U.S. patent application number 16/730415 was filed with the patent office on 2020-05-07 for method for forming semiconductor device structure with cap layer.
This patent application is currently assigned to TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.. The applicant listed for this patent is TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.. Invention is credited to Yen-Ming CHEN, Feng-Ching CHU, Wei-Yang LEE, Feng-Cheng YANG.
Application Number | 20200144423 16/730415 |
Document ID | / |
Family ID | 65436123 |
Filed Date | 2020-05-07 |
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United States Patent
Application |
20200144423 |
Kind Code |
A1 |
CHU; Feng-Ching ; et
al. |
May 7, 2020 |
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH CAP
LAYER
Abstract
A method for forming a semiconductor device structure is
provided. The method includes providing a substrate having a base,
a first fin structure, and a second fin structure. The method
includes forming a gate structure over the first fin structure and
the second fin structure. The method includes forming a first
source structure and a first drain structure on the first fin
structure and on two opposite sides of the gate structure. The
first source structure and the first drain structure are made of an
N-type conductivity material. The method includes forming a cap
layer over the first source structure and the first drain
structure. The cap layer is doped with a Group IIIA element, and
the cap layer adjacent to a top surface of the first source
structure is thicker than the cap layer adjacent to a bottom
surface of the first source structure.
Inventors: |
CHU; Feng-Ching; (Pingtung
County, TW) ; LEE; Wei-Yang; (Taipei City, TW)
; YANG; Feng-Cheng; (Zhudong Township, TW) ; CHEN;
Yen-Ming; (Chupei City, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
Hsinchu |
|
TW |
|
|
Assignee: |
TAIWAN SEMICONDUCTOR MANUFACTURING
CO., LTD.
Hsinchu
TW
|
Family ID: |
65436123 |
Appl. No.: |
16/730415 |
Filed: |
December 30, 2019 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
15692471 |
Aug 31, 2017 |
10522680 |
|
|
16730415 |
|
|
|
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 21/823878 20130101;
H01L 29/267 20130101; H01L 29/785 20130101; H01L 27/0924 20130101;
H01L 29/66795 20130101; H01L 29/41791 20130101; H01L 29/7848
20130101; H01L 29/167 20130101; H01L 23/535 20130101; H01L
21/823821 20130101; H01L 29/0653 20130101; H01L 29/7851 20130101;
H01L 21/823814 20130101; H01L 21/823871 20130101; H01L 29/24
20130101; H01L 27/0886 20130101; H01L 29/0847 20130101; H01L 29/165
20130101; H01L 29/161 20130101 |
International
Class: |
H01L 29/78 20060101
H01L029/78; H01L 27/092 20060101 H01L027/092; H01L 29/06 20060101
H01L029/06; H01L 29/08 20060101 H01L029/08; H01L 29/161 20060101
H01L029/161; H01L 29/165 20060101 H01L029/165; H01L 29/24 20060101
H01L029/24; H01L 29/267 20060101 H01L029/267; H01L 29/167 20060101
H01L029/167; H01L 23/535 20060101 H01L023/535; H01L 21/8238
20060101 H01L021/8238; H01L 29/66 20060101 H01L029/66 |
Claims
1. A method for forming a semiconductor device structure,
comprising: providing a substrate having a base, a first fin
structure, and a second fin structure, wherein the first fin
structure and the second fin structure are over the base; forming
an isolation layer over the base, wherein the first fin structure
and the second fin structure are partially in the isolation layer;
forming a gate structure over the first fin structure and the
second fin structure; forming a first source structure and a first
drain structure on the first fin structure and on two opposite
sides of the gate structure, wherein the first source structure and
the first drain structure are made of an N-type conductivity
material; and forming a cap layer over the first source structure
and the first drain structure, wherein the cap layer is doped with
a Group IIIA element, and the cap layer adjacent to a top surface
of the first source structure is thicker than the cap layer
adjacent to a bottom surface of the first source structure.
2. The method for forming the semiconductor device structure as
claimed in claim 1, wherein the cap layer conformally covers the
top surface and a sidewall of the first source structure.
3. The method for forming the semiconductor device structure as
claimed in claim 1, further comprising: before forming the cap
layer over the first source structure and the first drain
structure, forming a second source structure and a second drain
structure on the second fin structure and on the two opposite sides
of the gate structure, wherein the second source structure and the
second drain structure are made of a P-type conductivity material,
and the second source structure and the second drain structure are
doped with the Group IIIA element.
4. The method for forming the semiconductor device structure as
claimed in claim 3, wherein the Group IIIA element is boron.
5. The method for forming the semiconductor device structure as
claimed in claim 3, further comprising: forming a dielectric layer
over the isolation layer and the cap layer; and removing portions
of the gate structure and the dielectric layer between the first
fin structure and the second fin structure to form a trench in the
gate structure and the dielectric layer, wherein the gate structure
is divided into a first gate structure and a second gate structure
respectively over the first fin structure and the second fin
structure by the trench.
