U.S. patent application number 13/197249 was filed with the patent office on 2011-11-24 for semiconductor package having side walls and method for manufacturing the same.
This patent application is currently assigned to HYNIX SEMICONDUCTOR INC.. Invention is credited to Jong Hoon KIM, Seung Hyun LEE, Min Suk SUH, Seung Taek YANG.
Application Number | 20110287584 13/197249 |
Document ID | / |
Family ID | 41052761 |
Filed Date | 2011-11-24 |
United States Patent
Application |
20110287584 |
Kind Code |
A1 |
SUH; Min Suk ; et
al. |
November 24, 2011 |
SEMICONDUCTOR PACKAGE HAVING SIDE WALLS AND METHOD FOR
MANUFACTURING THE SAME
Abstract
A semiconductor package includes a semiconductor chip having an
upper surface, side surfaces connected with the upper surface, and
bonding pads formed on the upper surface. A first insulation layer
pattern is formed to cover the upper surface and the side surfaces
of the semiconductor chip and expose the bonding pads.
Re-distribution lines are placed on the first insulation layer
pattern and include first re-distribution line parts and second
re-distribution line parts. The first re-distribution line parts
have an end connected with the bonding pads and correspond to the
upper surface of the semiconductor chip and the second
re-distribution line parts extend from the first re-distribution
line parts beyond the side surfaces of the semiconductor chip. A
second insulation layer pattern is formed over the semiconductor
chip and exposes portions of the first re-distribution line parts
and the second re-distribution line parts.
Inventors: |
SUH; Min Suk; (Seoul,
KR) ; YANG; Seung Taek; (Seoul, KR) ; LEE;
Seung Hyun; (Gyeonggi-do, KR) ; KIM; Jong Hoon;
(Gyeonggi-do, KR) |
Assignee: |
HYNIX SEMICONDUCTOR INC.
Gyeonggi-do
KR
|
Family ID: |
41052761 |
Appl. No.: |
13/197249 |
Filed: |
August 3, 2011 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
12261112 |
Oct 30, 2008 |
8018043 |
|
|
13197249 |
|
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Current U.S.
Class: |
438/113 ;
257/E21.599 |
Current CPC
Class: |
H01L 2924/01078
20130101; H01L 23/525 20130101; H01L 24/19 20130101; H01L
2924/01023 20130101; H01L 23/3114 20130101; H01L 2224/04105
20130101; H01L 2224/20 20130101; H01L 2924/01027 20130101; H01L
2924/01029 20130101; H01L 2924/15311 20130101; H01L 2924/01006
20130101; H01L 2924/014 20130101; H01L 2924/01033 20130101; H01L
2221/68345 20130101; H01L 2924/01013 20130101; H01L 23/4334
20130101; H01L 2221/68359 20130101; H01L 2924/01005 20130101; H01L
2924/01075 20130101; H01L 2924/01047 20130101; H01L 21/568
20130101; H01L 21/6835 20130101 |
Class at
Publication: |
438/113 ;
257/E21.599 |
International
Class: |
H01L 21/78 20060101
H01L021/78 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 10, 2008 |
KR |
10-2008-0021983 |
Aug 29, 2008 |
KR |
10-2008-0085386 |
Claims
1. A method for manufacturing a wafer level semiconductor package,
comprising the steps of: placing at least two semiconductor chips
having bonding pads on a carrier substrate; forming a first
insulation layer pattern on the carrier substrate to cover upper
surfaces of the semiconductor chips and side surfaces of the
semiconductor chips to expose the bonding pads, wherein the side
surfaces of a semiconductor chips are connected with the upper
surface of the semiconductor chip; forming re-distribution lines on
the first insulation layer pattern, the re-distribution lines
comprising: first re-distribution line parts connected to
corresponding bonding pads; and second re-distribution line parts
extending from the first re-distribution line parts beyond the side
surfaces of the semiconductor chips; forming a second insulation
layer pattern on predetermined portions of the first insulation
layer pattern such that portions of the first re-distribution line
parts and the second re-distribution line parts are exposed; and
individualizing the respective semiconductor chips.
2. The method according to claim 1, wherein the step of placing the
semiconductor chips comprises the steps of: inspecting
semiconductor chips formed on a wafer and determining good
semiconductor chips and bad semiconductor chips; individualizing
the good and bad semiconductor chips from the wafer; and placing
the good semiconductor chips on the carrier substrate.
