U.S. patent application number 15/663962 was filed with the patent office on 2018-02-15 for wiring board.
The applicant listed for this patent is SHINKO ELECTRIC INDUSTRIES CO., LTD.. Invention is credited to Katsuya FUKASE, Kazuhiro KOBAYASHI, Ken MIYAIRI, Kazuhiro OSHIMA, Hiroharu YANAGISAWA.
Application Number | 20180047661 15/663962 |
Document ID | / |
Family ID | 61160417 |
Filed Date | 2018-02-15 |
United States Patent
Application |
20180047661 |
Kind Code |
A1 |
OSHIMA; Kazuhiro ; et
al. |
February 15, 2018 |
WIRING BOARD
Abstract
A wiring board includes an insulating layer including a first
insulating film provided with a first surface and a second surface
that is opposite to the first surface, and composed of only resin,
and a second insulating film provided with a first surface and a
second surface that is opposite to the first surface, including a
reinforcing member and resin, in which the reinforcing member is
impregnated with the resin, and stacked on the first surface of the
first insulating film such that the second surface of the second
insulating film contacts the first surface of the first insulating
film and the second surface of the first insulating film is exposed
outside; and a first wiring layer embedded in the first insulating
film, a predetermined surface of the first wiring layer being
exposed from the second surface of the first insulating film.
Inventors: |
OSHIMA; Kazuhiro; (Nagano,
JP) ; YANAGISAWA; Hiroharu; (Nagano, JP) ;
KOBAYASHI; Kazuhiro; (Nagano, JP) ; FUKASE;
Katsuya; (Nagano, JP) ; MIYAIRI; Ken; (Nagano,
JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SHINKO ELECTRIC INDUSTRIES CO., LTD. |
Nagano |
|
JP |
|
|
Family ID: |
61160417 |
Appl. No.: |
15/663962 |
Filed: |
July 31, 2017 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 2224/32225
20130101; H01L 24/92 20130101; H01L 2924/3511 20130101; H01L
2224/16238 20130101; H01L 2224/13111 20130101; H01L 23/3128
20130101; H01L 21/561 20130101; H01L 2924/15331 20130101; H01L
2924/15311 20130101; H01L 2224/73204 20130101; H01L 23/49822
20130101; H01L 24/97 20130101; H01L 21/568 20130101; H01L
2224/13116 20130101; H01L 24/16 20130101; H01L 2224/16227 20130101;
H01L 23/5389 20130101; H01L 2224/26175 20130101; H01L 23/145
20130101; H01L 23/49827 20130101; H01L 23/16 20130101; H01L 21/4857
20130101; H01L 24/81 20130101; H01L 2224/97 20130101; H01L
2225/1023 20130101; H01L 2924/19041 20130101; H01L 2224/92125
20130101; H01L 2224/83005 20130101; H01L 23/49811 20130101; H01L
23/49816 20130101; H01L 24/13 20130101; H01L 2224/81005 20130101;
H01L 2225/1058 20130101; H01L 2924/19105 20130101; H01L 24/83
20130101; H01L 2224/97 20130101; H01L 2224/81 20130101; H01L
2224/97 20130101; H01L 2224/83 20130101; H01L 2224/13111 20130101;
H01L 2924/01029 20130101; H01L 2224/13111 20130101; H01L 2924/01047
20130101; H01L 2224/13111 20130101; H01L 2924/01047 20130101; H01L
2924/01029 20130101; H01L 2224/73204 20130101; H01L 2224/16225
20130101; H01L 2224/32225 20130101; H01L 2924/00 20130101 |
International
Class: |
H01L 23/498 20060101
H01L023/498; H01L 21/48 20060101 H01L021/48; H01L 23/16 20060101
H01L023/16 |
Foreign Application Data
Date |
Code |
Application Number |
Aug 9, 2016 |
JP |
2016-156803 |
Claims
1. A wiring board comprising: an insulating layer including a first
insulating film provided with a first surface and a second surface
that is opposite to the first surface, and composed of only resin,
and a second insulating film provided with a first surface and a
second surface that is opposite to the first surface, including a
reinforcing member and resin, in which the reinforcing member is
impregnated with the resin, and stacked on the first surface of the
first insulating film such that the second surface of the second
insulating film contacts the first surface of the first insulating
film and the second surface of the first insulating film is exposed
outside; and a first wiring layer embedded in the first insulating
film, a predetermined surface of the first wiring layer being
exposed from the second surface of the first insulating film.
2. The wiring board according to claim 1, wherein the insulating
layer includes an open portion that exposes an opposite surface of
the predetermined surface of the first wiring layer, and wherein
the opposite surface of the first wiring layer exposed in the open
portion functions as a pad for external connection.
3. The wiring board according to claim 2, wherein a concave portion
is formed at a portion of the open portion formed in the first
insulating film, the concave portion being formed to expand an
inner wall of the open portion in the first insulating film.
4. The wiring board according to claim 2, further comprising: a
second wiring layer including a wiring pattern formed on the first
surface of the second insulating film, and a via wiring formed in
the open portion and connecting the wiring pattern and the first
wiring layer.
5. The wiring board according to claim 4, wherein the first
insulating film covers a side surface and the opposite surface of
the first wiring layer, and wherein the via wiring is formed to
penetrate the second insulating film and the first insulating film
to be connected to the opposite surface of the first wiring
layer.
6. The wiring board according to claim 4, wherein the first
insulating film only covers a side surface of the first wiring
layer, and wherein the via wiring only penetrates the second
insulating film to be connected to the opposite surface of the
first wiring layer.
7. The wiring board according to claim 6, wherein the opposite
surface of the first wiring layer is protruded from the first
surface of the first insulating film into the second insulating
film.
8. The wiring board according to claim 4, further comprising: a
second insulating layer stacked on the first surface of the second
insulating film of the insulating layer so as to cover the wiring
pattern of the second wiring layer; and a third wiring layer
stacked on the second insulating layer to be connected to the
wiring pattern of the second wiring layer.
9. The wiring board according to claim 1, wherein the predetermined
surface of the first wiring layer exposed from the second surface
of the first insulating film composes a plurality of pads, and the
wiring board further comprising: a solder resist layer stacked on
the second surface of the first insulating film and provided with
an open portion that exposes the predetermined surface of the first
wiring layer composing the plurality of pads.
10. The wiring board according to claim 1, wherein the second
surface of the first insulating film is a chip mounting surface on
which a semiconductor chip is to be mounted.
11. The wiring board according to claim 1, further comprising: a
third insulating layer and a fourth wiring layer stacked on the
second surface of the first insulating film.
12. The wiring board according to claim 1, wherein the first
insulating film includes filler.
13. The wiring board according to claim 1, further comprising: a
support body provided at the first surface of the second insulating
film.
14. A semiconductor package comprising: the wiring board according
to claim 1; and a semiconductor chip mounted on the second surface
of the first insulating film.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application is based on and claims the benefit
of priority of Japanese Priority Application No. 2016-156803 filed
on Aug. 9, 2016, the entire contents of which are hereby
incorporated by reference.
FIELD
[0002] The present invention relates to a wiring board.
BACKGROUND
[0003] Conventionally, a so-called build-up wiring board is known
in which wiring layers and insulating layers are alternately
stacked and the wiring layers are connected through via holes that
penetrate the insulating layer. In such a wiring board, if the
insulating layer does not include a reinforcing member, the wiring
board may be weak. Thus, a so-called prepreg including a
reinforcing member impregnated with insulating resin is used as an
outermost insulating layer to retain strength of a wiring board
(see Patent Document 1, for example).
[0004] However, if such prepreg is used as an outermost insulating
layer, when the outermost insulating layer is made thin, a
reinforcing member such as a glass cloth may contact a wiring layer
embedded in the outermost insulating layer to lower insulation
reliability.
[0005] Further, melt viscosity of the prepreg is high and the resin
cannot be sufficiently embedded. Thus, if wirings of the wiring
layer embedded in the outermost insulating layer are fine, the
resin may not be sufficiently provided between the wirings and
voids or the like may be generated. As a result, insulation
reliability may be lowered.
PATENT DOCUMENT
[0006] Patent Document 1: Japanese Patent No. 4,108,643
SUMMARY
[0007] The present invention is made in light of the above
problems, and provides a wiring board whose strength is retained
and insulation reliability is improved.
[0008] According to an embodiment, there is provided a wiring board
including an insulating layer including a first insulating film
provided with a first surface and a second surface that is opposite
to the first surface, and composed of only resin, and a second
insulating film provided with a first surface and a second surface
that is opposite to the first surface, including a reinforcing
member and resin, in which the reinforcing member is impregnated
with the resin, and stacked on the first surface of the first
insulating film such that the second surface of the second
insulating film contacts the first surface of the first insulating
film and the second surface of the first insulating film is exposed
outside; and a first wiring layer embedded in the first insulating
film, a predetermined surface of the first wiring layer being
exposed from the second surface of the first insulating film.
BRIEF DESCRIPTION OF DRAWINGS
[0009] Other objects, features and advantages of the present
invention will become more apparent from the following detailed
description when read in conjunction with the accompanying
drawings.
[0010] FIG. 1A and FIG. 1B are views illustrating an example of a
wiring board of a first embodiment;
[0011] FIG. 2A to FIG. 2D are views illustrating an example of
manufacturing steps of the wiring board of the first
embodiment;
[0012] FIG. 3A to FIG. 3C are views illustrating an example of the
manufacturing steps of the wiring board of the first
embodiment;
[0013] FIG. 4 is a view illustrating another example of the wiring
board of the first embodiment;
[0014] FIG. 5 is a cross-sectional view illustrating an example of
a wiring board of an alternative example 1 of the first
embodiment;
[0015] FIG. 6A to FIG. 6C are views illustrating an example of
manufacturing steps of the wiring board of the alternative example
1 of the first embodiment;
[0016] FIG. 7 is a cross-sectional view illustrating an example of
a wiring board of an alternative example 2 of the first
embodiment;
[0017] FIG. 8 is a view illustrating an example of manufacturing
steps of the wiring board of the alternative example 2 of the first
embodiment;
[0018] FIG. 9A and FIG. 9B are views illustrating an example of the
manufacturing steps of the wiring board of the alternative example
2 of the first embodiment;
[0019] FIG. 10 is a cross-sectional view illustrating another
example of the wiring board of the alternative example 2 of the
first embodiment;
[0020] FIG. 11 is a cross-sectional view illustrating an example of
a wiring board of the second embodiment;
[0021] FIG. 12A to FIG. 12C are views illustrating an example of
manufacturing steps of the wiring board of the second
embodiment;
[0022] FIG. 13A and FIG. 13B are cross-sectional views illustrating
an example of a semiconductor package of an applied example 1;
[0023] FIG. 14 is a cross-sectional view illustrating an example of
a semiconductor package of an applied example 2;
[0024] FIG. 15 is a cross-sectional view illustrating an example of
a wiring board of a third embodiment;
[0025] FIG. 16A to FIG. 16C are views illustrating an example of
manufacturing steps of the wiring board of the third
embodiment;
[0026] FIG. 17A to FIG. 17C are views illustrating an example of
the manufacturing steps of the wiring board of the third
embodiment;
[0027] FIG. 18 is a cross-sectional view illustrating an example of
a semiconductor package of an applied example 3;
[0028] FIG. 19A and FIG. 19B are cross-sectional views illustrating
an example of a wiring board of a fourth embodiment;
[0029] FIG. 20A to FIG. 20D are views illustrating an example of
manufacturing steps of the wiring board of the fourth
embodiment;
[0030] FIG. 21A to FIG. 21D are views illustrating an example of
the manufacturing steps of the wiring board of the fourth
embodiment;
[0031] FIG. 22A to FIG. 22C are views illustrating an example of
the manufacturing steps of the wiring board of the fourth
embodiment;
[0032] FIG. 23A to FIG. 23C are views illustrating an example of
the manufacturing steps of the wiring board of the fourth
embodiment;
[0033] FIG. 24A and FIG. 24B are cross-sectional views illustrating
an example of a wiring board of an alternative example 2 of the
fourth embodiment;
[0034] FIG. 25A to FIG. 25C are views illustrating an example of
manufacturing steps of the wiring board of the alternative example
2 of the fourth embodiment;
[0035] FIG. 26A and FIG. 26B are cross-sectional views illustrating
an example of a wiring board of an alternative example 3 of the
fourth embodiment;
[0036] FIG. 27A to FIG. 27D are views illustrating an example of
manufacturing steps of the wiring board of the alternative example
3 of the fourth embodiment;
[0037] FIG. 28A and FIG. 28B are cross-sectional views illustrating
an example of a semiconductor package of an applied example 4;
and
[0038] FIG. 29A to FIG. 29C are views illustrating an example of
manufacturing steps of the semiconductor package of the applied
example 4.
DESCRIPTION OF EMBODIMENTS
[0039] The invention will be described herein with reference to
illustrative embodiments. Those skilled in the art will recognize
that many alternative embodiments can be accomplished using the
teachings of the present invention and that the invention is not
limited to the embodiments illustrated for explanatory
purposes.
[0040] It is to be noted that, in the explanation of the drawings,
the same components are given the same reference numerals, and
explanations are not repeated.
