Support of wafer boat for manufacturing semiconductor wafers

Description

FIG. 1 is front perspective view of a support of wafer boat for manufacturing semiconductor wafers illustrating my new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken through line 8--8 of FIG. 2.

Claims

CLAIM The ornamental design for a support of wafer boat for manufacturing semiconductor wafers, as shown and described.

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Inventors:	Sato; Izumi (Oshu, JP)
Assignee:	Tokyo Electron Limited (Minato-Ku, JP)
Appl. No.:	D/342,854
Filed:	September 2, 2009

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Foreign Application Priority Data

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Mar 6, 2009 [JP]			2009-004989

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;206/454,711 ;118/728,729 ;211/41.18 ;432/240,241,253,258

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References Cited [Referenced By]

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U.S. Patent Documents

D404375	January 1999	Shimazu
5897311	April 1999	Nishi
6095806	August 2000	Suzuki et al.
6716027	April 2004	Kim et al.
D570308	June 2008	Sato
D574792	August 2008	Sato
D579885	November 2008	Sato
D601979	October 2009	Sato

Primary Examiner: Sikder; Selina
Attorney, Agent or Firm: Burr & Brown