MILLER; Keith A.
Patent Applications and Registrations
Patent applications and USPTO patent grants for MILLER; Keith A..The latest application filed is for "methods and apparatus for processing a substrate".
Company Profile
18.83.106
Trademarks
- MILLER; Keith A. - Mountain View CA
- Miller; Keith A. - Sunnyvale CA
- Miller; Keith A - Mountain View CA
- - unknown
- Miller; Keith A. - Boylston MA US
- Miller; Keith A - Oviedo FL US
- Miller; Keith A. - Oviedo FL
- Miller; Keith A. - Schererville IN
- Miller; Keith A. - Twinsburg OH
- Miller; Keith A. - Hatfield PA
- Miller; Keith A. - Allentown PA
Trademarks
Patent Activity
| Patent | Date |
|---|---|
| Methods And Apparatus For Passivating A Target App 20220307126 - DU; Chao ; et al. | 2022-09-29 |
| Methods And Apparatus For Processing A Substrate App 20220310364 - CHONG; Halbert ; et al. | 2022-09-29 |
| Methods And Apparatus For Processing A Substrate App 20220310363 - CHONG; Halbert ; et al. | 2022-09-29 |
| Optical Emission Spectroscopy Control Of Gas Flow In Processing Chambers App 20220291702 - DiGiacomo; Philip ; et al. | 2022-09-15 |
| Waveform Shape Factor For Pulsed Pvd Power App 20220162746 - Zhang; Shouyin ; et al. | 2022-05-26 |
| Heated shield for physical vapor deposition chamber Grant 11,339,466 - Lavitsky , et al. May 24, 2 | 2022-05-24 |
| Isolator Ring Clamp And Physical Vapor Deposition Chamber Incorporating Same App 20220154329 - LAVITSKY; Ilya ; et al. | 2022-05-19 |
| Pvd Target Having Self-retained Low Friction Pads App 20220127714 - LAVITSKY; Ilya ; et al. | 2022-04-28 |
| Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes App 20220020577 - WANG; Xiaodong ; et al. | 2022-01-20 |
| Process shield for a substrate processing chamber Grant D941,371 - Lavitsky , et al. January 18, 2 | 2022-01-18 |
| Process shield for a substrate processing chamber Grant D941,372 - Lavitsky , et al. January 18, 2 | 2022-01-18 |
| Gas flow system Grant 11,211,230 - Miller , et al. December 28, 2 | 2021-12-28 |
| Apparatus For Improved Anode-cathode Ratio For Rf Chambers App 20210395877 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2021-12-23 |
| Deposition ring for a substrate processing chamber Grant D934,315 - Lavitsky , et al. October 26, 2 | 2021-10-26 |
| Methods And Apparatus For Processing A Substrate App 20210319989 - CHONG; Halbert ; et al. | 2021-10-14 |
| Methods And Apparatus For Passivating A Target App 20210317568 - DU; Chao ; et al. | 2021-10-14 |
| Heated Shield For Physical Vapor Deposition Chamber App 20210292888 - Lavitsky; Ilya ; et al. | 2021-09-23 |
| Methods and apparatus for controlling ion fraction in physical vapor deposition processes Grant 11,037,768 - Wang , et al. June 15, 2 | 2021-06-15 |
| Substrate processing chamber having improved process volume sealing Grant 10,998,172 - Lavitsky , et al. May 4, 2 | 2021-05-04 |
| Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes App 20210071294 - WANG; Xiaodong ; et al. | 2021-03-11 |
| Substrate Support System App 20210043432 - MAZZOCCO; John ; et al. | 2021-02-11 |
| Em Source For Enhanced Plasma Control App 20210017639 - Jansen; Alexander ; et al. | 2021-01-21 |
| Gas Flow System App 20200335310 - MILLER; Keith A. ; et al. | 2020-10-22 |
