U.S. patent application number 13/093452 was filed with the patent office on 2012-04-26 for defect reduction of non-polar and semi-polar iii-nitrides with sidewall lateral epitaxial overgrowth (sleo).
This patent application is currently assigned to JAPAN SCIENCE AND TECHNOLOGY AGENCY. Invention is credited to Steven P. DenBaars, Bilge M. Imer, James S. Speck.
Application Number | 20120098102 13/093452 |
Document ID | / |
Family ID | 37482236 |
Filed Date | 2012-04-26 |
United States Patent
Application |
20120098102 |
Kind Code |
A1 |
Imer; Bilge M. ; et
al. |
April 26, 2012 |
DEFECT REDUCTION OF NON-POLAR AND SEMI-POLAR III-NITRIDES WITH
SIDEWALL LATERAL EPITAXIAL OVERGROWTH (SLEO)
Abstract
A method of reducing threading dislocation densities in
non-polar such as a-{11-20} plane and m-{1-100} plane or semi-polar
such as {10-1n} plane III-Nitrides by employing lateral epitaxial
overgrowth from sidewalls of etched template material through a
patterned mask. The method includes depositing a patterned mask on
a template material such as a non-polar or semi polar GaN template,
etching the template material down to various depths through
openings in the mask, and growing non-polar or semi-polar
III-Nitride by coalescing laterally from the tops of the sidewalls
before the vertically growing material from the trench bottoms
reaches the tops of the sidewalls. The coalesced features grow
through the openings of the mask, and grow laterally over the
dielectric mask until a fully coalesced continuous film is
achieved.
Inventors: |
Imer; Bilge M.; (Goleta,
CA) ; Speck; James S.; (Goleta, CA) ;
DenBaars; Steven P.; (Goleta, CA) |
Assignee: |
; JAPAN SCIENCE AND TECHNOLOGY
AGENCY
Kawaguchi City
CA
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Oakland
|
Family ID: |
37482236 |
Appl. No.: |
13/093452 |
Filed: |
April 25, 2011 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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12041398 |
Mar 3, 2008 |
7955983 |
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13093452 |
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|
11444084 |
May 31, 2006 |
7361576 |
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12041398 |
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60685952 |
May 31, 2005 |
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Current U.S.
Class: |
257/615 ;
117/104; 117/108; 117/88; 257/E29.089 |
Current CPC
Class: |
H01L 21/02516 20130101;
H01L 21/02639 20130101; H01L 21/0262 20130101; H01L 21/0242
20130101; H01L 21/0265 20130101; H01L 21/0254 20130101; H01L
21/02433 20130101; H01L 21/02647 20130101; H01L 21/02458 20130101;
H01L 21/02609 20130101 |
Class at
Publication: |
257/615 ; 117/88;
117/104; 117/108; 257/E29.089 |
International
Class: |
H01L 29/20 20060101
H01L029/20; C30B 23/06 20060101 C30B023/06; C30B 25/02 20060101
C30B025/02 |
Claims
1. A device having a structure that includes a lateral epitaxial
overgrowth from sidewalls of a patterned substrate, wherein the
lateral epitaxial overgrowth is grown in a semi-polar or non-polar
direction and has a top surface that is semi-polar or non-polar,
the lateral epitaxial overgrowth comprising a semi-polar or
non-polar III-nitride film.
2. The device of claim 1, wherein the lateral epitaxial overgrowth
is grown in the non-polar direction and has the top surface that is
non-polar, the lateral epitaxial overgrowth comprising the
non-polar III-nitride film.
3. The device of claim 2, wherein the non-polar III-nitride film
comprises a threading dislocation density of 10.sup.6 cm.sup.-2 or
less.
4. The device of claim 2, wherein the non-polar III-nitride film
comprises a stacking fault density of 10.sup.3 cm.sup.-1 or
less.
5. The device of claim 2, wherein the non-polar III-nitride film
comprises a stacking fault density of 10.sup.4 cm.sup.-1 or
less.
6. The device of claim 2, wherein the non-polar III-nitride film is
substantially defect free.
7. The device of claim 1, wherein the lateral epitaxial overgrowth
is grown in the semi-polar direction and has the top surface that
is semi-polar, the lateral epitaxial overgrowth comprising the
semi-polar III-nitride film.
8. The device of claim 7, wherein the semi-polar III-nitride film
comprises a threading dislocation density of 10.sup.6 cm.sup.2 or
less.
9. The device of claim 7, wherein the semi-polar III-nitride film
comprises a stacking fault density of 10.sup.3 cm.sup.-1 or
less.
10. The device of claim 7, wherein the semi-polar III-nitride film
comprises a stacking fault density of 10.sup.4 cm.sup.-1 or
less.
11. The device of claim 7, wherein the semi-polar III-nitride film
is substantially defect free.
12. The device of claim 1, wherein the patterned substrate is an
initial non-polar or semi-polar III-nitride layer and a top surface
of the initial non-polar or semi-polar III-nitride layer is an
epitaxially grown non-polar or semi-polar surface.
