021-10-21 |
Method For Forming A Doped Metal Carbide Film On A Substrate And Related Semiconductor Device Structures
App 20210328036 - Li; Dong ; et al. | 2021-10-21 |
Titanium aluminum and tantalum aluminum thin films
Grant 11,139,383 - Haukka , et al. October 5, 2 | 2021-10-05 |
Deposition Of Hafnium Oxide Within A High Aspect Ratio Hole
App 20210249263 - Kim; Jiyeon ; et al. | 2021-08-12 |
Method of forming a doped metal carbide film on a substrate and related semiconductor device structures
Grant 11,056,567 - Li , et al. July 6, 2 | 2021-07-06 |
Method For Depositing A Material Film On A Substrate Within A Reaction Chamber By A Cyclical Deposition Process And Related Device Structures
App 20210066084 - Raisanen; Petri ; et al. | 2021-03-04 |
Method Of Forming An Electrode On A Substrate And A Semiconductor Device Structure Including An Electrode
App 20210028021 - MOUSA; MOATAZ BELLAH ; et al. | 2021-01-28 |
Methods for forming low temperature semiconductor layers and related semiconductor device structures
Grant 10,886,123 - Raisanen , et al. January 5, 2 | 2021-01-05 |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
Grant 10,872,771 - Raisanen , et al. December 22, 2 | 2020-12-22 |
Deposition of metal borides and silicides
Grant 10,865,475 - Raisanen , et al. December 15, 2 | 2020-12-15 |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
Grant 10,847,371 - Mousa , et al. November 24, 2 | 2020-11-24 |
Gas distribution device for a wafer processing apparatus
Grant 10,829,852 - Raisanen , et al. November 10, 2 | 2020-11-10 |
Methods For Forming A Semiconductor Device Structure And Related Semiconductor Device Structures
App 20200343358 - Zhu; Chiyu ; et al. | 2020-10-29 |
Titanium Aluminum And Tantalum Aluminum Thin Films
App 20200328285 - Haukka; Suvi ; et al. | 2020-10-15 |
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
Grant 10,804,098 - Raisanen , et al. October 13, 2 | 2020-10-13 |
Methods for forming a semiconductor device structure and related semiconductor device structures
Grant 10,734,497 - Zhu , et al. | 2020-08-04 |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
Grant 10,720,331 - Raisanen , et al. | 2020-07-21 |
Methods for forming a semiconductor device and related semiconductor device structures
Grant 10,643,904 - Xie , et al. | 2020-05-05 |
Titanium aluminum and tantalum aluminum thin films
Grant 10,636,889 - Haukka , et al. | 2020-04-28 |
Gas Distribution Device For A Wafer Processing Apparatus
App 20200056282 - Raisanen; Petri ; et al. | 2020-02-20 |
Structures Including Metal Carbide Material, Devices Including The Structures, And Methods Of Forming Same
App 20190390338 - Raisanen; Petri ; et al. | 2019-12-26 |
Wafer Handling Chamber With Moisture Reduction
App 20190371640 - Raisanen; Petri ; et al. | 2019-12-05 |
Methods for semiconductor passivation by nitridation after oxide removal
Grant 10,490,475 - Xie , et al. Nov | 2019-11-26 |
Method Of Forming A Doped Metal Carbide Film On A Substrate And Related Semiconductor Device Structures
App 20190348515 - Li; Dong ; et al. | 2019-11-14 |
Structures including metal carbide material, devices including the structures, and methods of forming same
Grant 10,458,018 - Raisanen , et al. Oc | 2019-10-29 |
Method Of Forming An Electrode On A Substrate And A Semiconductor Device Structure Including An Electrode