| Shield Kit For Process Chamber App 20200321202 - JOHANSON, JR.; William R. ; et al. | 2020-10-08 |
| Substrate Support Pedestal App 20200312683 - LAVITSKY; Ilya ; et al. | 2020-10-01 |
| Target Assembly Shield App 20200303172 - Johanson, JR.; William R. ; et al. | 2020-09-24 |
| Heated substrate support ring Grant 10,727,092 - Miller | 2020-07-28 |
| Collimator for use in a physical vapor deposition chamber Grant 10,697,057 - Yoshidome , et al. | 2020-06-30 |
| Swivel seat system Grant 10610433 - | 2020-04-07 |
| Methods And Apparatus For Uniformity Control In Selective Plasma Vapor Deposition App 20200090914 - MILLER; KEITH A | 2020-03-19 |
| Method of use of remote cooking reminder system Grant 10466112 - | 2019-11-05 |
| Remote cooking reminder system Grant 10337929 - | 2019-07-02 |
| Methods And Apparatus For Physical Vapor Deposition App 20190189465 - MILLER; KEITH A. ; et al. | 2019-06-20 |
| Physical vapor deposition (PVD) plasma energy control per dynamic magnetron control Grant 10,312,065 - Riker , et al. | 2019-06-04 |
| PVD plasma control using a magnet edge lift mechanism Grant 10,283,331 - Miller | 2019-05-07 |
| Substrate Processing Chamber Having Improved Process Volume Sealing App 20190096638 - LAVITSKY; ILYA ; et al. | 2019-03-28 |
| Manual brewing press Grant 10182678 - | 2019-01-22 |
| Target profile for a physical vapor deposition chamber target Grant D825,504 - Zhang , et al. August 14, 2 | 2018-08-14 |
| Apparatus And Method For Processing Thin Substrates App 20180174873 - Miller; Keith A. | 2018-06-21 |
| Electrostatic chuck design for high temperature RF applications Grant 9,984,911 - Hanson , et al. May 29, 2 | 2018-05-29 |
| Collimator For Use In A Physical Vapor Deposition Chamber App 20180142342 - YOSHIDOME; GOICHI ; et al. | 2018-05-24 |
| Removable Substrate Plane Structure Ring App 20180122670 - Allen; Ernest E. ; et al. | 2018-05-03 |
| Physical vapor deposition (PVD) target having low friction pads Grant 9,960,021 - Riker , et al. May 1, 2 | 2018-05-01 |
| Apparatus for gas injection in a physical vapor deposition chamber Grant 9,957,601 - Rasheed , et al. May 1, 2 | 2018-05-01 |
| Apparatus for PVD dielectric deposition Grant 9,928,997 - Miller , et al. March 27, 2 | 2018-03-27 |
| Physical Vapor Deposition (pvd) Plasma Energy Control Per Dynamic Magnetron Control App 20180025895 - RIKER; Martin Lee ; et al. | 2018-01-25 |
| Deposition Ring And Electrostatic Chuck For Physical Vapor Deposition Chamber App 20180010242 - RASHEED; Muhammad ; et al. | 2018-01-11 |
| Methods and apparatus for thermally treating a substrate Grant 9,848,461 - Miller December 19, 2 | 2017-12-19 |
| Target profile for a physical vapor deposition chamber target Grant D797,067 - Zhang , et al. September 12, 2 | 2017-09-12 |
| Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes App 20170253959 - WANG; Xiaodong ; et al. | 2017-09-07 |
| Demand Based Hvac (heating, Ventilation, Air Conditioning) Control App 20170219219 - Miller; Keith A. ; et al. | 2017-08-03 |
| Deposition ring and electrostatic chuck for physical vapor deposition chamber Grant 9,689,070 - Rasheed , et al. June 27, 2 | 2017-06-27 |
| Physical vapor deposition RF plasma shield deposit control Grant 9,605,341 - Miller March 28, 2 | 2017-03-28 |
