U.S. patent application number 14/289190 was filed with the patent office on 2015-12-03 for metal removal.
The applicant listed for this patent is APPLIED MATERIALS, INC.. Invention is credited to Nitin K. Ingle, Xikun Wang.
Application Number | 20150345029 14/289190 |
Document ID | / |
Family ID | 54701074 |
Filed Date | 2015-12-03 |
United States Patent
Application |
20150345029 |
Kind Code |
A1 |
Wang; Xikun ; et
al. |
December 3, 2015 |
METAL REMOVAL
Abstract
Methods are described herein for etching metal films, such as
cobalt and nickel, which are difficult to volatize. The methods
include exposing a metal film to a chlorine-containing precursor
(e.g. Cl.sub.2). Chlorine is then removed from the substrate
processing region. A carbon-and-nitrogen-containing precursor (e.g.
TMEDA) is delivered to the substrate processing region to form
volatile metal complexes which desorb from the surface of the metal
film. The methods presented remove metal while very slowly removing
the other exposed materials.
Inventors: |
Wang; Xikun; (Sunnyvale,
CA) ; Ingle; Nitin K.; (San Jose, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
APPLIED MATERIALS, INC. |
Santa Clara |
CA |
US |
|
|
Family ID: |
54701074 |
Appl. No.: |
14/289190 |
Filed: |
May 28, 2014 |
Current U.S.
Class: |
216/75 |
Current CPC
Class: |
C23F 1/12 20130101; C23F
4/00 20130101 |
International
Class: |
C23F 1/12 20060101
C23F001/12; C23F 1/02 20060101 C23F001/02 |
Claims
1. A method of etching metal from a substrate, the method
comprising: transferring the substrate into a substrate processing
region; flowing a halogen-containing precursor into the substrate
processing region, wherein the substrate processing region is
plasma-free during the flowing of the halogen-containing precursor;
purging the substrate processing region with a relatively inert gas
to remove the halogen-containing precursor from the substrate
processing region; flowing a carbon-and-nitrogen-containing
precursor in to the substrate processing region, wherein the
substrate processing region is plasma-free during the flowing of
the carbon-and-nitrogen-containing precursor and flowing of the
carbon-and-nitrogen-containing precursor occurs after purging the
substrate processing region; removing metal from the substrate; and
removing the substrate from the substrate processing region.
2. The method of claim 1 wherein the carbon-and-nitrogen-containing
precursor comprises one of o-phenylenediamine, p-phenylenediamine,
m-phenylenediamine or R.sub.2--N--[CH.sub.2].sub.mN--R.sub.2,
wherein m is 1, 2 or 3 and R is H, CH.sub.3 or C.sub.2H.sub.5.
3. The method of claim 1 further comprising purging the substrate
processing region with a relatively inert gas to remove the
carbon-and-nitrogen-containing precursor from the substrate
processing region and then repeating the operations of flowing the
halogen-containing precursor, purging to remove the
halogen-containing precursor and flowing the
carbon-and-nitrogen-containing precursor.
4. The method of claim 1 wherein the metal consists of either
cobalt or nickel.
5. A method of etching metal from a substrate, the method
comprising: flowing a halogen-containing precursor into a substrate
processing region housing the substrate, wherein the substrate
processing region is plasma-free during the flowing of the
halogen-containing precursor; removing unreacted halogen-containing
precursor from the substrate processing region; flowing a
carbon-and-nitrogen-containing precursor into the substrate
processing region, wherein the substrate processing region is
plasma-free during the flowing of the
carbon-and-nitrogen-containing precursor and flowing of the
carbon-and-nitrogen-containing precursor occurs after removing
unreacted halogen-containing precursor; and removing metal from the
substrate.
6. The method of claim 5 wherein the metal comprises at least one
of cobalt and nickel.
7. The method of claim 5 wherein the metal consists of a single
element.
8. The method of claim 5 wherein the carbon-and-nitrogen-containing
precursor comprises tetramethylethylenediamine.
9. The method of claim 5 wherein the carbon-and-nitrogen-containing
precursor comprises a carbon-nitrogen single bond.
10. The method of claim 5 wherein the
carbon-and-nitrogen-containing precursor comprises at least two
methyl groups.
11. The method of claim 5 wherein the halogen-containing precursor
comprises at least one of chlorine or bromine.
12. The method of claim 5 wherein the halogen-containing precursor
is a homonuclear diatomic halogen.
13. The method of claim 5 wherein the
carbon-and-nitrogen-containing precursor consists of carbon,
nitrogen and hydrogen.
14. The method of claim 5 wherein a pressure within the substrate
processing region is between about 0.01 Torr and about 10 Torr
during one or more of flowing the halogen-containing precursor or
flowing the carbon-and-nitrogen-containing precursor.
15. The method of claim 5 wherein a temperature of the substrate is
greater than or about -30.degree. C. and less than or about
400.degree. C. during flowing the halogen-containing precursor.
16. The method of claim 5 wherein a temperature of the substrate is
greater than or about -30.degree. C. and less than or about
400.degree. C. during flowing the carbon-and-nitrogen-containing
precursor.
Description
FIELD
[0001] Embodiments of the invention relate to gas-phase etching
metal.
BACKGROUND
[0002] Integrated circuits are made possible by processes which
produce intricately patterned material layers on substrate
surfaces. Producing patterned material on a substrate requires
controlled methods for removal of exposed material. Chemical
etching is used for a variety of purposes including transferring a
pattern in photoresist into underlying layers, thinning layers or
thinning lateral dimensions of features already present on the
surface. Often it is desirable to have an etch process which etches
one material faster than another helping e.g. a pattern transfer
process proceed. Such an etch process is said to be selective to
the first material. As a result of the diversity of materials,
circuits and processes, etch processes have been developed with a
selectivity towards a variety of materials.
