WANG; Xikun
Patent Applications and Registrations
Patent applications and USPTO patent grants for WANG; Xikun.The latest application filed is for "gate contact over active regions".
Company Profile
18.49.52
- WANG; Xikun - Sunnyvale CA
- Wang, Xikun - Sunyvale CA
Patent Activity
| Patent | Date |
|---|---|
| Gate Contact Over Active Regions App 20210249270 - THAREJA; Gaurav ; et al. | 2021-08-12 |
| High temperature RF heater pedestals Grant 11,062,887 - Park , et al. July 13, 2 | 2021-07-13 |
| Methods and apparatus for hybrid feature metallization Grant 11,024,537 - Shaviv , et al. June 1, 2 | 2021-06-01 |
| Gate contact over active processes Grant 11,004,687 - Thareja , et al. May 11, 2 | 2021-05-11 |
| Methods and apparatus for filling a feature disposed in a substrate Grant 10,950,500 - Shaviv , et al. March 16, 2 | 2021-03-16 |
| Methods And Apparatus For Hybrid Feature Metallization App 20210043506 - Shaviv; Roey ; et al. | 2021-02-11 |
| Selective cobalt removal for bottom up gapfill Grant 10,770,346 - Wang , et al. Sep | 2020-09-08 |
| Gate Contact Over Active Processes App 20200258744 - A1 | 2020-08-13 |
| Methods And Apparatus For Filling A Feature Disposed In A Substrate App 20200251340 - Kind Code | 2020-08-06 |
| Tantalum-containing material removal Grant 10,727,080 - Wang , et al. | 2020-07-28 |
| Method for creating a fully self-aligned via Grant 10,699,953 - Mullick , et al. | 2020-06-30 |
| Method and apparatus for reducing particle defects in plasma etch chambers Grant 10,658,161 - Wang , et al. | 2020-05-19 |
| High Temperature Rf Heater Pedestals App 20200090912 - Park; Soonam ; et al. | 2020-03-19 |
| Method For Creating A Fully Self-Aligned Via App 20190378756 - Mullick; Amrita B. ; et al. | 2019-12-12 |
| Oxide and metal removal Grant 10,465,294 - Wang , et al. No | 2019-11-05 |
| Method And Apparatus For Reducing Particle Defects In Plasma Etch Chambers App 20190295826 - Wang; Xikun ; et al. | 2019-09-26 |
| Selective Cobalt Removal For Bottom Up Gapfill App 20190122923 - Wang; Xikun ; et al. | 2019-04-25 |
| Selective tungsten removal Grant 10,256,112 - Wang , et al. | 2019-04-09 |
| Methods of etching films with reduced surface roughness Grant 10,233,547 - Schmiege , et al. | 2019-03-19 |
| Tantalum-containing Material Removal App 20190013211 - Wang; Xikun ; et al. | 2019-01-10 |
| Selective cobalt removal for bottom up gapfill Grant 10,163,696 - Wang , et al. Dec | 2018-12-25 |
| Methods And Apparatus For Filling A Feature Disposed In A Substrate App 20180323103 - Shaviv; Roey ; et al. | 2018-11-08 |
| Selective in situ cobalt residue removal Grant 10,049,891 - Wang , et al. August 14, 2 | 2018-08-14 |
| Methods of Etching Films with Reduced Surface Roughness App 20180195179 - Schmiege; Benjamin ; et al. | 2018-07-12 |
| Selective Cobalt Removal For Bottom Up Gapfill App 20180138085 - Wang; Xikun ; et al. | 2018-05-17 |
| Cobalt-containing material removal Grant 9,947,549 - Wang , et al. April 17, 2 | 2018-04-17 |
| Cobalt-containing Material Removal App 20180102259 - Wang; Xikun ; et al. | 2018-04-12 |
| Methods of etching films with reduced surface roughness Grant 9,896,770 - Schmiege , et al. February 20, 2 | 2018-02-20 |
| Selective etch for metal-containing materials Grant 9,711,366 - Ingle , et al. July 18, 2 | 2017-07-18 |
| Metal removal with reduced surface roughness Grant 9,659,791 - Wang , et al. May 23, 2 | 2017-05-23 |
| High Aspect Ratio 3-d Flash Memory Device App 20170110475 - Liu; Jie ; et al. | 2017-04-20 |
