U.S. patent application number 15/173756 was filed with the patent office on 2017-12-07 for semiconductor layout generation.
The applicant listed for this patent is GLOBALFOUNDRIES Inc.. Invention is credited to Atsushi Azuma, Yuping Cui, James A. Culp, Marco Facchini, Shaoning Yao.
Application Number | 20170351799 15/173756 |
Document ID | / |
Family ID | 60452223 |
Filed Date | 2017-12-07 |
United States Patent
Application |
20170351799 |
Kind Code |
A1 |
Azuma; Atsushi ; et
al. |
December 7, 2017 |
SEMICONDUCTOR LAYOUT GENERATION
Abstract
Semiconductor layout generation includes: calculating, for a
design rule constraint, a slack value for a subset of elements of a
proposed semiconductor layout; generating a plurality of
alternative layouts, where each of the alternative layouts includes
a variation of interdependent characteristics of the subset of
elements and a slack value for the subset of elements of each of
the alternative layouts is less than the calculated slack value of
subset of elements of the proposed layout; and calculating, by the
layout design module for each of the alternative layouts, a risk
value indicating the alternative layout's risk of fabrication
failure.
Inventors: |
Azuma; Atsushi; (Cortlandt
Manor, NY) ; Cui; Yuping; (Fishkill, NY) ;
Culp; James A.; (New Paltz, NY) ; Facchini;
Marco; (Wappingers Falls, NY) ; Yao; Shaoning;
(Wappingers Falls, NY) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
GLOBALFOUNDRIES Inc. |
Grand Cayman |
|
KY |
|
|
Family ID: |
60452223 |
Appl. No.: |
15/173756 |
Filed: |
June 6, 2016 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G06F 30/392 20200101;
G06F 2119/18 20200101; Y02P 90/02 20151101; G06F 30/39 20200101;
G06F 30/398 20200101; Y02P 90/265 20151101 |
International
Class: |
G06F 17/50 20060101
G06F017/50 |
Claims
1. A method of semiconductor fabrication, the method comprising:
determining a proposed semiconductor design layout; executing a
layout design module to perform a design rule check of the proposed
semiconductor design layout in accordance with a plurality of
different design rule constraints; calculating, by the layout
design module, an original slack value for a subset of elements of
the proposed semiconductor design layout for a design rule
constraint of the plurality of different design rule constraints,
wherein the elements of the subset have interdependent
characteristics for the design rule constraint and the original
slack value comprises a difference between a maximum value for the
design rule constraint and a value of the interdependent
characteristics of the subset of elements of the proposed layout,
the original slack value representing an amount physical layout of
circuit elements to be fabricated on a semiconductor die may be
modified from the proposed semiconductor design layout while
remaining within the maximum value for the design rule constraint;
generating, by the layout design module, a plurality of alternative
layouts of the proposed semiconductor design layout by modifying
one or more of the interdependent characteristics of the subset of
elements and performing slack calculations for each of the
plurality of alternative layouts to confirm that slack values of
each of the plurality of alternative layouts is less than the
calculated original slack value of the proposed semiconductor
design layout; calculating, by the layout design module, a risk
value for each of the alternative layouts indicating the
alternative layout's risk of fabrication failure; and a user
selecting a semiconductor design layout selected from the proposed
semiconductor design layout or one of the alternative layouts to
reduce risk of semiconductor fabrication failure by ensuring
fabrication.
2. The method of claim 1 further comprising: sorting, by the layout
design module, the alternative layouts by risk value; and
presenting, by the layout design module to the user, an alternative
layout of the plurality of alternative layouts having a risk value
indicating the lowest risk of fabrication failure.
3. The method of claim 1, further comprising: performing, by the
layout design module in accordance with the plurality of different
design rule constraints, the design rule check of the proposed
layout including identifying the subset of elements of the proposed
layout as elements having one or more interdependent
characteristics exceeding a predefined tolerance of a design rule
constraint, whereby the design rule check verifies that physical
layout of the proposed semiconductor design satisfies design rules
for reducing risk of manufacturing failure.
