Rotary tool for boat of semiconductor manufacturing apparatus

Description

FIG. 1 is a perspective view of a rotary tool for boat of semiconductor manufacturing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 6 thereof.

The broken lines show portions of a rotary tool for boat of semiconductor manufacturing apparatus which form no part of the claimed design.

The "dash-dot" broken lines define the bounds of the claim and form no part thereof.

Claims

CLAIM We claim the ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown (and described).

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Inventors:	Yamaguchi; Takatomo (Toyama, JP), Nogami; Takashi (Toyama, JP)
Applicant:	Name City State Country Type Hitachi Kokusai Electric Inc. Tokyo N/A JP
Assignee:	HITACHI KOKUSAI ELECTRIC INC. (Tokyo, JP)
Appl. No.:	D/572,541
Filed:	July 28, 2016

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Foreign Application Priority Data

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Feb 10, 2016 [JP]			2016-002832

Current U.S. Class:	D15/140; D8/349; D8/396
Current International Class:	1509
Field of Search:	;D8/8,14,36,61,89,130,142,337,349,352,373,499 ;D13/8 ;D15/4,5,9,29,77,102,130,140,199,230,230.12,230.14,230.16 ;D18/10,34.2,34.8,40,46,58 ;D24/219,232 ;D32/1,3,5,7,13,14,19,21,23,25,27,29,32,33,35

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References Cited [Referenced By]

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U.S. Patent Documents

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D342957	January 1994	George
D471563	March 2003	Selic
D506210	June 2005	Selic
D507280	July 2005	Chu
D555174	November 2007	Hwang
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Foreign Patent Documents

	2769926		Feb 2011		CA

Primary Examiner: Tung; Melanie H
Assistant Examiner: Butac; Fritzgerald L
Attorney, Agent or Firm: Fitch, Even, Tabin & Flannery