First Embodiment
(Structure of Wiring Board of First Embodiment)
[0041] First, a structure of a wiring board of a first embodiment
is described. FIG. 1A and FIG. 1B are views illustrating an example
of a wiring board 1 of the first embodiment. FIG. 1A is a
cross-sectional view, and FIG. 1B is a partial bottom view.
[0042] With reference to FIG. 1A, the wiring board 1 of the first
embodiment is a coreless build-up wiring board including a wiring
layer 10, an insulating layer 20, a wiring layer 40 and solder
resist layers 50 and 60.
[0043] In this embodiment, a solder resist layer 50 side of the
wiring board 1 is referred to as an upper side or one side, and a
solder resist layer 60 side of the wiring board 1 is referred to as
a lower side or the other side. Further, a surface of each
component at the solder resist layer 50 side is referred to as one
surface, an upper surface or a first surface, and a surface of each
component at the solder resist layer 60 side is referred to as the
other surface, a lower surface or a second surface. However, the
wiring board 1 may be used in an opposite direction or may be used
at an arbitrary angle. Further, in this embodiment, "in a planar
view" means that an object is seen in a direction that is normal to
one surface of the solder resist layer 50, and a "planar shape"
means a shape of an object seen in the direction that is normal to
the one surface of the solder resist layer 50.
[0044] With reference to FIG. 1B, in the wiring board 1, the wiring
layer 10, which is a first wiring layer, includes a plurality of
pads 10a, which are connection terminals with a semiconductor chip,
and wiring patterns 10b to each of which the pad 10a is connected.
Here, mainly, a portion of the wiring layer 10 that is exposed from
an open portion 60x of the solder resist layer 60 is the pads 10a,
and a portion of the wiring layer 10 that is covered by the solder
resist layer 60 is the wiring patterns 10b. However, a portion of
the wiring patterns 10b may be exposed from the open portion 60x of
the solder resist layer 60. As the material of the wiring layer 10,
for example, copper (Cu) or the like may be used. The thickness of
the wiring layer 10 may be, for example, about 1 to 35 .mu.m.
[0045] The insulating layer 20 includes a first insulating film 21,
and a second insulating film 22 that is stacked on an upper surface
(one surface) of the first insulating film 21. The first insulating
film 21 is an outermost insulating layer, and a portion of a lower
surface (the other surface) of the first insulating film 21 is
exposed outside the wiring board 1. In this embodiment, a lower
surface of the first insulating film 21 is a chip mounting surface
on which a semiconductor chip is to be mounted. The first
insulating film 21 is composed of only insulating resin. In this
specification, "composed of only insulating resin" means that it
does not include a reinforcing member, but may include an additive
such as filler.
[0046] The first insulating film 21 covers the wiring layer 10.
More detail, the first insulating film 21 covers a side surface and
an upper surface of the wiring layer 10. In other words, the wiring
layer 10 is embedded in the first insulating film 21, and the lower
surface of the wiring layer 10 is exposed from the lower surface of
the first insulating film 21. The lower surface of the first
insulating film 21 and the lower surface of the wiring layer 10 may
be flush with each other, for example.
[0047] As the insulating resin for the first insulating film 21,
for example, epoxy-based resin, imide-based resin, phenol-based
resin, cyanate-based resin or the like may be used. The insulating
resin for the first insulating film 21 may be, for example,
thermosetting resin. The thickness of the first insulating film 21
may be, for example, about 1 to 100 .mu.m. The first insulating
film 21 may include filler such as silica (SiO.sub.2) or the
like.
[0048] The second insulating film 22 includes a reinforcing member
30 impregnated with insulating resin. In this specification,
"includes a reinforcing member impregnated with insulating resin"
means that the insulating film at least includes the reinforcing
member and the insulating resin, and the insulating film may
include an additive such as filler as well.
[0049] As the reinforcing member 30, for example, a woven cloth, a
nonwoven cloth or the like such as glass fiber, carbon fiber or
aramid fiber may be used. As the insulating resin for the second
insulating film 22, for example, epoxy-based resin, imide-based
resin, phenol-based resin, cyanate-based resin or the like may be
used. The insulating resin for the second insulating film 22 may
be, for example, thermosetting resin. The thickness of the second
insulating film 22 may be, for example, about 15 to 200 .mu.m. The
second insulating film 22 may include filler such as silica
(SiO.sub.2) or the like.
[0050] The type or the thickness of the insulating resin used for
the first insulating film 21 and the second insulating film 22 may
be independently determined. This means that same insulating resin
may be used for the first insulating film 21 and the second
insulating film 22, or different insulating resin may be used for
first insulating film 21 and the second insulating film 22.
Further, the first insulating film 21 and the second insulating
film 22 may have the same thickness, or have different thicknesses.
Further, either one of the first insulating film 21 and the second
insulating film 22 may include filler, or both of the first
insulating film 21 and the second insulating film 22 may include
filler. Further, when both of the first insulating film 21 and the
second insulating film 22 include filler, the type of the filler or
the content of the filler may be the same or may be different.
Here, for each of the first insulating film 21 and the second
insulating film 22, by setting CTE (coefficient of thermal
expansion) to be lower than or equal to 15 ppm/.degree. C. by
adjusting the type or the thickness of the insulating resin, or the
type, the content or the like of the filler, warping of the wiring
board 1 can be suppressed.
[0051] The wiring layer 40, which is a second wiring layer, is
formed on the insulating layer 20. The insulating layer 20 includes
open portions 20x, which are via holes, penetrating the insulating
layer 20 (second insulating film 22 and the first insulating film
21) to expose the upper surface of the wiring layer 10. The wiring
layer 40 includes via wirings filled in the open portions 20x,
respectively, and wiring patterns formed on an upper surface of the
second insulating film 22. Each of the open portions 20x is a
concave portion having an inverse cone trapezoid shape where the
diameter of a portion open at the solder resist layer 50 side is
larger than the diameter of a bottom portion of the respective open
portion 20x formed at the upper surface of the wiring layer 10.
[0052] The wiring layer 40 is electrically connected to the wiring
layer 10 exposed at the bottom portion of each of the open portions
20x. As the material of the wiring layer 40, for example, copper
(Cu) or the like may be used. The thickness of the wiring pattern
constituting the wiring layer 40 may be, for example, about 1 to 35
.mu.m.
[0053] The solder resist layer 50 is formed on the upper surface of
the second insulating film 22 so as to cover the wiring layer 40.
The solder resist layer 50 includes open portions 50x, and a
portion of the wiring layer 40 is exposed at a bottom portion of
each of the open portions 50x. The wiring layer 40 exposed at the
bottom portion of each of the open portions 50x functions as a pad
that is electrically connected to another wiring board, a
semiconductor package, a semiconductor chip or the like. As the
material of the solder resist layer 50, for example, photosensitive
epoxy-based insulating resin, acryl-based insulating resin or the
like may be used. The thickness of the solder resist layer 50 may
be, for example, about 5 to 40 .mu.m.
[0054] As necessary, a metal layer may be formed on an upper
surface of the wiring layer 40 exposed in each of the open portions
50x. As an example of the metal layer, an Au layer, a Ni/Au layer
(a metal layer in which a Ni layer and an Au layer are stacked in
this order), a Ni/Pd/Au layer (a metal layer in which a Ni layer, a
Pd layer and an Au layer are stacked in this order) or the like may
be used. Alternatively, instead of foaming the metal layer, an
antioxidation process such as an Organic Solderability Preservative
(OSP) process may be performed. A surface treatment layer formed by
the OSP process is an organic coating film composed of an azole
compound, an imidazole compound or the like.
[0055] The solder resist layer 60 is formed on the lower surface of
the first insulating film 21 so as to cover the wiring layer 10.
The solder resist layer 60 includes the open portion 60x, and the
pads 10a of the wiring layer 10 are mainly exposed at a bottom
portion of the open portion 60x. As the material of the solder
resist layer 60, for example, photosensitive epoxy-based insulating
resin, acryl-based insulating resin or the like may be used. The
thickness of the solder resist layer 60 may be, for example, about
5 to 40 .mu.m. As necessary, the above described metal layer may be
formed, or the antioxidation process may be performed on the lower
surface of the wiring layer 10 that is exposed at the open portion
60x.
[0056] The pads 10a of the wiring layer 10 that are adjacent from
each other are provided with a space of about a few .mu.m to some
tens of .mu.m. Thus, it is difficult to provide a plurality of open
portions that expose lower surfaces of all of the pads 10a of the
wiring layer 10, respectively, in the solder resist layer 60. Thus,
in this embodiment, a single open portion 60x that exposes all of
the pads 10a of the wiring layer 10 is provided in the solder
resist layer 60. However, for example, when the pads 10a are not
provided in such a narrow pitch, a plurality of open portions each
individually exposes the lower surface of the respective pad 10a
may be provided in the solder resist layer 60.
(Method of Manufacturing Wiring Board of First Embodiment)
[0057] Next, a method of manufacturing the wiring board 1 of the
first embodiment is described. FIG. 2A to FIG. 3C are views
illustrating an example of manufacturing steps of the wiring board
1 of the first embodiment. In this embodiment, an example of
manufacturing steps is described in which parts corresponding to
the plurality of the wiring boards are manufactured on a support
body, and after removing the support body, the plurality of wiring
boards are manufactured by individualizing the parts.
[0058] Alternatively, as another example of manufacturing steps, a
single wiring board may be manufactured on a support body and the
support body may be removed to obtain the wiring board.
[0059] First, in a step illustrated in FIG. 2A, a support body 300
whose upper surface is a flat surface is prepared. Then, the wiring
layer 10 is formed on the upper surface of the support body 300. As
the support body 300, a metal plate, a metal foil or the like may
be used. In this embodiment, an example is described in which a
copper foil is used as the support body 300. The thickness of the
support body 300 may be, for example, about 18 to 100 .mu.m.
[0060] For forming the wiring layer 10, first, a resist layer (dry
film resist or the like, for example), provided with open portions
corresponding to parts where the wiring layer 10 is formed, is
formed on the upper surface of the support body 300. Then, by
electrolytic plating or the like in which the support body 300 is
used as a power supply layer, the wiring layer 10 is formed on the
upper surface of the support body 300 exposed in each of the open
portions of the resist layer. Thereafter, the resist layer is
removed. The material and the thickness of the wiring layer 10 are
as described above.
[0061] Next, in a step illustrated in FIG. 2B, for example,
thermosetting epoxy-based insulating resin or the like is laminated
on the upper surface of the support body 300 so as to cover the
upper surface and the side surface of the wiring layer 10 to form
the first insulating film 21 at a B-stage state (semi-cured state).
As described above, the first insulating film 21 is composed of
only insulating resin. In this step, the first insulating film 21
is not cured.
[0062] Here, in the step of forming the wiring layer 10, instead of
using the resist layer such as the dry film resist, a
photosensitive permanent insulating film including open portions
may be used. In such a case, after forming the wiring layer 10 in
each of the open portions of the permanent insulating film, the
permanent insulating film may not be removed, and the permanent
insulating film may be used as the first insulating film 21.
[0063] Next, in a step illustrated in FIG. 2C, for example,
thermosetting epoxy-based insulating resin or the like is laminated
on the upper surface of the first insulating film 21 to form the
second insulating film 22 at a B-stage state (semi-cured state)
stacked on the first insulating film 21. As described above, the
second insulating film 22 is a so-called prepreg obtained by
impregnating the reinforcing member 30 with the insulating resin.
The material of the reinforcing member 30 is as described above.
After stacking the second insulating film 22 on the upper surface
of the first insulating film 21, the first insulating film 21 and
the second insulating film 22 are heated at predetermined
temperature to be cured to manufacture the insulating layer 20. As
necessary, the first insulating film 21 and the second insulating
film 22 may be heated while being pressurized.
[0064] Compared with melt viscosity of the first insulating film 21
composed of only resin, melt viscosity of the second insulating
film 22 including the reinforcing member 30 is high. In this
embodiment, as the wiring layer 10 is covered by the first
insulating film 21 whose melt viscosity is relatively low, even
when wiring density of the wiring layer 10 is high, or when a ratio
of copper of the wiring layer 10 is high, melted insulating resin
can be introduced between wirings of the wiring layer 10. Thus,
voids, which may be easily generated when the wiring layer 10 is
covered by an insulating film including a reinforcing member and
whose melt viscosity is relatively high because the insulating
resin cannot be introduced between wirings of the wiring layer 10,
are not formed easily. The ratio of copper means a ratio of area of
the wiring layer at a surface of the insulating layer.
[0065] Further, in general, if the wiring layer contacts the
reinforcing member, migration may be generated along the
reinforcing member. For example, when a glass cloth is used as the
reinforcing member, migration may be generated along a fiber of the
glass cloth, and adjacent wiring patterns may be short-circuited.
However, according to the wiring board 1, the wiring layer 10 does
not contact the reinforcing member, and generation of migration can
be suppressed. Thus, insulation reliability of the wiring board 1
can be improved.
[0066] In particular, according to the wiring board 1, the
outermost wiring layer 10 includes the wiring patterns 10b in
addition to the pads 10a. Thus, at some areas, the ratio of copper
may become large. However, even in such a case, the first
insulating film 21 whose melt viscosity is relatively low can be
introduced between a space between the wirings of the wiring layer
10 and the wiring layer 10 can be sufficiently embedded.