| Sputter source for use in a semiconductor process chamber Grant 9,580,795 - Miller , et al. February 28, 2 | 2017-02-28 |
| Shutter blade and robot blade with CTE compensation Grant 9,564,348 - Lavitsky , et al. February 7, 2 | 2017-02-07 |
| PVD target for self-centering process shield Grant 9,534,286 - Yoshidome , et al. January 3, 2 | 2017-01-03 |
| Deposition Ring And Electrostatic Chuck For Physical Vapor Deposition Chamber App 20160340775 - RASHEED; Muhammad ; et al. | 2016-11-24 |
| Wafer processing deposition shielding components Grant 9,476,122 - Riker , et al. October 25, 2 | 2016-10-25 |
| Electrostatic Chuck Design For High Temperature Rf Applications App 20160172227 - HANSON; Ryan ; et al. | 2016-06-16 |
| Apparatus For Pvd Dielectric Deposition App 20160172168 - Miller; Keith A. ; et al. | 2016-06-16 |
| Methods for processing a substrate using multiple substrate support positions Grant 9,315,891 - Lee , et al. April 19, 2 | 2016-04-19 |
| Substrate processing system with mechanically floating target assembly Grant 9,303,311 - Young , et al. April 5, 2 | 2016-04-05 |
| Methods And Apparatus For Thermally Treating A Substrate App 20160095166 - MILLER; KEITH A. | 2016-03-31 |
| Substrate processing system having symmetric RF distribution and return paths Grant 9,255,322 - Young , et al. February 9, 2 | 2016-02-09 |
| PVD RF DC open/closed loop selectable magnetron Grant 9,249,500 - Miller February 2, 2 | 2016-02-02 |
| Cooled Process Tool Adapter For Use In Substrate Processing Chambers App 20150354054 - FRUCHTERMAN; WILLIAM R. ; et al. | 2015-12-10 |
| Method and apparatus for measuring pressure in a physical vapor deposition chamber Grant 9,177,763 - Rasheed , et al. November 3, 2 | 2015-11-03 |
| Wafer processing deposition shielding components Grant 9,062,379 - Riker , et al. June 23, 2 | 2015-06-23 |
| Physical Vapor Deposition (pvd) Target Having Low Friction Pads App 20150170888 - RIKER; MARTIN LEE ; et al. | 2015-06-18 |
| Wafer Processing Deposition Shielding Components App 20150162171 - Riker; Martin Lee ; et al. | 2015-06-11 |
| Pvd Plasma Control Using A Magnet Edge Lift Mechanism App 20150075970 - MILLER; KEITH A. | 2015-03-19 |
| Offset magnet compensation for non-uniform plasma Grant 8,920,613 - Boitnott , et al. December 30, 2 | 2014-12-30 |
| Deposition ring and electrostatic chuck for physical vapor deposition chamber Grant 8,911,601 - Rasheed , et al. December 16, 2 | 2014-12-16 |
| Homing device for magnetron rotating on two arms Grant 8,900,427 - Miller , et al. December 2, 2 | 2014-12-02 |
| Wear pin gap closure detection system for gas turbine engine Grant 8,864,446 - Singh , et al. October 21, 2 | 2014-10-21 |
| Method And Apparatus For Measuring Pressure In A Physical Vapor Deposition Chamber App 20140260544 - RASHEED; MUHAMMAD ; et al. | 2014-09-18 |
| Apparatus For Gas Injection In A Physical Vapor Deposition Chamber App 20140261177 - RASHEED; MUHAMMAD ; et al. | 2014-09-18 |
| Methods For Processing A Substrate Using Multiple Substrate Support Positions App 20140263169 - LEE; JOUNG JOO ; et al. | 2014-09-18 |
| Pvd Target For Self-centering Process Shield App 20140261180 - YOSHIDOME; GOICHI ; et al. | 2014-09-18 |
| Shutter Blade And Robot Blade With Cte Compensation App 20140271081 - LAVITSKY; Ilya ; et al. | 2014-09-18 |
