U.S. patent application number 13/763675 was filed with the patent office on 2017-04-27 for lateral super junction device with high substrate-gate breakdown and built-in avalanche clamp diode.
The applicant listed for this patent is Anup Bhalla, Madhur Bobde, Lingpeng Guan, Hamza Yilmaz. Invention is credited to Anup Bhalla, Madhur Bobde, Lingpeng Guan, Hamza Yilmaz.
Application Number | 20170117386 13/763675 |
Document ID | / |
Family ID | 51297709 |
Filed Date | 2017-04-27 |
United States Patent
Application |
20170117386 |
Kind Code |
A9 |
Bobde; Madhur ; et
al. |
April 27, 2017 |
LATERAL SUPER JUNCTION DEVICE WITH HIGH SUBSTRATE-GATE BREAKDOWN
AND BUILT-IN AVALANCHE CLAMP DIODE
Abstract
A lateral super junction JFET is formed from stacked alternating
P type and N type semiconductor layers over a P-epi layer supported
on an N+ substrate. An N+ drain column extends down through the
super junction structure and the P-epi to connect to the N+
substrate to make the device a bottom drain device. N+ source
column and P+ gate column extend through the super junction but
stop at the P-epi layer. A gate-drain avalanche clamp diode is
formed from the bottom the P+ gate column through the P-epi to the
N+ drain substrate.
Inventors: |
Bobde; Madhur; (San Jose,
CA) ; Guan; Lingpeng; (Sunnyvale, CA) ;
Bhalla; Anup; (Santa Clara, CA) ; Yilmaz; Hamza;
(Saratoga, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Bobde; Madhur
Guan; Lingpeng
Bhalla; Anup
Yilmaz; Hamza |
San Jose
Sunnyvale
Santa Clara
Saratoga |
CA
CA
CA
CA |
US
US
US
US |
|
|
Prior
Publication: |
|
Document Identifier |
Publication Date |
|
US 20140227837 A1 |
August 14, 2014 |
|
|
Family ID: |
51297709 |
Appl. No.: |
13/763675 |
Filed: |
February 10, 2013 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
12799810 |
Apr 30, 2010 |
8373208 |
|
|
13763675 |
|
|
|
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 29/0634 20130101;
H01L 29/66901 20130101; H01L 29/78 20130101; H01L 29/66484
20130101; H01L 29/808 20130101; H01L 27/0727 20130101; H01L
29/66909 20130101; H01L 29/42316 20130101 |
International
Class: |
H01L 29/66 20060101
H01L029/66 |
Claims
1. A method of forming a semiconductor power device comprising:
forming a bottom semiconductor layer of a first conductivity type,
and an intermediate semiconductor layer of a second conductivity
type below said super junction structure and above said bottom
semiconductor layer followed by forming a super junction structure
near a top surface of a semiconductor substrate by forming stacking
laterally layers of alternating conductivity types of a first and
second conductivity type; forming a gate column of a second
conductivity type extending down through the super junction
structure; forming a source column and a drain column of a first
conductivity type extending through the super junction structure
with the drain column extending through the super junction
structure and electrically connected to the bottom semiconductor
layer.
2. The method of claim 1 wherein: the step of forming the
superjunction structure further comprises a step of forming said
superjunction structure by epitaxial growth on top of said
intermediate semiconductor layer.
3. The method of forming a semiconductor device of claim 1 further
comprising: forming the intermediate semiconductor layer, the
bottom semiconductor layer and the gate column such that a built-in
gate-drain avalanche clamp diode is formed from the gate column
through the intermediate semiconductor layer to the bottom
semiconductor layer.
4. The method of claim 1 wherein: the step of forming the source
column is a step of forming the source column to reach the
intermediate semiconductor layer for further forming a bipolar
suppression region of a second conductivity type in the
intermediate semiconductor layer at the bottom of the source
column.
5. The method of claim 1 wherein: the step of forming said source,
drain or gate columns is a step of etching a trench in the
semiconductor substrate followed by lining the walls of the trench
with semiconductor material of the appropriate conductivity
type.
6. The method of claim 5 wherein: the step of lining the walls
further comprises a step of doping exposed portions of the
semiconductor substrate in the trench.
7. The method of claim 5 wherein: the step of lining the walls
further comprises a step of depositing polysilicon of a predefined
conductivity type on the sidewalls of the trench.
8. The method of claim 5 further comprising: filling the trenches
with a dielectric semiconductor material.
9. The method of 1 further comprising: configuring the source, gate
and drain columns to function as a JFET; and forming a MOSFET in
the semiconductor device in cascode circuit configuration with the
JFET.
Description
[0001] This patent application is a Divisional application and
claim the Priority Date of application of a co-pending application
with a Ser. No. 12/799,810 filed by a common Inventor of this
application on Apr. 30, 2010. application Ser. No. 12/799,810 is a
Continuation in Part (CIP) application of application Ser. No.
12/592,619 filed on Nov. 30, 2009. The disclosures made in
application Ser. Nos. 12/799,810 and 12/592,619 are hereby
incorporated by reference.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The invention relates generally to semiconductor power
devices. More particularly, this invention relates to
configurations and methods to manufacture lateral power device
including a super-junction structure with an avalanche clamp diode
formed between the drain substrate and the gate. The lateral
super-junction structure reduces on-resistance, while the
structural enhancements increase the breakdown voltage between
substrate and drain and improve unclamped inductive switching (UIS)
performance
[0004] 2. Description of the Prior Art
[0005] Conventional semiconductor power device such as the MOSFET
power devices implemented with a super-junction structure can
achieve performance improvements with significant reduction of the
on-resistance while still maintaining a high breakdown voltage.
