Akiyama; Shoji

Patent Applications and Registrations

Patent applications and USPTO patent grants for Akiyama; Shoji.The latest application filed is for "microchip and particulate analyzing device".

Company Profile

32.139.147

Akiyama; Shoji - Kanagawa JP
Akiyama; Shoji - Annaka JP
Akiyama; Shoji - Gunma JP
Akiyama; Shoji - Tokyo JP
- Annaka JP
Akiyama; Shoji - Annaka-shi JP
AKIYAMA; Shoji - Annaka-ski JP
Akiyama; Shoji - Gunma-ken N/A JP
Akiyama; Shoji - Saitama JP
Akiyama; Shoji - Konan JP
Akiyama; Shoji - Brighton MA
Akiyama, Shoji - Annaka-city JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Micro flow channel chip Grant D960,740 - Akiyama , et al. August 16, 2	2022-08-16
Silicon carbide substrate production method and silicon carbide substrate Grant 11,346,018 - Nagasawa , et al. May 31, 2	2022-05-31
Vessel rack, agitator, and fine particle measurement apparatus Grant 11,338,259 - Akiyama , et al. May 24, 2	2022-05-24
Microchip And Particulate Analyzing Device App 20220118444 - ITO; Tatsumi ; et al.	2022-04-21
Composite substrate and method of manufacturing composite substrate Grant 11,245,377 - Akiyama , et al. February 8, 2	2022-02-08
Microchip and particulate analyzing device Grant 11,229,907 - Ito , et al. January 25, 2	2022-01-25
SiC composite substrate and method for manufacturing same Grant 11,208,719 - Kubota , et al. December 28, 2	2021-12-28
Method for producing composite wafer having oxide single-crystal film Grant 11,195,987 - Akiyama , et al. December 7, 2	2021-12-07
Composite Substrate For Surface Acoustic Wave Device And Manufacturing Method Thereof App 20210359660 - TANNO; Masayuki ; et al.	2021-11-18
Compound semiconductor laminate substrate, method for manufacturing same, and semiconductor element Grant 11,177,123 - Nagasawa , et al. November 16, 2	2021-11-16
Composite Substrate And Method Of Manufacturing Composite Substrate App 20210328571 - AKIYAMA; Shoji	2021-10-21
Method for producing composite wafer Grant 11,128,277 - Akiyama , et al. September 21, 2	2021-09-21
Microparticle measurement device and cleaning method for microparticle measurement device Grant 11,112,345 - Sakai , et al. September 7, 2	2021-09-07
Method for producing composite wafer having oxide single-crystal film Grant 10,971,674 - Akiyama , et al. April 6, 2	2021-04-06
Micro flow channel chip Grant D907,242 - Shinoda , et al. January 5, 2	2021-01-05
Composite substrate for surface acoustic wave device, method of producing composite substrate for surface acoustic wave device, and surface acoustic wave device using composite substrate Grant 10,886,890 - Akiyama , et al. January 5, 2	2021-01-05
Composite Substrate For Surface Acoustic Wave Device And Manufacturing Method Thereof App 20200412326 - TANNO; Masayuki ; et al.	2020-12-31
Manufacturing method of SiC composite substrate Grant 10,829,868 - Akiyama , et al. November 10, 2	2020-11-10
Microchip And Particulate Analyzing Device App 20200338550 - ITO; Tatsumi ; et al.	2020-10-29
Microparticle Measurement Device And Cleaning Method For Microparticle Measurement Device App 20200319081 - SAKAI; YOSHITSUGU ; et al.	2020-10-08
Composite substrate, method for forming nanocarbon film, and nanocarbon film Grant 10,781,104 - Akiyama , et al. Sept	2020-09-22
Method for producing composite wafer having oxide single-crystal film Grant 10,770,648 - Akiyama , et al. Sep	2020-09-08
Composite substrate and method of manufacturing composite substrate Grant 10,756,254 - Tanno , et al. A	2020-08-25
Microchip and particulate analyzing device Grant 10,744,501 - Ito , et al. A	2020-08-18
Method for producing composite wafer having oxide single-crystal film Grant 10,727,396 - Akiyama , et al.	2020-07-28
SiC composite substrate and method for manufacturing same Grant 10,711,373 - Kubota , et al.	2020-07-14
