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Abnormality Detection Method And Processing Apparatus App 20220270940 - HISHIYA; Shingo ;   et al. | 2022-08-25 |
Substrate processing apparatus and method of producing semiconductor device Grant 11,393,675 - Matsubara , et al. July 19, 2 | 2022-07-19 |
Semiconductor Manufacturing Apparatus And Method Of Manufacturing Semiconductor Device App 20220195594 - KITAMURA; Masayuki ;   et al. | 2022-06-23 |
Semiconductor device including a plug connected to a bit line and containing tungsten Grant 11,355,512 - Iijima , et al. June 7, 2 | 2022-06-07 |
Semiconductor Manufacturing Apparatus And Method Of Manufacturing Semiconductor Device App 20220165554 - NATORI; Katsuaki ;   et al. | 2022-05-26 |
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device Grant 11,282,681 - Natori , et al. March 22, 2 | 2022-03-22 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20220085053 - KITAMURA; Masayuki ;   et al. | 2022-03-17 |
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Semiconductor Device And Method For Manufacturing The Same App 20220076965 - MATSUDA; Hiroaki ;   et al. | 2022-03-10 |
Substrate Treatment Apparatus And Manufacturing Method Of Semiconductor Device App 20220044925 - KITAMURA; Masayuki ;   et al. | 2022-02-10 |
Substrate treatment apparatus and manufacturing method of semiconductor device Grant 11,189,489 - Kitamura , et al. November 30, 2 | 2021-11-30 |
Mask member and method for producing semiconductor device Grant 11,177,135 - Matsubara , et al. November 16, 2 | 2021-11-16 |
Production method of semiconductor device Grant 11,139,173 - Natori , et al. October 5, 2 | 2021-10-05 |
Semiconductor device with aligned vias Grant 11,139,246 - Kitamura , et al. October 5, 2 | 2021-10-05 |
Semiconductor Device, Semiconductor Device Manufacturing Method, And Semiconductor Device Manufacturing Apparatus App 20210305275 - NATORI; Katsuaki ;   et al. | 2021-09-30 |
Semiconductor Device And Method For Manufacturing The Semiconductor Device App 20210265266 - KITAMURA; Masayuki ;   et al. | 2021-08-26 |
Semiconductor Device And Method Of Manufacturing The Same App 20210233872 - WAKATSUKI; Satoshi ;   et al. | 2021-07-29 |
Carbon film forming method, carbon film forming apparatus, and storage medium Grant 11,011,369 - Shimizu , et al. May 18, 2 | 2021-05-18 |
Semiconductor device and method of manufacturing the same Grant 11,004,804 - Wakatsuki , et al. May 11, 2 | 2021-05-11 |
Semiconductor Device, Manufacturing Method Thereof, And Semiconductor Storage Device App 20210083057 - KITAMURA; Masayuki | 2021-03-18 |
Semiconductor Device And Manufacturing Method Thereof App 20210082944 - IIJIMA; Jun ;   et al. | 2021-03-18 |
Semiconductor Device And Manufacturing Method Thereof App 20210066468 - BEPPU; Takayuki ;   et al. | 2021-03-04 |
Gas Introduction Structure, Thermal Processing Apparatus And Gas Supply Method App 20200407848 - HISHIYA; Shingo ;   et al. | 2020-12-31 |
Semiconductor device having a stack body including metal films and first insulating films alternately stacked on a semiconductor substrate and including a stepped end portion and manufacturing method thereof Grant 10,825,770 - Hatazaki , et al. November 3, 2 | 2020-11-03 |
Semiconductor Device App 20200303308 - KITAMURA; Masayuki ;   et al. | 2020-09-24 |
Substrate Treatment Apparatus And Manufacturing Method Of Semiconductor Device App 20200294793 - KITAMURA; Masayuki ;   et al. | 2020-09-17 |
Semiconductor Manufacturing Apparatus And Method Of Manufacturing Semiconductor Device App 20200258722 - A1 | 2020-08-13 |
Method for manufacturing a semiconductor device Grant 10,741,443 - Kitamura , et al. A | 2020-08-11 |
Substrate Processing Apparatus And Method Of Producing Semiconductor Device App 20200090931 - MATSUBARA; Yuya ;   et al. | 2020-03-19 |
