U.S. patent application number 13/938715 was filed with the patent office on 2013-11-28 for plasma reactor gas distribution plate with radially distributed path splitting manifold.
This patent application is currently assigned to APPLIED MATERIALS, INC.. The applicant listed for this patent is APPLIED MATERIALS, INC.. Invention is credited to Kallol Bera, Shahid Rauf.
Application Number | 20130315795 13/938715 |
Document ID | / |
Family ID | 40788879 |
Filed Date | 2013-11-28 |
United States Patent
Application |
20130315795 |
Kind Code |
A1 |
Bera; Kallol ; et
al. |
November 28, 2013 |
PLASMA REACTOR GAS DISTRIBUTION PLATE WITH RADIALLY DISTRIBUTED
PATH SPLITTING MANIFOLD
Abstract
In a showerhead assembly, a path splitting manifold comprises a
gas supply inlet and a planar floor and plural gas outlets
extending axially through the floor and azimuthally distributed
about the floor. The path splitting manifold further comprises a
plurality of channels comprising plural paths between the inlet and
respective ones of the plural outlets. A gas distribution
showerhead underlies the floor of the manifold and is open to the
plural outlets. In certain embodiments, the plural paths are of
equal lengths.
Inventors: |
Bera; Kallol; (San Jose,
CA) ; Rauf; Shahid; (Pleasanton, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
APPLIED MATERIALS, INC. |
Santa Clara |
CA |
US |
|
|
Assignee: |
APPLIED MATERIALS, INC.
Santa Clara
CA
|
Family ID: |
40788879 |
Appl. No.: |
13/938715 |
Filed: |
July 10, 2013 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
12004444 |
Dec 19, 2007 |
8512509 |
|
|
13938715 |
|
|
|
|
Current U.S.
Class: |
422/310 |
Current CPC
Class: |
B01J 19/26 20130101;
H01J 37/3244 20130101; H01J 37/32449 20130101; H01J 37/321
20130101 |
Class at
Publication: |
422/310 |
International
Class: |
B01J 19/26 20060101
B01J019/26 |
Claims
1. A gas distribution showerhead assembly for use in a plasma
reactor, comprising: a gas supply lid having a bottom surface, and
a gas supply port in said bottom surface; a manifold plate having
top and bottom manifold surfaces, said top manifold surface facing
said bottom surface of said gas supply lid; a showerhead plate
facing said bottom manifold surface and an array of plural gas
injection orifices extending through said showerhead plate and
distributed in both a radial direction and in an azimuthal
direction; a gas distribution manifold comprising: (a) plural
manifold orifices extending through said manifold plate and located
along a radial location; (b) plural top surface channels in said
top manifold surface and defining plural top paths of generally
equal lengths between said gas supply port and respective ones of
said manifold orifices; (c) plural bottom surface channels formed
in said bottom manifold surface and defining plural bottom paths of
generally equal lengths between respective ones of said manifold
orifices and respective ones of said plural gas injection
orifices.
2. The apparatus of claim 1 wherein said plural top surface
channels constitute a hierarchy of channels recursively coupled at
their midpoints to outputs of other channels of said hierarchy.
3. The apparatus of claim 2 wherein said plural bottom surface
channels comprise plural arcuate bottom surface channels at
respective radial locations and plural radial bottom surface
channels extending between respective ones of said arcuate bottom
surface channels, each of said radial bottom surface channels
having a midpoint in registration with a respective one of said
manifold orifices.
4. The apparatus of claim 3 wherein said arcuate bottom surface
channels are terminated at respective zones in registration with
respective ones of said plural gas injection orifices of said
zone.
5. The apparatus of claim 4 wherein said plural arcuate bottom
surface channels comprise four sections of said arcuate bottom
surface channels, each of said arcuate bottom surface channels
extending one quarter of an arc circle between corresponding pairs
of said respective zones.
6. The apparatus of claim 1 wherein said top surface channels
provide gas distribution in an azimuthal direction and said bottom
surface channels provide gas distribution in both radial and
azimuthal directions.
7. The apparatus of claim 6 wherein said plural bottom paths
between respective ones of said manifold orifices and respective
ones of the plural gas injection orifices of said zone are of
generally equal lengths.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a divisional of U.S. patent application
Ser. No. 12/004,444 filed Dec. 19, 2007 entitled PLASMA REACTOR GAS
DISTRIBUTION PLATE WITH RADIALLY DISTRIBUTED PATH SPLITTING
MANIFOLD by Kallol Bera, et al., which contains subject matter
related to now abandoned U.S. patent application Ser. No.
11/693,089 filed Mar. 29, 2007 entitled PLASMA REACTOR WITH AN
OVERHEAD INDUCTIVE ANTENNA AND AN OVERHEAD GAS DISTRIBUTION
SHOWERHEAD by Alexander Paterson et al., and assigned to the
present assignee, the disclosure of which is incorporated herein in
its entirety.
TECHNICAL FIELD
[0002] This application concerns a plasma reactor for processing a
workpiece such as a semiconductor wafer, and in particular a gas
distribution plate for such a reactor.
BACKGROUND
[0003] A gas distribution showerhead is located at the reactor
chamber ceiling overlying the workpiece or semiconductor wafer. One
conventional showerhead has an annular plenum in which gas is
introduced at one end and circulates azimuthally around the annular
plenum. The gas injection orifices of the showerhead are
azimuthally distributed outlets in the floor of the plenum. One
problem with such a showerhead is that gas distribution is
azimuthally non-uniform because the gas pressure is not uniform
along the azimuthally flow path through the plenum. Another problem
is that during some process transitions, such as a transition from
an Argon process gas to an Oxygen process gas, some arcing (plasma
light-up) in the gas outlets occurs. This is due at least in part
to the non-uniform distribution of Argon and Oxygen in the plenum
during the transition. During the transition, Oxygen predominates
in the region nearest the gas supply and Argon predominates in the
region furthest from the gas supply.
[0004] The plasma below the showerhead has a corresponding
non-uniform distribution of Oxygen and Argon. Plasma density
becomes correspondingly non-uniform because the portion of the
plasma containing more Argon absorbs more plasma source power.