However, the manufacturing technologies and device configuration
for implementing the super-junction structures in the MOSFET
devices are still confronted with manufacturability difficulties.
The manufacturability and cost of the conventional vertical power
devices designed for high voltage applications implemented with
super-junction structures are limited due to the structural
features that require numerous manufacturing processes which are
time-consuming, complex, and expensive. The manufacturing processes
according to current practice involve many sequential masking,
implantation and epitaxial growth steps to build the vertical
structure. Achieving a high density of alternately doped columns
becomes prohibitive since it requires a direct increase in the
number of these steps. Too many factors influence the accuracy of
charge-balance between adjacent alternately doped columns, leading
to narrow process margins as a high density of said columns is
attempted. FIG. 1A shows a typical design for a MOSFET vertical
super junction device, as disclosed by Tatsuhiko Fujihira in his
paper "Theory of Semiconductor Superjunction Devices" published in
Jpn. J. Appl. Phys. 36 (1997) pp. 6254-6262. It is difficult and
costly to manufacture the vertical charge-balanced alternately
doped columns of Fig. A, especially at high densities
[0006] For these reasons, lateral JFET power devices with super
junction structures formed with stacked horizontal layers of
alternating dopant conductivity types overcome these difficulties.
This device may be configured in cascade with a low voltage MOSFET
to achieve the normally-off operation of a conventional device. Coe
discloses a lateral power device in U.S. Pat. No. 4,754,310 with
charge balanced super junction structure configured with stacked
horizontal layers of alternating conductivity types extended
between a source and drain column. Such structure of stacked
horizontal layers can be efficiently manufactured without the use
of masks. However, a typical device configuration as shown in FIG.
1B is limited by its drain-substrate breakdown voltage and is
further restricted due to the difficulty in improving its unclamped
inductive switching (UIS). FIG. 1C shows an example of another
lateral super junction device as disclosed by Tatsuhiko Fujihira in
the same paper as mentioned above, "Theory of Semiconductor
Superjunction Devices". This device suffers from excessive channel
resistance in distributing the current into the stacked n-type
conduction paths.
[0007] Therefore, a need still exists in the art of power
semiconductor device design and manufacture to provide new device
configurations and manufacturing methods for forming the lateral
power device such that the above discussed problems and limitations
can be resolved.
SUMMARY OF THE INVENTION
[0008] It is therefore an aspect of the present invention to
provide a new and improved device structure and manufacturing
method to form the junction field effect transistor (JFET) and
MOSFET power device on an P-epitaxial layer functioning as an
intermediate semiconductor layer over an N substrate constituting a
bottom semiconductor layer with lateral super junction structure
extended between deep N type columns functioning as the source and
drain columns, and a deep P+ column to function as the JFET gate.
In this structure, the drain terminal is moved to the substrate in
order to separate the two high current terminals to separate planes
to allow for better current spreading. This is achieved by making
the drain trench deeper than that of source and gate, so that the
drain terminal cuts through the P epitaxial region and contacts the
N+ substrate. This configuration also results in the formation of a
concave or saddle N+ drain substrate-P-epitaxial N+ drain column
junction that can be designed to achieve high substrate blocking
voltage. In addition, an N+-P-P+ gate-drain avalanche clamp diode
is formed from the N+ drain substrate to the P-epitaxial to the P+
gate column to provide a rugged high voltage diode that diverts the
avalanche current away from the superjunction layers of this
device.
[0009] Another aspect of this invention is to provide a new and
improved device structure and method to manufacture a normally off
semiconductor power device with a structure that integrates a low
voltage MOSFET with the super-junction JFET. The low voltage MOSFET
is disposed near the device surface with a configuration to achieve
the cascode connection required to make the normally off
switch.
[0010] These and other objects and advantages of the present
invention will no doubt become obvious to those of ordinary skill
in the art after having read the following detailed description of
the preferred embodiment, which is illustrated in the various
drawing figures.
BRIEF DESCRIPTION OF THE DRAWINGS
[0011] FIG. 1A is a cross sectional view for showing a conventional
configuration of a vertical super junction power device.
[0012] FIG. 1B is a cross sectional view of a conventional lateral
super junction power device.
[0013] FIG. 1C is a cross section of a perspective view of a
conventional lateral super junction power device.
[0014] FIG. 2 is a cross sectional view of a lateral super junction
power device of this invention.
[0015] FIGS. 3A to 3N are a series of cross sectional views showing
a method of forming a lateral super junction power device of this
invention.
[0016] FIGS. 3A-1 to 3C-1 area a series of cross sectional views
showing an alternative method of forming a lateral super junction
power device of this invention.
[0017] FIGS. 4A to 4C are top views for showing possible layouts
for integrating a MOSFET with a lateral super junction power device
of this invention.
[0018] FIGS. 5A to 5B are cross sections of perspective views for a
MOSFET integrated with a lateral super junction power device of
this invention.
[0019] FIG. 5C is a top view of the device from FIGS. 5A and
5B.
[0020] FIGS. 5D to 4F are cross sectional views taken along cross
section lines A-A, B-B and C-C of FIG. 5B.
