Patent | Date |
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Solar cell bus bars Grant 9,960,286 - Finarov May 1, 2 | 2018-05-01 |
Lateral Shift Measurement Using An Optical Technique App 20180031983 - BRILL; Boaz ;   et al. | 2018-02-01 |
Lateral shift measurement using an optical technique Grant 9,785,059 - Brill , et al. October 10, 2 | 2017-10-10 |
Light induced patterning Grant 9,616,524 - Matusovsky , et al. April 11, 2 | 2017-04-11 |
Lateral Shift Measurement Using An Optical Technique App 20160327384 - BRILL; Boaz ;   et al. | 2016-11-10 |
Solar Cell Bus Bars App 20160254394 - FINAROV; Moshe | 2016-09-01 |
Method And System For Measuring Patterned Structures App 20160109225 - FINAROV; Moshe ;   et al. | 2016-04-21 |
Lateral shift measurement using an optical technique Grant 9,310,192 - Brill , et al. April 12, 2 | 2016-04-12 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates Grant 9,291,911 - Dishon , et al. March 22, 2 | 2016-03-22 |
Method and system for measuring patterned structures Grant 9,184,102 - Finarov , et al. November 10, 2 | 2015-11-10 |
Lateral Shift Measurement Using An Optical Technique App 20150124255 - BRILL; Boaz ;   et al. | 2015-05-07 |
Lateral shift measurement using an optical technique Grant 8,941,832 - Brill , et al. January 27, 2 | 2015-01-27 |
Method And System For Measuring Patterned Structures App 20150009504 - FINAROV; Moshe ;   et al. | 2015-01-08 |
Monitoring Apparatus And Method Particularly Useful In Photolithographically Processing Substrates App 20140320837 - DISHON; Giora ;   et al. | 2014-10-30 |
Method and system for endpoint detection Grant 8,858,296 - Finarov October 14, 2 | 2014-10-14 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates Grant 8,780,320 - Dishon , et al. July 15, 2 | 2014-07-15 |
Solar cells and method of manufacturing thereof Grant 8,652,872 - Finarov , et al. February 18, 2 | 2014-02-18 |
Method And System For Measuring Patterned Structures App 20140009760 - FINAROV; Moshe ;   et al. | 2014-01-09 |
Monitoring Apparatus And Method Particularly Useful In Photolithographically Processing Substrates App 20130293872 - DISHON; Giora ;   et al. | 2013-11-07 |
Thin films measurement method and system Grant 8,564,793 - Cohen , et al. October 22, 2 | 2013-10-22 |
Vacuum UV based optical measuring method and system Grant 8,552,394 - Finarov October 8, 2 | 2013-10-08 |
Method and system for measuring patterned structures Grant 8,531,678 - Finarov , et al. September 10, 2 | 2013-09-10 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates Grant 8,482,715 - Dishon , et al. July 9, 2 | 2013-07-09 |
Lateral Shift Measurement Using An Optical Technique App 20130128270 - BRILL; Boaz ;   et al. | 2013-05-23 |
Method And System For Endpoint Detection App 20130087098 - Finarov; Moshe | 2013-04-11 |
Lateral shift measurement using an optical technique Grant 8,363,219 - Brill , et al. January 29, 2 | 2013-01-29 |
Method Of Laser Processing App 20120268939 - Finarov; Moshe ;   et al. | 2012-10-25 |
Method and system for endpoint detection Grant 8,277,281 - Finarov October 2, 2 | 2012-10-02 |
Thin Films Measurement Method And System App 20120044506 - COHEN; Yoel ;   et al. | 2012-02-23 |
Method And System For Measuring Patterned Structures App 20120008147 - FINAROV; Moshe ;   et al. | 2012-01-12 |
Spectrometric optical method and system providing required signal-to-noise of measurements Grant 8,049,882 - Finarov November 1, 2 | 2011-11-01 |
Thin films measurement method and system Grant 8,040,532 - Cohen , et al. October 18, 2 | 2011-10-18 |
Method and system for measuring patterned structures Grant 8,023,122 - Finarov , et al. September 20, 2 | 2011-09-20 |
Solar Cells And Method Of Manufacturing Thereof App 20110197965 - Finarov; Moshe ;   et al. | 2011-08-18 |
Method And System For Endpoint Detection App 20110189926 - Finarov; Moshe | 2011-08-04 |
Light Induced Patterning App 20110097550 - Matusovsky; Mikhael ;   et al. | 2011-04-28 |
Method And Apparatus For Thin Film Quality Control App 20110089348 - Finarov; Moshe ;   et al. | 2011-04-21 |
Method and system for endpoint detection Grant 7,927,184 - Finarov April 19, 2 | 2011-04-19 |
Monitoring Apparatus And Method Particularly Useful In Photolithographically Processing Substrates App 20110037957 - Dishon; Giora ;   et al. | 2011-02-17 |