4. The method of claim 1 wherein calculating the slack value for a
subset of elements of a proposed semiconductor layout, generating a
plurality of alternative layouts, and calculating a risk value for
each of the alternative layouts is carried out during a design
phase prior to fabrication.
5. The method of claim 1 wherein calculating the slack value for a
subset of elements of a proposed semiconductor layout, generating a
plurality of alternative layouts, and calculating a risk value for
each of the alternative layouts is carried out during a fabrication
phase after a design phase.
6. An apparatus for semiconductor fabrication, the apparatus
comprising a computer processor and a computer memory operatively
coupled to the computer processor, the computer memory having
disposed within it computer program instructions that, when
executed, cause the apparatus to carry out the steps of: receiving
input of a proposed semiconductor design layout; executing a layout
design module to perform a design rule check of the proposed
semiconductor design layout in accordance with a plurality of
different design rule constraints; calculating, by the layout
design module, an original slack value for a subset of elements of
the proposed semiconductor design layout for a design rule
constraint of the plurality of different design rule constraints,
wherein the elements of the subset have interdependent
characteristics for the design rule constraint and the original
slack value comprises a difference between a maximum value for the
design rule constraint and a value of the interdependent
characteristics of the subset of elements of the proposed layout,
the original slack value representing an amount physical layout of
circuit elements to be fabricated on a semiconductor die may be
modified from the proposed semiconductor design layout while
remaining within the maximum value for the design rule constraint;
generating, by the layout design module, a plurality of alternative
layouts of the proposed semiconductor design layout by modifying
one or more a variation of the interdependent characteristics of
the subset of elements and performing slack calculations for each
of the plurality of alternative layouts to confirm that slack
values of each of the plurality of alternative layouts is less than
the calculated original slack value of the proposed semiconductor
design layout; calculating, by the layout design module, a risk
value for each of the alternative layouts indicating the
alternative layout's risk of fabrication failure; and a user
selecting a semiconductor design layout selected from the proposed
semiconductor design layout or one of the alternative layouts to
reduce the risk of semiconductor fabrication failure by ensuring
fabrication.
7. The apparatus of claim 6 further comprising computer program
instructions that, when executed, cause the apparatus to carry out
the steps of: sorting, by the layout design module, the alternative
layouts by risk value; and presenting, by the layout design module
to the user, an alternative layout of the plurality of alternative
layouts having a risk value indicating the lowest risk of
fabrication failure.
8. The apparatus of claim 6, further comprising computer program
instructions that, when executed, cause the apparatus to carry out
the steps of: performing, by the layout design module in accordance
with the plurality of different design rule constraints, the design
rule check of the proposed layout including identifying the subset
of elements of the proposed layout as elements having one or more
interdependent characteristics exceeding a predefined tolerance of
a design rule constraint, whereby the design rule check verifies
that physical layout of the proposed semiconductor design satisfies
design rules for reducing risk of manufacturing failure.
9. The apparatus of claim 6 wherein calculating the slack value for
a subset of elements of a proposed semiconductor layout, generating
a plurality of alternative layouts, and calculating a risk value
for each of the alternative layouts is carried out during a design
phase prior to fabrication.
10. The apparatus of claim 6 wherein calculating the slack value
for a subset of elements of a proposed semiconductor layout,
generating a plurality of alternative layouts, and calculating a
risk value for each of the alternative layouts is carried out
during a fabrication phase after a design phase.