6. The method for forming the semiconductor device structure as
claimed in claim 5, wherein the trench partially exposes the cap
layer.
7. The method for forming the semiconductor device structure as
claimed in claim 5, further comprising: forming an isolation
structure in the trench, wherein the isolation structure is between
the first gate structure and the second gate structure.
8. The method for forming the semiconductor device structure as
claimed in claim 7, wherein the isolation structure is between the
cap layer and the second fin structure.
9. The method for forming the semiconductor device structure as
claimed in claim 7, wherein the isolation structure is between the
first source structure and the second source structure and between
the first drain structure and the second drain structure, and the
isolation structure passes through the dielectric layer.
10. The method for forming the semiconductor device structure as
claimed in claim 7, wherein the isolation structure is in direct
contact with the first gate structure, the second gate structure,
the cap layer, the dielectric layer, and the isolation layer.
11. A method for forming a semiconductor device structure,
comprising: providing a substrate having a base, a first fin
structure, and a second fin structure, wherein the first fin
structure and the second fin structure are over the base; forming
an isolation layer over the base, wherein the first fin structure
and the second fin structure are partially in the isolation layer;
forming a gate structure over the first fin structure and the
second fin structure; forming a first stressor and a second
stressor on the first fin structure and on two opposite sides of
the gate structure, wherein the first stressor and the second
stressor are made of an N-type conductivity material; forming a cap
layer over a first top surface and a first sidewall of the first
stressor and a second top surface and a second sidewall of the
second stressor, wherein the cap layer is doped with a Group IIIA
element; and forming an etching stop layer over the cap layer and
the isolation layer, wherein the cap layer separates the etching
stop layer from the first stressor and the second stressor.
12. The method for forming the semiconductor device structure as
claimed in claim 11, wherein the etching stop layer conformally
covers the cap layer and the isolation layer.
13. The method for forming the semiconductor device structure as
claimed in claim 11, further comprising: before forming the cap
layer over the first stressor and the second stressor, forming a
third stressor and a fourth stressor on the second fin structure
and on the two opposite sides of the gate structure, wherein the
third stressor and the fourth stressor are made of a P-type
conductivity material, and the third stressor and the fourth
stressor are doped with the Group IIIA element; forming a
dielectric layer over the etching stop layer; and removing portions
of the gate structure, the dielectric layer, and the etching stop
layer between the first fin structure and the second fin structure
to form a trench passing through the gate structure, the dielectric
layer, and the etching stop layer, wherein the gate structure is
divided into a first gate structure and a second gate structure
respectively over the first fin structure and the second fin
structure by the trench.
14. The method for forming the semiconductor device structure as
claimed in claim 13, further comprising: forming an isolation
structure in the trench, wherein the isolation structure is between
the first gate structure and the second gate structure, and the cap
layer is partially in the isolation structure.
15. The method for forming the semiconductor device structure as
claimed in claim 14, wherein the cap layer is in direct contact
with the isolation layer, the isolation structure, the etching stop
layer, the first stressor, and the second stressor.
16. The method for forming the semiconductor device structure as
claimed in claim 13, wherein a first average concentration of the
Group IIIA element in the cap layer is less than a second average
concentration of the Group IIIA element in the third stressor and
the fourth stressor.
17. A method for forming a semiconductor device structure,
comprising: providing a substrate having a base, a first fin
structure, and a second fin structure, wherein the first fin
structure and the second fin structure are over the base; forming
an isolation layer over the base, wherein the first fin structure
and the second fin structure are partially in the isolation layer;
forming a gate structure over the first fin structure and the
second fin structure; forming a source structure and a drain
structure on the first fin structure and on two opposite sides of
the gate structure, wherein the source structure and the drain
structure are made of an N-type conductivity material; and forming
a cap layer over the source structure and the drain structure,
wherein the cap layer is made of a P-type conductivity
material.
18. The method for forming the semiconductor device structure as
claimed in claim 17, further comprising: forming a dielectric layer
over the isolation layer, the source structure, the drain
structure, and the cap layer; removing portions of the gate
structure and the dielectric layer between the first fin structure
and the second fin structure to form a trench in the gate structure
and the dielectric layer, wherein the gate structure is divided
into a first gate structure and a second gate structure
respectively over the first fin structure and the second fin
structure by the trench; and forming an isolation structure in the
trench, wherein the isolation structure separates the first gate
structure from the second gate structure and separates the cap
layer from the second fin structure.
19. The method for forming the semiconductor device structure as
claimed in claim 18, wherein the cap layer and the source structure
are partially embedded in the isolation structure.
20. The method for forming the semiconductor device structure as
claimed in claim 18, wherein the cap layer separates the source
structure and the drain structure from the isolation structure.
Description
CROSS REFERENCE
[0001] This application is a Divisional of U.S. application Ser.
No. 15/692,471, filed on Aug. 31, 2017, the entirety of which is
incorporated by reference herein.
