U.S. patent application number 13/622089 was filed with the patent office on 2017-08-10 for method for manufacturing a semiconductor device.
The applicant listed for this patent is Akihiro KAJITA, Masayuki KATAGIRI, Masayuki KITAMURA, Ichiro MIZUSHIMA, Tadashi SAKAI, Atsuko SAKATA, Naoshi SAKUMA, Makoto WADA, Yuichi YAMAZAKI. Invention is credited to Akihiro KAJITA, Masayuki KATAGIRI, Masayuki KITAMURA, Ichiro MIZUSHIMA, Tadashi SAKAI, Atsuko SAKATA, Naoshi SAKUMA, Makoto WADA, Yuichi YAMAZAKI.
Application Number | 20170229301 13/622089 |
Document ID | / |
Family ID | 49265832 |
Filed Date | 2017-08-10 |
United States Patent
Application |
20170229301 |
Kind Code |
A9 |
KITAMURA; Masayuki ; et
al. |
August 10, 2017 |
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
Abstract
According to one embodiment, a method for manufacturing a
semiconductor device is disclosed. The method includes forming a
co-catalyst layer and catalyst layer above a surface of a
semiconductor substrate. The co-catalyst layer and catalyst layer
have fcc structure. The fcc structure is formed such that (111)
face of the fcc structure is to be oriented parallel to the surface
of the semiconductor substrate. The catalyst includes a portion
which contacts the co-catalyst layer. The portion has the fcc
structure. An exposed surface of the catalyst layer is planarized
by oxidation and reduction treatments. A graphene layer is formed
on the catalyst layer.
Inventors: |
KITAMURA; Masayuki;
(Yokohama-shi, JP) ; SAKATA; Atsuko;
(Yokohama-shi, JP) ; WADA; Makoto; (Yokohama-shi,
JP) ; YAMAZAKI; Yuichi; (Inagi-shi, JP) ;
KATAGIRI; Masayuki; (Kawasaki-shi, JP) ; KAJITA;
Akihiro; (Yokohama-shi, JP) ; SAKAI; Tadashi;
(Yokohama-shi, JP) ; SAKUMA; Naoshi;
(Yokohama-shi, JP) ; MIZUSHIMA; Ichiro;
(Yokohama-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
KITAMURA; Masayuki
SAKATA; Atsuko
WADA; Makoto
YAMAZAKI; Yuichi
KATAGIRI; Masayuki
KAJITA; Akihiro
SAKAI; Tadashi
SAKUMA; Naoshi
MIZUSHIMA; Ichiro |
Yokohama-shi
Yokohama-shi
Yokohama-shi
Inagi-shi
Kawasaki-shi
Yokohama-shi
Yokohama-shi
Yokohama-shi
Yokohama-shi |
|
JP
JP
JP
JP
JP
JP
JP
JP
JP |
|
|
Prior
Publication: |
|
Document Identifier |
Publication Date |
|
US 20130217226 A1 |
August 22, 2013 |
|
|
Family ID: |
49265832 |
Appl. No.: |
13/622089 |
Filed: |
September 18, 2012 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 21/76846 20130101;
H01L 21/76861 20130101; H01L 2221/1089 20130101; H01L 21/02373
20130101; H01L 2924/0002 20130101; H01L 23/53276 20130101; H01L
21/76855 20130101; H01L 2924/0002 20130101; H01L 2924/00 20130101;
H01L 21/76876 20130101; H01L 21/76858 20130101 |
International
Class: |
H01L 21/28 20060101
H01L021/28 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 22, 2012 |
JP |
2012-036377 |
Claims
1. A method for manufacturing a semiconductor device comprising:
forming a co-catalyst layer above a surface of a semiconductor
substrate, the co-catalyst layer comprising a face-centered cubic
structure or a hexagonal close-packed structure, or an amorphous
structure or a microcrystalline structure, wherein the co-catalyst
layer is formed such that a (111) face of the face-centered cubic
structure or a (002) face of the hexagonal close-packed structure
is to be oriented parallel to the surface of the semiconductor when
the co-catalyst layer comprises the face-centered cubic structure
or the hexagonal close-packed structure; forming a catalyst layer
on the co-catalyst layer, the catalyst layer comprising a
face-centered cubic structure or a hexagonal close-packed
structure, or an amorphous structure or a microcrystalline
structure, wherein the catalyst layer is formed such that a (111)
face of the face-centered cubic structure or a (002) face of the
hexagonal close-packed structure is to be oriented parallel to the
surface of the semiconductor when the catalyst layer comprises the
face-centered cubic structure or the hexagonal close-packed
structure, the catalyst layer comprising a portion which contacts
the co-catalyst layer, the portion comprising the face-centered
cubic structure or the hexagonal close-packed structure, or the
amorphous structure or the microcrystalline structure; planarizing
an exposed surface of the catalyst layer by applying an oxidation
treatment to the catalyst layer, and by applying a reduction
treatment to the catalyst layer to which the oxidation treatment is
applied; and forming a graphene layer on the catalyst layer.
2. The method of claim 1, wherein the catalyst layer comprises a
first material as a catalyst, and a second material having a
melting point higher than that of the first material, and the
second material forms a eutectic with the first material, or the
second material forms complete soluble with the first material.
3. The method of claim 1, wherein the first material is one
selected from a group consist of Ni, Co, and Fe, or a nitride of
the material selected from the group, or an alloy including at
least two materials selected from the group.
4. The method of claim 3, wherein the first material is Ni, the
second material is Cr, Tc, Ru, Os, Re, or C when the second
material forms the eutectic with the first material, and the second
material is Pd, Pt, Rh, or Ir when the second material forms the
complete soluble with the first material.
5. The method of claim 3, wherein the first material is Co, the
second material is C when the second material forms the eutectic
with the first material, and the second material is Pd, Pt, Rh, Ru,
Ir, Os, or Re when the second material forms the complete soluble
with the first material.
6. The method of claim 3, wherein the first material is Fe, the
second material is Ru, Cd, or C when the second material forms the
eutectic with the first material, and the second material is Cr,
Pt, Rh, Ir, or W when the second material forms the complete
soluble with the first material.
7. The method of claim 3, wherein the catalyst layer is a single
film doped with the second material, and the single film is formed
of the material selected from the group.
8. The method of claim 3, wherein the catalyst layer is a single
film doped with the second material, and the single film is formed
of a nitride of the material selected from the group.
9. The method of claim 3, wherein the catalyst layer is a single
film doped with the second material, and the single film is formed
of an alloy including at least two materials selected from the
group.
10. The method of claim 2, wherein the catalyst layer is a
laminated film doped with the second material, the laminated film,
and the material is selected from a group consist of Ni, nitride of
Ni, Co, nitride of Co, Fe, and nitride of Fe.
11. The method of claim 2, wherein the co-catalyst layer comprises
the second material, and wherein the forming the catalyst layer
comprises forming a catalyst layer comprising the first material on
the co-catalyst layer, and diffusing the second material from the
co-catalyst layer into the catalyst layer.
12. The method of claim 2, wherein the forming the catalyst layer
comprises forming a catalyst layer comprising the first material,
and doping the catalyst layer with the second material from above
the catalyst layer.
13. The method of claim 2, wherein the forming the catalyst layer
comprises simultaneously supplying the first and second materials
onto the co-catalyst layer.
14. The method of claim 1, further comprising processing the
graphene layer, the catalyst layer, and the co-catalyst layer into
a wiring.
15. The method of claim 1, wherein the oxidization treatment
comprises exposing a surface of the catalyst layer to oxygen.
16. The method of claim 1, wherein the oxidization treatment
comprises heating the catalyst layer in an oxidizing
atmosphere.
17. The method of claim 1, wherein the reduction treatment
comprises using hydrogen or ammonia as a reducing agent.
18. The method of claim 1, wherein the oxidization treatment and
the reduction treatment are performed in a same apparatus.
19. The method of claim 16, wherein the graphene layer is formed in
the same apparatus.
20. The method of claim 1, further comprising forming a protective
film on the graphene layer.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is based upon and claims the benefit of
priority from Japanese Patent Application No. 2012-036377, filed
Feb. 22, 2012, the entire contents of which are incorporated herein
by reference.