13. The device of claim 1, wherein the device is an electronic,
optoelectronic, or electromechanical device.
14. The device of claim 1, wherein the semi-polar or non-polar
III-nitride film is a fully coalesced planar film.
15. The device of claim 1, wherein the semi-polar or non-polar
III-nitride film is a planar a-plane, m-plane, or (10-1n) plane
film.
16. A method of fabricating a non-polar or semi-polar III-nitride
device, comprising: performing a lateral epitaxial overgrowth from
sidewalls of a patterned substrate, wherein the lateral epitaxial
overgrowth is grown in a semi-polar or non-polar direction and has
a top surface that is semi-polar or non-polar, the lateral
epitaxial overgrowth comprising a semi-polar or non-polar
III-nitride film, and the device having a structure including the
lateral epitaxial overgrowth.
17. The method of claim 16, wherein the patterned substrate is an
initial non-polar or semi-polar III-nitride layer and a top surface
of the initial non-polar or semi-polar III-nitride layer is an
epitaxially grown non-polar or semi-polar surface.
18. The method of claim 16, wherein the lateral epitaxial
overgrowth is grown by Metal Organic Chemical Vapor Deposition
(MOCVD), Hydride Vapor Phase Epitaxy (HVPE), or Molecular Beam
Epitaxy (MBE).
19. A non-polar or semi-polar III-nitride device, comprising: an
initial non-polar or semi-polar III-nitride layer grown on a
non-III-nitride substrate, wherein a top surface of the initial
non-polar or semi-polar III-nitride layer is an epitaxially grown
non-polar or semi-polar surface; and a subsequent non-polar or
semi-polar III-nitride layer grown on the initial non-polar or
semi-polar III-Nitride layer, comprising a threading dislocation
density of no more than 10.sup.7 cm.sup.-2, wherein the non-polar
or semi-polar III-nitride device is grown on a non-polar or
semi-polar top surface of the subsequent non-polar or semi-polar
III-nitride layer.
20. The device of claim 19, wherein the initial non-polar
III-nitride layer has a top surface that is the non-polar surface
and the non-polar III-nitride device is grown on the non-polar top
surface of the subsequent non-polar III-nitride layer.
21. The device of claim 19, wherein the initial semi-polar
III-nitride layer has a top surface that is the semi-polar surface
and the semi-polar III-nitride device is grown on the semi-polar
top surface of the subsequent semi-polar III-nitride layer.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation under 35 U.S.C. Section
120 of co-pending and commonly-assigned U.S. Utility patent
spplication Ser. No. 12/041,398, filed on Mar. 3, 2008, by Bilge M.
Imer, James S. Speck and Steven P. Denbaars, entitled "DEFECT
REDUCTION OF NON-POLAR AND SEMI-POLAR III-NITRIDES WITH SIDEWALL
LATERAL EPITAXIAL OVERGROWTH (SLEO)," attorneys' docket no.
30794.135-US-C1 (2005-565-3), which application is a continuation
under 35 U.S.C. Section 120 of co-pending and commonly-assigned
U.S. Utility patent application Ser. No. 11/444,084, filed on May
31, 2006, by Bilge M. Imer, James S. Speck and Steven P. Denbaars,
entitled "DEFECT REDUCTION OF NON-POLAR AND SEMI-POLAR III-NITRIDES
WITH SIDEWALL LATERAL EPITAXIAL OVERGROWTH (SLEO)," attorneys'
docket no. 30794.135-US-U1 (2005-565-2), which application claims
the benefit under 35 U.S.C. Section 119(e) of co-pending and
commonly-assigned U.S. Provisional Patent Application Ser. No.
60/685,952, filed on May 31, 2005, by Bilge M. Imer, James S. Speck
and Steven P. Denbaars, entitled "DEFECT REDUCTION OF NON-POLAR
GALLIUM NITRIDE WITH SINGLE-STEP SIDEWALL LATERAL EPITAXIAL
OVERGROWTH," attorneys' docket no. 30794.135-US-P1
(2005-565-1),
[0002] all of which applications are incorporated by reference
herein.
[0003] This application is related to the following co-pending and
commonly-assigned applications:
[0004] U.S. Utility patent application Ser. No. 11/444,083, filed
on May 31, 2006, now U.S. Pat. No. 7,338,828, issued Mar. 4, 2008,
by Bilge M. Imer, James S. Speck and Steven P. DenBaars, entitled
"GROWTH OF PLANAR NON-POLAR {1-1 0 0} M-PLANE GALLIUM NITRIDE WITH
METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD)," attorneys docket
number 30794.136-US-U1 (2005-566), which application claims the
benefit under 35 U.S.C. Section 119(e) of U.S. Provisional Patent
Application Ser. No. 60/685,908, filed on May 31, 2005 by Bilge M.
Imer, James S. Speck and Steven P. DenBaars, entitled "GROWTH OF
PLANAR NON-POLAR {1-100} M-PLANE GALLIUM NITRIDE WITH METALORGANIC
CHEMICAL VAPOR DEPOSITION (MOCVD)," attorneys docket number
30794.136-US-P1 (2005-566);
[0005] all of which applications are incorporated by reference
herein.
