U.S. patent application number 13/732796 was filed with the patent office on 2014-10-09 for design system for semiconductor device, method for manufacturing semiconductor device, semiconductor device and method for bonding substrates.
The applicant listed for this patent is Nikon Corporation. Invention is credited to Takahiro HORIKOSHI, Kazuya OKAMOTO, Isao SUGAYA.
Application Number | 20140304674 13/732796 |
Document ID | / |
Family ID | 41064985 |
Filed Date | 2014-10-09 |
United States Patent
Application |
20140304674 |
Kind Code |
A2 |
SUGAYA; Isao ; et
al. |
October 9, 2014 |
DESIGN SYSTEM FOR SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING
SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE AND METHOD FOR BONDING
SUBSTRATES
Abstract
The terminals that oppose each other when substrates are bonded
are designed to be reliably joined. Comprised in a semiconductor
device design system are a numerical value acquiring part, which
acquires the respective numerical values of a plurality of
calculation parameters, a junction estimating part, which, in the
case in which a plurality of substrates has been pressed at a
prescribed pressure so that the bump front end faces come into
contact, estimates whether or not the respective mutually opposing
bumps will be joined based on the respective numerical values of
the calculation parameters acquired by the numerical value
acquiring part, and a change processing part, which, in the case in
which it has been estimated by the junction estimating part that
any of the bumps will not be joined, gives a warning or performs
processing so as to change the numerical value of at least one
calculation parameter among the plurality of calculation
parameters.
Inventors: |
SUGAYA; Isao; (Kawasaki-shi,
JP) ; HORIKOSHI; Takahiro; (Chofu-shi, JP) ;
OKAMOTO; Kazuya; (Yokohama-shi, JP) |
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Applicant: |
Name |
City |
State |
Country |
Type |
Nikon Corporation |
Tokyo |
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JP |
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Prior
Publication: |
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Document Identifier |
Publication Date |
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US 20130191806 A1 |
|
|
US 20140181781 A2 |
June 26, 2014 |
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|
Family ID: |
41064985 |
Appl. No.: |
13/732796 |
Filed: |
January 2, 2013 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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12879826 |
Feb 5, 2013 |
8370789 |
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13732796 |
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PCT/JP2009/001115 |
Mar 12, 2009 |
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12879826 |
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Current U.S.
Class: |
716/136 ;
156/378 |
Current CPC
Class: |
H01L 2924/01041
20130101; H01L 24/75 20130101; H01L 2224/16 20130101; H01L
2924/01005 20130101; H01L 2924/01082 20130101; G06F 30/398
20200101; G06F 30/39 20200101; H01L 2224/7592 20130101; H01L
2224/75252 20130101; H01L 2225/06513 20130101; H01L 2224/75251
20130101; H01L 2924/01006 20130101; H01L 2924/01004 20130101; H01L
2924/01074 20130101; H01L 2924/01033 20130101; H01L 25/50 20130101;
H01L 21/67092 20130101; H01L 2225/06541 20130101 |
Class at
Publication: |
716/136 ;
156/378 |
International
Class: |
G06F 17/50 20060101
G06F017/50 |
Claims
1. A semiconductor device design system comprising a numerical
value acquiring part, which acquires the numerical value of at
least one calculation parameter, a junction estimating part that,
in the case in which, between at least two substrates on which a
plurality of terminals has been provided, the respective substrates
are pressed at a prescribed pressure so that the front end faces of
the respective mutually corresponding terminals come into contact,
estimates whether or not the respective mutually opposing terminals
will be respectively joined based on the numerical values of
calculation parameters acquired by the numerical value acquiring
part, and a change processing part which, in the case in which it
has been estimated by the junction estimating part that any of the
respective terminals will not be joined, gives a warning or
performs processing so as to change the numerical value of at least
one of the calculation parameters from among the calculation
parameters acquired by the numerical value acquiring part.
2. A design system according to claim 1; wherein the numerical
value acquiring part acquires the respective numerical values of
the flatness of an enveloping surface that envelops the front end
faces of the plurality of terminals and the shape parameters of the
respective substrates and the terminals.
3. A design system according to claim 2; wherein it further
comprises a calculating part that calculates the compression amount
of the respective terminals and the bending amount of the
respective substrates when the respective substrates are pressed at
a prescribed pressure so that the front end faces of the respective
terminals formed on one of the aforementioned substrates come into
contact with the front end faces of the respective terminals formed
on another aforementioned substrate based on the respective
numerical values of the calculation parameters acquired by the
numerical value acquiring part, and the junction estimating part
estimates that the respective mutually opposing terminals will be
joined in the case in which the total of the compression amount and
the bending amount calculated by the calculating part is larger
than a prescribed value.
4. A design system according to claim 3; wherein the junction
estimating part estimates that the respective mutually opposing
terminals will be joined in the case in which the total of the
compression amount and the bending amount is larger than the
flatness of the front end faces of the respective aforementioned
terminals before pressing of the respective substrates.
5. A design system according to claim 3; wherein the calculating
part calculates the compression amount .DELTA.L based on
.DELTA.L=2(PbL)/Eb Equation 1: where Pb is the pressure applied per
terminal, L is the height of the terminal, and Eb is the Young's
modulus of the terminal, and calculates the bending amount w based
on w=.alpha.P(2a-b).sup.4/(Es.times.h.sup.3) Equation 2: where
.alpha. is the bending coefficient of the substrate, P is the
prescribed pressure, a is the pitch of the terminal, b is the width
of the terminal, Es is the Young's modulus of the substrate, and h
is the thickness of the substrate.
6. A design system according to claim 3; wherein the calculating
part calculates the compression amount and the bending amount using
the finite element method.
7. A design system according to claim 1; characterized in that the
numerical value acquiring part acquires the values of the
arrangement gaps of the respective terminals of the respective
substrates as the calculation parameters.
8. A design system according to claim 7; characterized in that the
junction estimating part estimates that the respective mutually
corresponding terminals will be mutually joined in the case in
which the value of the arrangement gap is larger than a prescribed
value.
9. A design system according to claim 1; characterized in that the
numerical value acquiring part acquires the values of the width
dimensions of the respective terminals as the calculation
parameters.
10. A design system according to claim 9; characterized in that the
junction estimating part estimates that the respective mutually
corresponding terminals will be mutually joined in the case in
which the values of the width dimensions of the respective
terminals are smaller than a prescribed value.
11. A design system according to claim 1; characterized in that the
numerical value acquiring part acquires the values of the
differences in the heights of the respective terminals from the
respective substrates as the calculation parameters.
12. A design system according to claim 11; characterized in that
the junction estimating part estimates that the respective mutually
corresponding terminals will be mutually joined in the case in
which the values of the differences in the heights of the
respective terminals are respectively within the prescribed
range.
13. A design system according to claim 1; characterized in that the
numerical value acquiring part acquires the values of the
arrangement gaps of the respective terminals of the respective
substrates and the values of the differences in the heights of the
respective terminals from the respective substrates as the
calculation parameters.
14. A design system according to claim 13; characterized in that
the junction estimating part estimates that the respective mutually
corresponding terminals will be mutually joined in the case in
which the values of the differences in the heights of the
respective terminals are within a prescribed range that has been
set according to the arrangement gaps of the respective
terminals.
15. A design system according to claim 1; characterized in that the
numerical value acquiring part acquires the values of the
arrangement gaps of the respective terminals of the respective
substrates and the values of the width dimensions of the respective
terminals as the calculation parameters.