11. A computer program product for semiconductor layout generation,
the computer program product disposed upon a computer readable
storage medium, the computer program product comprising computer
program instructions capable, when executed, of causing a computer
to carry out the steps of: receiving input of a proposed
semiconductor design layout; executing a layout design module to
perform a design rule check of the proposed semiconductor design
layout in accordance with a plurality of different design rule
constraints; calculating, by the layout design module, an original
slack value for a subset of elements of the proposed semiconductor
design layout for a design rule constraint of the plurality of
different design rule constraints, wherein the elements of the
subset have interdependent characteristics for the design rule
constraint and the original slack value comprises a difference
between a maximum value for the design rule constraint and a value
of the interdependent characteristics of the subset of elements of
the proposed layout, the original slack value representing an
amount physical layout of circuit elements to be fabricated on a
semiconductor die may be modified from the proposed semiconductor
design layout while remaining within the maximum value for the
design rule constraint; generating, by the layout design module, a
plurality of alternative layouts of the proposed semiconductor
design layout by modifying one or more a variation of the
interdependent characteristics of the subset of elements and
performing slack calculations for each of the plurality of
alternative layouts to confirm that slack values of each of the
plurality of alternative layouts is less than the calculated
original slack value of the proposed semiconductor design layout;
calculating, by the layout design module, a risk value for each of
the alternative layouts indicating the alternative layout's risk of
fabrication failure; and a user selecting a semiconductor design
layout selected from the proposed semiconductor design layout or
one of the alternative layouts to reduce the risk of semiconductor
fabrication failure by ensuring fabrication, failure.
12. The computer program product of claim 11 further comprising
computer program instructions that, when executed, cause the
computer to carry out the steps of: sorting, by the layout design
module, the alternative layouts by risk value; and presenting, by
the layout design module to the user, an alternative layout of the
plurality of alternative layouts having a risk value indicating the
lowest risk of fabrication failure.
13. The computer program product of claim 11, further comprising
computer program instructions that; when executed, cause the
computer to carry out the steps of: performing, by the layout
design module in accordance with the plurality of different design
rule constraints, the design rule check of the proposed layout
including identifying the subset of elements of the proposed layout
as elements having one or more interdependent characteristics
exceeding a predefined tolerance of a design rule constraint,
whereby the design rule check verifies that physical layout of the
proposed semiconductor design satisfies design rules for reducing
risk of manufacturing failure.
14. The computer program product of claim 11 wherein calculating
the slack value for a subset of elements of a proposed
semiconductor layout, generating a plurality of alternative
layouts, and calculating a risk value for each of the alternative
layouts is carried out during a design phase prior to
fabrication.
15. The computer program product of claim 11 wherein calculating
the slack value for a subset of elements of a proposed
semiconductor layout, generating a plurality of alternative
layouts, and calculating a risk value for each of the alternative
layouts is carried out during a fabrication phase after a design
phase.
16. The computer program product of claim 11 wherein the computer
readable medium comprises a recordable medium.
17. The computer program product of claim 11 wherein the computer
readable medium comprises a transmission medium.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
[0001] The present disclosure is generally related to data
processing, or, more specifically, methods, apparatus, and products
for semiconductor layout generation.
2. Description of Related Art
[0002] Semiconductor circuits are generally brought into existence
in two phases. In a first phase the circuit is designed. In a
second phase, the circuit is fabricated on a semiconductor die.
During the design phase, a circuit designer may create a layout of
a circuit on a computer storage device to be used during the
fabrication phase to fabricate the circuit on the silicon
wafer.
[0003] Current methods to ensure that such layout can be fabricated
without failure are often inefficient and sub-optimal. For example,
the fabrication process may be changed after the circuit design and
layout are complete but before fabrication. Thus, the layout, if
fabricated as originally designed, would result in sub-optimal
yield in semiconductor manufacturing. Also, a layout may be
compliant to an individual design rule, but may not yield when
multiple fail modes interact with each other. Further, density
critical layouts are usually designed sub-ground rules. However,
there is no automated way to guide design to minimize overall
process fails.
SUMMARY OF THE INVENTION
[0004] Methods, apparatus, and products for semiconductor layout
generation are disclosed in this specification. Such layout
generation may include calculating and evaluating, by a layout
design module for a design rule constraint, a slack value for a
subset of elements of a proposed semiconductor layout. The elements
of the subset have interdependent characteristics for the design
rule constraint and the slack value comprises a difference between
a maximum value for the design rule constraint and a value of the
interdependent characteristics of the subset of elements of the
proposed layout.