| Vacuum Chambers And Components For Semiconductor Substrate Processing And Methods Of Fabrication App 20140250658 - MILLER; KEITH A. | 2014-09-11 |
| Sputter Source For Use In A Semiconductor Process Chamber App 20140251800 - MILLER; Keith A. ; et al. | 2014-09-11 |
| Physical Vapor Deposition Rf Plasma Shield Deposit Control App 20140251789 - MILLER; KEITH A. | 2014-09-11 |
| Pvd Rf Dc Open/closed Loop Selectable Magnetron App 20140216923 - MILLER; KEITH A. | 2014-08-07 |
| Wafer Processing Deposition Shielding Components App 20140190822 - RIKER; Martin Lee ; et al. | 2014-07-10 |
| Prediction and compensation of erosion in a magnetron sputtering target Grant 8,764,949 - Miller , et al. July 1, 2 | 2014-07-01 |
| Apparatus for enabling concentricity of plasma dark space Grant 8,702,918 - Ritchie , et al. April 22, 2 | 2014-04-22 |
| Heated Substrate Support Ring App 20140103027 - MILLER; KEITH A. | 2014-04-17 |
| Wafer processing deposition shielding components Grant 8,696,878 - Riker , et al. April 15, 2 | 2014-04-15 |
| Mechanism for continuously varying radial position of a magnetron Grant 8,685,215 - Miller , et al. April 1, 2 | 2014-04-01 |
| Target Center Positional Constraint For Physical Vapor Deposition (pvd) Processing Systems App 20140061041 - RIKER; MARTIN LEE ; et al. | 2014-03-06 |
| Target Cooling For Physical Vapor Deposition (pvd) Processing Systems App 20140061039 - RIKER; MARTIN LEE ; et al. | 2014-03-06 |
| Method And Apparatus Deposition Process Synchronization App 20140046475 - LAM; WINSOR ; et al. | 2014-02-13 |
| Wafer Processing Deposition Shielding Components App 20130334038 - Riker; Martin Lee ; et al. | 2013-12-19 |
| Prediction and compensation of erosion in a magnetron sputtering target App 20130313107 - Miller; Keith A. ; et al. | 2013-11-28 |
| Magnetron design for RF/DC physical vapor deposition Grant 8,580,094 - Wang , et al. November 12, 2 | 2013-11-12 |
| Compressor blade root heating system Grant 8,573,932 - Ross , et al. November 5, 2 | 2013-11-05 |
| Electrostatic chuck and methods of use thereof Grant 8,559,159 - Roy , et al. October 15, 2 | 2013-10-15 |
| Substrate Processing System Having Symmetric Rf Distribution And Return Paths App 20130256127 - YOUNG; DONNY ; et al. | 2013-10-03 |
| Substrate Processing System With Mechanically Floating Target Assembly App 20130256125 - YOUNG; DONNY ; et al. | 2013-10-03 |
| Method for predicting and compensating erosion in a magnetron sputtering target Grant 8,518,220 - Miller , et al. August 27, 2 | 2013-08-27 |
| Sputtering of thermally resistive materials including metal chalcogenides Grant 8,500,963 - Ye , et al. August 6, 2 | 2013-08-06 |
| Substrate Cleaning Chamber And Cleaning And Conditioning Methods App 20130192629 - Mehta; Vineet ; et al. | 2013-08-01 |
| Apparatus For Enabling Concentricity Of Plasma Dark Space App 20130153412 - RITCHIE; ALAN ; et al. | 2013-06-20 |
| Deposition Ring And Electrostatic Chuck For Physical Vapor Deposition Chamber App 20130112554 - RASHEED; MUHAMMAD ; et al. | 2013-05-09 |
| Substrate cleaning chamber and cleaning and conditioning methods Grant 8,435,379 - Mehta , et al. May 7, 2 | 2013-05-07 |