Method for producing composite wafer having oxide single-crystal film Grant 10658570 -	2020-05-19
SiC COMPOSITE SUBSTRATE AND METHOD FOR MANUFACTURING SAME App 20200149189 - Kubota; Yoshihiro ; et al.	2020-05-14
Method for manufacturing composite wafer provided with oxide single crystal thin film Grant 10,629,440 - Akiyama	2020-04-21
Method for manufacturing SiC composite substrate, and method for manufacturing semiconductor substrate Grant 10,612,157 - Kubota , et al.	2020-04-07
Composite Substrate For A Surface Acoustic Wave Device And Manufacturing Method Thereof App 20200098974 - TANNO; Masayuki ; et al.	2020-03-26
Microchip And Microparticle Measuring Apparatus App 20200070152 - Kasai; Hiroto ; et al.	2020-03-05
Composite Substrate, Surface Acoustic Wave Device, And Method For Manufacturing Composite Substrate App 20200058842 - AKIYAMA; Shoji ; et al.	2020-02-20
Composite Substrate And Method Of Manufacturing Composite Substrate App 20200052189 - TANNO; Masayuki ; et al.	2020-02-13
Heat dissipation substrate and method for producing same Grant 10,553,518 - Akiyama , et al. Fe	2020-02-04
Compound Semiconductor Laminate Substrate, Method For Manufacturing Same, And Semiconductor Element App 20200006046 - Nagasawa; Hiroyuki ; et al.	2020-01-02
Composite Substrate And Method Of Manufacturing Composite Substrate App 20190386640 - AKIYAMA; Shoji ; et al.	2019-12-19
Silicon Carbide Substrate Production Method And Silicon Carbide Substrate App 20190382918 - Nagasawa; Hiroyuki ; et al.	2019-12-19
Micro flow channel chip Grant D869,308 - Akiyama , et al. Dec	2019-12-10
Method for producing SiC composite substrate Grant 10,431,460 - Akiyama , et al. O	2019-10-01
Composite Substrate For Surface Acoustic Wave Device, Method Of Producing Composite Substrate For Surface Acoustic Wave Device, App 20190288661 - AKIYAMA; Shoji ; et al.	2019-09-19
Microchip manufactured with thermocompression Grant 10,414,118 - Yukumoto , et al. Sept	2019-09-17
Method Of Producing Composite Substrate For Surface Acoustic Wave Device App 20190280666 - AKIYAMA; Shoji ; et al.	2019-09-12
Chip device and a particle analyzing apparatus Grant 10,315,194 - Akiyama , et al.	2019-06-11
METHOD FOR PRODUCING SiC COMPOSITE SUBSTRATE App 20190157087 - Akiyama; Shoji ; et al.	2019-05-23
Method For Producing Composite Wafer App 20190097596 - AKIYAMA; Shoji ; et al.	2019-03-28
Vessel Rack, Agitator, And Fine Particle Measurement Apparatus App 20190070573 - AKIYAMA; SHOJI ; et al.	2019-03-07
Method For Manufacturing Composite Wafer Provided With Oxide Single Crystal Thin Film App 20190051525 - Akiyama; Shoji	2019-02-14
Composite Substrate And Method Of Manufacturing Composite Substrate App 20190036505 - AKIYAMA; Shoji ; et al.	2019-01-31
METHOD FOR MANUFACTURING SiC COMPOSITE SUBSTRATE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE App 20180334757 - Kubota; Yoshihiro ; et al.	2018-11-22
Thermally oxidized heterogeneous composite substrate and method for manufacturing same Grant 10,103,021 - Akiyama , et al. October 16, 2	2018-10-16
Composite Substrate, Method For Forming Nanocarbon Film, And Nanocarbon Film App 20180265360 - Akiyama; Shoji ; et al.	2018-09-20
MANUFACTURING METHOD OF SiC COMPOSITE SUBSTRATE App 20180251910 - Akiyama; Shoji ; et al.	2018-09-06
SiC COMPOSITE SUBSTRATE AND METHOD FOR MANUFACTURING SAME App 20180251911 - Kubota; Yoshihiro ; et al.	2018-09-06
Particle analyzer Grant 10,006,849 - Akiyama , et al. June 26, 2	2018-06-26
Method For Producing Composite Wafer Having Oxide Single-crystal Film App 20180175283 - AKIYAMA; Shoji ; et al.	2018-06-21
Method For Producing Composite Wafer Having Oxide Single-crystal Film App 20180166622 - AKIYAMA; Shoji ; et al.	2018-06-14