Method and system for measuring patterned structures Grant 7,864,344 - Finarov , et al. January 4, 2 | 2011-01-04 |
Method and system for measuring patterned structures Grant 7,864,343 - Finarov , et al. January 4, 2 | 2011-01-04 |
Method And System For Measuring Patterned Structures App 20100324865 - Finarov; Moshe ;   et al. | 2010-12-23 |
Method And System For Measuring Patterned Structures App 20100280807 - Finarov; Moshe ;   et al. | 2010-11-04 |
Method And System For Measuring Patterned Structures App 20100280808 - Finarov; Moshe ;   et al. | 2010-11-04 |
Two dimensional beam deflector Grant RE41,906 - Finarov November 2, 2 | 2010-11-02 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates Grant 7,821,614 - Dishon , et al. October 26, 2 | 2010-10-26 |
Method and system for measuring patterned structures Grant 7,791,740 - Finarov , et al. September 7, 2 | 2010-09-07 |
Method And Apparatus For Thin Film Quality Control App 20100220316 - Finarov; Moshe | 2010-09-02 |
Lateral Shift Measurement Using An Optical Technique App 20100214566 - Brill; Boaz ;   et al. | 2010-08-26 |
Apparatus And Method For Substrate Handling App 20100204820 - Finarov; Moshe ;   et al. | 2010-08-12 |
Method and system for measuring patterned structures Grant 7,760,368 - Finarov , et al. July 20, 2 | 2010-07-20 |
Method And System For Measuring Patterned Structures App 20100121627 - Finarov; Moshe ;   et al. | 2010-05-13 |
Lateral shift measurement using an optical technique Grant 7,715,007 - Brill , et al. May 11, 2 | 2010-05-11 |
Method And System For Endpoint Detection App 20100048100 - Finarov; Moshe | 2010-02-25 |
Method and system for measuring patterned structures Grant 7,663,768 - Finarov , et al. February 16, 2 | 2010-02-16 |
Method And Apparatus For Thin Film Quality Control App 20100006785 - Finarov; Moshe | 2010-01-14 |
Thin Films measurment method and system App 20100010659 - Cohen; Yoel ;   et al. | 2010-01-14 |
Method and system for measuring patterned structures Grant 7,626,710 - Finarov , et al. December 1, 2 | 2009-12-01 |
Method and system for measuring patterned structures Grant 7,626,711 - Finarov , et al. December 1, 2 | 2009-12-01 |
Method and system for endpoint detection Grant 7,614,932 - Finarov November 10, 2 | 2009-11-10 |
Thin films measurement method and system Grant 7,595,896 - Cohen , et al. September 29, 2 | 2009-09-29 |
Monitoring Apparatus And Method Particularly Useful In Photolithographically Processing Substrates App 20090231558 - Dishon; Giora ;   et al. | 2009-09-17 |
Method And System For Measuring Patterned Structures App 20090161123 - Finarov; Moshe ;   et al. | 2009-06-25 |
Method And System For Spectral Measurements App 20090135419 - FINAROV; Moshe | 2009-05-28 |
Vacuum Uv Based Optical Measuring Method And System App 20090127476 - FINAROV; Moshe | 2009-05-21 |
Monitoring apparatus and method particularly useful in photolithographically Grant 7,525,634 - Dishon , et al. April 28, 2 | 2009-04-28 |
Method and system for measuring patterned structures Grant 7,495,782 - Finarov , et al. February 24, 2 | 2009-02-24 |
Vacuum UV based optical measuring method and system Grant 7,482,596 - Finarov January 27, 2 | 2009-01-27 |
Method and system for measuring patterned structures Grant 7,477,405 - Finarov , et al. January 13, 2 | 2009-01-13 |
Apparatus For Optical Inspection Of Wafers During Polishing App 20080297794 - Finarov; Moshe | 2008-12-04 |
Thin films measurement method and system App 20080204721 - Cohen; Yoel ;   et al. | 2008-08-28 |
Optical Measurements Of Patterned Articles App 20080158553 - FINAROV; Moshe ;   et al. | 2008-07-03 |
Two-dimensional beam deflector Grant RE40,225 - Finarov April 8, 2 | 2008-04-08 |
Lateral Shift Measurement Using An Optical Technique App 20080074665 - BRILL; Boaz ;   et al. | 2008-03-27 |
Method And System For Measuring Patterned Structures App 20080068611 - Finarov; Moshe ;   et al. | 2008-03-20 |
Method And System For Measuring Patterned Structures App 20080062406 - FINAROV; Moshe ;   et al. | 2008-03-13 |
Method And System For Measuring Patterned Structures App 20080065339 - Finarov; Moshe ;   et al. | 2008-03-13 |
Method And System For Measuring Patterned Structures App 20080059141 - Finarov; Moshe ;   et al. | 2008-03-06 |
Method And System For Measuring Patterned Structures App 20080055609 - Finarov; Moshe ;   et al. | 2008-03-06 |
