Coater cup
Nagamine , et al. February 16, 2
U.S. patent number D610,176 [Application Number D/332,207] was granted by the patent office on 2010-02-16 for coater cup. This patent grant is currently assigned to Tokyo Electron Limited. Invention is credited to Naofumi Kishita, Yuichiro Miyata, Shuichi Nagamine, Koji Takayanagi, Yasushi Takiguchi.
| United States Patent | D610,176 |
| Nagamine , et al. | February 16, 2010 |
Coater cup
Claims
CLAIM The ornamental design for a coater cup, as shown and described.
| Inventors: | Nagamine; Shuichi (Koshi, JP), Kishita; Naofumi (Koshi, JP), Takayanagi; Koji (Koshi, JP), Miyata; Yuichiro (Koshi, JP), Takiguchi; Yasushi (Koshi, JP) |
|---|---|
| Assignee: | Tokyo Electron Limited (Tokyo,
JP) |
| Appl. No.: | D/332,207 |
| Filed: | February 11, 2009 |
Foreign Application Priority Data
| Aug 26, 2008 [JP] | 2008-021814 | |||
| Current U.S. Class: | D15/138 |
| Current International Class: | 1509 |
| Field of Search: | ;D15/138,199 ;D9/439,454 ;D23/269 ;118/52,319,320,603 ;156/345 ;427/96 ;430/7,325,327,330,935 ;438/758,763,782 |
References Cited [Referenced By]
U.S. Patent Documents
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Assistant Examiner: Palasik; Patricia
Attorney, Agent or Firm: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Description
FIG. 1 is a top perspective view of a coater cup showing new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a front view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a vertical sectional view taken along line 7--7 of FIG. 5 thereof; and,
FIG. 8 is an enlarged view taken along line 8--8 of FIG. 7 thereof.
The article is mounted on an upper end opening portion of a cup base portion surrounding a lower portion side of a spin chuck of a coater which holds a semiconductor wafer.
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