3. The method according to claim 1, wherein the step of forming the
first insulation layer pattern on the carrier substrate comprises
the steps of: applying a flowable insulation material on the
carrier substrate and so as to form a first insulation layer
covering the semiconductor chips; baking the first insulation
layer; and patterning the first insulation layer to define openings
for exposing the bonding pads and to expose a portion of the
carrier substrate between adjacent semiconductor chips.
4. The method according to claim 1, wherein the step of forming the
first insulation layer pattern on the carrier substrate comprises
the steps of: applying a flowable insulation material on the
carrier substrate and so as to form a first insulation layer
covering the semiconductor chips; baking the first insulation
layer; and patterning the first insulation layer to define openings
for exposing the bonding pads.
5. The method according to claim 1, further comprising the step of:
placing connection members on the exposed portions of the first
re-distribution line parts and the second re-distribution line
parts.
6. The method according to claim 1, wherein, before the step of
individualizing the semiconductor chips, the method further
comprises the step of: separating the carrier substrate from the
semiconductor chips.
7. A method for manufacturing a semiconductor package, comprising
the steps of: forming partition walls on a bottom plate in a
lattice pattern so as to define receiving spaces; placing good
semiconductor chips having bonding pads, in the respective
receiving spaces; forming re-distribution lines having first ends
which are electrically connected with the bonding pads and second
ends which face away from the first ends and extend over the
partition walls; and cutting the partition walls and the bottom
plate to individualize the semiconductor chips.
8. The method according to claim 7, wherein, after the step of
forming the re-distribution lines, the method further comprises the
step of: to forming a solder resist pattern to cover the partition
walls and the semiconductor chips, the solder resist pattern having
openings for exposing portions of the re-distribution lines.
9. The method according to claim 7, wherein, before the step of
forming the partition walls, the method further comprises the step
of: defining through-holes in partition wall forming regions on the
bottom plate by a pressing process.
10. The method according to claim 7, wherein the bottom plate is
made of any one of a metal and synthetic resin and the partition
walls are made of any one of a metal and a synthetic resin.
11. The method according to claim 7, wherein, before the step of
forming the re-distribution lines, the method further comprises the
steps of: applying an insulation material on the semiconductor
chips so as to form an insulation layer for covering the
semiconductor chips; and patterning the insulation layer to expose
the bonding pads.
12. The method according to claim 7, wherein, in the step of
placing the semiconductor chips in the respective receiving spaces
defined by the partition walls, two or more semiconductor chips are
arranged on the bottom plate in each respective receiving space in
the form of a matrix.
13. The method according to claim 7, wherein, in the step of
placing the semiconductor chips in the respective receiving spaces
defined by the partition walls, two or more semiconductor chips are
sequentially stacked on the bottom plate in each respective
receiving space and the two or more semiconductor chips are
electrically connected with each other by through-electrodes.
14. The method according to claim 7, wherein, in the step of
placing the semiconductor chips in the respective receiving spaces
defined by the partition walls, a semiconductor chip module
including a plurality of stacked semiconductor chips, which are
electrically connected with one another by through-electrodes, is
placed in each respective receiving space.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application claims priorities to Korean patent
application numbers 10-2008-0021983 filed on Mar. 10, 2008 and
10-2008-0085386 filed on Aug. 29, 2008, which are incorporated
herein by reference in their entireties.
BACKGROUND OF THE INVENTION
[0002] The present invention relates generally to a semiconductor
package and a method for manufacturing the same, and more
particularly to a semiconductor package having side walls formed
around a semiconductor chip to increase the bonding area of the
semiconductor chip package.
[0003] Semiconductor chips capable of storing large amounts of data
and processing the data rapidly and semiconductor packages
utilizing such semiconductor chips have been developed. Chip scale
packages that are no more than about 100% to 105% of the size of
semiconductor chips have been disclosed in the art.
[0004] One such chip scale package is a wafer level package, which
includes a semiconductor chip, bonding pads formed on the
semiconductor chip, re-distribution lines connected with the
bonding pads, and solder balls placed on the re-distribution lines.
In the wafer level package above, the size of the semiconductor
package considerably decreases, because the solder balls are placed
on the semiconductor chip. The solder balls are attached to the
re-distribution lines and placed on the semiconductor chip
according to the international standard of Joint Electron Device
Engineering Council (JEDEC).
[0005] As semiconductor chip manufacturing processes continue to
evolve, the size of the semiconductor chip gradually decreases.
Therefore, problems associated with the decrease in the size of the
semiconductor chip, in that it is difficult to attach solder balls
on the semiconductor chip according to the international standard
of JEDEC.