FIELD
[0002] Embodiments described herein relate generally to a method
for manufacturing a semiconductor device
BACKGROUND
[0003] In recent years, the miniaturization of a wiring has
advanced in an LSI wiring structure, which arises problems such as
an increasing of electric resistivity caused by interfacial
inelastic scattering of electrons, an increasing of current
density, and a reliability degradation by stress migration or
electromigration.
[0004] Although copper that is of a low-resistance material is
mainly used as an LSI wiring material, the problems still arises
with the advance of microfabrication of the wiring structure.
[0005] Therefore, it is studied that graphene is used as the LSI
wiring material. It is well known that quantized conductance (what
is called Ballistic conductance) is generated in the graphene, and
the graphene is expected to be an extremely low resistance material
as an alternative to the existing metallic material. In the
quantized conductance, because the electron is hardly affected by
an interfacial scattering effect, the increase in resistance caused
by the interfacial scattering effect is hardly generated even in
the microfabrication of the wiring structure.
[0006] However, for polycrystalline graphene having a small grain
diameter, a large number of crystal defects, such as a grain
boundary, exist in the graphene. In this case, possibly a wiring
resistance increases in the microfabrication of the wiring
structure because the electron scatters in crystal defects, such as
the grain boundary. Accordingly, there is a need to form the high
quality graphene in which the number of crystal defects decreases
as few as possible. However, in the related art, growth of the
graphene is hardly controlled such that the number of crystal
defects decreases.
BRIEF DESCRIPTION OF THE DRAWINGS
[0007] FIG. 1 is a sectional view illustrating a configuration of a
semiconductor device according to a first embodiment;
[0008] FIG. 2 is a conceptual view of a six-membered ring of a
catalyst layer and a six-membered ring of a graphene layer formed
thereon when the six-membered rings are viewed from above a surface
of the semiconductor substrate;
[0009] FIG. 3A is an explanatory view illustrating a (111) plane of
a face-centered cubic structure, and FIG. 3B is an explanatory view
illustrating a (002) plane of a hexagonal close-packed
structure;
[0010] FIG. 4 is a sectional view illustrating a method for
manufacturing a semiconductor device according to the first
embodiment;
[0011] FIG. 5 is a sectional view illustrating the method for
manufacturing the semiconductor device following FIG. 4;
[0012] FIG. 6 is a sectional view illustrating the method for
manufacturing the semiconductor device following FIG. 5;
[0013] FIG. 7A is a graph illustrating a Raman spectroscopy result
of a graphene layer, and FIG. 7B is a graph illustrating a G/D
ratio to a peak height of the (111) plane of the face-centered
cubic structure and the (002) plane of the hexagonal close-packed
structure by XRD (X-ray Diffraction) method;
[0014] FIGS. 8A, 8B, 8C, 8D, and 8E are sectional views
illustrating configuration examples of the co-catalyst layer of
first or second embodiments;
[0015] FIG. 9 is a conceptual view of the six-membered ring of the
catalyst layer and the six-membered ring of the graphene layer
formed thereon when the six-membered rings are viewed from above
the surface of the semiconductor substrate;
[0016] FIG. 10 is a sectional view illustrating the method for
manufacturing the semiconductor device following FIG. 6;
[0017] FIG. 11 is a sectional view illustrating the method for
manufacturing the semiconductor device following FIG. 10;
[0018] FIG. 12 is a sectional view illustrating the method for
manufacturing the semiconductor device following FIG. 11;
[0019] FIG. 13 is a sectional view illustrating the method for
manufacturing the semiconductor device following FIG. 12;
[0020] FIG. 14 is a sectional view illustrating the method for
manufacturing the semiconductor device following FIG. 13;
[0021] FIG. 15 is a sectional view illustrating the method for
manufacturing the semiconductor device following FIG. 14;
[0022] FIG. 16 is a sectional view illustrating the method for
manufacturing the semiconductor device following FIG. 15;
[0023] FIG. 17 is a sectional view illustrating the method for
manufacturing the semiconductor device following FIG. 16;
[0024] FIG. 18 is a sectional view illustrating a method for
forming a damascene wiring using co-catalyst layer, catalyst layer
and the graphene layer of an embodiment;
[0025] FIG. 19 is a sectional view illustrating the method for
forming the damascene wiring following FIG. 18;
[0026] FIG. 20 is a sectional view illustrating a damascene wiring
forming method using co-catalyst layer and catalyst layer of an
embodiment;
[0027] FIG. 21 is a sectional view illustrating the method for
forming the damascene wiring following FIG. 20;
[0028] FIG. 22 is a view schematically illustrating the catalyst
layer with a surface oxidized;
[0029] FIG. 23 is a view schematically illustrating the catalyst
layer with surface oxidized and reduced;
[0030] FIG. 24 is a sectional view illustrating a method for
manufacturing a semiconductor device according to a fourth
embodiment;
[0031] FIG. 25 is a sectional view illustrating method for
manufacturing a semiconductor device following FIG. 24; and
[0032] FIG. 26 is a sectional view illustrating another method for
manufacturing a semiconductor device.
DETAILED DESCRIPTION
[0033] Hereinafter, embodiments will be described with reference to
the drawings.
[0034] In general, according to one embodiment, a method for
manufacturing a semiconductor device includes forming a co-catalyst
layer above a surface of a semiconductor substrate.
[0035] The co-catalyst layer includes a face-centered cubic
structure or a hexagonal close-packed structure, or an amorphous
structure or a microcrystalline structure, wherein the co-catalyst
layer is formed such that a (111) face of the face-centered cubic
structure or a (002) face of the hexagonal close-packed structure
is to be oriented parallel to the surface of the semiconductor when
the co-catalyst layer have the face-centered cubic structure or the
hexagonal close-packed structure.
[0036] The method further includes forming a catalyst layer on the
co-catalyst layer. The catalyst layer includes a face-centered
cubic structure or a hexagonal close-packed structure, or an
amorphous structure or a microcrystalline structure, wherein the
catalyst layer is formed such that a (111) face of the
face-centered cubic structure or a (002) face of the hexagonal
close-packed structure is to be oriented parallel to the surface of
the semiconductor when the catalyst layer has the face-centered
cubic structure or the hexagonal close-packed structure, the
catalyst layer including a portion which contacts the co-catalyst
layer, the portion including the face-centered cubic structure or
the hexagonal close-packed structure, or the amorphous structure or
the microcrystalline structure.
[0037] The method further includes planarizing an exposed surface
of the catalyst layer by applying an oxidation treatment to the
catalyst layer, and by applying a reduction treatment to the
catalyst layer to which the oxidation treatment is applied; and
forming a graphene layer on the catalyst layer.
First Embodiment
[0038] FIG. 1 is a sectional view illustrating a configuration of a
semiconductor device according to a first embodiment. In the
following drawings, a portion corresponding to an already-described
drawing is designated by the same numeral as the already-described
drawing, and the detailed description is omitted.
[0039] The semiconductor device of the first embodiment comprises a
semiconductor substrate 10, inter-layer insulators 15, 20, and 80,
a contact plug 30, and a wiring 70. The semiconductor substrate 10
is, for example, a silicon substrate.
[0040] The inter-layer insulators 15, 20, and 80 comprises, for
example, insulating films such as silicon oxide films or silicon
nitride films. The contact plug 30 is, for example, made of
conductive materials such as copper, tungsten, or aluminum. The
contact plug 30 penetrates the inter-layer insulators 15 and 20 to
contact the semiconductor substrate 10.
[0041] The wiring 70 is a stacked film of a co-catalyst layer 40, a
catalyst layer 50, and a graphene layer 60. The co-catalyst layer
40 is provided on the inter-layer insulator 20 and the contact plug
30, which are provided on a surface of the semiconductor substrate
10. The co-catalyst layer 40 is made of a material having a
face-centered cubic structure, or a hexagonal close-packed
structure.
[0042] For example, the co-catalyst layer 40 is a single-layer film
made of a material selected from a group consisting of Ti, Cu, Zn,
Zr, Ru, Rh, Pd, Ag, Hf, Re, Ir, Pt, and Au, a single-layer film
made of a nitride of the material selected from the group, a
single-layer film made of an alloy containing at least two
materials selected from the group, or a stacked film made of at
least two materials selected from a group consisting of Ti, Cu, Zn,
Zr, Ru, Rh, Pd, Ag, Hf, Re, Ir, Pt, Au, a nitride thereof, and an
alloy containing at least the two above metals.