[0067] Next, in a step illustrated in FIG. 2D, the open portions
20x, that are the via holes each penetrating the insulating layer
20 (the second insulating film 22 and the first insulating film 21)
to expose the upper surface of the wiring layer 10, are formed in
the insulating layer 20. The open portions 20x may be formed by,
for example, laser processing using CO.sub.2 laser or the like.
Each of the open portions 20x formed by the laser processing
becomes a concave portion having an inverse cone trapezoid shape
where the diameter of a portion open at the solder resist layer 50
side is larger than the diameter of a bottom portion of the
respective open portion 20x formed at the upper surface of the
wiring layer 10. When the open portions 20x are formed by the laser
processing, it is preferable that resin residue of the insulating
layer 20 adhered on the upper surface of the wiring layer 10
exposed at the bottom portion of each of the open portions 20x is
removed by performing a desmear process.
[0068] There is a case that different resin is used for the first
insulating film 21 than for the second insulating film 22, or
filler contents are different for the first insulating film 21 and
the second insulating film 22. In such a case, irradiating
conditions of laser or the like may be changed for a step of
irradiating laser on the second insulating film 22 and a step of
irradiating laser on the first insulating film 21 after the second
insulating film 22 is penetrated. This is performed so as not to
generate a step at an inner wall surface of each of the open
portions 20x at an interface between the first insulating film 21
and the second insulating film 22. Alternatively, it is possible to
control the shape of the inner wall surface of each of the open
portions 20x by adjusting a condition of the desmear process.
[0069] Next, in a step illustrated in FIG. 3A, the wiring layer 40
is formed on the insulating layer 20. The wiring layer 40 is formed
to include the via wirings filled in the open portions 20x,
respectively, and the wiring patterns formed on the upper surface
of the insulating layer 20. The wiring layer 40 is electrically
connected to the wiring layer 10 that is exposed at the bottom
portion of each of the open portions 20x. As the material of the
wiring layer 40, for example, copper (Cu) or the like may be used.
The wiring layer 40 may be formed by various wiring layer forming
methods such as a semi-additive method or a subtractive method.
[0070] Next, in a step illustrated in FIG. 3B, the solder resist
layer 50 that covers the wiring layer 40 is formed on the
insulating layer 20. The solder resist layer 50 may be formed by,
for example, coating liquid or paste photosensitive epoxy-based
insulating resin, acryl-based insulating resin or the like on the
insulating layer 20 so as to cover the wiring layer 40 by screen
printing, roll coating, spin coating or the like. Alternatively,
for example, the solder resist layer 50 may be formed by laminating
a photosensitive epoxy-based insulating resin film, an acryl-based
insulating resin film or the like on the insulating layer 20 so as
to cover the wiring layer 40.
[0071] Then, by exposing and developing the coated or laminated
insulating resin, the open portions 50x are formed
(photolithography). With this, the solder resist layer 50 provided
with the open portions 50x is formed. Alternatively, an insulating
resin film previously provided with the open portions 50x may be
laminated on the insulating layer 20 so as to cover the wiring
layer 40. Further, as the material of the solder resist layer 50,
non-photosensitive insulating resin may be used. In such a case,
the open portions 50x may be formed by, for example, laser
processing using CO.sub.2 laser or the like, or blasting using an
abrasive such as alumina abrasive grains, after forming the solder
resist layer 50 on the insulating layer 20 and curing it.
Alternatively, the solder resist layer 50 provided with the open
portions 50x may be formed by screen printing.
[0072] With this, a part of the wiring layer 40 is exposed in the
open portions 50x. The wiring layer 40 exposed in each of the open
portions 50x functions as a pad that is electrically connected to
another wiring board, a semiconductor package, a semiconductor chip
or the like. As necessary, a metal layer may be formed on the upper
surface of the wiring layer 40 that is exposed at the bottom
portion of each of the open portions 50x by electroless plating or
the like, for example. An example of the metal layer is as
described above. Further, an antioxidation process such as an OSP
process may be performed on the upper surface of the wiring layer
40 exposed at the bottom portion of each of the open portions 50x.
The step of forming the solder resist layer 50 may be performed
after the support body 300 is removed. In such a case, the solder
resist layer 50 and the solder resist layer 60 may be formed at the
same time.
[0073] Next, in a step illustrated in FIG. 3C, after removing the
support body 300 illustrated in FIG. 3B, the solder resist layer 60
provided with the open portion 60x that mainly exposes the pads 10a
of the wiring layer 10 is formed on the lower surface of the
insulating layer 20. The support body 300, which is the copper
foil, may be removed by, for example, wet etching using ferric
chloride aqueous solution, cupric chloride aqueous solution,
ammonium persulfate aqueous solution or the like. The solder resist
layer 60 may be formed by a method same as that for the solder
resist layer 50. As necessary, a metal layer may be formed or an
antioxidation process may be performed on the lower surface of the
wiring layer 10 that is exposed in the open portion 60x. As
described above, the pads 10a of the wiring layer 10 that are
adjacent from each other are provided with a space of about a few
.mu.m to some tens of .mu.m. Thus, in this embodiment, as an
example, the single open portion 60x that exposes the lower
surfaces of all of the pads 10a, respectively, of the wiring layer
10 is provided in the solder resist layer 60.
[0074] After the step illustrated in FIG. 3C, the structure body
illustrated in FIG. 3C is cut at cut positions C by a slicer or the
like to be individualized, and a plurality of the wiring boards 1
are completed (see FIG. 1A and FIG. 1B). As necessary, terminals
for external connection such as solder balls may be provided, or an
electronic component such as a chip capacitor may be mounted on the
wiring layer 40 exposed in each of the open portions 50x of the
solder resist layer 50, or on the wiring layer 10 exposed in the
open portion 60x of the solder resist layer 60. Further, the
terminals for external connection may be provided or the electronic
component may be mounted on the structure body before being cut,
and thereafter, the structure body may be cut to be
individualized.
[0075] As such, according to the wiring board 1 of the first
embodiment, the outermost wiring layer 10 is embedded in the first
insulating film 21 composed of only resin and whose melt viscosity
is relatively low. Thus, even when the wiring density of the wiring
layer 10 is high, or the ratio of copper of the wiring layer 10 is
high, voids are difficult to be generated due to insufficient
filling of the insulating resin, and further, the wiring layer 10
does not contact the reinforcing member. As a result, insulation
reliability of the wiring board 1 can be improved.
[0076] Further, the insulating layer 20 is a stacked structure of
two layers, the first insulating film 21 composed of only resin and
the second insulating film 22 including the reinforcing member 30.
Thus, strength of the insulating layer 20 in total is the same as
the conventional prepreg, and strength of the wiring board 1 can be
retained.
[0077] Further, if a wiring layer is embedded using an insulating
film including a reinforcing member as conventionally, as an amount
of resin included in the insulating film including the reinforcing
member is less, an upper surface of the insulating film tends to be
uneven, and it is difficult to form another wiring layer on the
upper surface of the insulating film. On the other hand, in this
embodiment, the second insulating film 22 including the reinforcing
member is formed on the first insulating film 21, and the resin of
the second insulating film 22 is not used to embed the wiring layer
10. Thus, the upper surface of the second insulating film 22
becomes a flat surface. Therefore, the wiring layer 40 can be
easily formed on the upper surface of the second insulating film
22.
[0078] Further, as characteristics of the first insulating film 21
and the second insulating film 22 can be arbitrarily set, design
freedom can be improved. For example, it is possible to select
resin that has good adhesion with the wiring layer 10, resin that
has good insulating property (with high migration resistance), or
resin whose melt viscosity is particularly low for the first
insulating film 21. Such resin can contribute to improve insulation
reliability of the wiring board 1. Alternatively, as it is possible
to individually adjust CTE of each of the first insulating film 21
and the second insulating film 22 by the filler content or the
like, it is possible to easily lower warping of the wiring board 1
in total.
[0079] Further, in this embodiment, not only the side surface of
the wiring layer 10, but also the upper surface of the wiring layer
10 is covered by the first insulating film 21 composed of only
resin. Thus, there is a sufficient distance between the wiring
layer 10 and the reinforcing member 30 in the second insulating
film 22. Thus, in particular, insulation reliability when moisture
is absorbed can be improved.
[0080] When the support body 300 and the wiring layer 10 are made
of the same metal (copper or the like, for example), the lower
surface of the wiring layer 10 may be etched when removing the
support body 300 in the step of FIG. 3C, and the lower surface of
the wiring layer 10 may be concaved from the lower surface of the
first insulating film 21. FIG. 4 illustrates a structure of a
wiring board 1A in such a case. The wiring board 1A has the same
performance as the wiring board 1.
[0081] Further, the manufacturing steps of the wiring board 1 may
be altered as follows. For example, in the step of FIG. 2C, the
second insulating film 22 may be formed by stacking a prepreg
including a copper foil on the upper surface of the first
insulating film 21. In such a case, the copper foil is stacked on
the entirety of one surface of the prepreg, and the prepreg
including the copper foil is stacked on the upper surface of the
first insulating film 21 such that the copper foil is positioned at
the upper surface. Alternatively, the second insulating film 22 may
be formed by stacking a copper foil in addition to the prepreg on
the upper surface of the first insulating film 21.
[0082] As a result, in FIG. 2C, the first insulating film 21, the
second insulating film 22 and the copper foil are stacked in this
order. Thereafter, in the step of FIG. 2D, laser processing is
performed onto the copper foil as well, and the open portions 20x
are formed in the insulating layer 20. Next, in the step of FIG.
3A, the wiring layer 40 is formed by a semi-additive method or a
subtractive method. At this time, the copper foil remains as a part
of the wiring layer 40.
[0083] Further, the manufacturing steps of the wiring board 1 may
be altered as follows. For example, in the step of FIG. 2C, the
second insulating film 22 may be formed by stacking a prepreg with
a copper foil including a primer layer on the upper surface of the
first insulating film 21.
[0084] As a result, in FIG. 2C, the first insulating film 21, the
second insulating film 22, the primer layer and the copper foil are
stacked in this order.
[0085] Thereafter, the copper foil is removed. Next, in the step of
FIG. 2D, laser processing is performed onto the primer layer as
well, and the open portions 20x are formed in the insulating layer
20. Next, after the step of FIG. 3A, the wiring layer 40 may be
formed by a semi-additive method or a subtractive method. At this
time, the primer layer remains as a part of the insulating layer
20. The material and the like of the primer layer may be the same
as those of a third insulating film 23, which will be described
later.
Alternative Example 1 of First Embodiment
[0086] In an alternative example 1 of the first embodiment, an
example is described in which the upper surface of the wiring layer
10 is exposed from the first insulating film 21. Here, in the
alternative example 1 of the first embodiment, components same as
those already described in the above embodiments may not be
repeated.
[0087] FIG. 5 is a cross-sectional view illustrating an example of
a wiring board 1B of the alternative example 1 of the first
embodiment. With reference to FIG. 5, the wiring board 1B of the
alternative example 1 of the first embodiment is different from the
wiring board 1 (see FIG. 1A and FIG. 1B) in that the upper surface
of the wiring layer 10 is exposed from the first insulating film
21.
[0088] This means that in the wiring board 1B, the first insulating
film 21 only covers the side surfaces of the wiring layer 10. The
lower surface of the first insulating film 21 and the lower surface
of the wiring layer 10 may be, for example, flush with each other.
Further, the upper surface of the first insulating film 21 and the
upper surface of the wiring layer 10 may be, for example, flush
with each other. In other words, the thickness of the first
insulating film 21 may be the same as the thickness of the wiring
layer 10. The upper surface of the wiring layer 10 is covered by
the second insulating film 22. Further, the open portions 20x are
formed to penetrate only the second insulating film 22. The via
wirings of the wiring layer 40 connected to the upper surface of
the wiring layer 10 are formed in such open portions 20x.
[0089] FIG. 6A to FIG. 6C are views illustrating an example of
manufacturing steps of the wiring board 1B of the alternative
example 1 of the first embodiment. For manufacturing the wiring
board 1B, first, the steps of the first embodiment illustrated in
FIG. 2A and FIG. 2B are performed, and the wiring layer 10 and the
first insulating film 21 are formed on the upper surface of the
support body 300. Alternatively, the wiring layer 10 and the first
insulating film 21 may be formed as follows. First, epoxy-based
photosensitive insulating resin is provided on the upper surface of
the support body 300, for example, and the photosensitive
insulating resin is patterned by exposing and developing to form
open portions that expose the upper surface of the support body 300
at portions where the wiring layer 10 is to be formed. With this,
the first insulating film 21 provided with the open portions is
formed. Then, the wiring layer 10 is formed by electrolytic plating
or the like using the support body 300 as a power supply layer to
deposit electrolytic plating on the upper surface of the support
body 300 that is exposed in each of the open portions of the first
insulating film 21.
[0090] Thereafter, in a step illustrated in FIG. 6A, the first
insulating film 21 at a semi-cured state is pressed toward the
support body 300 by a plate or the like having a flat surface to
make the upper surface of the first insulating film 21 and the
upper surface of the wiring layer 10 flush with each other.
[0091] Alternatively, a part of the first insulating film 21 that
is positioned above the wiring layer 10 may be polished to make the
upper surface of the first insulating film 21 and the upper surface
of the wiring layer 10 flush with each other.