[0003] Dry etch processes are often desirable for selectively
removing material from semiconductor substrates. The desirability
stems from the ability to gently remove material from miniature
structures with minimal physical disturbance. Dry etch processes
also allow the etch rate to be abruptly stopped by removing the gas
phase reagents. Some dry-etch processes involve the exposure of a
substrate to remote plasma by-products formed from one or more
precursors. For example, remote plasma excitation of ammonia and
nitrogen trifluoride enables silicon oxide to be selectively
removed from a patterned substrate when the plasma effluents are
flowed into the substrate processing region. Remote plasma etch
processes have recently been developed to selectively remove
several dielectrics relative to one another. However, dry-etch
processes are still needed, which delicately remove metals which
have limited or no previously known chemically volatile
pathways.
SUMMARY
[0004] Methods are described herein for etching metal films, such
as cobalt and nickel, which are difficult to volatize. The methods
include exposing a metal film to a chlorine-containing precursor
(e.g. Cl.sub.2). Chlorine is then removed from the substrate
processing region. A carbon-and-nitrogen-containing precursor (e.g.
TMEDA) is delivered to the substrate processing region to form
volatile metal complexes which desorb from the surface of the metal
film. The methods presented remove metal while very slowly removing
the other exposed materials.
[0005] Embodiments of the invention include methods of etching
metal from a substrate. The methods include transferring the
substrate into the substrate processing region. The methods further
include flowing a halogen-containing precursor into the substrate
processing region. The substrate processing region is plasma-free
during the flowing of the halogen-containing precursor. The methods
further include purging the substrate processing region with a
relatively inert gas to remove the halogen-containing precursor
from the substrate processing region. The methods further include
flowing a carbon-and-nitrogen-containing precursor in to the
substrate processing region. The substrate processing region is
plasma-free during the flowing of the
carbon-and-nitrogen-containing precursor. Flowing of the
carbon-and-nitrogen-containing precursor occurs after purging the
substrate processing region. The methods further include removing
the substrate from the substrate processing region.
[0006] Embodiments of the invention include methods of etching
metal from a substrate. The methods include flowing a
halogen-containing precursor into a substrate processing region
housing the substrate. The substrate processing region is
plasma-free during the flowing of the halogen-containing precursor.
The methods further include removing unreacted halogen-containing
precursor from the substrate processing region. The methods further
include flowing a carbon-and-nitrogen-containing precursor into the
substrate processing region. The substrate processing region is
plasma-free during the flowing of the
carbon-and-nitrogen-containing precursor. Flowing of the
carbon-and-nitrogen-containing precursor occurs after removing
unreacted halogen-containing precursor.
[0007] Additional embodiments and features are set forth in part in
the description that follows, and in part will become apparent to
those skilled in the art upon examination of the specification or
may be learned by the practice of the embodiments. The features and
advantages of the embodiments may be realized and attained by means
of the instrumentalities, combinations, and methods described in
the specification.
DESCRIPTION OF THE DRAWINGS
[0008] A further understanding of the nature and advantages of the
embodiments may be realized by reference to the remaining portions
of the specification and the drawings.
[0009] FIG. 1 is a flow chart of a cobalt etch process according to
embodiments.
[0010] FIG. 2 is a flow chart of a cobalt etch process according to
embodiments.
[0011] FIG. 3A shows a schematic cross-sectional view of a
substrate processing chamber according to the disclosed
technology.
[0012] FIG. 3B shows a schematic cross-sectional view of a portion
of a substrate processing chamber according to the disclosed
technology.
[0013] FIG. 3C shows a bottom plan view of a showerhead according
to the disclosed technology.
[0014] FIG. 4 shows a top plan view of an exemplary substrate
processing system according to the disclosed technology.
[0015] In the appended figures, similar components and/or features
may have the same reference label. Further, various components of
the same type may be distinguished by following the reference label
by a dash and a second label that distinguishes among the similar
components. If only the first reference label is used in the
specification, the description is applicable to any one of the
similar components having the same first reference label
irrespective of the second reference label.
DETAILED DESCRIPTION
[0016] Methods are described herein for etching metal films, such
as cobalt and nickel, which are difficult to volatize. The methods
include exposing a metal film to a chlorine-containing precursor
(e.g. Cl.sub.2). Chlorine is then removed from the substrate
processing region. A carbon-and-nitrogen-containing precursor (e.g.
TMEDA) is delivered to the substrate processing region to form
volatile metal complexes which desorb from the surface of the metal
film. The methods presented remove metal from the substrate while
very slowly removing the other exposed materials.
[0017] In order to better understand and appreciate the invention,
reference is now made to FIG. 1 which is a flow chart of a cobalt
etch process 100 according to embodiments. The cobalt film of this
example may be in the form of a blanket layer on a substrate or
cobalt may reside in discrete regions of a patterned substrate
surface. In either case, regions of exposed cobalt are present on
the surface of the substrate. The substrate is delivered into a
substrate processing region (operation 110). A flow of chlorine
(Cl.sub.2) is introduced into a substrate processing region in
operation 120. Other sources of chlorine may be used to augment or
replace the chlorine. More generally, a chlorine-containing
precursor may be flowed into the substrate processing region, such
as chlorine (Cl.sub.2), xenon dichloride or boron trichloride. A
halogen-containing precursor may also be used instead or to augment
the chlorine-containing precursor as described shortly. Exposing
the cobalt to chlorine may occur with plasma or without any plasma
in the substrate processing region in embodiments. In other words,
the substrate processing region may be plasma-free during operation
120 of cobalt etch process 100. The cobalt reacts with the chlorine
to presumably form cobalt-chloride adsorbates on or near the
surface of the substrate. The cobalt-chloride adsorbates facilitate
the subsequent removal of cobalt from the substrate. Residual
halogen-containing precursor (e.g. Cl.sub.2 in the example) is
purged from the substrate processing region in operation 130.