Semiconductor Device And Manufacturing Method Thereof App 20200091081 - HATAZAKI; Akitsugu ;   et al. | 2020-03-19 |
Semiconductor Device And Method Of Manufacturing The Same App 20200091088 - WAKATSUKI; Satoshi ;   et al. | 2020-03-19 |
Mask Member And Method For Producing Semiconductor Device App 20200075341 - MATSUBARA; Yuya ;   et al. | 2020-03-05 |
Semiconductor device and method of manufacturing the same Grant 10,566,280 - Wakatsuki , et al. Feb | 2020-02-18 |
Semiconductor Device And Method Of Manufacturing The Same App 20190279932 - WAKATSUKI; Satoshi ;   et al. | 2019-09-12 |
Production Method Of Semiconductor Device App 20190259621 - NATORI; Katsuaki ;   et al. | 2019-08-22 |
Method For Manufacturing A Semiconductor Device App 20190259659 - KITAMURA; Masayuki ;   et al. | 2019-08-22 |
Method for manufacturing a semiconductor device Grant 10,325,805 - Kitamura , et al. | 2019-06-18 |
Semiconductor device and method of manufacturing the same Grant 10,199,391 - Ishikura , et al. Fe | 2019-02-05 |
Semiconductor device and manufacturing method thereof Grant 10,134,673 - Kitamura , et al. November 20, 2 | 2018-11-20 |
Semiconductor Manufacturing Apparatus And Method Of Manufacturing Semiconductor Device App 20180274092 - KITAMURA; Masayuki ;   et al. | 2018-09-27 |
Semiconductor Device And Method Of Manufacturing The Same App 20180261624 - ISHIKURA; Taishi ;   et al. | 2018-09-13 |
Semiconductor device manufacture method Grant 9,991,159 - Ito , et al. June 5, 2 | 2018-06-05 |
Semiconductor Device And Manufacturing Method Thereof App 20180090438 - KITAMURA; Masayuki ;   et al. | 2018-03-29 |
Semiconductor Device Manufacturing Method App 20180082893 - ITO; Fuyuma ;   et al. | 2018-03-22 |
Semiconductor device and method for manufacturing semiconductor device Grant 9,911,753 - Kitamura , et al. March 6, 2 | 2018-03-06 |
Semiconductor device and method for manufacturing the same Grant 9,905,462 - Sakata , et al. February 27, 2 | 2018-02-27 |
Method Of Forming Carbon Film, Apparatus Of Forming Carbon Film And Storage Medium App 20170342548 - SHIMIZU; Akira ;   et al. | 2017-11-30 |
Carbon Film Forming Method, Carbon Film Forming Apparatus, And Storage Medium App 20170345644 - SHIMIZU; Akira ;   et al. | 2017-11-30 |
Method For Manufacturing A Semiconductor Device App 20170316973 - KITAMURA; Masayuki ;   et al. | 2017-11-02 |
Method of manufacturing semiconductor device and semiconductor manufacturing apparatus Grant 9,779,978 - Sakata , et al. October 3, 2 | 2017-10-03 |
Semiconductor device and method for manufacturing the same Grant 9,780,111 - Ishizaki , et al. October 3, 2 | 2017-10-03 |
Semiconductor device and method of manufacturing the same Grant 9,761,531 - Saito , et al. September 12, 2 | 2017-09-12 |
Method for manufacturing semiconductor device Grant 9,754,793 - Nakao , et al. September 5, 2 | 2017-09-05 |
Method For Manufacturing A Semiconductor Device App 20170229301 - KITAMURA; Masayuki ;   et al. | 2017-08-10 |
Method of manufacturing semiconductor device and semiconductor manufacturing apparatus Grant 9,728,473 - Kitamura , et al. August 8, 2 | 2017-08-08 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20170207236 - KITAMURA; Masayuki ;   et al. | 2017-07-20 |
Carbon Film Forming Method, Carbon Film Forming Apparatus, And Storage Medium App 20170170065 - KITAMURA; Masayuki ;   et al. | 2017-06-15 |
Semiconductor device and method for manufacturing same Grant 9,673,217 - Sakata , et al. June 6, 2 | 2017-06-06 |
Semiconductor device and method for manufacturing the same Grant 9,613,974 - Okamoto , et al. April 4, 2 | 2017-04-04 |
Method of manufacturing semiconductor device Grant 9,613,872 - Wakatsuki , et al. April 4, 2 | 2017-04-04 |
Method For Manufacturing Semiconductor Device App 20170092505 - NAKAO; Shinichi ;   et al. | 2017-03-30 |
