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Substrate Processing Apparatus And Substrate Processing Method App 20210398827 - Mouri; Nobuhiko ;   et al. | 2021-12-23 |
Dressing Apparatus And Dressing Method For Substrate Rear Surface Polishing Member App 20210308828 - Okamoto; Yoshiki ;   et al. | 2021-10-07 |
Substrate processing apparatus and substrate processing method Grant 11,139,182 - Mouri , et al. October 5, 2 | 2021-10-05 |
Substrate Cleaning Apparatus And Substrate Cleaning Method App 20210220878 - Kubo; Akihiro ;   et al. | 2021-07-22 |
Dressing apparatus and dressing method for substrate rear surface polishing member Grant 11,059,145 - Okamoto , et al. July 13, 2 | 2021-07-13 |
Liquid processing apparatus Grant 11,031,261 - Takiguchi , et al. June 8, 2 | 2021-06-08 |
Substrate Warpage Correction Method, Computer Storage Medium, And Substrate Warpage Correction Apparatus App 20210039221 - KANETAKE; Nozomu ;   et al. | 2021-02-11 |
Substrate Processing Apparatus And Substrate Processing Method App 20200365417 - Kubo; Akihiro ;   et al. | 2020-11-19 |
Substrate processing apparatus, substrate processing method and storage medium Grant 10,840,079 - Takiguchi , et al. November 17, 2 | 2020-11-17 |
Liquid processing apparatus Grant 10,649,334 - Yoshimura , et al. | 2020-05-12 |
Substrate Processing Apparatus And Substrate Processing Method App 20190181022 - Mouri; Nobuhiko ;   et al. | 2019-06-13 |
Developing apparatus, developing method and storage medium Grant 10,289,004 - Yoshihara , et al. | 2019-05-14 |
Liquid Processing Apparatus App 20190049845 - Yoshimura; Koki ;   et al. | 2019-02-14 |
Dressing Apparatus And Dressing Method For Substrate Rear Surface Polishing Member App 20190047118 - Okamoto; Yoshiki ;   et al. | 2019-02-14 |
Liquid processing method and storage medium Grant 10,168,618 - Sasagawa , et al. J | 2019-01-01 |
Developing method, developing apparatus and storage medium Grant 10,120,285 - Yoshihara , et al. November 6, 2 | 2018-11-06 |
Liquid Processing Apparatus App 20180308719 - TAKIGUCHI; Yasushi ;   et al. | 2018-10-25 |
Liquid processing apparatus Grant 10,014,190 - Takiguchi , et al. July 3, 2 | 2018-07-03 |
Substrate Processing Apparatus, Substrate Processing Method and Storage Medium App 20180151343 - TAKIGUCHI; Yasushi ;   et al. | 2018-05-31 |
Substrate cleaning apparatus, substrate cleaning method, and storage medium Grant 9,947,556 - Takiguchi , et al. April 17, 2 | 2018-04-17 |
Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium Grant 9,869,941 - Uemura , et al. January 16, 2 | 2018-01-16 |
Substrate cleaning method Grant 9,716,002 - Takiguchi , et al. July 25, 2 | 2017-07-25 |
Developing Method, Developing Apparatus And Storage Medium App 20170090291 - YOSHIHARA; Kousuke ;   et al. | 2017-03-30 |
Substrate Cleaning Method, Substrate Cleaning Apparatus, And Computer-readable Storage Medium App 20170090305 - UEMURA; Ryoichi ;   et al. | 2017-03-30 |
Developing apparatus, developing method and storage medium Grant 9,575,411 - Yoshihara , et al. February 21, 2 | 2017-02-21 |
Developing Apparatus, Developing Method And Storage Medium App 20170045821 - YOSHIHARA; Kousuke ;   et al. | 2017-02-16 |
Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium Grant 9,570,326 - Uemura , et al. February 14, 2 | 2017-02-14 |
Developing method, developing apparatus and storage medium Grant 9,568,829 - Yoshihara , et al. February 14, 2 | 2017-02-14 |