Purging operation 130 may involve flowing a relatively inert gas
into the substrate processing region to actively displace the
halogen-containing precursor. Alternatively, the substrate
processing region may be evacuated in another manner to remove
residual halogen-containing precursor.
[0018] After purging operation 130, a
carbon-and-nitrogen-containing precursor is flowed into the
substrate processing region in operation 140 of cobalt etch process
100. The carbon-and-nitrogen-containing precursor may possess at
least one carbon-nitrogen bond and the bond may be a single bond in
embodiments. The carbon-and-nitrogen-containing precursor comprises
at least two nitrogen atoms according to embodiments. The
carbon-and-nitrogen-containing precursor may consist of carbon,
nitrogen and hydrogen in embodiments. The
carbon-and-nitrogen-containing precursor comprises at least two,
three or four methyl groups according to embodiments. An exemplary
carbon-and-nitrogen-containing precursor is
tetramethylethylenediamine (aka TMEDA or C.sub.6H.sub.16N.sub.2).
The carbon-and-nitrogen-containing precursor is flowed into the
plasma region after the operation of purging the substrate
processing region to avoid having the
carbon-and-nitrogen-containing precursor react with the
halogen-containing precursor. The reaction between the
carbon-and-nitrogen-containing precursor and the
chlorine-containing precursor may produce undesirable deposition
and accumulation on the substrate or processing system hardware in
embodiments. The substrate is removed in operation 150 of cobalt
etch process 100.
[0019] Reference is now made to FIG. 2 which is a flow chart of a
cobalt etch process 200 according to embodiments. Exposed cobalt in
a cobalt film may be in the form of a blanket layer in discrete
regions of a patterned substrate surface. The substrate is
delivered into a substrate processing region (operation 210). A
flow of chlorine (Cl.sub.2) is introduced into a substrate
processing region in operation 220. A chlorine-containing precursor
may generally be flowed into the substrate processing region, such
as chlorine (Cl.sub.2), xenon dichloride or boron trichloride. A
halogen-containing precursor may most generally be used. Exposing
the cobalt to chlorine may occur with plasma or without any plasma
in the substrate processing region in embodiments. In other words,
the substrate processing region may be plasma-free during operation
220 of cobalt etch process 200. The cobalt reacts with the chlorine
to presumably form cobalt-chloride adsorbates which are desorbed in
a subsequent operation to remove cobalt from the substrate.
Residual halogen-containing precursor (e.g. Cl.sub.2 in the
example) is purged from the substrate processing region in
operation 230. Purging operation 230 may involve flowing a
relatively inert gas (e.g. helium or argon) into the substrate
processing region to actively displace the halogen-containing
precursor. Alternatively, the substrate processing region may be
evacuated in another manner to remove residual halogen-containing
precursor.
[0020] After purging operation 230, a
carbon-and-nitrogen-containing precursor is flowed into the
substrate processing region in operation 240 of cobalt etch process
200. The carbon-and-nitrogen-containing precursor may possess at
least one carbon-nitrogen bond and the bond may be a single bond in
embodiments. The carbon-and-nitrogen-containing precursor comprises
at least two nitrogen atoms according to embodiments. The
carbon-and-nitrogen-containing precursor may consist of carbon,
nitrogen and hydrogen in embodiments. The
carbon-and-nitrogen-containing precursor comprises at least two,
three or four methyl groups according to embodiments. An exemplary
carbon-and-nitrogen-containing precursor is
tetramethylethylenediamine (aka TMEDA or C.sub.6H.sub.16N.sub.2).
The carbon-and-nitrogen-containing precursor is flowed into the
plasma region after the operation of purging the substrate
processing region to avoid having the
carbon-and-nitrogen-containing precursor react with the
halogen-containing precursor. The reaction between the
carbon-and-nitrogen-containing precursor and the
chlorine-containing precursor may produce undesirable deposition
and accumulation on the substrate or processing system hardware in
embodiments.
[0021] If a target amount of cobalt has been removed from the
substrate (decision operation 250) then the substrate is removed in
operation 270 of cobalt etch process 200. If additional cobalt
needs to be removed, the substrate processing region is purged to
remove residual carbon-and-nitrogen-containing precursor and
operations 220-240 are repeated before making the decision to
continue again or stop the etch process (decision operation
250).
[0022] In general, a halogen-containing precursor may be used in
place of the chlorine-containing precursor (e.g. Cl.sub.2) of
cobalt etch process 200. The halogen-containing precursor may
include at least one of chlorine or bromine in embodiments. The
halogen-containing precursor may be a diatomic halogen, a
homonuclear diatomic halogen or a heteronuclear diatomic halogen
according to embodiments.