[0092] Next, in a step illustrated in FIG. 6B, similar to the step
illustrated in FIG. 2C, the second insulating film 22 at a B-stage
state (semi-cured state) is stacked on the upper surface of the
first insulating film 21. Then, after stacking the second
insulating film 22 on the upper surface of the first insulating
film 21, the first insulating film 21 and the second insulating
film 22 are heated at predetermined temperature to be cured. As
necessary, the first insulating film 21 and the second insulating
film 22 may be heated while being pressurized. In this step,
different from the step illustrated in FIG. 2C, the upper surface
of the wiring layer 10 is covered by the second insulating film
22.
[0093] Next, in a step illustrated in FIG. 6C, similar to the step
illustrated in FIG. 2D, the open portions 20x that expose the upper
surface of the wiring layer 10 are formed. However, in this
embodiment, as the upper surface of the wiring layer 10 is covered
only by the second insulating film 22, the open portions 20x are
formed to penetrate only the second insulating film 22. In other
words, the open portions 20x are not formed in the first insulating
film 21. Thus, different from a case in which the open portions 20x
are formed in both of the first insulating film 21 and the second
insulating film 22, it is unnecessary to consider changing
irradiation conditions of laser, adjusting conditions of the
desmear process or the like, and the manufacturing steps can be
simplified.
[0094] Thereafter, by performing the steps of FIG. 3A to FIG. 3C of
the first embodiment, and further, individualizing the manufactured
structure body by a slicer or the like, a plurality of the wiring
boards 1B are completed (see FIG. 5). As necessary, terminals for
external connection such as solder balls may be provided, or an
electronic component such as a chip capacitor may be mounted on the
wiring layer 40 exposed in each of the open portions 50x of the
solder resist layer 50, or on the wiring layer 10 exposed in the
open portion 60x of the solder resist layer 60. Further, the
terminals for external connection may be provided or the electronic
component may be mounted on the structure body before being cut,
and thereafter, the structure body may be cut to be
individualized.
Alternative Example 2 of First Embodiment
[0095] In an alternative example 2 of the first embodiment, an
example is described in which the upper surface of the wiring layer
10 protrudes from the first insulating film 21. Here, in the
alternative example 2 of the first embodiment, components same as
those already described in the above embodiments may not be
repeated.
[0096] FIG. 7 is a cross-sectional view illustrating an example of
a wiring board 10 of the alternative example 2 of the first
embodiment. With reference to FIG. 7, the wiring board 10 of the
alternative example 2 of the first embodiment is different from the
wiring board 1 (see FIG. 1A and FIG. 1B) in that the upper surface
of the wiring layer 10 is protruded from the upper surface of the
first insulating film 21 into the second insulating film 22.
[0097] This means that, in the wiring board 10, the first
insulating film 21 covers only a lower side of the side surface of
the wiring layer 10. The lower surface of the first insulating film
21 and the lower surface of the wiring layer 10 may be, for
example, flush with each other. Further, an upper side of the side
surface of the wiring layer 10 and the upper surface of the wiring
layer 10 are covered by the second insulating film 22.
[0098] FIG. 8 is a view illustrating an example of manufacturing
steps of the wiring board 10 of the alternative example 2 of the
first embodiment. For manufacturing the wiring board 10, first, a
step illustrated in FIG. 8 is performed. In the step illustrated in
FIG. 8, the insulating layer 20 at a B-stage state (semi-cured
state) in which the first insulating film 21 and the second
insulating film 22 are previously stacked is prepared. Further, in
parallel to the step illustrated in FIG. 8, the step illustrated in
FIG. 2A of the first embodiment is performed, and the wiring layer
10 is formed on the upper surface of the support body 300.
[0099] Then, the insulating layer 20 is laminated on the upper
surface of the support body 300 while facing the first insulating
film 21 to the support body 300 so as to cover the wiring layer 10,
and the first insulating film 21 and the second insulating film 22
are heated at predetermined temperature to be cured. As necessary,
the first insulating film 21 and the second insulating film 22 may
be heated while being pressurized. By previously setting the
thickness of the first insulating film 21 to be thinner than the
thickness of the wiring layer 10, as illustrated at a lower side of
FIG. 8, the upper surface of the wiring layer 10 is formed to
protrude from the first insulating film 21. However, it is
necessary to set the protruding amount of the wiring layer 10 such
that the upper surface of the wiring layer 10 does not contact the
reinforcing member 30.
[0100] In the steps illustrated in FIG. 8, by appropriately setting
the thickness of the first insulating film 21, the wiring board
having the structure of FIG. 1 or the structure of FIG. 5 may be
manufactured as well. Further, depending on the thickness of the
first insulating film 21, there may be a case in which the wiring
board having the structure of FIG. 1, the structure of FIG. 5 and
the structure of FIG. 7 are mixed may be obtained. However, even in
such a case, there is no problem.
[0101] Further, instead of the insulating layer 20 of FIG. 8, an
insulating layer 20A having a three-layered structure as
illustrated in FIG. 9A may be used. The insulating layer 20A has a
structure in which a third insulating film 23 is further stacked on
the second insulating film 22 of the insulating layer 20. The third
insulating film 23 is an insulating film that does not include a
reinforcing member, and may be referred to as a primer layer as
well.
[0102] For an insulating film such as the second insulating film 22
including the reinforcing member 30, it may be difficult to deposit
electroless plating on the upper surface of the second insulating
film 22 due to the existence of the reinforcing member 30. Thus, in
such a case, a method of forming a wiring layer using electroless
plating such as a semi-additive method cannot be used. Thus, in
FIG. 9A, the third insulating film 23 is stacked on the upper
surface of the second insulating film 22 so as to enable deposition
of electroless plating. With this, the wiring layer can be formed
by a semi-additive method, for example.
[0103] As the material of the third insulating film 23, for
example, insulating resin that contains a material same as the
second insulating film 22 and whose composition is adjusted such
that electroless plating is easily deposited may be used. The
thickness of the third insulating film 23 may be, for example,
about 1 to 10 .mu.m.
[0104] As illustrated in FIG. 9A, the insulating layer 20A is
laminated on the upper surface of the support body 300 while facing
the first insulating film 21 to the support body 300 so as to cover
the wiring layer 10, and the first insulating film 21, the second
insulating film 22 and the third insulating film 23 are heated at
predetermined temperature to be cured. As necessary, the first
insulating film 21, the second insulating film 22 and the third
insulating film 23 may be heated while being pressurized. By
previously setting the thickness of the first insulating film 21 to
be thinner than the thickness of the wiring layer 10, as
illustrated at a lower side of FIG. 9A, the upper surface of the
wiring layer 10 may be formed to protrude from the first insulating
film 21.
[0105] Thereafter, by performing the steps similar to those of FIG.
2D and FIG. 3A of the first embodiment, as illustrated in FIG. 9B,
the wiring layer 40 can be formed. When forming the wiring layer 40
by a semi-additive method, first, a seed layer made of copper (Cu)
or the like is formed on the upper surface of the wiring layer 10
exposed at the bottom portion of each of the open portions 20x and
on the insulating layer 20A including an inner wall surface of each
of the open portions 20x by electroless plating. Further, a resist
layer provided with open portions corresponding to the wiring layer
40 is formed on the seed layer.
[0106] Then, a wiring layer made of copper (Cu) or the like is
formed in the open portions of the resist layer by electrolytic
plating using the seed layer as a power supply layer. Subsequently,
after removing the resist layer, a portion of the seed layer that
is not covered by the wiring layer is removed using the wiring
layer as a mask. With this, the wiring layer 40 including the via
wirings filled in the open portions 20x, respectively, and the
wiring patterns formed on the insulating layer 20A (on the third
insulating film 23) is formed on the insulating layer 20A.
[0107] After the step of FIG. 9B, the steps illustrated in FIG. 3B
and FIG. 3C of the first embodiment are performed, and further,
individualizing the manufactured structure body by a slicer or the
like, a plurality of a wiring board 1D illustrated in FIG. 10 are
completed. As necessary, terminals for external connection such as
solder balls may be provided, or an electronic component such as a
chip capacitor may be mounted on the wiring layer 40 exposed in
each of the open portions 50x of the solder resist layer 50, or on
the wiring layer 10 exposed in the open portion 60x of the solder
resist layer 60. Further, the terminals for external connection may
be provided or the electronic component may be mounted on the
structure body before being cut, and thereafter, the structure body
may be cut to be individualized.
[0108] In the different embodiments as well, the wiring layer may
be formed by a semi-additive method by stacking the third
insulating film 23 on the second insulating film 22. In other
words, for the wiring board 1 illustrated in FIG. 1A, the wiring
board 1A illustrated in FIG. 4, the wiring board 1B illustrated in
FIG. 5, or a wiring board 1E illustrated in FIG. 11, which will be
described later, the insulating layer 20A may be used instead of
the insulating layer 20.
Second Embodiment
[0109] In a second embodiment, an example of a wiring board having
a three-layered structure is described. In the second embodiment,
components same as those already described in the above embodiments
may not be repeated.
[0110] FIG. 11 is a cross-sectional view illustrating an example of
the wiring board 1E of the second embodiment. With reference to
FIG. 11, the wiring board 1E of the second embodiment is different
from the wiring board 1 (see FIG. 1A and FIG. 1B) in that an
insulating layer 70 and a wiring layer 80 are inserted between the
wiring layer 40 and the solder resist layer 50.
[0111] The insulating layer 70 is formed on the upper surface of
the insulating layer 20 so as to cover the wiring layer 40. As the
material of the insulating layer 70, for example, epoxy-based
insulating resin or the like may be used. The insulating layer 70
may include filler such as silica (SiO.sub.2). The thickness of the
insulating layer 70 may be, for example, about 15 to 35 .mu.m.
[0112] Here, a stacked body including the first insulating film 21
and the second insulating film 22 may be used as the insulating
layer 70. In this case, the insulating layer 70, which is the
stacked body of the first insulating film 21 and the second
insulating film 22, is stacked on the insulating layer 20, which is
the stacked body of the first insulating film 21 and the second
insulating film 22. Alternatively, the insulating layer 70 may
include a reinforcing member. In this case, as the materials of
insulating resin and the reinforcing member composing the
insulating layer 70, those same as the second insulating film 22
and the reinforcing member 30 may be used.
[0113] The wiring layer 80, which is a third wiring layer, is
formed on the insulating layer 70. The wiring layer 80 includes via
wirings filled in via holes 70x that penetrate the insulating layer
70 to expose the upper surface of the wiring layer 40,
respectively, and wiring patterns formed on an upper surface of the
insulating layer 70. Each of the via holes 70x is a concave portion
having an inverse cone trapezoid shape where the diameter of a
portion open at the solder resist layer 50 side is larger than the
diameter of a bottom portion of the respective via hole 70x formed
at the upper surface of the wiring layer 40.
[0114] The wiring layer 80 is electrically connected to the wiring
layer 40 that is exposed at a bottom portion of each of the via
holes 70x. As the material of the wiring layer 80, for example,
copper (Cu) or the like may be used. The thickness of the wiring
pattern composing the wiring layer 80 may be, for example, about 1
to 35 .mu.m.
[0115] The solder resist layer 50 is formed on the upper surface of
the insulating layer 70 so as to cover the wiring layer 80. The
solder resist layer 50 is provided with the open portions 50x, and
a part of the wiring layer 80 is exposed at the bottom portion of
each of the open portions 50x. The wiring layer 80 exposed at the
bottom portion of each of the open portions 50x functions as pads
that are electrically connected to another wiring board, a
semiconductor package, a semiconductor chip or the like. The
material and the thickness of the solder resist layer 50 are as
described above.
[0116] FIG. 12A to FIG. 12C are views illustrating an example of
manufacturing steps of the wiring board 1E. For manufacturing the
wiring board 1E, first, the steps illustrated in FIG. 2A to FIG. 3A
of the first embodiment are performed. Thereafter, in a step
illustrated in FIG. 12A, a thermosetting epoxy-based insulating
resin film, for example, is laminated on the insulating layer 20 so
as to cover the wiring layer 40. Alternatively, thermosetting
liquid or paste epoxy-based insulating resin or the like is coated
on the insulating layer 20 by screen printing, spin coating or the
like, for example, so as to cover the wiring layer 40. Then, while
pressing the laminated or coated insulating resin, the laminated or
coated insulating resin is heated to greater than or equal to
curing temperature to be cured to manufacture the insulating layer
70. As necessary, the insulating resin may be heated while being
pressurized.
[0117] Next, in a step illustrated in FIG. 12B, similar to the step
illustrated in FIG. 2D of the first embodiment, the via holes 70x
each penetrating the insulating layer 70 to expose the upper
surface of the wiring layer 40 are formed in the insulating layer
70. When the via holes 70x are formed by laser processing, it is
preferable that resin residue of the insulating layer 70 adhered on
the upper surface of the wiring layer 40 exposed at the bottom
portion of each of the open portions 70x is removed by performing a
desmear process.
[0118] Next, in a step illustrated in FIG. 12C, similar to the step
illustrated in FIG. 3A of the first embodiment, the wiring layer 80
is formed on the insulating layer 70. Thereafter, by performing the
steps illustrated in FIG. 3B and FIG. 3C of the first embodiment,
and further, individualizing the manufactured structure body by a
slicer or the like, a plurality of the wiring boards 1E (see FIG.
