Patent | Date |
---|
Vapor Phase Growth Method App 20220056577 - MIZUSHIMA; Ichiro ;   et al. | 2022-02-24 |
SiC EPITAXIAL GROWTH APPARATUS App 20220005696 - MIZUSHIMA; Ichiro ;   et al. | 2022-01-06 |
Semiconductor device and dicing method Grant 10,784,165 - Masuko , et al. Sept | 2020-09-22 |
Method for manufacturing a semiconductor device Grant 10,741,443 - Kitamura , et al. A | 2020-08-11 |
Semiconductor Device And Dicing Method App 20190267288 - Masuko; Shingo ;   et al. | 2019-08-29 |
Method For Manufacturing A Semiconductor Device App 20190259659 - KITAMURA; Masayuki ;   et al. | 2019-08-22 |
Method for manufacturing a semiconductor device Grant 10,325,805 - Kitamura , et al. | 2019-06-18 |
Method For Manufacturing A Semiconductor Device App 20170316973 - KITAMURA; Masayuki ;   et al. | 2017-11-02 |
Method For Manufacturing A Semiconductor Device App 20170229301 - KITAMURA; Masayuki ;   et al. | 2017-08-10 |
Method of manufacturing semiconductor device including air gap between patterns Grant 9,437,476 - Nakazawa , et al. September 6, 2 | 2016-09-06 |
Memory device Grant 9,412,937 - Saitoh , et al. August 9, 2 | 2016-08-09 |
Memory Device App 20160043311 - SAITOH; Masumi ;   et al. | 2016-02-11 |
Semiconductor device and method of manufacturing same Grant 9,257,552 - Mizushima February 9, 2 | 2016-02-09 |
Memory device having a stacked variable resistance layer Grant 9,202,845 - Saitoh , et al. December 1, 2 | 2015-12-01 |
Semiconductor Device And Method Of Manufacturing Same App 20150263114 - Nakazawa; Keisuke ;   et al. | 2015-09-17 |
Method of manufacturing semiconductor device using inert, material, and oxidation-reduction gases Grant 9,093,274 - Okuda , et al. July 28, 2 | 2015-07-28 |
Method Of Manufacturing Semiconductor Device Using Inert, Material, And Oxidation-reduction Gases App 20150093885 - Okuda; Shinya ;   et al. | 2015-04-02 |
Memory Device App 20150076439 - SAITOH; Masumi ;   et al. | 2015-03-19 |
Semiconductor Device And Method Of Manufacturing Same App 20150060998 - MIZUSHIMA; Ichiro | 2015-03-05 |
Semiconductor device including a plurality of different functional elements and method of manufacturing the same Grant 8,963,124 - Miyao , et al. February 24, 2 | 2015-02-24 |
Semiconductor device with air gap therein and manufacturing method thereof Grant 8,772,153 - Furuhashi , et al. July 8, 2 | 2014-07-08 |
Non-volatile semiconductor memory Grant 8,742,391 - Mizushima , et al. June 3, 2 | 2014-06-03 |
Semiconductor device including a plug and method for manufacturing the same Grant 8,742,592 - Wakatsuki , et al. June 3, 2 | 2014-06-03 |
Nonvolatile Semiconductor Memory Device And Method Of Fabricating The Same App 20140080297 - Mizushima; Ichiro ;   et al. | 2014-03-20 |
Method for manufacturing microstructure using self-assembly of amphiphilic polymer Grant 8,673,786 - Watanabe , et al. March 18, 2 | 2014-03-18 |
Semiconductor device and manufacturing method thereof Grant 8,648,464 - Kitamura , et al. February 11, 2 | 2014-02-11 |
Nonvolatile semiconductor memory Grant 8,637,915 - Ichige , et al. January 28, 2 | 2014-01-28 |
Nonvolatile semiconductor memory device and method of fabricating the same Grant 8,624,316 - Mizushima , et al. January 7, 2 | 2014-01-07 |
Non-volatile Semiconductor Memory App 20130270506 - MIZUSHIMA; Ichiro ;   et al. | 2013-10-17 |
Semiconductor device and method for manufacturing the same Grant 8,558,354 - Iwakaji , et al. October 15, 2 | 2013-10-15 |
Method of fabricating semiconductor device Grant 8,551,871 - Mizushima , et al. October 8, 2 | 2013-10-08 |
