U.S. patent application number 15/728744 was filed with the patent office on 2018-02-01 for lateral shift measurement using an optical technique.
The applicant listed for this patent is Nova Measuring Instruments Ltd.. Invention is credited to Boaz BRILL, Moshe FINAROV, David SCHEINER.
Application Number | 20180031983 15/728744 |
Document ID | / |
Family ID | 11074652 |
Filed Date | 2018-02-01 |
United States Patent
Application |
20180031983 |
Kind Code |
A1 |
BRILL; Boaz ; et
al. |
February 1, 2018 |
LATERAL SHIFT MEASUREMENT USING AN OPTICAL TECHNIQUE
Abstract
Alignment of layers during manufacture of a multi-layer sample
is controlled by applying optical measurements to a measurement
site in the sample. The measurement site includes two diffractive
structures located one above the other in two different layers,
respectively. The optical measurements include at least two
measurements with different polarization states of incident light,
each measurement including illuminating the measurement site so as
to illuminate one of the diffractive structures through the other.
The diffraction properties of the measurement site are indicative
of a lateral shift between the diffractive structures. The
diffraction properties detected are analyzed for the different
polarization states of the incident light to determine an existing
lateral shift between the layers.
Inventors: |
BRILL; Boaz; (Rehovot,
IL) ; FINAROV; Moshe; (Rehovot, IL) ;
SCHEINER; David; (Ganei Yehuda, IL) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Nova Measuring Instruments Ltd. |
Rehovot |
|
IL |
|
|
Family ID: |
11074652 |
Appl. No.: |
15/728744 |
Filed: |
October 10, 2017 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
15093242 |
Apr 7, 2016 |
9785059 |
|
|
15728744 |
|
|
|
|
14594627 |
Jan 12, 2015 |
9310192 |
|
|
15093242 |
|
|
|
|
13747937 |
Jan 23, 2013 |
8941832 |
|
|
14594627 |
|
|
|
|
12775883 |
May 7, 2010 |
8363219 |
|
|
13747937 |
|
|
|
|
11945058 |
Nov 26, 2007 |
7715007 |
|
|
12775883 |
|
|
|
|
11580997 |
Oct 16, 2006 |
7301163 |
|
|
11945058 |
|
|
|
|
11271773 |
Nov 14, 2005 |
7122817 |
|
|
11580997 |
|
|
|
|
10257544 |
Feb 6, 2003 |
6974962 |
|
|
PCT/IL2001/000884 |
Sep 20, 2001 |
|
|
|
11271773 |
|
|
|
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G03F 7/70633 20130101;
H01L 22/12 20130101; G01B 11/14 20130101; G01N 21/956 20130101;
G01B 11/27 20130101; G01N 21/9501 20130101; G01N 21/4788
20130101 |
International
Class: |
G03F 7/20 20060101
G03F007/20; G01N 21/956 20060101 G01N021/956; G01N 21/95 20060101
G01N021/95; G01N 21/47 20060101 G01N021/47; G01B 11/27 20060101
G01B011/27; H01L 21/66 20060101 H01L021/66; G01B 11/14 20060101
G01B011/14 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 19, 2000 |
IL |
138552 |
Claims
1. A structure configured for overlay measurement on a sample, said
structure comprising two pairs of diffractive structures of
predetermined geometries, wherein said two pairs of diffractive
structures are formed by two diffractive structures spaced-apart
from one another along an X-axis and two diffractive structures
spaced-apart from one another along a Y-axis, the diffractive
structures of each pair are spaced-apart from one another along the
Y-axis or the X-axis, respectively, and comprise patterns of
features aligned along the X-axis or the X-axis, respectively, with
a predetermined lateral shift between the patterns in the
structures in accordance with a predetermined model of simulated
diffraction effects from incident light interaction with laterally
shifted diffractive structures of a pair of such structures of said
predetermined geometries, thereby enabling direct overlay
measurement of a lateral shift between layers in the sample from
diffraction of incident light from said two pairs of diffractive
structures.