Semiconductor Device And Method For Manufacturing The Same App 20170053869 - SAKATA; Atsuko ;   et al. | 2017-02-23 |
Method for manufacturing semiconductor device Grant 9,570,464 - Wakatsuki , et al. February 14, 2 | 2017-02-14 |
Selective growth method and substrate processing apparatus Grant 9,512,541 - Shimizu , et al. December 6, 2 | 2016-12-06 |
Semiconductor device including catalyst layer and graphene layer thereon and method for manufacturing the same Grant 9,484,206 - Ishikura , et al. November 1, 2 | 2016-11-01 |
Semiconductor Device And Method For Manufacturing The Same App 20160300845 - ISHIZAKI; Takeshi ;   et al. | 2016-10-13 |
Method Of Manufacturing Semiconductor Device And Semiconductor Manufacturing Apparatus App 20160276204 - SAKATA; Atsuko ;   et al. | 2016-09-22 |
Semiconductor Memory Device And Method For Manufacturing Same App 20160268283 - KITAMURA; Masayuki ;   et al. | 2016-09-15 |
Semiconductor Device And Method For Manufacturing The Same App 20160268285 - OKAMOTO; Hiroki ;   et al. | 2016-09-15 |
Semiconductor Device And Method Of Manufacturing The Same App 20160268210 - SAITO; Tatsuro ;   et al. | 2016-09-15 |
Wire and semiconductor device Grant 9,443,805 - Yamazaki , et al. September 13, 2 | 2016-09-13 |
Method And Apparatus For Forming Carbon Film App 20160251755 - KITAMURA; Masayuki ;   et al. | 2016-09-01 |
Semiconductor device and method of manufacturing the same Grant 9,431,345 - Sakata , et al. August 30, 2 | 2016-08-30 |
Semiconductor device having a graphene interconnect Grant 9,418,938 - Kitamura , et al. August 16, 2 | 2016-08-16 |
Semiconductor device and method for manufacturing the same Grant 9,406,694 - Ikeno , et al. August 2, 2 | 2016-08-02 |
Sensor and method of manufacturing sensor Grant 9,404,880 - Saito , et al. August 2, 2 | 2016-08-02 |
Selective Growth Method And Substrate Processing Apparatus App 20160126106 - SHIMIZU; Akira ;   et al. | 2016-05-05 |
Method Of Manufacturing Semiconductor Device App 20160093538 - WAKATSUKI; SATOSHI ;   et al. | 2016-03-31 |
Method Of Manufacturing Semiconductor Device And Semiconductor Manufacturing Apparatus App 20160093542 - KITAMURA; MASAYUKI ;   et al. | 2016-03-31 |
Semiconductor Device App 20160079176 - ISOBAYASHI; Atsunobu ;   et al. | 2016-03-17 |
Semiconductor Device And Method For Manufacturing The Same App 20160071803 - SAITO; Tatsuro ;   et al. | 2016-03-10 |
Method For Forming Insulator Film On Metal Film App 20160064405 - OKUDA; SHINYA ;   et al. | 2016-03-03 |
Semiconductor Device And Method For Manufacturing The Same App 20160056256 - ISHIKURA; Taishi ;   et al. | 2016-02-25 |
Semiconductor Device and Method of Manufacturing the Same App 20150262940 - KITAMURA; Masayuki ;   et al. | 2015-09-17 |
Wire And Semiconductor Device App 20150255399 - YAMAZAKI; Yuichi ;   et al. | 2015-09-10 |
Wire and semiconductor device Grant 9,131,611 - Yamazaki , et al. September 8, 2 | 2015-09-08 |
Semiconductor device and method for manufacturing same Grant 8,907,484 - Kitamura , et al. December 9, 2 | 2014-12-09 |
Semiconductor Device And Method For Manufacturing Same App 20140284801 - KITAMURA; Masayuki ;   et al. | 2014-09-25 |
Semiconductor Device And Method Of Manufacturing The Same App 20140284802 - SAKATA; Atsuko ;   et al. | 2014-09-25 |
Detecting apparatus Grant 8,813,552 - Matsumoto , et al. August 26, 2 | 2014-08-26 |
Semiconductor device including a plug and method for manufacturing the same Grant 8,742,592 - Wakatsuki , et al. June 3, 2 | 2014-06-03 |
Semiconductor device and manufacturing method thereof Grant 8,648,464 - Kitamura , et al. February 11, 2 | 2014-02-11 |
Method For Manufacturing A Semiconductor Device App 20130217226 - KITAMURA; Masayuki ;   et al. | 2013-08-22 |
Carbon nanotube interconnection and manufacturing method thereof Grant 8,487,449 - Wada , et al. July 16, 2 | 2013-07-16 |