Semiconductor Device With Strengthened Inter-wire Air Gap Structures App 20130249102 - NAKAO; Shinichi ;   et al. | 2013-09-26 |
Semiconductor device manufacturing method and semiconductor device manufacturing apparatus Grant 8,536,699 - Toratani , et al. September 17, 2 | 2013-09-17 |
Method For Manufacturing Nonvolatile Memory Device App 20130237008 - NOJIRI; Yasuhiro ;   et al. | 2013-09-12 |
Nonvolatile semiconductor memory device and method of manufacturing the same Grant 8,530,957 - Mizushima , et al. September 10, 2 | 2013-09-10 |
Method For Manufacturing A Semiconductor Device App 20130217226 - KITAMURA; Masayuki ;   et al. | 2013-08-22 |
Nonvolatile Semiconductor Memory Device And Method Of Manufacturing The Same App 20130187217 - Mizushima; Ichiro ;   et al. | 2013-07-25 |
Semiconductor memory device having a circuit formed on a single crystal semiconductor layer with varied germanium concentration Grant 8,476,708 - Fukuzumi , et al. July 2, 2 | 2013-07-02 |
Method for manufacturing nonvolatile memory device Grant 8,455,346 - Nojiri , et al. June 4, 2 | 2013-06-04 |
Nonvolatile semiconductor memory device and method of manufacturing the same Grant 8,415,242 - Mizushima , et al. April 9, 2 | 2013-04-09 |
Method For Manufacturing Microstructure App 20130084704 - WATANABE; Kei ;   et al. | 2013-04-04 |
Semiconductor Device And Method For Manufacturing The Same App 20130075912 - Wakatsuki; Satoshi ;   et al. | 2013-03-28 |
Semiconductor Device And Manufacturing Method Thereof App 20130020706 - FURUHASHI; Takashi ;   et al. | 2013-01-24 |
Nonvolatile semiconductor memory Grant 8,324,679 - Ichige , et al. December 4, 2 | 2012-12-04 |
Nonvolatile Semiconductor Memory Device And Method Of Fabricating The Same App 20120241841 - Mizushima; Ichiro ;   et al. | 2012-09-27 |
Nonvolatile semiconductor memory Grant 8,269,267 - Arai , et al. September 18, 2 | 2012-09-18 |
Semiconductor Device And Manufacturing Method Thereof App 20120228614 - Kitamura; Masayuki ;   et al. | 2012-09-13 |
Semiconductor Memory Device And Method Of Manufacturing The Same App 20120181602 - Fukuzumi; Yoshiaki ;   et al. | 2012-07-19 |
Nonvolatile Semiconductor Memory App 20120181598 - ICHIGE; Masayuki ;   et al. | 2012-07-19 |
Memory Device And Method For Manufacturing The Same App 20120119179 - Nakao; Shinichi ;   et al. | 2012-05-17 |
Semiconductor Device And Method For Manufacturing The Same App 20120091414 - IWAKAJI; Yoko ;   et al. | 2012-04-19 |
Method of Fabricating Semiconductor Device App 20120090535 - Mizushima; Ichiro ;   et al. | 2012-04-19 |
Method of manufacturing semiconductor device Grant 8,114,755 - Mizushima , et al. February 14, 2 | 2012-02-14 |
Semiconductor Device Manufacturing Method And Semiconductor Device Manufacturing Apparatus App 20120031331 - Toratani; Kenichiro ;   et al. | 2012-02-09 |
Method For Manufacturing Nonvolatile Memory Device App 20110306199 - NOJIRI; Yasuhiro ;   et al. | 2011-12-15 |
Semiconductor device manufacturing method and semiconductor device manufacturing apparatus Grant 8,071,483 - Toratani , et al. December 6, 2 | 2011-12-06 |
Method of fabricating semiconductor device Grant 8,043,945 - Mizushima , et al. October 25, 2 | 2011-10-25 |
Method For Manufacturing Semiconductor Device App 20110237052 - MIZUSHIMA; Ichiro ;   et al. | 2011-09-29 |
Nonvolatile Semiconductor Memory Device And Method Of Manufacturing The Same App 20110233646 - MIZUSHIMA; Ichiro ;   et al. | 2011-09-29 |
Nonvolatile semiconductor memory device and method of manufacturing the same Grant 8,017,989 - Ozawa , et al. September 13, 2 | 2011-09-13 |