11) are completed. As necessary, terminals for external connection
such as solder balls may be provided, or an electronic component
such as a chip capacitor may be mounted on the wiring layer 80
exposed in each of the open portions 50x of the solder resist layer
50, or on the wiring layer 10 exposed in the open portion 60x of
the solder resist layer 60. Further, the terminals for external
connection may be provided or the electronic component may be
mounted on the structure body before being cut, and thereafter, the
structure body may be cut to be individualized.
[0119] As such, by stacking the insulating layer 70 and the wiring
layer 80 on the wiring layer 40, the wiring board 1E having the
three-layered structure can be actualized. It is possible to
alternately stack a necessary number of insulating layers and the
wiring layers on the wiring layer 40 to obtain a wiring board of
four or more layered structure. At this time, it is preferable to
use a stacked body including the first insulating film 21 and the
second insulating film 22 as one or more of the insulating layers
stacked on the wiring layer 40 to further improve insulation
reliability.
Applied Example 1 of Wiring Board
[0120] In an applied example 1 of the wiring board, a semiconductor
package in which a semiconductor chip is mounted (flip-chip
mounted) on the wiring board of the first embodiment and the second
embodiment is described. In the applied example 1 of the wiring
board, components same as those already described in the above
embodiments may not be repeated.
[0121] FIG. 13A and FIG. 13B are cross-sectional views illustrating
an example of semiconductor packages 5 and 5A of the applied
example 1, respectively. With reference to FIG. 13A, the
semiconductor package 5 includes the wiring board 1 illustrated in
FIG. 1, a semiconductor chip 100, bumps 110, underfill resin 120
and bumps 130. In the semiconductor package 5, a first insulating
film 21 side of the wiring board 1 is a chip mounting surface on
which the semiconductor chip 100 is mounted, and a solder resist
layer 50 side of the wiring board 1 is an external connection
terminal surface on which the terminals for external connection are
formed.
[0122] The semiconductor chip 100 has a structure, for example, in
which a semiconductor integrated circuit (not illustrated in the
drawings) or the like is formed on a semiconductor substrate (not
illustrated in the drawings) which is a thinned substrate made of
silicon or the like. Electrode pads (not illustrated in the
drawings) that are electrically connected to the semiconductor
integrated circuit (not illustrated in the drawings) are formed on
the semiconductor substrate (not illustrated in the drawings).
[0123] Each of the bumps 110 electrically connects the respective
electrode pad (not illustrated in the drawings) of the
semiconductor chip 100 and the wiring layer 10 exposed in the open
portion 60x of the solder resist layer 60 of the wiring board 1.
The underfill resin 120 is filled between the semiconductor chip
100 and the wiring board 1 (first insulating film 21). The bumps
130 are terminals for external connection formed on the upper
surface of the wiring layer 40 exposed at the bottom portion of
each of the open portions 50x of the solder resist layer 50. The
bumps 130 are, for example, electrically connected to another
wiring board (a motherboard or the like), another semiconductor
package or the like. The bumps 110 and 130 are, for example, solder
bumps. As the material of the solder bump, for example, an alloy
containing Pb, an alloy of Sn and Cu, an alloy of Sn and Ag, an
alloy of Sn, Ag and Cu or the like may be used.
[0124] As such, by mounting the semiconductor chip 100 on the
wiring board 1 of the first embodiment, the semiconductor package 5
can be actualized. Further, as a semiconductor package 5A
illustrated in FIG. 13B, by mounting the semiconductor chip 100 on
the wiring board 1E of the second embodiment, the semiconductor
package 5A can be actualized. It is of course possible to use the
wiring board 1A, 1B, 1C or 1D instead of the wiring board 1 or
1E.
[0125] By selecting resin that is compatible with the underfill
resin 120 for the first insulating film 21, it is easy to fill the
underfill resin 120.
[0126] Although an example is described in which the semiconductor
chip 100 is mounted at the wiring layer 10 side, and the bumps 130
are provided on the wiring layer 40 or 80 is illustrated in FIG.
13A and FIG. 13B, the semiconductor chip 100 may be mounted at the
wiring layer 40 or 80 side, and the bumps 130 may be formed on the
wiring layer 10.
Applied Example 2 of Wiring Board
[0127] In an applied example 2 of the wiring board, an example of a
semiconductor package having a so-called POP (Package on package)
structure in which another semiconductor package is mounted on a
semiconductor package is described. In the applied example 2 of the
wiring board, components same as those already described in the
above embodiments may not be repeated.
[0128] FIG. 14 is a cross-sectional view illustrating an example of
semiconductor package 5B of the applied example 2. With reference
to FIG. 14, the semiconductor package 5B has a structure in which a
second semiconductor package including the wiring board 1 is
mounted on a first semiconductor package including the wiring board
1E.
[0129] In the first semiconductor package, a semiconductor chip 210
is mounted on the insulating layer 20 side of the wiring board 1E
through bumps 220, and the bumps 130 are formed on the wiring layer
80 exposed from each of the open portions 50x of the solder resist
layer 50. Further, in the second semiconductor package, a
semiconductor chip 250 and a chip capacitor 270 are mounted on the
insulating layer 20 side of the wiring board 1 through bumps 260
and solder 280, respectively.
[0130] The first semiconductor package and the second semiconductor
package are connected through solder balls 230 each having a
structure in which a copper core ball 231 is surrounded by solder
232. More detail, the wiring layer 10 of the wiring board 1E
composing the first semiconductor package, and the wiring layer 40
of the wiring board 1 composing the second semiconductor package
are connected through the solder balls 230.
[0131] The solder balls 230 function as a spacer that keeps a
distance between the first semiconductor package and the second
semiconductor package to be a prescribed value in addition to
function as a bonding material that connects (bonds) the first
semiconductor package and the second semiconductor package. This
means that the solder 232 functions as the bonding material, and
the copper core ball 231 functions as the spacer. Here, the height
of each of the solder balls 230 is set to be larger than a total of
the thickness of the semiconductor chip 210 and the thickness of
each of the bumps 220.
[0132] Sealing resin 240 is filled in a space between the wiring
board 1 and the wiring board 1E. By filling the sealing resin 240,
the wiring board 1 can be fixed to the wiring board 1E and the
semiconductor chip 210 mounted on the wiring board 1E is sealed.
This means that the sealing resin 240 functions as an adhesive
agent for adhering the first semiconductor package and second
semiconductor package, and also functions as a protective layer for
protecting the semiconductor chip 210. Further, by providing the
sealing resin 240, mechanical strength of the entirety of the
semiconductor package 5B can be increased.
[0133] As such, by using the wiring board 1 of the first embodiment
and the wiring board 1E of the second embodiment, the semiconductor
package 5B having a POP structure in which an active component (the
semiconductor chip 210 and the like) and/or a passive component
(the chip capacitor 270) is mounted can be actualized. It is of
course possible to use the wiring board 1A, 1B, 10 or 1D instead of
the wiring board 1 or 1E.
Third Embodiment
[0134] In a third embodiment, an example of a wiring board
including fine wirings is described. Here, in the third embodiment,
components same as those already described in the above embodiments
may not be repeated.
(Structure of Wiring Board of Third Embodiment)
[0135] First, a structure of the wiring board of the third
embodiment is described. FIG. 15 is a cross-sectional view
illustrating an example of a wiring board 1F of the third
embodiment. With reference to FIG. 15, the wiring board 1F of the
third embodiment has a structure in which an insulating layer 410,
a wiring layer 420, an insulating layer 430, a wiring layer 440, an
insulating layer 450 and a wiring layer 460 are stacked in this
order on the insulating layer 20 of the wiring board 1 (see FIG. 1A
and FIG. 1B). Here, the wiring layer 10, the insulating layer 20
and the like are illustrated in a reversed state in FIG. 15
compared with FIG. 1.
[0136] Each of the insulating layers 410, 430 and 450 is formed to
be thinner than the insulating layer 20. Further, wiring patterns
composing each of the wiring layers 420 and 440 is formed to be
thinner than the wiring patterns composing each of the wiring
layers 10 and 40. Density of the wiring patterns of each of the
wiring layers 420 and 440 is higher than that of the wiring
patterns of each of the wiring layers 10 and 40. In other words,
the wiring patterns of each of the wiring layers 420 and 440 are
fine wirings compared with those of each of the wiring layers 10
and 40. A solder resist layer that exposes pads of the wiring layer
460 may be provided on the insulating layer 450.
[0137] In the wiring board 1F, the other surface of the wiring
layer 10 and the other surface of the insulating layer 20 (the
other surface of the first insulating film 21) are polished to be a
flat surface. The insulating layer 410 is formed on the flat
surface formed by the other surface of the wiring layer 10 and the
other surface of the insulating layer 20. As the material of the
insulating layer 410, for example, photosensitive insulating resin
(thermosetting) whose main constituent is epoxy-based resin,
phenol-based resin or the like may be used. The insulating layer
410 may include filler such as silica (SiO.sub.2). The thickness of
the insulating layer 410 may be, for example, about 3 to 30
.mu.m.
[0138] The wiring layer 420 is formed on the other surface of the
insulating layer 410. The wiring layer 420 includes via wirings
filled in via holes 410x, respectively, and wiring patterns formed
on the other surface of the insulating layer 410. Each of the via
holes 410x is a concave portion having an inverse cone trapezoid
shape where the diameter of a portion open at the insulating layer
430 is larger than the diameter of a bottom portion of the
respective via hole 410x formed at the other surface of the wiring
layer 10. The wiring layer 420 is electrically connected to the
wiring layer 10 through the via holes 410x. As the material of the
wiring layer 420, for example, copper (Cu) or the like may be used.
The thickness of the wiring pattern composing the wiring layer 420
may be, for example, about 1 to 3 .mu.m.
[0139] The insulating layer 430 is formed on the other surface of
the insulating layer 410 so as to cover the wiring layer 420. The
material and the thickness of the insulating layer 430 may be, for
example, the same as those of the insulating layer 410.
[0140] The wiring layer 440 is formed on the other surface of the
insulating layer 430. The wiring layer 440 includes via wirings
filled in via holes 430x, respectively, and wiring patterns formed
on the other surface of the insulating layer 430. Each of the via
holes 430x is a concave portion having an inverse cone trapezoid
shape where the diameter of a portion open at the insulating layer
450 is larger than the diameter of a bottom portion of the
respective via hole 430x formed at the other surface of the wiring
layer 420. The wiring layer 440 is electrically connected to the
wiring layer 420 through the via holes 430x. The material of the
wiring layer 440 and the thickness of the wiring pattern composing
the wiring layer 440 may be, for example, the same as those of the
wiring layer 420.
[0141] The insulating layer 450 is formed on the other surface of
the insulating layer 430 so as to cover the wiring layer 440. The
material and the thickness of the insulating layer 450 may be, for
example, the same as those of the insulating layer 410.
[0142] The wiring layer 460 is formed on the other surface of the
insulating layer 450. The wiring layer 460 includes via wirings
filled in via holes 450x, respectively, and pads (posts) that are
protruded from the other surface of the insulating layer 450. Each
of the via holes 450x is a concave portion having an inverse cone
trapezoid shape where the diameter of a portion open at an external
side of the wiring board 1F is larger than the diameter of a bottom
portion of the respective via hole 450x formed at the other surface
of the wiring layer 440. The wiring layer 460 is electrically
connected to the wiring layer 440 through the via holes 450x.
[0143] The material of the wiring layer 460 may be, for example,
similar to that of the wiring layer 420. The thickness of the
wiring layer 460 (including the pad portion that protrudes from the
other surface of the insulating layer 450) may be, for example,
about 10 .mu.m. A planar shape of each of the pads of the wiring
layer 460 may be, for example, a circular shape whose diameter is
about 20 to 30 .mu.m. A pitch of the pads of the wiring layer 460
may be, for example, about 40 to 50 .mu.m. The pads of the wiring
layer 460 function as pads that are electrically connected to a
semiconductor chip or the like. The above described metal layer may
be formed or the antioxidation process may be performed on the
surface (only the upper surface, or the upper surface and the side
surface) of each of the pads of the wiring layer 460.
(Method of Manufacturing Wiring Board of Third Embodiment)
[0144] Next, a method of manufacturing the wiring board 1F of the
third embodiment is described. FIG. 16A to FIG. 17C are views
illustrating an example of manufacturing steps of the wiring board
1F of the third embodiment. In this embodiment, an example of
manufacturing steps is described in which parts corresponding to
the plurality of the wiring boards are manufactured on a support
body, and after removing the support body, the plurality of wiring
boards are manufactured by individualizing the parts.
[0145] Alternatively, as another example of manufacturing steps, a
single wiring board may be manufactured on a support body and the
support body may be removed to obtain the wiring board.
[0146] First, in a step illustrated in FIG. 16A, by performing the
steps similar to those of FIG. 2A to FIG. 3B, the wiring layer 10,
the insulating layer 20, the wiring layer 40 and the solder resist
layer 50 are formed on the support body 300.
[0147] Next, in a step illustrated in FIG. 16B, similar to the step
illustrated in FIG. 3C, the support body 300 illustrated in FIG.