BACKGROUND OF THE INVENTION
[0006] 1. Field of the Invention
[0007] The present invention relates to defect reduction of
non-polar and semi-polar III-Nitrides with sidewall lateral
epitaxial overgrowth (SLEO).
[0008] 2. Description of the Related Art
[0009] Gallium nitride (GaN) and its ternary and quaternary
compounds are prime candidates for fabrication of visible and
ultraviolet high-power and high-performance optoelectronic devices
and electronic devices. These devices are typically grown
epitaxially as thin films by growth techniques including molecular
beam epitaxy (MBE), metalorganic chemical vapor deposition (MOCVD),
or hydride vapor phase epitaxy (HVPE). The selection of substrates
is critical for determining the III-Nitride growth direction. Some
of the most widely used substrates for nitride growth include SiC,
Al.sub.2O.sub.3, and LiAlO.sub.2. Various crystallographic
orientations of these substrates are commercially available which
cause a-plane, m-plane, or c-plane growth of GaN.
[0010] FIGS. 1(a) and 1(b) are schematics of crystallographic
directions and planes of interest in hexagonal GaN. Specifically,
these schematics show the different crystallographic growth
directions and also the planes of interest in the hexagonal
wurtzite GaN structure, wherein FIG. 1(a) shows the
crystallographic directions a1, a2, a3, c, <10-10> and
<11-20>, and FIG. 1(b) shows planes a (11-20), m (10-10) and
r (10-12). The fill patterns of FIG. 1(b) are intended to
illustrate the planes of interest, but do not represent the
materials of the structure.
[0011] It is relatively easy to grow c-plane GaN due to its large
growth window (pressure, temperature and precursor flows) and its
stability. Therefore, nearly all GaN-based devices are grown along
the polar c-axis. However, as a result of c-plane growth, each
material layer suffers from separation of electrons and holes to
opposite faces of the layers. Furthermore, strain at the interfaces
between adjacent layers gives rise to piezoelectric polarization,
causing further charge separation. FIGS. 2(a) and 2(b), which are
schematics of band bending and electron hole separation as a result
of polarization, show this effect, wherein FIG. 2(a) is a graph of
energy (eV) vs. depth (nm) and represents a c-plane quantum well,
while FIG. 2(b) is a graph of energy (eV) vs. depth (nm) and
represents a non-polar quantum well.
[0012] Such polarization effects decrease the likelihood of
electrons and holes recombining, causing the device to perform
poorly. One possible approach for eliminating piezoelectric
polarization effects in GaN optoelectronic devices is to grow the
devices on non-polar planes such as a-{11-20} and m-{1-100} plane.
Such planes contain equal numbers of Ga and N atoms and are
charge-neutral.
[0013] Another reason why GaN materials perform poorly is the
presence of defects due to lack of a lattice matched substrate.
Bulk crystals of GaN are not widely available so it is not possible
to simply cut a crystal to present a surface for subsequent device
regrowth. All GaN films are initially grown heteroepitaxially,
i.e., on foreign substrates that have a lattice mismatch to
GaN.
[0014] There is an ever-increasing effort to reduce the dislocation
density in GaN films in order to improve device performance. The
two predominant types of extended defects of concern are threading
dislocations and stacking faults. The primary means of achieving
reduced dislocation and stacking fault densities in polar c-plane
GaN films is the use of a variety of lateral overgrowth techniques,
including single step and double step lateral epitaxial overgrowth
(LEO, ELO, or ELOG), selective area epitaxy, cantilever and
pendeo-epitaxy. The essence of these processes is to block (by
means of a mask) or discourage dislocations from propagating
perpendicular to the film surface by favoring lateral growth over
vertical growth. These dislocation-reduction techniques have been
extensively developed for c-plane GaN growth by HVPE and MOCVD.
[0015] The present invention is the first-ever successful execution
of sidewall lateral epitaxial overgrowth (SLEO) of non-polar
a-plane and m-plane GaN by any growth technique. Prior to the
invention described herein, SLEO of a-plane and/or m-plane GaN had
not been demonstrated.
SUMMARY OF THE INVENTION
[0016] The general purpose of the present invention is to create
high quality (minimum defect density) non-polar a-{11-20} and
m-{1-100} plane and semi-polar {10-1n} plane III-Nitride material
by employing lateral overgrowth from sidewalls of etched nitride
material through a dielectric mask. The method includes depositing
a patterned mask on non-polar or semi-polar III-Nitride template,
etching the template material down to various depths through
openings in the mask, and regrowing the non-polar or semi-polar
epitaxial film by coalescing laterally from the tops of the
sidewalls before the vertically growing material from the trench
bottoms reaches the surface. The coalesced features grow through
the openings of the mask, and grow laterally over the dielectric
mask until a fully coalesced continuous film is achieved.