BACKGROUND
[0002] The semiconductor integrated circuit (IC) industry has
experienced rapid growth. Technological advances in IC materials
and design have produced generations of ICs. Each generation has
smaller and more complex circuits than the previous generation.
However, these advances have increased the complexity of processing
and manufacturing ICs.
[0003] In the course of IC evolution, functional density (i.e., the
number of interconnected devices per chip area) has generally
increased while geometric size (i.e., the smallest component (or
line) that can be created using a fabrication process) has
decreased. This scaling-down process generally provides benefits by
increasing production efficiency and lowering associated costs.
[0004] However, since feature sizes continue to decrease (e.g., the
distance between two adjacent fin structures continues to
decrease), fabrication processes continue to become more difficult
to perform. Therefore, it is a challenge to form reliable
semiconductor devices at smaller and smaller sizes.
BRIEF DESCRIPTION OF THE DRAWINGS
[0005] Aspects of the present disclosure are best understood from
the following detailed description when read with the accompanying
figures. It should be noted that, in accordance with standard
practice in the industry, various features are not drawn to scale.
In fact, the dimensions of the various features may be arbitrarily
increased or reduced for clarity of discussion.
[0006] FIGS. 1A-1N are perspective views of various stages of a
process for forming a semiconductor device structure, in accordance
with some embodiments.
[0007] FIG. 1K-1 is a cross-sectional view illustrating the
semiconductor device structure along a sectional line I-I' in FIG.
1K, in accordance with some embodiments.
[0008] FIG. 1N-1 is a cross-sectional view illustrating the
semiconductor device structure along a sectional line I-I' in FIG.
1N, in accordance with some embodiments.
[0009] FIG. 1N-2 is a cross-sectional view illustrating the
semiconductor device structure along a sectional line II-II' in
FIG. 1N, in accordance with some embodiments.
[0010] FIG. 1N-3 is a cross-sectional view illustrating the
semiconductor device structure along a sectional line V-V' in FIG.
1N, in accordance with some embodiments.
[0011] FIG. 1N-4 is a cross-sectional view illustrating the
semiconductor device structure along a sectional line IV-IV' in
FIG. 1N, in accordance with some embodiments.
[0012] FIG. 1N-5 is a cross-sectional view illustrating the
semiconductor device structure along a sectional line V-V' in FIG.
1N, in accordance with some embodiments.
DETAILED DESCRIPTION
[0013] The following disclosure provides many different
embodiments, or examples, for implementing different features of
the subject matter provided. Specific examples of components and
arrangements are described below to simplify the present
disclosure. These are, of course, merely examples and are not
intended to be limiting. For example, the formation of a first
feature over or on a second feature in the description that follows
may include embodiments in which the first and second features are
formed in direct contact, and may also include embodiments in which
additional features may be formed between the first and second
features, such that the first and second features may not be in
direct contact. In addition, the present disclosure may repeat
reference numerals and/or letters in the various examples. This
repetition is for the purpose of simplicity and clarity and does
not in itself dictate a relationship between the various
embodiments and/or configurations discussed.
[0014] Further, spatially relative terms, such as "beneath,"
"below," "lower," "above," "upper" and the like, may be used herein
for ease of description to describe one element or feature's
relationship to another element(s) or feature(s) as illustrated in
the figures. The spatially relative terms are intended to encompass
different orientations of the device in use or operation in
addition to the orientation depicted in the figures. The apparatus
may be otherwise oriented (rotated 90 degrees or at other
orientations) and the spatially relative descriptors used herein
may likewise be interpreted accordingly. It should be understood
that additional operations can be provided before, during, and
after the method, and some of the operations described can be
replaced or eliminated for other embodiments of the method.
[0015] The fins may be patterned by any suitable method. For
example, the fins may be patterned using one or more
photolithography processes, including double-patterning or
multi-patterning processes. Generally, double-patterning or
multi-patterning processes combine photolithography and
self-aligned processes, allowing patterns to be created that have,
for example, pitches smaller than what is otherwise obtainable
using a single, direct photolithography process. For example, in
one embodiment, a sacrificial layer is formed over a substrate and
patterned using a photolithography process. Spacers are formed
alongside the patterned sacrificial layer using a self-aligned
process. The sacrificial layer is then removed, and the remaining
spacers may then be used to pattern the fins.
[0016] FIGS. 1A-1N are perspective views of various stages of a
process for forming a semiconductor device structure, in accordance
with some embodiments. As shown in FIG. 1A, a substrate 110 is
provided, in accordance with some embodiments. The substrate 110
includes, for example, a semiconductor substrate. The semiconductor
substrate includes, for example, a semiconductor wafer (such as a
silicon wafer) or a portion of a semiconductor wafer.
[0017] In some embodiments, the substrate 110 is made of an
elementary semiconductor material including silicon or germanium in
a single crystal, polycrystal, or amorphous structure. In some
other embodiments, the substrate 110 is made of a compound
semiconductor, such as silicon carbide, gallium arsenide, gallium
phosphide, indium phosphide, indium arsenide, an alloy
semiconductor, such as SiGe, or GaAsP, or a combination thereof.
