U.S. patent application number 12/913753 was filed with the patent office on 2011-12-29 for semiconductor device and method of fabricating the same including a conductive structure is formed through at least one dielectric layer after forming a via structure.
Invention is credited to Suk-Chul Bang, Gil-Heyun Choi, Deok-Young Jung, Dong-Chan Lim, Kwang-Jin Moon, Byung-Lyul Park.
Application Number | 20110318923 12/913753 |
Document ID | / |
Family ID | 45092653 |
Filed Date | 2011-12-29 |
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United States Patent
Application |
20110318923 |
Kind Code |
A1 |
Park; Byung-Lyul ; et
al. |
December 29, 2011 |
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME INCLUDING A
CONDUCTIVE STRUCTURE IS FORMED THROUGH AT LEAST ONE DIELECTRIC
LAYER AFTER FORMING A VIA STRUCTURE
Abstract
For forming a semiconductor device, a via structure is formed
through at least one dielectric layer and at least a portion of a
substrate. In addition, a protective buffer layer is formed onto
the via structure. Furthermore, a conductive structure for an
integrated circuit is formed over the substrate after forming the
via structure and the protective buffer layer, with the conductive
structure not being formed over the via structure. Thus,
deterioration of the conductive and via structures is
minimized.
Inventors: |
Park; Byung-Lyul; (Seoul,
KR) ; Choi; Gil-Heyun; (Seoul, KR) ; Bang;
Suk-Chul; (Yongin-si, KR) ; Moon; Kwang-Jin;
(Suwon-si, KR) ; Lim; Dong-Chan; (Suwon-si,
KR) ; Jung; Deok-Young; (Seoul, KR) |
Family ID: |
45092653 |
Appl. No.: |
12/913753 |
Filed: |
October 27, 2010 |
Current U.S.
Class: |
438/675 ;
257/E21.577 |
Current CPC
Class: |
H01L 21/76898 20130101;
H01L 21/76801 20130101; H01L 25/18 20130101; H01L 2225/06513
20130101; H01L 2225/06541 20130101; H01L 2224/16 20130101; H01L
25/0657 20130101 |
Class at
Publication: |
438/675 ;
257/E21.577 |
International
Class: |
H01L 21/768 20060101
H01L021/768 |
Foreign Application Data
Date |
Code |
Application Number |
Jun 28, 2010 |
KR |
10-2010-0061184 |
Claims
1. A method for forming a semiconductor device, comprising: forming
a via structure through at least one dielectric layer and at least
a portion of a substrate; forming a protective buffer layer onto
the via structure; and forming a conductive structure for an
integrated circuit over said substrate after forming the via
structure and the buffer layer, with said conductive structure not
being formed over the via structure, wherein said conductive
structure is formed through said at least one dielectric layer that
has been formed before and under said protective buffer layer.
2. The method of claim 1, further comprising: heating said via
structure to form an initial protrusion portion of the via
structure; and planarizing the via structure to remove said initial
protrusion portion before forming said protective buffer layer onto
the via structure.
3. The method of claim 1, wherein the protective buffer layer
remains on the via structure during said formation of said
conductive structure for said integrated circuit.
4. The method of claim 1, further comprising: removing the
protective buffer layer from the via structure; and forming
respective wiring onto each of said via structure and said
conductive structure.
5. The method of claim 1, further comprising: forming a first
insulation layer onto at least one wall of an opening having the
via structure formed therein; and forming a second insulation layer
over the substrate with the via structure being planar with the
second insulation layer, before the step of forming the protective
buffer layer.
6. The method of claim 5, wherein a ratio of a first thickness of
the first insulation layer to a second thickness of the second
insulation layer is in a range of from about 0.3:1 to about
0.9:1.
7. The method of claim 5, wherein a thickness of the first
insulation layer is less than 1/4 of a diameter of said opening
having the via structure formed therein.
8. The method of claim 5, further comprising: forming a barrier
layer on the first insulation layer within the opening; and forming
a conductive fill within the opening after forming the barrier
layer.
9. The method of claim 8, wherein the conductive fill is comprised
of copper.
10. The method of claim 8, further comprising: forming a center
fill within the opening such that the conductive fill surrounds at
least a portion of the center fill.
11. The method of claim 10, wherein the center fill has a thermal
expansion coefficient that is lower than that of the conductive
fill.
12. The method of claim 11, wherein the via structure is a TSV
(through silicon via) formed within the opening through said at
least one dielectric layer and the substrate.
13. The method of claim 12, wherein the TSV is coupled to a contact
structure of another semiconductor device for forming a stacked
semiconductor device.
14. The method of claim 1, wherein the via structure is a TSV
(through silicon via) formed within an opening through said at
least one dielectric layer and said substrate.
15. The method of claim 14, wherein the TSV is coupled to a contact
structure of another semiconductor device for forming a stacked
semiconductor device.
16. The method of claim 15, wherein the stacked semiconductor
device is a memory device.
17. The method of claim 1, further comprising: forming a first
insulation layer onto at least one wall of an opening having the
via structure formed therein; and forming a second insulation layer
over the substrate with the via structure being planar with the
second insulation layer, wherein a ratio of a first thickness of
the first insulation layer to a second thickness of the second
insulation layer is in a range of from about 0.3:1 to about
0.9:1.
18. The method of claim 17, further comprising: forming a barrier
layer on the first insulation layer within the opening; and forming
a conductive fill within the opening after forming the barrier
layer.
19. The method of claim 18, further comprising: forming a center
fill within the opening such that the conductive fill surrounds at
least a portion of the center fill, wherein the center fill has a
thermal expansion coefficient that is lower than that of the
conductive fill.
20. (canceled)
Description
CROSS-REFERENCE TO RELATED APPLICATION(S)
[0001] The present application claims priority under 35 U.S.C.
.sctn.119 to Korean Patent Application No. 10-2010-0061184, filed
on Jun. 28, 2010 in the Korean Intellectual Property Office (KIPO),
the contents of which are herein incorporated by reference in their
entirety.
TECHNICAL FIELD
[0002] The present invention relates generally to semiconductor
devices, and more particularly, to a method of fabricating a
conductive structure and a via structure in an integrated circuit
with minimized deterioration.
BACKGROUND OF THE INVENTION
[0003] Conductive structures and vias are commonly used as
interconnect structures to form an integrated circuit of a
semiconductor device. Vias are used to connect conductive lines
formed on multiple levels of interconnect layers.
[0004] In addition, through silicon vias (TSVs) are formed through
the silicon substrate for coupling multiple integrated circuit
chips to form a stacked semiconductor device. Such a stacked
semiconductor device is formed to provide an integrated circuit
with high capacity and low area.
[0005] Conductive structures such as conductive plugs are formed to
provide connection to transistors, diodes, and the like for forming
an integrated circuit. The via structures and the conductive
structures may be formed through a same inter-metal insulation
layer. Such via and conductive structures are desired to be formed
with minimized deterioration for high integrity of operation of the
integrated circuit.