[0017] These planar non-polar materials grown heteroepitaxially,
such as a-GaN on top of r-Al.sub.2O.sub.3, contain dislocation
densities of .about.10.sup.10 cm.sup.-2 and stacking fault
densities of 3.8.times.10.sup.5 cm.sup.-1 (aligned perpendicular to
the c-axis) throughout the film. By using single step lateral
epitaxial overgrowth, dislocation densities can be reduced down to
.about.10.sup.7-10.sup.9 cm.sup.-2 and stacking faults are
localized only on the nitrogen faces. With the present invention,
using sidewall lateral epitaxial overgrowth, dislocation densities
can be reduced down to even lower values by eliminating defects not
only in the overgrown regions but also in the window regions. Also,
by favoring gallium (Ga) face growth and limiting nitrogen (N) face
growth stacking fault densities can be made orders of magnitude
lower.
[0018] The present invention also takes advantage of the
orientation of non-polar III-Nitrides to eliminate polarization
fields. As a result, with the material produced by utilizing this
invention, device improvements such as longer lifetimes, less
leakage current, more efficient doping and higher output efficiency
will be possible. In addition, a thick non-polar and semi-polar
nitride free-standing substrate, which is needed to solve the
lattice mismatch issue, can be produced over this excellent
material by various methods.
BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Referring now to the drawings in which like reference
numbers represent corresponding parts throughout:
[0020] FIGS. 1(a) and 1(b) are schematics of crystallographic
directions and planes of interest in hexagonal GaN.
[0021] FIGS. 2(a) and 2(b) are schematics of band bending and
electron hole separation as a result of polarization.
[0022] FIG. 3 is a flowchart, including associated schematics, that
illustrates the three SLEO processing steps and the three stages of
regrowth.
[0023] FIG. 4(a) is a scanning electron microscopy image of SLEO
material grown by MOCVD in the first growth stage, and FIG. 4(b) is
a schematic that illustrates the first stage of sidewall growth
from the tops of the GaN pillar sides which blocks growth from the
trench bottoms.
[0024] FIG. 5(a) is a scanning electron microscopy image of a
coalesced SLEO material and FIG. 5(b) is a schematic that further
illustrates the coalesced SLEO material.
[0025] FIGS. 6(a), 6(b) and 6(c) are atomic force microscopy
images, and x-ray diffraction Full Width Half Maximum values that
illustrate the dramatic improvement in film quality by making side
by side comparison of planar non-polar planar, single step LEO, and
SLEO GaN.
DETAILED DESCRIPTION OF THE INVENTION
[0026] In the following description of the preferred embodiment,
reference is made to the accompanying drawings that form a part
hereof, and in which is shown by way of illustration a specific
embodiment in which the invention may be practiced. It is to be
understood that other embodiments may be utilized and structural
changes may be made without departing from the scope of the present
invention.
[0027] Overview
[0028] The growth of (Ga, In, Al, B) N materials in the polar
[0001]c-direction causes lower performance in optical devices due
to polarization fields causing charge separation along the primary
conduction direction. Therefore, research has recently been
conducted on non-polar direction growth along the a-[11-20] and
m-[1-100] directions of these materials to eliminate such effects
and improve device performance significantly.
[0029] Another problem that is common to polar, semi-polar and
non-polar III-Nitride materials is high defect densities, the most
common of which are dislocations and stacking faults. Dislocations
arise as a result of lattice mismatch in heteroepitaxial growth due
to a lack of proper III-Nitride substrates, and stacking faults
form because of disorder of atomic stacking during growth, which
is, for example, predominant on the nitrogen face sidewall during
a-plane GaN growth. With the present invention, the presence of
these stacking faults can be minimized by favoring Ga face growth
and limiting N face growth.
[0030] Dislocation densities in directly grown (Ga, In, Al, B)N
materials are quite high. High-performance devices could be
achieved by reducing or ideally eliminating these defects
accompanied by the use of non-polar materials. Such defects have
been reduced by various methods involving LEO in polar and
non-polar GaN over the years. The essence of these processes is to
block or discourage dislocations from propagating perpendicular to
the film surface by favoring lateral growth over vertical growth.
Any LEO method involves blocking of defective material with the use
of a mask deposited on the surface. Single-step LEO involves only
one mask patterning and regrowth step, so it is simple to process
and grow, but the results are not as effective as double-step LEO
at defect reduction. Although double LEO is effective in defect
reduction, it takes twice the amount of processing and growth
efforts as compared to single step LEO, as the name implies. As a
result, none of these methods have been both convenient and
effective enough at the same time until now. With the use of SLEO
in the present invention, it is possible to eliminate these defects
in non-polar or semi-polar nitrides as effectively as double-step
LEO by using as simple processing and growth methods as single-step
LEO does. This invention nucleates on and grows from the tops of
etched pillar sidewalls of non-polar or semi-polar nitride
material, and coalesces the tops of the adjacent pillar sidewalls
before the defective material from the heteroepitaxial interface
(at the bottom of the trenches) reaches the top.
