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Substrate liquid processing apparatus
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Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup
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Liquid processing apparatus and liquid processing method
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Liquid processing apparatus, liquid processing method, and storage medium
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Substrate processing apparatus and substrate processing method
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Liquid processing apparatus, liquid processing method, and recording medium having computer program for performing the same method
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Substrate liquid treatment apparatus with lift pin plate
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Substrate liquid cleaning apparatus with controlled liquid port ejection angle
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Substrate liquid processing apparatus, method of controlling substrate liquid processing apparatus, and storage medium performing substrate liquid processing apparatus control method on substrate liquid processing apparatus
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Liquid processing apparatus and liquid processing method
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Substrate Processing Apparatus And Substrate Processing Method
App 20140290701 - Nagamine; Shuichi ; et al. | 2014-10-02 |
Flow passage switching apparatus, processing apparatus, flow passage switching method, processing method and storage medium
Grant 8,840,752 - Ogata , et al. September 23, 2 | 2014-09-23 |
Liquid processing apparatus, liquid processing method and storage medium
Grant 8,671,875 - Nagamine , et al. March 18, 2 | 2014-03-18 |
Nozzle Cleaning Device, Nozzle Cleaning Method, And Substrate Processing Apparatus
App 20130319470 - Kai; Yoshihiro ; et al. | 2013-12-05 |
Substrate liquid processing apparatus
Grant 8,539,906 - Ogata , et al. September 24, 2 | 2013-09-24 |
Liquid Processing Apparatus And Liquid Processing Method
App 20130125931 - Nagamine; Shuichi ; et al. | 2013-05-23 |
Liquid Processing Apparatus, Liquid Processing Method, And Storage Medium
App 20130104940 - Nagamine; Shuichi ; et al. | 2013-05-02 |
Substrate Liquid Processing Apparatus And Substrate Liquid Processing Method
App 20130008872 - Higashuima; Jiro ; et al. | 2013-01-10 |
Liquid Processing Apparatus, Liquid Processing Method, and Recording Medium Having Computer Program for Performing the Same Method
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Liquid Treatment Apparatus And Method
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Liquid Treatment Apparatus And Method
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Substrate Liquid Processing Apparatus
App 20120153044 - Ogata; Nobuhiro ; et al. | 2012-06-21 |
Flow Passage Switching Apparatus, Processing Apparatus, Flow Passage Switching Method, Processing Method and Storage Medium
App 20110308626 - Ogata; Nobuhiro ; et al. | 2011-12-22 |
Substrate Liquid Processing Apparatus, Method Of Controlling Substrate Liquid Processing Apparatus, And Storage Medium Performing Substrate Liquid Processing Apparatus Control Method On Substrate Liquid Processing Apparatus
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Substrate Liquid Processing Apparatus
App 20110297192 - OGATA; Nobuhiro ; et al. | 2011-12-08 |
Liquid Processing Apparatus And Liquid Processing Method
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Developing apparatus, developing method and storage medium
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Liquid Processing Apparatus, Liquid Processing Method And Storage Medium
App 20100040779 - NAGAMINE; Shuichi ; et al. | 2010-02-18 |
Coater cup
Grant D610,176 - Nagamine , et al. February 16, 2 | 2010-02-16 |
Developing Apparatus, Developing Method And Storage Medium
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Solution treatment unit
Grant 6,843,259 - Nagamine January 18, 2 | 2005-01-18 |
Film forming method and film forming apparatus
Grant 6,730,599 - Inada , et al. May 4, 2 | 2004-05-04 |
Solution treatment method and solution treatment unit
Grant 6,715,943 - Nagamine April 6, 2 | 2004-04-06 |
Solution processing apparatus
Grant 6,602,382 - Matsuyama , et al. August 5, 2 | 2003-08-05 |
Film forming method and film forming apparatus
App 20030099776 - Inada, Hiroichi ; et al. | 2003-05-29 |
Film forming method and film forming apparatus
Grant 6,541,376 - Inada , et al. April 1, 2 | 2003-04-01 |
Solution processing apparatus and method
Grant 6,533,864 - Matsuyama , et al. March 18, 2 | 2003-03-18 |
Solution processing apparatus and method
Grant 6,514,570 - Matsuyama , et al. February 4, 2 | 2003-02-04 |
Solution treatment unit
App 20020144719 - Nagamine, Shuichi | 2002-10-10 |
Solution treatment method and solution treatment unit
App 20020053319 - Nagamine, Shuichi | 2002-05-09 |
Solution processing apparatus
Grant 6,364,547 - Matsuyama , et al. April 2, 2 | 2002-04-02 |
Film forming method and film forming apparatus
App 20020022377 - Inada, Hiroichi ; et al. | 2002-02-21 |
Substrate processing apparatus and method
Grant 6,332,723 - Matsuyama , et al. December 25, 2 | 2001-12-25 |
Treatment solution discharge apparatus
App 20010047753 - Nagamine, Shuichi ; et al. | 2001-12-06 |
Developing method and developing unit
App 20010009452 - Matsuyama, Yuji ; et al. | 2001-07-26 |
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