Method For Producing Composite Wafer Having Oxide Single-crystal Film App 20180151797 - AKIYAMA; Shoji ; et al.	2018-05-31
Method For Producing Composite Wafer Having Oxide Single-crystal Film App 20180138395 - AKIYAMA; Shoji ; et al.	2018-05-17
Composite Substrate Manufacturing Method And Composite Substrate App 20170330747 - AKIYAMA; Shoji	2017-11-16
Micro flow channel chip for a flow cytometer Grant D795,724 - Akiyama , et al. August 29, 2	2017-08-29
Method for producing hybrid substrate, and hybrid substrate Grant 9,741,603 - Tobisaka , et al. August 22, 2	2017-08-22
Microchip Manufactured With Thermocompression App 20170203296 - YUKUMOTO; Tomomi ; et al.	2017-07-20
Method for producing SOS substrates, and SOS substrate Grant 9,646,873 - Konishi , et al. May 9, 2	2017-05-09
Composite structure and manufacturing method therefor Grant 9,610,750 - Yukumoto , et al. April 4, 2	2017-04-04
Particle Analyzer App 20170074775 - AKIYAMA; SHOJI ; et al.	2017-03-16
Chip Device And A Particle Analyzing Apparatus App 20170028398 - AKIYAMA; Yuji ; et al.	2017-02-02
Microchip and particle analyzing apparatus Grant 9,459,182 - Akiyama , et al. October 4, 2	2016-10-04
Pellicle for EUV, and an assembly including the pellicle, and a method for assembling the same Grant 9,405,184 - Yamada , et al. August 2, 2	2016-08-02
Micro flow channel chip for flow cytometer Grant D757,580 - Akiyama , et al. May 31, 2	2016-05-31
Method for manufacturing composite wafers Grant 9,312,166 - Akiyama , et al. April 12, 2	2016-04-12
Method For Producing Hybrid Substrate, And Hybrid Substrate App 20160071761 - Tobisaka; Yuji ; et al.	2016-03-10
Microchip And Particulate Analyzing Device App 20160045916 - ITO; Tatsumi ; et al.	2016-02-18
SOS substrate having low defect density in vicinity of interface Grant 9,214,379 - Akiyama , et al. December 15, 2	2015-12-15
SOS substrate having low surface defect density Grant 9,214,380 - Akiyama , et al. December 15, 2	2015-12-15
Pellicle for EUV Grant 9,195,130 - Yamada , et al. November 24, 2	2015-11-24
Microchip and particulate analyzing device Grant 9,176,042 - Ito , et al. November 3, 2	2015-11-03
Pellicle For Euv, And An Assembly Including The Pellicle, And A Method For Assembling The Same App 20150205193 - Yamada; Motoyuki ; et al.	2015-07-23
Method For Producing Sos Substrates, And Sos Substrate App 20150179506 - Konishi; Shigeru ; et al.	2015-06-25
Method for reducing the thickness of an SOI layer Grant 9,064,929 - Akiyama , et al. June 23, 2	2015-06-23
Heat Dissipation Substrate And Method For Producing Same App 20150108502 - Akiyama; Shoji ; et al.	2015-04-23
Method for manufacturing bonded wafer Grant 8,975,159 - Akiyama March 10, 2	2015-03-10
Sensing device Grant 8,937,721 - Fujimaki , et al. January 20, 2	2015-01-20
Thermally Oxidized Heterogeneous Composite Substrate And Method For Manufacturing Same App 20140322546 - Akiyama; Shoji ; et al.	2014-10-30
Method For Manufacturing Composite Wafers App 20140308800 - Akiyama; Shoji ; et al.	2014-10-16
Method For Producing Transparent Soi Wafer App 20140235032 - Akiyama; Shoji ; et al.	2014-08-21
Method of manufacturing laminated wafer by high temperature laminating method Grant 8,772,132 - Akiyama , et al. July 8, 2	2014-07-08
Process for producing laminated substrate and laminated substrate Grant 8,765,576 - Akiyama , et al. July 1, 2	2014-07-01
Microchip And Particle Analyzing Apparatus App 20140174206 - Akiyama; Yuji ; et al.	2014-06-26
SOS substrate with reduced stress Grant 8,748,294 - Akiyama June 10, 2	2014-06-10
Composite Structure And Manufacturing Method Therefor App 20140154475 - Yukumoto; Tomomi ; et al.	2014-06-05
Micro flow channel chip for flow cytometer Grant D704,580 - Akiyama , et al. May 13, 2	2014-05-13