[0031] The present invention improves the materials' device
performance in two ways: (1) by utilizing the natural structural
advantage of non-polar material, a-{11-20} and m-{1-100} plane or
semi-polar {10-1n}plane III-Nitride materials, to eliminate or
reduce polarization effects, and (2) by eliminating defects
effectively while employing a unique, reproducible, simple, and
efficient process and growth method.
[0032] Technical Description
[0033] The present invention reduces threading dislocation
densities in non-polar and semi-polar nitrides by employing LEO
from sidewalls of etched nitride material through a dielectric
mask. As described earlier, stacking faults reside on the N face,
one of the vertically oriented faces. This invention also decreases
stacking fault densities with an anisotropy factor, i.e., by
encouraging higher growth rates on the Ga-(0001) face and limiting
the N-(000-1) face growth rates. By utilizing various growth
conditions and processing methods, the present invention has
demonstrated lateral growth and coalescence of non-polar GaN from
sidewalls, and up and over the dielectric mask.
[0034] FIG. 3 is a flowchart, including associated schematics, that
illustrates a method of reducing threading dislocation densities in
non-polar or semi-polar III-Nitride material, employing LEO of
non-polar or semi-polar III-Nitride material from sidewalls of
etched template material through a patterned mask.
[0035] In this embodiment, the method comprises three SLEO
processing steps labeled as A, B and C, and three stages of growth
or regrowth labeled as D, E and F.
[0036] Step A--A template material (1) is formed on an appropriate
substrate (2). The template material (1) may comprise a non-polar
or semi-polar nitride epitaxial film, such as {11-20} or {1-100} or
{10-1n} plane GaN, deposited on the appropriate substrate (2).
[0037] Step B--A patterned mask (3) is formed on the template
material (1). The patterned mask (3) may be a dielectric mask and
may be deposited on the template material (1) by one of a variety
of means. The patterned mask (3) may comprise one or more openings
(4), wherein the openings (4) comprise apertures or stripes
allowing access to the underlying template material (1).
[0038] Step C--The template material (1) is etched through the
openings (4) in the patterned mask (3) to form one or more trenches
(5) or pillars (6) in the template material (1), wherein the
trenches (5) or pillars define sidewalls (7). The orientation of
the openings (4) is aligned in a way that creates planar sidewalls
(7) in subsequent lateral growth steps when the template material
(1) is etched through the openings (4) in the patterned mask
(3).
[0039] Following Step C, the template material (1) is loaded into a
reactor for the growth stages.
[0040] Step D--A first growth stage "SIDE" is performed, wherein
non-polar or semi-polar III-Nitride material, which may comprise
{11-20} or {1-100} or {10-1n} plane GaN, is grown, first by growing
and coalescing the non-polar or semi-polar III-Nitride material
laterally from the tops (8) of the sidewalls (7) (as indicated by
the arrows), before the non-polar or semi-polar III-Nitride
material vertically growing from the bottoms (9) of the trenches
(5) reaches the tops (8) of the sidewalls (7). Preferably, the
non-polar or semi-polar III-Nitride material grows only from the
regions of exposed template material (1), but not on the patterned
mask (3). Specifically, the non-polar or semi-polar III-Nitride
material nucleates on and grows from both the tops (8) of the
sidewalls (7) and the bottoms (9) of the trenches (5). The
non-polar or semi-polar III-Nitride material vertically growing
from the bottoms (9) of the trenches (5) may comprise defective
material from a heteroepitaxial interface (10). Coalescing the
non-polar or semi-polar III-Nitride material growing laterally from
the tops (8) of the sidewalls (7) may block the defected material
vertically growing from the bottoms (9) of the trenches (5).
[0041] Step E--A second growth stage "UP" is performed, wherein the
non-polar or semi-polar III-Nitride material (11) grows vertically
up through the openings (4) (as indicated by the arrows), after the
first growth stage or coalescing step.
[0042] Step F--A third growth stage "OVER" is performed, wherein
the non-polar or semi-polar III-Nitride material (12) grows
laterally over the patterned mask (3) (as indicated by the arrows)
to form an overgrown non-polar or semi-polar III-Nitride material.
This growth may continue until the overgrown material (12) forms a
fully coalesced continuous film, or even if it remains an
uncoalesced overgrowth.
[0043] The result of the method of FIG. 3 is a device, or a free
standing wafer, or a substrate, or a reduced defect density
template, fabricated using the method.
[0044] Note that the template material (1) may have a thickness
comparable or scaled relative to dimensions of the openings (4) in
the patterned mask (3), in order to compensate for competing
lateral to vertical growth rates. In this regard, the dimensions
are the width of the openings (4), or the dimensions along the
lateral direction in which the tops (8) of the sidewalls (7) are
coalescing.
[0045] For example, to compensate, the template material (1)
thickness is chosen with respect to the width dimension of the
openings (4), which will form a trench (5) after etching, having a
separation such that the tops (9) of the sidewalls (7) coalesce
before growth from the bottoms (9) of the trenches (5) reach the
tops (8) of the sidewalls (7).
[0046] This means that, if the lateral and vertical growth rates
are comparable, then the dimensions of the openings (4) should be
less than the thickness of the template material (1).