[0023] A reaction between the carbon-and-nitrogen-containing
precursor and the halogen-containing precursor has been found to
not only reduce the efficacy of the etch process, but also produces
solid residue which can clog chamber features and impede flow
rates. To avoid forming solid residue, the substrate processing
region may be purged between the operations of flowing the
halogen-containing precursor (operations 120 or 220) and flowing
the carbon-and-nitrogen-containing precursor (operations 140 or
240) into the substrate processing region. Flowing the
carbon-and-nitrogen-containing precursor (140 or 240) occurs after
flowing the halogen-containing precursor (120 or 220) in
embodiments. The operations may be repeated (in an "etch cycle" as
referred to herein) to remove additional cobalt when desired
(depicted in cobalt etch process 200). The substrate processing
region may be purged (in operation 260) with a relatively inert gas
following operation 240, at which point operation 220 may be
repeated to rechlorinate the cobalt surface. Operation 240 may then
be repeated after another optional purging operation (operation
230). A relatively inert gas may be, for example, helium and/or
argon.
[0024] The term "etch cycle" will be used to describe operation 220
(involving the halogen-containing precursor) followed by operation
240 (involving the carbon-and-nitrogen-containing precursor). Each
etch cycle may remove between about 2 .ANG. and about 8 .ANG. or
between about 3 .ANG. and about 6 .ANG. according to
embodiments.
[0025] The carbon-and-nitrogen-containing precursor may be TMEDA
(C.sub.6H.sub.16N.sub.2) as in the example. In general, the
carbon-and-hydrogen-containing precursor may include carbon and
nitrogen and may consist only of carbon, nitrogen and hydrogen. The
carbon-and-nitrogen-containing precursor may possess at least one
carbon-nitrogen bond and the bond may be a single bond in
embodiments. The carbon-and-nitrogen-containing precursor comprises
at least two nitrogen atoms according to embodiments. The
carbon-and-nitrogen-containing precursor may include a phenyl group
in embodiments. For example, the carbon-and-nitrogen-containing
precursor may include o-phenylenediamine, p-phenylenediamine and/or
m-phenylenediamine according to embodiments. Chemically linear
options are also possible, the carbon-and-nitrogen-containing
precursor may be of the form
R.sub.2--N--[CH.sub.2].sub.mN--R.sub.2, where m is 1, 2 or 3 and R
is H, CH.sub.3, C.sub.2H.sub.5 or a higher order hydrocarbon in
embodiments.
[0026] Creating volatile reaction products from cobalt removes
material during cobalt etch process 100 or cobalt etch process 200.
The volatile reaction products are thought to include methyl cobalt
complexes such as Co(CH.sub.3).sub.4. Exposing cobalt first to
chlorine (operations 120 or 220) and then to the
carbon-and-nitrogen-containing precursor (operations 140 or 240)
has been found to produce the production worthy etch rate of cobalt
and presumably makes volatile reaction products which leave the
surface by desorption. Cobalt chloride complexes have been found to
be nonvolatile with or without plasma treatment. However, the
formation of cobalt chloride complexes have been found to be a
conducive intermediate state toward volatization and
desorption.
[0027] In embodiments, the chlorine-containing precursor (e.g.
Cl.sub.2) may be flowed into the substrate processing region at a
flow rate of between about 3 sccm (standard cubic centimeters per
minute) and about 50 sccm or between about 3 sccm and about 20 sccm
in embodiments. The carbon-and-nitrogen-containing precursor may be
flowed at a flow rate of between about 10 sccm and about 300 sccm
or between about 20 sccm and about 200 sccm according to
embodiments. The carbon-and-nitrogen-containing precursor may be a
liquid prior to entering the substrate processing region, in which
case a bubbler and carrier gas may be used to flow the precursor
into the substrate processing region. The bubbler may heat the
precursor above room temperature, for example to between about
25.degree. C. and about 60.degree. C., to increase the vapor
pressure while the carrier gas is flowed through the liquid. The
carrier gas may be relatively inert in comparison to the
carbon-and-nitrogen-containing precursor. Helium may be used as the
carrier gas. The carrier gas may be flowed at between about 1 slm
(standard liters per minute) and about 5 slm according to
embodiments. One of ordinary skill in the art would recognize that
other gases and/or flows may be used depending on a number of
factors including processing chamber configuration, substrate size,
geometry and layout of features being etched.
[0028] The substrate processing region may be devoid of plasma or
"plasma-free" during all etch operations depicted in cobalt etch
process 100 or cobalt etch process 200. The substrate processing
region may be plasma-free during an etch cycle according to
embodiments. In embodiments, a plasma-free substrate processing
region means there is essentially no concentration of ionized
species and free electrons within the substrate processing
region.
[0029] During the operations of processing the cobalt layer (e.g.
operations 120,220 and 140,240), the substrate may be maintained
may be between about -30.degree. C. and about 400.degree. C. in
general. In embodiments, the temperature of the substrate during
the operations described may be greater than or about -30.degree.
C., greater than or about -10.degree. C., greater than or about
10.degree. C., or greater than or about 25.degree. C. The substrate
temperatures may be less than or about 400.degree. C., less than or
about 350.degree. C., less than or about 250.degree. C. in
embodiments. The pressure in the substrate processing region may be
about or below 20 Torr during each of the operations (e.g.
operations 120,140 and 220,240), and may be about or below 15 Torr,
5 Torr or 3 Torr. For example, the pressure may be between about 10
mTorr and about 10 Torr.
[0030] Generally speaking, the cobalt is a "metal" and may be one
of cobalt or nickel. Both cobalt and nickel have been found to etch
using the methods described herein. The metal layer may consist of
or consist essentially of cobalt and may consist of or consist
essentially of nickel according to embodiments. The metal layer may
consist of or consist essentially of a single element according to
embodiments.