[0005] Such layout generation may also include generating, by the
layout design module, a plurality of alternative layout. Each of
the alternative layouts includes a variation of the interdependent
characteristics of the subset of elements and a slack value for the
subset of elements of each of the alternative layouts is less than
the calculated slack value of subset of elements of the proposed
layout.
[0006] Finally, the layout generation may include calculating, by
the layout design module for each of the alternative layouts, a
risk value indicating the alternative layout's risk of fabrication
failure.
[0007] The foregoing and other objects, features and advantages
described herein will be apparent from the following more
particular descriptions of example embodiments as illustrated in
the accompanying drawings wherein like reference numbers generally
represent like parts of example embodiments.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] FIG. 1 sets forth a network diagram of a system for
semiconductor layout generation according to embodiments described
herein.
[0009] FIG. 2 sets forth a flow chart illustrating an exemplary
method for semiconductor layout generation according to embodiments
described herein.
[0010] FIG. 3 sets forth an example semiconductor layout which may
be generated according to embodiments described herein.
DESCRIPTION OF THE PREFERRED EMBODIMENT(S)
[0011] Example methods, apparatus, and products for semiconductor
layout generation in accordance with embodiments are described
herein with reference to the accompanying drawings, beginning with
FIG. 1. FIG. 1 sets forth a network diagram of a system for
semiconductor layout generation according to embodiments described
herein. The system of FIG. 1 includes an example of automated
computing machinery in the form of a computer (152). The computer
(152) of FIG. 1 includes at least one computer processor (156) or
`CPU` as well as random access memory (168) (`RAM`) which is
connected through a high speed memory bus (166) and bus adapter
(158) to processor (156) and to other components of the computer
(152).
[0012] Stored in RAM (168) is a layout design module (126), a
module of computer program instructions for semiconductor layout
generation in accordance with embodiments described herein. A
layout, as the term is used here, is a data structure comprising at
least a structured description of physical placement and dimensions
of circuit elements to be fabricated on a semiconductor die, a
structure description of physical placement and dimensions of
interconnections of the elements in the form of traces and like,
specifications of materials and related characteristics (depth,
thickness, width, height, and the like), and any other descriptions
as will occur to readers of skill in the art which may be utilized
to fabricate the circuit on the semiconductor die.
[0013] The layout design module (126), when executed, may perform a
design rule check of a proposed layout (102) in accordance with a
plurality of different design rule (104) constraints. A design rule
check is a method performed as part of electronic design automation
that verifies the physical layout of a particular semiconductor
circuit satisfies a series of recommended parameters called design
rules. Design Rules are a series of parameters provided by
semiconductor manufacturers that enable the circuit or layout
designer to verify the correctness of a mask set. Design rules are
specific to a particular semiconductor manufacturing process. A
design rule set specifies certain geometric and connectivity
restrictions to ensure sufficient margins to account for
variability in semiconductor manufacturing processes.
[0014] Such performance of a design rule check may include
identifying a subset of elements of the proposed layout as elements
having one or more interdependent characteristics exceeding a
predefined tolerance of a design rule constraint. That is, the
layout design module (126) may identify one or more `pinch points`
in which the physical layout of two or more elements increases the
risk of manufacturing failure. Interdependent characteristics are
characteristics of two elements that may affect one another during
the fabrication process. Modifying one characteristic to reduce
risk of fabrication failure, for example, may increase the overall
risk of fabrication failure due to the characteristic's effect on
other characteristics.
[0015] The layout design module (126) may also calculate, for a
design rule constraint, a slack value (106) for a subset of
elements of a proposed semiconductor layout. In the example of FIG.
1, the elements of the subset have interdependent characteristics
for the design rule constraint. The slack value is a difference
between a maximum value for the design rule constraint and a value
of the interdependent characteristics of the subset of elements of
the proposed layout. A maximum value for a design rule constraint
may be a user specified value or a constraint based on available
fabrication processes. Consider, for example, a maximum contacted
poly pitch (CPP) of 80 nanometers. Such a constraint is a maximum
value that cannot be exceeded due to the fabrication process being
employed. The slack value may be the difference between such a
maximum allowed CPP of 80 nm and the actual layout usage of the
CPP--say 70 nm. In such a case, the slack value is 10 nm for that
particular design rule constraint. Such a slack value effectively
represents 10 nm of `slack` in which the physical layout may be
modified from the proposed layout and still remain within the
maximum design constraints.