Alternatively, if the lateral growth rate is faster than the
vertical growth rate, then the dimensions of the openings (4) can
be larger than the thickness of the template material (1).
[0047] Similarly, the etching may be to one or more etch depths
comparable or scaled relative to the dimensions of the openings
(4), in order for the tops (8) of the sidewalls (7) to coalesce
before the defected non-polar or semi-polar III-Nitride material
growing from the bottoms (8) of the trenches (5) reaches the tops
(8) of the sidewalls (7).
[0048] Further, growth from the bottoms (9) of the trenches (5) may
be prevented by etching to the substrate (2), or by depositing an
additional mask (3) on the bottoms (9) of the trenches (5). At
least Steps A and C may comprise growth using a lateral overgrowth
technique.
[0049] To control a lateral and vertical growth rate during the
first (D), second (E) or third (F) growth stages illustrated in
FIG. 3, growth conditions for non-polar a-{11-20} plane gallium
nitride films are specified by: a temperature in a range of
1000-1250 .degree. C., a reactor pressure in a range of 20-760 Ton,
and a V/III ratio in a range of 100-3500, wherein during at least
one of the first, second or third growth stages the conditions are
such that the lateral growth rate is greater than the vertical
growth rate. These conditions may vary from reactor to reactor and
also from one growth method to another.
[0050] By employing the present invention, the dislocation density
is reduced by eliminating or reducing defects in the overgrown
non-polar or semi-polar III-Nitride material over the mask (3) and
coalesced openings (4) (window) regions. In this regard,
dislocation densities may be reduced at least one order of
magnitude lower than that achieved in non-polar or semi-polar
III-Nitride material using conventional single step LEO.
[0051] Also, with proper growth conditions, the present invention
decreases stacking fault densities with an anisotropy factor, by
encouraging higher growth rates on a gallium (Ga) face of the
non-polar III-Nitride material and limiting growth rates on a
nitrogen (N) face of the non-polar III-Nitride material, thereby
reducing stacking fault densities at least one order of magnitude
lower than that achieved in non-polar nitride material or achieved
using conventional single-step LEO, and confining stacking faults
to the N faces.
[0052] Finally, the present invention may be performed using any
epitaxial material that can be grown using a lateral overgrowth
technique. Thus, the epitaxial material may comprise, but is not
limited to, non-polar or semi-polar III-Nitride material such as
non-polar {11-20} or {1-100} plane GaN or semi-polar {10-1n} plane
GaN. Thus, the template material may comprise any material from
which nucleation and growth of the epitaxial material is
achievable.
[0053] Experimental Results
[0054] As an example, 3 .mu.m thick non-polar a-plane or m-plane
GaN film is deposited on an r-plane Al.sub.2O.sub.3 substrate using
a low-temperature GaN nucleation layer by MOCVD to form a template.
Alternatively, the film could be deposited on m-plane SiC using an
AN nucleation layer. A 1 .mu.m thick SiO.sub.2 film is deposited on
this template by plasma-enhanced chemical vapor deposition (PECVD).
Conventional photolithography is used to pattern a photoresist mask
layer comprised of 8 .mu.m-wide stripes separated by 2 .mu.m-wide
openings. The stripe orientation is chosen as <1-100> for
a-GaN and as <11-20> for m-GaN. The GaN template thickness is
chosen with respect to the width of the mask window, which will
form a trench with a separation such that the tops of the GaN
sidewalls coalesce before the bottoms of the trenches reach the
top. The patterned mask is then dry etched using inductively
coupled plasma (ICP) etching to get vertical SiO.sub.2 sidewalls,
completely etching the exposed SiO.sub.2 away. The remaining
photoresist is removed with stripper, and subsequently the samples
are cleaned with solvent. 3 .mu.m thick non-polar GaN exposed
through the SiO.sub.2 openings is etched more than 2 .mu.m down by
using reactive ion etching (RIE). The sample is treated with a
final solvent clean before regrowth. The wafer, which now consists
of an etched non-polar GaN template that is patterned with 8
.mu.m-wide SiO.sub.2 stripes separated by 2 .mu.m-wide openings, is
loaded into the MOCVD reactor for regrowth. During this specific
regrowth, relatively high growth temperatures are used at low
pressures and various V/III ratios to enhance lateral growth. The
V/III ratio is changed to control the lateral and vertical growth
rates comparably at different stages of growth. During the growth
process, GaN nucleates on the GaN sidewalls and exposed GaN
material (or Al.sub.2O.sub.3 or SiC) at the bottom of the trenches,
and coalesces from the tops of the etched GaN sidewalls, and grows
out through the mask openings up and over the SiO.sub.2 mask. The
film then grows laterally over the SiO.sub.2 mask, eventually
coalescing with neighboring GaN stripes.
[0055] FIG. 4(a) is a scanning electron microscopy image of SLEO
material grown by MOCVD in the first growth stage, and FIG. 4(b) is
a schematic that illustrates the first stage of sidewall growth
from the tops of the GaN pillar sides which blocks growth from the
trench bottoms.
