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Manufacturing method and manufacturing apparatus for stacked substrate, and program Grant 11,362,059 - Sugaya , et al. June 14, 2 | 2022-06-14 |
Apparatus For Stacking Substrates And Method For The Same App 20220148978 - SUGAYA; Isao ;   et al. | 2022-05-12 |
Substrate Bonding Apparatus And Substrate Bonding Method App 20220084870 - MITSUISHI; Hajime ;   et al. | 2022-03-17 |
Apparatus for stacking substrates and method for the same Grant 11,211,338 - Sugaya , et al. December 28, 2 | 2021-12-28 |
Substrate Bonding Device, Calculation Device, Substrate Bonding Method, And Calculation Method App 20210242044 - MITSUISHI; Hajime ;   et al. | 2021-08-05 |
Bonding Method, Bonding Device, And Holding Member App 20210225651 - MITSUISHI; Hajime ;   et al. | 2021-07-22 |
Bonding method, bonding device, and holding member Grant 11,004,686 - Mitsuishi , et al. May 11, 2 | 2021-05-11 |
Stacking Apparatus And Stacking Method App 20210028045 - MITSUISHI; Hajirne ;   et al. | 2021-01-28 |
Alignment Method And Alignment Apparatus App 20200381387 - MITSUISHI; Hajime ;   et al. | 2020-12-03 |
Stacking apparatus and stacking method Grant 10,825,707 - Mitsuishi , et al. November 3, 2 | 2020-11-03 |
Substrate Bonding Apparatus and Substrate Bonding Method App 20200335472 - OKAMOTO; Kazuya ;   et al. | 2020-10-22 |
Method And Device For Manufacturing Stacked Substrate App 20200286851 - Mitsuishi; Hajime ;   et al. | 2020-09-10 |
Manufacturing Method And Manufacturing Apparatus For Stacked Substrate, And Program App 20200273836 - SUGAYA; Isao ;   et al. | 2020-08-27 |
Substrate Bonding Method, Multilayer Substrate Manufacturing Method, Multilayer Substrate Manufacturing Apparatus, And Multilaye App 20200091015 - SUGAYA; Isao ;   et al. | 2020-03-19 |
Apparatus For Stacking Substrates And Method For The Same App 20200043860 - SUGAYA; Isao ;   et al. | 2020-02-06 |
Apparatus for stacking substrates and method for the same Grant 10,483,212 - Sugaya , et al. Nov | 2019-11-19 |
Substrate bonding apparatus and substrate bonding method Grant 10,424,557 - Sugaya , et al. Sept | 2019-09-24 |
Stacked Substrate Manufacturing Method, Stacked Substrate Manufacturing Apparatus, Stacked Substrate Manufacturing System, And S App 20190148184 - SUGAYA; Isao ;   et al. | 2019-05-16 |
Stacking Apparatus And Stacking Method App 20190122915 - MITSUISHI; Hajime ;   et al. | 2019-04-25 |
Substrate Bonding Apparatus And Substrate Bonding Method App 20190043826 - SUGAYA; Isao ;   et al. | 2019-02-07 |
Substrate Bonding Apparatus And Substrate Bonding Method App 20190027462 - SUGAYA; Isao ;   et al. | 2019-01-24 |
Light detecting apparatus, image capturing apparatus and image sensor Grant 10,182,190 - Nakanishi , et al. Ja | 2019-01-15 |
Substrate Bonding Apparatus And Substrate Bonding Method App 20180308770 - SUGAYA; Isao ;   et al. | 2018-10-25 |
Detector, detector with lock-in amplifier, substrate, and method for manufacturing a detector Grant 10,026,768 - Saruwatari , et al. July 17, 2 | 2018-07-17 |
Substrate aligning apparatus, substrate bonding apparatus, substrate aligning method and substrate bonding method Grant 9,919,508 - Okamoto , et al. March 20, 2 | 2018-03-20 |
Light Detecting Apparatus, Image Capturing Apparatus And Image Sensor App 20170302859 - NAKANISHI; Sota ;   et al. | 2017-10-19 |
Apparatus For Stacking Substrates And Method For The Same App 20170278803 - Sugaya; Isao ;   et al. | 2017-09-28 |
Detector, Detector With Lock-in Amplifier, Substrate, And Method For Manufacturing A Detector App 20170069677 - SARUWATARI; Osamu ;   et al. | 2017-03-09 |
Substrate bonding apparatus, substrate holding apparatus, substrate bonding method, substrate holding method, multilayered semiconductor device, and multilayered substrate Grant 9,539,800 - Kito , et al. January 10, 2 | 2017-01-10 |
Semiconductor device and method for manufacturing the semiconductor device Grant 9,159,640 - Sugaya October 13, 2 | 2015-10-13 |
Substrate Aligning Apparatus, Substrate Bonding Apparatus, Substrate Aligning Method And Substrate Bonding Method App 20150231873 - OKAMOTO; Kazuya ;   et al. | 2015-08-20 |
Substrate holder system, substrate holder, fastening mechanism, substrate bonding apparatus and method for manufacturing devices Grant 9,054,140 - Sugaya , et al. June 9, 2 | 2015-06-09 |
Substrate Bonding Apparatus and Substrate Bonding Method App 20150083786 - OKAMOTO; Kazuya ;   et al. | 2015-03-26 |