| Wear Pin Gap Closure Detection System For Gas Turbine Engine App 20120301276 - Singh; Ram Bahadur ; et al. | 2012-11-29 |
| Interior Antenna For Substrate Processing Chamber App 20120211358 - Miller; Keith A. ; et al. | 2012-08-23 |
| Wafer Processing Deposition Shielding Components App 20120211359 - Riker; Martin Lee ; et al. | 2012-08-23 |
| Method for Predicting and Compensating Erosion in a Magnetron Sputtering Target App 20120132518 - Miller; Keith A. ; et al. | 2012-05-31 |
| Interior antenna for substrate processing chamber Grant 8,187,416 - Miller , et al. May 29, 2 | 2012-05-29 |
| Deposition Ring And Electrostatic Chuck For Physical Vapor Deposition Chamber App 20120103257 - Rasheed; Muhammad ; et al. | 2012-05-03 |
| Prediction and compensation of erosion in a magnetron sputtering target Grant 8,133,360 - Miller , et al. March 13, 2 | 2012-03-13 |
| Electrostatic Chuck And Methods Of Use Thereof App 20120033340 - ROY; SHAMBHU N. ; et al. | 2012-02-09 |
| Compressor Blade Root Heating System App 20120034081 - Ross; Christopher W. ; et al. | 2012-02-09 |
| Magnetron Design For Rf/dc Physical Vapor Deposition App 20110311735 - WANG; RONGJUN ; et al. | 2011-12-22 |
| Homing device for magnetron rotating on two arms App 20110297538 - Miller; Keith A. ; et al. | 2011-12-08 |
| Tank frame Grant D646,452 - Miller , et al. October 4, 2 | 2011-10-04 |
| Coaxial shafts for radial positioning of rotating magnetron Grant 8,021,527 - Miller , et al. September 20, 2 | 2011-09-20 |
| Physical Vapor Deposition With A Variable Capacitive Tuner and Feedback Circuit App 20110209995 - Rasheed; Muhammad M. ; et al. | 2011-09-01 |
| Tank frame Grant D637,785 - Miller , et al. May 10, 2 | 2011-05-10 |
| Encapsulated and water cooled electromagnet array Grant 7,846,310 - Gillard , et al. December 7, 2 | 2010-12-07 |
| Mechanism for continuously varying radial position of a magnetron App 20100243440 - Miller; Keith A. ; et al. | 2010-09-30 |
| Magnetron having continuously variable radial position Grant 7,736,473 - Miller , et al. June 15, 2 | 2010-06-15 |
| Ground shield with reentrant feature Grant 7,718,045 - Tiller , et al. May 18, 2 | 2010-05-18 |
| Ring Assembly For Substrate Processing Chamber App 20100065216 - Tiller; Jennifer ; et al. | 2010-03-18 |
| Process Kit Shields And Methods Of Use Thereof App 20100055298 - Sommers; Joseph F. ; et al. | 2010-03-04 |
| Support ring assembly Grant 7,670,436 - Miller , et al. March 2, 2 | 2010-03-02 |
| Apparatus And Method For Uniform Deposition App 20090308732 - Cao; Yong ; et al. | 2009-12-17 |
| Wafer Processing Deposition Shielding Components App 20090260982 - Riker; Martin Lee ; et al. | 2009-10-22 |
| Shields usable with an inductively coupled plasma reactor Grant 7,569,125 - Gung , et al. August 4, 2 | 2009-08-04 |
| Prediction And Compensation Of Erosion In A Magnetron Sputtering Target App 20090159428 - MILLER; KEITH A. ; et al. | 2009-06-25 |
| Notched deposition ring Grant 7,520,969 - Miller April 21, 2 | 2009-04-21 |
| Substrate Cleaning Chamber And Cleaning And Conditioning Methods App 20080276958 - Mehta; Vineet ; et al. | 2008-11-13 |
| Fiber retention sleeve Grant 7,418,186 - Grubish , et al. August 26, 2 | 2008-08-26 |
| Offset Magnet Compensation For Non-uniform Plasma App 20080179183 - BOITNOTT; CHRISTOPHER ; et al. | 2008-07-31 |