Substrate Cleaning Apparatus, Substrate Cleaning Method, And Computer-readable Storage Medium App 20160314958 - TAKIGUCHI; Yasushi ;   et al. | 2016-10-27 |
Developing treatment apparatus and developing treatment method Grant 9,470,979 - Takiguchi , et al. October 18, 2 | 2016-10-18 |
Developing Treatment Apparatus And Developing Treatment Method App 20160202609 - TAKIGUCHI; Yasushi ;   et al. | 2016-07-14 |
Developing treatment apparatus and developing treatment method Grant 9,304,398 - Takiguchi , et al. April 5, 2 | 2016-04-05 |
Liquid Processing Method And Storage Medium App 20160054653 - Sasagawa; Norihiko ;   et al. | 2016-02-25 |
Liquid processing apparatus, liquid processing method and storage medium Grant 9,195,138 - Sasagawa , et al. November 24, 2 | 2015-11-24 |
Substrate Cleaning Method, Substrate Cleaning Apparatus, And Computer-readable Storage Medium App 20150194301 - UEMURA; Ryoichi ;   et al. | 2015-07-09 |
Developing Method, Developing Apparatus And Storage Medium App 20150036109 - YOSHIHARA; Kousuke ;   et al. | 2015-02-05 |
Developing Apparatus, Developing Method And Storage Medium App 20150036110 - YOSHIHARA; Kousuke ;   et al. | 2015-02-05 |
Substrate Cleaning Apparatus, Substrate Cleaning Method, And Storage Medium App 20150027492 - TAKIGUCHI; Yasushi ;   et al. | 2015-01-29 |
Liquid Processing Apparatus App 20150027503 - TAKIGUCHI; Yasushi ;   et al. | 2015-01-29 |
Substrate Cleaning Apparatus, Substrate Cleaning Method, And Computer-readable Storage Medium App 20140102474 - TAKIGUCHI; Yasushi ;   et al. | 2014-04-17 |
Developing Treatment Apparatus And Developing Treatment Method App 20140071411 - TAKIGUCHI; Yasushi ;   et al. | 2014-03-13 |
Liquid processing apparatus and liquid processing method Grant 8,636,915 - Takiguchi , et al. January 28, 2 | 2014-01-28 |
Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium Grant 8,578,953 - Takiguchi , et al. November 12, 2 | 2013-11-12 |
Liquid Processing Apparatus And Liquid Processing Method App 20130118533 - Takiguchi; Yasushi ;   et al. | 2013-05-16 |
Developing apparatus, developing method and storage medium Grant 8,337,104 - Takiguchi , et al. December 25, 2 | 2012-12-25 |
Developing apparatus, developing method and storage medium Grant 8,333,522 - Arima , et al. December 18, 2 | 2012-12-18 |
Coating and developing apparatus, developing method and non-transitory medium Grant 8,262,300 - Takiguchi , et al. September 11, 2 | 2012-09-11 |
Liquid Processing Apparatus, Liquid Processing Method And Storage Medium App 20120052190 - Sasagawa; Norihiko ;   et al. | 2012-03-01 |
Coating And Developing Apparatus, Developing Method And Non-transitory Medium App 20110200321 - Takiguchi; Yasushi ;   et al. | 2011-08-18 |
Developing Apparatus, Developing Method And Storage Medium App 20110200953 - ARIMA; Hiroshi ;   et al. | 2011-08-18 |
Developing Apparatus, Developing Method And Storage Medium App 20110200952 - Takiguchi; Yasushi ;   et al. | 2011-08-18 |
Coating film forming apparatus and method Grant 7,959,988 - Yamamoto , et al. June 14, 2 | 2011-06-14 |
Coater cup Grant D610,176 - Nagamine , et al. February 16, 2 | 2010-02-16 |
Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium App 20080163899 - Takiguchi; Yasushi ;   et al. | 2008-07-10 |
Coating Film Forming Apparatus And Method App 20080124489 - Yamamoto; Taro ;   et al. | 2008-05-29 |