[0016] The layout design module (126) may also generate a plurality
of alternative layouts. Each of the alternative layouts may include
a variation of the interdependent (110) characteristics of the
subset of elements and a slack value for the subset of elements of
each of the alternative layouts is less than the calculated slack
value of subset of elements of the proposed layout. That is, each
alternative layout may be a layout in which one characteristic is
modified at a predefined interval--say, one nanometer for the
example CPP constraint above--and the slack value of each
alternative layout is less than that of the original. Said another
way, the alternative layouts represent layouts that utilize the
available `slack` for that design constraint. Such intervals may be
predefined by a user so as to control the number of alternative
layouts generated and thus the amount of processing capability
required to perform the remaining analysis described below.
[0017] The layout design module (126) may then calculate, for each
of the alternative layouts, a risk value (110) indicating the
alternative layout's risk of fabrication failure. The risk value
(110) may be calculated by first, iteratively calculating a design
value by varying a process assumption in each iteration. Each
varied process assumption is an alternative layout. The
calculations may be carried out for a number of iterations until
the design rule value exceeds a process fail criterion (the design
rule is `broken`). This iterative calculation may be carried out
for all combination of design rules and process assumptions. Then,
for each design rule or for each process assumption, the layout
design module may sum the change in process assumptions that caused
the design rule to be broken (exceed the process fail criterion).
The sum may be used to calculate a percentage relative to other
design rule sums. Such a percentage may be the risk value for that
particular layout. The layout design module (126) may then sort the
alternative layouts by risk value and present an alternative layout
having a risk value indicating the lowest risk of fabrication
failure.
[0018] Also stored in RAM (168) is an operating system (154).
Operating systems useful in systems configured for semiconductor
layout generation according to embodiments described herein include
UNIX.TM., Linux.TM., Microsoft XP.TM., AIX.TM., IBM's i5/0S.TM.,
and others as will occur to those of skill in the art. The
operating system (154), layout design module (126), proposed layout
(102), design rules (104), slack value (106), alternative layouts
(108), and risk values (110), in the example of FIG. 1 are shown in
RAM (168), but many components of such software typically are
stored in non-volatile memory also, such as, for example, on a disk
drive (170).
[0019] The computer (152) of FIG. 1 includes disk drive adapter
(172) coupled through expansion bus (160) and bus adapter (158) to
processor (156) and other components of the computer (152). Disk
drive adapter (172) connects non-volatile data storage to the
computer (152) in the form of disk drive (170). Disk drive adapters
useful in computers for semiconductor layout generation according
to embodiments described herein include Integrated Drive
Electronics (`IDE`) adapters, Small Computer System Interface
(`SCSI`) adapters, and others as will occur to those of skill in
the art. Non-volatile computer memory also may be implemented for
as an optical disk drive, electrically erasable programmable
read-only memory (so-called `EEPROM` or `Flash` memory), RANI
drives, and so on, as will occur to those of skill in the art.
[0020] The example computer (152) of FIG. 1 includes one or more
input/output (`I/0`) adapters (178). I/0 adapters implement
user-oriented input/output through, for example, software drivers
and computer hardware for controlling output to display devices
such as computer display screens, as well as user input from user
input devices (181) such as keyboards and mice. The example
computer (152) of FIG. 1 includes a video adapter (209), which is
an example of an I/0 adapter specially designed for graphic output
to a display device (180) such as a display screen or computer
monitor. Video adapter (209) is connected to processor (156)
through a high speed video bus (164), bus adapter (158), and the
front side bus (162), which is also a high speed bus.