Description
FIELD OF THE INVENTION
[0001] This invention is generally in the field of manufacturing of
multi-layer structures, such as semiconductor wafers and integrated
circuits, and relates to an optical measuring method and system for
control of layers alignment.
BACKGROUND OF THE INVENTION
[0002] Integrated circuits are multi-layer structures produced by
applying a sequence of deposition-lithography-etching steps to a
semiconductor wafer. In such structures layers have to be precisely
aligned with each other, which is controlled by the so-called
"overlay measurement". This measurement is usually accomplished
using a box-within-a-box technique consisting of the following. A
rectangular frame-like structure is formed in a test site of each
layer, and two adjacent layers are considered as being correctly
aligned if a specific alignment between the frames on these layers
is provided. Overlay defining the alignment is measured by
comparing the shifts between the frames at opposite sides:
determining whether the frames are precisely concentric, the
smaller frame being inside the larger one (in projection).
[0003] The above technique is carried out by an ordinary optical
microscope, which is capable of measuring line width with a
resolution limited by resolution of optical imaging systems,
usually not less than several nanometers. The current
high-performance semiconductor devices, however, have features'
dimensions of 0.13 .mu.m and less, and require measurements of
overlay registration with the resolution of less than 1 nm.
[0004] A different alignment technique is disclosed in the U.S.
Pat. No. 5,216,257. According to this technique, two grating
structures of different periodicity are deposited on two adjacent
layers in a multi-layer structure, and a change in a moire fringe
pattern caused by the superposition of two gratings is detected,
being indicative of a grating alignment error.
SUMMARY OF THE INVENTION
[0005] There is a need in the art to facilitate overlay
measurements for the purpose of correct alignment of layers in a
multi-layer sample (e.g., integrated circuit), by providing a novel
optical method and system.
[0006] The main idea of the present invention is based on the fact
that the diffraction of incident radiation from a pair gratings (or
any other diffractive structures), located one on top of the other
is affected by all geometrical aspects of the gratings, namely,
both the parameters of each separate grating and their location
relative to each other (i.e., lateral shift). According to the
present invention, the lateral shift between two layers is
determined by analyzing electromagnetic radiation (light)
diffracted from gratings (patterned structure) of substantially the
same periodicity, which are specifically arranged within a site
formed by regions of two layers. To this end, scatterometry
(measuring diffraction efficiency as a function of wavelength
and/or angle of incidence) or ellipsometry (measuring both change
of polarization amplitude and phase of the diffracted light) can be
utilized. These techniques are based on the detection of the
so-called "diffraction signature" of two gratings one on top of the
other.
[0007] Thus, according to the invention, an effect of radiation
diffraction from two patterned structures (gratings) of known
periodicity located one on top of the other, caused by a lateral
shift between the two patterned structures, is detected and
analyzed to determine an alignment error. The patterned structures
are located within a site formed by two regions of two layers,
respectively. Preferably, two patterned structures (gratings) of
substantially the same periodicity are used.
[0008] According to different embodiments of the invention, the
following methods are used: a so-called "direct method", a method
based on reference sites, and a method based on simple calibration.
The direct method is based on the initial calculations of a
diffraction signature using certain well-defined models. The
reference sites method is based on the comparison between
diffraction signatures measured in different sub-regions of the
site. The simple calibration based method utilizes certain
reference data previously obtained by any suitable tool to be
indicative of various diffraction signatures corresponding to
respective lateral shifts. These different methods require
different sites prepared on the layers of a multi-layer sample.
[0009] The term "site" used herein signifies a location in a
multi-layer sample that includes two regions one on top of the
other. Such a site may be a test site located outside the features
containing area if a sample.
[0010] If layers' shift along more than one axis in the sample
plane is to be determined, the test site (generally, grating
containing site) includes two main regions, one containing a
grating structure aligned along the X-axis of the sample and the
other along the Y-axis of the sample. Each region may contain
several different sub-regions having different nominal shifts
between the gratings. The term "nominal" signifies a shift of the
masks used for layer manufacturing, assuming perfect masks
production and zero alignment error.