16. A design system according to claim 13; characterized in that
the junction estimating part estimates that the respective mutually
corresponding terminals will be mutually joined in the case in
which the values of the width dimensions of the respective
terminals are within a prescribed range that has been set according
to the arrangement gaps of the respective terminals.
17. A design system according to claim 1; characterized in that the
numerical value acquiring part acquires the values of the width
dimensions of the respective terminals and the values of the
differences in the heights of the respective terminals from the
respective substrates as the calculation parameters.
18. A design system according to claim 13; characterized in that
the junction estimating part estimates that the respective mutually
corresponding terminals will be mutually joined in the case in
which the values of the differences in the heights of the
respective terminals are within a prescribed range that has been
set according to the width dimensions of the respective
terminals.
19. A design system according to claim 1; wherein it further
comprises a pressure estimating part that, in the case in which the
junction estimating part has estimated that all of the plurality of
terminals will be joined, estimates whether or not the respective
terminals are joined at a pressure at or above the required
pressure, and the change processing part, in the case in which the
pressure estimating part has estimated that any of the plurality of
terminals is not joined at a pressure at or above the required
pressure, changes the numerical value of the calculation
parameter.
20. A design system according to claim 19; wherein the pressure
estimating part, in the case in which the peeling force of a
terminal to which the minimum pressing force of the pressing force
per terminal is being applied is smaller than the minimum pressing
force, estimates that any of the plurality of terminals is joined
at a pressure at or above the required pressure.
21. A design system according to claim 19; wherein it further
comprises a strain estimating part that, in the case in which the
pressure estimating part has estimated that the respective
plurality of terminals are joined at a pressure at or above the
required pressure, estimates whether or not the pressure that the
functional elements formed on the respective substrates in the
vicinity of the respective terminals receive has reached the
maximum allowable pressure, and the change processing part, in the
case in which the strain estimating part has estimated that the
pressure that the respective functional elements receive has
reached the maximum allowable pressure, gives a warning or performs
processing so as to change the numerical values of the calculation
parameters.
22. A design system according to claim 1; wherein the change
processing part continues the processing by displaying or setting
the optimal numerical value of the calculation parameter subject to
change.
23. A semiconductor device manufacturing method; comprising a
numerical value acquiring stage, which acquires the numerical value
of at least one calculation parameter, a junction estimating stage,
which, in the case in which at least two substrates on which a
plurality of terminals has been provided are pressed at a
prescribed pressure so that the front end faces of the respective
mutually corresponding terminals come into contact between the two
substrates, estimates whether or not the respective mutually
opposing terminals will be respectively joined based on the
numerical values of the calculation parameters acquired by the
numerical value acquiring stage, and a change processing stage
which, in the case in which it has been estimated by the junction
estimating stage that any of the respective terminals will not be
joined, gives a warning or performs processing so as to change the
numerical value of at least one of the calculation parameters from
among the calculation parameters acquired by the numerical value
acquiring stage.
24. A semiconductor device manufactured by means of a numerical
value acquiring stage, which acquires the numerical value of at
least one calculation parameter, a junction estimating stage,
which, in the case in which at least two substrates on which a
plurality of terminals has been provided are pressed at a
prescribed pressure so that the front end faces of the respective
mutually corresponding terminals come into contact between the two
substrates, estimates whether or not the respective mutually
opposing terminals will be respectively joined based on the
numerical values of calculation parameters acquired by the
numerical value acquiring stage, and a change processing stage
which, in the case in which it has been estimated by the junction
estimating stage that any of the respective terminals will not be
joined, gives a warning or performs processing so as to change the
numerical value of at least one of the calculation parameters from
among the calculation parameters acquired by the numerical value
acquiring stage.
25. A substrate bonding apparatus; comprising a first substrate
holding part, which holds a first substrate that has a plurality of
terminals, a second substrate holding part, which holds a second
substrate that has a plurality of terminals, a numerical value
input part, which inputs the numerical value of at least one
calculation parameter, a calculating part, which calculates the
amount of compression of the respective terminals and the amount of
bending of the respective substrates when the first substrate and
the second substrate are pressed so that the front end faces of the
respective terminals of the first substrate come into contact with
the front end faces of corresponding terminals among the respective
terminals of the second substrate based on the numerical values of
the calculation parameters input from the numerical value input
part, a parameter determining part, which determines a process
parameter value so that the total of the compression amount and the
bending amount calculated by the calculating part becomes larger
than a prescribed value, and a pressing part, which presses the
first substrate, which is held by the first substrate holding part,
and the second substrate, which is held by the second substrate
holding part, so that the front end faces of the respective
terminals of the first substrate and the front end faces of the
respective terminals of the second substrate come into contact
based on the process parameter value determined by the parameter
determining part.
Description
BACKGROUND
[0001] 1. Technical Field
[0002] The present invention relates to a semiconductor device
design system, a semiconductor device manufacturing method, a
semiconductor device and a substrate bonding apparatus. The present
invention particularly relates to a semiconductor device design
system manufactured by means of bonding a plurality of substrates,
a semiconductor device manufacturing method, a semiconductor device
and a substrate bonding apparatus.
[0003] 2. Related Art
[0004] In semiconductor devices, there are those that bond and
three-dimensionally laminate a plurality of substrates to improve
the performance of said devices without increasing the area of the
device overall. In the case in which a plurality of substrates are
to be bonded, electrical connection between the substrates is
performed by terminals called "bumps," which are disposed on the
respective substrates, being joined (for example, see Japanese
Unexamined Patent Application Publication No. 2007-115978).
[0005] However, when there is variation in the heights of the bumps
disposed on the substrate, there is no joining between the low
bumps, and junction defects occur.
[0006] Therefore, the purpose is to provide, at one of the side
surfaces of the present invention, a semiconductor device design
system, a semiconductor device manufacturing method, a
semiconductor device and a substrate bonding apparatus that are
able to solve the above problems. This purpose is achieved by
combinations of special characteristics described in the
independent claims of the Scope of Patent Claims. In addition,
dependent claims define further advantageous specific examples of
the present invention.
SUMMARY
[0007] In order solve the above problems, provided in the first
mode of the present invention is a semiconductor device design
system comprising a numerical value acquiring part, which acquires
the numerical value of at least one calculation parameter, a
junction estimating part that, in the case in which, between at
least two substrates on which a plurality of terminals has been
provided, the respective substrates are pressed at a prescribed
pressure so that the front end faces of the respective mutually
corresponding terminals come into contact, estimates whether or not
the respective mutually opposing terminals will be respectively
joined based on the numerical values of the calculation parameters
acquired by the numerical value acquiring part, and a change
processing part which, in the case in which it has been estimated
by the junction estimating part that any of the respective
terminals will not be joined, gives a warning or performs
processing so as to change the numerical value of at least one of
the calculation parameters from among the calculation parameters
acquired by the numerical value acquiring part.
[0008] In addition, provided in the second mode of the present
invention is a semiconductor device manufacturing method comprising
a numerical value acquiring stage, which acquires the numerical
value of at least one calculation parameter, a junction estimating
stage, which, in the case in which at least two substrates on which
a plurality of terminals has been provided are pressed at a
prescribed pressure so that the front end faces of the respective
mutually corresponding terminals come into contact between the two
substrates, estimates whether or not the respective mutually
opposing terminals will be respectively joined based on the
numerical values of the calculation parameters acquired by the
numerical value acquiring stage, and a change processing stage
which, in the case in which it has been estimated by the junction
estimating stage that any of the respective terminals will not be
joined, gives a warning or performs processing so as to change the
numerical value of at least one of the calculation parameters from
among the calculation parameters acquired by the numerical value
acquiring stage.