Moreover, the sheath thickness of the portion of the plasma
containing more Argon is less than the portion containing
predominantly Oxygen. This leads to light-up or arcing in the
showerhead outlets overlying the region of the plasma containing
more Argon than Oxygen. This condition may last until all the Argon
has been displaced by the incoming Oxygen gas, which may take on
the order of a few seconds.
[0005] There is a need to introduce process gas in a manner that
avoids such non-uniform distribution of gases during a process
transition from one process gas to a different process gas.
SUMMARY
[0006] In one embodiment, a gas distribution showerhead assembly is
provided for use in a plasma reactor adapted to process a workpiece
or semiconductor wafer. In one embodiment, the showerhead assembly
includes a path splitting manifold that includes a gas supply inlet
and a planar floor and plural gas outlets extending axially through
the floor and azimuthally distributed about the floor. The path
splitting manifold further includes a plurality of channels
comprising plural paths of equal lengths between the inlet and
respective ones of the plural outlets. A showerhead of the
showerhead assembly underlies the floor of the manifold and is open
to the plural outlets. The showerhead includes a showerhead floor
and a plurality of gas injection holes extending axially through
the showerhead floor. The assembly further includes an electrode
underlying the floor of the showerhead, the electrode having plural
axial holes in registration with the gas injection holes of the
showerhead.
BRIEF DESCRIPTION OF THE DRAWINGS
[0007] So that the manner in which the above recited embodiments of
the invention are attained and can be understood in detail, a more
particular description of the invention, briefly summarized above,
may be had by reference to the embodiments thereof which are
illustrated in the appended drawings. It is to be noted, however,
that the appended drawings illustrate only typical embodiments of
this invention and are therefore not to be considered limiting of
its scope, for the invention may admit to other equally effective
embodiments.
[0008] FIG. 1 is a simplified block diagram including a cut-away
side view of a plasma reactor in accordance with one
embodiment.
[0009] FIG. 2 is a top view of a ceiling lid of the gas
distribution plate of the reactor of FIG. 1.
[0010] FIG. 3A is a top view of the top surface of a manifold of
the gas distribution plate of the reactor of FIG. 1.
[0011] FIG. 3B is a top view of the bottom surface of the manifold
of the gas distribution plate of the reactor of FIG. 1.
[0012] FIG. 4 is a top view of a showerhead of the gas distribution
plate of the reactor of FIG. 1.
[0013] FIG. 5 is a top view of the inner zone of the manifold of
FIG. 3B and showing the alignment of the gas injection orifices 110
of the showerhead of FIG. 4 relative to the inner zone of the
manifold of FIG. 3B.
[0014] FIG. 6 is a top view of the outer zone of the manifold of
FIG. 3B and showing the alignment of the gas injection orifices 110
of the showerhead of FIG. 4 relative to the outer zone of the
manifold of FIG. 3B.
[0015] FIG. 7 is a top view of one embodiment of the ceiling
electrode in the reactor of FIG. 1.
[0016] FIG. 8A includes a cut-away side view of a plasma reactor in
accordance with a further embodiment, in which a lid, a path
splitting manifold and a showerhead are axially stacked, and the
path splitting manifold is radially distributed.
[0017] FIG. 8B is an enlarged side view of the showerhead assembly
of FIG. 8A.
[0018] FIG. 8C is an enlarged side view of a showerhead assembly of
a related embodiment in which the manifold of FIG. 8A is separated
from the showerhead by a temperature control plate.
[0019] FIG. 9A is a top view of the top surface of the manifold of
the gas distribution plate of the reactor of FIG. 8A.
[0020] FIG. 9B is a top view of the bottom surface of the manifold
of the gas distribution plate of the reactor of FIG. 8A.
[0021] FIG. 10 is a top view of a showerhead of the gas
distribution plate of the reactor of FIG. 8A.
[0022] FIG. 11 is a top view of one embodiment of the ceiling
electrode in the reactor of FIG. 8A.
[0023] FIG. 12 is a top view of a showerhead assembly in accordance
with an embodiment in which the manifolds and showerheads are
radially juxtaposed rather than being axially stacked, and the
manifolds feed gas in a radially outward direction.
[0024] FIG. 13 is a cut-away side view corresponding to FIG.
12.
[0025] FIG. 14 is a cut-away side view of a related embodiment in
which the gas distribution assembly is separated from the ceiling
electrode by a temperature control plate.
[0026] FIG. 15 is a top view of an embodiment in which the
manifolds and showerheads are radially juxtaposed, and the
manifolds feed gas in a radially inward direction.
[0027] FIG. 16A is a cut-away side view corresponding to FIG.
15.
[0028] FIG. 16B is a cut-away side view of a related embodiment in
which the gas distribution assembly is separated from the ceiling
electrode by a temperature control plate.
[0029] FIG. 17 is a cut-away side view of an embodiment in which
each path splitting manifold is immersed within a respective
showerhead.
[0030] FIG. 18 is a top view of an embodiment of a path splitting
manifold having both radially inward facing outlets and radially
outward facing outlets, for use in the embodiment of FIG. 17.
[0031] FIG. 19 is a simplified orthographic view of an embodiment
in which the path splitting channels of the manifold are vertically
stacked.
[0032] FIG. 20 is a top view corresponding to FIG. 19.
[0033] FIG. 21 is a side view illustrating an embodiment having
inner and outer manifolds with vertically stacked path splitting
channels.
[0034] FIG. 22 is a top view corresponding to FIG. 21.
[0035] FIG. 23 is a side view of a modification of the embodiment
of FIG. 19 in which the vertically stacked path splitting manifold
and the showerhead are side-by-side.
[0036] To facilitate understanding, identical reference numerals
have been used, where possible, to designate identical elements
that are common to the figures. The drawings in the figures are all
schematic and not to scale.