The substrate 110 may also include multi-layer semiconductors,
semiconductor on insulator (SOI) (such as silicon on insulator or
germanium on insulator), or a combination thereof.
[0018] As shown in FIG. 1A, the substrate 110 has a base 111 and
fin structures 112, 114, 116, and 118, in accordance with some
embodiments. The fin structures 112, 114, 116, and 118 are over the
base 111, in accordance with some embodiments. The fin structures
112, 114, 116, and 118 are spaced apart from each other by trenches
P1, P2, and P3 therebetween, in accordance with some
embodiments.
[0019] In some embodiments, a distance D1 between the fin
structures 112 and 114 is less than a distance D2 between the fin
structures 114 and 116. In some embodiments, a distance D3 between
the fin structures 112, 114, 116, and 118 is less than the distance
D2.
[0020] As shown in FIG. 1B, an isolation layer 120 is formed over
the base 111, in accordance with some embodiments. Each of the fin
structure 112, 114, 116, or 118 is partially in the isolation layer
120, in accordance with some embodiments. The isolation layer 120
includes oxide (such as silicon oxide), in accordance with some
embodiments. The isolation layer 120 is formed by a chemical vapor
deposition (CVD) process and an etching back process, in accordance
with some embodiments.
[0021] As shown in FIG. 1B, a gate dielectric layer 130 and a gate
electrode 140 are formed over the fin structures 112, 114, 116, and
118 and the isolation layer 120, in accordance with some
embodiments. The gate electrode 140 is formed over the gate
dielectric layer 130, in accordance with some embodiments.
[0022] The gate dielectric layer 130 is positioned between the gate
electrode 140 and the fin structures 112, 114, 116, and 118, in
accordance with some embodiments. The gate dielectric layer 130 is
also positioned between the gate electrode 140 and the isolation
layer 120, in accordance with some embodiments. The gate electrode
140 and the gate dielectric layer 130 together form a gate
structure G, in accordance with some embodiments. Portions of the
gate structure G are in the trenches P1, P2, and P3, in accordance
with some embodiments.
[0023] The gate dielectric layer 130 is made of silicon oxide, in
accordance with some embodiments. The gate dielectric layer 130 is
formed using a chemical vapor deposition process (CVD process) and
an etching process, in accordance with some embodiments. The gate
electrode 140 is made of polysilicon, in accordance with some
embodiments. The gate electrode 140 is formed using a chemical
vapor deposition process and an etching process, in accordance with
some embodiments.
[0024] As shown in FIG. 1B, a spacer layer 150 is formed over
sidewalls S of the gate structure G, in accordance with some
embodiments. The spacer layer 150 surrounds the gate structure G,
in accordance with some embodiments. The spacer layer 150 is
positioned over the fin structures 112, 114, 116, and 118 and the
isolation layer 120, in accordance with some embodiments.
[0025] The spacer layer 150 includes insulating materials, such as
silicon oxide, silicon nitride, silicon oxynitride, or silicon
carbide, in accordance with some embodiments. The formation of the
spacer layer 150 includes a deposition process and an anisotropic
etching process, in accordance with some embodiments.
[0026] As shown in FIG. 1C, a mask layer M1 is formed over the
isolation layer 120 to cover the fin structures 112 and 114, in
accordance with some embodiments. The mask layer M1 is made of a
dielectric material, in accordance with some embodiments. The
dielectric material may include silicon nitride, silicon
oxynitride, silicon carbide, another suitable dielectric material,
or a combination thereof.
[0027] In some embodiments, a mask material layer is deposited over
the isolation layer 120, the fin structures 112, 114, 116, and 118,
and the gate structure G. The mask material layer may be deposited
by using a chemical vapor deposition (CVD) process, a physical
vapor deposition (PVD) process, a spin-on process, another
applicable process, or a combination thereof. Afterwards, the mask
material layer is partially removed by using a photolithography
process and an etching process. For example, a patterned
photoresist layer (not shown) is formed on the mask material layer.
The portion of the mask material layer not covered by the
photoresist layer is etched. As a result, the mask layer M1 is
formed.
[0028] Thereafter, as shown in FIG. 1C, portions of the fin
structures 116 and 118, which are outside of the isolation layer
120 and not covered by the gate structure G and the spacer layer
150, are removed, in accordance with some embodiments. The removal
process includes an etching process, in accordance with some
embodiments.
[0029] As shown in FIG. 1D, stressors 162P are formed on the fin
structures 116 and 118, in accordance with some embodiments. The
stressors 162P are in direct contact with the fin structures 116
and 118, in accordance with some embodiments. The stressors 162P
are positioned on two opposite sides of the gate structure G, in
accordance with some embodiments. In some embodiments, one of the
stressors 162P is a source structure and the other stressor 162P is
a drain structure.