Wire And Semiconductor Device App 20130134592 - YAMAZAKI; Yuichi ;   et al. | 2013-05-30 |
Semiconductor Device And Method For Manufacturing The Same App 20130075912 - Wakatsuki; Satoshi ;   et al. | 2013-03-28 |
Semiconductor Device And Manufacturing Method Thereof App 20120228614 - Kitamura; Masayuki ;   et al. | 2012-09-13 |
Computer System And Data De-duplication Method App 20120191671 - Kitamura; Masayuki ;   et al. | 2012-07-26 |
Detecting Apparatus App 20120111103 - Matsumoto; Seiichi ;   et al. | 2012-05-10 |
Semiconductor Device And Method For Manufacturing The Same App 20120068343 - Honda; Makoto ;   et al. | 2012-03-22 |
Carbon Nanotube Interconnection And Manufacturing Method Thereof App 20120049370 - Wada; Makoto ;   et al. | 2012-03-01 |
Semiconductor device and method for fabricating semiconductor device Grant 7,923,839 - Kitamura , et al. April 12, 2 | 2011-04-12 |
Tape Heater And Method For Manufacturing The Same App 20090242548 - Iida; Kenji ;   et al. | 2009-10-01 |
Semiconductor Device And Method For Fabricating Semiconductor Device App 20090236746 - KITAMURA; Masayuki ;   et al. | 2009-09-24 |
Semiconductor Device And Method For Fabricating Semiconductor Device App 20090020883 - Nomura; Kayo ;   et al. | 2009-01-22 |
Plasma processing apparatus and plasma processing method Grant 7,432,468 - Oka , et al. October 7, 2 | 2008-10-07 |
Plasma Processing Apparatus And Plasma Processing Method App 20070235425 - Oka; Shinsuke ;   et al. | 2007-10-11 |
Microwave plasma processing method, microwave plasma processing apparatus, and its plasma head App 20070054064 - Ohmi; Tadahiro ;   et al. | 2007-03-08 |
Plasma processing apparatus and method App 20060238132 - Kitamura; Masayuki ;   et al. | 2006-10-26 |
Antifriction bearing and alternator incorporating same for use in vehicles Grant RE38,936 - Nakamura , et al. January 17, 2 | 2006-01-17 |
Thermal processing apparatus Grant 6,630,991 - Kitamura , et al. October 7, 2 | 2003-10-07 |
Antifriction bearing and alternator incorporating same for use in vehicles Grant RE37,967 - Nakamura , et al. January 21, 2 | 2003-01-21 |
Thermal processing apparatus for introducing gas between a target object and a cooling unit for cooling the target object App 20020190052 - Kitamura, Masayuki | 2002-12-19 |
Thermal treatment method and apparatus Grant 6,473,993 - Yagi , et al. November 5, 2 | 2002-11-05 |
Virtual blackbody radiation system and radiation temperature measuring system Grant 6,467,952 - Morisaki , et al. October 22, 2 | 2002-10-22 |
Thermal processing unit and thermal processing method Grant 6,444,262 - Kitamura , et al. September 3, 2 | 2002-09-03 |
Virtual Blackbody Radiation System And Radiation Temperature Measuring System App 20020106000 - Morisaki, Eisuke ;   et al. | 2002-08-08 |
Thermal processing apparatus App 20020020696 - Kitamura, Masayuki ;   et al. | 2002-02-21 |
Thermal processing apparatus for introducing gas between a target object and a cooling unit for cooling the target object App 20010036706 - Kitamura, Masayuki | 2001-11-01 |
Quartz window having reinforcing ribs App 20010034004 - Kitamura, Masayuki | 2001-10-25 |
Single-substrate-processing apparatus in semiconductor processing system Grant 6,007,633 - Kitamura , et al. December 28, 1 | 1999-12-28 |
One-by-one type heat-processing apparatus Grant 5,958,140 - Arami , et al. September 28, 1 | 1999-09-28 |
Method of forming a bonding portion Grant 5,581,874 - Aoki , et al. December 10, 1 | 1996-12-10 |
Vacuum exhaust system for processing apparatus Grant 5,575,853 - Arami , et al. November 19, 1 | 1996-11-19 |
Antifriction bearing and alternator incorporating same for use in vehicles Grant 5,422,524 - Nakamura , et al. June 6, 1 | 1995-06-06 |
Anticreep device for annular member Grant 4,511,191 - Kitamura April 16, 1 | 1985-04-16 |