16A is removed. When the support body 300 and the wiring layer 10
are made of the same metal (copper or the like, for example), the
other surface of the wiring layer 10 is also etched and the other
surface of the wiring layer 10 is concaved from the other surface
of the first insulating film 21.
[0148] Next, in a step illustrated in FIG. 16C, the other surface
of the insulating layer 20 (the other surface of the first
insulating film 21) of the structure body illustrated in FIG. 16B
is polished using a CMP method (chemical mechanical polishing
method) or the like. At this time, a part of the other surface of
the wiring layer 10 may be polished at the same time. With this,
the other surface of the wiring layer 10 and the other surface of
the insulating layer 20 forms a flat surface (flush with each
other). As the first insulating film 21 of the insulating layer 20
is composed of only insulating resin and does not include a
reinforcing member such as a glass cloth, the reinforcing member
such as the glass cloth does not protrude from the surface and it
is easy to make the surface flat.
[0149] Next, in a step illustrated in FIG. 17A, the insulating
layer 410 is formed on the flat surface formed by the other surface
of the wiring layer 10 and the other surface of the insulating
layer 20. Then, the via holes 410x that penetrate the insulating
layer 410 to expose the other surface of the wiring layer 10 are
formed in the insulating layer 410. As the material of the
insulating layer 410, for example, photosensitive insulating resin
(thermosetting) whose main constituent is epoxy-based resin,
phenol-based resin or the like may be used.
[0150] Specifically, for example, liquid or paste insulating resin
is coated on the flat surface formed by the other surface of the
wiring layer 10 and the other surface of the insulating layer 20 by
spin coating or the like, and heated to be cured to form the
insulating layer 410. Then, by exposing and developing the
insulating layer 410, the via holes 410x are formed
(photolithography). As such, as the via holes 410x can be formed by
photolithography, it is preferable to use photosensitive insulating
resin as the material of the insulating layer 410 to form fine
wirings. The structure is illustrated in a reversed state in FIG.
17A to FIG. 17C compared with FIG. 16A to FIG. 16C.
[0151] Next, in a step illustrated in FIG. 17B, the wiring layer
420 is formed on the other surface of the insulating layer 410 by a
semi-additive method or the like, for example. Next, in a step
illustrated in FIG. 17C, by repeating the steps illustrated in FIG.
17A and FIG. 17B, the insulating layer 430, the wiring layer 440,
the insulating layer 450 and the wiring layer 460 are stacked on
the other surface of the insulating layer 410 in this order.
[0152] After the step of FIG. 17C, by cutting the structure body
illustrated in FIG. 17C at cut positions C by a slicer or the like
to be individualized, a plurality of the wiring boards 1F
illustrated in FIG. 15 are completed. As necessary, the above
described metal layer may be formed or the antioxidation process
may be performed on the surface (only the upper surface, or the
upper surface and the side surface) of each of the pads of the
wiring layer 460. Further, a solder resist layer that exposes the
pads of the wiring layer 460 may be formed on the other surface of
the insulating layer 450.
[0153] As such, according to the wiring board 1F of the third
embodiment, the other surface of the wiring layer 10 and the other
surface of the insulating layer (the other surface first insulating
film 21) are polished to be a flat surface. Thus, the other surface
of each of the insulating layers 410, 430 and 450 becomes a flat
surface. As a result, the fine wiring layers 420, 440 and 460 can
be easily formed on the flat surfaces of the insulating layers 410,
430 and 450, respectively.
Applied Example 3 of Wiring Board
[0154] In an applied example 3 of the wiring board, an example of a
semiconductor package in which a semiconductor chip is mounted
(flip-chip mounted) on the wiring board of the third embodiment is
described. In the applied example 3 of the wiring board, components
same as those already described in the above embodiments may not be
repeated.
[0155] FIG. 18 is a cross-sectional view illustrating an example of
a semiconductor package 5C of the applied example 3. With reference
to FIG. 18, the semiconductor package 5C includes the wiring board
1F illustrated in FIG. 15, the semiconductor chip 100, the solder
bumps 140, the underfill resin 120 and the bumps 130. In the
semiconductor package 5C, an insulating layer 450 side of the
wiring board 1F is a chip mounting surface on which the
semiconductor chip 100 is mounted, and a solder resist layer 50
side of the wiring board 1F is an external connection terminal
surface on which the terminals for external connection are
formed.
[0156] Each of the solder bumps 140 electrically connects the
respective electrode pad (not illustrated in the drawings) of the
semiconductor chip 100 and a respective pad composing the wiring
layer 460 of the wiring board 1F. The semiconductor chip 100 may
include copper pillars. As the material of the solder bump 140, for
example, an alloy containing Pb, an alloy of Sn and Cu, an alloy of
Sn and Ag, an alloy of Sn, Ag and Cu or the like may be used.
[0157] The underfill resin 120 is filled between the semiconductor
chip 100 and the wiring board 1F (the insulating layer 450). The
bumps 130 are terminals for external connection that are formed at
a surface of the wiring layer 40 exposed at the bottom portion of
each of the open portions 50x of the solder resist layer 50.
[0158] As such, by mounting the semiconductor chip 100 on the
wiring board 1F of the third embodiment, the semiconductor package
5C can be actualized.
Fourth Embodiment
[0159] In a fourth embodiment, an example of a wiring board
including a single wiring layer and a single insulating layer is
described. In the fourth embodiment, components same as those
already described in the above embodiments may not be repeated.
(Structure of Wiring Board of Fourth Embodiment)
[0160] First, a structure of the wiring board of the fourth
embodiment is described. FIG. 19A and FIG. 19B are cross-sectional
views illustrating an example of a wiring board 1G of the fourth
embodiment. FIG. 19A is a general view, and FIG. 19B is an enlarged
view of a portion "A" of FIG. 19A. With reference to FIG. 19A and
FIG. 19B, the wiring board 1G of the fourth embodiment is different
from the wiring board 1 (see FIG. 1A and FIG. 1B) in that the
wiring board 1G does not include the wiring layer 40, and the
solder resist layers 50 and 60.
[0161] The wiring board 1G is composed of a single layer of the
wiring layer 10 and a single layer of the insulating layer 20.
Similar to the wiring board 1, the wiring layer 10 includes a
plurality of the pads 10a that are connection terminals with a
semiconductor chip, and the wiring patterns 10b connected to the
pads 10a, respectively (see FIG. 1B).
[0162] Similar to the wiring board 1, the open portions 20x that
expose the upper surface of the wiring layer 10 are formed in the
insulating layer 20. Each of the open portions 20x is formed to
have, for example, an inverse cone trapezoid shape where the
diameter of an open portion at the one surface of the second
insulating film 22 is larger than the diameter of a portion at the
wiring layer 10 side. However, different from the wiring board 1, a
circular concave portion 20y is formed at a portion of each of the
open portions 20x formed in the first insulating film 21. The
circular concave portion 20y is formed to expand an inner wall of
each of the open portions 20x in the first insulating film 21. The
width W.sub.1 of the concave portion 20y may be, for example, about
1 to 5 .mu.m.
[0163] The wiring layer 10 exposed in each of the open portions 20x
functions as a pad for external connection. The pads for external
connections are electrically connected to, for example, another
wiring board, a semiconductor package, a semiconductor chip or the
like. As necessary, terminals for external connection such as
solder bumps may be provided at the upper surface of the wiring
layer 10 exposed in each of the open portions 20x.
[0164] When the solder bumps are provided at the upper surface of
the wiring layer 10 exposed in each of the open portions 20x, as
the solder bumps are also provided in the concave portions 20y,
respectively, the solder bumps are prevented from being removed
(see FIG. 28B, which will be described later). Further, by forming
the concave portions 20y, area of the upper surface of the wiring
layer 10 exposed in each of the open portions 20x is increased and
contact area between the upper surface of the wiring layer 10 and
the respective solder bump is also increased. Thus, connection
reliability between the wiring layer 10 and the solder bump can be
improved.
[0165] Here, similar to the wiring board 1, in accordance with
necessity, a metal layer may be formed or an OSP process may be
performed on the upper surface of the wiring layer 10 exposed in
each of the open portions 20x, or on the lower surface of the pads
10a of the wiring layer 10.
(Method of Manufacturing Wiring Board of Fourth Embodiment)
[0166] Next, a method of manufacturing the wiring board 1G of the
fourth embodiment is described. FIG. 20A to FIG. 22C are views
illustrating an example of manufacturing steps of the wiring board
1G of the fourth embodiment. In this embodiment, an example of
manufacturing steps is described in which parts corresponding to
the plurality of the wiring boards are manufactured on a support
body, and after removing the support body, the plurality of wiring
boards are manufactured by individualizing the parts.
[0167] Alternatively, as another example of manufacturing steps, a
single wiring board may be manufactured on a support body and the
support body may be removed to obtain the wiring board.
[0168] First, in a step illustrated in FIG. 20A, a support body 900
whose upper surface is a flat surface is prepared. As the support
body 900, for example, a support body in which a metal foil 920
with a carrier is stacked on a prepreg 910 may be used. The
thickness of the support body 900 may be, for example, about 18 to
100 .mu.m.
[0169] The prepreg 910 may be, for example, obtained by
impregnating woven cloth or nonwoven cloth (not illustrated in the
drawings) such as a glass fiber or an aramid fiber with insulating
resin such as epoxy-based resin or imide-based resin. The metal
foil 920 with the carrier has a structure in which a thin foil 921
made of copper with a thickness of about 1.5 to 5 .mu.m is
detachably stuck on a thick foil (carrier foil) 922 made of copper
with a thickness of about 10 to 50 .mu.m through a peeling layer
(not illustrated in the drawings). The thick foil 922 is provided
as a support material for facilitating handling of the thin foil
921. A lower surface of the thick foil 922 is adhered at an upper
surface of the prepreg 910.
[0170] Next, in a step illustrated in FIG. 20B, a barrier layer 930
is formed on an upper surface of the thin foil 921 of the support
body 900 by electrolytic plating or the like using the metal foil
920 with the carrier as a power supply layer, for example. The
barrier layer 930 functions as an etching stop layer when removing
the thin foil 921 by etching in the following step. As the material
of the barrier layer 930, a metal that is not removed by etching
solution for the thin foil 921 made of copper, for example, nickel
(Ni) or the like may be used. The thickness of the barrier layer
930 may be, for example, about a few .mu.m.
[0171] Next, in steps illustrated in FIG. 20C and FIG. 20D, the
wiring layer 10 is selectively formed on an upper surface of the
barrier layer 930. First, in the step illustrated in FIG. 20C, a
resist layer 940 provided with open portions 940x at portions where
the wiring layer 10 is to be formed is formed on the upper surface
of the barrier layer 930. Specifically, for example, a dry film
resist composed of photosensitive resin is laminated on the upper
surface of the barrier layer 930 as the resist layer 940. Then, the
dry film resist is patterned by exposing and developing to form the
open portions 940x that expose the upper surface of the barrier
layer 930 at the portions where the wiring layer 10 is to be
formed.
[0172] Next, the wiring layer 10 is formed on the upper surface of
the barrier layer 930 exposed in each of the open portions 940x of
the resist layer 940 by electrolytic plating using the metal foil
920 with the carrier and the barrier layer 930 as power supply
layers. One surface of the wiring layer 10 contacts the upper
surface of the barrier layer 930 and the other surface of the
wiring layer 10 is exposed in each of the open portions 940x. The
material and the thickness of the wiring layer 10 are as described
above.
[0173] Next, in a step illustrated in FIG. 20D, the resist layer
940 illustrated in FIG. 20C is removed. The resist layer 940 may be
removed by, for example, peeling solution containing sodium hydrate
or the like. With this, the wiring layer 10 is selectively formed
on the upper surface of the barrier layer 930.
[0174] Next, in a step illustrated in FIG. 21A, similar to the step
illustrated in FIG. 2B, the first insulating film 21 at a B-stage
state (semi-cured state) is formed on the upper surface of the
barrier layer 930 so as to cover the wiring layer 10. The first
insulating film 21 is composed of only insulating resin. In this
step, the first insulating film 21 is not cured.
[0175] Next, in a step illustrated in FIG. 21B, similar to the step
illustrated in FIG. 2C, the second insulating film 22 at a B-stage
state (semi-cured state) is stacked on the upper surface of the
first insulating film 21. The second insulating film 22 is a
so-called prepreg obtained by impregnating the reinforcing member
30 with the insulating resin. The material of the reinforcing
member 30 is as described above. After stacking the second
insulating film 22 on the upper surface of the first insulating
film 21, the first insulating film 21 and the second insulating
film 22 are heated at predetermined temperature to be cured to
manufacture the insulating layer 20. As necessary, the first
insulating film 21 and the second insulating film 22 may be heated
while being pressurized.
[0176] Next, in a step illustrated in FIG. 21C, similar to the step
illustrated in FIG. 2D, the open portions 20x that penetrate the
insulating layer 20 (the second insulating film 22 and the first
insulating film 21) to expose the upper surface of the wiring layer
10 are formed in the insulating layer 20 by laser processing. Each
of the open portions 20x is formed to have an inverse cone
trapezoid shape where the diameter of an open portion is larger
than the diameter at the wiring layer 10, for example.