DETAILED DESCRIPTION
[0037] Referring to FIG. 1, a workpiece 102, which may be a
semiconductor wafer, is held on a workpiece support 103 within a
reactor chamber 104. Optionally, the workpiece support 103 may be
raised and lowered by a lift servo 105. The chamber 104 is bounded
by a chamber sidewall 106 and a ceiling 108. In one embodiment, the
ceiling 108 is a gas distribution showerhead assembly including a
lid 505 (FIG. 2), a manifold 510 (FIGS. 3A and 3B) and a showerhead
515 (FIG. 4). As indicated in FIG. 1, the lid 505 rests on top of
the manifold 510 and the manifold 510 rests on top of the
showerhead 515. The showerhead 515 has small gas injection orifices
110 extending through it, as illustrated in FIG. 4. Referring again
to FIG. 1, the gas distribution showerhead assembly 108 receives
process gas from a process gas supply 112. A capacitively coupled
RF plasma source power applicator consists of an electrode 116 in
the ceiling 108.
[0038] Many embodiments described herein concern primarily a
capacitively coupled plasma reactor for dielectric etch processes
(for example), in which there is no inductively coupled power
applicator. However, in embodiments for other process applications,
such as polysilicon etch processes or metal etch processes, an
inductively coupled power applicator, such as an overhead coil
antenna 114 depicted in FIG. 1, may be provided. In such an
embodiment, in order to permit inductive coupling into the chamber
104 from the overhead coil antenna 114, the ceiling 108 may be
formed of a dielectric material such as a ceramic, and the ceiling
electrode 116 may have multiple radial slots. The coil antenna 114
is driven by an RF generator 118. In one embodiment, the coil
antenna 114 may consist of inner and outer conductor windings 114a,
114b while the generator 118 may be respective RF generators 118a,
118b coupled through respective impedance matches 120a, 120b to the
inner and outer coil antennas 114a, 114b. However, it is understood
that the coil antennas 114 (114a and 114b) may be eliminated in
embodiments for other uses, such as dielectric etch, in which case
the electrode 116 may be unslotted and the ceiling 108 may be
formed of metal.
[0039] In one embodiment, an RF power generator 122 provides high
frequency (HF) or very high frequency (VHF) power (e.g., within a
range of about 27 MHz through 200 MHz) through an impedance match
element 124 to the overhead electrode 116. Power is coupled to a
bulk plasma 126 within the chamber 104 formed over the workpiece
support 103.
[0040] RF plasma bias power is coupled to the workpiece 102 from an
RF bias power supply coupled to an electrode 130 underlying the
wafer 102. In one embodiment, the RF bias power supply may include
a low frequency (LF) RF power generator 132 (100 kHz to 4 MHz) and
another RF power generator 134 that may be a high frequency (HF) RF
power generator (4 MHz to 27 MHz). An impedance match element 136
is coupled between the bias power generators 132, 134 and the
workpiece support electrode 130. A vacuum pump 160 evacuates
process gas from the chamber 104 through a valve 162 which can be
used to regulate the evacuation rate. If the workpiece support 103
is an electrostatic chuck, then a D.C. chucking voltage supply 170
is connected to the electrode 130. A capacitor 172 provides
isolation from the D.C. voltage supply 170.
[0041] In one embodiment, a system controller 140 may control the
source power generators 118, 122. The controller 140 may also
control the pumping rate of the vacuum pump 160 and/or the opening
size of the evacuation valve 162. In addition, the controller 140
may control the bias power generators 132, 134.
[0042] The lid 505 in one embodiment is depicted in FIG. 2, and may
be a disk composed of metal or insulating material. The lid 505 has
elongate radial inner and outer zone gas supply passages 1201, 1202
extending inwardly from the outer edge of the lid 505. Inner zone
and outer zone gas panels 112a, 112b of the gas supply 112 (FIG. 1)
furnish process gas to respective ones of the gas supply passages
1201, 1202. The gas panels 112a, 112b control process gas flow
rates from individual ones of plural (multiple) process gas sources
containing different process gas species or compounds.
[0043] The manifold 510 in one embodiment is a disk depicted in the
top and bottom views of FIGS. 3A and 3B, having gas distribution
passages formed as channels 1204 in its top surface (FIG. 3A) and
channels 1206 in its bottom surface (FIG. 3B). The top surface
channels 1204 communicate with the bottom surface channels 1206
through orifices 1208 extending through the manifold 510. The top
surface channels 1204 of FIG. 3A may consist of a radially inner
group of channels 1210 occupying a circular region or inner zone
1211, and a radially outer group of channels 1212 occupying an
annular region or outer zone 1213. In one embodiment, the
showerhead/ceiling assembly 108 (FIG. 1) divides gas distribution
into plural concentric independent gas distribution zones. In the
illustrated embodiment of the manifold 510 of FIG. 3, these zones
consist of the circular inner zone 1211 (having the inner group of
channels 1210) and the annular outer zone 1213 (having the outer
group of channels 1212).
[0044] In one embodiment, the outer channels 1212 of the manifold
510 begin at a receiving end 1214 that faces an axial port 1202a
(shown in FIG. 2) of the gas supply passage 1202 of the lid 505. In
the embodiment of FIG. 3A, the outer channels 1212 are laid out in
multiple T-junctions 1216 in which gas flow is equally divided into
opposite circumferential directions at each T-junction 1216. Each
T-junction 1216 is at the center of a corresponding T-pattern 1219.
The T-junctions 1216 are cascaded so that gas flow is divided among
successively shorter arcuate channels 1212-1, 1212-2, 1212-2,
1212-4 in a sequence beginning with the long channels 1212-1 and
ending with the short channels 1212-4. The short channels 1212-4
are terminated at tip ends 1220. Each of the orifices 1208 is
located at a respective one of the tip ends 1220. Each T-pattern
1219 is symmetrical about the corresponding T-junction 1216 so that
the distances traveled through the channels 1212 by gas from the
receiving end 1214 to the different orifices 1208 are all the same.
This feature can provide uniform gas pressure throughout all the
orifices 1208 in the outer gas zone 1213.