Method of fabricating semiconductor device Grant 8,012,858 - Murano , et al. September 6, 2 | 2011-09-06 |
Fin transistor Grant 7,989,856 - Goto , et al. August 2, 2 | 2011-08-02 |
Semiconductor device having SiGe semiconductor regions Grant 7,986,013 - Itokawa , et al. July 26, 2 | 2011-07-26 |
Nonvolatile semiconductor memory Grant 7,982,259 - Ichige , et al. July 19, 2 | 2011-07-19 |
Nonvolatile Semiconductor Memory App 20110108905 - ICHIGE; Masayuki ;   et al. | 2011-05-12 |
Nonvolatile Semiconductor Storage Device And Manufacturing Method Of Nonvolatile Semiconductor Storage Device App 20110049611 - Kiyotoshi; Masahiro ;   et al. | 2011-03-03 |
Nonvolatile Semiconductor Memory App 20110024827 - ARAI; Fumitaka ;   et al. | 2011-02-03 |
Semiconductor device and method for manufacturing the same Grant 7,879,658 - Ozawa , et al. February 1, 2 | 2011-02-01 |
Method Of Fabricating Semiconductor Device App 20110014781 - Itokawa; Hiroshi ;   et al. | 2011-01-20 |
Method of manufacturing semiconductor storage device Grant 7,863,166 - Suzuki , et al. January 4, 2 | 2011-01-04 |
Semiconductor memory device manufacturing method and semiconductor memory device Grant 7,842,564 - Mizushima , et al. November 30, 2 | 2010-11-30 |
Nonvolatile semiconductor memory Grant 7,829,948 - Arai , et al. November 9, 2 | 2010-11-09 |
Semiconductor device having an element isolating insulating film Grant 7,772,671 - Suguro , et al. August 10, 2 | 2010-08-10 |
Nonvolatile semiconductor memory device and method of manufacturing the same App 20100171164 - Ozawa; Yoshio ;   et al. | 2010-07-08 |
Semiconductor Device Manufacturing Method App 20100167482 - MORI; Shinji ;   et al. | 2010-07-01 |
Method of manufacturing non-volatile semiconductor memory Grant 7,718,483 - Mizushima , et al. May 18, 2 | 2010-05-18 |
Method Of Manufacturing Semiconductor Storage Device App 20100112791 - Suzuki; Takashi ;   et al. | 2010-05-06 |
Semiconductor Device Manufacturing Method And Semiconductor Device Manufacturing Apparatus App 20100112822 - Toratani; Kenichiro ;   et al. | 2010-05-06 |
Method Of Fabricating Semiconductor Device App 20100099241 - MURANO; Masahiko ;   et al. | 2010-04-22 |
Method Of Manufacturing Semiconductor Device App 20100029053 - Itokawa; Hiroshi ;   et al. | 2010-02-04 |
Method of manufacturing semiconductor storage device Grant 7,651,930 - Suzuki , et al. January 26, 2 | 2010-01-26 |
Method Of Fabricating Semiconductor Device App 20090263957 - MIZUSHIMA; Ichiro ;   et al. | 2009-10-22 |
Semiconductor device with recessed channel Grant 7,602,013 - Miyano , et al. October 13, 2 | 2009-10-13 |
Semiconductor Device Including A Plurality Of Different Functional Elements And Method Of Manufacturing The Same App 20090236587 - MIYAO; Masanobu ;   et al. | 2009-09-24 |
Semiconductor Device App 20090152622 - Itokawa; Hiroshi ;   et al. | 2009-06-18 |
Fin Transistor App 20090152623 - GOTO; Masakazu ;   et al. | 2009-06-18 |
Semiconductor device and manufacturing method thereof Grant 7,537,978 - Yagishita , et al. May 26, 2 | 2009-05-26 |
Semiconductor Device And Method Of Manufacturing The Same App 20090121279 - Ishida; Hirokazu ;   et al. | 2009-05-14 |
Semiconductor Substrate And Method For Manufacturing A Semiconductor Substrate App 20090108412 - ITOKAWA; Hiroshi ;   et al. | 2009-04-30 |
Semiconductor substrate, manufacturing method therefor, and semiconductor device Grant 7,525,154 - Nagano , et al. April 28, 2 | 2009-04-28 |