[0021] FIG. 6A is a top view showing a stripe configuration of a
lateral super junction JFET of this invention.
[0022] FIGS. 6A-1 to 6A-3 are cross sectional views taken along
cross section lines D-D and E-E of FIG. 6A.
[0023] FIGS. 6B and 6C are top views showing how a MOSFET may be
integrated with a JFET of FIG. 6A.
[0024] FIG. 6C-1 is a cross sectional view taken along cross
section line F-F of FIG. 6C.
[0025] FIG. 6D is a top view showing multiple rows of JFETs in
stripe configuration.
[0026] FIG. 7A is a top view showing a closed cell configuration of
a lateral super junction JFET of this invention.
[0027] FIG. 7A-1 is a cross sectional view taken along cross
section lines G-G of FIG. 7A.
[0028] FIGS. 7B and 7C are top views showing how a MOSFET may be
integrated with a JFET of FIG. 7A.
[0029] FIG. 7C-1 is a cross sectional view taken along cross
section line G-G of FIG. 7C.
[0030] FIGS. 8A to 8Q are a series of cross sectional views showing
how to form a MOSFET integrated with a lateral super junction JFET
of this invention.
DETAILED DESCRIPTION OF THE METHOD
[0031] FIG. 2 is a cross sectional view of a lateral super junction
high-voltage (HV) JFET device 100 having a bottom drain substrate
of the present invention. The lateral JFET device 100 is supported
on a P-Epitaxial layer 115 and an optional N buffer region 106 on
an N+ substrate 105 functioning as a drain. The lateral JFET device
100 includes a drain metal electrode 110 disposed on the bottom of
the substrate 105. The lateral power device 100 further includes an
N source column 120-S and an N drain column 120-D formed
respectively as first and second conductive columns disposed in a
first trench and a second trench respectively on two opposite sides
on the substrate. In this embodiment, each of these source and
drain trenches may comprise a conductive material in the trench
such as a metal fill or polysilicon surrounded by an N+ doped
region 125. Of course, any other scheme may be utilized to form the
N+ drain and source columns 120-D and 120-S. The N+ source column
120-S contacts a source metal 120-S-M on the top surface through
the oxide 107. The drain 120-D disposed in the trench extends
downwardly to reach the N+ drain substrate layer 105. The source
trench is etched down into the P epitaxial layer 115. A P+ doped
region 165 is disposed below the source 120-S to suppress
activation of the parasitic NPN bipolar transistor formed from the
N+ source column 120-S to the P-epitaxial layer 115 to the N+
substrate 105. The heavily doped P+ region 165 in the P-epitaxial
layer 115 greatly reduces the minority carrier lifetime to suppress
the parasitic NPN transistor.
[0032] The lateral JFET device 100 further includes a P+ doped
column 130 disposed in another trench functioning as a gate of the
lateral power device. Like the N+ source and drain columns 120-S
and 120-D, the P+ gate column 130 comprises a trench filled with
metal or polysilicon surrounded by a P+ doped region 135. The P+
gate column 130 and the P-epitaxial layer 115, and the optional
N-buffer region 106, are further designed to form an avalanche
diode 121 to clamp the breakdown voltage. A super junction device
is normally very vulnerable to damage from avalanche breakdown. If
avalanche breakdown occurs in the charge balanced regions, the
avalanche current tends to focus and magnify on the small area in
which it started, permanently damaging that area. The avalanche
diode 121 diverts the avalanche current path away from the charge
balanced super junction region so that it instead flows between the
bottom of the P+ gate column 130 and the N+ drain layer 105, thus
increasing the robustness of the device. The P+ gate column 130 is
connected to a gate metal 130-M on the top surface. The source and
drain 120-S and 120-D may also be formed with N+ doped polysilicon
filling in the trenches or may be formed with metal plug filling
the trenches with N+ doped sidewalls. Alternatively, the trenches
may be filled by epitaxial growth or formed by any other method. It
is important that the sidewalls of the trench are formed with an N+
doped semiconductor material.
[0033] The lateral power device has a super-junction structure
formed as multiple layers of alternating horizontal P doped layers
140 and N doped layers 150. These alternating P doped and N doped
layers provide charge balanced conduction channels between source
120-S and the drain 120-D. The electric current is conducted along
a lateral direction with a gate 130 that controls and switches on
and off the power device. The gate 130 in FIG. 1 is disposed at a
different plane from the source and drain and therefore does not
cut off the lateral channels formed in the super-junction structure
with the alternating N and P doped layers. Both the gate column 130
and the source column 120-S should be formed to be deeper than the
super-junction structure so as to have contact with the P epitaxial
layer 115. The gate column 130 may be formed to the same depth as
the source column 120-S, or it may be formed deeper than source
column 120-S. Forming the gate column 130 deeper than source column
120-S can help direct avalanche current to the gate column 130 and
avalanche diode 121 rather than to the parasitic NPN transistor
under the source column 120-S. The schematic circuit of the lateral
superjunction JFET device 100 shows the drain metal 110, source
metal 120-S-M and the gate metal 130-M as the device terminals. The
avalanche diode 121 is formed between the gate and the drain.