[0056] An example of a coalesced a-plane GaN film grown by SLEO
with MOCVD is shown in FIGS. 5(a) and 5(b) in a cross-section view,
wherein FIG. 5(a) is a scanning electron microscopy image of a
coalesced SLEO material and FIG. 5(b) is a schematic that further
illustrates the coalesced SLEO material.
[0057] Regrowth in this example proceeds first by coalescing
non-polar GaN laterally from the tops of the etched sidewalls (Step
D--first growth stage), before the defective material growing from
the trench bottom reaches the tops of the sidewalls, as described
above. Then, the coalesced material grows up from the opening (Step
E--second growth stage) and over the 8 .mu.m-wide mask stripe (Step
F--third growth stage), until adjacent stripes of non-polar
material coalesce forming a continuous a-GaN film with low defect
density. By utilizing sidewall growth, threading dislocations are
blocked, so coalesced films have lower dislocation densities not
only in the overgrown regions but also in the window regions. By
utilizing higher Ga-face horizontal growth rates, the stacking
fault density is reduced and limited only to areas of N-face
overgrowth.
[0058] A completely coalesced film of such SLEO material was
achieved using MOCVD, as shown in FIGS. 5(a) and 5(b). A stripe of
non-polar GaN was grown through a 2 .mu.m-wide opening (comprising
a window) in a SiO.sub.2 mask, which was patterned parallel to
<1-100> to achieve planar sidewalls in subsequent lateral
growth steps. The non-polar GaN was subsequently grown over the 8
.mu.m-wide masked region defined by a mask stripe.
[0059] Possible Modifications and Variations
[0060] The preferred embodiment has described a LEO process from
the etched sidewalls of a non-polar or semi-polar III-Nitride
template. Alternative appropriate substrate materials, on which the
non-polar or semi-polar III-Nitride or GaN template could be formed
include but are not limited to a- and m-plane SiC or r-plane
Al.sub.2O.sub.3. The template material to use as a base for the
sidewall growth process can be any non-polar or semi-polar
III-Nitride template material including but not limited to GaN,
AlN, AlGaN, and InGaN with various thicknesses and crystallographic
orientations. This material can be formed by any means using MOCVD
or HVPE or any other variety of methods. To grow such template
material different nucleation layers including GaN and AlN can be
used. A variety of mask materials, including dielectric, and
geometries with various aperture or opening spacing, sizes and
dimensions may be used. Mask deposition methods with different mask
thicknesses, and mask patterning technique with various
orientations may be used in practice of this invention without
significantly altering the results. Many alternative etching
methods, including but not limited to wet and dry etching
techniques, can be used while etching the mask and/or the template
material. The etch depth of the template material can be varied as
long as the material growing laterally from the sidewalls coalesces
and blocks the defective material growing vertically from the
trench bottoms. Etching of the substrate can be included in the
process to ensure growth only from the sidewalls. The one or more
trenches formed by the etching may have a variety of shapes,
comprising U shaped or V shaped grooves, holes or pits.
[0061] Another possible variation could be that after etching the
III-Nitride material as described above, an additional mask may be
deposited on the bottom of the trenches to allow regrowth from the
sidewalls only.
[0062] The growth parameters required for the lateral overgrowth of
non-polar or semi-polar III-Nitride from the sidewalls will vary
from reactor to reactor. Such variations do not fundamentally alter
the general practice of this invention. Although it is desirable,
final coalescence of the film over the mask is not a requirement
for the practice of this invention. Therefore, this disclosure
applies to both coalesced and uncoalesced laterally overgrown
non-polar or semi-polar III-Nitride films from sidewalls.
[0063] The invention described herein, and all its possible
modifications, can be applied multiple times by repeating the SLEO
process after achieving coalescence, one layer over another layer,
thereby creating a multi-step SLEO process to decrease defect
densities even further.
[0064] This invention can be practiced with any kind of growth
method including but not limited to metalorganic chemical vapor
deposition (MOCVD), and Hydride Vapor Phase Epitaxy (HVPE), and
molecular beam epitaxy (MBE), or the combination of any of these
growth methods at various stages of SLEO processing and growth.
[0065] Advantages and Improvements
[0066] The present invention is the first-ever successful execution
of SLEO of non-polar GaN. It is now possible to reduce the presence
of dislocations most effectively in the simplest possible way in
non-polar or semi-polar III-Nitride materials, while preventing
polarization effects in the resulting devices.
[0067] As an example, FIGS. 6(a), 6(b) and 6(c) are atomic force
microscopy images, and x-ray diffraction FWHM values that
illustrate the dramatic improvement in film quality by making side
by side comparison of planar non-polar planar, single-step LEO, and
SLEO GaN. FIG. 6(a) shows planar a-GaN with an rms of .about.6.0 nm
with an on-axis FWHM of 0.29.degree. (110) and an off-axis FWHM of
0.46.degree. (101). FIG. 6(b) shows a single-step LEO a-GaN with an
rms of .about.5.822 (0.467) nm with an on-axis FWHM of 0.17.degree.
and an off-axis FWHM of 0.27.degree.. FIG. 6(c) shows a SLEO a-GaN
with an rms of .about.0.620 (0.499) nm with an on-axis FWHM of
0.082.degree. and an off-axis FWHM of 0.114.degree..