[0043] For example, TiN, Cu, and Pt have a face-centered cubic
structure, and Ti, Zn, and Ru have a hexagonal close-packed
structure. Further, a TaN film can be used as the co-catalyst layer
40. Films containing the following metallic materials may be used
as the co-catalyst layer 40.
[0044] For example, the co-catalyst layer 40 is a stacked film of a
TiN film (upper layer) and the TaN film (lower layer), a stacked
film of the TiN film (upper layer) and a Ti film (lower layer), a
stacked film including an Ir layer as the uppermost layer, a Ti
single-layer film, a TiN single-layer film, and a TaN single-layer
film. Those films are formed by PVD (Physical Vapor Deposition)
method or CVD (Chemical Vapor Deposition) method. The upper layer
is a layer close to the catalyst layer 50 and the graphene layer
60, and the lower layer is a layer close to the semiconductor
substrate 10.
[0045] In the case that the co-catalyst layer 40 has the
face-centered cubic structure while a (111) plane of the
co-catalyst layer 40 is oriented so as to be parallel to the
surface of the semiconductor substrate 10, or in the case that the
co-catalyst layer 40 has the hexagonal close-packed structure while
a (002) plane of the co-catalyst layer 40 is oriented so as to be
parallel to the surface of the semiconductor substrate 10, the
catalyst layer 50 is oriented such that the (111) plane of the
face-centered cubic structure, or the (002) plane of the hexagonal
close-packed structure is parallel to the surface of the
semiconductor substrate 10.
[0046] The catalyst layer 50 is provided on the co-catalyst layer
40, and made of a material having the face-centered cubic
structure, or the hexagonal close-packed structure. For example,
the catalyst layer 50 is a single-layer film made of a material
selected from a group consisting of Ni, Co, and Fe, a single-layer
film made of a nitride of the material selected from the group, a
single-layer film made of an alloy containing at least two
materials selected from the group, or a stacked film containing at
least two films made of different materials selected from a group
consisting of Ni and a nitride thereof, Co and a nitride thereof,
and Fe and a nitride thereof.
[0047] In the case that the co-catalyst layer 40 has the
face-centered cubic structure while the (111) plane of the
co-catalyst layer 40 is oriented so as to be parallel to the
surface of the semiconductor substrate 10, or in the case that
co-catalyst layer 40 has the hexagonal close-packed structure while
the (002) plane of the co-catalyst layer 40 is oriented so as to be
parallel to the surface of the semiconductor substrate 10, the
catalyst layer 50 is oriented such that the (111) plane of the
face-centered cubic structure, or the (002) plane of the hexagonal
close-packed structure is parallel to the surface of the
semiconductor substrate 10. Thereby, a graphene layer having a
small number of crystal defects and a large crystal grain can be
formed on the catalyst layer 50.
[0048] It is not necessary that the whole co-catalyst layer 40 have
the face-centered cubic structure, or the hexagonal close-packed
structure. In the co-catalyst layer 40, at least a portion that
contacts the catalyst layer 50 may have the face-centered cubic
structure, or the hexagonal close-packed structure. For example,
the co-catalyst layer 40 may be a stacked film of the TaN film
(upper layer) and the Ta film (lower layer).
[0049] The wiring 70 extends in a plane parallel to the surface of
the semiconductor substrate 10. The contact plug 30 penetrates the
inter-layer insulators 15 and 20 to electrically connect the
semiconductor substrate 10 and the wiring 70. A gap between the
contact plugs 30 adjacent to each other is filled with the
inter-layer insulators 15 and 20. A gap between the wirings 70
adjacent to each other is filled with the inter-layer insulator
80.
[0050] Because the graphene is hardly affected by the interfacial
scattering by virtue of the quantized conductance, the resistance
increase caused by the interfacial scattering effect is not
generated. Further, the graphene has an excellent heat-resistant
property, and the graphene can be applied to a semiconductor
manufacturing process at a high temperature that other metallic
materials cannot withstand.
[0051] It is considered that the graphene having the low resistance
and the excellent heat-resistant property is suitable for the
wiring of the LSI device. For example, the co-catalyst layer and
the catalyst layer, which are necessary for growth of the graphene,
are deposited after a surface portion of the lower-layer wiring is
planarized. Then the graphene layer may be grown on the catalyst
layer.
[0052] However, it is well known that crystallinity of the graphene
layer depends heavily on the catalyst layer which is an underlying
layer of the graphene layer. As described above, in the
polycrystalline graphene having the small grain diameter, the
electron scatters at the grain boundary, and the resistance
increases.
[0053] In the present embodiment, the surface (the face parallel to
the surface of the semiconductor substrate 10) of the catalyst
layer 50 is set to the (111) plane of the face-centered cubic
structure, or the (002) plane of the hexagonal close-packed
structure. That is, the surface on which the graphene is deposited
is set to the (111) plane of the face-centered cubic structure, or
the (002) plane of the hexagonal close-packed structure.
[0054] As illustrated in FIG. 2, the (111) plane of the
face-centered cubic structure, or the (002) plane of the hexagonal
close-packed structure has a structure similar to a crystal
structure of the graphene.
[0055] FIG. 2 is a conceptual view of a six-membered ring of the
catalyst layer 50 and a six-membered ring of the graphene layer 60
formed thereon when the six-membered rings are viewed from above
the surface of the semiconductor substrate 10. As illustrated in
FIG. 2, atoms 50a to 50g constituting the six-membered ring of the
catalyst layer 50 overlap positions of atoms 60a to 60g in atoms
constituting three six-membered rings of the graphene layer 60.
Accordingly, it is found that the graphene layer 60 having a small
number of crystal defects is easily formed on the catalyst layer
50.
[0056] Table 1 illustrates a lattice mismatch degree between the
catalyst layer 50 and the graphene layer 60 with respect to various
materials for the catalyst layer 50. The lattice mismatch degree is
defined as follows.
[0057] Assuming that A (reference) is a distance (about 0.246 nm)
between second near neighbor atoms of the six-membered ring in the
graphene layer 60 and B is a distance between near neighbor atoms
of the (111) plane of the face-centered cubic structure, or the
(002) plane of the hexagonal close-packed structure of the catalyst
layer 50, the lattice mismatch degree is defined as 100(B-A)/A
[%].
TABLE-US-00001 TABLE 1 Distance Crystal between Lattice structure
neighboring mismatch measurement Direction atoms B degree Ni fcc
(111) 0.2491 1.10% CoNi.sub.3 fcc (111) 0.2495 1.26% Co hcp (002)
0.2497 1.34% Cu.sub.0.87Si.sub.0.13 hcp (002) 0.2507 1.75%
Mn.sub.0.3Fe.sub.0.7 hcp (002) 0.252 2.27% Co fcc (111) 0.2521
2.31% Cu fcc (111) 0.2556 3.73% Fe fcc (111) 0.2577 4.59%
TaNi.sub.3 hcp (002) 0.2585 4.91% RuCo hcp (002) 0.261 5.93%
Al.sub.0.3Ge.sub.0.7 hcp (002) 0.2617 6.21% Zn hcp (002) 0.2665
8.16% Ru hcp (002) 0.2704 9.74%
[0058] Referring to FIG. 2, for example, in the case that Ni is
used as the catalyst-layer material, because a difference between
the distance (0.249 nm) between the near neighbor atoms of the
(111) plane of the face-centered cubic structure and the distance
(0.246 nm) between the second near neighbor atoms of the
six-membered ring of the graphene layer 60 is as small as about
1.1%, the graphene layer 60 having the small number of crystal
defects is easily formed on the catalyst layer 50.
[0059] More particularly, for example, a G/D ratio measurement of
Raman spectroscopy shows that the graphene layer 60 having the
small number of crystal defects is easily formed on the catalyst
layer 50 in the case that the difference between the distance
between the near neighbor atoms of the catalyst layer 50 and the
distance between the second near neighbor atoms of the six-membered
ring of the graphene layer 60 is less than or equal to 9%,
desirably 5%. On the other hand, the graphene having a sufficient
domain was not able to be observed on Ru, in which the difference
is greater than 9%, from the G/D ratio measurement of the Raman
spectroscopy.
[0060] For example, the catalyst layer 50 is a single-layer film
made of a material selected from a group consisting of Ni, Co, and
Fe, a single-layer film made of a nitride of the material selected
from the group, a single-layer film made of an alloy containing at
least two materials selected from the group, or a stacked film
containing at least two films made of different materials selected
from a group consisting of Ni and a nitride thereof, Co and a
nitride thereof, and Fe and a nitride thereof.
