Patent | Date |
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Method For Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures App 20220310825 - Margetis; Joe ;   et al. | 2022-09-29 |
Method for depositing a group IV semiconductor and related semiconductor device structures Grant 11,374,112 - Margetis , et al. June 28, 2 | 2022-06-28 |
Method For Depositing Boron And Gallium Containing Silicon Germanium Layers App 20210375622 - Lima; Lucas Petersen Barbosa ;   et al. | 2021-12-02 |
Methods For Silicon Germanium Uniformity Control Using Multiple Precursors App 20210358741 - Kajbafvala; Amir ;   et al. | 2021-11-18 |
Temperature-controlled flange and reactor system including same Grant 11,168,395 - Sreeram , et al. November 9, 2 | 2021-11-09 |
Methods Of Forming Structures Including Silicon Germanium And Silicon Layers, Devices Formed Using The Methods, And Systems For Performing The Methods App 20210327704 - Kajbafvala; Amir ;   et al. | 2021-10-21 |
Method for selectively depositing a Group IV semiconductor and related semiconductor device structures Grant 11,018,002 - Margetis , et al. May 25, 2 | 2021-05-25 |
Method for depositing a group IV semiconductor and related semiconductor device structures Grant 11,004,977 - Tolle , et al. May 11, 2 | 2021-05-11 |
Methods For Selective Deposition Utilizing N-type Dopants And/or Alternative Dopants To Achieve High Dopant Incorporation App 20210035802 - Tolle; John ;   et al. | 2021-02-04 |
Temperature-controlled Flange And Reactor System Including Same App 20200224309 - Sreeram; Sonti ;   et al. | 2020-07-16 |
Methods for forming a silicon germanium tin layer and related semiconductor device structures Grant 10,685,834 - Bhargava , et al. | 2020-06-16 |
Temperature-controlled flange and reactor system including same Grant 10,612,136 - Sreeram , et al. | 2020-04-07 |
Method For Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures App 20200083375 - Tolle; John ;   et al. | 2020-03-12 |
Method for depositing a group IV semiconductor and related semiconductor device structures Grant 10,541,333 - Tolle , et al. Ja | 2020-01-21 |
Temperature-controlled Flange And Reactor System Including Same App 20200002811 - Sreeram; Sonti ;   et al. | 2020-01-02 |
Methods for forming silicon-containing epitaxial layers and related semiconductor device structures Grant 10,446,393 - Bhargava , et al. Oc | 2019-10-15 |
Formation of epitaxial layers via dislocation filtering Grant 10,388,509 - Margetis , et al. A | 2019-08-20 |
Process for forming a film on a substrate using multi-port injection assemblies Grant 10,262,859 - Margetis , et al. | 2019-04-16 |
Method For Selectively Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures App 20190027584 - Margetis; Joe ;   et al. | 2019-01-24 |
Method For Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures App 20190027605 - Tolle; John ;   et al. | 2019-01-24 |
Method For Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures App 20190027583 - Margetis; Joe ;   et al. | 2019-01-24 |
Methods For Forming A Silicon Germanium Tin Layer And Related Semiconductor Device Structures App 20190013199 - Bhargava; Nupur ;   et al. | 2019-01-10 |
Methods For Forming Silicon-containing Epitaxial Layers And Related Semiconductor Device Structures App 20180323059 - Bhargava; Nupur ;   et al. | 2018-11-08 |
Radial And Thickness Control Via Biased Multi-port Injection Settings App 20180151358 - Margetis; Joe ;   et al. | 2018-05-31 |
Methods of forming silicon germanium tin films and structures and devices including the films Grant 9,905,420 - Margetis , et al. February 27, 2 | 2018-02-27 |
Radial and thickness control via biased multi-port injection settings Grant 9,892,913 - Margetis , et al. February 13, 2 | 2018-02-13 |
Formation Of Epitaxial Layers Via Dislocation Filtering App 20170372884 - Margetis; Joe ;   et al. | 2017-12-28 |
Radial And Thickness Control Via Biased Multi-port Injection Settings App 20170278707 - Margetis; Joe ;   et al. | 2017-09-28 |
Methods Of Forming Silicon Germanium Tin Films And Structures And Devices Including The Films App 20170154770 - Margetis; Joe ;   et al. | 2017-06-01 |
Methods of forming highly p-type doped germanium tin films and structures and devices including the films Grant 9,647,114 - Margetis , et al. May 9, 2 | 2017-05-09 |
Methods Of Forming Highly P-type Doped Germanium Tin Films And Structures And Devices Including The Films App 20170047446 - Margetis; Joe ;   et al. | 2017-02-16 |