Semiconductor device substrate including a single-crystalline layer and method of manufacturing semiconductor device substrate Grant 7,521,300 - Nagano , et al. April 21, 2 | 2009-04-21 |
Method of forming an insulating film, method of manufacturing a semiconductor device, and semiconductor device Grant 7,521,263 - Mizushima , et al. April 21, 2 | 2009-04-21 |
Element formation substrate, method of manufacturing the same, and semiconductor device Grant 7,510,945 - Nagano , et al. March 31, 2 | 2009-03-31 |
Method for fabricating a localize SOI in bulk silicon substrate including changing first trenches formed in the substrate into unclosed empty space by applying heat treatment Grant 7,507,634 - Sato , et al. March 24, 2 | 2009-03-24 |
Semiconductor Memory Device Manufacturing Method And Semiconductor Memory Device App 20090014828 - MIZUSHIMA; Ichiro ;   et al. | 2009-01-15 |
Method Of Manufacturing Semiconductor Device App 20090011570 - Mizushima; Ichiro ;   et al. | 2009-01-08 |
Method Of Manufacturing Semiconductor Storage Device App 20090004833 - Suzuki; Takashi ;   et al. | 2009-01-01 |
Nonvolatile Semiconductor Memory Device And Method Of Manufacturing The Same App 20090001442 - OZAWA; Yoshio ;   et al. | 2009-01-01 |
Semiconductor memory device Grant 7,459,748 - Shirota , et al. December 2, 2 | 2008-12-02 |
Semiconductor device and method of manufacturing the same App 20080233698 - Sato; Tsutomu ;   et al. | 2008-09-25 |
Semiconductor device having an element isolating insulating film App 20080224252 - Suguro; Kyoichi ;   et al. | 2008-09-18 |
Semiconductor Device And Method For Manufacturing The Same App 20080211004 - OZAWA; Yoshio ;   et al. | 2008-09-04 |
Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer Grant 7,420,249 - Sato , et al. September 2, 2 | 2008-09-02 |
Nonvolatile Semiconductor Memory App 20080157092 - Arai; Fumitaka ;   et al. | 2008-07-03 |
Semiconductor Device and Manufacturing Method Thereof App 20080128813 - MIZUSHIMA; Ichiro ;   et al. | 2008-06-05 |
Semiconductor device including MOSFET and isolation region for isolating the MOSFET Grant 7,372,086 - Sato , et al. May 13, 2 | 2008-05-13 |
Semiconductor device and method for fabricating same Grant 7,358,198 - Aoki , et al. April 15, 2 | 2008-04-15 |
Element formation substrate, method of manufacturing the same, and semiconductor device App 20080044983 - Nagano; Hajime ;   et al. | 2008-02-21 |
Semiconductor Device Formed In Semiconductor Layer Arranged On Substrate With One Of Insulating Film And Cavity Interposed Between The Substrate And The Semiconductor Layer App 20080012078 - Sato; Tsutomu ;   et al. | 2008-01-17 |
Nonvolatile Semiconductor Memory App 20080012061 - Ichige; Masayuki ;   et al. | 2008-01-17 |
Semiconductor substrate and its fabrication method App 20080003771 - Sato; Tsutomu ;   et al. | 2008-01-03 |
Semiconductor device fabrication method App 20070298594 - Mizushima; Ichiro ;   et al. | 2007-12-27 |
Dopant Diffusion Method And Method Of Manufacturing Semiconductor Device App 20070293027 - Konno; Takuya ;   et al. | 2007-12-20 |
Semiconductor substrate, method of manufacturing the same, semiconductor device, and method of manufacturing the same Grant 7,294,562 - Nagano , et al. November 13, 2 | 2007-11-13 |
Semiconductor device and manufacturing method thereof App 20070254434 - Mizushima; Ichiro ;   et al. | 2007-11-01 |
Element formation substrate for forming semiconductor device Grant 7,285,825 - Nagano , et al. October 23, 2 | 2007-10-23 |
Semiconductor device and manufacturing method of the same App 20070238255 - Miyano; Kiyotaka ;   et al. | 2007-10-11 |