SUMMARY OF THE INVENTION
[0006] Accordingly, a conductive structure is formed after a via
structure is formed with a protective layer formed thereon for
preserving the integrity of the via structure during formation of
the conductive structure.
[0007] In a method for forming a semiconductor device according to
an aspect of the present invention, a via structure is formed
through at least one dielectric layer and at least a portion of a
substrate. In addition, a protective buffer layer is formed onto
the via structure. Furthermore, a conductive structure for an
integrated circuit is formed over the substrate after forming the
via structure and the protective buffer layer, with the conductive
structure not being formed over the via structure.
[0008] In an example embodiment of the present invention, the
method also includes the step of heating the via structure to form
an initial protrusion portion of the via structure. In that case,
the via structure is planarized to remove the initial protrusion
portion before forming the protective buffer layer onto the via
structure.
[0009] In a further example embodiment of the present invention,
the protective buffer layer remains on the via structure during the
formation of the conductive structure for the integrated
circuit.
[0010] In another example embodiment of the present invention, the
method includes the steps of removing the protective buffer layer
from the via structure and forming respective wiring onto each of
the via structure and the conductive structure.
[0011] In a further example embodiment of the present invention,
the method includes the step of forming a first insulation layer
onto at least one wall of an opening having the via structure
formed therein. In addition, a second insulation layer is formed
over the substrate with the via structure being planar with the
second insulation layer, before the step of forming the protective
buffer layer.
[0012] In another example embodiment of the present invention, a
ratio of a first thickness of the first insulation layer to a
second thickness of the second insulation layer is in a range of
from about 0.3:1 to about 0.9:1.
[0013] In a further example embodiment of the present invention, a
thickness of the first insulation layer is less than 1/4 of a
diameter of the opening having the via structure formed
therein.
[0014] In another example embodiment of the present invention, the
method includes the steps of forming a barrier layer on the first
insulation layer within the opening and forming a conductive fill
within the opening after forming the barrier layer.
[0015] In a further example embodiment of the present invention,
the conductive fill is comprised of copper.
[0016] In another example embodiment of the present invention, the
method includes the step of forming a center fill within the
opening such that the conductive fill surrounds at least a portion
of the center fill. In that case, the center fill has a thermal
expansion coefficient that is lower than that of the conductive
fill.
[0017] In a further example embodiment of the present invention,
the via structure is a TSV (through silicon via) formed within the
opening through the at least one dielectric layer and the
substrate. The TSV is coupled to a contact structure of another
semiconductor device for forming a stacked semiconductor device
that may be a memory device in an example embodiment of the present
invention.
[0018] In this manner, the conductive structure is formed after the
protective buffer layer is formed to cover the via structure to
prevent deterioration of the via structure during formation of the
conductive structure. Thus, the integrity of operation of the
integrated circuit having such conductive and via structures is
preserved.
[0019] These and other features and advantages of the present
invention will be better understood by considering the following
detailed description of the invention which is presented with the
attached drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0020] FIG. 1 is a cross-sectional view of a semiconductor device
having a conductive structure and a via structure formed with
method steps according to example embodiments of the present
invention;
[0021] FIGS. 2, 3, 4, 5, 6, 7, 8, 9, and 10 are cross-sectional
views illustrating method steps during fabrication of the
semiconductor device of FIG. 1, according to example embodiments of
the present invention;
[0022] FIGS. 11 and 12 are cross-sectional views illustrating
additional method steps during fabrication of the semiconductor
device of FIG. 1, according to an example embodiment of the present
invention;
[0023] FIG. 13 is a cross-sectional view illustrating a stacked
semiconductor device including the semiconductor device of FIG. 1,
according to an example embodiment of the present invention;
[0024] FIGS. 14, 15, 16, 17, 18, and 19 are cross-sectional views
illustrating method steps during fabrication of the semiconductor
device of FIG. 13, according to example embodiments of the present
invention;
[0025] FIG. 20 is a cross-sectional view of a semiconductor device
with a conductive structure and a via structure having a center
fill, according to an example embodiment of the present
invention;
[0026] FIGS. 21 and 22 are cross-sectional views illustrating
method steps during fabrication of the semiconductor device of FIG.
20, according to an example embodiment of the present
invention;
[0027] FIG. 23 is a cross-sectional view illustrating a stacked
semiconductor device including the semiconductor device of FIG. 20,
according to an example embodiment of the present invention;
and
[0028] FIGS. 24, 25, and 26 show block diagrams of systems, each
having a stacked semiconductor device, according to example
embodiments of the present invention.
[0029] The figures referred to herein are drawn for clarity of
illustration and are not necessarily drawn to scale. Elements
having the same reference number in FIGS. 1, 2, 3, 4, 5, 6, 7, 8,
9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25,
and 26 refer to elements having similar structure and/or function,
unless stated other-wise.
DETAILED DESCRIPTION
[0030] Various example embodiments are described more fully
hereinafter with reference to the accompanying drawings, in which
some example embodiments are shown. The present inventive concept
may, however, be embodied in many different forms and should not be
construed as limited to the example embodiments set forth herein.
Rather, these example embodiments are provided so that this
description will be thorough and complete, and will fully convey
the scope of the present inventive concept to those skilled in the
art. In the drawings, the sizes and relative sizes of layers and
regions may be exaggerated for clarity.
[0031] It will be understood that when an element or layer is
referred to as being "on," "connected to" or "coupled to" another
element or layer, it can be directly on, connected or coupled to
the other element or layer or intervening elements or layers may be
present. In contrast, when an element is referred to as being
"directly on," "directly connected to" or "directly coupled to"
another element or layer, there are no intervening elements or
layers present. Like numerals refer to like elements throughout. As
used herein, the term "and/or" includes any and all combinations of
one or more of the associated listed items.
[0032] It will be understood that, although the terms first,
second, third etc. may be used herein to describe various elements,
components, regions, layers and/or sections, these elements,
components, regions, layers and/or sections should not be limited
by these terms. These terms are only used to distinguish one
element, component, region, layer or section from another region,
layer or section. Thus, a first element, component, region, layer
or section discussed below could be termed a second element,
component, region, layer or section without departing from the
teachings of the present inventive concept.
[0033] Spatially relative terms, such as "beneath," "below,"
"lower," "above," "upper" and the like, may be used herein for ease
of description to describe one element or feature's relationship to
another element(s) or feature(s) as illustrated in the figures. It
will be understood that the spatially relative terms are intended
to encompass different orientations of the device in use or
operation in addition to the orientation depicted in the
figures.
[0034] For example, if the device in the figures is turned over,
elements described as "below" or "beneath" other elements or
features would then be oriented "above" the other elements or
features. Thus, the exemplary term "below" can encompass both an
orientation of above and below. The device may be otherwise
oriented (rotated 90 degrees or at other orientations) and the
spatially relative descriptors used herein interpreted
accordingly.
