Patent | Date |
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PVD buffer layers for LED fabrication Grant 11,011,676 - Zhu , et al. May 18, 2 | 2021-05-18 |
Methods And Apparatus For Reducing Sputtering Of A Grounded Shield In A Process Chamber App 20200312640 - RITCHIE; Alan ;   et al. | 2020-10-01 |
Process kit shield for improved particle reduction Grant 10,718,049 - Rasheed , et al. | 2020-07-21 |
Methods and apparatus for reducing sputtering of a grounded shield in a process chamber Grant 10,692,706 - Ritchie , et al. | 2020-06-23 |
Multi-zone Showerhead App 20190351433 - MUSTAFA; MUHANNAD ;   et al. | 2019-11-21 |
Apparatus for gas injection in a physical vapor deposition chamber Grant 9,957,601 - Rasheed , et al. May 1, 2 | 2018-05-01 |
Process Kit Shield For Improved Particle Reduction App 20180087147 - RASHEED; MUHAMMAD ;   et al. | 2018-03-29 |
Deposition Ring And Electrostatic Chuck For Physical Vapor Deposition Chamber App 20180010242 - RASHEED; Muhammad ;   et al. | 2018-01-11 |
Process kit shield for improved particle reduction Grant 9,834,840 - Rasheed , et al. December 5, 2 | 2017-12-05 |
Deposition ring and electrostatic chuck for physical vapor deposition chamber Grant 9,689,070 - Rasheed , et al. June 27, 2 | 2017-06-27 |
Target for PVD sputtering system Grant 9,633,824 - Nguyen , et al. April 25, 2 | 2017-04-25 |
Process Kit Shield And Physical Vapor Deposition Chamber Having Same App 20170088942 - RASHEED; MUHAMMAD ;   et al. | 2017-03-30 |
PVD target for self-centering process shield Grant 9,534,286 - Yoshidome , et al. January 3, 2 | 2017-01-03 |
Deposition Ring And Electrostatic Chuck For Physical Vapor Deposition Chamber App 20160340775 - RASHEED; Muhammad ;   et al. | 2016-11-24 |
Pvd Buffer Layers For Led Fabrication App 20160293798 - Zhu; Mingwei ;   et al. | 2016-10-06 |
PVD buffer layers for LED fabrication Grant 9,396,933 - Zhu , et al. July 19, 2 | 2016-07-19 |
Process kit shield for plasma enhanced processing chamber Grant 9,343,274 - Rasheed , et al. May 17, 2 | 2016-05-17 |
Substrate processing system with mechanically floating target assembly Grant 9,303,311 - Young , et al. April 5, 2 | 2016-04-05 |
Substrate processing system having symmetric RF distribution and return paths Grant 9,255,322 - Young , et al. February 9, 2 | 2016-02-09 |
Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing Grant 9,202,736 - Narendrnath , et al. December 1, 2 | 2015-12-01 |
Method and apparatus for measuring pressure in a physical vapor deposition chamber Grant 9,177,763 - Rasheed , et al. November 3, 2 | 2015-11-03 |
Deposition ring and electrostatic chuck for physical vapor deposition chamber Grant 8,911,601 - Rasheed , et al. December 16, 2 | 2014-12-16 |
Apparatus For Gas Injection In A Physical Vapor Deposition Chamber App 20140261177 - RASHEED; MUHAMMAD ;   et al. | 2014-09-18 |
Pvd Target For Self-centering Process Shield App 20140261180 - YOSHIDOME; GOICHI ;   et al. | 2014-09-18 |
Methods And Apparatus For Reducing Sputtering Of A Grounded Shield In A Process Chamber App 20140262764 - RITCHIE; ALAN ;   et al. | 2014-09-18 |
Method And Apparatus For Measuring Pressure In A Physical Vapor Deposition Chamber App 20140260544 - RASHEED; MUHAMMAD ;   et al. | 2014-09-18 |
Target For Pvd Sputtering System App 20140251217 - NGUYEN; THANH X. ;   et al. | 2014-09-11 |
Apparatus for physical vapor deposition having centrally fed RF energy Grant 8,795,488 - Rasheed , et al. August 5, 2 | 2014-08-05 |
Process Kit Shield For Plasma Enhanced Processing Chamber App 20140158049 - RASHEED; MUHAMMAD ;   et al. | 2014-06-12 |
Apparatus for enabling concentricity of plasma dark space Grant 8,702,918 - Ritchie , et al. April 22, 2 | 2014-04-22 |
Process kit shield for plasma enhanced processing chamber Grant 8,647,485 - Rasheed , et al. February 11, 2 | 2014-02-11 |