[0009] Provided in the third mode of the present invention is a
semiconductor device manufactured by means of a numerical value
acquiring stage, which acquires the numerical value of at least one
calculation parameter, a junction estimating stage, which, in the
case in which at least two substrates on which a plurality of
terminals has been provided are pressed at a prescribed pressure so
that the front end faces of the respective mutually corresponding
terminals come into contact between the two substrates, estimates
whether or not the respective mutually opposing terminals will be
respectively joined based on the numerical values of the
calculation parameters acquired by the numerical value acquiring
stage, and a change processing stage which, in the case in which it
has been estimated by the junction estimating stage that any of the
respective terminals will not be joined, gives a warning or
performs processing so as to change the numerical value of at least
one of the calculation parameters from among the calculation
parameters acquired by the numerical value acquiring stage.
[0010] Provided in the fourth mode of the present invention is a
substrate bonding apparatus comprising a first substrate holding
part, which holds a first substrate that has a plurality of
terminals, a second substrate holding part, which holds a second
substrate that has a plurality of terminals, a numerical value
input part, which inputs the numerical value of at least one
calculation parameter, a calculating part, which calculates the
amount of compression of the respective terminals and the amount of
bending of the respective substrates when the first substrate and
the second substrate are pressed so that the front end faces of the
respective terminals of the first substrate come into contact with
the front end faces of corresponding terminals among the respective
terminals of the second substrate based on the numerical values of
the calculation parameters input from the numerical value input
part, a parameter determining part, which determines a process
parameter value so that the total of the compression amount and the
bending amount calculated by the calculating part becomes larger
than a prescribed value, and a pressing part, which presses the
first substrate, which is held by the first substrate holding part,
and the second substrate, which is held by the second substrate
holding part, so that the front end faces of the respective
terminals of the first substrate and the front end faces of the
respective terminals of the second substrate come into contact
based on the process parameter value determined by the parameter
determining part.
[0011] Note that the above outline of the invention does not
enumerate all of the required special characteristics of the
present invention. In addition, sub-combination of these special
characteristics groups may also result in the present
invention.
BRIEF DESCRIPTION OF THE DRAWINGS
[0012] FIG. 1 is a cross-sectional view that schematically shows
the structure of a substrate bonding apparatus 200.
[0013] FIG. 2(a) is a cross-sectional view that schematically shows
substrates 20 and 50, and FIG. 2(b) is a plan view thereof.
[0014] FIG. 3 shows a functional block of a design system 10.
[0015] FIG. 4 is a schematic drawing for describing a plurality of
calculation parameters.
[0016] FIG. 5 is a flow chart that shows a processing operation S10
of the design system 10.
[0017] FIG. 6 is an example of calculation results resulting from
the design system 10.
[0018] FIG. 7 is an example of calculation results resulting from
the design system 10.
[0019] FIG. 8 is a schematic drawing that shows another example of
substrates 20 and 50.
[0020] FIG. 9 is a schematic drawing that describes an example of a
method of approximating the variation C of the heights of the bumps
22, etc.
[0021] FIG. 10 shows a functional block of a control part 270 of
another embodiment.
DESCRIPTION OF EXEMPLARY EMBODIMENTS
[0022] The (-) side surface of the present invention will be
described via the embodiments of the invention, but the embodiments
below do not limit the inventions relating to the claims, and there
is no limitation to the effect that all of the combinations of the
features described in the embodiments are indispensable to the
resolution means of the invention.
[0023] FIG. 1 is a cross-sectional view that schematically shows
the structure of a substrate bonding apparatus 200. The substrate
bonding apparatus 200 manufactures a three-dimensional
semiconductor apparatus by bonding substrates 20, 50, on which a
plurality of functional elements have been formed, by pressure
application and heating. The respective substrates 20, 50 are, in
the example of the drawing, respectively comprised by wafers that
have conventionally been well known. The substrate bonding
apparatus 200 comprises a pressing part 220, a pressure applying
stage 230, a pressure receiving stage 240 and a pressure detecting
part 250 arranged at the inside of a frame body 210.
[0024] The frame body 210 comprises a ceiling plate 212 and a
bottom plate 216 that are mutually parallel and horizontal, and a
plurality of support columns 214, which join the ceiling plate 212
and the bottom plate 216. The ceiling plate 212, the support
columns 214 and the bottom plate 216 are respectively formed by
highly rigid materials, and deformation does not occur even in the
case in which a reaction force of the pressure application acts on
the substrates 20, 50.
[0025] At the inside of the frame body 210, the pressing part 220
is arranged on the bottom plate 216. The pressing part 220 has a
cylinder 222 fixed to the upper surface of the bottom plate 216 and
a piston 224 arranged at the inside of the cylinder 222. The piston
224 is driven by means of a fluid circuit, a cam and a wheel train,
which are not shown, and is raised and lowered in a direction at a
right angle to the bottom plate 216, which is shown by arrow Z in
the drawing.
[0026] At the upper end of the piston 224, the pressure applying
stage 230 is mounted. The pressure applying stage 230 has a
horizontal plate-shaped support part 232, which is joined to the
upper end of the piston 224, and a plate-shaped first substrate
holding part 234, which is parallel to the support part 232.
[0027] The first substrate holding part 234 is supported from the
support part 232 via a plurality of actuators 235. The actuators
235, in addition to the pair of actuators 235 that have been
illustrated, are arranged frontward and rearward with respect to
the bottom surface. In addition, these respective actuators 235 are
also able to operate mutually independently. By means of such a
structure, it is possible to change the inclination of the first
substrate holding part 234 as desired by appropriately operating
the actuators 235. In addition, the first substrate holding part
234 has a heater 236 and is heated by means of said heater 236.
[0028] Note that the first substrate holding part 234 is such that
a substrate 50 is chucked to the upper surface by means of
electrostatic chucking, vacuum chucking, etc. The substrate 50,
which has been chucked to the first substrate holding part 234 in
this way, shakes along with the first substrate holding part 234
while movement or falling from the first substrate holding part 234
is restricted.
[0029] The pressure receiving stage 240 has a second substrate
holding part 242 and a plurality of suspension parts 244. The
suspension parts 244 are hung down vertically from the lower
surface of the ceiling plate 212. The second substrate holding part
242 is supported from below in the vicinity of the lower ends of
the suspension parts 244 and is arranged in opposition to the
pressure applying stage 230. In addition, the second substrate
holding part 242 also has a chucking mechanism resulting from
electrostatic chucking, negative pressure chucking, etc. and chucks
a substrate 20 to the lower surface. In addition, the suspension
parts 244 have a heater 246 and are heated by said heater 246.
[0030] The second substrate holding part 242 is supported by the
suspension parts 244 from below while movement upward is not
restricted. However, a plurality of load cells 252, 254, 256 are
interposed between the ceiling plate 212 and the second substrate
holding part 242. The plurality of load cells 252, 254, 256 form a
part of the pressure detecting part 250 to restrict upward movement
of the second substrate holding part 242, while detecting pressure
applied upward with respect to the second substrate holding part
242.
[0031] The status shown in FIG. 1 is such that, in this status, the
support column 214 of the pressing part 220 is pulled into the
cylinder 222, and the pressure applying stage 230 is in a lowered
status. Therefore, there is a wide gap between the pressure
applying stage 230 and the pressure receiving stage 240.
[0032] One of the substrates 50 among the pair of substrates 20, 50
subject to joining is inserted into the gap from the side and is
loaded onto the pressure applying stage 230. The other substrate 20
is also similarly inserted and is held by the pressure receiving
stage 240 in opposition with substrate 50. Substrates 20 and 50 are
mutually aligned within a plane orthogonal to the Z directions.