Method for manufacturing partial SOI substrates Grant 7,265,017 - Nagano , et al. September 4, 2 | 2007-09-04 |
Semiconductor device and manufacturing method thereof App 20070176237 - Yagishita; Atsushi ;   et al. | 2007-08-02 |
Method of making empty space in silicon Grant 7,235,456 - Sato , et al. June 26, 2 | 2007-06-26 |
Semiconductor Memory Device And Method Of Fabricating The Same App 20070102749 - Shirota; Riichiro ;   et al. | 2007-05-10 |
Semiconductor device and manufacturing method thereof Grant 7,208,353 - Yagishita , et al. April 24, 2 | 2007-04-24 |
Semiconductor device App 20070085131 - Matsuo; Kouji ;   et al. | 2007-04-19 |
Semiconductor device comprising multiple layers with trenches formed on a semiconductor substrate Grant 7,187,035 - Nagano , et al. March 6, 2 | 2007-03-06 |
Semiconductor device and manufacturing method thereof App 20070034974 - Sekine; Katsuyuki ;   et al. | 2007-02-15 |
Method of forming an insulating film, method of manufacturing a semiconductor device, and semiconductor device App 20070020957 - Mizushima; Ichiro ;   et al. | 2007-01-25 |
Semiconductor device and method for fabricating same Grant 7,160,818 - Aoki , et al. January 9, 2 | 2007-01-09 |
Semiconductor chip which combines bulk and SOI regions and separates same with plural isolation regions Grant 7,148,543 - Yamada , et al. December 12, 2 | 2006-12-12 |
Semiconductor device with a cavity therein and a method of manufacturing the same Grant 7,145,215 - Inoh , et al. December 5, 2 | 2006-12-05 |
Method of manufacturing non-volatile semiconductor memory App 20060258076 - Mizushima; Ichiro ;   et al. | 2006-11-16 |
Semiconductor device and manufacturing method thereof including heating a silicon oxide in a helium gas Grant 7,129,125 - Sekine , et al. October 31, 2 | 2006-10-31 |
Semiconductor device and its manufacturing method Grant 7,126,178 - Furuhata , et al. October 24, 2 | 2006-10-24 |
Semiconductor device substrate and method of manufacturing semiconductor device substrate App 20060234478 - Nagano; Hajime ;   et al. | 2006-10-19 |
Semiconductor substrate having a partial SOI structure, method of manufacturing the same, a semiconductor device having a partial SOI structure, and method of manufacturing the same Grant 7,122,864 - Nagano , et al. October 17, 2 | 2006-10-17 |
Apparatus and method for depositing a dielectric film App 20060225657 - Mizushima; Ichiro ;   et al. | 2006-10-12 |
Semiconductor device with a cavity therein and a method of manufacturing the same App 20060157789 - Inoh; Kazumi ;   et al. | 2006-07-20 |
Manufacturing method of partial SOI wafer, semiconductor device using the partial SOI wafer and manufacturing method thereof Grant 7,071,039 - Nagano , et al. July 4, 2 | 2006-07-04 |
Semiconductor device and manufacturing method thereof App 20060140028 - Mizushima; Ichiro ;   et al. | 2006-06-29 |
Semiconductor substrate and its fabrication method App 20060131651 - Sato; Tsutomu ;   et al. | 2006-06-22 |
Semiconductor device and method for fabricating same App 20060105582 - Aoki; Nobutoshi ;   et al. | 2006-05-18 |
Semiconductor device and manufacturing method thereof App 20060097287 - Mizushima; Ichiro | 2006-05-11 |
Semiconductor device and its manufacturing method App 20060097303 - Furuhata; Takeo ;   et al. | 2006-05-11 |
Semiconductor substrate, method of manufacturing the same, semiconductor device, and method of manufacturing the same App 20060076624 - Nagano; Hajime ;   et al. | 2006-04-13 |