Method for producing a bonded substrate Grant 8,716,106 - Akiyama May 6, 2	2014-05-06
Pellicle For Euv App 20140065525 - YAMADA; Motoyuki ; et al.	2014-03-06
Microparticle sorting apparatus, microchip and microchip module Grant 8,657,121 - Shinoda , et al. February 25, 2	2014-02-25
Sos Substrate Having Low Surface Defect Density App 20140030870 - Akiyama; Shoji ; et al.	2014-01-30
Sos Substrate Having Low Defect Density In Vicinity Of Interface App 20130309843 - Akiyama; Shoji ; et al.	2013-11-21
Method For Manufacturing Soi Wafer App 20130309842 - Akiyama; Shoji	2013-11-21
Sensing Device App 20130293896 - Fujimaki; Makoto ; et al.	2013-11-07
Method Of Manufacturing Laminated Wafer By High Temperature Laminating Method App 20130288453 - Akiyama; Shoji ; et al.	2013-10-31
Method for fabricating SOI substrate Grant 8,563,401 - Akiyama , et al. October 22, 2	2013-10-22
Method of manufacturing laminated wafer by high temperature laminating method Grant 8,551,862 - Akiyama , et al. October 8, 2	2013-10-08
Method for manufacturing composite substrate comprising wide bandgap semiconductor layer Grant 8,546,245 - Akiyama October 1, 2	2013-10-01
Pellicle for lithography and manufacturing method thereof Grant 8,518,612 - Akiyama , et al. August 27, 2	2013-08-27
Method for producing bonded wafer Grant 8,497,188 - Kawai , et al. July 30, 2	2013-07-30
Method for producing SOI substrate Grant 8,420,503 - Akiyama , et al. April 16, 2	2013-04-16
Method for manufacturing SOI wafer Grant 8,357,586 - Akiyama , et al. January 22, 2	2013-01-22
Microchip And Particulate Analyzing Device App 20130008240 - Ito; Tatsumi ; et al.	2013-01-10
Photo Mask Unit Comprising A Photomask And A Pellicle And A Method For Manufacturing The Same App 20130003036 - Akiyama; Shoji ; et al.	2013-01-03
Micro flow channel chip Grant D673,287 - Akiyama , et al. December 25, 2	2012-12-25
Method for manufacturing bonded wafer Grant 8,314,006 - Tobisaka , et al. November 20, 2	2012-11-20
Sos Substrate With Reduced Stress App 20120280355 - Akiyama; Shoji	2012-11-08
Method for preparing SOI substrate having backside sandblasted Grant 8,288,251 - Akiyama October 16, 2	2012-10-16
Method for manufacturing SOI wafer Grant 8,268,700 - Akiyama , et al. September 18, 2	2012-09-18
Microchip And Soi Substrate For Manufacturing Microchip App 20120228730 - AKIYAMA; Shoji ; et al.	2012-09-13
Method for manufacturing semiconductor substrate Grant 8,263,478 - Akiyama , et al. September 11, 2	2012-09-11
Method for producing single crystal silicon solar cell and single crystal silicon solar cell Grant 8,227,290 - Ito , et al. July 24, 2	2012-07-24
Method for producing single crystal silicon solar cell and single crystal silicon solar cell Grant 8,227,289 - Ito , et al. July 24, 2	2012-07-24
Pellicle Film And A Pellicle For Euv Application, And A Method For Manufacturing The Film App 20120183757 - AKIYAMA; Shoji ; et al.	2012-07-19
Sos Substrate Having Low Defect Density In The Vicinity Of Interface App 20120126362 - Akiyama; Shoji ; et al.	2012-05-24
Method For Manufacturing Bonded Wafer App 20120119336 - Akiyama; Shoji	2012-05-17
Sos Substrate Having Low Surface Defect Density App 20120119323 - Akiyama; Shoji ; et al.	2012-05-17
Method For Manufacturing Single Crystal Silicon Solar Cell And Single Crystal Silicon Solar Cell App 20120118354 - ITO; Atsuo ; et al.	2012-05-17
Method for producing silicon film-transferred insulator wafer Grant 8,138,064 - Akiyama , et al. March 20, 2	2012-03-20
Method For Producing Bonded Wafer App 20120058622 - Kawai; Makoto ; et al.	2012-03-08
Method for manufacturing single-crystal silicon solar cell and single-crystal silicon solar cell Grant 8,129,612 - Ito , et al. March 6, 2	2012-03-06
Pellicle For Lithography And Manufacturing Method Thereof App 20120045714 - Akiyama; Shoji ; et al.	2012-02-23