[0021] The exemplary computer (152) of FIG. 1 includes a
communications adapter (167) for data communications with other
computers (182) and for data communications with a data
communications network (100). Such data communications may be
carried out serially through RS-232 connections, through external
buses such as a Universal Serial Bus (`USB`), through data
communications networks such as IP data communications networks,
and in other ways as will occur to those of skill in the art.
Communications adapters implement the hardware level of data
communications through which one computer sends data communications
to another computer, directly or through a data communications
network. Examples of communications adapters useful for
semiconductor layout generation according to embodiments described
herein include modems for wired dial-up communications, Ethernet
(IEEE 802.3) adapters for wired data communications, and 802.11
adapters for wireless data communications.
[0022] The arrangement of servers and other devices making up the
exemplary system are for explanation, not for limitation. Data
processing systems useful according to various embodiments may
include additional servers, routers, other devices, and
peer-to-peer architectures, not shown in FIG. 1, as will occur to
those of skill in the art. Networks in such data processing systems
may support many data communications protocols, including for
example, TCP (Transmission Control Protocol), IP (Internet
Protocol), HTTP (HyperText Transfer Protocol), WAP (Wireless Access
Protocol), HDTP (Handheld Device Transport Protocol), and others as
will occur to those of skill in the art. Various embodiments may be
implemented on a variety of hardware platforms in addition to those
illustrated in FIG. 1.
[0023] For further explanation, FIG. 2 sets forth a flow chart
illustrating an exemplary method for semiconductor layout
generation according to embodiments described herein. The method of
FIG. 2 includes performing (202), by a layout design module in
accordance with a plurality of different design rule constraints, a
design rule check of the proposed layout. In the method of FIG. 2,
performing (202) a desiring rule check includes identifying (204) a
subset of elements of a proposed layout as elements having one or
more interdependent characteristics exceeding a predefined
tolerance of a design rule constraint. Identifying (204) elements
having one or more interdependent characteristics exceeding a
predefined tolerance of a design rule constraint may carried out by
identifying one or more `pinch points` in which the physical layout
of two or more elements increases the risk of manufacturing
failure.
[0024] The method of FIG. 2 also includes calculating (206), by a
layout design module for a design rule constraint, a slack value
for a subset of elements of a proposed semiconductor layout. In the
method of FIG. 2, the elements of the subset have interdependent
characteristics for the design rule constraint. Also in the method
of FIG. 2, the slack value comprises a difference between a maximum
value for the design rule constraint and a value of the
interdependent characteristics of the subset of elements of the
proposed layout. That is, calculating (206) a slack value may be
carried out by calculating the difference between a maximum value
for the design rule constraint and a value of the interdependent
characteristics of the subset of elements of the proposed
layout.
[0025] The method of FIG. 2 also includes generating (208), by the
layout design module, a plurality of alternative layouts. In the
method of FIG. 2, each of the alternative layouts includes a
variation of the interdependent characteristics of the subset of
elements and a slack value for the subset of elements of each of
the alternative layouts is less than the calculated slack value of
subset of elements of the proposed layout. That is, generating
(208) alternative layouts may be carried out by modifying one or
more of the interdependent characteristics of the elements and
performing a slack calculation to confirm that the slack value of
the alternative layout is less than the that of originally proposed
layout. The generation of an alternative layout may be carried out
a predefined number of times by modifying the interdependent
characteristics by a predefined interval amount.
[0026] The method of FIG. 2 also includes calculating (210), by the
layout design module for each of the alternative layouts, a risk
value indicating the alternative layout's risk of fabrication
failure. Calculating a risk value may be carried out as described
above with respect to FIG. 1. Essentially, modifying a process
assumption for a particular design rule across a range of values so
as to break the design rule and determining, for each design rule,
possibility of the process assumption variation causing the design
rule to break.
[0027] The method of FIG. 2 continues by sorting (212), by the
layout design module, the alternative layouts by risk value and
presenting (214), by the layout design module to a user, an
alternative layout having a risk value indicating the lowest risk
of fabrication failure.
[0028] Readers of skill in the art will recognize that the method
of FIG. 2 may be carried out at various times by various entities.