[0030] The source structure and the drain structure are made of a
P-type conductivity material, in accordance with some embodiments.
The P-type conductivity material includes silicon germanium (SiGe)
or another suitable P-type conductivity material. The stressors
162P are formed using an epitaxial process, in accordance with some
embodiments. The stressors 162P are doped with the Group IIIA
element, in accordance with some embodiments. The Group IIIA
element includes boron or another suitable material.
[0031] As shown in FIG. 1E, the mask layer M1 is removed, in
accordance with some embodiments. The removal process includes an
etching process or another suitable process. As shown in FIG. 1E,
after the removal process, a mask layer M2 is formed over the
isolation layer 120 to cover the fin structures 116 and 118 and the
stressors 162P, in accordance with some embodiments. The mask layer
M2 is made of a dielectric material, in accordance with some
embodiments. The dielectric material may include silicon nitride,
silicon oxynitride, silicon carbide, another suitable dielectric
material, or a combination thereof.
[0032] In some embodiments, a mask material layer is deposited over
the isolation layer 120, the fin structures 112, 114, 116, and 118,
the gate structure G, and the stressors 162P. The mask material
layer may be deposited by using a chemical vapor deposition (CVD)
process, a physical vapor deposition (PVD) process, a spin-on
process, another applicable process, or a combination thereof.
Afterwards, the mask material layer is partially removed by using a
photolithography process and an etching process. For example, a
patterned photoresist layer (not shown) is formed on the mask
material layer. The portion of the mask material layer not covered
by the photoresist layer is etched. As a result, the mask layer M2
is formed.
[0033] Thereafter, as shown in FIG. 1E, portions of the fin
structures 112 and 114, which are outside of the isolation layer
120 and not covered by the gate structure G and the spacer layer
150, are removed, in accordance with some embodiments. The removal
process includes an etching process, in accordance with some
embodiments.
[0034] As shown in FIG. 1F, stressors 164N are formed on the fin
structures 112 and 114, in accordance with some embodiments. The
stressors 164N are in direct contact with the fin structures 112
and 114, in accordance with some embodiments. The stressors 164N
are positioned on two opposite sides of the gate structure G, in
accordance with some embodiments. In some embodiments, one of the
stressors 164N is a source structure and the other stressor 164N is
a drain structure. Each stressor 164N has a top surface 164a,
sidewalls 164c, and a bottom surface 164b, in accordance with some
embodiments.
[0035] The stressors 164N are made of a N-type conductivity
material, in accordance with some embodiments. The N-type
conductivity material includes silicon phosphorus (SiP) or another
suitable N-type conductivity material. The stressors 164N are
formed using an epitaxial process, in accordance with some
embodiments.
[0036] The stressors 164N are doped with the Group VA element, in
accordance with some embodiments. The Group VA element includes
phosphor (P), antimony (Sb), or another suitable Group VA material.
In some embodiments, a concentration of the Group VA element (e.g.
phosphor) ranges from about 3E21 atoms/cm.sup.3 to about 7E21
atoms/cm.sup.3. As shown in FIG. 1F, the mask layer M2 is removed,
in accordance with some embodiments. The removal process includes
an etching process or another suitable process.
[0037] As shown in FIG. 1G, a cap layer 170 is formed over the
stressors 164N, in accordance with some embodiments. The cap layer
170 conformally covers the stressors 164N, in accordance with some
embodiments. The cap layer 170 is in direct contact with the
stressors 164N and the isolation layer 120, in accordance with some
embodiments.
[0038] The cap layer 170 is made of a P-type conductivity material,
such as silicon germanium (SiGe) or the like, in accordance with
some embodiments. The cap layer 170 is doped with the Group IIIA
element, which is the same as the Group IIIA element doped in the
stressors 162P, in accordance with some embodiments. The Group IIIA
element includes boron or another suitable material.
[0039] In some embodiments, a first average concentration of the
Group IIIA (e.g. boron) element in the cap layer 170 is less than a
second average concentration of the Group IIIA element in the
stressors 162P. The first average concentration ranges from about
4E20 atoms/cm.sup.3 to about 9E20 atoms/cm.sup.3, in accordance
with some embodiments.
[0040] The second average concentration ranges from about 1E21
atoms/cm.sup.3 to about 9E21 atoms/cm.sup.3, in accordance with
some embodiments. The first average concentration is less than the
concentration of the Group VA element doped in the stressors 164N,
in accordance with some embodiments.
[0041] The cap layer 170 and the stressors 164N are made of
different materials, in accordance with some embodiments. The
etching rate of the cap layer 170 is less than the etching rate of
the stressors 164N during the subsequent etching process, in
accordance with some embodiments. Therefore, the cap layer 170
prevents the stressor 164N thereunder from damage during the
subsequent etching process, in accordance with some
embodiments.