[0045] In one embodiment, the inner zone channels 1210 in the
embodiment of FIG. 3A are likewise arranged in T-patterns. The
inner zone channels 1210 of the manifold 510 of FIG. 3A begin at a
gas receiving end 1230 that underlies an axial port 1201a of the
lid 505 (shown in FIG. 2) of the supply channel 1201 in the lid
505. Returning to FIG. 3A, in one embodiment, the gas flow is split
into two opposing circumferential directions along a concentric
channel 1210-1 at a first T-junction 1232a, gas flow in each of
those two opposing directions then being split in half at a pair of
T-junctions 1232b, 1232c, creating four divided gas flow paths that
supply four respective T-patterns 1234a, 1234b, 1234c, 1234d. Each
one of the T-patterns 1234a-1234d consists of channels 1236-1,
1236-2 forming the T-pattern. A corresponding one of the orifices
1208 is located within and near the tip end of a corresponding one
of the T-pattern channels 1236-1, 1236-2. The T-patterns 1234a
through 1234d are symmetrical so that the gas flow distances from
the receiving end 1230 to each of the orifices 1208 in the inner
zone are the same, in order to ensure uniform gas pressure at the
orifices 1208 in the inner zone 1211. The gas flow extends less
than a circle (e.g., less than a half-circle in the embodiment of
FIG. 3A) in opposing directions from the input end 1230.
[0046] Referring to the bottom view of the manifold 510 illustrated
in FIG. 3B, bottom surface channels 1206 in the bottom surface of
the manifold 510 are divided into a circular inner zone 1300 and an
annular outer zone 1302 surrounding the inner zone 1300, in one
embodiment. In the illustrated embodiment, the channels 1206 in
each of the zones 1300, 1302 form successive "H" patterns 1309. In
the outer zone 1302, for example, the channels consist of arcuate
concentric channels 1310, 1312 and radial channels 1314. Each "H"
pattern 1309 is formed by one of the radial channels connecting the
concentric channels 1310, 1312. Each of the concentric channels
1310, 1312 extends over a limited arc (e.g., a quarter circle). The
orifices 1208 in the outer zone 1302 are located in the center of
each radial channel 1314.
[0047] In one embodiment, in the inner zone 1300, the bottom
surface channels 1206 include sets of arcuate concentric channels
1320, 1321, 1322, each extending less than a complete circle. The
innermost circumferential channel 1320 extends around an arc that
is nearly (but slightly less than) a complete circle. The next
circumferential channel 1321 (of which there are two) extends
around an arc of about a half circle. The next circumferential
channel 1322 (of which there are four) extends around an arc of
about a quarter of a circle. Radial channels 1323 connect the
arcuate channels 1320, 1321, 1322. An "H" pattern 1309 is formed by
the connection between each radial channel 1323 and the pair of the
concentric channels 1321, 1322. Orifices 1208 are located in the
radial channels 1323 halfway between the concentric channels 1321,
1322. In addition, some orifices 1208 are located in the innermost
concentric channel 1320. In FIG. 3B, the two orifices 1208-1 and
1208-2 in the inner zone 1300 are the orifices of the T-pattern
1234b of FIG. 3A.
[0048] FIG. 4 depicts an embodiment of the showerhead 515 and the
gas injection orifices 110 that extend therethrough. Various ones
of the showerhead gas injection orifices 110 are aligned with
various ones of the bottom surface channels 1206 of the manifold
510. Since each of the injection orifices extends completely
through the showerhead 515, their hole patterns on the top and
bottom faces of the showerhead 515 are the same.
[0049] The top surface channels 1204 of the manifold 510 can
uniformly distribute gas pressure from each of the inner and outer
zone gas input channels 1201, 1202 to the orifices 1208. The bottom
surface channels 1206 in the manifold 510 can uniformly distribute
gas pressure from orifices 1208 of the manifold 510 to the gas
injection orifices 110 of the showerhead 515.
[0050] FIG. 5 depicts the alignment of the showerhead gas injection
orifices 110 with the inner zone 1300 of bottom surface channels
1206 of the manifold 510 in accordance with one embodiment. FIG. 6
depicts the alignment of the showerhead gas injection orifices 110
with the outer zone 1302 of bottom surface channels 1206 of the
manifold 510 in accordance with one embodiment. In an embodiment
illustrated in FIG. 5, the gas flow path from a manifold orifice
1208 to the closest showerhead gas injection orifice 110 is the
same for all manifold orifices 1208 of the inner zone 1300. In FIG.
6, the gas flow path from a manifold orifice 1208 to the
corresponding showerhead gas injection orifice 110 is the same for
all manifold orifices 1208 of the outer zone 1302. This feature can
provide a uniform gas pressure at all gas injection orifices 110 of
the showerhead 515 within each zone 1300, 1302, while the different
zones 1300, 1302 may have different gas pressures.
[0051] FIG. 7 is a top view of the planar electrode 116 formed
inside the showerhead 515 as a thin conductive layer in accordance
to an embodiment of the present invention. The radial slots 1340 in
the electrode 116 are provided if the inductively coupled power
applicator 114 is present. The radial slots 1340 prevent absorption
of inductively coupled power by the electrode 116, thereby enabling
power to be inductively coupled from the coil antenna 114 through
the electrode 116 and into the chamber with little or no loss.
Optionally, as indicated in FIG. 4, the radial slots 1340 may
coincide with the gas injection orifices 110 of the showerhead 515
(although the orifices 110 would not normally be visible in the
view of FIG. 4). If the coil antenna 114 is not present, then the
radial slots 1340 may be eliminated, in which case the electrode
116 forms a continuous surface.
External Distribution Plate with Single Flow Splitting Layer:
[0052] FIGS. 8A and 8B depict a plasma reactor in accordance with
one embodiment in which a modified showerhead assembly 208 replaces
the showerhead assembly 108 of FIG. 1. The modified showerhead
assembly 208 includes the lid 505 of FIG. 2. It further includes a
manifold 610 depicted in FIGS. 9A and 9B. It further includes a
showerhead 615 depicted in FIG. 10. The showerhead assembly 208 can
include a ceiling electrode 216, which may be below the showerhead
615.
[0053] The manifold 610 is depicted in the top and bottom views of
FIGS. 9A and 9B. Referring to FIG. 9A, in one embodiment, the top
surface of the manifold 610 has gas distribution passages formed as
channels 1204. Referring to FIG. 9B, the bottom surface of the
manifold 610 is flat and devoid of channels. The showerhead 615
shown in FIG. 10 is shaped to form the bottom and sides of an empty
volume or plenum 210 shown in FIG. 8B, the top of which is enclosed
by the manifold 610. The top surface channels 1204 communicate with
the plenum 210 through orifices 1208 extending through the manifold
610.