[0035] The terminology used herein is for the purpose of describing
particular example embodiments only and is not intended to be
limiting of the present inventive concept. As used herein, the
singular forms "a," "an" and "the" are intended to include the
plural forms as well, unless the context clearly indicates
otherwise. It will be further understood that the terms "comprises"
and/or "comprising," when used in this specification, specify the
presence of stated features, integers, steps, operations, elements,
and/or components, but do not preclude the presence or addition of
one or more other features, integers, steps, operations, elements,
components, and/or groups thereof.
[0036] Example embodiments are described herein with reference to
cross-sectional illustrations that are schematic illustrations of
idealized example embodiments (and intermediate structures). As
such, variations from the shapes of the illustrations as a result,
for example, of fabrication techniques and/or tolerances, are to be
expected. Thus, example embodiments should not be construed as
limited to the particular shapes of regions illustrated herein but
are to include deviations in shapes that result, for example, from
fabrication.
[0037] For example, an implanted region illustrated as a rectangle
will, typically, have rounded or curved features and/or a gradient
of implant concentration at its edges rather than a binary change
from implanted to non-implanted region. Likewise, a buried region
formed by implantation may result in some implantation in the
region between the buried region and the surface through which the
implantation takes place. Thus, the regions illustrated in the
figures are schematic in nature and their shapes are not intended
to illustrate the actual shape of a region of a device and are not
intended to limit the scope of the present inventive concept.
[0038] Unless otherwise defined, all terms (including technical and
scientific terms) used herein have the same meaning as commonly
understood by one of ordinary skill in the art to which this
inventive concept belongs. It will be further understood that
terms, such as those defined in commonly used dictionaries, should
be interpreted as having a meaning that is consistent with their
meaning in the context of the relevant art and will not be
interpreted in an idealized or overly formal sense unless expressly
so defined herein.
[0039] Hereinafter, example embodiments will be explained in detail
with reference to the accompanying drawings.
[0040] Referring to FIG. 1, a first circuit pattern 12 is formed on
a first substrate 10 that is comprised of a semiconductor material
such as single crystalline silicon for example. The first circuit
pattern 12 includes transistors, diodes, and the like for forming
an integrated circuit. A first insulating interlayer 14 is formed
on the first substrate 10 to surround the first circuit pattern 12.
Conductive structures such as conductive plugs 28 comprised of a
conductive material such as polysilicon for example are formed for
electrically connecting to the first circuit pattern 12.
[0041] A via hole 16 is formed as an opening through the first
insulating interlayer 14 and through at least a portion of the
first substrate 10. The via hole 16 has a depth of from about 10
.mu.m to about 100 .mu.m and preferably from about 30 .mu.m to
about 60 .mu.m, in an example embodiment of the present invention.
The via hole 16 has a diameter of from about 1 .mu.m to about 30
.mu.m and preferably from about 1 .mu.m to about 10 .mu.m, in an
example embodiment of the present invention. A plurality of via
holes 16 may be formed in an example embodiment of the present
invention.
[0042] An insulation layer structure 18 is formed on an inner wall
of the via hole 16 and on the first insulating interlayer 14. The
insulation layer structure 18 includes a first insulation layer 18a
and a second insulation layer 18b. The first insulation layer 18a
is formed on the inner wall of the via hole 16 for electrically
insulating the first substrate 10 from a through silicon via (TSV)
structure 24 formed within the via hole 16.
[0043] The second insulation layer 18b is formed on the first
insulating interlayer 14 and on the top surface of the first
insulation layer 18a. The first insulating interlayer 14 together
with the second insulation layer 18b function as an insulating
interlayer structure having a total thickness that is the sum of
the thicknesses of the first and second insulating interlayers 14
and 18b.
[0044] The insulation layer structure 18 is comprised of a material
having a low dielectric constant such that the parasitic
capacitance between the first substrate 10 and the conductive
material of the TSV structure 24 is minimized. For example, the
insulation layer structure 18 is comprised of silicon oxide or
carbon-doped silicon oxide that may be porous, in an example
embodiment of the present invention.
[0045] The insulation layer structure 18 has a relatively large
thickness such that the parasitic capacitance between the first
substrate 10 and the TSV structure 24 is minimized. If the first
insulation layer 18a has a thickness that is less than about 1000
.ANG., the first insulation layer 18a may not provide sufficient
insulation.
[0046] If the first insulation layer 18a has a thickness that is
larger than about 1/4 of the diameter of the via hole 16, the TSV
structure 24 may have an insufficient volume, thereby resulting in
increased resistance of the TSV structure 24. Thus, the first
insulation layer 18a is formed with a thickness that is higher than
about 1000 .ANG. and that is less than about 1/4 of the diameter of
the via hole 16. The first and second insulation layers 18a and 18b
may be formed to have different thicknesses.
[0047] A barrier layer pattern 20a is formed on the first
insulation layer 18a and is exposed in the via hole 16 at a top
surface that is coplanar with that of the second insulation layer
18b. The barrier layer pattern 20a has a cup shape to surround a
conductive fill 22a. The barrier layer pattern 20a is comprised of
a metal or a metal nitride such as tantalum, tantalum nitride,
titanium, titanium nitride, ruthenium, cobalt, nickel, nickel
boride, tungsten nitride, and the like, alone or in a combination
thereof, in an example embodiment of the present invention.
[0048] A conductive fill 22a fills an inner space formed by the
barrier layer pattern 20a within the via hole 16. The conductive
fill 22a is comprised of a metal having a low resistance such as
copper or tungsten for example. In an example embodiment of the
present invention, the conductive fill 22a is comprised of copper.
The conductive fill 22a and the barrier layer pattern 20a form the
TSV structure 24. The TSV structure 24 has a top surface of
portions of the conductive fill 22a and the barrier layer pattern
that are coplanar with a top surface of the second insulation layer
18b.
[0049] Further referring to FIG. 1, a protective buffer layer 26 is
formed on the TSV structure 24 and the second insulation layer 18b
(see FIG. 7) for preventing the conductive material of the TSV
structure 24 from diffusing into other elements. The buffer layer
26 is comprised of silicon nitride, silicon carbonitride (SiCN),
silicon carbo-oxynitride (SiCON), and the like, alone or in a
combination thereof, according to an example embodiment of the
present invention. The buffer layer 26 has a thickness of from
about 300 .ANG. to about 1000 .ANG., according to an example
embodiment of the present invention.
[0050] A contact plug 28 that is an example conductive structure is
formed through the second insulation layer 18b and in the first
insulating interlayer 14 for electrically connecting to the first
circuit pattern 12. The contact plug 28 has a top surface coplanar
with that of the TSV structure 24. The contact plug 28 is comprised
of a metal such as tungsten or copper for example. The contact plug
28 may be formed with a barrier layer (not shown) and such a
metal.
[0051] A first inter-metal dielectric layer 30 is formed on the
buffer layer 26. The first inter-metal dielectric layer 30 is
comprised of a material having a low dielectric constant such as
silicon oxide, carbon-doped silicon oxide, and the like, for
example.