For example, the method of FIG. 2 may be carried out at design
phase, by a circuit designer, prior to fabrication of the layout on
a semiconductor die. Alternatively, the method of FIG. 2 may be
carried out by a circuit manufacture at the semiconductor
fabrication phase.
[0029] For further explanation, FIG. 3 sets forth an example
semiconductor layout which may be generated according to
embodiments described herein. The example layout of FIG. 3 includes
two metal wires (308, 310) and three gates (302, 304, 306).
[0030] There are several design pinch points and design constraints
depicted in the example of FIG. 3. For example, the distance (316)
between the contacted poly pitch (the gates) is a design constraint
which cannot be varied. By contrast, the point-to-point distance
(326) between two wires is a pinch point which may be varied by
varying the end lengths (322, 324) of the wires. Likewise, the area
(318, 320) in which the wires overlap the gates is another pinch
point that may be varied. Consider, for example, a proposed layout
in which the following values are included for each pinch point and
design constraints: [0031] a. The CPP is 80 nm (316); [0032] b.
Wire overlap past via is 24 nm, with the total being 48 nm (322,
324); [0033] c. Tip to tip space between wires is 70 nm (326);
[0034] d. Half width of via is 14 nm, with the total being 28 (312,
320).
[0035] In such an example, slack value may be calculated by
calculating the difference between the twice the CPP (160 nm) and
the sum of the pinch point values (146 nm: tip space between wires,
wire overlap pass via, via width) which results in a total slack
value of 14 nm. In essence, the available total slack with which to
provide alternative layouts is 14 nm. In each alternative layout,
the wire overlap pass via may be increased or decreased and the tip
spacing of the wires may be decreased or increased as long as the
total slack value for that alternative layout is between zero and
14 nm. Once the alternative layouts are generated, a risk value may
be calculated for each, the layouts may be sorted in order of risk,
and the layout having the least risk of fabrication failure may be
proposed to a user.
[0036] Readers of skill in the art will recognize that the various
methods, apparatus, and products set forth in the present
disclosure may provide a multitude of benefits. Examples of such
benefits may include: [0037] providing a statistical method to
reduce the risk of fails caused by fabrication process; [0038]
providing a method of post tapeout/design release layout
optimization which supports a fabless use model; [0039] providing a
layout optimization method that minimize design space requirement
which is a distinct advantage compared to a typical
design-for-manufacture DFM approach; and [0040] others as will
occur to readers of skill in the art.
[0041] The present invention may be a system, a method, and/or a
computer program product. The computer program product may include
a computer readable storage medium (or media) having computer
readable program instructions thereon for causing a processor to
carry out aspects of the present invention.
[0042] The computer readable storage medium can be a tangible
device that can retain and store instructions for use by an
instruction execution device. The computer readable storage medium
may be, for example, but is not limited to, an electronic storage
device, a magnetic storage device, an optical storage device, an
electromagnetic storage device, a semiconductor storage device, or
any suitable combination of the foregoing. A non-exhaustive list of
more specific examples of the computer readable storage medium
includes the following: a portable computer diskette, a hard disk,
a random access memory (RAM), a read-only memory (ROM), an erasable
programmable read-only memory (EPROM or Flash memory), a static
random access memory (SRAM), a portable compact disc read-only
memory (CD-ROM), a digital versatile disk (DVD), a memory stick, a
floppy disk, a mechanically encoded device such as punch-cards or
raised structures in a groove having instructions recorded thereon,
and any suitable combination of the foregoing. A computer readable
storage medium, as used herein, is not to be construed as being
transitory signals per se, such as radio waves or other freely
propagating electromagnetic waves, electromagnetic waves
propagating through a waveguide or other transmission media (e.g.,
light pulses passing through a fiber-optic cable), or electrical
signals transmitted through a wire.
[0043] Computer readable program instructions described herein can
be downloaded to respective computing/processing devices from a
computer readable storage medium or to an external computer or
external storage device via a network, for example, the Internet, a
local area network, a wide area network and/or a wireless network.