Note that the substrate bonding apparatus 200 may align substrates
20 and 50, and substrates 20 and 50, which have been aligned by
another alignment apparatus, may also be transported to the
substrate bonding apparatus 200.
[0033] Here, the pressure applying stage 230 rises toward the
pressure receiving stage 240 and presses substrate 20 and substrate
50. In addition, during pressing, heaters 246 and 236 heat the
pressure applying stage 230 and the pressure receiving stage 240.
Through this, substrates 20 and 50 are joined.
[0034] FIG. 2 schematically shows substrates 20 and 50, which have
been bonded by the substrate bonding apparatus 200, where FIG. 2(a)
is a cross-sectional view of substrates 20 and 50, and FIG. 2(b) is
a plan view thereof. A plurality of functional elements is formed
on substrate 20. The functional elements of substrate 20 have a
plurality of through-substrate vias that pass through in the
thickness directions and a plurality of bumps 22, 24, 26, 28, 30
provided on said through-substrate vias. Similarly, a plurality of
semiconductor apparatuses is formed on substrate 50 as well. The
functional elements of substrate 50 are arranged at positions
opposing bumps 22, 24, 26, 28 and 30 of substrate 20 and have a
plurality of through-substrate vias that pass through in the
thickness directions and a plurality of bumps 52, 54, 56, 58, 60
provided on said through-substrate vias. By these opposing bumps
22, 52, etc. being joined by pressing in the case in which
substrate 20 and substrate 50 are to be bonded, an electrical
connection is made between substrate 20 and bump 52. These bumps
22, 24, 26, 28, 30, 52, 54, 56, 58, 60 (hereunder, referred to as
"bumps 22, etc.") are examples of the terminals.
[0035] However, there is variation between the heights of these
bumps 22, etc. resulting from manufacturing error, etc. of the
bumps 22[, etc.] In the example shown in FIG. 2, the center bumps
30, 60 from among the bumps 22, etc. disposed at a height L, a
width b and a pitch a are lower than the bumps 22, 52, etc. of the
periphery by a height C. Therefore, at the relative distance of
substrates 20 and 50 at which the front end face of bump 22 and the
front end face of bump 52 just come into contact, bump 30 and bump
60 are separated and are not mutually electrically connected.
[0036] Here, when substrate 20 and substrate 50 are further
pressed, the front end face of bump 30 and the front end face of
bump 60 approach each other due to compression of bumps 22, etc.
and bending of substrate 20, etc., but whether or not these will be
joined depends upon the amount of compression of bumps 22, etc. and
the amount of bending of substrates 20, etc. Therefore, the present
embodiment designs a layout of a semiconductor device on substrates
20 and 50 that have a compression amount of bumps 22, etc. and a
bending amount of substrates 20, etc. at which the respective front
end faces of the respective corresponding bumps 22, 52 are
joined.
[0037] FIG. 3 shows a functional block of a design system 10 that
designs a layout of a semiconductor device on substrates 20 and 50.
The design system 10 has a numerical value acquiring part 100,
which acquires the numerical values of calculation parameters, a
numerical value storing part 110, which stores the acquired
numerical values, a calculating part 120, which calculates the
compression amount of bumps 22, etc. and the bending amount of
substrates 20, etc. from the numerical values stored in the
numerical value storing part 110, a junction estimating part 130,
which estimates whether or not the respective bumps 22[, etc.] will
be joined based on the compression amount, etc. of bumps 22, etc.
calculated by the calculating part 120, and a change processing
part 140, which performs processing that changes the numerical
value in the case in which it has been estimated by the junction
estimating part 130 that the bumps 22[, etc.] will not be joined.
Here, the calculating part 120 may calculate the compression amount
of the bumps 22, etc. and the bending amount of the substrates 20,
etc. using the finite element method or may approximately calculate
them using material mechanics. Moreover, the design system 10
comprises a pressure estimating part 150, which estimates whether
or not the respective bumps 22[, etc.] are joined at a pressure at
or above the required pressure, and a strain estimating part 160,
which estimates whether or not the pressure received by the
functional elements formed on the substrates 20, etc. has reached
the maximum allowable pressure.
[0038] Here, the design system 10 is measuring equipment such as a
PC that has a keyboard as an input apparatus and a display as an
output apparatus, and the above functions may also be realized by
installing a program that has the functions from the aforementioned
numerical value acquiring part 100 through the strain estimating
part 160. In that case, the design system 10 may also be installed
from a storage medium 12 that has stored said program, and
installation may also be performed by acquiring from a network.
[0039] FIG. 4 is a schematic drawing that describes a plurality of
calculation parameters used in the design system 10. FIG. 4(a)
shows a status in which bump 30 and bump 60 have come into contact
regardless of the variation C in the heights of FIG. 2(a) in the
case in which substrate 20 and substrate 50 have been pressed at a
pressure P. FIG. 4(b) shows a model of the case in which the
calculating part 120 has performed an approximate calculation using
material mechanics with FIG. 2(b) as the unit area.
[0040] In the model of FIG. 4(b), the bending amount of substrate
20 is calculated as a bending problem of the material mechanics in
which an equally distributed load has been applied to a square
plate 90 in which the peripheral 4 sides have been fixed to a
fixing part 190 and whose length of one side is (2a-b). In
addition, in the model of FIG. 4(b), when center bumps 30 and 60 of
the unit area are assumed to be lower than peripheral bumps 22,
etc. by the same amount as the variation C, and the conditions for
said bump 30 and bump 60 to be joined have been satisfied, it is
considered that the respective opposing substrates 20, etc. in
substrates 20 and 50 will be joined. Note that, in manufacturing a
semiconductor device, substrate 20 has a thickness of, for example,
725 .mu.m, and after this has been joined to the substrate that is
the base, substrate 20 is thinned to 50 .mu.m, a substrate 50 that
has a thickness of 725 .mu.m is joined onto the thinned substrate
20, and said substrate 50 is further thinned to 50 .mu.m, but in
said model a vertically symmetrical shape is assumed in order to
simplify the calculation.
[0041] Bending of substrates 20 and 50 shown in FIG. 4 markedly
occurs due to pressing said substrates 20, 50 using a membrane or
fluid, etc. In addition, in the case in which substrates 20 and 50
are held by holding members such as ones that are ceramic to press
said holding members, if the holding members are thin enough, said
bending is produced. In addition, it is also conceivable that, in
the case in which there is slight unevenness at the rear surface of
the substrate and the surface of the holding member, said
unevenness will be crushed when pressure is received to perform
cushioned functioning, and substrates 20 and 50 will bend.
[0042] FIG. 5 is a flow chart that shows a processing operation S10
of the design system 10. In said processing operation S10, first,
the numerical value acquiring part 100 acquires the respective
numerical values of a plurality of calculation parameters from the
outside and stores them in the numerical value storing part 110
(S100). In this case, the numerical value acquiring part 100 may
acquire said numerical values by means of input to a keyboard by a
user and may also acquire by reading from another database.
[0043] An example of the plurality of calculation parameters that
the numerical value acquiring part 100 acquires is shown in Table
1. Here, the numerical value acquiring part 100 acquires the
respective numerical values of the shape parameters of substrates
20 and 50, the shape parameters of bumps 22, etc., and the
arrangement parameter of bump 22 of substrates 20 and 50 as
numerical values of the calculation parameters. Which calculation
parameters the numerical value acquiring part 100 is to acquire is
dependent upon the system of calculation resulting from the
calculating part 120. For example, the calculation parameters shown
in Table 1 below are acquired from the outside by the numerical
value acquiring part 100 in the case in which the material
mechanics model shown in FIG. 4(b) is used.