[0052] A plurality of first wirings 34 are formed through the first
inter-metal dielectric layer 30 and the buffer layer 26. Some of
the first wirings 34 contact the top surface of the TSV structure
24, and others of the first wirings 34 contact the top surface of
the contact plug 28. The first wirings 34 may be formed with a
barrier layer (not shown) and a metal such as copper or tungsten
for example. In an example embodiment of the present invention, the
first wirings 34 are comprised of copper.
[0053] A second inter-metal dielectric layer 36 is formed on the
first inter-metal dielectric layer 30 and the first wirings 34. A
plurality of second wirings 38 are formed through the second
inter-metal dielectric layer 36 for being electrically connected to
the first wirings 34. A third inter-metal dielectric layer (not
shown) and/or third wirings (not shown) may be further formed.
[0054] The semiconductor device of FIG. 1 has good insulation
characteristics and a low parasitic capacitance between the first
substrate 10 and the TSV structure 24. Additionally, the TSV
structure 24 has a low resistance and good signal transfer
characteristics.
[0055] FIGS. 2, 3, 4, 5, 6, 7, 8, 9, and 10 are cross-sectional
views illustrating method steps during fabrication of the
semiconductor device of FIG. 1, according to an example embodiment
of the present invention.
[0056] Referring to FIG. 2, the first circuit pattern 12 is formed
on the first substrate 10 and includes transistors, diodes, and the
like for forming an integrated circuit. The first insulating
interlayer 14 is formed on the first substrate 10 to surround the
first circuit pattern 12. During subsequent fabrication, the second
insulation layer 18b also serving as an insulating interlayer is
further formed (see FIG. 4). Thus, the first insulating interlayer
14 may be formed to have a relatively small thickness.
[0057] Referring to FIG. 3, a photo-resist pattern (not shown)
having a thickness of from about 2 .mu.m to about 5 .mu.m is formed
on the first insulating interlayer 14. The first insulating
interlayer 14 and a portion the first substrate 10 are etched using
the photo-resist pattern as an etching mask to form the via hole 16
through the first insulating interlayer 14 and in the first
substrate 10.
[0058] If the via hole 16 is formed to have a depth less than about
10 .mu.m, the TSV structure 24 formed in the via hole 16 may have
insufficient volume. If the via hole 16 is formed to have a depth
more than about 100 .mu.m , filling the via hole 16 with a
conductive material may be difficult. Thus, the via hole 16 is
formed to have a depth of from about 10 .mu.m to about 100 .mu.m
and preferably from about 30 .mu.m to about 60 .mu.m, in an example
embodiment of the present invention.
[0059] If the via hole 16 has a diameter less than about 1 .mu.m,
filling the via hole 16 with a conductive material may be
difficult. If the via hole 16 has a diameter more than about 30
.mu.m, the semiconductor device may not be formed with high
integration density. Thus, the via hole 16 is formed to have a
diameter of from about 1 .mu.m to about 30 .mu.m, in an example
embodiment of the present invention. The present invention may be
practiced with formation of a plurality of via holes 16. The
photo-resist pattern is removed after patterning of the via holes
16.
[0060] Referring to FIG. 4, the insulation layer structure 18 is
formed on the inner wall of the via hole 16 and on the first
insulating interlayer 14. The first insulation layer 18a is formed
to electrically insulate the first substrate 10 from the conductive
material of the TSV structure 24. The second insulation layer 18b
serves as an insulating interlayer.
[0061] The insulation layer structure 18 is comprised of a material
having a low dielectric constant such as silicon oxide or
carbon-doped silicon oxide, in an example embodiment of the present
invention. For example, the insulation layer structure 18 may be
formed using tetraethyl orthosilicate (TEOS) or ozone TEOS having
good step coverage characteristics. The insulation layer structure
18 may be formed by a plasma oxidation process or a chemical vapor
deposition (CVD) process.
[0062] The first insulation layer 18a is formed to have a thickness
that is more than about 1000 .ANG. and smaller than about 1/4 of
the diameter of the via hole 16. The second insulation layer 18b is
formed with a higher thickness than the first insulation layer 18a.
In an example embodiment of the present invention, the first and
second insulation layers 18a and 18b are formed to have a thickness
ratio of from about 0.3:1 to about 0.9:1. When the second
insulation layer 18b is formed to have a relatively large
thickness, the first insulating interlayer 14 may be formed to have
a relatively small thickness in FIG. 2.
[0063] Referring to FIG. 5, a barrier layer 20 is formed on the
insulation layer structure 18 and is comprised of a metal or a
metal nitride such as tantalum, tantalum nitride, titanium,
titanium nitride, ruthenium, cobalt, nickel, nickel boride,
tungsten nitride, and the like, alone or in a combination thereof,
in an example embodiment of the present invention. The barrier
layer 20 is formed to have a thickness of from about 100 .ANG. to
about 3000 .ANG., in an example embodiment of the present
invention.
[0064] A seed layer (not shown) may be formed on the barrier layer
20 to serve as an electrode for forming a conductive layer 22 in a
subsequent process. Such a seed layer is comprised of copper
deposited by a physical vapor deposition (PVD) process, according
to an example embodiment of the present invention.
[0065] The conductive layer 22 is formed from the seed layer to
fill the remaining portion of the via hole 16. The conductive layer
22 is comprised of a metal having a low resistance and is formed by
an electroplating process, an electroless plating process, an
electrografting process, a PVD process, and the like, in an example
embodiment of the present invention. A heat treatment process may
be performed on the conductive layer 22. The conductive layer 22 is
comprised of a metal such as copper or tungsten, in an example
embodiment of the present invention.
[0066] Referring to FIG. 6, upper portions of the conductive layer
22 and the barrier layer 20 are planarized by a chemical mechanical
polishing (CMP) process and/or an etch back process until a top
surface of the second insulation layer 18b is exposed. Thus, a
conductive layer pattern 22a and a barrier layer pattern 20a remain
within the via hole 16 to form the TSV structure 24.
[0067] In such a planarization process, an upper portion of the
second insulation layer 18b may be removed. However, less than
about 70% of the second insulation layer 18b is removed from such a
planarization process, in an example embodiment of the present
invention. That is, at least 30% of the original second insulation
layer 18b remains to form a portion of the insulating
interlayer.
[0068] Additionally during such a planarization process, a portion
of the second insulation layer 18b remains such that the thickness
of the removed object layer and the time for performing the
planarization process may be reduced. As a result, damage to the
elements of the semiconductor device on the first substrate 10
during such a planarization process may be reduced. Furthermore,
the contact plug 28 is not yet formed and the first circuit pattern
12 is not exposed for not being damaged during such a planarization
process.
[0069] Referring to FIG. 7, the protective buffer layer 26 is
formed on the second insulation layer 18b to cover the TSV
structure 24. The buffer layer 26 is comprised of an insulating
material such as silicon nitride, silicon carbonitride (SiCN),
silicon carbo-oxynitride (SiCON), and the like, alone or in a
combination thereof, in an example embodiment of the present
invention. The protective buffer layer 26 has a thickness of from
about 300 .ANG. to about 1000 .ANG., in an example embodiment of
the present invention. The buffer layer 26 prevents the conductive
material of the TSV structure 24 from diffusing to other
elements.