Method of manufacturing single crystal silicon solar cell and single crystal silicon solar cell Grant 8,119,903 - Ito , et al. February 21, 2	2012-02-21
Method for manufacturing single crystal silicon solar cell and single crystal silicon solar cell Grant 8,106,290 - Ito , et al. January 31, 2	2012-01-31
Method for manufacturing bonded substrate with sandblast treatment Grant 8,088,670 - Akiyama , et al. January 3, 2	2012-01-03
Method for producing single crystal silicon solar cell and single crystal silicon solar cell App 20110290320 - Ito; Atsuo ; et al.	2011-12-01
Method for producing single crystal silicon solar cell and single crystal silicon solar cell App 20110290321 - Ito; Atsuo ; et al.	2011-12-01
Microparticle Sorting Apparatus, Microchip And Microchip Module App 20110271746 - Shinoda; Masataka ; et al.	2011-11-10
Method For Manufacturing Semiconductor Substrate App 20110244654 - Akiyama; Shoji ; et al.	2011-10-06
Method For Fabricating Soi Substrate App 20110244655 - Akiyama; Shoji ; et al.	2011-10-06
Method for preparing substrate having monocrystalline film Grant 8,030,176 - Kubota , et al. October 4, 2	2011-10-04
Method for producing single crystal silicon solar cell and single crystal silicon solar cell Grant 8,030,118 - Ito , et al. October 4, 2	2011-10-04
Method For Manufacturing Composite Substrate Comprising Wide Bandgap Semiconductor Layer App 20110227068 - Akiyama; Shoji	2011-09-22
Method for producing single crystal silicon solar cell and single crystal silicon solar cell Grant 8,021,910 - Ito , et al. September 20, 2	2011-09-20
Optical disk manufacturing method Grant 7,993,818 - Watanabe , et al. August 9, 2	2011-08-09
Method for manufacturing SOI substrate Grant 7,977,209 - Akiyama , et al. July 12, 2	2011-07-12
Method for producing semiconductor substrate Grant 7,972,937 - Akiyama , et al. July 5, 2	2011-07-05
Pellicle and method for producing pellicle Grant 7,951,513 - Kubota , et al. May 31, 2	2011-05-31
Method For Manufacturing Soi Substrate App 20110111575 - Akiyama; Shoji ; et al.	2011-05-12
Method For Manufacturing Semiconductor Substrate App 20110111574 - AKIYAMA; Shoji ; et al.	2011-05-12
Method For Manufacturing Bonded Substrate App 20110104871 - Tobisaka; Yuji ; et al.	2011-05-05
Method for manufacturing substrate for photoelectric conversion element Grant 7,935,611 - Akiyama , et al. May 3, 2	2011-05-03
Pellicle and method for producing pellicle Grant 7,919,217 - Kubota , et al. April 5, 2	2011-04-05
Pellicle and method for manufacturing the same Grant 7,901,846 - Kubota , et al. March 8, 2	2011-03-08
Method of manufacturing heat exchanger Grant 7,895,749 - Eto , et al. March 1, 2	2011-03-01
SOI substrate and method for manufacturing SOI substrate Grant 7,892,934 - Kawai , et al. February 22, 2	2011-02-22
Method for manufacturing pyrolytic boron nitride composite substrate Grant 7,879,175 - Kawai , et al. February 1, 2	2011-02-01
Method For Producing Soi Substrate App 20110014776 - Akiyama; Shoji ; et al.	2011-01-20
Method For Producing Silicon Film Transferred Insulator Wafter App 20110014775 - Akiyama; Shoji ; et al.	2011-01-20
Method For Treating Surface Of Soi Substrate App 20110003460 - Akiyama; Shoji ; et al.	2011-01-06
Method For Manufacturing Soi Wafer App 20110003462 - Akiyama; Shoji ; et al.	2011-01-06
Method Of Producing Optical Disc Recording Medium App 20100330303 - Ohoshi; Toshio ; et al.	2010-12-30
Method for manufacturing semiconductor substrate Grant 7,855,127 - Akiyama , et al. December 21, 2	2010-12-21
Method for manufacturing semiconductor substrate App 20100311221 - Akiyama; Shoji ; et al.	2010-12-09
Method For Producing A Bonded Substrate App 20100301455 - Akiyama; Shoji	2010-12-02