[0034] FIGS. 3A to 3N are a series of cross sectional views for
illustrating the processing steps for manufacturing a JFET device
with lateral super-junction structure of this invention. FIG. 3A
shows a P+ substrate 205 supporting a P-epitaxial (P-epi) layer 215
with a dopant concentration and layer thickness designed to block a
voltage of 600 volts. Alternating P and N dopant layers 240 and 250
respectively are formed on top of P-epi layer 215 as charge
balanced layers, e.g. by using one of the processes described in
FIGS. 10 to 12 of U.S. application Ser. No. 12/592,619. In FIG. 3B,
a hard mask layer 222 is formed, e.g., through a thermal oxide
process to grow an oxide layer with a layer thickness of
approximately 205 Angstroms followed by oxide deposition to form
thick oxide layer to function as a hard mask layer 222. A
photoresist mask is used to etch through the hard mask 222 and form
opening 223. In FIG. 3C, a silicon etch process is carried out to
open the gate trenches 225 extending vertically through the
super-junction structure of alternating P and N dopant layers 240
and 250 to reach the P-epitaxial layer 215 having a depth of
approximately 60 micrometers and a width of about 10 micrometers.
The gate trench 225 may be formed with a slight taper of 88 degrees
to improve the manufacturability of the device. In FIG. 3D, a P+
implant with boron ions into the gate trench to form the P+ region
230 surrounding the gate trenches 225. By way of example, the boron
implants may comprise implants having implant energy of about 40
keV, concentration of about 5E15 cm.sup.-2, and a tilt angle of
about seven degrees and four 90-degree rotations and a
perpendicular boron ion implant of the same ion flux. In FIG. 3E, a
polysilicon lining layer 235 is first formed on the sidewalls and
bottom surface of the gate trenches 225, then an oxide layer 241 is
filled into the gate trenches. The polysilicon layer may also be
doped P+ to reduce the resistance of the gate trench. Then a
polysilicon and oxide etch back is carried out to remove the
polysilicon and oxide above the top surfaces. The polysilicon layer
235 is optional, but can act as a convenient endpoint when etching
or chemical mechanical polishing (CMP) back the oxide layer 241.
The polysilicon 235 may also be deposited undoped--later P type
dopants from the P+ layer 230 will diffuse into the polysilicon
235.
[0035] In FIG. 3F a second oxide layer 222' is deposited on top of
the first oxide layer 222. In FIG. 3G, a source mask is applied to
open trench openings 224 through the oxide layers 222 and 222'. In
FIG. 3H, source trenches 245-S are etched through the super
junction structure to a depth reaching the P-epi layer 215. In one
embodiment the depth of the trenches is approximately between 40
and 44 micrometers and having a width of about ten micrometers. At
any rate, the source trenches 245-S should end in the P-epi layer
215. Then the fabrication processes proceed with an angled N+
implant of about 7 degrees tilt followed by a perpendicular N+
implant to form N+ regions 255 surrounding the sidewalls and bottom
of the trenches 245-S. In FIG. 3I, a perpendicular P+ implant is
carried out to form the P+ regions 265 at the bottom of the
trenches 245-S. In FIG. 3J, a Ti/TiN layer 260 is first deposited
covering the sidewalls, the bottom surface of the trenches and over
the top surface of the oxide 222'. Then, a thick metal layer 251 of
6-8 micrometers is deposited to fill the trenches 245-S. A chemical
mechanical planarization (CMP) process is carried out to remove the
top portion of the metal layer 251 and Ti/TiN layer 260 to form a
planar top surface. In FIG. 3K, a drain trench mask is applied to
etch a drain trench 245-D in the semiconductor material, e.g. by
oxide etch followed by silicon etch. The drain trench 245-D reaches
down through the super junction structure and the P-epi 215 to
reach the N+ substrate 245. N+ regions 255-1 are formed along the
sidewalls of the drain trench 245-D. Another Ti/TiN layer 260-1 is
formed on the sidewalls of the trench and a metal 251-1 if formed
on the Ti/TiN layer 260-1. The metal 251-1 can be CMP back on top,
as shown in FIG. 2L. A second metal layer is deposited on the top
surface covering over the Ti/TiN layer 260. Another Ti/TiN layer
261 may optionally be deposited before the metal layer 270 is
deposited. A metal mask is applied to pattern the metal layer into
a source metal 270-S, gate metal (not shown) and optionally a top
drain metal (not shown), as shown in FIG. 3M. The gate 230 may be
connected to a gate metal (not shown) in the third dimension. In
FIG. 3N, a passivation layer 280 formed e.g., with a layer
comprising a standard SiO2/nitride/polyimide stack followed by
applying a passivation mask to pattern the passivation layer 280 to
expose the source metal 270-S. The manufacturing processes then
proceed with a back grinding operation. After the back grinding
operation is performed the processes are followed by a back metal
process to form a bottom drain metal layer 290 on the bottom
surface of the P+ substrate 205 to complete the manufacturing
processes.
[0036] There can be many alternative methods for forming the
lateral superjunction WET of this invention which should be obvious
to one proficient in the art. For example, there may be many ways
to form gate, drain and source columns.
[0037] In an alternative method starting in FIG. 3A-1, the super
junction structure may be initially formed on a single P-type
substrate 215'--the P type substrate 215' would be similar to the
P-epi layer 215 of FIG. 3A, but does not include N+ substrate 205.
The other processing steps are the same up to the back-grinding
step as described above. At this point, the back side of P-type
substrate 215' is ground back to, or close to the bottom of drain
trench 245-D, as shown in FIG. 3B-1. The N+ dopant ions can be
implanted into the back side of the device to form N+ drain 205',
which connects to the drain trench 245-D, and a back drain metal
290 may be formed. Some other alternative techniques are shown
later in the specification.