[0061] Basically Ni, Co, and Fe that are of the catalyst materials
form complete solid solution. In an alloy containing at least two
kinds of catalyst elements, a whole interatomic distance of the
alloy can be controlled. Accordingly, the graphene can well be
grown by use of the catalyst layer containing at least two kinds of
catalyst elements.
[0062] FIG. 3A is an explanatory view illustrating the (111) plane
of the face-centered cubic structure, and FIG. 3B is an explanatory
view illustrating the (002) plane of the hexagonal close-packed
structure. The (111) plane of the face-centered cubic structure is
identical to the (002) plane of the hexagonal close-packed
structure in an atomic arrangement. This can be seen when the (002)
plane in FIG. 2 is extended to consider a lattice arrangement in a
long period.
[0063] According to the present embodiment, the co-catalyst layer
40 has the (111) plane of the face-centered cubic structure, or the
(002) plane of the hexagonal close-packed structure, and the (111)
plane or the (002) plane is parallel to the surface of the
semiconductor substrate 10. Thereby, the upper surface of the
co-catalyst layer 40, on which the catalyst layer 50 is deposited,
constitutes the (111) plane of the face-centered cubic structure,
or the (002) plane of the hexagonal close-packed structure, the
(111) plane of the catalyst layer 50 is oriented in parallel to the
surface of the semiconductor substrate 10 in the case that the
catalyst layer 50 has the face-centered cubic structure, and the
(002) plane of the catalyst layer 50 is oriented in parallel to the
surface of the semiconductor substrate 10 in the case that the
catalyst layer 50 has the hexagonal close-packed structure.
[0064] Further, the upper surface of the catalyst layer 50, on
which the graphene layer 60 is deposited, constitutes the (111)
plane of the face-centered cubic structure, or the (002) plane of
the hexagonal close-packed structure. Therefore, the graphene layer
60 having the small number of crystal defects may easily be grown
on the catalyst layer 50.
[0065] Similarly to the conceptual view in FIG. 2, FIG. 9
illustrates the co-catalyst layer in the stacked structure. As can
be seen from FIG. 9, the better orientation is obtained because of
a good lattice matching degree among the co-catalyst layer, the
catalyst layer, and the graphene layer.
[0066] Table 2 illustrates a lattice mismatch degree between the
co-catalyst layer 40 and the graphene layer 60 with respect to
various materials for the co-catalyst layer 40. The lattice
mismatch degree is defined as follows.
[0067] Assuming that A' (reference) is a distance (about 0.285 nm)
between third near neighbor atoms of the six-membered ring of the
graphene layer 60 and B' is a distance between the near neighbor
atoms of the (111) plane of the face-centered cubic structure, or
the (002) plane of the hexagonal close-packed structure of the
co-catalyst layer 40, the lattice mismatch degree is defined as
100(B'-A')/A' [%].
TABLE-US-00002 TABLE 2 Distance Crystal between Lattice structure
neighboring mismatch measurement Direction atoms B' degree WN fcc
(111) 0.2491 1.10% Ti fcc (111) 0.2495 1.26% TiO.sub.0.2 hcp (002)
0.2497 1.34% TiN hcp (002) 0.2507 1.75% TaN hcp (002) 0.252 2.27%
TaO fcc (111) 0.2521 2.31%
[0068] The lattice mismatch degrees between the co-catalyst layers
made of the materials in Table 2 and the graphene layer are less
than or equal to 10%, and sometimes the lattice mismatch degree is
less than or equal to 4% in some materials. The higher-quality
(less defective) graphene layer can be obtained by reducing not
only the lattice mismatch degree between the co-catalyst layer and
the graphene layer but also the lattice mismatch degree between the
co-catalyst layer and the graphene layer. Thereby, the wiring
(graphene wiring) including the lower-resistance graphene layer can
be formed.
[0069] FIGS. 4 to 6 are sectional views illustrating a method for
manufacturing a semiconductor device according to the first
embodiment.
[0070] At first, semiconductor elements (not illustrated), such as
a transistor and a capacitor, are formed on the semiconductor
substrate 10. Then the inter-layer insulators 15 and 20 are
deposited on the semiconductor substrate 10. For example, the
inter-layer insulators 15 and 20 are a TEOS (Tetra Ethyl Ortho
Silicate) film. Then the contact plug 30 is formed so as to
penetrate the inter-layer insulators 15 and 20 to contact the
semiconductor substrate 10.
[0071] The material of contact plug 30 is, for example, copper,
tungsten, and aluminum. The contact plug 30 is polished by a CMP
(Chemical Mechanical Polishing) method until the upper surface of
the inter-layer insulator 20 is exposed. Thereby, the structure in
FIG. 4 is obtained.
[0072] The co-catalyst layer (not illustrated) may be formed
between the contact plug 30 and the semiconductor substrate 10 in
order to prevent a metal used for the contact plug 30 from
diffusing into the semiconductor substrate 10. The material of the
co-catalyst layer may be, for example, Ta, Ti, Ru, Mn, Co, and a
nitride thereof.
[0073] Then, the wiring including the graphene layer 60 is formed
on the contact plug 30 and the inter-layer insulator 20.
[0074] First, by using the PVD method or the CVD method, the TaN
film having thicknesses of about 1 nm to 20 nm is deposited as the
co-catalyst layer 40 on the inter-layer insulator 20 and the
contact plug 30.
[0075] As described above, the co-catalyst layer 40 may be the
single-layer film made of a material selected from the group
consisting of Ti, Cu, Zn, Zr, Ru, Rh, Pd, Ag, Hf, Re, Ir, Pt, and
Au, the single-layer film made of the nitride of the material
selected from the group, the single-layer film made of the alloy
containing at least two materials selected from the group, or the
stacked film made of at least two materials selected from a group
consisting of Ti, Cu, Zn, Zr, Ru, Rh, Pd, Ag, Hf, Re, Ir, Pt, Au, a
nitride thereof, and the alloy containing at least the two above
metals.
[0076] Further, the film containing the following metallic
materials may be used as the co-catalyst layer 40. For example, the
co-catalyst layer 40 is a stacked film of the TaN film (upper
layer) and the Ta film (lower layer), a stacked film of the TiN
film (upper layer) and the TaN film (lower layer), a stacked film
of the TiN film (upper layer) and the Ti film (lower layer), a
stacked film in which the Ir film is included in the uppermost
layer (for example, a stacked film including the Ta film, the Ru
film, and the Ir film lower from the lower layer), a stacked film
of the Ta film and the Ru film, a Ti single-layer film, a TiN
single-layer film, or a TaN single-layer film. The films are formed
by PVD method or CVD method.
[0077] Those materials have the face-centered cubic structure, or
the hexagonal close-packed structure. Accordingly, from the
viewpoint of surface energy, the co-catalyst layer 40 is deposited
on the inter-layer insulator 20 and the contact plug 30 such that
the (111) plane of the face-centered cubic structure, or the (002)
plane of the hexagonal close-packed structure, which is of a
close-packed surface, is oriented in parallel to the surface of the
semiconductor substrate 10.
[0078] Then, by using PVD method, Co having thicknesses of about 1
nm to 50 nm is deposited as the material for the catalyst layer 50
on the co-catalyst layer 40. As described above, the catalyst layer
50 may be the single-layer film made of the material selected from
the group consisting of Ni, Co, and Fe, the single-layer film made
of the nitride of the material selected from the group, the
single-layer film made of the alloy containing at least two
materials selected from the group, or the stacked film containing
at least two films made of different materials selected from a
group consisting of Ni and the nitride thereof, Co and the nitride
thereof, and Fe and the nitride thereof.
[0079] The materials have the face-centered cubic structure, or the
hexagonal close-packed structure. Accordingly, the catalyst layer
50 is also deposited such that the (111) plane of the face-centered
cubic structure, or the (002) plane of the hexagonal close-packed
structure is oriented in parallel to the surface of the
semiconductor substrate 10. At this point, the co-catalyst layer 40
is deposited such that the (111) plane of the face-centered cubic
structure, or the (002) plane of the hexagonal close-packed
structure is oriented in parallel to the surface of the
semiconductor substrate 10. Therefore, the catalyst layer 50 in
which the (111) plane of the face-centered cubic structure, or the
(002) plane of the hexagonal close-packed structure is strongly
oriented in parallel to the surface of the semiconductor substrate
10 than ever before can be obtained. As a result, the structure in
FIG. 5 is obtained.
