Substrate processing system having symmetric RF distribution and return paths

Young , et al. February 9, 2

Patent Grant 9255322

U.S. patent number 9,255,322 [Application Number 13/436,776] was granted by the patent office on 2016-02-09 for substrate processing system having symmetric rf distribution and return paths. This patent grant is currently assigned to APPLIED MATERIALS, INC.. The grantee listed for this patent is Keith A. Miller, Muhammad Rasheed, Alan Ritchie, Donny Young. Invention is credited to Keith A. Miller, Muhammad Rasheed, Alan Ritchie, Donny Young.


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