[0011] Another embodiment of the test structure may contain a
two-dimensional grating enabling the measurement of the X and the Y
components of the lateral shift at the same site. In order to avoid
the possibility to confuse between the X and the Y components
several methods may be used: (a) Produce a test site whose period
in the Y-axis is significantly different than the period in the
X-axis (b) measure the same site several times using different
polarizations (in case of polarized reflectometry) (c) measure the
same site from different directions. All the above methods result
in different changes to the diffraction signatures due to shifts in
different directions, thus avoiding confusion.
[0012] According to another embodiment of the test structure, the
diffractive structures of one of at least two pairs are shifted
with respect to each other along the X-axis by a distance +.DELTA.X
and the diffractive structures of the other of the at least two
pairs are shifted with respect to each other along the X-axis by a
distance (-.DELTA.X).
[0013] According to another embodiment of the test structure, the
diffractive structures of one of the at least two pairs are shifted
with respect to each other along the X-axis by a distance
(+.DELTA.X), and the diffractive structures of the other of the at
least two pairs are shifted with respect to each other along the
X-axis by a distance (-.DELTA.X.+-.N.DELTA.x), where
.DELTA.x<<.DELTA.X and N is an integer number.
[0014] According to another embodiment of the test structure, the
two diffractive structures of at least one pair have patterns of
features of different periodicities.
BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to understand the invention and to see how it may
be carried out in practice, a preferred embodiment will now be
described, by way of non-limiting example only, with reference to
the accompanying drawings, in which:
[0016] FIG. 1 is a schematic illustration of a cross-section of a
site in a semiconductor wafer;
[0017] FIGS. 2A and 2B illustrate the principles of a direct method
according to the invention;
[0018] FIG. 2C shows diffractive structures having two-dimensional
patterns of features.
[0019] FIG. 3 illustrates the principles of a reference sites based
method according to the present invention;
[0020] FIGS. 4-6 illustrate different simulation results of the
sensitivity test as functions of grating parameters; and
[0021] FIG. 7 illustrates the effect of an overlay error on a
scatterometry signal (diffraction efficiency) as measured on the
optimal structure.
DETAILED DESCRIPTION OF THE INVENTION
[0022] Referring to FIG. 1, there is schematically illustrated a
cross-section of a test site 10 in a semiconductor wafer suitable
for use in the present invention. The site 10 contains two gratings
(patterned structures) 12 and 14 of certain known periodicity
located one above the other. In the present example, the gratings
12 and 14 have substantially the same period P. In the present
example, the top grating 12 presents a pattern of spaced-apart
photoresist-containing regions R.sub.PR, and the underneath grating
14 presents a pattern of spaced-apart aluminum-containing region
R.sub.Al. In this specific example, the gratings 12 and 14 have
different duty cycles defined by features critical dimensions
CD.sub.PR and CD.sub.AL, respectively. It should, however, be noted
that this condition is not a requirement for the technique of the
present invention, but provides for a better sensitivity of the
method. As further shown in the figure, the gratings 12 and 14 are
shifted along the X-axis with respect to each other a distance S,
which is measured as a distance between the centers of the two
locally adjacent regions (lines) R.sub.PR and R.sub.Al.
[0023] In order to find the conditions under which the method of
the present invention is most effective, and show how the method is
practical, the sensitivity of the method has been studied for a
specific configuration of the site structure exemplified in FIG. 1.
The site structure 10 is typical for the overlay problem in
photoresist-on-aluminum layer structure. The pattern in the
aluminum (Al) layer is typically defined by layers underneath the
aluminum layer, and the photoresist (PR) layer is patterned by a
lithography processing. In this specific example, the PR lines are
modeled to be on top of the Al lines. It should, however, be
understood, that this is not essential for the present invention,
and PR lines may be located between the Al lines, as well. For
simplicity, both gratings 12 and 14 have a square profile. The
measurement technique used for this analysis is the normal
incidence polarized spectrophotometry. According to this technique,
the normal incidence reflectivity spectrum is measured with
selective polarization direction of the incident light relative to
the grating (TM polarization mode in this specific example). Other
optical techniques, such as spectral ellipsometry, angular
scatterometry, etc. may be used as well.