[0177] Next, in a step illustrated in FIG. 21D, a desmear process
is performed to remove resin residue of the insulating layer 20
that is adhered on the upper surface of the wiring layer 10 exposed
at the bottom portion of each of the open portions 20x. The first
insulating film 21 that does not include a reinforcing member is
easily etched compared with the second insulating film 22 including
the reinforcing member 30. Thus, by adjusting a condition of the
desmear process, the circular concave portion 20y that expands an
inner wall of each of the open portions 20x in the first insulating
film 21 can be formed at a portion of the respective open portion
20x formed in the first insulating film 21. This means that it is
possible to form a step at the inner wall surface of each of the
open portions 20x. FIG. 21D is an enlarged cross-sectional view
illustrating one of the open portions 20x.
[0178] The desmear process may be performed in accordance with
necessity. For forming the concave portions 20y without performing
the desmear process, the concave portions 20y can be formed only by
laser processing by adjusting the irradiating condition of laser in
the step illustrated in FIG. 21C. Further, it is possible to form a
part of the concave portions 20y by laser processing, and
thereafter the concave portions 20y may be expanded by performing
the desmear process. Further, by selecting resin that can be easily
etched compared with resin of the second insulating film 22 for the
first insulating film 21, the concave portions 20y can be easily
formed.
[0179] It is of course possible not to form the concave portion 20y
at the inner wall of each of the open portions 20x, as described
above in the first to third embodiments, by adjusting the
irradiating condition of laser and the condition of the desmear
process.
[0180] Next, in a step illustrated in FIG. 22A, a part of the
support body 900 is removed from the structure body illustrated in
FIG. 21D. Specifically, an interface between the thin foil 921 and
the thick foil 922 of the metal foil 920 with the carrier is peeled
by applying mechanical force to the support body 900. As described
above, the metal foil 920 with the carrier has the structure in
which the thick foil 922 is stuck on the thin foil 921 through the
peeling layer (not illustrated in the drawings). Thus, the thick
foil 922 is easily peeled from the thin foil 921 with the peeling
layer (not illustrated in the drawings).
[0181] With this, only the thin foil 921 remains at the barrier
layer 930, and other members (the prepreg 910 and the thick foil
922) composing the support body 900 are removed. Here, in addition
to a case that the thick foil 922 is removed from the thin foil 921
with the peeling layer, the thick foil 922 may be removed from the
thin foil 921 by cohesion failure occurred in the peeling layer.
Further, the thick foil 922 may be removed from the thin foil 921
because the thick foil 922 is peeled from the peeling layer.
[0182] Next, in a step illustrated in FIG. 22B, the thin foil 921
(see FIG. 22A) made of copper is removed by etching. The thin foil
921 made of copper may be, for example, removed by wet etching
using hydrogen peroxide/sulfuric acid-based aqueous solution,
sodium persulfate aqueous solution, ammonium persulfate aqueous
solution or the like. When the barrier layer 930 is made of nickel
(Ni), the barrier layer 930 is not removed by the etching solution
for copper and functions as the etching stop layer. Thus, the
wiring layer 10 is not etched.
[0183] Next, in a step illustrated in FIG. 22C, the barrier layer
930 (see FIG. 22B) is removed. When the barrier layer 930 is made
of nickel (Ni), by selecting etching solution that removes nickel
(Ni) without removing copper, only the barrier layer 930 may be
etched without etching the wiring layer 10. With this, the one
surface of the wiring layer 10 is exposed at the one surface of the
insulating layer 20. The one surface of the wiring layer 10 may be,
for example, flush with the one surface of the insulating layer
20.
[0184] As necessary, a metal layer may be formed on the upper
surface of the wiring layer 10 exposed in each of the open portions
20x, and the lower surface of each of the pads 10a of the wiring
layer 10 by electroless plating or the like, for example. The
example of the metal layer is as described above. Further, instead
of forming the metal layer, the antioxidation process such as the
OSP process may be performed.
[0185] After the step illustrated in FIG. 22C, by cutting the
structure body illustrated in FIG. 22C at cut positions C by a
slicer or the like to be individualized, a plurality of the wiring
boards 1G (see FIG. 19A) are completed. As necessary, terminals for
external connection such as solder bumps may be provided on the
lower surface of the wiring layer 10 or the upper surface of the
wiring layer 10 exposed in each of the open portions 20x.
[0186] Further, in accordance with necessity, similar to the wiring
board 1 illustrated in FIG. 1A and FIG. 1B, the solder resist layer
60 provided with the open portion 60x may be formed on a chip
mounting surface of the wiring board 1G. The solder resist layer 60
may be formed before cutting the structure body illustrated in FIG.
22C at cut positions C by a slicer or the like, or after cutting
the structure body.
[0187] As such, as the wiring board 1G is configured by a single
layer of the wiring layer and a single layer of the insulating
layer, the wiring board 1G can be made thin. If the wiring board is
made thin, warping may be generated in the wiring board. However,
according to the wiring board 1G, the insulating layer 20 is
configured to have a structure in which the second insulating film
22 including the reinforcing member 30 is stacked on the first
insulating film 21. Thus, generation of warping can be suppressed.
Specifically, as described above, for each of the first insulating
film 21 and the second insulating film 22, by setting CTE
(coefficient of thermal expansion) to be lower than or equal to 15
ppm/.degree. C. by adjusting the type or the thickness of the
insulating resin, or the type, the content or the like of the
filler, warping of the wiring board 1G can be suppressed.
[0188] Further, in the wiring board 1G, when solder bumps are
formed on the upper surface of the wiring layer 10 exposed in each
of the open portions 20x, the solder bumps are also provided in the
concave portions 20y, respectively, and the solder bumps are
prevented from being removed. Further, by forming the concave
portions 20y, area of the upper surface of the wiring layer 10
exposed in each of the open portions 20x is increased and contact
area between the upper surface of the wiring layer 10 and the
respective solder bump is also increased. Thus, connection
reliability between the wiring layer 10 and the solder bump can be
improved.
Alternative Example 1 of Fourth Embodiment
[0189] In an alternative example 1 of the fourth embodiment,
another example of a method of manufacturing the wiring board 1G is
described. In the alternative example 1 of the fourth embodiment,
components same as those already described in the above embodiments
may not be repeated.
[0190] FIG. 23A to FIG. 23C are views illustrating an example of
manufacturing steps of the wiring board 1G of the alternative
example 1 of the fourth embodiment. In the alternative example 1 of
the fourth embodiment, a support body 900A in which a metal foil
920A with a carrier is stacked on the prepreg 910 is used. The
metal foil 920A with the carrier has a structure in which a thin
foil 921A made of nickel with a thickness of about 1.5 to 5 .mu.m
is detachably stuck on a thick foil (carrier foil) 922 made of
copper with a thickness of about 10 to 50 .mu.m through a peeling
layer (not illustrated in the drawings). As the thin foil 921A
functions as an etching stop layer, the barrier layer 930 is not
formed on the support body 900A.
[0191] First, in a step illustrated in FIG. 23A, similar to the
step illustrated in FIG. 20A, the support body 900A is
manufactured. Then, steps similar to the steps of FIG. 20C to FIG.
21D are performed, and the wiring layer 10 and the insulating layer
20 are directly stacked on the support body 900A. Then, the open
portions 20x and the concave portions 20y are formed in the
insulating layer 20.
[0192] Next, in a step illustrated in FIG. 23B, similar to the step
illustrated in FIG. 22A, the prepreg 910 and the thick foil 922 of
the support body 900A are removed from the structure body
illustrated in FIG. 23A. With this, only the thin foil 921A remains
at the insulating layer 20, and other members (the prepreg 910 and
the thick foil 922) composing the support body 900A are
removed.
[0193] Next, in a step illustrated in FIG. 23C, the thin foil 921A
(see FIG. 23B) made of nickel is removed by etching. By selecting
etching solution that removes nickel (Ni) without removing copper,
only the thin foil 921A may be etched without etching the wiring
layer 10. With this, the one surface of the wiring layer 10 is
exposed at the one surface of the insulating layer 20. The one
surface of the wiring layer 10 may be, for example, flush with the
one surface of the insulating layer 20.
[0194] After the step illustrated in FIG. 23C, by cutting the
structure body illustrated in FIG. 23C at cut positions C by a
slicer or the like to be individualized, a plurality of the wiring
boards 1G (see FIG. 19A) are completed.
[0195] As necessary, a metal layer may be formed on the upper
surface of the wiring layer 10 exposed in each of the open portions
20x and the lower surface of the pads 10a of the wiring layer 10 by
electroless plating or the like, for example. An example of the
metal layer is as described above. Further, instead of forming the
metal layer, an antioxidation process such as an OSP process may be
performed. Further, in accordance with necessity, terminals for
external connection such as solder bumps may be provided on the
upper surface of the wiring layer 10 exposed in each of the open
portions 20x or the lower surface of the pads 10a of the wiring
layer 10. Further, in accordance with necessity, similar to the
wiring board 1 illustrated in FIG. 1A and FIG. 1B, the solder
resist layer 60 provided with the open portion 60x may be formed on
a chip mounting surface (the lower surface of the pads 10a of the
wiring layer 10) of the wiring board 1G.
Alternative Example 2 of Fourth Embodiment
[0196] In an alternative example 2 of the fourth embodiment, an
example is described in which a positional relationship between the
one surface of the wiring layer 10 and the one surface of the
insulating layer 20 are different from that in the fourth
embodiment. In the alternative example 2 of the fourth embodiment,
components same as those already described in the above embodiments
may not be repeated.
[0197] FIG. 24A and FIG. 24B are cross-sectional views illustrating
an example of a wiring board 1H of the alternative example 2 of the
fourth embodiment, corresponding to FIG. 19A and FIG. 19B,
respectively.
[0198] With reference to FIG. 24A and FIG. 24B, the wiring board 1H
is different from the wiring board 1G (see FIG. 19A) in that
concave portions 20z that are concaved in a thickness direction are
formed at the one surface of the insulating layer 20, and the one
surface of the wiring layer 10 is exposed at a position that is
concaved with respect to the one surface of the insulating layer 20
in each of the concave portions 20z. The wiring board 1H may be,
for example, manufactured by the following steps.
[0199] FIG. 25A to FIG. 25C are views illustrating an example of
manufacturing steps of the wiring board 1H of the alternative
example 2 of the fourth embodiment. In the alternative example 2 of
the fourth embodiment, the barrier layer 930 is not formed on the
support body 900.
[0200] First, in a step illustrated in FIG. 25A, after the step
illustrated in FIG. 20A, by performing steps similar to those of
FIG. 20C to FIG. 21D, the wiring layer 10 and the insulating layer
20 are directly stacked on the support body 900. Then, the open
portions 20x and the concave portions 20y are formed in the
insulating layer 20. Here, the step illustrated in FIG. 20B is not
performed (the barrier layer 930 is not formed).
[0201] Next, in a step illustrated in FIG. 25B, similar to the step
illustrated in FIG. 22A, the prepreg 910 and the thick foil 922 of
the support body 900 are removed from the structure body
illustrated in FIG. 25A. With this, only the thin foil 921 remains
at the insulating layer 20, and other members (the prepreg 910 and
the thick foil 922) composing the support body 900 are removed.
[0202] Next, in a step illustrated in FIG. 25C, the thin foil 921
(see FIG. 25B) made of copper is removed by etching. In this
embodiment, as the barrier layer 930 that functions as an etching
stop layer does not exist, the one surface of the wiring layer 10
made of copper is also etched, and the concave portions 20z are
formed at the one surface of the insulating layer 20. Then, the one
surface of the wiring layer 10 is exposed at a position concaved
from the one surface of the insulating layer 20 in each of the
concave portions 20z.
[0203] After the step illustrated in FIG. 25C, by cutting the
structure body illustrated in FIG. 25C at cut positions C by a
slicer or the like to be individualized, a plurality of the wiring
boards 1H (FIG. 24A) are completed.
[0204] As necessary, a metal layer may be formed on the upper
surface of the wiring layer 10 exposed in each of the open portions
20x and the lower surface of the pad 10a of the wiring layer 10
exposed in each of the concave portions 20z by electroless plating
or the like, for example. An example of the metal layer is as
described above. Further, instead of forming the metal layer, an
antioxidation process such as an OSP process may be performed.
Further, in accordance with necessity, terminals for external
connection such as solder bumps may be formed on the upper surface
of the wiring layer 10 exposed in each of the open portions 20x or
the lower surface of the pad 10a of the wiring layer 10 exposed in
each of the concave portions 20z. Further, in accordance with
necessity, similar to the wiring board 1 illustrated in FIG. 1A and
FIG. 1B, the solder resist layer 60 provided with the open portion
60x may be formed on a chip mounting surface of the wiring board 1H
(the lower surface of the pads 10a of the wiring layer 10).
Alternative Example 3 of Fourth Embodiment
[0205] In an alternative example 3 of the fourth embodiment, an
example in which a support body (carrier) is provided at the other
surface of the insulating layer is described. In the alternative
example 3 of the fourth embodiment, components same as those
already described in the above embodiments may not be repeated.
[0206] FIG. 26A and FIG. 26B are cross-sectional views illustrating
an example of a wiring board 1I of the alternative example 3 of the
fourth embodiment, corresponding to FIG. 19A and FIG. 19B,
respectively.