[0070] Referring to FIG. 8, the contact plugs 28 that are example
conductive structures are formed through the buffer layer 26, the
second insulation layer 18b, and portions of the first insulating
interlayer 14 to be electrically connected to the first circuit
pattern 12. Thus, a front-end-of-the-line (FEOL) process may be
completed.
[0071] In particular, the buffer layer 26, the second insulation
layer 18b, and the first insulating interlayer 14 are patterned to
form contact holes therein. A barrier layer (not shown) and a
conductive material are formed into such contact holes to form the
contact plugs 28. An upper portion of the barrier layer and the
conductive material for forming the conductive plugs 28 are
planarized by a CMP process and/or an etch back process until a top
surface of the buffer layer 26 is exposed. The contact plugs 28 are
comprised of copper or tungsten, in an example embodiment of the
present invention.
[0072] In this manner, the TSV structure 24 is formed in the FEOL
process, and the contact plug 28 is formed after the TSV structure
24 is formed. Thus, the contact plug 28 is not damaged during
formation of the TSV structure 24. Additionally, the TSV structure
24 is protected by the buffer layer 26 during formation of the
contact plug 28 such that the TSV structure 24 is not damaged
during the formation of the contact plug 28. As a result, the TSV
structure 24 and the contact plug 28 are formed with high integrity
to result in good conductivity characteristics.
[0073] Referring to FIG. 9, the first inter-metal dielectric layer
30 is formed on the buffer layer 26 and the contact plug 28. The
first inter-metal dielectric layer 30 is comprised of silicon oxide
or carbon-doped silicon oxide, in an example embodiment of the
present invention. The first inter-metal dielectric layer 30 and
the buffer layer 26 are patterned to form first openings 32
exposing top surfaces of the TSV structure 24 and the contact plugs
28.
[0074] Referring to FIG. 10, a barrier layer (not shown) and a
conductive layer are deposited onto the TSV structure 24, the
contact plug 28, and the first inter-metal dielectric layer 30 to
fill the first openings 32. Such a conductive layer is comprised of
copper deposited by an electroplating process, an electroless
plating process, an electrografting process, a PVD process, and the
like, in an example embodiment of the present invention. Upper
portions of the barrier layer and the conductive layer filling the
first openings 32 are planarized until a top surface of the first
inter-metal dielectric layer 30 is exposed to form first wirings 34
within the first openings 32.
[0075] Referring back to FIG. 1, a second inter-metal dielectric
layer 36 is formed on the first inter-metal dielectric layer 30 and
the first wirings 34. The second inter-metal dielectric layer 36 is
patterned to form second openings (not shown), and second wirings
38 are formed in such second openings to be electrically connected
to the first wirings 34. A third inter-metal dielectric layer (not
shown) and third wirings (not shown) may be further formed.
[0076] In this manner, the semiconductor device of FIG. 1 has good
insulation characteristics and a low parasitic capacitance between
the first substrate 10 and the TSV structure 24. Additionally, the
TSV structure 24 is formed to have low resistance and good signal
transfer characteristics.
[0077] FIGS. 11 and 12 are cross-sectional views illustrating an
additional treatment during fabrication of the semiconductor device
of FIG. 1, according to an example embodiment of the present
invention. Thus, method steps of FIGS. 2, 3, 4, 5, and 6 are
performed to form the TSV structure 24 having the conductive fill
22a and the barrier layer pattern 20a in FIG. 6.
[0078] Subsequently referring to FIG. 11 after FIG. 6, a heat
treatment process is performed after the TSV structure 24 is formed
in FIG. 6 such that the TSV structure 24 is thermally expanded.
Thus, the TSV structure 24 has an initial protrusion portion formed
on the top surface to form an expanded conductive fill 22b to
define an expanded TSV structure 24b.
[0079] When the heat treatment process is performed at a
temperature of less than about 100.degree. C., the TSV structure 24
may not be sufficiently expanded. When the heat treatment process
is performed at a temperature of more than about 600.degree. C.,
the TSV structure 24 may be deteriorated. Thus, the heat treatment
process of FIG. 11 is performed at a temperature of from about
100.degree. C. to about 600.degree. C., according to an example
embodiment of the present invention.
[0080] Referring to FIG. 12, an upper portion of the expanded TSV
structure 24b is planarized by a CMP process and/or an etch back
process to form the TSV structure 24 having a planar top surface
with removal of the initial protrusion portion of FIG. 11. In this
manner, the TSV structure 24 has already been thermally expanded
such that the TSV structure 24 does not thermally expand as much in
subsequent processes for forming the buffer layer 26 and the first
inter-metal dielectric layer 30. After FIG. 12, the process steps
of FIGS. 7, 8, 9, and 10 are performed to complete the
semiconductor device.
[0081] FIG. 13 is a cross-sectional view illustrating a stacked
semiconductor device including the semiconductor device of FIG. 1,
according to an example embodiment of the present invention.
Referring to FIG. 13, the stacked semiconductor includes a first
integrated circuit chip 150, a second integrated circuit chip 152,
a solder 48, and a contact structure 112.
[0082] For example, the first integrated circuit chip 150 includes
a memory device, a logic device, or an imaging device formed
therein. The first integrated circuit chip 150 is formed similarly
as the semiconductor device of FIG. 1, except that bottom surfaces
of a TSV structure 55 and a first insulation layer pattern 18c are
exposed at a bottom surface of a first substrate 10a. Additionally,
a first protection layer 44 is further formed on a third wiring 42
and a third inter-metal dielectric layer 40 with the solder 48
being formed through the first protection layer 44.
[0083] The first integrated circuit chip 150 includes the first
substrate 10a, the first circuit pattern 12, the contact plug 28,
the first insulating interlayer 14, and an insulation layer
structure 19. The first integrated circuit chip 150 also includes a
TSV structure 55 formed through the first insulating interlayer 14,
the first substrate 10a, and the insulation layer structure 19.
[0084] First, second, and third wirings 34, 38, and 42 and first,
second, and third inter-metal dielectric layers 30, 36, and 40 are
also formed in the first integrated circuit chip 150. The first
protection layer 44 covers the third wiring 42, and the solder 48
contacts the third wiring 42 through the first protection layer
44.
[0085] The first substrate 10a is comprised of single crystalline
silicon, according to an example embodiment of the present
invention. The first substrate 10a has a thickness of from about 10
.mu.m to about 100 .mu.m, according to an example embodiment of the
present invention. The first substrate 10a has a bottom surface
that is coplanar with that of the TSV structure 55, according to an
example embodiment of the present invention. Alternatively, the
present invention may also be practiced with the bottom surface of
the TSV structure 55 being protruded from that of the first
substrate 10a.
[0086] Further in FIG. 13, a via hole 16 is formed through the
first substrate 10a and has a diameter of from about 1 .mu.m to
about 30 .mu.m and preferably from about 1 .mu.m to about 10 .mu.m,
according to an example embodiment of the present invention. The
insulation layer structure 19 is formed on the sidewall of the via
hole 16 and on the first insulating interlayer 14. The insulation
layer structure 19 includes a first insulation layer pattern 18c
and a second insulation layer pattern 18b.