Soi Substrate And Method For Manufacturing Soi Substrate App 20100289115 - Akiyama; Shoji ; et al.	2010-11-18
Method for manufacturing SOI substrate Grant 7,833,878 - Akiyama , et al. November 16, 2	2010-11-16
Method for Preparing SOI Substrate Having Backside Sandblasted App 20100279488 - Akiyama; Shoji	2010-11-04
GaN LAYER CONTAINING MULTILAYER SUBSTRATE, PROCESS FOR PRODUCING SAME, AND DEVICE App 20100264424 - Akiyama; Shoji	2010-10-21
Optical device comprising crystalline semiconductor layer and reflective element Grant 7,812,423 - Grawert , et al. October 12, 2	2010-10-12
Method Of Manufacturing Laminated Wafer By High Temperature Laminating Method App 20100244182 - Akiyama; Shoji ; et al.	2010-09-30
Optical waveguide apparatus and method for manufacturing the same Grant 7,799,589 - Akiyama , et al. September 21, 2	2010-09-21
Method For Manufacturing Semiconductor Substrate App 20100233866 - Akiyama; Shoji ; et al.	2010-09-16
Method For Manufacturing Soi Substrate App 20100227452 - Akiyama; Shoji ; et al.	2010-09-09
SOQ substrate and method of manufacturing SOQ substrate Grant 7,790,571 - Akiyama , et al. September 7, 2	2010-09-07
Method for producing SOI substrate Grant 7,749,870 - Kawai , et al. July 6, 2	2010-07-06
Method for manufacturing SOQ substrate Grant 7,732,867 - Akiyama , et al. June 8, 2	2010-06-08
Method for manufacturing semiconductor substrate Grant 7,696,059 - Akiyama , et al. April 13, 2	2010-04-13
Process For Producing Laminated Substrate And Laminated Substrate App 20100084746 - AKIYAMA; Shoji ; et al.	2010-04-08
Method for manufacturing SOI substrate Grant 7,691,724 - Kawai , et al. April 6, 2	2010-04-06
Soi Substrate And Method For Manufacturing Soi Substrate App 20100025804 - Kawai; Makoto ; et al.	2010-02-04
Pellicle And Method For Producing Pellicle App 20090291372 - KUBOTA; Yoshihiro ; et al.	2009-11-26
Method for manufacturing SOI substrate Grant 7,615,456 - Akiyama , et al. November 10, 2	2009-11-10
Pellicle And Method For Producing Pellicle App 20090274962 - Kubota; Yoshihiro ; et al.	2009-11-05
Method for producing soi substrate App 20090246935 - Kawai; Makoto ; et al.	2009-10-01
Method for preparing substrate having monocrystalline film App 20090221131 - Kubota; Yoshihiro ; et al.	2009-09-03
Heat exchanger App 20090188111 - Eto; Yoshihisa ; et al.	2009-07-30
Method for manufacturing semiconductor substrate App 20090111237 - Akiyama; Shoji ; et al.	2009-04-30
Method for producing semiconductor substrate App 20090111242 - Akiyama; Shoji ; et al.	2009-04-30
Pellicle And Method For Manufacturing The Same App 20090104544 - KUBOTA; Yoshihiro ; et al.	2009-04-23
Method For Manufacturing Substrate For Photoelectric Conversion Element App 20090061557 - Akiyama; Shoji ; et al.	2009-03-05
Method For Manufacturing Soi Substrate App 20090061591 - Akiyama; Shoji ; et al.	2009-03-05
Microchip And Soi Substrate For Manufacturing Microchip App 20090057791 - Akiyama; Shoji ; et al.	2009-03-05
Optical waveguide apparatus and method for manufacturing the same App 20090032831 - Akiyama; Shoji ; et al.	2009-02-05
Method for manufacturing SOI wafer App 20090023270 - Akiyama; Shoji ; et al.	2009-01-22
Method for manufacturing single crystal silicon solar cell and single crystal silicon solar cell App 20090007960 - Ito; Atsuo ; et al.	2009-01-08
Method for manufacturing SOI wafer App 20080299742 - Akiyama; Shoji ; et al.	2008-12-04
Method for manufacturing bonded substrate App 20080261381 - Akiyama; Shoji ; et al.	2008-10-23
Method for manufacturing pyrolytic boron nitride composite substrate App 20080251192 - Kawai; Makoto ; et al.	2008-10-16
Method for manufacturing SOI substrate App 20080254595 - Kawai; Makoto ; et al.	2008-10-16
Method for manufacturing SOI substrate App 20080254597 - Akiyama; Shoji ; et al.	2008-10-16