SUMMARY OF THE INVENTION
[0006] Embodiments of the present invention include a semiconductor
package which provides areas for placing solder balls even when the
size of a semiconductor chip decreases.
[0007] Also, embodiments of the present invention include a method
for manufacturing the semiconductor package.
[0008] In one embodiment of the present invention, a wafer level
semiconductor package comprises a semiconductor chip having an
upper surface, side surfaces which are connected with the upper
surface, and bonding pads which are placed on the upper surface; a
first insulation layer pattern covering the upper surface and the
side surfaces and exposing the bonding pads; re-distribution lines
placed on the first insulation layer pattern and having first
re-distribution line parts which have one ends connected with the
bonding pads and correspond to the upper surface of the
semiconductor chip and second re-distribution line parts which
extend from the first re-distribution line parts outside the side
surfaces of the semiconductor chip; and a second insulation layer
pattern exposing portions of the first re-distribution line parts
and the second re-distribution line parts.
[0009] An upper surface of the first insulation layer pattern is
parallel to the upper surface of the semiconductor chip, and side
surfaces of the first insulation layer pattern are parallel to the
side surfaces of the semiconductor chip.
[0010] The first insulation layer pattern comprises an organic
layer pattern containing organic substance.
[0011] The wafer level semiconductor package further comprises
connection members electrically connected with the exposed portions
of the first re-distribution line parts and the second
re-distribution line parts.
[0012] The semiconductor chip further has fuse boxes, which are
insulated by the first insulation layer pattern.
[0013] In another embodiment of the present invention, a wafer
level semiconductor package comprises a semiconductor chip having
an upper surface, side surfaces which are connected with the upper
surface, and bonding pads which are placed on the upper surface; a
first insulation layer pattern placed along the side surfaces of
the semiconductor chip; re-distribution lines placed on the
semiconductor chip and having first re-distribution line parts
which are connected with the bonding pads and second
re-distribution line parts which extend from the first
re-distribution line parts over the first insulation layer pattern;
and a second insulation layer pattern exposing portions of the
first re-distribution line parts and the second re-distribution
line parts.
[0014] A thickness of the first insulation layer pattern is
substantially the same as that of the semiconductor chip, and an
upper surface of the first insulation layer pattern is positioned
on substantially the same plane as the upper surface of the
semiconductor chip.
[0015] The first insulation layer pattern comprises an organic
layer pattern containing organic substance.
[0016] The wafer level semiconductor package further comprises
connection members electrically connected with the exposed portions
of the first re-distribution line parts and the second
re-distribution line parts.
[0017] In another embodiment of the present invention, a method for
manufacturing a wafer level semiconductor package comprises the
steps of placing at least two semiconductor chips having bonding
pads on a carrier substrate; forming a first insulation layer
pattern on the carrier substrate to cover upper surfaces of the
semiconductor chips and side surfaces of the semiconductor chips
which are connected with the upper surfaces and to expose the
bonding pads; forming re-distribution lines on the first insulation
layer pattern, the re-distribution lines having first
re-distribution line parts which are connected with the bonding
pads and second re-distribution line parts which extend from the
first re-distribution line parts outside the side surfaces of the
semiconductor chips; forming a second insulation layer pattern on
the first insulation layer pattern to expose portions of the first
re-distribution line parts and the second re-distribution line
parts; and individualizing the respective semiconductor chips.
[0018] The step of placing the semiconductor chips comprises the
steps of inspecting semiconductor chips formed on a wafer and
sorting good semiconductor chips and bad semiconductor chips;
individualizing the good and bad semiconductor chips from the
wafer; and placing the good semiconductor chips on the carrier
substrate.
[0019] The step of forming the first insulation layer pattern on
the carrier substrate comprises the steps of applying a flowable
insulation material on the carrier substrate and thereby forming a
first insulation layer to cover the semiconductor chips; baking the
first insulation layer; and patterning the first insulation layer
to define openings for exposing the bonding pads and to expose a
portion of the carrier substrate between the semiconductor
chips.
[0020] The step of forming the first insulation layer pattern on
the carrier substrate comprises the steps of applying a flowable
insulation material on the carrier substrate and thereby forming a
first insulation layer to cover the semiconductor chips; baking the
first insulation layer; and patterning the first insulation layer
to define openings for exposing the bonding pads.
[0021] The method further comprises the step of placing connection
members on the exposed portions of the first re-distribution line
parts and the second re-distribution line parts.