[0068] Planar non-polar GaN films have been reported to have high
threading dislocation densities of .about.10.sup.10 cm.sup.-2 and
stacking fault densities of 3.8.times.10.sup.5 cm.sup.-1
(perpendicular to c-axis, on N face). These values are reduced by
one or two orders of magnitude by using single step lateral
epitaxial growth by HVPE or MOCVD. Yet with the present invention,
the density of these dislocations and stacking faults was reduced
further down to .about.10.sup.6-10.sup.7 cm.sup.-2 and
10.sup.3-10.sup.4 cm.sup.-1, respectively.
[0069] Previous to this discovery, reduced defect density with a
fully coalesced smooth non-polar GaN film was tried by means of
single-step LEO and double-step LEO methods. But neither of these
methods was successful in getting fully coalesced dislocation free,
reproducible material in the most time and energy-efficient way.
Even though double-step LEO was able to reduce the majority of
defects, it required large amounts of time, energy, and resources.
Conventional single-step LEO, even though it was simple (involving
only one set of processing and growth steps), could not eliminate
the majority of the defects.
[0070] The present discovery, combining the advantages of these two
methods, allows significant defect reduction by leaving most areas
defect-free while involving only one processing and growth step. In
other words, this invention allows having double-step LEO results
with single-step LEO efforts. Such effective defect reduction and
elimination of polarization field at the same time will provide for
breakthrough improvements in the electronic, optoelectronic, and
electromechanical devices that are subsequently grown over this
material.
[0071] A previous report similar to sidewall lateral overgrowth
(SLEO) of GaN by MOCVD is known as pendeo-epitaxy. This technique
has been demonstrated only for polar c-plane GaN growth. And, it
also has fundamental differences in terms of processing and growth.
For example, the substrate, relatively expensive SiC, is used as a
"pseudo" mask, meaning that the growth takes place selectively only
at the sidewalls and not on the substrate. As a result, the
material has to be etched down to the substrate and also the
etching process should be continued into the substrate until a
certain depth. Consequently, the growth does not initiate through
open windows. Therefore, there is no variable involved during
growth to coalesce tops of the sidewalls through the open windows
before the vertically grown material from the bottom of the
trenches reaches the tops of the sidewalls. The lateral growth
involves the nucleation on and growth from the whole etched
sidewall. The main focus is the growth of the whole pillar.
[0072] Another similar study, lateral overgrowth from trenches
(LOFT), suggested growing GaN from the trenches by only exposing
the sidewalls after depositing SiO.sub.2 mask to the top and the
bottom of the pillars. This was demonstrated only for polar
c-GaN.
[0073] Presently, GaN films must be grown heteroepitaxially due to
the unavailability of bulk crystals, and no perfectly
lattice-matched substrates exist for this growth process. As a
result, the present invention also produces an excellent material
base to grow free standing GaN substrate for eventual homoepitaxial
growth.
REFERENCES
[0074] The following references are incorporated by reference
herein:
[0075] 1. Tsvetanka S. Zhelva, Scott A. Smith, et al.,
"Pendeo-Epitaxy--A new approach for lateral growth GaN structures,"
MRS Internet J. Nitride Semicond. Res. 4S1, G3.38 (1999).
[0076] 2. Y. Chen, R. Schneider, Y. Wang, "Dislocation reduction in
GaN thin films via lateral overgrowth from trenches", Appl. Phys.
Letters., 75 (14) 2062 (1999).
[0077] 3. Kevin Linthicum, Thomas Gehrke, Darren Thomson, et al.,
"Pendeoepitaxy of gallium nitride films," Appl. Phys. Lett., 75 (2)
196 (1999).
[0078] 4. M. D. Craven, S. H. Lim, F. Wu, J. S. Speck, and S. P.
DenBaars, "Threading dislocation reduction via laterally overgrown
nonpolar (11-20) a-plane GaN," Appl. Phys. Lett., 81 (7) 1201
(2002).
[0079] 5. Changqing Chen, Jianping Zhang, Jinwei Yang, et al., "A
new selective area lateral epitaxy approach for depositing a-plane
GaN over r-plane sapphire," Jpn. J. Appl. Phys. Vol. 42 (2003) pp.
L818-820.
CONCLUSION
[0080] This concludes the description of the preferred embodiment
of the present invention. The foregoing description of one or more
embodiments of the invention has been presented for the purposes of
illustration and description. It is not intended to be exhaustive
or to limit the invention to the precise form disclosed. Many
modifications and variations are possible in light of the above
teaching, such as additional adjustments to the process described
herein, without fundamentally deviating from the essence of the
present invention. It is intended that the scope of the invention
be limited not by this detailed description, but rather by the
claims appended hereto.
* * * * *