[0031] Additional process parameters are disclosed in the course of
describing an exemplary processing chamber and system.
Exemplary Processing System
[0032] FIG. 3A shows a cross-sectional view of an exemplary
substrate processing chamber 1001 with partitioned plasma
generation regions within the processing chamber. During film
etching, a process gas may be flowed into chamber plasma region
1015 through a gas inlet assembly 1105. A remote plasma system
(RPS) 1002 may optionally be included in the system, and may
process a first gas which then travels through gas inlet assembly
1105. The inlet assembly 1105 may include two or more distinct gas
supply channels where the second channel (not shown) may bypass the
RPS 1002, if included. Accordingly, in embodiments the precursor
gases may be delivered to the processing chamber in an unexcited
state. In another example, the first channel provided through the
RPS may be used for the process gas and the second channel
bypassing the RPS may be used for a treatment gas in embodiments.
The process gas may be excited within the RPS 1002 prior to
entering the chamber plasma region 1015. Accordingly, the
chlorine-containing precursor as discussed above, for example, may
pass through RPS 1002 or bypass the RPS unit in embodiments.
Various other examples encompassed by this arrangement will be
similarly understood.
[0033] A cooling plate 1003, faceplate 1017, ion suppressor 1023,
showerhead 1025, and a substrate support 1065 (also known as a
pedestal), having a substrate 1055 disposed thereon, are shown and
may each be included according to embodiments. The pedestal 1065
may have a heat exchange channel through which a heat exchange
fluid flows to control the temperature of the substrate. This
configuration may allow the substrate 1055 temperature to be cooled
or heated to maintain relatively low temperatures, such as between
about -20.degree. C. to about 200.degree. C., or therebetween. The
heat exchange fluid may comprise ethylene glycol and/or water. The
wafer support platter of the pedestal 1065, which may comprise
aluminum, ceramic, or a combination thereof, may also be
resistively heated to achieve relatively high temperatures, such as
from up to or about 100.degree. C. to above or about 1100.degree.
C., using an embedded resistive heater element. The heating element
may be formed within the pedestal as one or more loops, and an
outer portion of the heater element may run adjacent to a perimeter
of the support platter, while an inner portion runs on the path of
a concentric circle having a smaller radius. The wiring to the
heater element may pass through the stem of the pedestal 1065,
which may be further configured to rotate.
[0034] The faceplate 1017 may be pyramidal, conical, or of another
similar structure with a narrow top portion expanding to a wide
bottom portion. The faceplate 1017 may additionally be flat as
shown and include a plurality of through-channels used to
distribute process gases. Plasma generating gases and/or plasma
excited species, depending on use of the RPS 1002, may pass through
a plurality of holes, shown in FIG. 3B, in faceplate 1017 for a
more uniform delivery into the chamber plasma region 1015.
[0035] Exemplary configurations may include having the gas inlet
assembly 1105 open into a gas supply region 1058 partitioned from
the chamber plasma region 1015 by faceplate 1017 so that the
gases/species flow through the holes in the faceplate 1017 into the
chamber plasma region 1015. Structural and operational features may
be selected to prevent significant backflow of plasma from the
chamber plasma region 1015 back into the supply region 1058, gas
inlet assembly 1105, and fluid supply system 1010. The structural
features may include the selection of dimensions and
cross-sectional geometries of the apertures in faceplate 1017 to
deactivate back-streaming plasma. The operational features may
include maintaining a pressure difference between the gas supply
region 1058 and chamber plasma region 1015 that maintains a
unidirectional flow of plasma through the showerhead 1025. The
faceplate 1017, or a conductive top portion of the chamber, and
showerhead 1025 are shown with an insulating ring 1020 located
between the features, which allows an AC potential to be applied to
the faceplate 1017 relative to showerhead 1025 and/or ion
suppressor 1023. The insulating ring 1020 may be positioned between
the faceplate 1017 and the showerhead 1025 and/or ion suppressor
1023 enabling a capacitively coupled plasma (CCP) to be formed in
the first plasma region. A baffle (not shown) may additionally be
located in the chamber plasma region 1015, or otherwise coupled
with gas inlet assembly 1105, to affect the flow of fluid into the
region through gas inlet assembly 1105.
[0036] The ion suppressor 1023 may comprise a plate or other
geometry that defines a plurality of apertures throughout the
structure that are configured to suppress the migration of
ionically-charged species out of chamber plasma region 1015 while
allowing uncharged neutral or radical species to pass through the
ion suppressor 1023 into an activated gas delivery region between
the suppressor and the showerhead. In embodiments, the ion
suppressor 1023 may comprise a perforated plate with a variety of
aperture configurations. These uncharged species may include highly
reactive species that are transported with less reactive carrier
gas through the apertures. As noted above, the migration of ionic
species through the holes may be reduced, and in some instances
completely suppressed.
[0037] The plurality of holes in the ion suppressor 1023 may be
configured to control the passage of the activated gas, i.e., the
ionic, radical, and/or neutral species, through the ion suppressor
1023. For example, the aspect ratio of the holes, or the hole
diameter to length, and/or the geometry of the holes may be
controlled so that the flow of ionically-charged species in the
activated gas passing through the ion suppressor 1023 is reduced.
The holes in the ion suppressor 1023 may include a tapered portion
that faces chamber plasma region 1015, and a cylindrical portion
that faces the showerhead 1025. The cylindrical portion may be
shaped and dimensioned to control the flow of ionic species passing
to the showerhead 1025. An adjustable electrical bias may also be
applied to the ion suppressor 1023 as an additional means to
control the flow of ionic species through the suppressor.