[0080] Thus, in the present embodiment, by using the co-catalyst
layer 40 in which the (111) plane of the face-centered cubic
structure, or the (002) plane of the hexagonal close-packed
structure is oriented so as to be parallel to the surface of the
semiconductor substrate 10, the catalyst layer 50 can intentionally
be oriented such that the (111) plane of the face-centered cubic
structure, or the (002) plane of the hexagonal close-packed
structure of the catalyst layer 50 is parallel to the surface of
the semiconductor substrate.
[0081] Then, as illustrated in FIG. 6, the graphene layer 60 is
grown on the catalyst layer 50. The forming of the graphene layer
60 is performed, for example, by using CVD method. As the source of
carbon in the CVD method, hydrocarbon system gas such as methane,
acetylene, or mixed gases thereof may be used, and hydrogen or rare
gases are used as a carrier gas. As to a temperature at which the
graphene layer 60 is formed, an upper limit is about 1000.degree.
C. and a lower limit is about 200.degree. C. The forming
temperature is, for example, about 600.degree. C. In order to
remove ions and electrons by using remote plasma, an electrode may
be placed above the semiconductor substrate 10 to apply a voltage.
The applied voltage for forming the graphene layer 60 is in a range
of 0 to .+-.100 V.
[0082] A metallic film or an insulating film may be formed as a
protective film on the graphene layer 60. For example, the metallic
film is formed by a sputtering method. For example, the insulating
film is formed by CVD method or application method.
[0083] Thereafter, by using lithography technique and RIE (Reactive
Ion Etching) method, the graphene layer 60, the catalyst layer 50,
and the co-catalyst layer 40 are processed to form the wiring 70 in
FIG. 1. Further, the material for the inter-layer insulator 80 is
deposited by CVD method, and the material for the inter-layer
insulator 80 is planarized by CMP method, thereby obtaining the
structure in FIG. 1. A multilayer wiring structure may be formed by
using the graphene layer. Alternatively, the conventional wiring
using W, Cu, Al may be formed on the wiring 70.
[0084] Thus, the semiconductor device of the present embodiment is
completed.
[0085] FIG. 7A is a graph illustrating a Raman spectroscopy result
of the graphene layer 60. FIG. 7B is a graph illustrating a G/D
ratio to a peak height of the (111) plane of the face-centered
cubic structure, or the (002) plane of the hexagonal close-packed
structure of the catalyst layer 50 by XRD (X-ray Diffraction)
method.
[0086] Peak positions of a D band Bd and a G band Bg are
illustrated in the graph in FIG. 7A.
[0087] The D band Bd is a band in which emission is generated by
the crystal defect of the graphene. The G band Bg is a band in
which the emission is generated by the six-membered ring of the
graphene.
[0088] Accordingly, the defect existing in the graphene
(polycrystalline) can be checked by the peak of the D band Bd in
Raman spectrum. It can be interpreted that the number of crystal
defects existing in the graphene increases with increasing peak of
the D band Bd. On the other hand, it can be interpreted that few
crystal defects exist in the graphene when the D band Bd has the
low peak.
[0089] Further, the existence or non-existence of the graphene can
be checked by the G band Bg of the Raman spectrum. It can be
interpreted that the number of pieces of formed graphene increases
with increasing peak of the G band Bg. On the other hand, it can be
interpreted that few pieces of graphene exist when the G band Bg
has the low peak.
[0090] Accordingly, a height ratio between the peaks of the D band
Bd and the G band Bg, namely, the G/D ratio is used as one of
indicators expressing the quality of the graphene. The G/D ratio is
a ratio (G/D) between the peaks of the D band Bd and the G band Bg
in the Raman spectrum of a visible Raman spectroscopic analysis
with incident light having a wavelength of 532 nm. It is said that
the less defective graphene is formed with increasing G/D
ratio.
[0091] A sample used in the XRD method in FIG. 7B has a structure,
in which the co-catalyst layer 40 made of TiN is deposited with
thicknesses of about 10 nm to 15 nm, the catalyst layer 50 made of
Co is deposited with the thickness of about 30 nm on the
co-catalyst layer 40, and the graphene layer 60 is deposited on the
catalyst layer 50 by the CVD method.
[0092] The (111) plane of the face-centered cubic structure, or the
(002) plane of the hexagonal close-packed structure of the catalyst
layer 50 of the sample is analyzed by XRD method.
[0093] The peak of the (111) plane of the face-centered cubic
structure, or the (002) plane of the hexagonal close-packed
structure emerges largely, when the (111) plane of the
face-centered cubic structure, or the (002) plane of the hexagonal
close-packed structure is parallel to the surface of the
semiconductor substrate 10, and when the ratio of the (111) plane
of the face-centered cubic structure, or the (002) plane of the
hexagonal close-packed structure to the plane of the semiconductor
substrate 10 increases.
[0094] As illustrated in FIG. 7B, the XRD analysis of the catalyst
layer 50 shows that the G/D ratio tends to increase with increasing
peak height of the (111) plane of the face-centered cubic
structure, or the (002) plane of the hexagonal close-packed
structure. That is, as the peak height of the (111) plane of the
face-centered cubic structure, or the (002) plane of the hexagonal
close-packed structure increases in the XRD analysis of the
catalyst layer 50, the graphene grown on the catalyst layer 50 is
the high quality and less defective. In other words, the graphene
layer 60 with high quality is obtained when the (111) plane of the
face-centered cubic structure, or the (002) plane of the hexagonal
close-packed structure of the catalyst layer 50 is set parallel to
the surface of the semiconductor substrate 10.
[0095] For example, in the catalyst layer 50 of the sample Rb in
FIGS. 7A and 7B, the peak height of the (111) plane of the
face-centered cubic structure, or the (002) plane of the hexagonal
close-packed structure is less than or equal to 100 cps (counts per
second), and the G/D ratio is about 1.2. On the other hand, in the
catalyst layer 50 of the sample Ra, the peak height of the (111)
plane of the face-centered cubic structure, or the (002) plane of
the hexagonal close-packed structure of the catalyst layer 50 is
greater than or equal to 1000 cps, and the G/D ratio is about 2.3.
Therefore, it is found that the G/D ratio of the graphene layer 60
increases with increasing peak height of the (111) plane of the
face-centered cubic structure, or the (002) plane of the hexagonal
close-packed structure of the catalyst layer 50.
[0096] Desirably the (111) plane of the face-centered cubic
structure, or the (002) plane of the hexagonal close-packed
structure of the catalyst layer 50 has the peak height sufficiently
higher (for example, at least ten times) than other peak heights
(for example, the XRD measurement peak caused by the (001) plane of
the face-centered cubic structure) of other planes.
[0097] According to the present embodiment, the co-catalyst layer
40 has the (111) plane of the face-centered cubic structure, or the
(002) plane of the hexagonal close-packed structure, and the (111)
plane or the (002) plane is parallel to the surface of the
semiconductor substrate 10. Thereby, the (111) plane of the
catalyst layer 50 is oriented in parallel to the surface of the
semiconductor substrate 10 when the catalyst layer 50 has the
face-centered cubic structure, and the (002) plane of the catalyst
layer 50 is oriented in parallel to the surface of the
semiconductor substrate 10 when the catalyst layer 50 has the
hexagonal close-packed structure.
[0098] Moreover, the upper surface of the catalyst layer 50 on
which the graphene layer 60 is deposited constitutes the (111)
plane of the face-centered cubic structure, or the (002) plane of
the hexagonal close-packed structure, so that the low-resistivity
graphene layer 60 having the small number of crystal defects may
easily be grown on the catalyst layer 50.
[0099] Therefore, by adopting the structure of
co-catalyst/catalyst/graphene of the embodiment, the electron
scattering in a defect portion can be suppressed even if the device
element further miniaturizes, thereby the semiconductor device
comprising a graphene having a high quality with lower resistivity
than ever before can be realized.