[0042] In some embodiments, an average thickness of the cap layer
170 ranges from about 2 nm to about 6 nm. In some embodiments, the
average thickness of the cap layer 170 ranges from about 2 nm to
about 4 nm. In some embodiments, a thickness T1 of the cap layer
170 over (or adjacent to) top surfaces 164a of the stressors 164N
is greater than a thickness T2 of the cap layer 170 adjacent to
bottom surfaces 164b of the stressors 164N. The cap layer 170 is
formed using an epitaxial process, in accordance with some
embodiments.
[0043] In some embodiments, a total width W1 of the cap layer 170
and the stressor 164N is greater than a width W2 of the stressor
162P. The cap layer 170 covers the top surfaces 164a and the
sidewalls 164c of the stressors 164N, in accordance with some
embodiments. The cap layer 170 does not cover the bottom surfaces
164b of the stressors 164N, in accordance with some
embodiments.
[0044] As shown in FIG. 1H, an etching stop layer 180 is deposited
over the gate structure G, the spacer layer 150, the isolation
layer 120, the cap layer 170, and the stressors 162P, in accordance
with some embodiments. The etching stop layer 180 is in direct
contact with the gate structure G, the spacer layer 150, the
isolation layer 120, the cap layer 170, and the stressors 162P, in
accordance with some embodiments.
[0045] The cap layer 170 is between the etching stop layer 180 and
the stressors 164N to separate the etching stop layer 180 from the
stressors 164N, in accordance with some embodiments. In some
embodiments, the average thickness of the cap layer 170 is less
than the average thickness of the etching stop layer 180.
[0046] As shown in FIG. 1H, a dielectric layer 190 is formed over
the etching stop layer 180, in accordance with some embodiments.
The dielectric layer 190 includes oxide (such as silicon oxide), in
accordance with some embodiments. The dielectric layer 190 is
formed by a chemical vapor deposition (CVD) process, in accordance
with some embodiments.
[0047] As shown in FIG. 1I, a planarization process is then
performed on the dielectric layer 190 until a top surface 142 of
the gate electrode 140 is exposed, in accordance with some
embodiments. The planarization process includes a chemical
mechanical polishing (CMP) process, in accordance with some
embodiments.
[0048] As shown in FIG. 1J, portions of the isolation layer 120,
the gate dielectric layer 130, the gate electrode 140, the spacer
layer 150, the etching stop layer 180, and the dielectric layer 190
between the fin structures 114 and 116 are removed, in accordance
with some embodiments.
[0049] The removal process forms a trench R passing through the
gate dielectric layer 130, the gate electrode 140, the spacer layer
150, the etching stop layer 180, and the dielectric layer 190
between the fin structures 114 and 116, in accordance with some
embodiments. The trench R penetrates into the isolation layer 120
between the fin structures 114 and 116, in accordance with some
embodiments.
[0050] The gate structure G is divided into a first gate structure
G1 and a second gate structure G2 by the trench R, in accordance
with some embodiments. The first gate structure G1 is over the fin
structures 112 and 114, in accordance with some embodiments. The
second gate structure G2 is over the fin structures 116 and 118, in
accordance with some embodiments.
[0051] The removal process includes a photolithography process and
an etching process, in accordance with some embodiments. The
etching process includes a dry etching process, in accordance with
some embodiments. The dry etching process uses a process gas
including Cl.sub.2 and/or SiCl.sub.4, in accordance with some
embodiments.
[0052] FIG. 1K-1 is a cross-sectional view illustrating the
semiconductor device structure along a sectional line I-I' in FIG.
1K, in accordance with some embodiments. As shown in FIGS. 1K and
1K-1, an isolation structure 210 is formed in the trench R, in
accordance with some embodiments. The isolation structure 210 is
between the gate structures G1 and G2 and between the stressors
164N and 162P, in accordance with some embodiments. The isolation
structure 210 passes through the dielectric layer 190, in
accordance with some embodiments.
[0053] The isolation structure 210 is in direct contact with the
gate structures G1 and G2 (i.e. the gate electrode 140 and the gate
dielectric layer 130), the cap layer 170, the stressors 162P, the
etching stop layer 180, the spacer layer 150, the dielectric layer
190, and the isolation layer 120, in accordance with some
embodiments.
[0054] The cap layer 170 and the stressors 164N extend into the
isolation structure 210, in accordance with some embodiments. The
stressors 162P extend into the isolation structure 210, in
accordance with some embodiments. The cap layer 170 separates the
isolation structure 210 from the stressors 164N, in accordance with
some embodiments. The cap layer 170 is in direct contact with the
isolation structure 210, in accordance with some embodiments.
[0055] The isolation structure 210 is made of an insulating
material, such as silicon oxide, silicon nitride, silicon
oxynitride, silicon carbide, or the like, in accordance with some
embodiments. In some embodiments, the isolation structure 210 and
the dielectric layer 190 are made of different materials. In some
other embodiments, the isolation structure 210 and the dielectric
layer 190 are made of the same material. The isolation structure
210 is formed using a deposition process and a planarization
process, in accordance with some embodiments.