[0038] A JFET is a normally on device. In many applications a
normally off power switch is preferred over a normally on power
switch for various reasons including the device being off at
circuit start-up, compatibility with existing designs, and
familiarity. FIGS. 4A-4C show three possible layouts of integrating
a low voltage MOSFET with a high voltage lateral super junction
JFET of this invention together on a single semiconductor die. The
MOSFET can be arranged with the JFET in a cascode configuration
like the circuit shown in FIG. 4A in order to make the device a
normally off power switch device. In FIG. 4A, the semiconductor die
390A contains a high voltage lateral super junction JFET 391A of
this invention and a low voltage MOSFET region 392A. The JFET 391A
and the MOSFET 392A each occupy a separate portion in the die 390A.
In FIG. 4B, three MOSFET regions 392B are distributed throughout a
single large JFET region 391A to reduce package resistance and
inductance in a die 390B. In FIG. 4C, a MOSFET 392C is integrated
at the device cell level of JFET 391C in a die 390C. As shown in
FIG. 4C, a MOSFET 392C is integrated with each cell of JFET 391C.
The MOSFETs and JFETs may be connected internally and/or externally
in the cascode configuration. The low voltage MOSFET is very well
known in the art and can come in any number of forms including
lateral MOSFET, vertical MOSFET, trench gate, planar gate, etc, and
there can be a number of different packaging schemes for connecting
the MOSFET to the JFET in a cascode circuit configuration.
[0039] Of course, a MOSFET can also be co-packaged with a lateral
superjunction JFET of this invention in a single package having
separate MOSFET and superjunction JFET semiconductor dies. The
semiconductor dies can be co-packaged side-by-side or in a stacked
configuration.
[0040] FIG. 5A shows a cross section of a perspective view of a
MOSFET 470 integrated with a high voltage lateral super junction
JFET 400 of this invention. In this embodiment, a MOSFET 470 is
integrated into each JFET 400 cell, like in the layout of FIG. 4C.
In this layout, the lateral Low Voltage MOSFET 470 is placed in the
3.sup.rd dimension, perpendicular to the plane channel direction of
the lateral Super-Junction JFET 400. The JFET 400 is similar in
structure to the lateral superjunction JFET 100 of FIG. 2. In these
figures, the JFET N+ drain and source columns and JFET P+ gate
columns are represented as simple N and P doped columns (420-D,
420-S, 430). The doped columns 420-D, 420-S, and 430 operate in the
same way as the N and P columns of JFET 100. In this embodiment,
the MOSFET 470 comprises an N+ source region 471 in a P body region
472. The MOSFET N+ source 471 also acts as the overall source of
the cascode circuit. The MOSFET 470 further comprises a planar gate
473 in oxide 475 which also acts as the overall gate of the cascode
circuit. The N+ drain of the MOSFET 470 doubles as the N+ source
column 420-S of the JFET 400. The lateral super junction structure
of the JFET 400 comprises charge balanced, alternating stacked P
layers 440 and N layers 450, to form a lateral super junction drift
region running from the JFET N+ source column 420-S to the JFET N+
drain column 420-D. The super junction structure is supported on a
P epitaxial layer 415 over an N+ drain substrate 405. The drain
column 420-D extends down to contact the N+ drain substrate 405. A
drain metal 410 may be located beneath the N+ drain substrate 405.
The JFET N+ drain column 420-D (and N+ drain substrate 405 and
drain metal 410) act as the overall drain of the cascode circuit.
The JFET 400 is controlled by the JFET P+ gate column 430, which
extends down through the super junction P and N layers 440 and 450
to contact the P-Epitaxial layer 415. The JFET P+ gate column 430
is shorted to the MOSFET N+ source region 471 by a source metal
488, in accordance to the cascode circuit. In accordance with this
invention, an avalanche diode 421 is formed from the bottom of the
JFET P+ gate column 430 through the P-epitaxial layer 415 to the N+
drain substrate 405. The avalanche diode 421 diverts avalanche
current away from the super junction structure formed from charge
balanced alternating stacked N and P layers 450 and 440.
[0041] As shown in the schematic of the circuit, the MOSFET (MOS)
470 is connected to the superjunction JFET 400 in a cascode
configuration. The drain of the MOS 470 is connected the JFET
source 420-S. The JFET gate 430 is connected to the MOS source 471.
The lateral superjunction WET 400 further comprises an avalanche
diode 421 between its gate 430 and drain 420-D in accordance with
this invention.
[0042] FIG. 5B is the same as FIG. 5A, but shows the location of
vertical cross sections displayed in FIGS. 5D-F. FIG. 5D shows the
cross section A-A, with the source metal 488 connected to both the
MOS N+ source 471 and the JFET P+ gate column 430. The source metal
488 also contacts the MOS P body 472 in a third dimension. FIG. 5E
shows the cross section B-B with the N+ JFET source column 420-S
and the N+ JFET drain column 420-D. The cross section B-B
illustrates the lateral superjunction JFET 400, although the P+
JFET gate column 430 is in a third dimension. A P+ implant is
formed under the N+ JFET source column 420-S to suppress a
parasitic NPN transistor formed from the N+ source column 420-S to
the P-epitaxial 415 to the N+ drain substrate 405. FIG. 5F shows
the cross section C-C, which illustrates the low voltage MOSFET
470. MOSFETs are very well known devices, and it should be apparent
that other equivalent structures may be formed to integrate a
MOSFET with the lateral super junction JFET of this invention.