[0054] In one embodiment, the top surface channels 1204 consist of
a radially inner group of channels 1210 occupying a circular region
or inner zone 1211 and a radially outer group of channels 1212
occupying an annular region or outer zone 1213 (as shown in FIG.
9A). There are plural concentric independent gas distribution
zones. In the illustrated embodiment, these zones consist of the
circular inner zone 1211 (having the inner group of channels 1210)
and the annular outer zone 1213 (having the outer group of channels
1212).
[0055] The outer channels 1212 begin at a receiving end 1214 that
faces an axial port 1202a (shown in FIG. 9) of the gas supply
passage 1202 of the lid 605. Referring again to FIG. 9A, the outer
channels 1212 are laid out in multiple T-junctions 1216 in which
gas flow is equally divided into opposite circumferential
directions at each T-junction 1216. Each T-junction 1216 is at the
center of a corresponding T-pattern 1219. The T-junctions 1216 are
cascaded so that gas flow is divided among successively shorter
arcuate channels 1212-1, 1212-2, 1212-2, 1212-4 in a sequence
beginning with the long channels 1212-1 and ending with the short
channels 1212-4. The short channels 1212-4 are terminated at tip
ends 1220. Each of the orifices 1208 is located at a respective one
of the tip ends 1220. Each T-pattern 1219 in the illustrated
embodiment is symmetrical about the corresponding T-junction 1216
so that the distances traveled through the channels 1212 by gas
from the receiving end 1214 to the different orifices 1208 are all
the same. This feature can provide uniform gas pressure throughout
all the orifices 1208 in the outer gas zone 1213.
[0056] The inner zone channels 1210 of FIG. 9A are arranged in
T-patterns, in one embodiment. The inner zone channels 1210 begin
at a gas receiving end 1230 that underlies an axial port 1201a
(shown in FIG. 9) of the supply channel 1202 in the lid 605. In one
embodiment, the gas flow is split into two opposing circumferential
directions along a concentric channel 1210-1 at a first T-junction
1232a, gas flow in each of those two opposing directions then being
split in half at a pair of T-junctions 1232b, 1232c, creating four
divided gas flow paths that supply four respective T-patterns
1234a, 1234b, 1234c, 1234d. Each one of the T-patterns 1234a-1234d
consists of a pair of channels 1236-1, 1236-2 forming the
T-pattern. A corresponding one of the orifices 1208 is located
within and near the tip end of a corresponding one of the T-pattern
channels 1236-1, 1236-2. The T-patterns 1234a through 1234d are
symmetrical so that the gas flow distances from the receiving end
1230 to each of the orifices 1208 in the inner zone are the same,
in order to ensure uniform gas pressure at the orifices 1208 in the
inner zone 1211. The gas flow extends less than a circle (e.g.,
less than a half-circle in the embodiment of FIG. 9A) in opposing
directions from the input end 1230.
[0057] In the foregoing embodiment, the manifold 610 provides only
a single layer of path-splitting channels 1204 whose gas outlet
holes 1208 directly feed the plenum 210 shown in FIG. 8B. Gas
flowing through the outlet holes 1208 gathers in the plenum 210 and
is injected into the chamber interior through the holes 110 in the
showerhead 615.
[0058] Referring to FIG. 10, in one embodiment, an annular wall 211
in the plenum 210 divides the plenum into concentric inner and
outer plenums 212, 214 fed by the inner and outer zones 1211, 1213
of the manifold 610 respectively. The annular wall 211 extends from
the top surface of the showerhead 615 to the bottom surface of the
manifold 610.
[0059] In one embodiment, referring to FIG. 9A, the outlet holes
1208 of the manifold 610 are arranged along concentric imaginary
circles 220, 224 indicated in phantom line. The gas outlet holes
1208 of the outer zone 1213 lie along the outermost circle 220. The
gas outlet holes 1208 of the inner zone 1211 lie along an
intermediate circle 224. The outlet holes 110 of the showerhead 615
may be more closely spaced and more numerous than the outlet holes
1208 of the manifold 610, as shown in FIG. 10.
[0060] FIG. 11 illustrates the overhead electrode 216. In the
embodiment of FIG. 8B, the electrode 216 may be placed beneath the
showerhead 615. The electrode 216 has gas outlet holes 217 in
registration with the gas outlet holes 110 of the showerhead 615,
as shown in FIG. 11.
[0061] Referring to the embodiment of FIG. 8C, the lid 605 and
manifold 610 may be external or separated from the showerhead 615.
In one embodiment, this separation may accommodate a temperature
control plate 230, such as a chiller or heater plate, between the
manifold 610 and the showerhead 615. In the embodiment of FIG. 8C,
the temperature control plate 230 has holes 232 extending through
it that are in registration with the outlet holes 1208 of the
manifold 610. The plenum 210 is defined between the showerhead 615
and the temperature control plate 230. In one implementation of the
embodiment of FIG. 8C, the annular wall 211 of FIG. 10 extends from
the top surface of the showerhead 615 to the bottom surface of the
temperature control plate 230. The annular wall 211 divides the
plenum 210 into inner and outer plenums 212, 214.
[0062] In the embodiment of FIG. 8A, successive ones of the
channels 1204 in the top surface of the manifold 610 are split into
a pair of channels of equal length, in a hierarchy of successively
split channels, as described above. The manifold 610 may therefore
be referred to as a path splitting manifold. The successively split
channels 1204 terminate at individual ones of the outlet holes
1208. The outlet holes are axial, while the manifold 610 and the
showerhead 615 are axially displaced from one another, so that the
manifold outlet holes 1208 axially feed the showerhead 615, in
accordance with the foregoing description.