[0022] The connection members comprise solder balls containing
solder.
[0023] Before the step of individualizing the semiconductor chips,
the method further comprises the step of separating the carrier
substrate from the semiconductor chips.
[0024] In still another aspect of the present invention, a
semiconductor package comprises a semiconductor chip having bonding
pads; a chip receiving body having side walls and a bottom plate
which is coupled with the side walls to define a receiving space
for receiving the semiconductor chip; and re-distribution lines
having first ends which are electrically connected with the bonding
pads and second ends which face away from the first ends and extend
over upper surfaces of the side walls of the chip receiving
body.
[0025] The semiconductor package further comprises a solder resist
pattern having openings for exposing portions of the
re-distribution lines.
[0026] The openings expose portions of first re-distribution line
parts of the re-distribution lines, which correspond to an upper
surface of the semiconductor chip, and portions of second
re-distribution line parts of the re-distribution lines, which
correspond to the upper surfaces of the side walls.
[0027] The semiconductor package further comprises connection
members electrically connected with the exposed portions of the
first re-distribution line parts and the second re-distribution
line parts.
[0028] Side surfaces of the bottom plate contact inner surfaces of
the side walls.
[0029] The bottom plate and the side walls are made of any one of
metal and synthetic resin.
[0030] The semiconductor package further comprises an adhesive
member interposed between the semiconductor chip and the bottom
plate.
[0031] The semiconductor package further comprises an insulation
layer having openings for exposing the bonding pads which are
formed on the upper surface of the semiconductor chip.
[0032] A total thickness of the bottom plate, the semiconductor
chip and the insulation layer is the same as a height of the side
walls.
[0033] At least two semiconductor chips are located on the bottom
plate in the receiving space in the form of a matrix.
[0034] At least two semiconductor chips are the same kind of
semiconductor chips.
[0035] At least two semiconductor chips are different kinds of
semiconductor chips.
[0036] Bonding pads of at least two semiconductor chips are
electrically connected with each other by the re-distribution
lines.
[0037] At least two semiconductor chips are stacked on the bottom
plate in the receiving space and are electrically connected with
each other by through-electrodes which are electrically connected
with re-distribution lines.
[0038] The semiconductor chips are the same kind of semiconductor
chips.
[0039] The semiconductor chips are different kinds of semiconductor
chips.
[0040] In yet another embodiment of the present invention, a method
for manufacturing a semiconductor package comprises the steps of
forming partition walls on a bottom plate in the form of lattices
and thereby defining receiving spaces; placing good semiconductor
chips having bonding pads, in the respective receiving spaces;
forming re-distribution lines having first ends which are
electrically connected with the bonding pads and second ends which
face away from the first ends and extend over the partition walls;
and cutting the partition walls and the bottom plate to
individualize the semiconductor chips.
[0041] After the step of forming the re-distribution lines, the
method further comprises the step of forming a solder resist
pattern to cover the partition walls and the semiconductor chips
and have openings for exposing portions of the re-distribution
lines.
[0042] The bottom plate has the shape of a disc.
[0043] Before the step of forming the partition walls, the method
further comprises the step of defining through-holes in partition
wall forming regions on the bottom plate by a pressing process.
[0044] The bottom plate and the partition walls are made of any one
of metal and synthetic resin.
[0045] The step of placing the good semiconductor chips on the
bottom plate comprises the step of forming an adhesive member on at
least one of the semiconductor chips and the bottom plate.
[0046] Before the step of forming the re-distribution lines, the
method further comprises the steps of applying a flowable
insulation material on the semiconductor chips and thereby forming
an insulation layer which covers the semiconductor chips; and
patterning the insulation layer and thereby exposing the bonding
pads.
[0047] In the step of placing the semiconductor chips in the
respective receiving spaces defined by the partition walls, at
least two semiconductor chips are located on the bottom plate in
each receiving space in the form of a matrix.
[0048] The semiconductor chips are the same kind of semiconductor
chips or different kinds of semiconductor chips.
[0049] In the step of placing the semiconductor chips in the
respective receiving spaces defined by the partition walls, at
least two semiconductor chips are sequentially stacked on the
bottom plate in each receiving space and are electrically connected
with each other by through-electrodes.
[0050] The semiconductor chips are the same kind of semiconductor
chips or different kinds of semiconductor chips.
[0051] In the step of placing the semiconductor chips in the
respective receiving spaces defined by the partition walls, a
semiconductor chip module including a plurality of stacked
semiconductor chips, which are electrically connected with one
another by through-electrodes, is placed in each receiving
space.