[0043] A top view of the lateral super junction JFET 400 integrated
with MOSFET 470 of FIGS. 5A and 5B may be seen in FIG. 5C. For
clarity, the top insulating layers are not shown. An outline of the
source metal 488 is indicated by the dashed-dot line. Dashed lines
show the outlines of contact openings 489 for the source metal to
make contact to the N+ MOS source region 471 and the P+ JFET gate
column 430 through the oxide 475 (not shown). MOS gates 473 allow
channels to be formed in the underlying body regions 472 (not
shown) from the N+ MOS source regions 471 to the N+ MOS drain
region/JFET source column 420-S. A polysilicon gate runner 477
connects the gates 473 together. From the N+ JFET source column
420-S, the current can flow through the super-junction structure
(the N layers 450 under top P layer 440) to the N+ JFET drain
column 420-D. In accordance with the cascode configuration, the
JFET P+ gate column 430 is shorted to the MOS N+ source region 471
at the contact openings 489 and provides high voltage blocking for
the device when the MOS gate 473 is turned off.
[0044] FIG. 6A shows a top view of a bottom drain lateral
superjunction JFET 500 of this invention. FIG. 6A shows the JFET
500 in a stripe configuration. It has an N+ JFET source column
520-S which is formed as a stripe. Running alongside the N+ JFET
source column 520-S stripe are P+ JFET gate columns 530 formed
intermittently like a dashed stripe. The P+ JFET gate columns 530
are staggered so that a current path is available from the N+ JFET
source column 520-S to the N+ JFET drain column 520-D. The cross
section D-D of FIG. 6A is shown in FIG. 6A-1. An N+ substrate 505
supports a P-epi layer 515. Over the P-Epi layer, the lateral
superjunction structure is formed from alternating stacked P layers
540 and N layers 550. The P layers 540 and N layers 550 are formed
with doping concentrations and thicknesses selected such that they
are charge balanced. The N layers 550 form lateral paths from the
N+ JFET source column 520-S to the N+ JFET drain column 520-D. The
P+ JFET gate columns 530 pinch off the current. The N+ JFET drain
column 520-D extends down to the N+ drain substrate 505, to form a
bottom drain device. A P+ region 565 may be formed under the N+
JFET source column 520-S to suppress a parasitic NPN bipolar
transistor action from the N+ source column 520-S to the P-epi 515
to the N+ substrate 505. An avalanche diode 521 may also be formed
from P+ gate column 530 to the N+ substrate (by way of P-epi 515)
in accordance with this invention.
[0045] The individual gate columns 530 may be connected together
with a shallow P+ surface implant 541, as shown in cross section
E-E in FIG. 6A-2. Alternatively, a metal strip could connect the P+
gates 530 on the top. FIG. 6A-3 shows a completed JFET 500-3 with
source metal and gate metal on the top, and drain metal on the
bottom taken along cross section line D-D of FIG. 6A. A source
metal 521 contacts the N+ JFET source column 520-S, and a gate
metal 531 contacts the P+ JFET gate column 530 through openings in
a thick dielectric layer 544, e.g. oxide or BPSG
(borophosphosilicate glass). A drain metal 510 is formed on the
bottom of the N+ substrate 505.
[0046] A low voltage MOSFET can also be integrated with the lateral
superjunction JFET 500 such that it is in the same plane as the
super-junction JFET. The MOSFET may be connected to the JFET 500 in
a cascode circuit configuration to make the overall device a
normally off device. FIG. 6B is a top view showing the next step
after FIG. 6A of forming the MOSFET--forming a MOS gate electrode
573, e.g. polysilicon (poly), on top of the device. A thin gate
oxide (not shown in FIG. 6B) insulates the MOS gate 573 from the
semiconductor surface.
[0047] Next, N+ MOS source 571, and N+ MOS drain 575 regions are
implanted into the top of the device, self aligned to the MOS gate
573. A P MOS body region 572 is also formed self-aligned to the MOS
gate 573, as shown in the top view of FIG. 6C. The outlines of the
P+ JFET gate columns 530 and N+ JFET source column 520-S are
indicated by dashed lines.
[0048] The cross section F-F of FIG. 6C is shown in FIG. 6C-1. The
N+ MOS source 571 is located within P MOS body region 572, with
both being self-aligned to the MOS gate 573. The MOS gate 573 is
separated from the semiconductor surface by a thin gate dielectric
574, e.g. gate oxide. On the other side of the MOS gate 573, the N+
MOS drain 575 is also formed self-aligned to the MOS gate 573. The
N+ MOS drain 575 is connected to the N+ JFET source column 520-S in
accordance to the cascode circuit configuration. A source metal 580
contacts the N+ MOS source 571 and P MOS body 572 through openings
in a thick dielectric layer 576. The P MOS body 572 connects to the
P+ JFET gate column 530, so the source of the MOS and the gate of
the JFET are connected, in accordance with the cascode circuit
configuration. An electric current can thus start at the N+ MOS
source 571, and flow to the N+ MOS drain 575, under the control of
the MOS gate 573. From the N+ MOS drain 575, the current can
continue through the N+ JFET source column 520-S to the
superjunction N layers 550 and flow laterally to the N+ JFET drain
520-D. The P+ JFET gate 530 is shorted to the N+ source 571 in the
cascode configuration, so when the MOSFET is on, the JFET gate 530
is approximately at the same potential as JFET source 520-S (and
MOS drain 575), thereby allowing current flow in the N layers 550.