[0038] The ion suppression element 1023 may function to reduce or
eliminate the amount of ionically charged species traveling from
the plasma generation region to the substrate. Showerhead 1025 in
combination with ion suppressor 1023 may allow a plasma present in
chamber plasma region 1015 to avoid directly exciting gases in
substrate processing region 1033, while still allowing excited
species to travel from chamber plasma region 1015 into substrate
processing region 1033. In this way, the chamber may be configured
to prevent the plasma from contacting a substrate 1055 being
etched. This may advantageously protect a variety of intricate
structures and films patterned on the substrate, which may be
damaged, dislocated, or otherwise warped if directly contacted by a
generated plasma.
[0039] The processing system may further include a power supply
1040 electrically coupled with the processing chamber to provide
electric power to the faceplate 1017, ion suppressor 1023,
showerhead 1025, and/or pedestal 1065 to generate a plasma in the
chamber plasma region 1015 or processing region 1033. The power
supply may be configured to deliver an adjustable amount of power
to the chamber depending on the process performed. Such a
configuration may allow for a tunable plasma to be used in the
processes being performed. Unlike a remote plasma unit, which is
often presented with on or off functionality, a tunable plasma may
be configured to deliver a specific amount of power to chamber
plasma region 1015. This in turn may allow development of
particular plasma characteristics such that precursors may be
dissociated in specific ways to enhance the etching profiles
produced by these precursors.
[0040] A plasma may be ignited in chamber plasma region 1015 above
showerhead 1025 and/or substrate processing region 1033 below
showerhead 1025. The etch cycle may be performed in the substrate
processing region and the substrate processing region may be
plasma-free during each operation of the etch cycle (for example
during flowing of the halogen-containing precursor and the
subsequent flowing of the carbon-and-nitrogen-containing
precursor). When any region is not plasma-free, an AC voltage
typically in the radio frequency (RF) range may be applied between
the conductive top portion of the processing chamber, such as
faceplate 1017, and showerhead 1025 and/or ion suppressor 1023 to
ignite a plasma in chamber plasma region 1015 during processes. An
RF power supply may generate a high RF frequency of 13.56 MHz but
may also generate other frequencies alone or in combination with
the 13.56 MHz frequency.
[0041] Plasma power can be of a variety of frequencies or a
combination of multiple frequencies. In the exemplary processing
system the plasma may be provided by RF power delivered to
faceplate 1017 relative to ion suppressor 1023 and/or showerhead
1025. The RF frequency applied in the exemplary processing system
may be low RF frequencies less than about 200 kHz, high RF
frequencies between about 10 MHz and about 15 MHz, or microwave
frequencies greater than or about 1 GHz in different embodiments.
The plasma power may be capacitively-coupled (CCP) or
inductively-coupled (ICP) into the remote plasma region.
[0042] Plasma power may also be simultaneously applied to both
chamber plasma region 1015 and substrate processing region 1033
during etching processes described herein. The frequencies and
powers above apply to both regions. Either region may be excited
using either a capacitively-coupled plasma (CCP) or an
inductively-coupled plasma (ICP).
[0043] Chamber plasma region 1015 (top plasma in figure) may be
left at low or no power when a bottom plasma in the substrate
processing region 1033 is turned on to, for example, cure a film or
clean the interior surfaces bordering substrate processing region
1033. A plasma in substrate processing region 1033 may be ignited
by applying an AC voltage between showerhead 1055 and the pedestal
1065 or bottom of the chamber. A cleaning gas may be introduced
into substrate processing region 1033 while the plasma is
present.
[0044] A fluid, such as a precursor, for example a
chlorine-containing precursor, may be flowed into the processing
region 1033 by embodiments of the showerhead described herein.
Excited species derived from the process gas in chamber plasma
region 1015 may travel through apertures in the ion suppressor
1023, and/or showerhead 1025 and react with an additional precursor
flowing into the processing region 1033 from a separate portion of
the showerhead. Alternatively, if all precursor species are being
excited in chamber plasma region 1015, no additional precursors may
be flowed through the separate portion of the showerhead. Little or
no plasma may be present in the processing region 1033. Excited
derivatives of the precursors may combine in the region above the
substrate and, on occasion, on the substrate to etch structures or
remove species on the substrate in disclosed applications.
[0045] Exciting the fluids in the chamber plasma region 1015
directly, or exciting the fluids in the RPS units 1002, may provide
several benefits. The concentration of the excited species derived
from the fluids may be increased within the processing region 1033
due to the plasma in the chamber plasma region 1015. This increase
may result from the location of the plasma in the chamber plasma
region 1015. The processing region 1033 may be located closer to
the chamber plasma region 1015 than the remote plasma system (RPS)
1002, leaving less time for the excited species to leave excited
states through collisions with other gas molecules, walls of the
chamber, and surfaces of the showerhead.
[0046] The uniformity of the concentration of the excited species
derived from the process gas may also be increased within the
processing region 1033. This may result from the shape of the
chamber plasma region 1015, which may be more similar to the shape
of the processing region 1033. Excited species created in the RPS
1002 may travel greater distances to pass through apertures near
the edges of the showerhead 1025 relative to species that pass
through apertures near the center of the showerhead 1025. The
greater distance may result in a reduced excitation of the excited
species and, for example, may result in a slower growth rate near
the edge of a substrate. Exciting the fluids in the chamber plasma
region 1015 may mitigate this variation for the fluid flowed
through RPS 1002, or alternatively bypassed around the RPS
unit.