Semiconductor chip having multiple functional blocks integrated in a single chip and method for fabricating the same Grant 7,018,904 - Yamada , et al. March 28, 2 | 2006-03-28 |
Semiconductor substrate having pillars within a closed empty space Grant 7,019,364 - Sato , et al. March 28, 2 | 2006-03-28 |
Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer Grant 7,019,365 - Sato , et al. March 28, 2 | 2006-03-28 |
Semiconductor device with a cavity therein and a method of manufacturing the same Grant 7,009,273 - Inoh , et al. March 7, 2 | 2006-03-07 |
Semiconductor device and method for manufacturing Grant 6,989,316 - Suguro , et al. January 24, 2 | 2006-01-24 |
Semiconductor device and its manufacturing method Grant 6,982,198 - Furuhata , et al. January 3, 2 | 2006-01-03 |
Semiconductor device and manufacturing method thereof Grant 6,979,846 - Yagishita , et al. December 27, 2 | 2005-12-27 |
Semiconductor device and method of manufacturing the same App 20050280069 - Mizushima, Ichiro ;   et al. | 2005-12-22 |
Semiconductor device and manufacturing method thereof App 20050253196 - Yagishita, Atsushi ;   et al. | 2005-11-17 |
Semiconductor device and method for manufacturing partial SOI substrates App 20050242397 - Nagano, Hajime ;   et al. | 2005-11-03 |
Semiconductor device and method for manufacturing partial SOI substrates Grant 6,956,265 - Nagano , et al. October 18, 2 | 2005-10-18 |
Semiconductor substrate, manufacturing method therefor, and semiconductor device App 20050205929 - Nagano, Hajime ;   et al. | 2005-09-22 |
Semiconductor device and its manufacturing method Grant 6,946,699 - Furuhata , et al. September 20, 2 | 2005-09-20 |
Nonvolatile semiconductor memory and manufacturing method for the same Grant 6,927,139 - Tanaka , et al. August 9, 2 | 2005-08-09 |
Semiconductor device and its manufacturing method App 20050170582 - Furuhata, Takeo ;   et al. | 2005-08-04 |
Semiconductor device and its manufacturing method App 20050167720 - Furuhata, Takeo ;   et al. | 2005-08-04 |
Semiconductor device and method of manufacturing the same Grant 6,924,518 - Iinuma , et al. August 2, 2 | 2005-08-02 |
Semiconductor device and manufacturing method thereof App 20050162966 - Mizushima, Ichiro | 2005-07-28 |
Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer App 20050156245 - Sato, Tsutomu ;   et al. | 2005-07-21 |
Semiconductor device having one of patterned SOI and SON structure Grant 6,906,384 - Yamada , et al. June 14, 2 | 2005-06-14 |
Method of purging semiconductor manufacturing apparatus and method of manufacturing semiconductor device Grant 6,903,025 - Mizushima June 7, 2 | 2005-06-07 |
Semiconductor device and method for fabricating same App 20050106894 - Aoki, Nobutoshi ;   et al. | 2005-05-19 |
Semiconductor device and method of manufacturing the same Grant 6,893,928 - Sato , et al. May 17, 2 | 2005-05-17 |
Semiconductor device having an injection substance to knock against oxygen and manufacturing method of the same Grant 6,891,232 - Miyano , et al. May 10, 2 | 2005-05-10 |
Semiconductor device and method of manufacturing a semiconductor device App 20050035413 - Miyano, Kiyotaka ;   et al. | 2005-02-17 |
Semiconductor device and method for manufacturing partial SOI substrates App 20050023609 - Nagano, Hajime ;   et al. | 2005-02-03 |
Semiconductor chip having multiple functional blocks integrated in a single chip and method for fabricating the same App 20050019999 - Yamada, Takashi ;   et al. | 2005-01-27 |
High precision pattern forming method of manufacturing a semiconductor device Grant 6,846,750 - Ohiwa , et al. January 25, 2 | 2005-01-25 |