Radially Coupled Gas Distribution Plate:
[0063] FIG. 12 depicts an embodiment in which a path splitting
manifold feeds a showerhead in the radial direction, as
distinguished from the axial direction. Referring to FIGS. 12 and
13, an inner path splitting manifold 410 has a gas supply inlet 411
from which gas flow is split between two halves of a half-circle
gas flow channel 412. Gas flow from each of the two ends of the
channel 412 is split between two halves of respective quarter
circle channels 414-1, 414-2. Gas flow from each of the two ends of
each channel 414-1, 414-2 is split between two halves of respective
one-eighth circle channels 416-1 through 416-4. Specifically, gas
flow from each end of the channel 414-1 is split between two halves
of a respective one of the channels 416-1 and 416-2. Similarly, gas
flow from each end of the channel 414-2 is split between two halves
of a respective one of the channels 416-3 and 416-4. Each of the
channels 416-1 through 416-4 has a pair of ends terminating in
respective radial outlet holes 418, there being a total of eight
outlet holes extending in the radial direction in the illustrated
embodiment. Other embodiments may have a different number of
outlets. An inner showerhead 420 surrounds or radially faces the
inner manifold 410 and receives gas flow from the manifold 410
through the radial holes 418. The inner showerhead 420 includes an
inner plenum 422 having a floor 424 with gas injection holes 426
extending axially through the floor and providing gas flow into the
reactor chamber interior 104.
[0064] While the channel 412 is described above as a half circle,
the channels 414-1 and 414-2 are described as being quarter circles
and the channels 416-1 through 416-4 are described as being
one-eighth circles, these channels may be of any suitable lengths,
provided gas flow into each channel enters at the midpoint along
the length of the channel. This ensures equal path lengths from the
main inlet 411 to each of the outlets 418.
[0065] In one embodiment, an outer path splitting manifold 430 has
a gas supply inlet 431 from which gas flow is split between two
halves of a half-circle gas flow channel 432. Gas flow from each of
the two ends of the channel 432 is split between two halves of
respective quarter circle channels 434-1, 434-2. Gas flow from each
of the two ends of each channel 434-1, 434-2 is split between two
halves of respective one-eighth circle channels 436-1 through
436-4. Specifically, gas flow from each end of the channel 434-1 is
split between two halves of a respective one of channels 436-1 and
436-2. Similarly, gas flow from each end of the channel 434-2 is
split between two halves of a respective one of channels 436-3 and
436-4. Each of the channels 436-1 through 436-4 has a pair of ends
terminating in respective radial outlet holes 438, there being a
total of eight outlet holes extending in the radial direction in
the illustrated embodiment. Other embodiments may have a different
number of outlets. An outer showerhead 440 surrounds or radially
faces the outer manifold 430 and receives gas flow from the
manifold 430 through the radial holes 438. The outer showerhead 440
includes a plenum 442 having a floor 444 with gas injection holes
446 extending axially through the floor and providing gas flow into
the reactor chamber interior 104.
[0066] While the channel 432 is described above as a half circle,
the channels 434-1 and 434-2 are described as being quarter circles
and the channels 436-1 through 436-4 are described as being
one-eighth circles, these channels may be of any suitable lengths,
provided gas flow into each channel enters at the midpoint along
the length of the channel. This ensures equal path lengths from the
main inlet 431 to each of the outlets 438.
[0067] In one embodiment, the inner manifold 410, the inner
showerhead 420, the outer manifold 430 and the outer showerhead 440
are mutually concentric components comprising a gas distribution
plate 445. As shown in FIG. 14, the electrode 216 underlies the
bottom of the plate 445. The electrode has holes 217 some of which
are in registration with the outlet holes 426 of the inner
showerhead 420 and others of which are in registration with the
outlet holes 446 of the outer showerhead 440. In the embodiment of
FIG. 14, a temperature control plate 450, such as a chiller plate
or heater plate, may be placed between the assembly 445 and the
electrode 216. The temperature control plate 450 has holes 452 that
continue the axial paths provided by the holes 426 of the inner
showerhead 420 and the holes 446 of the outer showerhead 440.
[0068] FIGS. 13 and 14 depict embodiments in which each of the
inner manifold 410 is planar or flat and is radially adjacent the
showerhead 420.
[0069] In the embodiments of FIGS. 12 and 13, gas flow to each
showerhead is in the radially outward direction.
[0070] FIGS. 15 and 16A depict a different embodiment in which gas
flow to each showerhead is in the radially inward direction. In the
embodiment of FIGS. 15 and 16A, a center path splitting manifold
2410 surrounds and supplies gas to a center showerhead 2420, while
an outer path splitting manifold 2430 surrounds and supplies gas to
an outer showerhead 2440.
[0071] Referring to FIGS. 15 and 16A, in one embodiment, the inner
path splitting manifold 2410 has a gas supply inlet 2411 from which
gas flow is split between two halves of a half-circle gas flow
channel 2412. Gas flow from each of the two ends of the channel
2412 is split between two halves of respective quarter circle
channels 2414-1, 2414-2. Gas flow from each of the two ends of each
channel 2414-1, 2414-2 is split between two halves of respective
one-eighth circle channels 2416-1 through 2416-4. Specifically, gas
flow from each end of the channel 2414-1 is split between two
halves of a respective one of channels 2416-1 and 2416-2.
Similarly, gas flow from each end of the channel 2414-2 is split
between two halves of a respective one of channels 2416-3 and
2416-4. Each of the one-eighth circle channels 2416-1 through
2416-4 has a pair of ends terminating in respective radial outlet
holes 2418, a total of eight outlet holes 2418 extending in the
radial direction. The inner showerhead 2420 is surrounded by the
inner manifold 2410 and receives gas flow in the radially inward
direction from the manifold 2410 through the radial holes 2418. The
inner showerhead 2420 includes an inner plenum 2422 having a floor
2424 with gas injection holes 2426 extending axially through the
floor and providing gas flow into the reactor chamber interior
104.
[0072] The outer path splitting manifold 2430 has a gas supply
inlet 2431 from which gas flow is split between two halves of a
half-circle gas flow channel 2432. Gas flow from each of the two
ends of the channel 2432 is split between two halves of respective
quarter circle channels 2434-1, 2434-2. Gas flow from each of the
two ends of each channel 2434-1, 2434-2 is split between two halves
of respective one-eighth circle channels 2436-1 through 2436-4.