Second Embodiment
[0100] In the first embodiment, the co-catalyst layer 40 is
oriented such that the (111) plane of the co-catalyst layer 40 is
parallel to the surface of the semiconductor substrate 10 when the
co-catalyst layer 40 has the face-centered cubic structure, and the
co-catalyst layer 40 is oriented such that the (002) plane of the
co-catalyst layer 40 is parallel to the surface of the
semiconductor substrate 10 when the co-catalyst layer 40 has the
hexagonal close-packed structure.
[0101] However, the co-catalyst layer 40 may be made of a metal
having neither the face-centered cubic structure nor the hexagonal
close-packed structure.
[0102] For example, the co-catalyst layer 40 may be a single-layer
film made of a material selected from a group consisting of V, Cr,
Mn, Nb, Mo, Ta, and W, which have a body-centered cubic structure,
a single-layer film made of a nitride of the material selected from
the group, a single-layer film made of an alloy containing at least
two materials selected from the group, or a stacked film made of at
least two materials selected from a group consisting of V, Cr, Mn,
Nb, Mo, Ta, W, a nitride thereof, and an alloy containing at least
the two above metals. It is noted that WN belongs to the
co-catalyst layer 40 of the first embodiment because WN has the
face-centered cubic structure, or the hexagonal close-packed
structure.
[0103] In this case, preferably the co-catalyst layer 40 is in an
amorphous shape, namely, an amorphous structure, or a
microcrystalline structure. It is not necessary that the whole
co-catalyst layer 40 have the amorphous structure, or the
microcrystalline structure. In the co-catalyst layer 40, at least a
portion that contacts a catalyst layer 50 may have the amorphous
structure, or the microcrystalline structure.
[0104] Generally, it is well known that a metal preferentially
oriented toward a most stable plane in the case that the metal is
deposited on the underlying layer having the amorphous structure,
or the microcrystalline structure. In the present embodiment, the
co-catalyst layer having the amorphous structure, or the
microcrystalline structure is formed by utilizing the above
characteristic, and the catalyst layer is oriented toward the (111)
plane of the face-centered cubic structure, or the (002) plane of
the hexagonal close-packed structure. Accordingly, when the
catalyst layer 50 has the face-centered cubic structure, or the
hexagonal close-packed structure, even if the catalyst layer 50 is
deposited on the co-catalyst layer 40 made of the metal having the
amorphous structure, or the microcrystalline structure, the (111)
plane of the face-centered cubic structure, or the (002) plane of
the hexagonal close-packed structure of the catalyst layer 50 may
be oriented so as to be parallel to the surface of the
semiconductor substrate 10.
[0105] Thereby, similarly to the first embodiment, the high quality
graphene layer 60 having the high G/D ratio and the small number of
crystal defects can be formed on the catalyst layer 50. In the
second embodiment, other configurations are identical to those of
the first embodiment. In the second embodiment, other manufacturing
methods are identical to those of the first embodiment.
Accordingly, in the second embodiment, the same effect as the first
embodiment can be obtained.
[0106] FIGS. 8A to 8E are sectional views illustrating
configuration examples of the co-catalyst layer 40 of the first or
second embodiments.
[0107] FIG. 8A illustrates a stacked film of the Ti film and the
TiN film. The Ti film is formed so as to have the hexagonal
close-packed structure, and the TiN film is formed so as to have
the face-centered cubic structure.
[0108] FIG. 8B illustrates a stacked film of the Ta film and the
TaN (tantalum nitride) film. A small amount of impurity is mixed in
the Ta film in the case that the Ta film is formed by bias
sputtering method that is PVD method, or by CVD method. For the CVD
method, for example, the small amount of impurity contains carbon
in an organic source. As a result, the Ta film having the amorphous
structure, or the microcrystalline structure may be formed.
[0109] The TaN film having the face-centered cubic structure, or
the TaN film having the amorphous structure or the microcrystalline
structure may be formed on the Ta film. The latter TaN film will be
described in detail below.
[0110] TaxNy may be, for example, Ta, Ta.sub.2N, and TaN according
to a tantalum composition (x) and a nitrogen composition (y). In
the case that the TaN film is formed on the Ta film, the TaN film
can be formed as a mixed layer containing at least one of Ta,
Ta.sub.2N, and TaN. Therefore, the TaN film in which at least the
upper-surface portion has the amorphous structure, or the
microcrystalline structure may be formed on the Ta film. The
co-catalyst layer having the above structure may be used. The
catalyst layer on the co-catalyst layer is preferentially oriented
toward a crystal plane (the (111) plane of the face-centered cubic
structure and the (002) plane of the hexagonal close-packed
structure) of the crystal structure, on which the graphene layer is
easily formed. The high quality graphene layer is formed on the
catalyst layer.
[0111] FIG. 8C illustrates a single-layer film of Ta. The Ta film
is formed so as to have the amorphous structure. FIG. 8D
illustrates a single-layer film of TaN. The TaN film is formed so
as to have the face-centered cubic structure. FIG. 8E illustrates a
stacked film of the TaN film and the TiN film. The TaN film and the
TiN film are formed so as to have the face-centered cubic
structure.
[0112] The catalyst layer 50 is formed on the co-catalyst layer 40
made of the above materials such that the (111) plane of the
face-centered cubic structure of the catalyst layer 50 is oriented
so as to be parallel to the surface of the semiconductor substrate
10, or such that the (002) plane of the hexagonal close-packed
structure is oriented so as to be parallel to the surface of the
semiconductor substrate 10. Thereby, the graphene layer 60 may
easily be formed on the catalyst layer 50.
[0113] Therefore, by adopting the structure of
co-catalyst/catalyst/graphene of the embodiment, the electron
scattering in a defect portion can be suppressed even if the device
element further miniaturizes, thereby the semiconductor device
comprising a graphene having a high quality with lower resistivity
than ever before can be realized.
[0114] The following merits can be obtained by adopting the
structures capable of orienting the co-catalyst layer and the
catalyst layer which are mentioned in the first and second
embodiments.
[0115] A first merit is that the number of defects of the grown
graphene can decrease, and therefore a domain of the graphene can
enlarge.
[0116] A second merit is that the structures of the first and
second embodiments are useful for controlling a starting point of
the graphene growth. Particularly, in the case that the growth is
performed at a temperature of 600.degree. C. or the like, it is
considered that the graphene is grown from not the surface of the
catalyst layer but an edge portion of a facet of the catalyst
layer. For example, the (100) plane and the (110) plane of the
face-centered cubic structure are relatively stably formed as an
angle of a facet edge face with respect to the catalyst surface
oriented toward a (111) of the face-centered cubic structure. The
facet face is easily matched by controlling the orientation of the
catalyst layer. Basically, the graphene layer is easily formed only
by existence of convex and concave, and the angle of the graphene
layer is relatively homogenized by matching the orientation of the
catalyst layer with the orientation of the co-catalyst layer. For
example, the characteristic angles are about 34.5 degrees [an angle
formed by the (111) plane and the (110) plane)] and 54.7 degrees
[an angle formed by the (111) plane and the (100) plane)] with
respect to the (110) plane and the (100) plane, respectively. For
this point of view, it is necessary to control the orientation of
the catalyst layer on the co-catalyst layer (underlying layer).
[0117] In the first and second embodiments, the process is
performed after the catalyst layer and the graphene layer are
formed on the co-catalyst layer. Alternatively, the graphene layer
may be formed after the catalyst layer on the co-catalyst layer is
processed. Furthermore, the wiring having a damascene structure may
be formed, and then the co-catalyst layer, the catalyst layer, and
the graphene layer may be formed, in an addition, the insulating
film or the metallic film may be formed as the protective film of
the graphene layer, and thereafter, excess films out of the wiring
may be removed to form the wiring.
Third Embodiment
[0118] In the first and second embodiments, the semiconductor
device comprising the wiring (RIE wiring) formed by RIE method are
explained. In the present embodiment, a semiconductor device
comprising a wiring (damascene wiring) formed by damascene method
are explained.
[0119] First the structure in FIG. 4 is formed similarly to the
first embodiment.
[0120] Then, as illustrated in FIG. 10, a stopper film 85 that acts
as a stopper in forming a trench, and an inter-layer insulator 90
are formed in a region including an inter-layer insulator 20 and a
contact plug 30. The stopper film 85 is, for example, a SiN film,
or a SiCN film. In the present embodiment, the stopper film 85 is
the SiN film. The stopper film 85 may be eliminated. The
inter-layer insulator 90 may be a single-layer insulating film (for
example, a silicon nitride film, or a silicon oxide film), or a
stacked-slayer insulating film (for example, a stacked film of the
silicon nitride film, and the silicon oxide film).