Semiconductor device and method of manufacturing the same App 20050006637 - Iinuma, Toshihiko ;   et al. | 2005-01-13 |
Nonvolatile semiconductor memory and manufacturing method for the same App 20050003619 - Tanaka, Masayuki ;   et al. | 2005-01-06 |
Semiconductor chip which combines bulk and SOI regions and separates same with plural isolation regions Grant 6,835,981 - Yamada , et al. December 28, 2 | 2004-12-28 |
Semiconductor device and method of manufacturing the same App 20040256693 - Sato, Tsutomu ;   et al. | 2004-12-23 |
Semiconductor device and manufacturing method thereof App 20040195636 - Sekine, Katsuyuki ;   et al. | 2004-10-07 |
Semiconductor chip which combines bulk and SOI regions and separates same with plural isolation regions App 20040195626 - Yamada, Takashi ;   et al. | 2004-10-07 |
Method of manufacturing semiconductor device App 20040192034 - Ohiwa, Tokuhisa ;   et al. | 2004-09-30 |
Semiconductor substrate, method of manufacturing the same, semiconductor device, and method of manufacturing the same App 20040183131 - Nagano, Hajime ;   et al. | 2004-09-23 |
Semiconductor device and method of manufacturing the same including a dual layer raised source and drain Grant 6,794,713 - Mizushima , et al. September 21, 2 | 2004-09-21 |
Element formation substrate, method of manufacturing the same, and semiconductor device App 20040150044 - Nagano, Hajime ;   et al. | 2004-08-05 |
System for determining dry cleaning timing, method for determining dry cleaning timing, dry cleaning method, and method for manufacturing semiconductor device Grant 6,772,045 - Katsui , et al. August 3, 2 | 2004-08-03 |
Semiconductor device with a cavity therein and a method of manufacturing the same App 20040129998 - Inoh, Kazumi ;   et al. | 2004-07-08 |
Semiconductor device and its manufacturing method App 20040106254 - Furuhata, Takeo ;   et al. | 2004-06-03 |
Semiconductor integrated circuit including insulated gate field effect transistor and method of manufacturing the same Grant 6,744,104 - Aoki , et al. June 1, 2 | 2004-06-01 |
Semiconductor device and method for manufacturing the same App 20040070045 - Suguro, Kyoichi ;   et al. | 2004-04-15 |
Semiconductor device and method of manufacturing the same including raised source/drain comprising SiGe or SiC Grant 6,713,359 - Mizushima , et al. March 30, 2 | 2004-03-30 |
Semiconductor Device And Method Of Manufacturing The Same App 20040041179 - Mizushima, Ichiro ;   et al. | 2004-03-04 |
Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer App 20040026739 - Sato, Tsutomu ;   et al. | 2004-02-12 |
Semiconductor device and manufacturing method thereof App 20040016951 - Mizushima, Ichiro | 2004-01-29 |
Method of purging semiconductor manufacturing apparatus and method of manufacturing semiconductor device App 20040002220 - Mizushima, Ichiro | 2004-01-01 |
Semiconductor device and method for manufacturing App 20030211713 - Suguro, Kyoichi ;   et al. | 2003-11-13 |
Semiconductor device and manufacturing method thereof App 20030209761 - Yagishita, Atsushi ;   et al. | 2003-11-13 |
Semiconductor device having one of patterned SOI and SON structure App 20030201512 - Yamada, Takashi ;   et al. | 2003-10-30 |
Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer Grant 6,630,714 - Sato , et al. October 7, 2 | 2003-10-07 |
Semiconductor device and method of manufacturing the same App 20030173617 - Sato, Tsutomu ;   et al. | 2003-09-18 |
Semiconductor device and method for fabricating same App 20030168706 - Aoki, Nobutoshi ;   et al. | 2003-09-11 |