[0056] As shown in FIG. 1L, the gate structures G1 and G2 are
removed, in accordance with some embodiments. The removal process
includes a wet etching process, in accordance with some
embodiments. After the removal process, trenches 152 and 154 are
formed in the spacer layer 150, in accordance with some
embodiments. The trench 152 exposes portions of the fin structures
112 and 114, in accordance with some embodiments. The trench 154
exposes portions of the fin structures 116 and 118, in accordance
with some embodiments.
[0057] As shown in FIG. 1M, gate dielectric layers 222 and 224 are
respectively formed in the trenches 152 and 154 to cover bottom
surfaces of the trenches 152 and 154, in accordance with some
embodiments. The gate dielectric layers 222 and 224 are made of
silicon oxide, silicon nitride, silicon oxynitride, dielectric
material with high dielectric constant (high-K), another suitable
dielectric material, or a combination thereof.
[0058] Examples of high-K dielectric materials include hafnium
oxide, zirconium oxide, aluminum oxide, hafnium dioxide-alumina
alloy, hafnium silicon oxide, hafnium silicon oxynitride, hafnium
tantalum oxide, hafnium titanium oxide, hafnium zirconium oxide,
another suitable high-K material, or a combination thereof.
[0059] Thereafter, as shown in FIG. 1M, work function metal layers
232 and 234 are respectively deposited over the gate dielectric
layers 222 and 224, in accordance with some embodiments. The work
function metal layers 232 and 234 provide a desired work function
for transistors to enhance device performance including improved
threshold voltage.
[0060] In the embodiments of forming an NMOS transistor, the work
function metal layer 232 can be an n-type metal capable of
providing a work function value suitable for the device, such as
equal to or less than about 4.5 eV. The n-type metal may be made of
metal, metal carbide, metal nitride, or a combination thereof. For
example, the n-type metal is made of tantalum, tantalum nitride, or
a combination thereof.
[0061] In the embodiments of forming a PMOS transistor, the work
function metal layer 234 can be a p-type metal capable of providing
a work function value suitable for the device, such as equal to or
greater than about 4.8 eV. The p-type metal may be made of metal,
metal carbide, metal nitride, other suitable materials, or a
combination thereof.
[0062] For example, the p-type metal is made of titanium, titanium
nitride, other suitable materials, or a combination thereof. The
work function metal layers 232 and 234 are formed using a
deposition process and a planarization process, in accordance with
some embodiments. The deposition process includes a PVD process,
CVD process, ALD process, plating process, another suitable method,
or a combination thereof.
[0063] In some embodiments, the work function metal layers 232 and
234 are made of different materials. The work function metal layers
232 and 234 are formed individually, in accordance with some
embodiments. For example, during the formation of the work function
metal layer 232, the trench 154 is covered by a first mask layer
(not shown), and during the formation of the work function metal
layer 234, the trench 152 is covered by a second mask layer (not
shown).
[0064] In some other embodiments, the work function metal layers
232 and 234 are made the same material. The work function metal
layers 232 and 234 are formed in the same deposition process, in
accordance with some embodiments.
[0065] Afterwards, as shown in FIG. 1M, gate electrode layers 242
and 244 (also called metal gate electrode layers) are respectively
deposited over the work function metal layers 232 and 234 to fill
the trenches 152 and 154, in accordance with some embodiments. The
gate electrode layers 242 and 244 are made of a suitable metal
material, such as aluminum, tungsten, gold, platinum, cobalt,
another suitable metal, an alloy thereof, or a combination thereof,
in accordance with some embodiments.
[0066] The gate electrode layer 242, the work function metal layer
232, and the gate dielectric layer 222 together form a gate
structure G11, in accordance with some embodiments. The gate
electrode layer 244, the work function metal layer 234, and the
gate dielectric layer 224 together form a gate structure G22, in
accordance with some embodiments.
[0067] FIG. 1N-1 is a cross-sectional view illustrating the
semiconductor device structure along a sectional line I-I' in FIG.
1N, in accordance with some embodiments. FIG. 1N-2 is a
cross-sectional view illustrating the semiconductor device
structure along a sectional line II-II' in FIG. 1N, in accordance
with some embodiments. FIG. 1N-3 is a cross-sectional view
illustrating the semiconductor device structure along a sectional
line III-III' in FIG. 1N, in accordance with some embodiments. FIG.
1N-4 is a cross-sectional view illustrating the semiconductor
device structure along a sectional line IV-IV' in FIG. 1N, in
accordance with some embodiments. FIG. 1N-5 is a cross-sectional
view illustrating the semiconductor device structure along a
sectional line V-V' in FIG. 1N, in accordance with some
embodiments.
[0068] As shown in FIGS. 1N and 1N-1 to 1N-4, through holes R1 and
R2 are formed in the dielectric layer 190, the etching stop layer
180, and the cap layer 170, in accordance with some embodiments.