Specifically, gas flow from each end of the channel 2434-1 is split
between two halves of a respective one of the channels 2436-1 and
2436-2. Similarly, gas flow from each end of the channel 2434-2 is
split between two halves of a respective one of channels 2436-3 and
2436-4. Each of the channels 2436-1 through 2436-4 has a pair of
ends terminating in respective radial outlet holes 2438, there
being a total of eight outlet holes 2438 extending in the radial
direction in the illustrated embodiment. Other embodiments may have
a different number of outlets. The outer showerhead 2440 is
surrounded by the outer manifold 2430 and receives gas flow in the
radially inward direction from the manifold 2430 through the radial
holes 2438. The outer showerhead 2440 includes a plenum 2442 having
a floor 2444 with gas injection holes 2446 extending axially
through the floor and providing gas flow into the reactor chamber
interior 104.
[0073] The inner manifold 2410, the inner showerhead 2420, the
outer manifold 2430 and the outer showerhead 2440 are mutually
concentric components comprising a gas distribution plate 2445. The
electrode 216 underlies the bottom of the plate 2445. The electrode
has holes 217 some of which are in registration with the outlet
holes 2426 of the inner showerhead 2420 and others of which are in
registration with the outlet holes 2446 of the outer showerhead
2440. A temperature control plate 450 may be placed between the gas
distribution plate 2445 and the electrode 216 in the manner
depicted in FIG. 16B. The temperature control plate 450 has holes
452 in registration with the showerhead outlet holes 2426 and
2446.
[0074] In the embodiments of FIGS. 12-16B, gas flow from each of
the path splitting manifolds (e.g., the path splitting manifolds
410, 420 of FIG. 12) is in the radial direction so that the
respective showerheads (e.g., the showerheads 420, 440 of FIG. 12)
are juxtaposed radially or side-by-side with the path splitting
manifolds. In the implementations described herein, these
embodiments can provide an advantage over the embodiments of FIGS.
1-11, in that the separation between the inner and outer gas
injection zones established by the inner and outer showerheads
(e.g., the inner and outer showerheads 410, 430 of FIG. 12) is
greater, and therefore provides superior resolution between the gas
flows of the inner and outer gas injection zones.
Path Splitting Manifold Immersed Inside Showerhead:
[0075] FIG. 17 depicts an embodiment in which each showerhead 420,
440 is enlarged to form a large interior volume, and the respective
path-splitting manifold 410, 430 is immersed or contained inside
the enlarged interior volume of the showerhead. The manifolds 410,
430 eject gas radially outwardly. However, in another embodiment
(not shown), the manifolds 410, 430 may be replaced by the
manifolds 2410, 2430, respectively, that eject gas radially
inwardly. In the embodiment depicted in FIG. 17, the manifolds 410
and 430 have been modified to eject gas in both the radially inward
direction and the radially outward direction.
[0076] FIG. 18 is a plan view of the modification of the inner
manifold 410 for use in the embodiment of FIG. 17, in which gas is
ejected from the manifold 410 in both the radially outward
direction and the radially inward direction. Referring now to both
FIGS. 17 and 18, the gas outlet holes 418 extend to both the inner
and outer surfaces 410a, 410b of the manifold 410, so that each
hole forms an outwardly facing opening 418a and an inwardly facing
opening 418b. FIG. 18 also depicts the modification of the outer
manifold 430 in which gas is ejected from the manifold 430 in both
the radially outward direction and the radially inward direction.
Referring to both FIGS. 17 and 18, the gas outlet holes 438 extend
to both the inner and outer surfaces 430a, 430b of the manifold
430, so that each hole forms an outwardly facing opening 438a and
an inwardly facing opening 438b.
[0077] An advantage of the embodiments of FIGS. 17 and 18 is that
there can be greater number of outlet channels in each of the path
splitting manifolds (e.g., the path splitting manifolds 410, 430 of
FIG. 18) than in other embodiments. Specifically, referring to FIG.
18, the outer path splitting manifold 430 (for example) as both a
set of outwardly-facing outlets 438a and a set of inwardly-facing
outlets 438b, and therefore has a significantly larger (e.g.,
twice) number of gas outlets relative to the embodiment of FIG. 12
(for example). As a result, the embodiment of FIG. 18 can have a
proportionately greater gas conductance.
Vertically Stacked Path Splitting Manifold:
[0078] The path splitting manifolds of the foregoing embodiments
distributed gas flow primarily in the radial direction and
primarily in a plane. FIG. 19 depicts an embodiment in which a path
splitting manifold is vertically distributed or stacked. The
manifold of FIG. 19 has a gas supply inlet 3411 from which gas flow
is split between two halves of a half-circle gas flow channel 3412.
Quarter circle channels 3414-1 and 3414-2 are axially displaced
below the half circle channel, with their midpoints being coupled
to respective ends of the half circle channel 3412 by respective
axial channels 3413-1 and 3413-2. Gas flow from each of the two
ends of the channel 3412 is split between two halves of the
respective quarter circle channels 3414-1, 3414-2. One-eighth
circle channels 3416-1 through 3416-4 are axially displaced below
the quarter circle channels 3414-1, 3414-2, with their midpoints
being coupled to respective ends of the quarter circle channels
3414-1 and 3414-2 by respective axial channels 3415-1 through
3415-4. Gas flow from each of the two ends of each channel 3414-1,
3414-2 is split between two halves of the respective one-eighth
circle channels 3416-1 through 3416-4. Specifically, gas flow from
each end of the channel 3414-1 is split between two halves of a
respective one of channels 3416-1 and 3416-2. Similarly, gas flow
from each end of the channel 3414-2 is split between two halves of
a respective one of channels 3416-3 and 3416-4. Each of the
channels 3416-1 through 3416-4 has a pair of ends terminating in
respective outlets 3418-1 through 3418-8, there being a total of
eight outlets 3418-1 through 3418-8 in the illustrated embodiment.
Other embodiments may have a different number of outlets. The
outlets 3418 are depicted as extending in the axial direction, for
coupling to a showerhead that is axially below the manifold.
However, in other embodiments these outlets may extend in a
direction other that axial. FIG. 20 is a plan view corresponding to
FIG. 19 and showing how the gas flow channels of FIG. 19 may be
confined to a narrow cylindrical annulus.
[0079] FIGS. 21 and 22 depict a gas distribution system having
inner and outer vertically stacked manifolds and inner and outer
showerheads. The gas distribution system includes an inner manifold
3410 axially above an inner showerhead 3420 and an outer manifold
3430 axially displaced above an outer showerhead 3440.