TABLE-US-00001 TABLE 1 Young's modulus of substrate Es Poisson's
ratio of substrate Ns Young's modulus of bump Eb Poisson's ratio of
bump Nb Substrate thickness h Pressure applied to substrate P Bump
pitch a Bump width b Bump height L Bump surface ratio M Pressure
applied per bump Pb Substrate bending coefficient .alpha. Height
variation between adjacent bumps C
[0044] In the aforementioned step S100, the numerical value storing
part 110 may also store flags that, from among the stored
calculation parameters, discriminate those for which changes in the
numerical value are allowed during calculation and those for which
they are not in association with said calculation parameters. In
this case, the numerical value storing part 110 associates flags
for which changes in the numerical value during calculation are not
allowed with calculation parameters in which design changes cannot
be made or in which changes will be difficult when the material is
specified as in physical property values. In Table 1, an example of
a calculation parameter for which changes are not allowed is the
Young's modulus Es of the substrate. On the other hand, the
numerical value storing part 110 associates flags for which changes
in the numerical value are allowed during calculation with
calculation parameters in which changes are possible, such as the
numerical value relating to layout. In Table 1, an example of a
calculation parameter for which changes are allowed is the bump
pitch a.
[0045] Note that whether or not a change is allowable among the
calculation parameters may be discriminated according to the
presence or absence of an alternative and the relative size of the
repercussion effect with respect to the entire process. In this
case, for the material of the bump and substrate, there are few
alternatives, and there are large repercussion effects with respect
to the entirety in terms of process, performance and cost, which
will involve large changes to the overall process. On the other
hand, the wiring pitch, bump height and overall layout, etc. are
parameters for which changes are allowed at the designer level, and
the repercussion effect with respect to the entirety is small, so
changes may be allowed with priority over the material of the bump
and substrate.
[0046] Next, the calculating part 120 calculates the compression
amount .DELTA.L of said bumps 22, etc. and the bending amount w of
substrates 20, etc. when substrates 20 and 50 are pressed at a
prescribed pressure P so that the front end faces of bumps 22, etc.
formed on substrate 20 and the front end faces of bumps 52, etc.
formed on the other substrate 50 come into contact based on the
respective numerical values of the calculation parameters stored in
the numerical value storing part 110 (S110). For example, the
calculating part 120 calculates the compression amount .DELTA.L of
the bump and the bending amount w of the substrate using the model
shown in FIG. 4(b) by substituting the numerical values stored in
the numerical value storing part 110 into Equation 1 and Equation 2
below.
.DELTA.L=2(PbL)/Eb Equation 1:
w=.alpha.P(2a-b).sup.4/(Es.times.h.sup.3) Equation 2:
[0047] Note that, in Equation 1 above, the reason that the
coefficient 2 is applied is that the fact that, until the low bumps
30, 60 come into contact, the other four bumps 22, 24, 26, 28
within the unit area are each 1/4, that is, a pressure Pb is
essentially received by one bump, is taken into account. In
addition, in Equation 2, the (-b) term is due to the fact that the
effective length of the plate 90 is shortened due to the existence
of bumps 22, etc. by a commensurate amount is taken into
account.
[0048] After the aforementioned step S110, the junction estimating
part 130 estimates whether or not the opposing bumps 30, 60, etc.
will be joined (S120). In this case, the junction estimating part
130 estimates that the opposing bumps 30, 60 will be joined in the
case in which a total of the compression amount .DELTA.L and the
bending amount w calculated by the calculating part 120 is larger
than a prescribed value (S120: Yes) and estimates that the opposing
bumps 30, 60 will not be joined in the case in which this is
smaller than a prescribed value (S120: No).
[0049] Here, an example of a prescribed value is the flatness of
the front end faces of bumps 22, etc. prior to substrates 20 and 50
being pressed. An example of said flatness may be the height
variation C between adjacent bumps that is stored in the numerical
value storing part 110 or a value resulting from adding a margin
portion to this variation C. In this case, in the model shown in
FIG. 4(b), the junction estimating part 130 estimates the presence
or absence of a junction of bump 30 and bump 60 by comparing the
total of the compression amount .DELTA.L and the bending amount w
calculated according to the above Equation 3 and Equation 4 with
the above prescribed value.
[0050] In the aforementioned step S120, in the case in which it has
been estimated that any of the opposing bumps will not be joined
(S120: No), the change processing part 140 stores the numerical
value of at least one calculation parameter among the plurality of
calculation parameters and stores them in the numerical value
storing part 110 (S130). Next, the operations from steps S110
through S130 are repeated until it has been estimated that opposing
bumps 30 and 60 will be joined (S120: Yes).
[0051] In step S130, a priority sequence may be set with respect to
which calculation parameter is to be changed. In this case, the
change processing part 140 changes the numerical value of the
calculation parameter with the highest priority sequence within a
prescribed range, the calculating part 120 performs a calculation
based on the changed numerical value, and the junction estimating
part 130 estimates whether or not bumps 30 and 60 have come into
contact. In the case in which it has been estimated by the junction
estimating part 130 that the front end face of bump 30 and the
front end face of bump 60 will come into contact regardless of
whether or not said calculation parameter has been changed within
the prescribed range, the change processing part 140 sets the
optimal numerical value within said range with respect to said
calculation parameter to change the numerical value of the next
priority sequence calculation parameter and continue calculation
processing.
[0052] For example, the change processing part 140 changes the
numerical value of the bump pitch a among the calculation
parameters to a large value, changes the numerical value of the
bump width b to a small value, and changes the numerical value of
the pressure P applied to the substrate to a large value. In
addition, the change processing part 140 sets in advance the range
in which the numerical value of the aforementioned calculation
parameter is to be changed, and, in the aforementioned range, in
the case in which it has been estimated that the opposing bumps 30,
60 will be joined, further changes the numerical value of the
substrate thickness h to a small value, changes the value of the
bump height L to a large value, and changes the numerical value of
the height variation C to a small value. Here, in the case in which
the numerical value storing part 110 stores a flag that
discriminates between those for which changes in the numerical
value are allowed during calculation and those for which they are
not, the change processing part 140 may refer to the numerical
value storing part 110, change the numerical value of the
calculation parameter associated with the flag for which changes
are allowed and store it in the numerical value storing part
110.
[0053] Note that the priority order may be made higher for
calculation parameters that have little effect on cost, process and
performance. In addition, it is preferable that the effects ratio
in the case in which one calculation parameter has been changed be
calculated. For example, when the bump pitch has been widened, it
is preferable that calculation and presentation be performed with
respect to what type of effect there will be respectively upon
yield, performance and cost.
[0054] In the aforementioned step 120, in the case in which it has
been estimated that the opposing bumps 30, 60 will be joined (S120:
Yes), the pressure estimating part 150 estimates whether or not
bumps 30, etc. are respectively joined at or above the required
pressure (S140). For example, the pressure estimating part 150
determines that bumps 30, etc. are respectively joined at a
pressure at or above the required pressure in the case in which the
value of the pressure Pb applied per bump is greater than a
threshold value that has been determined in advance. In this case,
the pressure estimating part 150 may estimate that the respective
bumps 22, etc. are joined at a pressure at or above the required
pressure in the case in which the peeling force of the bumps to
which the minimum pressing force of the pressing force Pb per bump
is applied is smaller than said minimum pressing force. Here, the
peeling force is a force that acts from substrates 20 and 50 to
bumps 30 and 60 and refers to a force that mutually separates bumps
30 and 60 by means of a restoring force that attempts to cause
substrates 20 and 50 to return to their original shapes when
bending deformation has taken place.