| Encapsulated And Water Cooled Electromagnet Array App 20080141939 - Gillard; Andrew ; et al. | 2008-06-19 |
| Sputtering Of Thermally Resistive Materials Including Metal Chalcogenides App 20080099326 - YE; MENGQI ; et al. | 2008-05-01 |
| Coaxial Shafts for Radial Positioning of Rotating Magnetron App 20080060938 - MILLER; Keith A. ; et al. | 2008-03-13 |
| Ground Shield With Reentrant Feature App 20070295602 - Tiller; Jennifer W. ; et al. | 2007-12-27 |
| Ring assembly for substrate processing chamber App 20070283884 - Tiller; Jennifer ; et al. | 2007-12-13 |
| Notched deposition ring App 20070209931 - Miller; Keith A. | 2007-09-13 |
| Convertible fiber closure platform Grant 7,263,265 - Grubish , et al. August 28, 2 | 2007-08-28 |
| Optical fiber splice case Grant 7,239,789 - Grubish , et al. July 3, 2 | 2007-07-03 |
| Fiber for the home demarcation enclosure App 20070110223 - Pisczak; Philip J. ; et al. | 2007-05-17 |
| Interior antenna for substrate processing chamber App 20060260937 - Miller; Keith A. ; et al. | 2006-11-23 |
| Convertible fiber closure platform Grant 7,130,519 - Grubish , et al. October 31, 2 | 2006-10-31 |
| Fiber to the home demarcation enclosure App 20060233355 - Markiewicz; John B. ; et al. | 2006-10-19 |
| Convertible fiber closure platform App 20060222309 - Grubish; Christopher S. ; et al. | 2006-10-05 |
| Pet chew device App 20060134278 - Miller; Keith A. | 2006-06-22 |
| Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith Grant 7,041,201 - Gung , et al. May 9, 2 | 2006-05-09 |
| Reducing particle generation during sputter deposition Grant 7,041,200 - Le , et al. May 9, 2 | 2006-05-09 |
| Support ring assembly App 20060090706 - Miller; Keith A. ; et al. | 2006-05-04 |
| Optical fiber splice case App 20060083475 - Grubish; Christopher ; et al. | 2006-04-20 |
| Magnetron having continuously variable radial position App 20060076232 - Miller; Keith A. ; et al. | 2006-04-13 |
| Selectable dual position magnetron Grant 7,018,515 - Gung , et al. March 28, 2 | 2006-03-28 |
| Convertible fiber closure platform App 20050271344 - Grubish, Christopher S. ; et al. | 2005-12-08 |
| Selectable dual position magnetron App 20050211548 - Gung, Tza-Jing ; et al. | 2005-09-29 |
| Shields usable with an inductively coupled plasma reactor App 20050199491 - Gung, Tza-Jing ; et al. | 2005-09-15 |
| Fiber optic cable closure and assembly Grant 6,856,747 - Cloud , et al. February 15, 2 | 2005-02-15 |
| Fiber optic cable closure and assembly App 20040156611 - Cloud, Randy G. ; et al. | 2004-08-12 |
| Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith App 20040055880 - Gung, Tza-Jing ; et al. | 2004-03-25 |
| Reducing particle generation during sputter deposition App 20030196890 - Le, Hien-Minh Huu ; et al. | 2003-10-23 |
| Safety pressure regulator Grant 4,457,329 - Werley , et al. July 3, 1 | 1984-07-03 |
| Cryogenic embrittlement freezer with gas lock Grant 4,175,396 - Miller , et al. November 27, 1 | 1979-11-27 |
| Burner Of The Oxy-fuel Type Grant 3,856,457 - Miller December 24, 1 | 1974-12-24 |
| Water Cooling Method And Apparatus Employing Liquid Nitrogen Grant 3,672,182 - Stowasser , et al. June 27, 1 | 1972-06-27 |
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