[0047] The processing gases may be excited in chamber plasma region
1015 and may be passed through the showerhead 1025 to the
processing region 1033 in the excited state. While a plasma may be
generated in the processing region 1033, a plasma may alternatively
not be generated in the processing region. In one example, the only
excitation of the processing gas or precursors may be from exciting
the processing gases in chamber plasma region 1015 to react with
one another in the processing region 1033. As previously discussed,
this may be to protect the structures patterned on the substrate
1055.
[0048] In addition to the fluid precursors, there may be other
gases introduced at varied times for varied purposes, including
carrier gases to aid delivery. A treatment gas may be introduced to
remove unwanted species from the chamber walls and/or the
substrate. A treatment gas may be excited in a plasma and then used
to reduce or remove residual content inside the chamber. In other
embodiments the treatment gas may be used without a plasma. When
the treatment gas includes water vapor, the delivery may be
achieved using a mass flow meter (MFM), an injection valve, or by
commercially available water vapor generators. The treatment gas
may be introduced to the processing region 1033, either through the
RPS unit or bypassing the RPS unit, and may further be excited in
the first plasma region.
[0049] FIG. 3B shows a detailed view of the features affecting the
processing gas distribution through faceplate 1017. As shown in
FIG. 3A and FIG. 3B, faceplate 1017, cooling plate 1003, and gas
inlet assembly 1105 intersect to define a gas supply region 1058
into which process gases may be delivered from gas inlet 1105. The
gases may fill the gas supply region 1058 and flow to chamber
plasma region 1015 through apertures 1059 in faceplate 1017. The
apertures 1059 may be configured to direct flow in a substantially
unidirectional manner such that process gases may flow into
processing region 1033, but may be partially or fully prevented
from backflow into the gas supply region 1058 after traversing the
faceplate 1017.
[0050] The gas distribution assemblies such as showerhead 1025 for
use in the processing chamber section 1001 may be referred to as
dual channel showerheads (DCSH) and are additionally detailed in
the embodiments described in FIG. 3A as well as FIG. 3C herein. The
dual channel showerhead may provide for etching processes that
allow for separation of etchants outside of the processing region
1033 to provide limited interaction with chamber components and
each other prior to being delivered into the processing region.
[0051] The showerhead 1025 may comprise an upper plate 1014 and a
lower plate 1016. The plates may be coupled with one another to
define a volume 1018 between the plates. The coupling of the plates
may be so as to provide first fluid channels 1019 through the upper
and lower plates, and second fluid channels 1021 through the lower
plate 1016. The formed channels may be configured to provide fluid
access from the volume 1018 through the lower plate 1016 via second
fluid channels 1021 alone, and the first fluid channels 1019 may be
fluidly isolated from the volume 1018 between the plates and the
second fluid channels 1021. The volume 1018 may be fluidly
accessible through a side of the gas distribution assembly 1025.
Although the exemplary chamber of FIG. 3A includes a dual-channel
showerhead, it is understood that alternative distribution
assemblies may be utilized that maintain first and second
precursors fluidly isolated prior to the processing region 1033.
For example, a perforated plate and tubes underneath the plate may
be utilized, although other configurations may operate with reduced
efficiency or not provide as uniform processing as the dual-channel
showerhead as described.
[0052] In the embodiment shown, showerhead 1025 may distribute via
first fluid channels 1019 process gases which contain plasma
effluents upon excitation by a plasma in chamber plasma region
1015. In embodiments, the process gas is introduced into the RPS
1002 and/or chamber plasma region 1015. The process gas may include
a carrier gas such as helium, argon, nitrogen (N.sub.2), etc.
Plasma effluents may include ionized or neutral derivatives of the
process gas.
[0053] FIG. 3C is a bottom view of a showerhead 1025 for use with a
processing chamber according to embodiments. Showerhead 1025
corresponds with the showerhead shown in FIG. 3A. Through-holes
1031, which show a view of first fluid channels 1019, may have a
plurality of shapes and configurations to control and affect the
flow of precursors through the showerhead 1025. Small holes 1027,
which show a view of second fluid channels 1021, may be distributed
substantially evenly over the surface of the showerhead, even
amongst the through-holes 1031, which may help to provide more even
mixing of the precursors as they exit the showerhead than other
configurations.
[0054] Substrate processing region 1033 can be maintained at a
variety of pressures during the flow of precursors, any carrier
gases, and plasma effluents into substrate processing region 1033.
The pressure may be maintained between about 0.1 mTorr and about 20
Torr or between about 10 mTorr and about 10 Torr in different
embodiments.
[0055] Embodiments of the processing chambers may be incorporated
into larger fabrication systems for producing integrated circuit
chips. FIG. 4 shows one such processing system 1101 of deposition,
etching, baking, and curing chambers according to embodiments. In
the figure, a pair of front opening unified pods (load lock
chambers 1102) supply substrates of a variety of sizes that are
received by robotic arms 1104 and placed into a low pressure
holding area 1106 before being placed into one of the substrate
processing chambers 1108a-f. A second robotic arm 1110 may be used
to transport the substrate wafers from the holding area 1106 to the
substrate processing chambers 1108a-f and back. Each substrate
processing chamber 1108a-f, can be outfitted to perform a number of
substrate processing operations including the dry etch processes
described herein in addition to cyclical layer deposition (CLD),
atomic layer deposition (ALD), chemical vapor deposition (CVD),
physical vapor deposition (PVD), etch, pre-clean, degas,
orientation, and other substrate processes.