[0055] In the aforementioned step S140, in the case in which it has
been estimated that any of bumps 30, etc. are not joined at a
pressure at or above the required pressure (S140: No), the change
processing part 140 performs processing so as to change the
numerical value of the calculation parameter (S150). Next, the
operations from step S110 through S150 are repeated until it has
been estimated that bumps 30, etc. are respectively joined at a
pressure at or above the required pressure (S140: Yes).
[0056] For example, the change processing part 140 changes the
numerical value of the pressure P so that the pressure P applied to
the substrate is increased. In addition, the change processing part
140 sets in advance the range by which the numerical value of the
aforementioned calculation parameter is to be changed, and, in the
aforementioned range, in the case in which it has been estimated
that opposing bumps 30 and 60 will be joined, among the calculation
parameters, may further change the numerical value of bump pitch a
to a large value, change the value of the bump width b to a small
value, change the numerical value of the substrate thickness h to a
small value, change the numerical value of the bump height L to a
large value, and change the value of the height variation C to a
small value. Here, the fact that the flag of the numerical value
storing part 110 may also be referred to, the fact that an optimal
numerical value within a prescribed range may also be set, and the
fact that a priority sequence may be applied to the calculation
parameters are the same as in step S130.
[0057] In the aforementioned step S140, in the case in which it has
been estimated that bumps 30 and 60 will be joined at a pressure at
or above the required pressure (S140: Yes), the strain estimating
part 160 estimates whether or not the pressure received by the
functional elements formed on substrates 20 and 50 in the vicinity
of bumps 30, etc. has reached the maximum allowable pressure
(S160). The pressure that the functional elements receive may also
be calculated by the finite element method, and, in the case in
which the model of FIG. 4(b) is used, may also be approximated
using the pressure applied per [bump] Pb of bumps 22, etc.
[0058] In the aforementioned step S160, in the case in which it has
been estimated that the pressure that the functional elements
receive has reached a maximum allowable pressure (S160: Yes), the
change processing part 140 performs processing so as to change the
numerical values of the calculation parameters (S170). Next, the
operations from steps S110 through S170 are repeated until the
pressure that the functional elements receive does not reach the
maximum allowable pressure (S160: No).
[0059] For example, the change processing part 140, among the
calculation parameters, changes the numerical value of the pressure
P applied to the substrate to a small value, changes the numerical
value of the bump pitch a to a large value, and changes the
numerical value of the bump width b to a small value. In addition,
the change processing part 140 may further change, among the
calculation parameters, the numerical value of the substrate
thickness h to a large value in the case in which the range in
which the numerical values of the aforementioned calculation
parameters are to be changed is set in advance, and, in the
aforementioned range, it has not been estimated that the pressure
that the functional elements receive has not reached the maximum
allowable pressure. Here, the fact that the flag of the numerical
value storing part 110 may be referred to, the fact that an optimal
numerical value may be set within the prescribed range, and the
fact that a priority sequence may be applied to the calculation
parameters are the same as in step S130.
[0060] In the aforementioned step S160, in the case in which it has
been estimated that the pressure that the functional elements
receive has not reached the maximum allowable pressure (S160: No),
the change processing part 140 may output the respective numerical
values of the calculation parameters, that is, the respective
numerical values stored in the numerical value storing part 110
(S180), and the operation resulting from said flow chart ends. In
this case, the change processing part 140 may also display the
respective numerical values on a display and may handover data to
another design tool.
[0061] Note that, in the aforementioned steps S130, S150 and S170,
the change processing part 140, instead of automatically changing
the numerical values of the calculation parameters, may, for
example, give a warning on the display to the effect that said
calculation parameters should be changed and wait for input of new
numerical values from the user. In this case, the change processing
part 140 may also display the optimal numerical values of said
calculation parameters on the display. In addition, in this case,
when the user has input new numerical values, if those numerical
values are not optimal numerical values for the joining of the
respective bumps 22, [etc.,] it is possible to render input of
those numerical values impossible.
[0062] FIG. 6 is an example of a calculation result resulting from
the design system 10. FIG. 6 shows the results of the change
processing part 140 having changed the numerical value of the
pressure P applied to the substrate and, based on the changed
numerical value, the numerical value storing part 110 having
calculated the gap elimination amount, that is, the total of the
compression amount .DELTA.L of said bumps 22, etc. and the bending
amount w of substrates 20, etc., and the height variation C between
adjacent bumps.
[0063] As is clear from FIG. 6, in the case in which the pressure P
has been changed, and the other calculation parameters have been
fixed, at or above a certain pressure P1, the gap elimination
amount w+.DELTA.L exceeds the variation C. Therefore, in said
design, by making the pressure P at which substrate 20 and
substrate 50 are pressed the aforementioned pressure P1 or higher,
it is possible to cause bumps 22, etc. of substrate 20 and bumps
52, etc. of substrate 50 to come into contact.
[0064] FIG. 7 is an example that shows the results of the bumps 30,
etc. having respectively been joined at a pressure at or above the
required pressure by means of the design system 10 and the range at
which the pressure that the functional elements receive does not
reach the maximum allowable pressure having been calculated. FIG.
7(a) is such that the amounts of displacement of the front end face
of bump 22 and the front end face of bump 30 with respect to the
pressure P that presses substrate 20 are shown by the broken line
and the solid line. In addition, FIG. 7(b) shows the pressure at
which bump 22 and bump 52 come into contact and the pressure at
which bump 30 and 60 come into contact with respect to the pressure
P that presses substrate 20.
[0065] As shown in FIG. 7(a), bump 22 and bump 52 are in contact
from the beginning, so even if pressure P is further applied, the
front end face of bump 22 is not displaced. In contrast with this,
the front end face of bump 30 is separated from bump 60 in a status
in which pressure P is not applied, and, when pressure P is
applied, substrate 20 bends and is displaced so as to approach bump
60. When pressure P is further applied, the front end face of bump
30 comes into contact with the front end face of bump 60 at
pressure P1 of FIG. 6, and, even if greater pressure is applied,
the front end face of bump 30 is not displaced.
[0066] In addition, as shown in FIG. 7(b), in region (1) at the
contact pressure, the contact pressure of the front end face of
bump 30 and the front end face of bump 60 is at or below the
aforementioned required pressure. In addition, in region (2), the
contact pressure of the front end face of bump 30 and the front end
face of bump 60 is at or above the aforementioned required
pressure, and the pressure that the functional elements receive
does not reach the maximum allowable pressure. In addition, in
region (3), the contact pressure of the front end face of bump 30
and the front end face of bump 60 is at or above the aforementioned
required pressure, but the pressure that the functional elements
receive reaches or exceeds the maximum allowable pressure.
Therefore, applied pressures P2 and P3 that correspond to the range
of region (2) are the optimal pressures. According to the
aforementioned design system 10, pressure P1 can be determined by
the estimation of step S120, pressure P2 can be determined by the
estimation of step S140, and pressure P3 can be determined by the
estimation of step S160.
[0067] FIG. 8 is a schematic view that shows other examples of
substrates 20 and 50. In FIG. 8, the heights of bumps 34 and 38
adjacent to bumps 32 and 40 of substrate 20 are lower than the
heights of bumps 32 and 40 by the variation C portion, and,
furthermore, the height of bump 36 adjacent to said bumps 34 and 38
is lower than the heights of bumps 34 and 38 by the variation C
portion. The relationship of the heights is the same for bumps 62,
64, 66, 68 and 70 of substrate 50 as well.