[0121] Then, as illustrated in FIG. 11, the inter-layer insulator
90 is selectively etched by using photo lithography technique and
RIE method. Then the stopper film 85 is etched such that the
surface of the contact plug 30 is exposed. In this way, the wiring
trench is formed.
[0122] Then, as illustrated in FIG. 12, a co-catalyst layer 40 is
formed so as to cover the upper surface of the inter-layer
insulator 90 and a side surface and a bottom surface of the wiring
trench. In the present embodiment, the stacked film of the TiN film
(upper layer) and the Ti film (lower layer) is used as the
co-catalyst layer 40. In this case, as illustrated in FIG. 12, the
co-catalyst layer 40 is formed with good step coverage. There is no
particular limitation to a shape and an angle of a sidewall of the
wiring trench. For example, the angle of the sidewall of the wiring
trench is greater than or equal to 90.degree. and less than or
equal to 20.degree.. For the low angle, the wiring trench is formed
shallow to be able to ensure a trench step. Thereby, a short
between the adjacent wirings can be prevented even in the low
angle.
[0123] Then, as illustrated in FIG. 13, a catalyst layer 50 is
formed on the co-catalyst layer 40. The co-catalyst layer 40 may be
exposed to an atmosphere between the step of forming the
co-catalyst layer 40 and the step of forming the catalyst layer 50.
However, from the viewpoint of forming the higher quality catalyst
layer 50, desirably the co-catalyst layer 40 is maintained in a
vacuum.
[0124] Then, as illustrated in FIG. 14, after a pretreatment is
performed to the catalyst layer 50, a graphene layer 60 is formed
on the catalyst layer 50. For example, the pretreatment is a
treatment in which the remote plasma is generated using mixed
gases, such as Ar, H.sub.2, and N.sub.2. The pretreatment is
performed at temperatures of 200.degree. C. to 1000.degree. C., for
example, at 350.degree. C.
[0125] Similarly to the first embodiment, for example, CVD method
is adopted as the method for forming the graphene layer 60. In the
case that CVD method is adopted, hydrocarbon system gas such as
methane, acetylene, or mixed gases thereof may be used as the
carbon source, and hydrogen or rare gases are used as a carrier
gas. As to the temperature at which the graphene layer 60 is
formed, the upper limit is about 1000.degree. C. and the lower
limit is about 200.degree. C. As described above, for example, the
graphene layer 60 is formed at about 600.degree. C. Furthermore, in
order to remove ions and electrons by using the remote plasma, the
electrode may be placed above the semiconductor substrate 10, and
the voltage is applied to the electrode. As described above, for
example, the applied voltage ranges from 0 to .+-.100 V.
[0126] Then, as illustrated in FIG. 15, a protective film 110 is
formed on the graphene layer 60 such that the wiring trench is
filled with the protective film 110. For example, the protective
film 110 is an insulating film. In this case, for example, the
protective film 110 is formed by CVD method or application method.
The protective film 110 may be a metallic film. In this case, for
example, the protective film 110 is formed by sputtering
method.
[0127] Then, as illustrated in FIG. 16, the co-catalyst layer 40,
the catalyst layer 50, the graphene layer 60, and the protective
film 110, which are located out of the wiring trench, are removed
by CMP method to obtain the damascene wiring (the wiring including
the co-catalyst layer 40, the catalyst layer 50, and the graphene
layer 60).
[0128] Thereafter, the well-known processes are followed. For
example, as illustrated in FIG. 17, a step of forming a first
inter-layer insulator 120, a step of forming a second inter-layer
insulator 130, and a step of forming a wiring (for example, Cu
wiring, or W wiring) 140 connected to the damascene wiring are
followed.
[0129] In the present embodiment, similarly to the first
embodiment, the co-catalyst layer 40 on the bottom of the wiring
trench has the face-centered cubic structure or the hexagonal
close-packed structure, or the amorphous structure or the
microcrystalline structure. When the co-catalyst layer 40 has the
face-centered cubic structure, or the hexagonal close-packed
structure, the co-catalyst layer 40 is formed such that the (111)
plane of the face-centered cubic structure, or the (002) plane of
the hexagonal close-packed structure is oriented in parallel to the
surface of the semiconductor substrate 10.
[0130] Moreover, in the present embodiment, similarly to the first
embodiment, the catalyst layer 50 on the co-catalyst layer 40 has
the face-centered cubic structure, or the hexagonal close-packed
structure. When the catalyst layer 50 has the face-centered cubic
structure, or the hexagonal close-packed structure, the catalyst
layer 50 is formed such that the (111) plane of the face-centered
cubic structure, or the (002) plane of the hexagonal close-packed
structure is oriented in parallel to the surface of the
semiconductor substrate 10.
[0131] The co-catalyst layer 40 is formed on the bottom of the
wiring trench, and the catalyst layer 50 is formed on the
co-catalyst layer 40, so that the high quality graphene layer 60
having the low resistivity can be formed on the bottom of the
wiring trench. Thereby, even if the device element further
miniaturizes, the damascene wiring having the low resistance is
realized.
[0132] Another damascene wiring using the co-catalyst layer 40 and
the catalyst layer 50 of the present embodiment will be described
below.
[0133] FIGS. 18 and 19 illustrate a process for another damascene
wiring which does not use the protective film. In this example,
after the step in FIG. 13, the graphene layer 60 is formed such
that the wiring trench is filled with the graphene layer 60 (FIG.
18). Then, the co-catalyst layer 40, the catalyst layer 50, and the
graphene layer 60 outside of the wiring trench are removed by CMP
method to obtain the damascene wiring (FIG. 19).
[0134] FIGS. 20 and 21 illustrate a process for another damascene
wiring which uses the protective film. In this example, after the
step in FIG. 13, the graphene layer 60 is formed such that the
wiring trench is filled with the graphene layer 60, and then the
protective film 110 is formed on the graphene layer 60 (FIG. 20).
Then, the co-catalyst layer 40, the catalyst layer 50, the graphene
layer 60, and the protective film 110 outside of the wiring trench
are removed by CMP method to obtain the damascene wiring (FIG. 21).
A chemical solution treatment, RIE method, or down-flow etching
method may be used instead of CMP method, or chemical solution
treatment, RIE method, down-flow etching method, and CMP method may
properly be combined.
[0135] The damascene wiring of the present embodiment is connected
to the contact plug 30 of the lower layer. Alternatively, the
damascene wiring may be connected to the wiring (damascene wiring
or RIE wiring) of the lower layer. Moreover, the present embodiment
can also be applied to a wiring (dual damascene wiring) formed by
dual damascene method.
Fourth Embodiment
[0136] In the first embodiment, the co-catalyst layer 40 is
oriented such that the (111) plane of the face-centered cubic
structure is parallel to the surface of the semiconductor substrate
10 in the case that the co-catalyst layer 40 has the face-centered
cubic structure, and the co-catalyst layer 40 is oriented such that
the (002) plane of the hexagonal close-packed structure is parallel
to the surface of the semiconductor substrate 10 in the case that
the co-catalyst layer 40 has the hexagonal close-packed structure.
A treatment (pretreatment), which is performed to obtain the
characteristic (orientation) in a more desirable form before the
graphene layer is formed, will be described in the present
embodiment.
[0137] FIG. 22 is a view schematically illustrating a catalyst
layer 50 (a catalyst layer 50 to which an oxidizing treatment is
already performed) in the case that the surface of the catalyst
layer 50 is oxidized after the catalyst layer 50 made of Co is
formed on a co-catalyst layer 40. FIG. 22 also illustrates an
enlarged portion of oxidized region 50ox on the surface of the
catalyst layer 50. In FIG. 22, the numeral 52 schematically
designates oxygen, and the numeral 54 schematically designates an
element constituting the catalyst layer. FIG. 23 is a view
schematically illustrating the catalyst layer 50 in the case that
the catalyst layer 50 with the surface having the oxidizing
treatment done in FIG. 22 is reduced. FIG. 23 also illustrates an
enlarged portion of oxidized and reduced region 50rd on the surface
of the catalyst layer 50.
