Integrated circuit layout utilizing separated active circuit and wiring regions

Balyoz , et al. April 7, 1

Patent Grant T100501

U.S. patent number T100,501 [Application Number 06/058,360] was granted by the patent office on 1981-04-07 for integrated circuit layout utilizing separated active circuit and wiring regions. Invention is credited to John Balyoz, Algirdas J. Gruodis.


United States Patent T100,501
Balyoz ,   et al. April 7, 1981

Integrated circuit layout utilizing separated active circuit and wiring regions

Abstract

In the method for fabricating a semiconductor substrate integrated circuit layout including: forming a plurality of spaced-apart circuit cells in columnar arrays within said substrate; forming a first insulating layer above said substrate, said layer having apertures therein to expose selected active regions of said selected cells; the improvement comprising: depositing first and second sets of elongated conductors in substantially parallel relationship atop said first insulating layer in said columnar direction; said first set being disposed directly atop said exposed cells to make selected contact with selected ones of said exposed active regions through said apertures in said first insulating layer; said second set being disposed in areas between said exposed cells; forming a second insulating layer above said first and second sets of conductors, said second insulating layer having apertures therein to expose selected ones of said first and second sets; and depositing a third set of substantially parallel, elongated conductors atop said second insulating layer, orthogonally with respect to said columnar direction, to make selected contact with said exposed ones of said first and second sets through said apertures in said second insulating layer.


Inventors: Balyoz; John (Hopewell Junction, NY), Gruodis; Algirdas J. (Wappinger Falls, NY)
Family ID: 25257547
Appl. No.: 06/058,360
Filed: July 17, 1979

Related U.S. Patent Documents

Application Number Filing Date Patent Number Issue Date
830715 Sep 6, 1977

Current U.S. Class: 438/128; 257/205; 257/208; 257/577; 438/598
Current CPC Class: H01L 23/522 (20130101); H01L 23/528 (20130101); H01L 27/11801 (20130101); H01L 2924/0002 (20130101); H01L 2924/0002 (20130101); H01L 2924/00 (20130101)
Current International Class: H01L 23/52 (20060101); H01L 23/528 (20060101); H01L 27/118 (20060101); H01L 021/283 (); H01L 021/44 (); H01L 023/48 ()


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