[0207] With reference to FIG. 26A and FIG. 26B, the wiring board 1I
is different from the wiring board 1G (see FIG. 19A and FIG. 19B)
in that a support body 95 is provided at the other surface of the
insulating layer 20 through an adhesive layer 91. The wiring board
1I may be manufactured by, for example, the following steps.
[0208] FIG. 27A to FIG. 27D are views illustrating an example of
manufacturing steps of the wiring board 1I of the alternative
example 3 of the fourth embodiment.
[0209] First, in a step illustrated in FIG. 27A, by performing
steps similar to those of FIG. 20A to FIG. 21D, the structure body
of FIG. 21D is manufactured. Then, the support body 95 is provided
on the other surface of the insulating layer 20 of the structure
body of FIG. 21D through the adhesive layer 91. As the adhesive
layer 91, for example, acryl-based resin, silicone-based resin,
epoxy-based resin or the like may be used. As the support body 95,
for example, a metal foil (a copper foil, for example), a resin
film (a polyimide film, for example), a resin substrate (a glass
epoxy substrate, for example) or the like may be used.
[0210] As will be described later, there is a case that a
semiconductor chip is mounted on the wiring board 1I including the
adhesive layer 91 and the support body 95. Thus, it is necessary
for the adhesive layer 91 and the support body 95 to have heat
resistance property capable of enduring heat that is applied in a
mounting step such as reflowing.
[0211] Next, in a step illustrated in FIG. 27B, similar to the step
illustrated in FIG. 22A, the prepreg 910 and the thick foil 922 of
the support body 900 are removed from the structure body
illustrated in FIG. 27A. With this, only the thin foil 921 remains
at the barrier layer 930, and other members (the prepreg 910 and
the thick foil 922) composing the support body 900 are removed.
[0212] Next, in a step illustrated in FIG. 27C, similar to the step
illustrated in FIG. 22B, the thin foil 921 (see FIG. 27B) made of
copper is removed by etching. Next, in a step illustrated in FIG.
27D, similar to the step illustrated in FIG. 22C, the barrier layer
930 (see FIG. 27C) is removed. With this, the one surface of the
wiring layer 10 is exposed at the one surface of the insulating
layer 20. The one surface of the wiring layer 10 may be, for
example, flush with the one surface of the insulating layer 20.
[0213] After the step illustrated in FIG. 27D, by cutting the
structure body illustrated in FIG. 27D at cut positions C by a
slicer or the like to be individualized, a plurality of the wiring
boards 1I (see FIG. 26A) are completed.
[0214] As necessary, a metal layer may be formed on the upper
surface of the wiring layer 10 exposed in each of the open portions
20x of the structure body of FIG. 21D by electroless plating or the
like, for example, before providing the support body 95 in the
structure body of FIG. 21D and forming the structure body of FIG.
27A. An example of the metal layer is as described above. Further,
instead of forming the metal layer, an antioxidation process such
as an OSP process may be performed.
[0215] Further, in accordance with necessity, after the step
illustrated in FIG. 27D, a metal layer may be formed on the lower
surface of the pads 10a of the wiring layer 10 by electroless
plating or the like, for example. An example of the metal layer is
as described above. Further, instead of forming the metal layer, an
antioxidation process such as an OSP process may be performed.
[0216] Further, in accordance with necessity, after the step
illustrated in FIG. 27D, similar to the wiring board 1 illustrated
in FIG. 1A and FIG. 1B, the solder resist layer 60 provided with
the open portion 60x may be formed on a chip mounting surface (the
lower surface of the pads 10a of the wiring layer 10) of the wiring
board 1I.
[0217] Further, the structure body illustrated in FIG. 27C, in
other words, a wiring board including the barrier layer 930 and the
support body 95 may be delivered as a product. Further, the
structure body illustrated in FIG. 27C or the structure body
illustrated in FIG. 27D may be delivered as a product before being
individualized, or after being individualized.
[0218] As the support body 95 is provided at the other surface of
the insulating layer 20 in the wiring board 1I, rigidity of the
entirety of the wiring board 1I can be increased. Thus, for
example, as illustrated in FIG. 29A, which will be described later,
it is easy to mount a semiconductor chip after the wiring board 1I
is delivered.
[0219] Here, the support body 95 may be provided at the wiring
board 1H illustrated in FIG. 24A. Further, steps similar to the
steps of FIG. 27A to FIG. 27D may be performed on the structure
body to manufacture the wiring board 1H.
Applied Example 4 of Wiring Board
[0220] In an applied example 4 of the wiring board, an example of a
semiconductor package is described in which a semiconductor chip is
mounted (flip-chip mounted) on the wiring board 1G of the fourth
embodiment. In the applied example 4 of the wiring board,
components same as those already described in the above embodiments
may not be repeated.
[0221] FIG. 28A and FIG. 28B are cross-sectional views illustrating
an example of a semiconductor package 5D of the applied example 4.
FIG. 28A is a general view, FIG. 28B is an enlarged view of a
portion "B" of FIG. 28A. With reference to FIG. 28A, the
semiconductor package 5D includes the wiring board 1G illustrated
in FIG. 19A, the semiconductor chip 100, the bumps 110, the
underfill resin 120, the bumps 130 and the sealing resin 150.
[0222] the sealing resin 150 is formed on the wiring board 1G so as
to cover the semiconductor chip 100 and the underfill resin 120.
However, the upper surface (back surface) of the semiconductor chip
100 may be exposed from the upper surface of the sealing resin 150.
As the sealing resin 150, for example, insulating resin (so-called
mold resin) such as thermosetting epoxy-based resin containing
filler may be used.
[0223] The underfill resin 120 may be provided in accordance with
necessity. Further, only the underfill resin 120 may be provided
without providing the sealing resin 150.
[0224] The bumps 130 are terminals for external connection formed
on the one surface of the wiring layer 10 exposed in each of the
open portions 20x. As described above, the bumps 130 are, for
example, solder bumps. In the wiring board 1G, the circular concave
portion 20y is formed at a portion of each of the open portions 20x
formed in the first insulating film 21 to expand an inner wall of
each of the open portions 20x in the first insulating film 21.
Thus, a part of the bump 130 is introduced in the concave portion
20y. Therefore, the solder bumps 130 are prevented from being
removed. Further, by forming the concave portions 20y, area of the
one surface of the wiring layer 10 exposed in each of the open
portions 20x is increased and contact area between the one surface
of the wiring layer 10 and the respective bump 130 is also
increased. Thus, connection reliability between the wiring layer 10
and the bump 130 can be improved.
[0225] For manufacturing the semiconductor package 5D, for example,
the semiconductor chip 100 is mounted on the chip mounting surface
of the wiring board 1G in a face-down manner through the bumps 110
in a paste form.
[0226] Then, the bumps 110 are melted and solidified by reflowing
or the like to electrically connect the electrode pads (not
illustrated in the drawings) of the semiconductor chip 100 and the
pads 10a of the wiring board 1G.
[0227] Thereafter, after filling the underfill resin 120 between
the semiconductor chip 100 and the wiring board 1G (insulating
layer 20) in accordance with necessity, the sealing resin 150 is
formed on the wiring board 1G so as to cover the semiconductor chip
100 and the underfill resin 120. The sealing resin 150 may be
formed by, for example, transfer molding process or the like using
a sealing die.
[0228] In the semiconductor package 5D, instead of using the wiring
board 1G, the wiring board 1H or 1I may be used. For example, the
wiring boards 1I after the step of FIG. 27D which are not
individualized may be used. In this case, as illustrated in FIG.
29A, the semiconductor chip 100 is mounted on a chip mounting
surface of each area corresponding to each of the wiring boards 1I
in a face-down manner via the bumps 110 in a paste form.
[0229] Then, the bumps 110 are melted and solidified by reflowing
or the like to electrically connect the electrode pads (not
illustrated in the drawings) of the semiconductor chip 100 and the
pads 10a at the respective area. Thereafter, in accordance with
necessity, the underfill resin 120 is filled between the
semiconductor chip 100 and the insulating layer 20. Further, the
sealing resin 150 is formed on each of the areas corresponding to
the respective wiring board 1I so as to cover the respective
semiconductor chip 100 and the underfill resin 120 by a transfer
molding process or the like. The wiring board 1I is illustrated in
a reversed state in FIG. 29A to FIG. 29C compared with FIG. 27A to
FIG. 27D.
[0230] Next, as illustrated in FIG. 29B, the adhesive layer 91 and
the support body 95 are removed from the insulating layer 20 by
applying mechanical force to the support body 95 illustrated in
FIG. 29A. Then, as illustrated in FIG. 29C, the bumps 130 such as
the solder bumps are formed on the wiring layer 10 exposed in each
of the open portions 20x.
[0231] After the step illustrated in FIG. 29C, by cutting the
structure body illustrated in FIG. 29C at cut positions C by a
slicer or the like to be individualized, a plurality of the
semiconductor packages 5D (see FIG. 28A) are completed.
[0232] As such, by mounting the semiconductor chip 100 on the
wiring board 1G to 1I, the semiconductor package 5D can be
actualized. According to the method of manufacturing as illustrated
FIG. 29A, the support body 95 is removed after the sealing resin
150 is formed. Thus, even when the rigidity of the wiring board is
low, deformation of the wiring board can be prevented.
[0233] According to the embodiment, a wiring board whose strength
is retained and insulation reliability is improved is provided.
[0234] Although a preferred embodiment of the wiring board and the
method of manufacturing the wiring board has been specifically
illustrated and described, it is to be understood that minor
modifications may be made therein without departing from the spirit
and scope of the invention as defined by the claims.
[0235] The present invention is not limited to the specifically
disclosed embodiments, and numerous variations and modifications
may be made without departing from the spirit and scope of the
present invention.
[0236] For example, it is described in the above embodiments, a
case in which the lower surface of the first insulating film 21 and
the lower surface of the wiring layer 10 (exposed surface) are
flush with each other, and a case in which the lower surface of the
wiring layer 10 is concaved from the lower surface of the first
insulating film 21. However, the lower surface of the wiring layer
10 may be positioned to protrude from the lower surface of the
first insulating film 21.
[0237] Further, in the first to third embodiments, a metal foil or
a metal plate made of nickel, chromium, iron or the like, other
than copper, that can be removed by etching solution different from
that for the wiring layer 10 made of copper may be used as the
support body 300. In such a case, the lower surface of the wiring
layer 10 becomes flush with the lower surface of the first
insulating film 21.
[0238] Further, in the first to third embodiments, an etching
barrier layer made of a metal different from that of the wiring
layer 10 may be formed on the upper surface of the support body 300
made of a metal same as that of the wiring layer 10. For example,
when both of the wiring layer 10 and the support body 300 are
copper, an etching barrier layer made of nickel, chromium, iron or
the like may be formed on the entirety of the upper surface of the
support body 300 by electrolytic plating or the like. Thereafter,
the wiring layer 10, the insulating layer 20 and the like may be
stacked on the etching barrier layer in this order. Then, the
support body 300 may be removed by etching, and then, the etching
barrier layer may be removed by etching using etching solution that
does not etch the wiring layer 10. With this, the wiring board is
completed. In this case as well, the lower surface of the wiring
layer 10 becomes flush with the lower surface of the first
insulating film 21.
[0239] Various aspects of the subject-matter described herein are
set out non-exhaustively in the following numbered clauses:
[0240] 1. A method of manufacturing a wiring board, including:
[0241] forming a first wiring layer on one surface of a support
body;
[0242] stacking a first insulating film at a semi-cured state
composed of only resin on the one surface of the support body so as
to cover the first wiring layer;
[0243] stacking a second insulating film at a semi-cured state
including a reinforcing member impregnated with resin on one
surface of the first insulating film; and
[0244] curing the first insulating film and the second insulating
film to form an insulating layer in which the second insulating
film is stacked on the first insulating film.
[0245] 2. A method of manufacturing a wiring board, including:
[0246] forming a first wiring layer on one surface of a support
body;
[0247] preparing an insulating layer including [0248] a first
insulating film at a semi-cured state composed of only resin, and
[0249] a second insulating film at a semi-cured state including a
reinforcing member impregnated with resin and stacked on one
surface of the first insulating film; and
[0250] adhering the insulating layer on the one surface of the
support body so as to cover the first wiring layer while facing the
first insulating film to the support body, and curing the
insulating layer.
[0251] 3. The method of manufacturing the wiring board according to
clause 1 or 2, further including:
[0252] forming an open portion that penetrates the insulating layer
to expose one surface of the first wiring layer.
[0253] 4. The method of manufacturing the wiring board according to
clause 3, further including:
[0254] forming a concave portion at a portion of the open portion
in the first insulating film to expand an inner wall of the open
portion in the first insulating film.
[0255] 5. The method of manufacturing the wiring board according to
clause 3 or 4, further including:
[0256] forming a second wiring layer including a wiring pattern
formed on the second insulating film, and
[0257] a via wiring formed in the open portion and connecting the
wiring pattern and the first wiring layer.
[0258] 6. The method of manufacturing the wiring board according to
any one of clause 1 to 5, further including:
[0259] removing the support body.
[0260] 7. The method of manufacturing the wiring board according to
clause 6, further including:
[0261] stacking another insulating layer and another wiring layer
on another surface of the first insulating.
* * * * *