[0068] With respect to substrates 20 and 50 shown in FIG. 8 as
well, by means of, for example, the finite element method, it is
possible for the design system 10 to perform the calculations from
step S120 through S170 and to output numerical values in step S180.
In addition, instead of the finite element method, it is also
possible to use a model similar to that shown in FIG. 4(b). In this
case, first, until the junction estimating part 130 estimates that
the gap elimination amount w+.DELTA.L will exceed variation C in
the model in which the bump pitch has been set to 2a in FIG. 4(b),
the change processing part 140 changes the calculation parameters,
and the calculating part 120 calculates said gap elimination amount
w+.DELTA.L. Next, when it has been estimated that the gap
elimination amount w+.DELTA.L will exceed variation C, it is
estimated that bumps 34 and 64 have come into contact, and the
change processing part 140 changes the bump pitch among said
calculation parameters to a, and, based on this, the calculating
part 120 calculates the gap elimination amount w+.DELTA.L, and the
junction estimating part 130 estimates whether or not variation C
will be exceeded. Through this, a model similar to that of FIG.
4(b) can be used to perform calculations for substrates 20 and 50
of FIG. 8 as well.
[0069] FIG. 9 is a schematic view that describes an example of a
method of approximating the height variation C of bumps 22, etc.
Accurately measuring the difference in heights between adjacent
bumps is difficult. Therefore, the height variation C may be
approximated using a so-called global value of the entire
substrate. For example, the flatness R of the overall substrate,
the 1/4 length U of the swell minimum wavelength and the bump pitch
a may be used, and R.times.(a/U) may be used as the value of
variation C. In this case, the flatness R of the overall substrate
and the 1/4 length U of the swell minimum wavelength may also be
considered calculation parameters.
[0070] In the above, according to the present embodiment, in the
design stage of said semiconductor apparatus in the case in which
substrates 20 and 50 are to be joined to manufacture a
semiconductor device, the numerical values of the respective
calculation parameters can be determined so that the front end
faces of opposing bumps 30 and 60 of substrates 20 and 50 come into
contact. In addition, in the above design, the numerical values of
the respective calculation parameters are determined so that bumps
30, etc. are respectively joined at a pressure at or above the
required pressure, so it is possible to determine the numerical
values of the respective calculation parameters so that the front
end faces of bumps 30 and 60 are more reliably electrically
connected. Furthermore, in the aforementioned design, the numerical
values of the respective calculation parameters are determined so
that the pressure that the functional elements receive does not
reach the maximum allowable pressure, so it is possible to
determine the numerical values of the respective calculation
parameters so as to restrict fluctuation of the properties of the
functional elements. Therefore, according to the present
embodiment, it is possible to judge junction defects of a
semiconductor device that has been three-dimensionally laminated in
the circuit design stage in order to avoid this. In addition, if
there are problems in terms of stress even though joining is
possible, it is possible to perform design that avoids said stress
problems. Through this, it is possible to design a
three-dimensionally laminated semiconductor with no junction
defects or functional element abnormalities.
[0071] FIG. 10 shows a functional block of a control part 270 of
another embodiment. The control part 270 controls the process
parameters of the substrate bonding apparatus 200. The control part
270 comprises a numerical value acquiring part 272, which acquires
the numerical values of the calculation parameters, a numerical
value storing part 274, which stores the acquired numerical values,
a calculating part 276, which calculates the bumps 22, etc.
compression amount and the substrates 20, etc. bending amount from
the numerical values stored in the numerical value storing part
274, and a parameter determining part 278, which determines the
process parameter values so that the total of the compression
amount and the bending amount calculated by the calculating part
276 becomes larger than a prescribed value.
[0072] The numerical value acquiring part 272, similarly to the
numerical value acquiring part 100 of the design system 10
described in FIG. 2, acquires the numerical values of the
calculation parameters and stores them in the numerical value
storing part 274. The configuration and operation of the numerical
value storing part 274 are similar to those of the numerical value
storing part 110 of the design system 10, so a description will be
omitted. Examples of the calculation parameters are shown in Table
1, and they particularly are parameters that cannot be changed or
are difficult to change in processes, for example, the Young's
modulus Es of the substrate.
[0073] The numerical value storing part 274, in the substrate
bonding apparatus 200, calculates the bumps 22, etc. compression
amount and substrates 20, 50 compression amount when substrates 20
and 50 are pressed so that the front end faces of bumps 22, etc. of
substrate 20 come into contact with the front end faces of bumps
52, etc. of substrate 50 based on the respective numerical values
of the calculation parameters stored in the numerical value storing
part 274. In this case, the numerical value storing part 274,
similarly to the calculating part 120, may also perform
calculations using the finite element method or the material
mechanics model.
[0074] The parameter determining part 278 determines the process
parameter values so that the total of the compression amount and
the bending amount calculated by the calculating part 276 becomes
larger than a prescribed value. In this case, the parameter
determining part 278 determines the parameters that can be
controlled in the substrate bonding apparatus 200, for example, the
pressure P applied to the substrate, as process parameters.
Calculation by the numerical value acquiring part 272 and the
method of determining by the parameter determining part 278 are
similar to the operation flow chart of the design system 10, so a
description will be omitted. In addition, the parameter determining
part 278 may also determine the temperatures of heaters 236 and 246
as other examples of process parameters in the case in which there
has been association of the temperature with other calculation
parameters. For example, the Young's modulus Es has temperature
dependency in which it becomes lower the higher the temperature.
Therefore, by treating the Young's modulus Es as a function of the
temperature and determining the temperatures of heaters 236 and 246
as process parameters, the Young's modulus Es can also be
indirectly changed.
[0075] In addition, the parameter determining part 278 controls the
pressing part 220 so that substrate 20, which is held by the second
substrate holding part 242, and substrate 50, which is held by the
first substrate holding part 234, press at the determined process
parameter value. Through this, in the substrate bonding apparatus
200, the front end faces of bumps 22, etc. of substrate 20 and the
front end faces of bumps 52, etc. of substrate 50 come into
contact.
[0076] In the above, according to the present embodiment, in the
substrate bonding apparatus 200, it is possible to reliably bring
the front end faces of bumps 22, etc. of substrate 20 and the front
end faces of bumps 52, etc. of substrate 50 into contact.
Therefore, in a three-dimensionally laminated semiconductor device,
it is possible to more reliably restrict junction defects in the
vertical directions.
[0077] In the present embodiment, an example in which, among the
calculation parameters acquired by the numerical value acquiring
part 100, the numerical values of the bump pitch a, the bump width
b, the pressure P, the substrate thickness h, the bump height L and
the height variation C were respectively changed by the change
processing part 140 was shown, but, instead of this, or in addition
to this, it is possible to change other calculation parameters by
means of the change processing part 140.
[0078] In addition, in the present embodiment, an example in which,
among a plurality of calculation parameters, changes in the bump
pitch a, the bump width b, the pressure P, the substrate thickness
h, the bump height L and the height variation C were allowed was
shown, but, instead of this, it is possible to fix calculation
parameters other than, for example, the arrangement gaps of bumps
22, etc. to the respective substrates 20, 50, that is, the bump
pitch a, and to allow changes only in the bump pitch a period
[0079] In this case, it is possible to store calculation parameters
other than the bump pitch a in advance in the numerical value
storing part 110 and to cause only the value of the bump pitch a,
which is a variable parameter, to be acquired by the numerical
value acquiring part 100.