App 20190304790 - Mousa; Moataz Bellah ; et al. | 2019-10-03 |
Semiconductor Processing Apparatus And A Method For Processing A Substrate
App 20190271078 - Raisanen; Petri ; et al. | 2019-09-05 |
Method For Depositing A Material Film On A Substrate Within A Reaction Chamber By A Cyclical Deposition Process And Related Devi
App 20190221433 - Raisanen; Petri ; et al. | 2019-07-18 |
Methods For Forming A Transition Metal Nitride Film On A Substrate By Atomic Layer Deposition And Related Semiconductor Device S
App 20190164763 - Raisanen; Petri ; et al. | 2019-05-30 |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
Grant 10,229,833 - Raisanen , et al. | 2019-03-12 |
Titanium Aluminum And Tantalum Aluminum Thin Films
App 20190043962 - Haukka; Suvi ; et al. | 2019-02-07 |
Methods For Forming A Semiconductor Device Structure And Related Semiconductor Device Structures
App 20190027573 - Zhu; Chiyu ; et al. | 2019-01-24 |
Methods For Forming Low Temperature Semiconductor Layers And Related Semiconductor Device Structures
App 20180350588 - Raisanen; Petri ; et al. | 2018-12-06 |
Deposition of metal borides
Grant 10,087,522 - Raisanen , et al. October 2, 2 | 2018-10-02 |
Titanium aluminum and tantalum aluminum thin films
Grant 10,002,936 - Haukka , et al. June 19, 2 | 2018-06-19 |
Deposition Of Oxide Thin Films
App 20180151345 - Haukka; Suvi P. ; et al. | 2018-05-31 |
Selective formation of metal silicides
Grant 9,981,286 - Woodruff , et al. May 29, 2 | 2018-05-29 |
Methods For Forming A Semiconductor Device And Related Semiconductor Device Structures
App 20180122709 - Xie; Qi ; et al. | 2018-05-03 |
Methods For Forming A Transition Metal Nitride Film On A Substrate By Atomic Layer Deposition And Related Semiconductor Device Structures
App 20180122642 - Raisanen; Petri ; et al. | 2018-05-03 |
System and method for gas-phase passivation of a semiconductor surface
Grant 9,911,676 - Tang , et al. March 6, 2 | 2018-03-06 |
System and method for gas-phase passivation of a semiconductor surface
Grant 9,905,492 - Tang , et al. February 27, 2 | 2018-02-27 |
Deposition Of Metal Borides
App 20170306478 - Raisanen; Petri ; et al. | 2017-10-26 |
Deposition Of Metal Borides And Silicides
App 20170306479 - Raisanen; Petri ; et al. | 2017-10-26 |
Method and system to reduce outgassing in a reaction chamber
Grant 9,790,595 - Jung , et al. October 17, 2 | 2017-10-17 |
Selective Formation Of Metal Silicides
App 20170259298 - Woodruff; Jacob Huffman ; et al. | 2017-09-14 |
Methods for semiconductor passivation by nitridation
Grant 9,711,350 - Xie , et al. July 18, 2 | 2017-07-18 |
System And Method For Gas-phase Passivation Of A Semiconductor Surface
App 20170117203 - Tang; Fu ; et al. | 2017-04-27 |
System And Method For Gas-phase Passivation Of A Semiconductor Surface
App 20170117202 - Tang; Fu ; et al. | 2017-04-27 |
System and method for gas-phase sulfur passivation of a semiconductor surface
Grant 9,558,931 - Tang , et al. January 31, 2 | 2017-01-31 |
Structures Including Metal Carbide Material, Devices Including The Structures, And Methods Of Forming Same
App 20160376704 - Raisanen; Petri ; et al. | 2016-12-29 |
Methods For Semiconductor Passivation By Nitridation After Oxide Removal
App 20160358835 - Xie; Qi ; et al. | 2016-12-08 |
Methods For Semiconductor Passivation By Nitridation
App 20160358772 - Xie; Qi ; et al. | 2016-12-08 |