Semiconductor device and method for manufacturing the same Grant 6,617,226 - Suguro , et al. September 9, 2 | 2003-09-09 |
Semiconductor device having one of patterned SOI and SON structure App 20030151112 - Yamada, Takashi ;   et al. | 2003-08-14 |
Manufacturing method of partial SOI wafer, semiconductor device using the partial SOI wafer and manufacturing method thereof App 20030146488 - Nagano, Hajime ;   et al. | 2003-08-07 |
Semiconductor device and method of manufacturing a semiconductor device App 20030141549 - Miyano, Kiyotaka ;   et al. | 2003-07-31 |
Semiconductor device and semiconductor device manufacturing method Grant 6,600,189 - Sato , et al. July 29, 2 | 2003-07-29 |
System for determining dry cleaning timing, method for determining dry cleaning timing, dry cleaning method, and method for manufacturing semiconductor device App 20030139835 - Katsui, Shuji ;   et al. | 2003-07-24 |
Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer App 20030122191 - Nagano, Hajime ;   et al. | 2003-07-03 |
Semiconductor device and manufacturing method thereof Grant 6,552,380 - Sato , et al. April 22, 2 | 2003-04-22 |
Semiconductor chip having multiple functional blocks integrated in a single chip and method forfabricating the same App 20030057487 - Yamada, Takashi ;   et al. | 2003-03-27 |
Semiconductor device substrate and method of manufacturing semiconductor device substrate App 20030057490 - Nagano, Hajime ;   et al. | 2003-03-27 |
Manufacturing method of partial SOI wafer, semiconductor device using the partial SOI wafer and manufacturing method thereof Grant 6,531,754 - Nagano , et al. March 11, 2 | 2003-03-11 |
Semiconductor device and manufacturing method thereof App 20020171099 - Sato, Tsutomu ;   et al. | 2002-11-21 |
Method of manufacturing a semiconductor device with oxide mediated epitaxial layer Grant 6,395,621 - Mizushima , et al. May 28, 2 | 2002-05-28 |
MIS-type semiconductor device having a multi-portion gate electrode Grant 6,362,511 - Mizushima , et al. March 26, 2 | 2002-03-26 |
Semiconductor device and method of manufacturing the same App 20020034864 - Mizushima, Ichiro ;   et al. | 2002-03-21 |
Semiconductor device with oxide mediated epitaxial layer Grant 6,346,732 - Mizushima , et al. February 12, 2 | 2002-02-12 |
Semiconductor device and manufacturing method thereof Grant 6,342,421 - Mitani , et al. January 29, 2 | 2002-01-29 |
Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor Grant 6,335,251 - Miyano , et al. January 1, 2 | 2002-01-01 |
Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor App 20010023108 - Miyano, Kiyotaka ;   et al. | 2001-09-20 |
Method and equipment for manufacturing semiconductor device App 20010017294 - Aoki, Nobutoshi ;   et al. | 2001-08-30 |
Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor Grant 6,232,641 - Miyano , et al. May 15, 2 | 2001-05-15 |
Method and equipment for manufacturing semiconductor device Grant 6,207,591 - Aoki , et al. March 27, 2 | 2001-03-27 |
Method of deforming a trench by a thermal treatment Grant 6,100,132 - Sato , et al. August 8, 2 | 2000-08-08 |
Semiconductor device with element isolation film Grant 6,018,185 - Mitani , et al. January 25, 2 | 2000-01-25 |
Semiconductor device and manufacturing method thereof Grant 5,864,161 - Mitani , et al. January 26, 1 | 1999-01-26 |
Semiconductor device comprises an impurity layer having boron ions in the form of clusters of icosahedron structure Grant 5,598,025 - Murakoshi , et al. January 28, 1 | 1997-01-28 |