Method for manufacturing single-crystal silicon solar cell and single-crystal silicon solar cell App 20080245408 - Ito; Atsuo ; et al.	2008-10-09
Method for manufacturing semiconductor substrate App 20080194078 - Akiyama; Shoji ; et al.	2008-08-14
Method for manufacturing SOI substrate App 20080153272 - Akiyama; Shoji ; et al.	2008-06-26
Method of manufacturing single crystal silicon solar cell and single crystal silicon solar cell App 20080121278 - Ito; Atsuo ; et al.	2008-05-29
Method for producing single crystal silicon solar cell and single crystal silicon solar cell App 20080121275 - ITO; Atsuo ; et al.	2008-05-29
Method for manufacturing SOQ substrate App 20080118757 - Akiyama; Shoji ; et al.	2008-05-22
SOQ substrate and method of manufacturing SOQ substrate App 20080119028 - Akiyama; Shoji ; et al.	2008-05-22
Method for manufacturing semiconductor substrate App 20080113489 - Akiyama; Shoji ; et al.	2008-05-15
Method for producing single crystal silicon solar cell and single crystal silicon solar cell App 20080099065 - Ito; Atsuo ; et al.	2008-05-01
Method for producing single crystal silicon solar cell and single crystal silicon solar cell App 20080099066 - Ito; Atsuo ; et al.	2008-05-01
Method for producing single crystal silicon solar cell and single crystal silicon solar cell App 20080099067 - Ito; Atsuo ; et al.	2008-05-01
Silicon based on-chip photonic band gap cladding waveguide Grant 7,321,713 - Akiyama , et al. January 22, 2	2008-01-22
Photonic bandgap modulator, amplifier, demux, and TDM devices Grant 7,310,454 - Akiyama , et al. December 18, 2	2007-12-18
Anti-reflection coating for the pass-band of photonic bandgap crystal Grant 7,251,402 - Akiyama , et al. July 31, 2	2007-07-31
Optical Disk Manufacturing Method App 20070145614 - Watanabe; Hidetoshi ; et al.	2007-06-28
Process for fabrication of high reflectors by reversal of layer sequence and application thereof Grant 7,190,524 - Grawert , et al. March 13, 2	2007-03-13
Anti-reflection coating for the pass-band of photonic bandgap crystal App 20070053651 - Akiyama; Shoji ; et al.	2007-03-08
Manufacturing Method Of Optical Disk And Its Manufacturing Apparatus App 20070048444 - Watanabe; Hidetoshi ; et al.	2007-03-01
Tube for heat exchanger Grant 7,117,936 - Ohata , et al. October 10, 2	2006-10-10
Heat exchanger App 20060219398 - Eto; Yoshihisa ; et al.	2006-10-05
Silicon based on-chip photonic band gap cladding waveguide App 20060088265 - Akiyama; Shoji ; et al.	2006-04-27
Method for heat treatment of silicon wafers and silicon wafer Grant 7,011,717 - Kobayashi , et al. March 14, 2	2006-03-14
Heat exchanger Grant 6,988,539 - Kato , et al. January 24, 2	2006-01-24
Tank for heat exchanger App 20060011335 - Ohata; Hajime ; et al.	2006-01-19
Photonic bandgap modulator, amplifier, DEMUX, and TDM devices App 20050259922 - Akiyama, Shoji ; et al.	2005-11-24
Tube for heat exchanger App 20050247444 - Ohata, Hajime ; et al.	2005-11-10
Waveguide-to-semiconductor device coupler Grant 6,944,368 - Kimerling , et al. September 13, 2	2005-09-13
Method for manufacturing silicon wafer Grant 6,878,645 - Kobayashi , et al. April 12, 2	2005-04-12
Optical device comprising crystalline semiconductor layer and reflective element App 20050062038 - Grawert, Felix Jan ; et al.	2005-03-24
Process for fabrication of high reflectors by reversal of layer sequence and application thereof App 20050063061 - Grawert, Felix Jan ; et al.	2005-03-24
Heat exchanger Grant 6,860,324 - Kato , et al. March 1, 2	2005-03-01
Method for heat treatment of silicon wafers and silicon wafer App 20050025691 - Kobayashi, Norihiro ; et al.	2005-02-03
Method for heat treatment of silicon wafers and silicon wafer Grant 6,809,015 - Kobayashi , et al. October 26, 2	2004-10-26