The current can flow down the N+ JFET drain column 520-D to the N+
drain substrate 505, and to the drain metal 510 below. When the
MOSFET is off, the JFET gate 530 is at a lower potential than the
JFET source 520-S/MOS drain 575 thus shutting off current flow as
will be explained. Removal of the MOS gate 573 bias turns off the
low voltage MOSFET. In this mode, application of a positive bias to
the drain terminal 510 will result in a positive bias on the N
layers 550 and a corresponding negative bias on the JFET P gate 530
causing the superjunction N layers 550 and P layers 540 and the
P-epitaxial 515 to deplete. At a certain drain bias, the depletion
regions from adjacent P layers 540 merge, and pinch-off the JFET
source column 520-S from additional drain voltage. This allows the
device to block high voltages with low leakage. It also allows a
low voltage MOSFET to be used in the cascode circuit, because the
JFET supports the additional voltage after pinch off. The charge in
the P epi region 515 created when it depletes at high drain biases
reduces the peak electric field under the P+ gate 530 and allows
this device structure to have a high substrate breakdown voltage.
Though not shown here, the MOS gate 573 may be connected to a gate
metal terminal located on another part of the semiconductor die.
The source and drain stripe structures and layout may be repeated
throughout a semiconductor die, as shown in FIG. 6D.
[0049] FIG. 7A shows a top view of an alternative layout for the
device a closed cell layout. More specifically, it shows a
hexagonal closed cell layout. The basic lateral superjunction JFET
500' structure is shown in the top view of FIG. 7A and the cross
section view of FIG. 7A-1. The N+ JFET source columns 520'-S are
arranged in an interconnected hexagonal web. Alongside the N+ JFET
source column 520'-S are the P+ JFET gate columns 530'. The P+ JFET
gate columns 530' are staggered to allow current flow between them.
In the center of each hexagon is the N+ JFET gate column 520'-D. As
shown in the cross section view G-G of FIG. 7A-1, the JFET elements
are located in the superjunction structure of charge balanced,
stacked P layers 540 and N layers 550 over a P-Epi 515 over an N+
substrate 505. In each hexagonal closed cell, the current flows
laterally from the N+ JFET source column 520'-S at the sides of the
hexagon to the N+ JFET drain column 520'-D at the center of the
hexagon through the super junction N layers 550. The current can
then flow down the N+ drain column 520'-D to the N+ substrate 505.
An NPN suppressing P+ region is formed under the N+ JFET source
column 520'-S and an avalanche diode 521' is formed from the P+
JFET gate column 530' to the N+ substrate 505.
[0050] As with the stripe configuration of FIGS. 6A-6D, a MOSFET
may be easily integrated with the JFET 500' of FIG. 7A in a cascode
circuit configuration, as shown in FIGS. 7B-7C. In the top view of
FIG. 7B, which is a close-up view of a single hexagonal closed
cell, a network of MOS gate electrodes 573' are formed over the top
of the die. The MOS gates 573' run alongside the N+ JFET source
columns 520'-S.
[0051] In the top view of FIG. 7C, N+ MOS source 571' and N+ MOS
drain 575' regions are formed self-aligned to the MOS gate 573'. P
MOS body 572' regions are also formed self aligned to the MOS gate
573', surrounding the N+ MOS source regions 571'. The outlines of
the N+ JFET source 520'-S and P+ JFET gate 530' are shown as dashed
lines. As shown in the cross section H-H of FIG. 7C-1, the source
metal 580' contacts the N+ MOS source 571' and the P MOS body 572'
through openings in the thick dielectric 576'. The source metal
580' is also connected to the P+ JFET gate column 530' through P
MOS body 572', in accordance with the cascode circuit. The N+ MOS
drain 575' is formed on the other side of the MOS gate 573'. A thin
gate dielectric 574' insulates the MOS gate 573' from the
semiconductor surface. The N+ MOS drain 575' is connected to the N+
JFET column 520'-S in accordance with the cascode circuit
configuration.
[0052] FIGS. 8A-7Q are a series of cross sectional views showing a
method of manufacturing a MOSFET integrated with a bottom drain
lateral superjunction JFET of this invention. The process begins in
FIG. 8A with forming a lateral super junction structure made of
alternating stacked charge balanced P type layers 740 and N type
layers 750. The lateral super junction structure is formed over the
P-epi layer 715 which is formed over the N+ substrate 705.
[0053] Next a hard mask 722, e.g. oxide, is formed and patterned on
top. A gate trench 725 is etched into the semiconductor material,
as shown in FIG. 8B. The gate trench 725 extends down through the
lateral super junction structure to reach the P-epi 715. In FIG.
8C, the gate trench 725 is lined with P+ implant, e.g. by angled
implant, to from the P+ gate column 730. In FIG. 8D, a second hard
mask 726 is formed and patterned. The second hard mask material may
also fill in the gate trench 725, e.g., with an oxide fill 727.