The network may comprise copper transmission cables, optical
transmission fibers, wireless transmission, routers, firewalls,
switches, gateway computers and/or edge servers. A network adapter
card or network interface in each computing/processing device
receives computer readable program instructions from the network
and forwards the computer readable program instructions for storage
in a computer readable storage medium within the respective
computing/processing device.
[0044] Computer readable program instructions for carrying out
operations of the present invention may be assembler instructions,
instruction-set-architecture (ISA) instructions, machine
instructions, machine dependent instructions, microcode, firmware
instructions, state-setting data, or either source code or object
code written in any combination of one or more programming
languages, including an object oriented programming language such
as Smalltalk, C++ or the like, and conventional procedural
programming languages, such as the "C" programming language or
similar programming languages. The computer readable program
instructions may execute entirely on the user's computer, partly on
the user's computer, as a stand-alone software package, partly on
the user's computer and partly on a remote computer or entirely on
the remote computer or server. In the latter scenario, the remote
computer may be connected to the user's computer through any type
of network, including a local area network (LAN) or a wide area
network (WAN), or the connection may be made to an external
computer (for example, through the Internet using an Internet
Service Provider). In some embodiments, electronic circuitry
including, for example, programmable logic circuitry,
field-programmable gate arrays (FPGA), or programmable logic arrays
(PLA) may execute the computer readable program instructions by
utilizing state information of the computer readable program
instructions to personalize the electronic circuitry, in order to
perform aspects of the present invention.
[0045] Aspects of the present invention are described herein with
reference to flowchart illustrations and/or block diagrams of
methods, apparatus (systems), and computer program products
according to embodiments of the invention. It will be understood
that each block of the flowchart illustrations and/or block
diagrams, and combinations of blocks in the flowchart illustrations
and/or block diagrams, can be implemented by computer readable
program instructions.
[0046] These computer readable program instructions may be provided
to a processor of a general purpose computer, special purpose
computer, or other programmable data processing apparatus to
produce a machine, such that the instructions, which execute via
the processor of the computer or other programmable data processing
apparatus, create means for implementing the functions/acts
specified in the flowchart and/or block diagram block or blocks.
These computer readable program instructions may also be stored in
a computer readable storage medium that can direct a computer, a
programmable data processing apparatus, and/or other devices to
function in a particular manner, such that the computer readable
storage medium having instructions stored therein comprises an
article of manufacture including instructions which implement
aspects of the function/act specified in the flowchart and/or block
diagram block or blocks.
[0047] The computer readable program instructions may also be
loaded onto a computer, other programmable data processing
apparatus, or other device to cause a series of operational steps
to be performed on the computer, other programmable apparatus or
other device to produce a computer implemented process, such that
the instructions which execute on the computer, other programmable
apparatus, or other device implement the functions/acts specified
in the flowchart and/or block diagram block or blocks.
[0048] The flowchart and block diagrams in the Figures illustrate
the architecture, functionality, and operation of possible
implementations of systems, methods, and computer program products
according to various embodiments of the present invention. In this
regard, each block in the flowchart or block diagrams may represent
a module, segment, or portion of instructions, which comprises one
or more executable instructions for implementing the specified
logical function(s). In some alternative implementations, the
functions noted in the block may occur out of the order noted in
the figures. For example, two blocks shown in succession may, in
fact, be executed substantially concurrently, or the blocks may
sometimes be executed in the reverse order, depending upon the
functionality involved. It will also be noted that each block of
the block diagrams and/or flowchart illustration, and combinations
of blocks in the block diagrams and/or flowchart illustration, can
be implemented by special purpose hardware-based systems that
perform the specified functions or acts or carry out combinations
of special purpose hardware and computer instructions.
[0049] It will be understood from the foregoing description that
modifications and changes may be made in various embodiments
without departing from its true spirit.
[0050] The descriptions in this specification are for purposes of
illustration only and are not to be construed in a limiting sense.
The scope of the present disclosure is limited only by the language
of the following claims.
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