| Methods Of Etching Films With Reduced Surface Roughness App 20170096740 - Schmiege; Benjamin ; et al. | 2017-04-06 |
| Selective titanium nitride removal Grant 9,607,856 - Wang , et al. March 28, 2 | 2017-03-28 |
| Tungsten separation Grant 9,553,102 - Wang , et al. January 24, 2 | 2017-01-24 |
| Metal Removal With Reduced Surface Roughness App 20170018439 - Wang; Xikun ; et al. | 2017-01-19 |
| Methods of etching films with reduced surface roughness Grant 9,540,736 - Schmiege , et al. January 10, 2 | 2017-01-10 |
| Aluminum selective etch Grant 9,520,303 - Wang , et al. December 13, 2 | 2016-12-13 |
| Chlorine-based hardmask removal Grant 9,478,434 - Wang , et al. October 25, 2 | 2016-10-25 |
| Plasma-free metal etch Grant 9,472,417 - Ingle , et al. October 18, 2 | 2016-10-18 |
| Vertical gate separation Grant 9,449,846 - Liu , et al. September 20, 2 | 2016-09-20 |
| Dry-etch for selective tungsten removal Grant 9,412,608 - Wang , et al. August 9, 2 | 2016-08-09 |
| Oxide And Metal Removal App 20160222522 - Wang; Xikun ; et al. | 2016-08-04 |
| Vertical Gate Separation App 20160218018 - Liu; Jie ; et al. | 2016-07-28 |
| Titanium nitride removal Grant 9,373,522 - Wang , et al. June 21, 2 | 2016-06-21 |
| Fluorine-based hardmask removal Grant 9,355,862 - Pandit , et al. May 31, 2 | 2016-05-31 |
| V trench dry etch Grant 9,355,856 - Wang , et al. May 31, 2 | 2016-05-31 |
| Selective Etch For Metal-containing Materials App 20160118268 - Ingle; Nitin K. ; et al. | 2016-04-28 |
| Oxide and metal removal Grant 9,309,598 - Wang , et al. April 12, 2 | 2016-04-12 |
| Gas-phase tungsten etch Grant 9,299,575 - Park , et al. March 29, 2 | 2016-03-29 |
| Selective etch for metal-containing materials Grant 9,299,582 - Ingle , et al. March 29, 2 | 2016-03-29 |
| Aluminum oxide selective etch Grant 9,299,583 - Wang , et al. March 29, 2 | 2016-03-29 |
| Chlorine-based Hardmask Removal App 20160086816 - Wang; Xikun ; et al. | 2016-03-24 |
| Fluorine-based Hardmask Removal App 20160086815 - Pandit; Mandar ; et al. | 2016-03-24 |
| V Trench Dry Etch App 20160079072 - Wang; Xikun ; et al. | 2016-03-17 |
| Titanium oxide etch Grant 9,287,134 - Wang , et al. March 15, 2 | 2016-03-15 |
| Tungsten Separation App 20160056167 - Wang; Xikun ; et al. | 2016-02-25 |
| Methods Of Etching Films With Reduced Surface Roughness App 20160032460 - Schmiege; Benjamin ; et al. | 2016-02-04 |
| Selective Titanium Nitride Removal App 20150357205 - Wang; Xikun ; et al. | 2015-12-10 |
| Oxide And Metal Removal App 20150345028 - Wang; Xikun ; et al. | 2015-12-03 |
| Metal Removal App 20150345029 - Wang; Xikun ; et al. | 2015-12-03 |
| Even tungsten etch for high aspect ratio trenches Grant 9,190,293 - Wang , et al. November 17, 2 | 2015-11-17 |
| Gas-phase Tungsten Etch App 20150262829 - Park; Seung ; et al. | 2015-09-17 |
| Titanium Oxide Etch App 20150206764 - WANG; Xikun ; et al. | 2015-07-23 |
| Dry-etch For Selective Tungsten Removal App 20150179464 - Wang; Xikun ; et al. | 2015-06-25 |
| Even Tungsten Etch For High Aspect Ratio Trenches App 20150170935 - Wang; Xikun ; et al. | 2015-06-18 |
| Selective titanium nitride removal Grant 9,040,422 - Wang , et al. May 26, 2 | 2015-05-26 |
| Plasma-free Metal Etch App 20150129546 - Ingle; Nitin K. ; et al. | 2015-05-14 |
| Selective Etch For Metal-containing Materials App 20150129545 - Ingle; Nitin K. ; et al. | 2015-05-14 |
| Aluminum Selective Etch App 20150129541 - Wang; Xikun ; et al. | 2015-05-14 |
| Dry-etch for selective tungsten removal Grant 8,980,763 - Wang , et al. March 17, 2 | 2015-03-17 |