Magnetron design for RF/DC physical vapor deposition Grant 8,580,094 - Wang , et al. November 12, 2 | 2013-11-12 |
Pvd Buffer Layers For Led Fabrication App 20130285065 - Zhu; Mingwei ;   et al. | 2013-10-31 |
Process Kit Shield And Physical Vapor Deposition Chamber Having Same App 20130277203 - RASHEED; MUHAMMAD ;   et al. | 2013-10-24 |
Substrate Processing System Having Symmetric Rf Distribution And Return Paths App 20130256127 - YOUNG; DONNY ;   et al. | 2013-10-03 |
Substrate Processing System With Mechanically Floating Target Assembly App 20130256125 - YOUNG; DONNY ;   et al. | 2013-10-03 |
Process Kit Shield For Plasma Enhanced Processing Chamber App 20130255576 - RASHEED; MUHAMMAD ;   et al. | 2013-10-03 |
Apparatus For Enabling Concentricity Of Plasma Dark Space App 20130153412 - RITCHIE; ALAN ;   et al. | 2013-06-20 |
Deposition Ring And Electrostatic Chuck For Physical Vapor Deposition Chamber App 20130112554 - RASHEED; MUHAMMAD ;   et al. | 2013-05-09 |
Deposition Ring And Electrostatic Chuck For Physical Vapor Deposition Chamber App 20120103257 - Rasheed; Muhammad ;   et al. | 2012-05-03 |
Method of making an electrostatic chuck with reduced plasma penetration and arcing Grant 8,108,981 - Lubomirsky , et al. February 7, 2 | 2012-02-07 |
Magnet For Physical Vapor Deposition Processes To Produce Thin Films Having Low Resistivity And Non-uniformity App 20120027954 - LIU; ZHENDONG ;   et al. | 2012-02-02 |
Magnetron Design For Rf/dc Physical Vapor Deposition App 20110311735 - WANG; RONGJUN ;   et al. | 2011-12-22 |
Process Kit Shield For Improved Particle Reduction App 20110278165 - RASHEED; MUHAMMAD ;   et al. | 2011-11-17 |
Apparatus For Physical Vapor Deposition Having Centrally Fed Rf Energy App 20110240464 - RASHEED; MUHAMMAD ;   et al. | 2011-10-06 |
Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing Grant 7,848,076 - Narendranath , et al. December 7, 2 | 2010-12-07 |
Internal balanced coil for inductively coupled high density plasma processing chamber Grant 7,789,993 - Chen , et al. September 7, 2 | 2010-09-07 |
Internal balanced coil for inductively coupled high density plasma processing chamber Grant 7,572,647 - Chen , et al. August 11, 2 | 2009-08-11 |
Gas delivery system for semiconductor processing Grant 7,498,268 - Gondhalekar , et al. March 3, 2 | 2009-03-03 |
Method of making an electrostatic chuck with reduced plasma penetration and arcing App 20090034148 - Lubomirsky; Dmitry ;   et al. | 2009-02-05 |
Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing App 20090034147 - Narendrnath; Kadthala Ramaya ;   et al. | 2009-02-05 |
Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing App 20090034149 - Lubomirsky; Dmitry ;   et al. | 2009-02-05 |
High Profile Minimum Contact Process Kit For Hdp-cvd Application App 20090025636 - RASHEED; MUHAMMAD | 2009-01-29 |
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber App 20080185284 - Chen; Robert ;   et al. | 2008-08-07 |
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber App 20080188090 - Chen; Robert ;   et al. | 2008-08-07 |
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber App 20080188087 - CHEN; ROBERT ;   et al. | 2008-08-07 |
Gas Delivery System For Semiconductor Processing App 20070048446 - Gondhalekar; Sudhir ;   et al. | 2007-03-01 |
Gas delivery system for semiconductor processing Grant 7,141,138 - Gondhalekar , et al. November 28, 2 | 2006-11-28 |
Gas delivery system for semiconductor processing App 20040231798 - Gondhalekar, Sudhir ;   et al. | 2004-11-25 |
Erosion resistant slit valve Grant 6,764,265 - Kunze , et al. July 20, 2 | 2004-07-20 |
Gas delivery system for semiconductor processing App 20040126952 - Gondhalekar, Sudhir ;   et al. | 2004-07-01 |
Erosion resistant slit valve App 20030129044 - Kunze, Charles S. ;   et al. | 2003-07-10 |