Method And System For Measuring Patterned Structures App 20080059129 - Finarov; Moshe ;   et al. | 2008-03-06 |
Monitoring Apparatus And Method Particularly Useful In Photolithographically App 20080043229 - DISHON; Giora ;   et al. | 2008-02-21 |
Optical measurements of patterned articles Grant 7,330,259 - Finarov , et al. February 12, 2 | 2008-02-12 |
Thin films measurement method and system Grant 7,327,476 - Cohen , et al. February 5, 2 | 2008-02-05 |
Lateral shift measurement using an optical technique Grant 7,301,163 - Brill , et al. November 27, 2 | 2007-11-27 |
Optical Measurement Device And Method App 20070258092 - FINAROV; Moshe | 2007-11-08 |
Optical system operating with variable angle of incidence Grant 7,292,341 - Brill , et al. November 6, 2 | 2007-11-06 |
Monitoring apparatus and method particularly useful in photolithographically Grant 7,289,190 - Dishon , et al. October 30, 2 | 2007-10-30 |
Method and system for thin film characterization Grant 7,289,234 - Finarov October 30, 2 | 2007-10-30 |
Method and system for endpoint detection App 20070238394 - Finarov; Moshe | 2007-10-11 |
Apparatus for integrated monitoring of wafers and for process control in semiconductor manufacturing and a method for use thereof Grant 7,255,748 - Finarov August 14, 2 | 2007-08-14 |
Method and system for measuring thin films Grant 7,251,043 - Finarov July 31, 2 | 2007-07-31 |
Optical measurement device and method Grant 7,245,375 - Finarov July 17, 2 | 2007-07-17 |
Apparatus for optical inspection of wafers during polishing App 20070123151 - Finarov; Moshe | 2007-05-31 |
Method and system for endpoint detection Grant 7,195,540 - Finarov March 27, 2 | 2007-03-27 |
Lateral shift measurement using an optical technique App 20070034816 - Brill; Boaz ;   et al. | 2007-02-15 |
Apparatus for optical inspection of wafers during processing Grant 7,169,015 - Finarov January 30, 2 | 2007-01-30 |
Method and system for automatic target finding App 20060232777 - Finarov; Moshe ;   et al. | 2006-10-19 |
Lateral shift measurement using an optical technique Grant 7,122,817 - Brill , et al. October 17, 2 | 2006-10-17 |
Monitoring apparatus and method particularly useful in photolithographically App 20060193630 - Dishon; Giora ;   et al. | 2006-08-31 |
Method and system for thin film characterization App 20060176494 - Finarov; Moshe | 2006-08-10 |
Lateral shift measurement using an optical technique App 20060102830 - Brill; Boaz ;   et al. | 2006-05-18 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates Grant 7,030,957 - Dishon , et al. April 18, 2 | 2006-04-18 |
Method and system for thin film characterization Grant 7,019,850 - Finarov March 28, 2 | 2006-03-28 |
Optical system operating with variable angle of indidence App 20060001883 - Brill; Boaz ;   et al. | 2006-01-05 |
Optical measurement device and method App 20050275845 - Finarov, Moshe | 2005-12-15 |
Lateral shift measurement using an optical technique Grant 6,974,962 - Brill , et al. December 13, 2 | 2005-12-13 |
Optical measurments of patterned articles App 20050264801 - Finarov, Moshe ;   et al. | 2005-12-01 |
Apparatus For Optical Inspection Of Wafers During Processing App 20050164608 - Finarov, Moshe | 2005-07-28 |
Vacuum UV based optical measuring method and system App 20050077474 - Finarov, Moshe | 2005-04-14 |
Apparatus for optical inspection of wafers during processing App 20050009450 - Finarov, Moshe | 2005-01-13 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates Grant 6,842,220 - Dishon , et al. January 11, 2 | 2005-01-11 |
Method and system for measuring thin films App 20050002624 - Finarov, Moshe | 2005-01-06 |
Apparatus for in-cassette monitoring of semiconductor wafers Grant 6,833,048 - Finarov , et al. December 21, 2 | 2004-12-21 |
Method and system for endpoint detection App 20040249614 - Finarov, Moshe | 2004-12-09 |
Apparatus for integrated monitoring of wafers and for process control in semiconductor manufacturing and a method for use thereof App 20040207837 - Finarov, Moshe | 2004-10-21 |
Method and apparatus for process control in semiconductor manufacture Grant 6,806,971 - Finarov October 19, 2 | 2004-10-19 |
Method and system for overlay measurement Grant 6,801,315 - Finarov , et al. October 5, 2 | 2004-10-05 |
Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects Grant 6,801,326 - Finarov , et al. October 5, 2 | 2004-10-05 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates App 20040191652 - Dishon, Giora ;   et al. | 2004-09-30 |
Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereof Grant 6,791,686 - Finarov September 14, 2 | 2004-09-14 |
Method and system for endpoint detection Grant 6,764,379 - Finarov July 20, 2 | 2004-07-20 |
Apparatus for optical inspection of wafers during polishing Grant 6,752,689 - Finarov June 22, 2 | 2004-06-22 |
Method and system for measuring patterned structures App 20040109173 - Finarov, Moshe ;   et al. | 2004-06-10 |
Apparatus for integrated monitoring of wafers and for process control in semiconductor manufacturing and a method for use thereof Grant 6,733,619 - Finarov May 11, 2 | 2004-05-11 |
Method and system for optical inspection of a structure formed with a surface relief Grant 6,720,568 - Finarov , et al. April 13, 2 | 2004-04-13 |
Thin films measurement method and system App 20040042017 - Cohen, Yoel ;   et al. | 2004-03-04 |
Method and system for measuring patterned structures Grant 6,657,736 - Finarov , et al. December 2, 2 | 2003-12-02 |
Method and system for measuring in patterned structures Grant 6,650,424 - Brill , et al. November 18, 2 | 2003-11-18 |
Method and system for controlling the photolithography process Grant 6,643,017 - Cohen , et al. November 4, 2 | 2003-11-04 |
Lateral shift measurement using an optical technique App 20030190793 - Brill, Boaz ;   et al. | 2003-10-09 |
Method and system for overlay measurement App 20030169423 - Finarov, Moshe ;   et al. | 2003-09-11 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates Grant 6,603,529 - Finarov August 5, 2 | 2003-08-05 |
Two-dimensional beam deflector Grant RE38,153 - Finarov June 24, 2 | 2003-06-24 |
Method and system for thin film characterization App 20030086097 - Finarov, Moshe | 2003-05-08 |
Method and apparatus for process control in semiconductor manufacture App 20030030822 - Finarov, Moshe | 2003-02-13 |
Apparatus for integrated monitoring of wafers and for process control in semiconductor manufacturing and a method for use thereof App 20020179841 - Finarov, Moshe | 2002-12-05 |
Method and system for controlling the photolithography process App 20020171828 - Cohen, Yoel ;   et al. | 2002-11-21 |
Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereof Grant 6,426,502 - Finarov July 30, 2 | 2002-07-30 |
Method and system for controlling the photolithography process Grant 6,424,417 - Cohen , et al. July 23, 2 | 2002-07-23 |
Method and system for measuring in patterned structures App 20020090744 - Brill, Boaz ;   et al. | 2002-07-11 |
Optical inspection system and method Grant 6,407,809 - Finarov , et al. June 18, 2 | 2002-06-18 |
Apparatus for optical inspection of wafers during polishing App 20020051135 - Finarov, Moshe | 2002-05-02 |
Apparatus for optical inspection of wafers during polishing Grant 6,368,182 - Dvir , et al. April 9, 2 | 2002-04-09 |
Method and system for optical inspection of a structure formed with a surface relief App 20020033450 - Finarov, Moshe ;   et al. | 2002-03-21 |
Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects App 20020005957 - Finarov, Moshe ;   et al. | 2002-01-17 |
Apparatus for optical inspection of wafers during polishing App 20010031608 - Dvir, Eran ;   et al. | 2001-10-18 |
Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects Grant 6,292,265 - Finarov , et al. September 18, 2 | 2001-09-18 |
Method and apparatus for measurements of patterned structures Grant 6,281,974 - Scheiner , et al. August 28, 2 | 2001-08-28 |
Method and system for endpoint detection App 20010003084 - Finarov, Moshe | 2001-06-07 |
Monitoring apparatus and method particularly useful in photolithographically processing substrates Grant 6,166,801 - Dishon , et al. December 26, 2 | 2000-12-26 |
Method and apparatus for measurements of patterned structures Grant 6,100,985 - Scheiner , et al. August 8, 2 | 2000-08-08 |
Method and apparatus for alignment of a wafer Grant 6,038,029 - Finarov March 14, 2 | 2000-03-14 |
Two-dimensional beam deflector Grant 5,764,365 - Finarov June 9, 1 | 1998-06-09 |
Autofocussing microscope having a pattern imaging system Grant 5,604,344 - Finarov February 18, 1 | 1997-02-18 |
Device for measuring the thickness of thin films Grant 5,517,312 - Finarov May 14, 1 | 1996-05-14 |
Method and apparatus for automatic optical inspection Grant 5,333,052 - Finarov July 26, 1 | 1994-07-26 |