Method for manufacturing silicon mirror wafer, silicon mirror wafer, and heat treatment furnace Grant 6,806,199 - Kobayashi , et al. October 19, 2	2004-10-19
Heat exchanger App 20040194931 - Kato, Soichi ; et al.	2004-10-07
Tube for heat exchangers and method of manufacturing the same Grant 6,799,630 - Kato , et al. October 5, 2	2004-10-05
Waveguide-to-semiconductor device coupler App 20040179782 - Kimerling, Lionel C. ; et al.	2004-09-16
Production method of and production apparatus for optical recording disc Grant 6,770,167 - Kohinata , et al. August 3, 2	2004-08-03
Heat exchanger App 20040069478 - Kato, Soichi ; et al.	2004-04-15
Heat exchanger App 20040050540 - Kato, Soichi ; et al.	2004-03-18
Production method of and production apparatus for optical recording disc Grant 6,702,920 - Kohinata , et al. March 9, 2	2004-03-09
Method for manufacturing silicon wafer App 20040023518 - Kobayashi, Norihiro ; et al.	2004-02-05
Method of producing a bonded wafer and the bonded wafer Grant 6,680,260 - Akiyama , et al. January 20, 2	2004-01-20
Production method for annealed wafer Grant 6,670,261 - Akiyama , et al. December 30, 2	2003-12-30
Heat exchanger, method of manufacturing the heat exchanger, and method of manufacturing tube for heat exchange Grant 6,666,265 - Kato , et al. December 23, 2	2003-12-23
Method for manufacturing annealed wafer and annealed wafer Grant 6,645,834 - Akiyama November 11, 2	2003-11-11
Silicon boat with protective film, method of manufacture thereof, and silicon wafer heat-treated using silicon boat App 20030196588 - Kobayashi, Norihiro ; et al.	2003-10-23
Optical waveguides with trench structures Grant 6,621,972 - Kimerling , et al. September 16, 2	2003-09-16
Method for heat treatment of silicon wafers and silicon wafer App 20030104709 - Kobayashi, Norihiro ; et al.	2003-06-05
Production method for silicon wafer and silicon wafer Grant 6,544,656 - Abe , et al. April 8, 2	2003-04-08
Method of producing a bonded wafer and the bonded wafer App 20030020096 - Akiyama, Shoji ; et al.	2003-01-30
Method for manufacturing annealed wafer and annealed wafer App 20030003773 - Akiyama, Shoji	2003-01-02
Method for manufacturing silicon mirror wafer, silicon mirror wafer, and heat treatment furnace App 20020187658 - Kobayashi, Norihiro ; et al.	2002-12-12
Method of producing a bonded wafer and the bonded wafer Grant 6,492,682 - Akiyama , et al. December 10, 2	2002-12-10
Heat exchanger App 20020179297 - Kato, Soichi ; et al.	2002-12-05
Production method for annealed wafer App 20020160591 - Akiyama, Shoji ; et al.	2002-10-31
Production method of and production apparatus for optical recording disc App 20020100559 - Kohinata, Kokichi ; et al.	2002-08-01
Method for producing silicon single crystal wafer and silicon single crystal wafer Grant 6,413,310 - Tamatsuka , et al. July 2, 2	2002-07-02
Optical waveguides with trench structures App 20020076188 - Kimerling, Lionel C. ; et al.	2002-06-20
Silicon wafer App 20020070427 - Kobayashi, Norihiro ; et al.	2002-06-13
Method for heat-treating silicon wafer and silicon wafer Grant 6,391,796 - Akiyama , et al. May 21, 2	2002-05-21
Production method of and production apparatus for optical recording disc App 20020033226 - Kohinata, Kokichi ; et al.	2002-03-21
Heat exchanger Grant 6,357,520 - Kato , et al. March 19, 2	2002-03-19
Tube For Heat Exchangers And Method Of Manufacturing Same App 20010049878 - KATO, SOICHI ; et al.	2001-12-13
Method for fabrication of thin film Grant 6,245,647 - Akiyama , et al. June 12, 2	2001-06-12
Heat exchanger and method of producing the same Grant 5,979,051 - Kato , et al. November 9, 1	1999-11-09
Disk tray used with an apparatus for forming a protective film on an optical disk Grant 5,695,561 - Tomiyama , et al. December 9, 1	1997-12-09