BRIEF DESCRIPTION OF THE DRAWINGS
[0052] FIG. 1 is a plan view showing a wafer level semiconductor
package in accordance with one embodiment of the present
invention.
[0053] FIG. 2 is a cross-sectional view taken along the line I-I'
of FIG. 1.
[0054] FIG. 3 is a plan view showing a wafer level semiconductor
package in accordance with another embodiment of the present
invention.
[0055] FIG. 4 is a cross-sectional view taken along the line II-II'
of FIG. 3.
[0056] FIGS. 5 through 7 are cross-sectional views showing a method
for manufacturing the wafer level semiconductor package in
accordance with one embodiment of the present invention.
[0057] FIG. 8 is a cross-sectional view showing a semiconductor
package in accordance with another embodiment of the present
invention.
[0058] FIG. 9 is a cross-sectional view showing a semiconductor
package in accordance with still another embodiment of the present
invention.
[0059] FIG. 10 is a cross-sectional view showing a semiconductor
package in accordance with another embodiment of the present
invention.
[0060] FIGS. 11 through 26 are plan views and cross-sectional views
showing a method for manufacturing the semiconductor package in
accordance with another embodiment of the present invention.
DESCRIPTION OF SPECIFIC EMBODIMENTS
[0061] FIG. 1 is a plan view showing a semiconductor package in
accordance with one embodiment of the present invention. FIG. 2 is
a cross-sectional view taken along the line I-I' of FIG. 1.
[0062] Referring to FIGS. 1 and 2, a semiconductor package 100
includes a semiconductor chip 110, a first insulation layer pattern
120, re-distribution lines 130, and a second insulation layer
pattern 140. In addition, the semiconductor package 100 may further
include connection members 150 containing, for example, a
solder.
[0063] According to an embodiment of the present invention, the
semiconductor chip 110 may have the shape of a rectangular
hexahedron, although it should be understood that the semiconductor
chip 110 may also have any number of other various shapes.
[0064] The semiconductor chip 110 having the shape of a rectangular
hexahedron includes an upper surface 111, a lower surface 112
facing away from the upper surface 111, and side surfaces 113
connecting the upper surface 111 and the lower surface 112.
[0065] The semiconductor chip 110 may further include a circuit
section (not shown) and bonding pads 115. In addition, the
semiconductor chip 110 may further include fuse boxes 117.
[0066] The circuit section (not shown) includes a data storage part
for storing data and a data processing part for processing the
data.
[0067] The bonding pads 115 are electrically connected with the
circuit section. The bonding pads 115 receive data input to the
circuit section from external devices and output data from the
circuit section to the external devices. By way of example, signals
inputted to the bonding pads may include power supply signals,
control signals, address signals, and data signals.
[0068] The fuse boxes 117 function to repair the circuit
section.
[0069] The first insulation layer pattern 120 is formed over the
upper surface 111 and the side surfaces 113 of the semiconductor
chip 110. For example, as shown in FIG. 2, an upper surface of the
first insulation layer pattern 120 may include an upper surface,
which is parallel to the upper surface 111 of the semiconductor
chip 110, and side surfaces, which are parallel to the side
surfaces 113 of the semiconductor chip 110. The first insulation
layer pattern 120 includes first openings corresponding to the
bonding pads 115, which expose the bonding pads 115.
[0070] The first insulation layer pattern 120 may comprise, an
organic layer containing an organic substance. Alternatively, the
first insulation layer pattern 120 may comprise an inorganic layer
containing an inorganic substance.
[0071] In the present embodiment, the first insulation layer
pattern 120, which covers the upper surface 111 and the side
surfaces 113 of the semiconductor chip 110, increases the area for
locating the connection members 150 electrically connected with the
re-distribution lines 130 as will be described below. As a result,
the size of the semiconductor chip 110 can be reduced while
allowing the connection members 150 to be located according to the
international standard of JEDEC.
[0072] The re-distribution lines 130 are formed on the upper
surface of the first insulation layer pattern 120. In the present
embodiment, each re-distribution line 130 has a first
re-distribution line part 132 and a second re-distribution line
part 134. An end of the first re-distribution line part 132 is
electrically connected with the bonding pad 115, and the second
re-distribution line part 134 extends from the opposite end of the
first re-distribution line part 132 over the upper surface of the
first insulation layer pattern 120 along an edge thereof, the edge
corresponding to the side surface 113 of the semiconductor chip
110.