Source trench 745-S and interim drain trenches 745-D are etched
into the semiconductor material through the lateral super junction
structure of P layers 740 and N layers 750 to the P-epi 715. The
interim drain trenches 745-D are much narrower than the source
trench 745-S. The sidewalls of the source trench 745-S and interim
drain trenches 745-D are implanted N type to form N type source
column 720-S and interim N type drain columns 720-D. In FIG. 8E, N+
polysilicon spacers 752 are formed along the sidewalls of the
source trench 745-S. By way of example, the polysilicon spacers 752
may be formed by depositing a layer of polysilicon, and then
isotropically etching the polysilicon layer to leave the
polysilicon spacers 752 in source trench 745-S. The process of
forming polysilicon spacers 752 additionally fills in the narrow
interim drain trenches 745-D with N+ polysilicon fill 753. In FIG.
8F, a vertical P+ implant is performed to form a P+ region 765 in
the P-epi layer 715 at the bottom of the source trench 745-S. The
P+ region 765 suppresses the parasitic NPN transistor formed from
the N source column 720-S to the P-epi 715 to the N substrate
705.
[0054] In FIG. 8G, oxide 723 is deposited over the device, and then
planarized. The oxide also fills in the remaining space in the
source trench 745-S. The oxide 723 is patterned with a third mask
and etched down to the surface of the semiconductor material in the
regions where the MOSFET will be formed. A thin gate oxide 774 is
formed on the exposed semiconductor material, and then a gate poly
773 is formed and patterned with a fourth mask on top of the gate
oxide 774, as shown in FIG. 8H. In FIG. 8I, a fifth mask is used as
a body block mask. A P body implant is performed to form P-body
region 772, using the body block mask 719, gate poly 773, and oxide
723 as a mask. The body region 772 is self aligned to the gate poly
773. If the gate poly 773 is long enough, e.g. if the gate poly 773
extends to the N source column 720-S--the body block mask 719 may
not even be necessary.
[0055] Next, in FIG. 8J, a blanket N+ implant is performed to form
N+ MOS source region 771 and N+ MOS drain region 775 on opposite
sides of the gate poly 773. The gate poly 773 forms a planar gate
between the MOS source 771 and the MOS drain 775. The MOS source
771 and MOS drain are self-aligned to the gate poly 773. The N+ MOS
drain 775 connects to the N JFET source column 720-S and the P-body
region 772 connects to the P+ JFET gate column 730.
[0056] An insulating material such as BPSG (borophosphosilicate
glass) 776 if formed on top, insulating the top surface of the
device, as shown in FIG. 8K. In FIG. 8L, a sixth mask is used to
form a contact hole 777 by etching through the BPSG 776 and into
the semiconductor material. The contact hole 777 should etch
through the N+ MOS source 771 to reach the P-body 772. A P+ body
contact region 778 can be formed at the bottom of contact hole 777,
e.g. by vertical implantation. As shown in FIG. 8M, a source metal
780 is deposited and patterned such that the source metal 780 fills
the contact hole 777 and makes contact to the N+ MOS source 771 and
P-body 772 (via P+ body contact region 778. The source metal 780 is
also connected to the P JFET gate column 730 through the P body
772, in accordance with the cascode circuit configuration. In the
third dimension, a gate pad (not shown) may also be formed for
external connection to the MOS gate poly 773. By way of example,
the source metal 780 may be aluminum.
[0057] In FIG. 8N, an eighth mask is used to form the drain trench
781 at the interim JFET drain columns 720-D. The drain trench 781
is etched through the interim JFET drain columns 720-D, down
through the P-epi 715 and into the N+ substrate 705. In FIG. 8O,
the drain trench 781 is lined with N type regions 779, e.g. by
forming N+ polysilicon spacers, N+ epitaxial growth, or by the
exposed sidewalls of the trench. Metal 783 is formed in the drain
trench 781, as shown in FIG. 7P. By way of example metal 783 may be
a copper plating that forms in the drain trench as metal 783 and on
top of the source metal 780 as metal 782. Finally in FIG. 7Q, the
back side of the wafer/N+ substrate 705 is thinned and a bottom
drain metal 790 is formed on the bottom.
[0058] As can be seen, there are many ways of forming the JFET
source, gate and drain columns including doping the semiconductor,
etching a trench then filling with doped polysilicon, etching a
trench and lining the trench with implanted dopants or doped
polysilicon and filling the rest of the trench with conductive
material or oxide, and so on. More alternative methods may include
etching a trench a forming doped side walls by epitaxial growth,
from the top surface implantation, implantations while forming the
epitaxial layer and super junction layers, etc.
[0059] While the above embodiments may have been described for
silicon, it should be clear to one of ordinary skill in the art
that they can be applied to any semiconductor material such as
silicon carbide (SiC), germanium (Ge), diamond, or gallium arsenic
(GaAs) or gallium nitride (GaN). Also, it should be clear that the
N+ and P+ columns comprising the source, drain and gate columns may
be formed in a number of different ways. Although the present
invention shows an N-channel JFET, it may also be applied to a
P-channel JFET, by switching the conductivity types of the P type
and N type semiconductor regions.
[0060] Although the present invention has been described in terms
of the presently preferred embodiment, it is to be understood that
such disclosure is not to be interpreted as limiting. Various
alterations and modifications will no doubt become apparent to
those skilled in the art after reading the above disclosure.
Accordingly, it is intended that the appended claims be interpreted
as covering all alterations and modifications as fall within the
true spirit and scope of the invention.
* * * * *