Substrate Holder And Substrate Bonding Apparatus App 20140345805 - MAEDA; Hidehiro ;   et al. | 2014-11-27 |
Semiconductor device Grant 8,878,358 - Sugaya November 4, 2 | 2014-11-04 |
Design System For Semiconductor Device, Method For Manufacturing Semiconductor Device, Semiconductor Device And Method For Bonding Substrates App 20140304674 - SUGAYA; Isao ;   et al. | 2014-10-09 |
System for semiconductor device, method for manufacturing semiconductor device, semiconductor device and method for bonding substrates Grant 8,856,722 - Sugaya , et al. October 7, 2 | 2014-10-07 |
Design System For Semiconductor Device, Method For Manufacturing Semiconductor Device, Semiconductor Device And Method For Bonding Substrates App 20140181781 - SUGAYA; Isao ;   et al. | 2014-06-26 |
Substrate Bonding Apparatus, Substrate Holding Apparatus, Substrate Bonding Method, Substrate Holding Method, Multilayered Semiconductor Device, And Multilayered Substrate App 20140072774 - KITO; Yoshiaki ;   et al. | 2014-03-13 |
Multi-layered Semiconductor Apparatus App 20130271211 - SUGAYA; Isao ;   et al. | 2013-10-17 |
Semiconductor Device And Method For Manufacturing The Semiconductor Device App 20130207257 - SUGAYA; Isao | 2013-08-15 |
Design System For Semiconductor Device, Method For Manufacturing Semiconductor Device, Semiconductor Device And Method For Bonding Substrates App 20130191806 - Sugaya; Isao ;   et al. | 2013-07-25 |
Semiconductor device and method for manufacturing the semiconductor device Grant 8,436,465 - Sugaya May 7, 2 | 2013-05-07 |
Multi-layered semiconductor apparatus Grant 8,436,680 - Sugaya , et al. May 7, 2 | 2013-05-07 |
System for semiconductor device, method for manufacturing semiconductor device, semiconductor device and method for bonding substrates Grant 8,370,789 - Sugaya , et al. February 5, 2 | 2013-02-05 |
Multi-layered semiconductor apparatus Grant 8,299,848 - Sugaya , et al. October 30, 2 | 2012-10-30 |
Multi-layered Semiconductor Apparatus App 20120256679 - SUGAYA; ISAO ;   et al. | 2012-10-11 |
Substrate Holder, Pair Of Substrate Holders, Substrate Bonding Apparatus And Method For Manufacturing Devices App 20120214290 - Sugaya; Isao ;   et al. | 2012-08-23 |
Semiconductor Device App 20120205792 - SUGAYA; ISAO | 2012-08-16 |
Substrate Holder System, Substrate Holder, Fastening Mechanism, Substrate Bonding Apparatus And Method For Manufacturing Devices App 20120205024 - SUGAYA; Isao ;   et al. | 2012-08-16 |
Semiconductor device Grant 8,183,686 - Sugaya May 22, 2 | 2012-05-22 |
Apparatus For Managing A Holder, Apparatus For Manufacturing A Layered Semiconductor And Method For Managing A Holder App 20110288674 - Sugaya; Isao ;   et al. | 2011-11-24 |
Design System For Semiconductor Device, Method For Manufacturing Semiconductor Device, Semiconductor Device And Method For Bonding Substrates App 20110202890 - SUGAYA; Isao ;   et al. | 2011-08-18 |
Multi-layered semiconductor apparatus App 20100201432 - Sugaya; Isao ;   et al. | 2010-08-12 |
Semiconductor Device And Method For Manufacturing The Semiconductor Device App 20100109154 - Sugaya; Isao | 2010-05-06 |
Semiconductor Device App 20100102441 - Sugaya; Isao | 2010-04-29 |
Polishing body, polishing apparatus, semiconductor device, and semiconductor device manufacturing method Grant 7,189,155 - Hoshino , et al. March 13, 2 | 2007-03-13 |
Polishing body, polishing apparatus, semiconductor device, and semiconductor device manufacturing method App 20050142989 - Hoshino, Susumu ;   et al. | 2005-06-30 |
Processing apparatus, method for fabrication of semiconductor device by using the processing apparatus, and semiconductor device fabricated by this method App 20050000943 - Sugaya, Isao ;   et al. | 2005-01-06 |
Polishing element, cmp polishing device and productionj method for semiconductor device App 20040242132 - Hoshino, Susumu ;   et al. | 2004-12-02 |
Vibration actuator with two vibration modes Grant 6,611,081 - Okazaki , et al. August 26, 2 | 2003-08-26 |
Process and apparatus for chemimechanically polishing a substrate App 20020013122 - Sugaya, Isao ;   et al. | 2002-01-31 |
Multiple degrees of freedom vibration actuator Grant 5,872,417 - Sugaya February 16, 1 | 1999-02-16 |
Image blur suppression device utilizing a vibration motor Grant 5,870,634 - Sugaya , et al. February 9, 1 | 1999-02-09 |
Vibration actuator Grant 5,763,981 - Okazaki , et al. June 9, 1 | 1998-06-09 |