[0080] In addition, in this case, it is possible for the junction
estimating part 130 to estimate that the respective mutually
corresponding bumps 22, etc. will be mutually joined in the case in
which the value of the bump pitch a is larger than a prescribed
value. At this time, it becomes easier for the respective
substrates 20, 50 to bend due to the pressure P as the value of the
bump pitch a becomes larger. Therefore, the value of the bump pitch
a when the values of the bending amounts w of the respective
substrates 20, 50 have become values when joining of the respective
mutually corresponding bumps 22, etc. becomes possible becomes the
prescribed value.
[0081] Furthermore, instead of the present embodiment, it is
possible to fix calculation parameters other than the width
dimensions of the respective bumps 22, etc., that is, the bump
width b, and allow changes in only the bump width b.
[0082] In this case, calculation parameters other than the bump
width b are stored in advance in the numerical value storing part
110, and it is possible to cause only the value of the bump width
b, which is a variable parameter, to be acquired by the numerical
value acquiring part 100.
[0083] In addition, in this case, if the values of the bump widths
b of the respective bumps 22, etc. are smaller than a prescribed
value, it is possible for the junction estimating part 130 to
estimate that the respective mutually corresponding bumps 22, etc.
will be mutually joined. At this time, the respective bumps 22,
etc. respectively tend to compress due to the pressure Pb as the
value of the bump width b becomes smaller. Therefore, the value of
the bump width b when the values of the compression amounts
.DELTA.L of the respective bumps 22, etc. have become values when
joining of the respective mutually corresponding bumps 22, etc.
becomes possible becomes the prescribed value.
[0084] In addition, instead of the present embodiment, it is
possible to fix calculation parameters other than the height
differences of the respective bumps 22, etc. from the respective
substrates 20, 50, that is, the variation C, and allow changes in
only the variation C.
[0085] In this case, calculation parameters other than the
variation C are stored in advance in the numerical value storing
part 110, and it is possible to cause only the value of the
variation C, which is a variable parameter, to be acquired by the
numerical value acquiring part 100.
[0086] In addition, in this case, if the values of the bump widths
b of the respective bumps 22, etc. are smaller than a prescribed
value, it is possible for the junction estimating part 130 to
estimate that the respective mutually corresponding bumps 22, etc.
will be mutually joined. At this time, as the value of the
variation C becomes smaller, joining of the respective mutually
corresponding bumps 22, etc. becomes easy due to the bending of the
respective substrates 20, 50 and the compression of the respective
bumps 22, etc. Therefore, when the respective substrates 20, 50
have been bent by a fixed bending amount w, and the respective
bumps 22, etc. have been compressed by a fixed compression amount
.DELTA.L, the range in which the front end faces of the respective
mutually corresponding bumps 22, etc. are mutually able to come
into contact becomes the prescribed range. In this case, if the
heights of the plurality of bumps 22, etc. respectively differ, it
is possible to obtain the difference in heights with respect to
other bumps with any height as a reference.
[0087] Furthermore, instead of the present embodiment, it is
possible to fix calculation parameters other than the bump pitch a
and the variation C and allow changes in only the bump pitch a and
the variation C.
[0088] In this case, calculation parameters other than the bump
pitch a and the variation C are stored in advance in the numerical
value storing part 110, and it is possible to cause only the values
of the bump pitch a and the variation C, which are variable
parameters, to be acquired by the numerical value acquiring part
100.
[0089] In addition, in this case, if the value of the variation C
is within a prescribed range set according to the value of the bump
pitch a, it is possible for the junction estimating part 130 to
estimate that the respective mutually corresponding bumps 22, etc.
will be mutually joined.
[0090] For example, by storing the relationship between the value
of the bump pitch a and the value of the sum of the bending amounts
w of the respective substrates 20, 50 and the compression amounts
.DELTA.L of the respective bumps 22, etc. in advance in the
numerical value storing part 110, obtaining the value of that sum
from the input value of the bump pitch a, and comparing the input
value of the variation C and the value of the sum, it is possible
to estimate whether the respective bumps 22, etc. will be mutually
joined at the input values of the bump pitch a and the variation C.
In the case in which non-junction has been estimated by the
junction estimating part 130, a warning may be given or processing
may be performed by the change processing part 140 so as to change,
for example, the value of the variation C.
[0091] In addition, instead of the present embodiment, it is
possible to fix calculation parameters other than the bump pitch a
and the bump width b and allow changes in only the bump pitch a and
the bump width b.
[0092] In this case, calculation parameters other than the bump
pitch a and the bump width b are stored in advance in the numerical
value storing part 110, and it is possible to cause only the values
of the bump pitch a and the bump width b, which are variable
parameters, to be acquired by the numerical value acquiring part
100.
[0093] In addition, in this case, if the value of the bump width b
is within a prescribed range set according to the value of the bump
pitch a, it is possible for the junction estimating part 130 to
estimate that the respective mutually corresponding bumps 22, etc.
will be mutually joined.
[0094] The case in which non junction has been estimated by the
junction estimating part 130 is such that a warning may be given or
processing may be performed by the change processing part 140 so as
to change, for example, the value of the bump width b.
[0095] Furthermore, instead of the present embodiment, it is
possible to fix calculation parameters other than the bump width b
and the variation C and allow changes in only the bump width b and
the variation C.
[0096] In this case, calculation parameters other than the bump
width b and the variation C are stored in advance in the numerical
value storing part 110, and it is possible to cause only the values
of the bump width b and the variation C, which are variable
parameters, to be acquired by the numerical value acquiring part
100.
[0097] In addition, in this case, if the value of the variation C
is within a prescribed range set according to the value of the bump
pitch a, it is possible for the junction estimating part 130 to
estimate that the respective mutually corresponding bumps 22, etc.
will be mutually joined.
[0098] The case in which non-junction has been estimated by the
junction estimating part 130 is such that a warning may be given or
processing may be performed by the change processing part 140 so as
to change, for example, the value of the bump width b.
[0099] In addition, in the present embodiment, an example in which
the respective substrates 20, 50 are respectively comprised by
wafers was shown, but, instead of this, it is possible to
respectively comprise the respective substrates 20, 50 by
semiconductor chips formed by cutting the wafers. In addition, an
example in which the respective substrates 20, 50 were comprised by
a single wafer was shown, but, instead of this, it is possible to
comprise the respective substrates 20, 50 by laminated bodies in
which a plurality of the wafers or a plurality of the chips has
already been laminated.
[0100] Note that the height variation C of bumps 22, etc. may be
also verified by actually measuring the heights of bumps 22, etc.
provided on substrates 20 and 50. In this case, the individual
heights of bumps 22, etc. may be measured by means of a confocal
microscope to calculate these variations C. In addition, the
peeling force used in order for the pressure estimating part 150 to
estimate the pressure may be obtained from substrates 20 and 50
after joining. In this case, junction defect bumps may also be
estimated by measuring the irregularity of the rear surfaces of
substrates 20 and 50 after joining.
[0101] In addition, the present invention was described using
embodiments, but the technical scope of the present invention is
not limited to the range described in the above embodiments. It is
clear to persons skilled in the art that various modifications and
improvements may be added to the above embodiments. The fact that
modes to which those various changes and improvements have been
added can also be included within the technical scope of the
present invention is clear from the descriptions of the claims.
[0102] It must be kept in mind that the execution sequences of the
respective processes such as those of the operations, procedures,
steps and stages in apparatuses, systems, programs and methods
indicated in the scope of patent claims, specification and drawings
are such that "prior to," "in advance," etc. are not especially
clearly stated and can be realized by any sequences as long as the
output of previous processing is not used in subsequent processing.
With regard to the operation flow in the scope of patent claims,
specifications and drawings, even though, for convenience,
descriptions were given using "first," `next," etc., this does that
mean that implementation must be in this order.
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