[0138] Roughness exists in the surface of the catalyst layer 50 due
to an influence at the time of forming the catalyst layer 50 such
as temperature. As a result, the (111) plane of the face-centered
cubic structure, or the (002) plane of the hexagonal close-packed
structure of the catalyst layer 50, which is obtained while the
orientation is controlled like the first embodiment, i.e. the
surface well matched with carbon, does not always emerge in a flat
manner.
[0139] Therefore, there is a case that the graphene layer having
the large domain cannot be formed on the intentionally-oriented
surface of the catalyst layer 50. Accordingly, it is necessary for
the oriented surface of the catalyst layer 50 to expose its atomic
plane as a flat plane (a plane parallel to the surface of the
co-catalyst layer 40) as much as possible.
[0140] Hence, in the present embodiment, the catalyst surface is
intentionally oxidized for the purpose of the surface
planarization, and then the reduction treatment is forcedly
performed.
[0141] Generally, in the case that the concave and convex exists in
the surface of the metal, a local oxidizing reaction progresses
microscopically such that the surface is planarized. The reduction
treatment is performed after the oxidizing treatment is
intentionally performed once by utilizing the local oxidizing
reaction, so that the flat catalyst surface can be obtained. For
example, the reducing agent is hydrogen, or ammonia.
[0142] Here, as to the oxidizing treatment, a method for exposing
the surface of the catalyst layer 50 to O.sub.2, or a method for
heating and oxidizing the catalyst layer 50 in an oxidizing
atmosphere may be adopted.
[0143] Alternatively, the following oxidizing treatment and
reduction treatment may be performed. That is, after the catalyst
layer 50 is formed in the apparatus, the catalyst layer 50 in the
apparatus is exposed to the atmosphere, and the reduction treatment
and the formation of the graphene layer may continuously be
performed in the same apparatus.
[0144] The reduction treatment is performed at a temperature at
which migration is generated in the catalyst, for example, at
600.degree. C. Thereby, the orientation plane having the better
flatness can be exposed.
[0145] Moreover, when the reduction treatment is performed at a
given temperature (for example, 600.degree. C.) or more, the
migration is promoted, then a heat-resistant property may be
required for the catalyst. In this case, a refractory metal is
selected as the material for the catalyst layer 50. The catalyst
layer 50 made of the refractory metal has a function of suppressing
aggregation of the catalyst. Accordingly, the use of the catalyst
layer 50 made of the refractory metal can form the better graphene
layer.
Fifth Embodiment
[0146] In the present embodiment, structures of the catalyst layer
and the co-catalyst layer, which further improve the heat-resistant
property while highly orienting the catalyst layer, and processes
of forming catalyst layer and the co-catalyst layer will be
described.
[0147] The graphene layer is formed on the catalyst layer. In this
case, for example, the graphene layer is formed at temperatures of
about 200.degree. C. to about 1000.degree. C. In the case that the
graphene layer is formed at a low temperature, the graphene layer
is frequently formed at around 600.degree. C. In forming the
graphene layer, it is important that the catalyst layer be kept
thin while the aggregation of the catalyst layer is suppressed.
[0148] In the present embodiment, after the step in FIG. 12 of the
third embodiment, a catalyst layer 50' is formed on a co-catalyst
layer 40 as illustrated in FIG. 24. The catalyst layer 50' of the
present embodiment contains a first material and a second material.
The first material is the above-described material (catalyst
element) for the catalyst layer 50. A second material is an element
(additive element), which has a melting point higher than that of
the catalyst element and forms the complete solid solution with the
catalyst element, or an element (additive element), which has a
melting point higher than that of the catalyst element and forms an
eutectic with the catalyst element.
[0149] The catalyst layer 50' is obtained such that the catalyst
element and the second material are simultaneously deposited by
co-sputtering method.
[0150] Alternatively, the catalyst layer 50' may be formed by
sputtering method using an alloy target containing the first
material (catalyst element) and the second material (additive
element).
[0151] Alternatively, the catalyst layer 50' may be formed by CVD
method using source gas containing the first and second
materials.
[0152] Alternatively, the catalyst layer 50' may be obtained as
follows. The co-catalyst layer 40 containing the second material is
formed, the catalyst layer 50 is formed on the co-catalyst layer
40, and the second material is diffused from the co-catalyst layer
40 into the catalyst layer 50 by heat treatment. In this case, a
co-catalyst layer having the stacked structure may be used as the
co-catalyst layer 40, wherein the stacked structure may be
configured to enhance the orientation of the catalyst (Co) as much
as possible. For example, the stacked film of Ta/Ru/Ir/Co may be
used.
[0153] Moreover, the catalyst layer 50' may be a catalyst layer
having a multilayer structure in which a first catalyst layer
containing the first material and a second catalyst layer
containing the second material are alternately stacked. In this
case, the first catalyst layer may be formed by ALD (Atomic Layer
Deposition) using source gas containing the first material, and the
second catalyst layer is formed by ALD method using source gas
containing the second material.
[0154] Either the first catalyst layer or the second catalyst layer
may be used as the lowermost layer of the catalyst layer 50'.
Similarly, either the first catalyst layer or the second catalyst
layer may be used as the uppermost layer of the catalyst layer
50'.
[0155] Additionally, the catalyst layer having the multilayer
structure may be changed into the catalyst layer in which the first
catalyst layer and the second catalyst layer are homogenized, by
performing the heat treatment to the catalyst layer having the
multilayer structure.
[0156] Thereafter, for example, as illustrated in FIG. 25, a wiring
having the structure in which the wiring trench is filled with the
co-catalyst layer 40, the catalyst layer 50', a graphene layer 60,
and a protective film 110 (the insulating film or the metallic
film) may be formed, or as illustrated in FIG. 25, the wiring
having the structure in which the wiring trench is filled with the
co-catalyst layer 40, the catalyst layer 50' and the graphene layer
60, as illustrated in FIG. 25 may be formed. The wiring shown in
FIG. 25 is, for example, formed by the method described with
reference to FIGS. 15 and 16. The wiring shown in FIG. 26 is
formed, for example, by the method described with reference to
FIGS. 18 and 19.
[0157] The catalyst layer 50' of the present embodiment includes
the first and second materials, so that the melting point of the
catalyst layer 50' can be raised compared with the catalyst layer
50 of the embodiment that does not contain the second material. The
aggregation is hardly generated in the catalyst layer having the
high melting point. Therefore, the catalyst layer 50' can be formed
thinner than the catalyst layer 50. The microfabrication of the
wiring including the graphene layer is easily performed using the
catalyst layer 50'.
[0158] The effective element (second material) contained in the
catalyst layer 50' is a eutectic element, desirably a
complete-solid-solution element, which do not form a compound with
the catalyst layer 50 (first material).
[0159] For example, in the case that the first material is Ni, the
eutectic element (second material) is Cr, Tc, Ru, Ox, Re, or C, and
the complete-solid-solution element (second material) is Pd, Pt,
Rh, or Ir.
[0160] Moreover, in the case that the first material is Co, the
eutectic element (second material) is C, and the
complete-solid-solution element (second material) is Pd, Pt, Rh,
Ru, Ir, Os, or Re.
[0161] Furthermore, in the case that the first material is Fe, the
eutectic element (second material) is Ru, Cd, or C, and the
complete-solid-solution element (second material) is Cr, Rh, Ir, or
W.
[0162] As described in the first embodiment, in order to maintain
the desirable lattice mismatch degree between the catalyst layer
and the graphene layer, for example, an additive amount of the
second material is about 56 atomic % at the most for the lattice
mismatch degree of 5%.
[0163] At least one refractory metal element (second material) may
be added to the catalyst layer 50' in order to improve the
heat-resistant property. The catalyst layer 50' may be made of a
material (first material) containing at least two elements. For
example, the catalyst layer 50' may be made of the alloy that, as
described in the above embodiment, is formed to control the lattice
matching while containing at least two materials selected from the
group consisting Ni, Co, and Fe. In this case, the catalyst layer
of the present embodiment comprises the alloy, and the second
material (the element raising the melting point) added in the
alloy.
[0164] While certain embodiments have been described, these
embodiments have been presented by way of example only, and are not
intended to limit the scope of the inventions. Indeed, the novel
embodiments described herein may be embodied in a variety of other
forms; furthermore, various omissions, substitutions and changes in
the form of the embodiments described herein may be made without
departing from the spirit of the inventions. The accompanying
claims and their equivalents are intended to cover such forms or
modifications as would fall within the scope and spirit of the
inventions.
* * * * *