The through holes R1 and R2 pass through the dielectric layer 190,
the etching stop layer 180, and the cap layer 170 and extend into
the stressors 164N, in accordance with some embodiments.
[0069] As shown in FIGS. 1N and 1N-5, through holes R3 and R4 are
formed in the dielectric layer 190 and the etching stop layer 180,
in accordance with some embodiments. The through holes R3 and R4
pass through the dielectric layer 190 and the etching stop layer
180 and extend into the stressors 162P, in accordance with some
embodiments.
[0070] The through holes R1, R2, R3, and R4 are formed using an
etching process, in accordance with some embodiments. Since the cap
layer 170 is thin (i.e. less than or equal to 6 nm), the etching
process removes the cap layer 170 easily.
[0071] Thereafter, as shown in FIGS. 1N and 1N-1 to 1N-5, contact
plugs 252 are formed in the through holes R1 and R2, and contact
plugs 254 are formed in the through holes R3 and R4, in accordance
with some embodiments. The contact plugs 252 pass through the
dielectric layer 190, the etching stop layer 180, and the cap layer
170 and penetrate into the stressors 164N, in accordance with some
embodiments. Each contact plug 252 is electrically connected to the
stressor 164N thereunder, in accordance with some embodiments.
[0072] The contact plugs 254 pass through the dielectric layer 190
and the etching stop layer 180 and penetrate into the stressors
162P, in accordance with some embodiments. Each contact plug 254 is
electrically connected to the stressor 162P thereunder, in
accordance with some embodiments. The contact plugs 252 and 254 are
made of a suitable conductive material, such as a metal material
(e.g., aluminum, tungsten, gold, platinum, cobalt, another suitable
metal, an alloy thereof, or a combination thereof), in accordance
with some embodiments.
[0073] In accordance with some embodiments, semiconductor device
structures and methods for forming the same are provided. The
methods (for forming the semiconductor device structure) form a cap
layer over a source structure and a drain structure (or stressors)
with N-type conductivity to prevent the source structure and the
drain structure from damage during subsequent etching processes.
The cap layer is doped with a Group IIIA element.
[0074] In accordance with some embodiments, a method for forming a
semiconductor device structure is provided. The method includes
providing a substrate having a base, a first fin structure, and a
second fin structure. The first fin structure and the second fin
structure are over the base. The method includes forming an
isolation layer over the base. The first fin structure and the
second fin structure are partially in the isolation layer. The
method includes forming a gate structure over the first fin
structure and the second fin structure. The method includes forming
a first source structure and a first drain structure on the first
fin structure and on two opposite sides of the gate structure. The
first source structure and the first drain structure are made of an
N-type conductivity material. The method includes forming a cap
layer over the first source structure and the first drain
structure. The cap layer is doped with a Group IIIA element, and
the cap layer adjacent to a top surface of the first source
structure is thicker than the cap layer adjacent to a bottom
surface of the first source structure.
[0075] In accordance with some embodiments, a method for forming a
semiconductor device structure is provided. The method includes
providing a substrate having a base, a first fin structure, and a
second fin structure. The first fin structure and the second fin
structure are over the base. The method includes forming an
isolation layer over the base. The first fin structure and the
second fin structure are partially in the isolation layer. The
method includes forming a gate structure over and across the first
fin structure and the second fin structure. The method includes
forming a first stressor and a second stressor on the first fin
structure and on two opposite sides of the gate structure. The
first stressor and the second stressor are made of an N-type
conductivity material. The method includes forming a cap layer over
a first top surface and a first sidewall of the first stressor and
a second top surface and a second sidewall of the second stressor.
The cap layer is doped with a Group IIIA element. The method
includes forming an etching stop layer over the cap layer and the
isolation layer. The cap layer separates the etching stop layer
from the first stressor and the second stressor.
[0076] In accordance with some embodiments, a method for forming a
semiconductor device structure is provided. The method includes
providing a substrate having a base, a first fin structure, and a
second fin structure. The first fin structure and the second fin
structure are over the base. The method includes forming an
isolation layer over the base. The first fin structure and the
second fin structure are partially in the isolation layer. The
method includes forming a gate structure over and across the first
fin structure and the second fin structure. The method includes
forming a source structure and a drain structure on the first fin
structure and on two opposite sides of the gate structure. The
source structure and the drain structure are made of an N-type
conductivity material. The method includes forming a cap layer over
the source structure and the drain structure. The cap layer is made
of a P-type conductivity material.
[0077] The foregoing outlines features of several embodiments so
that those skilled in the art may better understand the aspects of
the present disclosure. Those skilled in the art should appreciate
that they may readily use the present disclosure as a basis for
designing or modifying other processes and structures for carrying
out the same purposes and/or achieving the same advantages of the
embodiments introduced herein. Those skilled in the art should also
realize that such equivalent constructions do not depart from the
spirit and scope of the present disclosure, and that they may make
various changes, substitutions, and alterations herein without
departing from the spirit and scope of the present disclosure.
* * * * *