[0087] The first insulation layer pattern 18c is formed on the
sidewall of the via hole 16 and has a cylindrical shape to surround
the TSV structure 55. The second insulation layer pattern 18b is
formed on the first insulating interlayer 14 and on the top surface
of the first insulation pattern 18c. A barrier layer pattern 50b
and a seed layer (not shown) are formed on a sidewall of the first
insulation layer pattern 18c within the via hole 16.
[0088] Further referring to FIG. 13, the conductive fill 52a is
formed in the space surrounded by the barrier layer pattern 50b.
The conductive fill 52a is comprised of a metal having a low
resistance such as copper, aluminum, gold, indium, nickel, and the
like, according to an example embodiment of the present invention.
The first protection layer 44 is formed on the third inter-metal
dielectric layer 40 to surround the third wiring 42. The first
protection layer 44 is comprised of an insulating material such as
polyimide for example. The third wiring 42 may also be referred as
a first pad electrode 42.
[0089] The solder 48 is formed to be electrically connected to the
first pad electrode 42. The solder 48 may contact a printed circuit
board (PCB) (not shown). Alternatively, the first pad 42 may be
electrically connected to a lead frame (not shown) by wire
bonding.
[0090] The second integrated circuit chip 152 includes a second
substrate 100, a second circuit pattern 102, wirings 104, second
insulating inter-layers 106, and a second pad electrode 108. The
present invention may be practiced with the second integrated
circuit chip 152 including elements similar to those of the first
integrated circuit chip 150. Alternatively, the present invention
may be practiced with the second integrated circuit chip 152
including elements different from those of the first integrated
circuit chip 150.
[0091] The second pad electrode 108 is formed on the second
insulating inter-layers 106 to be electrically connected to the
wirings 104. The second pad electrode 108 is electrically connected
to the TSV structure 55 of the first substrate 10a. A second
protection layer 110 is also formed on the second insulating
inter-layers 106 to cover the second pad electrode 108. The second
protection layer 110 is comprised of polyimide, according to an
example embodiment of the present invention.
[0092] The contact structure 112 including a conductive material is
formed through the second protection layer 110 to contact the
second pad electrode 108 and the TSV structure 55 of the first
integrated circuit chip 150. The contact structure 112 is comprised
of silver solder paste, according to an example embodiment of the
present invention.
[0093] The stacked semiconductor device of FIG. 13 includes the
stacked first and second integrated circuit chips 150 and 152 that
are electrically connected to each other by the TSV structure 55.
The semiconductor device has a reduced parasitic capacitance
between the TSV structure 55 and the first substrate 10a from the
insulation pattern 18c. The semiconductor device of FIG. 13 may
further have other chips (not shown) that are sequentially stacked
on each other and that are be electrically connected to each other
by TSV structures formed therein.
[0094] FIGS. 14, 15, 16, 17, 18, and 19 are cross-sectional views
illustrating method steps during fabrication of the semiconductor
device of FIG. 13, according to an example embodiment of the
present invention.
[0095] Referring to FIG. 14, the first circuit pattern 12 is formed
on the first substrate 10, and the first insulating interlayer 14
is formed on the first substrate 10 to surround the first circuit
pattern 12. The first insulating interlayer 14 and the first
substrate 10 are patterned to form the via hole 16 through the
first insulating interlayer 14 and a portion of the first substrate
10. The insulation layer structure 18 and a preliminary TSV
structure 54 including a preliminary barrier layer pattern 50a and
a conductive fill 52a are formed after formation of such a via hole
16 similarly as in FIG. 6.
[0096] Referring to FIG. 15, the protective buffer layer 26 is
formed on the first insulating interlayer 14 and the preliminary
TSV structure 54. The buffer layer 26 is formed to have a thickness
of from about 300 .ANG. to about 1000 .ANG., according to an
example embodiment of the present invention. Thereafter, the
contact plug 28 is formed through the buffer layer 26 and the
second insulation layer 18b and into the first insulating
interlayer 14 to be electrically connected to the first circuit
pattern 12.
[0097] Referring to FIG. 16, the first inter-metal dielectric layer
30 is formed on the buffer layer 26. The first wirings 34 are
formed through the first inter-metal dielectric layer 30 and the
buffer layer 26 to be electrically connected respectively to the
preliminary TSV structure 54 and the contact plug 28.
[0098] Second and third inter-metal dielectric layers 36 and 40 and
second and third wirings 38 and 42 are formed on the first
inter-metal dielectric layer 30 and the first wirings 34. In
addition, a first protection layer 44 is formed on the third
inter-metal dielectric layer 40 to cover the third wiring 42. The
first protection layer 46 is comprised of polyimide, according to
an example embodiment of the present invention. The first
protection layer 46 is patterned to form an opening 46 exposing the
third wiring 42.
[0099] Referring to FIG. 17, bottom portions of the first substrate
10, the insulation layer structure 18, and the barrier layer
pattern 50a are planarized by grinding to expose a bottom surface
of the conductive fill 52a. Thus, the resulting first substrate 10a
has a thickness that is less than that of the preliminary first
substrate 10. The conductive fill 52a and the barrier layer pattern
50b remain within the via hole to define the TSV structure 55.
Additionally with such grinding, the insulation layer structure 18
is transformed into the insulation layer pattern structure 19
including the first insulation layer pattern 18c and the second
insulation layer pattern 18b.
[0100] The preliminary first substrate 10 is grinded until a bottom
surface of the TSV structure 55 is exposed and for forming the
insulation layer pattern structure 19, the barrier layer pattern
50b, and the first substrate 10a. The present invention may be
practiced with the bottom surface of the conductive fill 52a being
coplanar with that of the first substrate 10a. Alternatively, the
present invention may be practiced with the bottom surface of the
conductive fill 52a being protruded from that of the first
substrate 10a.
[0101] The first insulation layer pattern 18c has a cylindrical
shape on the sidewall of the via hole 16. The barrier layer pattern
50b has a cylindrical shape on a sidewall of the first insulation
layer pattern 18c. Referring to FIG. 18, the solder 48 is formed in
the opening 46 to complete the first integrated circuit chip 150
with the TSV structure 55 in the first substrate 10a.
[0102] Referring to FIG. 19, the second integrated circuit chip 152
is formed in the second substrate 100. In addition, the second
circuit pattern 102, the wirings 104, and the plurality of second
insulating inter-layers 106 are formed for the second integrated
circuit chip 152. The second pad electrode 108 is formed on the
second insulating inter-layers 106 to be electrically connected to
the wirings 104. The second pad electrode 108 is formed to be
facing the TSV structure 55 of the first substrate 10a.
[0103] Further referring to FIG. 19, the second protection layer
110 is formed on the second insulating inter-layers 106 to cover
the second pad electrode 108. The second protection layer 110 is
patterned to form an opening (not shown) exposing the second pad
electrode 108. The contact structure 112 is formed in such an
opening to be electrically connected to the second pad electrode
108.