[0080] The inner manifold 3410 of FIG. 21 has a gas supply inlet
3411 from which gas flow is split between two halves of a
half-circle gas flow channel 3412. Quarter circle channels 3414-1
and 3414-2 are axially displaced below the half circle channel,
with their midpoints being coupled to respective ends of the half
circle channel 3412 by respective axial channels 3413-1 and 3413-2.
Gas flow from each of the two ends of the channel 3412 is split
between two halves of the respective quarter circle channels
3414-1, 3414-2. One-eighth circle channels 3416-1 through 3416-4
are axially displaced below the quarter circle channels 3414-1,
3414-2, with their midpoints being coupled to respective ends of
the quarter circle channels 3414-1 and 3414-2 by respective axial
channels 3415-1 through 3415-4. Gas flow from each of the two ends
of each channel 3414-1, 3414-2 is split between two halves of the
respective one-eighth circle channels 3416-1 through 3416-4.
Specifically, gas flow from each end of the channel 3414-1 is split
between two halves of a respective one of channels 3416-1 and
3416-2. Similarly, gas flow from each end of the channel 3414-2 is
split between two halves of a respective one of channels 3416-3 and
3416-4. Each of the channels 3416-1 through 3416-4 has a pair of
ends terminating in respective outlets 3418-1 through 3418-8, there
being a total of eight outlets 3418-1 through 3418-8 extending
axially to the underlying inner showerhead 3420 in the illustrated
embodiment. Other embodiments may have a different number of
outlets.
[0081] While the channel 3412 is described above as a half circle,
the channels 3414-1 and 3414-2 are described as being quarter
circles and the channels 3416-1 through 3416-4 are described as
being one-eighth circles, these channels may be of any suitable
lengths, provided gas flow into each channel enters at the midpoint
along the length of the channel. This ensures equal path lengths
from the main inlet 3411 to each of the outlets 3418.
[0082] The outer manifold 3430 of FIG. 21 has a gas supply inlet
3431 from which gas flow is split between two halves of a
half-circle gas flow channel 3432. Quarter circle channels 3434-1
and 3434-2 are axially displaced below the half circle channel,
with their midpoints being coupled to respective ends of the half
circle channel 3432 by respective axial channels 3433-1 and 3433-2.
Gas flow from each of the two ends of the channel 3432 is split
between two halves of the respective quarter circle channels
3434-1, 3434-2. One-eighth circle channels 3436-1 through 3436-4
are axially displaced below the quarter circle channels 3434-1,
3434-2, with their midpoints being coupled to respective ends of
the quarter circle channels 3434-1 and 3434-2 by respective axial
channels 3435-1 through 3435-4. Gas flow from each of the two ends
of each channel 3434-1, 3434-2 is split between two halves of the
respective one-eighth circle channels 3436-1 through 3436-4.
Specifically, gas flow from each end of the channel 3434-1 is split
between two halves of a respective one of channels 3436-1 and
3436-2. Similarly, gas flow from each end of the channel 3434-2 is
split between two halves of a respective one of channels 3436-3 and
3436-4. Each of the channels 3436-1 through 3436-4 has a pair of
ends terminating in respective outlets 3438-1 through 3438-8, there
being a total of eight outlets in the illustrated embodiment. Other
embodiments may have a different number of outlets. The outlets
3438-1 through 3438-8 extend in the axial direction to the
underlying outer showerhead 3440.
[0083] While the channel 3432 is described above as a half circle,
the channels 3434-1 and 3434-2 are described as being quarter
circles and the channels 3436-1 through 3436-4 are described as
being one-eighth circles, these channels may be of any suitable
lengths, provided gas flow into each channel enters at the midpoint
along the length of the channel. This ensures equal path lengths
from the main inlet 3431 to each of the outlets 3438-1 through
3438-8.
[0084] FIG. 22 illustrates a temperature control plate 230 may be
interposed between the different axial layers of the manifolds
3410, 3430. For example, the temperature control 230 plate may be
placed axially between the layer consisting of the half circle
channels 3412 and 3432 and the layer consisting of the quarter
circle channels 3414-1, 3414-2 and 3434-1 and 3434-2.
[0085] FIG. 23 illustrates a further embodiment, in which the
vertically stacked path splitting manifold 3410 and the showerhead
3420 are at least partially side-by-side, and the outlets 3418 are
oriented in the radial direction. Also in FIG. 23, the vertically
stacked path splitting manifold 3430 and the showerhead 3440 are at
least partially side-by-side and the outlets 3438 are oriented in
radial directions.
Hierarchy of Recursively Split Channels:
[0086] The path-splitting channels of the embodiments of FIGS. 3A,
9A, 12, 15 and 18 are distributed in azimuthally extending planes.
The path-splitting channels of the embodiments of FIGS. 19 and 21
are axially distributed. These embodiments each consist of
successive layers of split channels, in which the gas flow paths
are recursively (repeatedly) split, each layer having twice as many
channels as the previous layer. For example, in the embodiment of
FIG. 9A, the input channel 1214 is split between two halves of the
channel 1212-1, which in turn is split into two halves of channels
1212-2, which in turn are split into four pairs of halves of
channels 1212-3, which in turn is split into eight pairs of halves
of channels 1212-4. In this example, there are a total of four
levels of parallel splits, there being a single split in the first
layer and eight splits in the fourth layer, for a total of sixteen
outputs. This multiplication of the number of outputs may be
referred to as recursive splitting or recursive connection at the
midpoints of successive channels. The number of outputs N is
determined by the number of levels of splits, n. In the foregoing
example, n=4, and the general rule is N=2.sup.n. The recursive
nature of this structure can be implemented for any integer value
of n, although the various embodiments described above have values
of n=3 (e.g., FIG. 19) and n=4 (FIG. 9A). Each of these embodiments
constitutes a hierarchy of channels recursively coupled at their
midpoints to outputs of other channels of the hierarchy.
[0087] While the foregoing is directed to embodiments of the
invention, other and further embodiments of the invention may be
devised without departing from the basic scope thereof, and the
scope thereof is determined by the claims that follow.
* * * * *