[0056] The substrate processing chambers 1108a-f may include one or
more system components for depositing, annealing, curing and/or
etching a dielectric film on the substrate wafer. In one
configuration, two pairs of the processing chamber, e.g., 1108c-d
and 1108e-f, may be used to deposit dielectric material on the
substrate, and the third pair of processing chambers, e.g.,
1108a-b, may be used to etch the deposited dielectric. In another
configuration, all three pairs of chambers, e.g., 1108a-f, may be
configured to etch a dielectric film on the substrate. Any one or
more of the processes described may be carried out in chamber(s)
separated from the fabrication system shown in different
embodiments.
[0057] In the preceding description, for the purposes of
explanation, numerous details have been set forth to provide an
understanding of various embodiments of the present invention. It
will be apparent to one skilled in the art, however, that certain
embodiments may be practiced without some of these details, or with
additional details.
[0058] As used herein "substrate" may be a support substrate with
or without layers formed thereon. The patterned substrate may be an
insulator or a semiconductor of a variety of doping concentrations
and profiles and may, for example, be a semiconductor substrate of
the type used in the manufacture of integrated circuits. Exposed
"silicon" of the patterned substrate is predominantly Si but may
include minority concentrations of other elemental constituents
such as nitrogen, oxygen, hydrogen or carbon. Exposed "cobalt" of
the patterned substrate is predominantly cobalt but may include
minority concentrations of other elemental constituents such as
oxygen, hydrogen and carbon. Of course, "exposed cobalt" may
consist of only cobalt. Exposed "silicon nitride" of the patterned
substrate is predominantly Si.sub.3N.sub.4 but may include minority
concentrations of other elemental constituents such as oxygen,
hydrogen and carbon. "Exposed silicon nitride" may consist of
silicon and nitrogen. Exposed "silicon oxide" of the patterned
substrate is predominantly SiO.sub.2 but may include minority
concentrations of other elemental constituents such as nitrogen,
hydrogen and carbon. In some embodiments, silicon oxide films
etched using the methods disclosed herein consist of silicon and
oxygen. "Cobalt oxide" is predominantly cobalt and oxygen but may
include minority concentrations of other elemental constituents
such as nitrogen, hydrogen and carbon. Cobalt oxide may consist of
cobalt and oxygen.
[0059] The term "precursor" is used to refer to any process gas
which takes part in a reaction to either remove material from or
deposit material onto a surface. "Plasma effluents" describe gas
exiting from the chamber plasma region and entering the substrate
processing region. Plasma effluents are in an "excited state"
wherein at least some of the gas molecules are in
vibrationally-excited, dissociated and/or ionized states. A
"radical precursor" is used to describe plasma effluents (a gas in
an excited state which is exiting a plasma) which participate in a
reaction to either remove material from or deposit material on a
surface. "Radical-chlorine" are radical precursors which contain
chlorine but may contain other elemental constituents. The phrase
"inert gas" refers to any gas which does not form chemical bonds
when etching or being incorporated into a film. Exemplary inert
gases include noble gases but may include other gases so long as no
chemical bonds are formed when (typically) trace amounts are
trapped in a film.
[0060] The terms "gap" and "trench" are used throughout with no
implication that the etched geometry has a large horizontal aspect
ratio. Viewed from above the surface, trenches may appear circular,
oval, polygonal, rectangular, or a variety of other shapes. A
trench may be in the shape of a moat around an island of material.
The term "via" is used to refer to a low aspect ratio trench (as
viewed from above) which may or may not be filled with metal to
form a vertical electrical connection. As used herein, a conformal
etch process refers to a generally uniform removal of material on a
surface in the same shape as the surface, i.e., the surface of the
etched layer and the pre-etch surface are generally parallel. A
person having ordinary skill in the art will recognize that the
etched interface likely cannot be 100% conformal and thus the term
"generally" allows for acceptable tolerances.
[0061] Having disclosed several embodiments, it will be recognized
by those of skill in the art that various modifications,
alternative constructions, and equivalents may be used without
departing from the spirit of the embodiments. Additionally, a
number of well known processes and elements have not been described
to avoid unnecessarily obscuring the present invention.
Accordingly, the above description should not be taken as limiting
the scope of the invention.
[0062] Where a range of values is provided, it is understood that
each intervening value, to the tenth of the unit of the lower limit
unless the context clearly dictates otherwise, between the upper
and lower limits of that range is also specifically disclosed. Each
smaller range between any stated value or intervening value in a
stated range and any other stated or intervening value in that
stated range is encompassed. The upper and lower limits of these
smaller ranges may independently be included or excluded in the
range, and each range where either, neither or both limits are
included in the smaller ranges is also encompassed within the
invention, subject to any specifically excluded limit in the stated
range. Where the stated range includes one or both of the limits,
ranges excluding either or both of those included limits are also
included.
[0063] As used herein and in the appended claims, the singular
forms "a", "an", and "the" include plural referents unless the
context clearly dictates otherwise. Thus, for example, reference to
"a process" includes a plurality of such processes and reference to
"the dielectric material" includes reference to one or more
dielectric materials and equivalents thereof known to those skilled
in the art, and so forth.
[0064] Also, the words "comprise," "comprising," "include,"
"including," and "includes" when used in this specification and in
the following claims are intended to specify the presence of stated
features, integers, components, or steps, but they do not preclude
the presence or addition of one or more other features, integers,
components, steps, acts, or groups.
* * * * *