[0104] Referring back to FIG. 13, the bottom surface of the TSV
structure 55 of the first substrate 10a is attached to the contact
structure 112 of the second substrate 100. Thus, the stacked
semiconductor device including the first and second integrated
circuit chips 150 and 152 is completed.
[0105] FIG. 20 is a cross-sectional view of a semiconductor device
with a conductive structure and a via structure having a center
fill, according to an alternative embodiment of the present
invention. The semiconductor device of FIG. 20 is similar to that
of FIG. 1, except for the TSV structures.
[0106] Referring to FIG. 20, the insulation layer structure 18
including the first insulation layer 18a and the second insulation
layer 18b are formed on an inner wall of the via hole 16 and on the
first insulating interlayer 14. The first insulation layer 18a is
formed on the inner wall of the via hole 16 for electrically
insulating the first substrate 10 from a TSV structure 66 comprised
of a conductive material.
[0107] The second insulation layer 18b is formed on the first
insulating interlayer 14 and the first insulation layer 18a to
serve as an insulating interlayer. The insulation layer structure
18 is comprised of a dielectric material having a low dielectric
constant so that the parasitic capacitance between the first
substrate 10 and the conductive material of the TSV structure 24 is
minimized. For example, the insulation layer structure 18 is
comprised of silicon oxide or carbon-doped silicon oxide, which may
be porous, according to an example embodiment of the present
invention.
[0108] The insulation layer structure 18 has a relatively high
thickness so that the parasitic capacitance between the first
substrate 10 and the TSV structure 24 is minimized. For example,
the first insulation layer 18a has a thickness that is greater than
about 1000 .ANG. and less than about 1/4 of the diameter of the via
hole 16.
[0109] A barrier layer pattern 60 is formed on the first insulation
layer 14 within the via hole and also has a top surface exposed
within the via hole and coplanar with a top surface of the second
insulation layer 18b. The barrier layer pattern 60 is comprised of
a metal or a metal nitride such as tantalum, tantalum nitride,
titanium, titanium nitride, ruthenium, cobalt, nickel, nickel
boride, tungsten nitride, and the like, alone or in a combination
thereof, according to an example embodiment of the present
invention.
[0110] A conductive fill 62 is formed on the barrier layer pattern
60 within the via hole 16. The conductive fill 62 has a cup shape
to surround a center fill 64 within the via hole 16. The conductive
fill 62 is comprised of a metal having a low resistance such as
copper, aluminum, gold, indium, nickel, and the like, alone or in a
combination thereof, according to an example embodiment of the
present invention. The conductive fill 74a is comprised of copper,
according to an example embodiment of the present invention.
[0111] The center fill 64 is surrounded by the conductive fill 62
within the via hole 16. The center fill 64 is comprised of an
insulating material or a conductive material such as spin on glass
(SOG), flowable oxide (FOX), titanium, aluminum, a porous material,
and the like, according to an example embodiment of the present
invention.
[0112] In addition, the material of the center fill 64 has a
thermal expansion coefficient that is from about three times to
about four times lower than a thermal expansion coefficient of the
material of the conductive fill 62. For example, the conductive
fill 62 comprised of copper has a thermal expansion coefficient of
17 PPM (parts per million)/.degree. C. In that case, the center
fill 64 is comprised of a material having a lower thermal expansion
coefficient of from about 3 PPM (parts per million)/.degree. C. to
about 4 PPM (parts per million)/.degree. C. Thus, the center fill
64 buffers the thermal expansion of the conductive fill 62 during
subsequent fabrication steps for forming the semiconductor device
of FIG. 20.
[0113] The conductive fill 62, the barrier layer pattern 60 and the
center fill 64 define the TSV structure 66. The TSV structure 66
has a top surface that is coplanar with that of the second
insulation layer 18b.
[0114] The protective buffer layer 26 is formed on the TSV
structure 66 and the second insulation layer 18b. The protective
buffer layer 26 is comprised of silicon nitride, silicon
carbonitride, silicon carbo-oxynitride, and the like, alone or in a
combination thereof, according to an example embodiment of the
present invention.
[0115] The contact plug 28 is formed through the second insulation
layer 18b and in the first insulating interlayer 14 to be
electrically connected to the first circuit pattern 12. The first
and second wirings 34 and 38 and the first and second inter-metal
dielectric layers 30 and 36 are formed on the second insulation
layer 18b, the buffer layer 26, the TSV structure 66, and the
contact plug 28.
[0116] The semiconductor device of FIG. 20 has a low parasitic
capacitance and good insulation characteristics between the first
substrate 10 and the TSV structure 66. Additionally, the TSV
structure 66 has a low resistance and good signal transfer
characteristics.
[0117] FIGS. 21 and 22 are cross-sectional views illustrating
method steps during fabrication of the semiconductor device of FIG.
20, according to an example embodiment of the present
invention.
[0118] The process steps as illustrated in FIGS. 2, 3, and 4 are
first performed to form the first insulating interlayer 14 on the
first substrate 10, and to form the via hole 16 through the first
insulating interlayer 14 and into the first substrate 10. In
addition, the insulation layer structure 18 is formed on the inner
wall of the via hole 16 and on the first insulating interlayer
14.
[0119] Referring to FIG. 21, a barrier layer 61 is formed on the
insulation layer structure 18, and a conductive layer 63 is formed
on the barrier layer 61. The conductive layer 63 is comprised of a
metal having a low resistance such as copper, aluminum, gold,
indium, nickel, and the like, alone or in a combination thereof,
according to an example embodiment of the present invention. In an
example embodiment of the present invention, the conductive layer
63 is comprised of copper.
[0120] A center fill layer 65 is formed on the conductive layer 63
and fills the remaining portion of the via hole 16 after formation
of the conductive layer 63. The center fill layer 65 is comprised
of SOG, FOX, titanium, aluminum, a porous material, and the like,
for example. The material of the center fill layer 65 has a thermal
expansion coefficient that is from about three times to about four
times lower than a thermal expansion coefficient of the material of
the conductive layer 63.
[0121] For example, the conductive layer 63 comprised of copper has
a thermal expansion coefficient of 17 PPM (parts per
million)/.degree. C. In that case, the center fill layer 65 is
comprised of a material having a lower thermal expansion
coefficient of from about 3 PPM (parts per Ilion); .degree. C. to
about 4 PPM (parts per million)/.degree. C. Thus, the center fill
layer 65 buffers the thermal expansion of the conductive layer 63
during subsequent fabrication steps.
[0122] Referring to FIG. 22, upper portions of the center fill
layer 65, the conductive layer 63, and the barrier layer 61 may be
removed until a top surface of the second insulation layer 18b is
exposed. Thus, the TSV structure 66 is formed with the conductive
fill 62, the barrier layer pattern 60, and the center fill 64
contained within the via hole 16. The process steps of FIGS. 7, 8,
9, and 10 may be further performed to complete the semiconductor
device of FIG. 20.