Method for forming source/drain contact structure with chalcogen passivation
Grant 9,461,134 - Xie , et al. October 4, 2 | 2016-10-04 |
Method of making a resistive random access memory device with metal-doped resistive switching layer
Grant 9,385,164 - Xie , et al. July 5, 2 | 2016-07-05 |
Titanium Aluminum And Tantalum Aluminum Thin Films
App 20160118261 - Haukka; Suvi ; et al. | 2016-04-28 |
Semiconductor device dielectric interface layer
Grant 9,177,784 - Raisanen , et al. November 3, 2 | 2015-11-03 |
Method And System To Reduce Outgassing In A Reaction Chamber
App 20150140210 - Jung; Sung-Hoon ; et al. | 2015-05-21 |
Method and system to reduce outgassing in a reaction chamber
Grant 8,993,054 - Jung , et al. March 31, 2 | 2015-03-31 |
Method of making a resistive random access memory device
Grant 8,956,939 - Xie , et al. February 17, 2 | 2015-02-17 |
Method And System To Reduce Outgassing In A Reaction Chamber
App 20150017319 - Jung; Sung-Hoon ; et al. | 2015-01-15 |
Systems And Methods For Thin-film Deposition Of Metal Oxides Using Excited Nitrogen-oxygen Species
App 20140346650 - Raisanen; Petri ; et al. | 2014-11-27 |
Method Of Making A Resistive Random Access Memory Device
App 20140322885 - Xie; Qi ; et al. | 2014-10-30 |
Method Of Making A Resistive Random Access Memory Device With Metal-doped Resistive Switching Layer
App 20140322862 - Xie; Qi ; et al. | 2014-10-30 |
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
Grant 8,802,201 - Raisanen , et al. August 12, 2 | 2014-08-12 |
Semiconductor Device Dielectric Interface Layer
App 20140159170 - Raisanen; Petri ; et al. | 2014-06-12 |
Semiconductor device dielectric interface layer
Grant 8,728,832 - Raisanen , et al. May 20, 2 | 2014-05-20 |
System And Method For Gas-phase Sulfur Passivation Of A Semiconductor Surface
App 20140027884 - Tang; Fu ; et al. | 2014-01-30 |
Semiconductor Device Dielectric Interface Layer
App 20130292807 - Raisanen; Petri ; et al. | 2013-11-07 |
Plasma-enhanced deposition process for forming a metal oxide thin film and related structures
Grant 8,383,525 - Raisanen , et al. February 26, 2 | 2013-02-26 |
Method of forming non-conformal layers
Grant 8,334,218 - Van Nooten , et al. December 18, 2 | 2012-12-18 |
Systems And Methods For Thin-film Deposition Of Metal Oxides Using Excited Nitrogen-oxygen Species
App 20120098107 - Raisanen; Petri ; et al. | 2012-04-26 |
Method Of Forming Non-conformal Layers
App 20100022099 - Van Nooten; Sebastian E. ; et al. | 2010-01-28 |
Plasma-enhanced Deposition Process For Forming A Metal Oxide Thin Film And Related Structures
App 20090269941 - Raisanen; Petri ; et al. | 2009-10-29 |
Method of forming non-conformal layers
Grant 7,608,549 - Van Nooten , et al. October 27, 2 | 2009-10-27 |
Method of depositing rare earth oxide thin films
Grant 7,498,272 - Niinisto , et al. March 3, 2 | 2009-03-03 |
Method Of Depositing Rare Earth Oxide Thin Films
App 20090035949 - Niinisto; Jaakko ; et al. | 2009-02-05 |
Method of forming non-conformal layers
App 20070026540 - Nooten; Sebastian E. van ; et al. | 2007-02-01 |
Method of depositing rare earth oxide thin films
Grant 6,858,546 - Niinist&omacr , et al. February 22, 2 | 2005-02-22 |
Method of depositing rare earth oxide thin films
App 20030072882 - Niinisto, Jaakko ; et al. | 2003-04-17 |
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