Heater block for use in a semiconductor processing tool

Description

FIG. 1 is a top perspective view of a heater block for use in a semiconductor processing tool;

FIG. 2 is a top view thereof;

FIG. 3 is a side view thereof; and,

FIG. 4 is a cross-sectional view thereof, taken along the line 4-4 of FIG. 2.

Claims

CLAIM I claim the ornamental design for a heater block for use in a semiconductor processing tool, as shown and described.

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Inventors:	Takahashi; Satoshi (Hachioji, JP)
Assignee:	ASM Japan K.K. (Tokyo, JP)
Appl. No.:	D/324,405
Filed:	September 11, 2008

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Current U.S. Class:	D15/199
Current International Class:	1599
Field of Search:	;D15/144,199 ;29/827,843 ;219/392 ;228/180.22 ;438/21,617

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References Cited [Referenced By]

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U.S. Patent Documents

5306664	April 1994	Sakura
6394797	May 2002	Sugaya et al.
6634882	October 2003	Goodman
6709267	March 2004	Hawkins et al.
D529057	September 2006	Willson et al.
2005/0242079	November 2005	Kuibira et al.
2005/0274708	December 2005	Chan et al.
2006/0011298	January 2006	Lim et al.
2006/0108138	May 2006	Lee et al.
2008/0084808	April 2008	Kumagai
2009/0239385	September 2009	Takahashi

Other References

US. Appl. No. 12/051,769, filed Mar. 19, 2008, Heater Block for Use in a Semiconductor Processing Tool, Satoshi Takahashi. cited by other.

Primary Examiner: Palasik; Patricia
Attorney, Agent or Firm: Knobbe, Martens, Olson & Bear, LLP