[0024] The sensitivity of the spectrum (measured by the technique
of the present invention, which will be described more specifically
further below) to a change in the lateral shift S between the
gratings 12 and 14 has been studied. The ratio between the mean
change in the spectrum (defined as the root of the mean of the
square differences between spectra with and without a change in the
shift) caused by a change in the shift value S of 1 nm has been
defined as the sensitivity test T, wherein S is the nominal
shift.
[0025] The simulation results have shown that T depends on all the
parameters of the test structure. Values of T are almost always
monotonously increasing with the values of S. This general rule
holds as much as T can be increased, i.e., until the edge of the PR
line "falling off" from the Al line. It is thus evident that the
measurement is more sensitive for an asymmetrical structure.
[0026] As for the other parameters of the test site, such as the
period P, the CD.sub.PR and CD.sub.Al (generally, the duty cycles
of gratings) and the heights H.sub.PH and H.sub.Al of the two
gratings, they usually affect the sensitivity test T in an
oscillatory manner. It is thus necessary to find such a set of
gratings parameters, that T is maximized while being least
sensitive to the exact values of these parameters. For example, the
value of T equal to 810.sup.-3 is obtained with the following set
of gratings' parameters: P=600 nm, CD.sub.PR=300 nm, CD.sub.AL=150
nm, H.sub.PR=600 nm, and H.sub.AL=100 nm.
[0027] In one embodiment of the invention, the direct method is
used. In this method exact simulation methods, such as RCWT
(Rigorous Couple Wave Theory), are used to simulate the diffraction
signature(s) from the test site. In the simplest case there is not
any prior knowledge of the exact grating properties on either
layers. In this case the experimentally measured diffraction from
the test site is fitted to simulation fitting at the same time for
both CD's, grating heights and additional parameters characterizing
the individual gratings in the two layers and the shift as an
additional fitting parameter.
[0028] FIGS. 2A and 2B exemplify the principles underlying the
design of a test site 20 suitable to be used for another embodiment
of the present invention. FIG. 2C illustrates diffractive
structures having two-dimensional patterns of features. The test
site 20 is formed by regions 24 and 26 located one on top of the
other in layers L.sub.1 and L.sub.2, respectively. As shown in FIG.
2B, the two regions 24 and 26 define together four different pairs
of sub-regions: A.sub.1-A.sub.2, C.sub.1-C.sub.2 and
D.sub.1-D.sub.2, wherein sub-regions A.sub.2, B.sub.2, C.sub.2 and
D.sub.2 are located on top of sub-regions A.sub.1, B.sub.1, C.sub.1
and D.sub.1, respectively. In the pair A.sub.1-A.sub.2, sub-regions
A.sub.1 and A.sub.2 are different in that region A.sub.1 contains a
grating G.sub.A1 and sub-region A.sub.2 has no grating at all, and
in the pair D.sub.1-D.sub.2 --vice versa. Gratings G.sub.B1 and
G.sub.B2 of sub-regions B.sub.1 and B.sub.2, respectively, are
shifted with respect to each other along the X-axis a distance
+.DELTA.x (i.e., in the positive X-direction), and gratings
G.sub.C1 and G.sub.C2 are shifted with respect to each other a
distance -.DELTA.x (negative X-direction). In this embodiment
information is gained from measuring the single-grating sites (sub
regions A.sub.1-A.sub.2 and D.sub.1-D.sub.2) in order to simplify
the fitting in the dual-grating sites (sub regions B.sub.1 -B.sub.2
and C.sub.1-C.sub.2). The measurement is done in two steps. In the
first step the single-grating sites are measured and the grating
characteristics in those sites, including for example CD, height
wall angle etc., are measured by fitting to simulation, as in
normal scatterometry. In the second step the measurements of the
dual-grating sites are fitted to simulation using all or part of
the grating parameters that have been measured in Step 1 and
fitting for the shift between the gratings. It should be noted that
at least those gratings which are located in a common layer must be
are identical, i.e., have the same period, duty cycle, and
height.
