Baffle plate

Matsumoto , et al. January 7, 2

Patent Grant D697038

U.S. patent number D697,038 [Application Number D/416,085] was granted by the patent office on 2014-01-07 for baffle plate. This patent grant is currently assigned to Tokyo Electron Limited. The grantee listed for this patent is Naoki Matsumoto, Jun Yoshikawa. Invention is credited to Naoki Matsumoto, Jun Yoshikawa.


United States Patent D697,038
Matsumoto ,   et al. January 7, 2014

Baffle plate

Claims

CLAIM The ornamental design for a baffle plate, as shown and described.
Inventors: Matsumoto; Naoki (Sendai, JP), Yoshikawa; Jun (Sendai, JP)
Applicant:
Name City State Country Type

Matsumoto; Naoki
Yoshikawa; Jun

Sendai
Sendai

N/A
N/A

JP
JP
Assignee: Tokyo Electron Limited (Tokyo, JP)
Appl. No.: D/416,085
Filed: March 19, 2012

Foreign Application Priority Data

Sep 20, 2011 [JP] D2011-021503
Current U.S. Class: D13/182
Current International Class: 1303
Field of Search: ;D13/182 ;D8/399 ;D15/144 ;118/666,715,733 ;219/444.1 ;414/147,217,247,935-941 ;438/482,706,716,758 ;451/285

References Cited [Referenced By]

U.S. Patent Documents
D404372 January 1999 Ishii
D411516 June 1999 Imafuku et al.
6444040 September 2002 Herchen et al.
D490450 May 2004 Hayashi et al.
D494551 August 2004 Doba
D494552 August 2004 Tezuka et al.
6782843 August 2004 Kinnard et al.
D496008 September 2004 Takahashi et al.
D552565 October 2007 Nakamura et al.
D559993 January 2008 Nagakubo et al.
D560284 January 2008 Nagakubo et al.
7479304 January 2009 Sun et al.
7658800 February 2010 Chen et al.
D633452 March 2011 Namiki et al.
D639757 June 2011 Root et al.
D654883 February 2012 Honma et al.
D654884 February 2012 Honma et al.
D655257 March 2012 Honma et al.
D655259 March 2012 Honma et al.
D664249 July 2012 Wang et al.
2004/0025788 February 2004 Ogasawara et al.
2004/0056017 March 2004 Renken

Other References

Notice of Allowance, Taiwanese Design Application No. 101301467, dated Jun. 26, 2012. cited by applicant.

Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Leydig, Voit & Mayer Ltd.

Description



FIG. 1 is a front view of a baffle plate showing our new design.

FIG. 2 is a rear view of the baffle plate of FIG. 1.

FIG. 3 is a top plan view of the baffle plate of FIG. 1.

FIG. 4 is a bottom plan view of the baffle plate of FIG. 1.

FIG. 5 is a right side view of the baffle plate of FIG. 1.

FIG. 6 is a left view of the baffle plate of FIG. 1.

FIG. 7 is a front perspective view of the baffle plate of FIG. 1.

FIG. 8 is a rear perspective view of the baffle plate of FIG. 1; and,

FIG. 9 is a front perspective view of the baffle plate of FIG. 1 shown in a used condition with a plasma processing device shown in broken lines.

The features shown in broken lines depict environmental subject matter only and form no part of the claimed design.

* * * * *


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