[0123] FIG. 23 is a cross-sectional view illustrating a stacked
semiconductor device including the semiconductor device of FIG. 20,
according to an example embodiment of the present invention. The
stacked semiconductor device of FIG. 23 is similar to that of FIG.
13, except the stacked semiconductor device of FIG. 23 includes the
semiconductor device of FIG. 20 instead of the semiconductor device
1 that is included in FIG. 13.
[0124] Referring to FIG. 23, the stacked semiconductor device
includes a first integrated circuit chip 150, a second integrated
circuit chip 152, the solder 48, and the contact structure 112. The
insulation layer pattern structure 19 is formed on the sidewall of
the via hole 16 and on the first insulating interlayer 14. The
insulation layer structure 19 may include the first insulation
layer pattern 18c and the second insulation layer pattern 18b.
[0125] The first insulation layer pattern 18c is formed on the
sidewall of the via hole 16 and has a cylindrical shape. The second
insulation layer pattern 18b is formed on the first insulating
interlayer 14 and on the first insulation layer pattern 18c. A
barrier layer pattern 60a and a seed layer pattern (not shown) are
formed on a sidewall of the first insulation layer pattern 18c and
have a top surface that is coplanar with that of the second
insulation layer pattern 18b.
[0126] Further in FIG. 23, a conductive fill 62a is formed on the
barrier layer pattern 60a and has a cup shape surrounding the
center fill 64. A bottom surface of the conductive fill 62a is
exposed at the bottom surface of the first substrate 10a. The
present invention may be practiced with the bottom surface of the
conductive fill 62a being coplanar with the bottom surface of the
first substrate 10a or being protrude from the bottom surface of
the first substrate 10a.
[0127] The center fill 64 is formed in the space surrounded by the
conductive fill 62a within the via hole 16 and has a top surface
coplanar with the top surfaces of the conductive fill 62a, the
barrier layer pattern 60a, and the second insulation layer pattern
18b. The center fill 64 is comprised of SOG, FOX, titanium,
aluminum, a porous material, and the like, in an example embodiment
of the present invention.
[0128] The stacked semiconductor device of FIG. 23 is fabricated
according to the fabrication steps illustrated in FIGS. 21 and 22
to form the semiconductor device of FIG. 20. The wirings 34, 38 and
42 and the protection layer 44 are formed by process steps as
illustrated and described with reference to FIG. 16. In addition,
the process steps as illustrated and described with reference to
FIGS. 17, 18, and 19 are performed to form the stacked
semiconductor device of FIG. 23.
[0129] FIG. 24 is a block diagram of a system having a stacked
semiconductor device such as shown in FIG. 13 or 23, according to
an example embodiment of the present invention. Referring to FIG.
24, the system includes a controller 520 and a memory 510. The
memory 510 is a DRAM device or a flash memory device being
implemented as the stacked semiconductor device such as shown in
FIG. 13 or 23 for example. The memory controller 520 provides an
input signal for controlling operation of the memory 510.
[0130] FIG. 25 is a block diagram illustrating a system having a
stacked semiconductor device such as shown in FIG. 13 or 23,
according to another example embodiment of the present invention.
Referring to FIG. 25, the system includes a host 700 and a memory
510. The memory 510 is a DRAM device or a flash memory device being
implemented as the stacked semiconductor device such as shown in
FIG. 13 or 23 for example.
[0131] The host 700 may be included in a desktop computer, a laptop
computer, a camera, a mobile device, a communication device, and
the like. The host 700 provides an input signal for controlling and
operating the memory 510. The memory 510 may serve as a data
storing media.
[0132] FIG. 26 is a block diagram of a system 600 having a stacked
semiconductor device such as shown in FIG. 13 or 23, according to
another example embodiment of the present invention. Referring to
FIG. 26, the system 600 may be a portable device that includes a
memory 510 implemented as the stacked semiconductor device such as
shown in FIG. 13 or 23 for example. Examples of the portable device
600 include an MP3 player, a video player, a portable multi-media
player (PMP), etc.
[0133] The portable device 600 includes the memory 510, a memory
controller 520, an encoder/decoder (EDC) 610, a display element
620, and an interface 670. Data is input to or output from the
memory 510 by way of the memory controller 520. As illustrated with
the dashed lines of FIG. 26, data may be directly input from the
EDC 610 to the memory 510, or data may be directly output from the
memory 510 to the EDC 610.
[0134] The EDC 610 encodes data to be stored in the memory 510 such
as by encoding audio and/or video data stored in the memory 510 of
an MP3 player or a PMP player. Further, the EDC 610 may perform
MPEG encoding for storing video data in the memory 510. Moreover,
the EDC 610 may include multiple encoders to encode different types
of data depending on their formats. For example, the EDC 610 may
include an MP3 encoder for encoding audio data and an MPEG encoder
for encoding video data.
[0135] The EDC 610 may also decode data that is output from the
memory 510 such as by performing MP3 decoding for audio data from
the memory 510. Alternatively, the EDC 610 may perform MPEG
decoding of video data from the memory 510. Moreover, the EDC 610
may include multiple decoders to decode different types of data
depending on their formats. For example, the EDC 610 may include an
MP3 decoder for audio data and an MPEG decoder for video data.
[0136] In other embodiments, the EDC 610 may include only a
decoder. For example, encoded data may be input to the EDC 610, and
then the EDC 610 may decode the input data for transfer in the
memory controller 520 or the memory 510.
[0137] The EDC 610 may receive data to be encoded or data being
encoded by way of the interface 670. The interface 670 complies
with established interface standards (e.g., FireWire, USB, etc.) to
include a FireWire interface, a USB interface, etc. Thus, data may
be output from the memory 510 by way of the interface 670.
[0138] The display element 620 displays a representation of user
data that is output from the memory 510 and decoded by the EDC 610.
Examples of the display element 620 include a speaker outputting an
audio representation of the data, a display screen outputting a
video representation of the data, etc.
[0139] According to example embodiments of the present invention,
the semiconductor device has a low parasitic capacitance and good
insulation characteristics between the TSV structure and the
substrate. In addition, the conductive structure electrically
connected to a circuit pattern is formed after formation of the
protective buffer layer on the TSV structure to prevent
deterioration to the conductive structure and the TSV
structure.
[0140] The foregoing is illustrative of example embodiments and is
not to be construed as limiting thereof. Although a few example
embodiments have been described, those skilled in the art will
readily appreciate that many modifications are possible in the
example embodiments without materially departing from the novel
teachings and advantages of the present inventive concept.
[0141] Accordingly, all such modifications are intended to be
included within the scope of the present inventive concept as
defined in the claims. In the claims, means-plus-function clauses
are intended to cover the structures described herein as performing
the recited function and not only structural equivalents but also
equivalent structures.
[0142] Therefore, it is to be understood that the foregoing is
illustrative of various example embodiments and is not to be
construed as limited to the specific example embodiments disclosed,
and that modifications to the disclosed example embodiments, as
well as other example embodiments, are intended to be included
within the scope of the appended claims.
[0143] The present invention is limited only as defined in the
following claims and equivalents thereof.
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