[0029] Notice that for the case of perfect alignment the
measurements of sites B and C should be identical, thus a
significant difference between the two measurements may is indicate
an alignment error. The difference between the two signals obtained
from sub-region pairs B.sub.1-B.sub.2 and C.sub.1-C.sub.2,
respectively, may be utilized in order to increase the sensitivity
and reduce systematic measurement errors. This can be done by
fitting the difference of simulated signatures to the difference of
the measurements in the two sites. This procedure may be used in
order to filter out changes in the spectrum that are not related to
the shift S, thus enhancing the sensitivity and the robustness of
the measuring technique.
[0030] In another embodiment of the invention, the reference site
method is used. FIG. 3 illustrates the main principles underlying
this method. Here, a test site 30, which is formed by two regions
one above the other in layers L.sub.1 and L.sub.2, is composed of a
so-called "measurement site" 32 and a so-called "reference site" 34
spaced-apart from each other along the X-axis. Gratings in these
sites are not specifically illustrated, but is should be understood
that both the measurement and the reference sites include
sub-region pairs arranged as described above. In this method, the
measurement site 32 has one grating-pair characterized by a nominal
shift (+.DELTA.X) between the gratings, and the reference site 34
has several grating-pairs located in sub-region pairs,
respectively, aligned in a spaced-apart relationship along the
X-axis and characterized by the following nominal shifts:
-.DELTA.X-3.DELTA.x, -.DELTA.X-2.DELTA.x, -.DELTA.X-.DELTA.x,
-.DELTA.X, -.DELTA.X+.DELTA.x, -.DELTA.X+2.DELTA.x,
-.DELTA.X+3.DELTA.x, . . . etc., .DELTA.x is typically much smaller
than .DELTA.X and is of the same order of magnitude as the required
resolution in the lateral shift measurement. In this method, it is
assumed that the grating profiles are sufficiently symmetric and
unaffected by the ex act shift, and therefore symmetric shifts
between the gratings (upper grating shifted to either right or left
of the lower grating) will result in the identical diffraction
signatures.
[0031] When the two layers are printed with an alignment error
(+.xi.), the actual shifts between the gratings of the measurement
site will be: (+.DELTA.X+.xi.) and for the reference sites the
shifts will be as follows
(-.DELTA.X-3.DELTA.x+.xi.); (-.DELTA.X-2.DELTA.x+.xi.);
(-.DELTA.X-.DELTA.x+.xi.); (-.DELTA.X+.xi.);
(-.DELTA.X+.DELTA.x+.xi.); (-.DELTA.X+2.DELTA.x+.xi.); etc.
[0032] In order to measure the alignment error .xi., the
diffraction signatures from all the sub-region pairs are measured
using one of the above mentioned measurement 15 techniques. Then,
the signature from the measurement site is compared to the
signatures from all the sub-region pairs in the reference site,
looking for the best match. If the best match is found for the
(+N)'.sup.th sub-region pair, for which the nominal shift is
(-.DELTA.X+N.DELTA.x), than we have:
(+.DELTA.Xr+.xi.).apprxeq.-(-.DELTA.Xr+N.DELTA.x+.xi.)
and therefore:
.xi..apprxeq.(-N.DELTA.x)/2
[0033] Hence, the shift with the resolution of .DELTA.x/2 can be
found by simply finding the best matching signature from the
set.