| Tungsten oxide processing Grant 8,951,429 - Liu , et al. February 10, 2 | 2015-02-10 |
| Selective Titanium Nitride Removal App 20140256131 - Wang; Xikun ; et al. | 2014-09-11 |
| Dry-etch For Selective Tungsten Removal App 20140154889 - Wang; Xikun ; et al. | 2014-06-05 |
| Method And Apparatus For Reducing Particle Defects In Plasma Etch Chambers App 20120091095 - WANG; Xikun ; et al. | 2012-04-19 |
| Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal Grant 8,016,948 - Wang , et al. September 13, 2 | 2011-09-13 |
| Method for etching high dielectric constant materials Grant 7,964,512 - Wang , et al. June 21, 2 | 2011-06-21 |
| Solid yttrium oxide-containing substrate which has been cleaned to remove impurities App 20110036874 - Wang; Xikun ; et al. | 2011-02-17 |
| Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate Grant 7,846,264 - Wang , et al. December 7, 2 | 2010-12-07 |
| Device and method for etching flash memory gate stacks comprising high-k dielectric Grant 7,780,862 - Shen , et al. August 24, 2 | 2010-08-24 |
| Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal App 20090025751 - Wang; Xikun ; et al. | 2009-01-29 |
| Etch methods to form anisotropic features for high aspect ratio applications Grant 7,368,394 - Shen , et al. May 6, 2 | 2008-05-06 |
| Etch Methods To Form Anisotropic Features For High Aspect Ratio Applications App 20080057729 - Shen; Meihua ; et al. | 2008-03-06 |
| Device And Method For Etching Flash Memory Gate Stacks Comprising High-k Dielectric App 20080011423 - SHEN; MEIHUA ; et al. | 2008-01-17 |
| Device and method for etching flash memory gate stacks comprising high-k dielectric App 20070224813 - Shen; Meihua ; et al. | 2007-09-27 |
| Fluorine free integrated process for etching aluminum including chamber dry clean Grant 7,270,761 - Wang , et al. September 18, 2 | 2007-09-18 |
| Etch methods to form anisotropic features for high aspect ratio applications App 20070199922 - Shen; Meihua ; et al. | 2007-08-30 |
| Etch methods to form anisotropic features for high aspect ratio applications App 20070202700 - Leucke; Uwe ; et al. | 2007-08-30 |
| Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate App 20070151581 - Wang; Xikun ; et al. | 2007-07-05 |
| Cleaning method used in removing contaminants from the surface of an oxide or fluoride comprising a group III B metal App 20070134416 - Wang; Xikun ; et al. | 2007-06-14 |
| Method for etching high dielectric constant materials App 20070042601 - Wang; Xikun ; et al. | 2007-02-22 |
| Method and apparatus for cleaning a substrate processing chamber App 20040200498 - Wang, Xikun ; et al. | 2004-10-14 |
| Two-stage etching process Grant 6,787,054 - Wang , et al. September 7, 2 | 2004-09-07 |
| Fluorine free integrated process for etching aluminum including chamber dry clean App 20040074869 - Wang, Xikun ; et al. | 2004-04-22 |
| Self-cleaning etch process Grant 6,699,399 - Qian , et al. March 2, 2 | 2004-03-02 |
| Methods for etching an organic anti-reflective coating Grant 6,649,532 - Chen , et al. November 18, 2 | 2003-11-18 |
| Methods For Etching An Organic Anti-reflective Coating App 20030209520 - Chen, Hui ; et al. | 2003-11-13 |
| Cleaning ceramic surfaces App 20030190870 - Shih, Hong ; et al. | 2003-10-09 |
| Two-stage etching process App 20030173333 - Wang, Xikun ; et al. | 2003-09-18 |
| Two-stage self-cleaning silicon etch process Grant 6,527,968 - Wang , et al. March 4, 2 | 2003-03-04 |
| Self-cleaning etch process Grant 6,136,211 - Qian , et al. October 24, 2 | 2000-10-24 |
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