[0034] If a significant range of shifts is to be covered by a small
number of sub-region pairs in the reference site, .DELTA.x should
be selected to be significantly larger than the required
resolution. In this case, some interpolation method can be used in
order to find the shift with improved accuracy. Interpolation can
be done, for example, by calculating the RMS (root mean square) of
the difference between the measurement site signature and all
reference site signatures, fitting all or part of the results to a
polynomial function of the shift and finding the shift providing
minimum RMS difference in signatures. Another optional
interpolation method is using a learning system, which is trained
using the reference site data to return the shift, and measurement
site data is used. as input for interpretation. Comparing the
reference site method to the direct method, the reference site
method is advantageously self-calibrating, i.e., there is no need
to realize the potentially complex details about how the
diffraction signature was created, including materials properties
and exact geometry (e.g. CD, line profile), as long as these are
constant for all involved sites. The reference site method,
however, requires a larger area on the sample occupied by a test
site and a larger number of measurements, requiring more time.
[0035] In yet another embodiment of the invention, a calibration
method may be used. In this method, a test site similar to the test
site 20 of FIGS. 2A and 2B (suitable to be used for direct method)
but including only two grating-containing sub-region pairs
B.sub.1-B.sub.2 and C.sub.1-C.sub.2 is used. Here, similarly to the
direct method, the difference between the diffraction signatures
measured on both sub-region pairs is determined, but, in
distinction to the direct method, the resulting signature is not
fitted to a theoretical signature, but is rather interpreted using
a previously performed calibration stage. In the calibration stage,
the signature (or only some sensitive e points thereof) is
determined as a function of alignment error values, being measured
by a suitable reference tool (e.g., ordinary microscope). To this
end., a test sample (e.g., semiconductor wafer) is specifically
prepared with several alignment shifts, and measured off-line to
make a record of the calibration results and keep it as reference
data.
[0036] In accordance with still another embodiment of the test
structure may contain a two-dimensional grating enabling the
measurement of the X and the Y components of the lateral shift at
the same site. In that case, in order to avoid the possibility to
confuse between the X and the Y components further several methods
may be used. In accordance with one embodiment, test site is
prepared, comprising two dimension grating with a period in the
Y-axis significantly different than the period in the X-axis. In
accordance with another embodiment polarized reflectometry
technique may be used to measure the same site several times with
different polarizations. Finally, the same site may be measured
from different directions (with different orientation). All the
above methods result in different changes to the diffraction
signatures due to shifts in different directions, thus avoiding
confusion.
[0037] Reference is now made to FIGS. 4-6 showing different
simulation results of the sensitivity test as functions of grating
parameters. FIG. 4 illustrates the sensitivity test as a function
of Al grating depth (H.sub.Al) and shift S using the test structure
of FIG. 1 with the following parameters: CD.sub.PR=150 nm,
CD.sub.Al=300 nm, P=800 nm and H.sub.PR=600 nm. FIG. 5 illustrates
the sensitivity test as a function of Al grating depth (H.sub.Al)
and grating period P using the test structure of the following
parameters: CD.sub.PR=150 nm, CD.sub.Al=300 nm, H.sub.PR=600 nm and
S=75 nm. FIG. 6 illustrates the sensitivity test as a function of
Al grating depth using the test structure of the following
parameters: CD.sub.PR=150 nm, CD.sub.Al=300 nm, P=600 nm and
H.sub.PR=600 nm. Two graphs R1 and R2 are shown corresponding,
respectively, to TM and TE polarization modes of incident radiation
relative to the grating orientation.
[0038] FIG. 7 illustrates the effect of a 5 nm overlay error on a
scatterometry signal (diffraction efficiency) measured on the
optimal structure with the TM polarization mode. Two diffraction
signatures SG.sub.1 and SG.sub.2 are shown corresponding,
respectively, to a sample with no lateral shift between the layers
(i.e., overlay is zero) and to a sample with a 5 nm overlay
error.
[0039] Obviously, many modifications and variations of the present
invention are possible in the light of the above teachings. For
example, in the reference site based method grating-pairs located
in sub-region pairs may be characterized by pre-determined
arbitrary nominal shifts.
[0040] Those skilled in the art will readily appreciate that many
modifications and changes may be applied to the invention as
hereinbefore exemplified without departing from its scope, as
defined in and by the appended claims.
* * * * *