[0073] The re-distribution lines 130 may be formed of a conductive
material, for example, copper. When the re-distribution lines 130
are formed of copper, the re-distribution lines 130 may include
metal seed patterns, which have substantially the same shape as the
re-distribution lines 130.
[0074] The second insulation layer pattern 140 is formed over the
first insulation layer pattern 120. The second insulation layer
pattern 140 may comprise an organic layer containing an organic
substance. Alternatively, the second insulation layer pattern 140
may comprise an inorganic layer containing an inorganic
substance.
[0075] The second insulation layer pattern 140 includes openings
exposing portions of the first re-distribution line parts 132 and
portions of the second re-distribution line parts 134. In the
present embodiment, the openings are located according to the
international standard of JEDEC.
[0076] The connection members 150 are electrically connected with
the first re-distribution line parts 132 and the second
re-distribution line parts 134, which are exposed through the
openings defined in the second insulation layer pattern 140. The
connection members 150 may comprise solder balls containing
solder.
[0077] FIG. 3 is a plan view of a semiconductor package in
accordance with another embodiment of the present invention. FIG. 4
is a cross-sectional view of the semiconductor package of FIG. 3,
taken along the line II-II' of FIG. 3.
[0078] Referring to FIGS. 3 and 4, a semiconductor package 200
includes a semiconductor chip 210, a first insulation layer pattern
220, re-distribution lines 230, and a second insulation layer
pattern 240. In addition, the semiconductor package 200 may include
connection members 250 containing solder.
[0079] The semiconductor package 200 according to the present
embodiment can be applied to a semiconductor chip that does not
include a fuse box.
[0080] The semiconductor chip 210 may have the shape of, for
example, a rectangular hexahedron, although it should be understood
that the semiconductor chip 210 may have any number of other
various shapes.
[0081] The semiconductor chip 210 includes an upper surface 211, a
lower surface 212 facing away from the upper surface 211, and side
surfaces 213 which connect the upper surface 211 and the lower
surface 212.
[0082] Also, the semiconductor chip 210 may include a circuit
section (not shown) and bonding pads 215.
[0083] The circuit section includes a data storage part for storing
data and a data processing part for processing data.
[0084] The bonding pads 215 are electrically connected with the
circuit section. The bonding pads 215 function to input data from
external devices to the circuit section or output data from the
circuit section to the external devices. Signals that may be input
to the bonding pads 215 include, but are not limited to, power
supply signals, control signals, address signals, and data signals.
In the present embodiment, the bonding pads 215 can, for example,
be formed on a central portion of the upper surface 211 of the
semiconductor chip 210.
[0085] The first insulation layer pattern 220 is formed along the
side surfaces 213 of the semiconductor chip 210. The first
insulation layer pattern 220 formed along the side surfaces 213 of
the semiconductor chip 210 may, for example, may be formed in the
shape of a band. In the present embodiment, the first insulation
layer pattern 220 is not formed on the upper surface 211 of the
semiconductor chip 210, but rather only along the side surfaces 213
of the semiconductor chip as shown in FIG. 4.
[0086] The first insulation layer pattern 220 includes an upper
surface which is, for example, parallel to the upper surface 211 of
the semiconductor chip 210. The thickness of the first insulation
layer pattern 220 is substantially the same as that of the
semiconductor chip 210.
[0087] In the present embodiment, the first insulation layer
pattern 220 may comprise, for example, an organic layer containing
an organic substance. Alternatively, the first insulation layer
pattern 220 may comprise an inorganic layer containing an inorganic
substance. As yet another alternative, the first insulation layer
pattern 220 may be formed of insulating synthetic resin or the
like.
[0088] In the present embodiment, the first insulation layer
pattern 220, which is formed along the side surfaces 213 and covers
the side surfaces 213 of the semiconductor chip 210, increases the
area available for locating the connection members 250 electrically
connected with the re-distribution lines 230, as will be described
below, allowing the connection members 250 to be located according
to the international standard of JEDEC.
[0089] The re-distribution lines 230 are placed on the upper
surface 211 of the semiconductor chip 210 and the upper surface of
the first insulation layer pattern 220. In the present embodiment,
each re-distribution line 230 has a first re-distribution line part
232 and a second re-distribution line part 234. A first end of the
first re-distribution line part 232 is electrically connected with
the bonding pad 215, and the second re-distribution line part 234
extends from the opposite end of the first re-distribution line
part 232 over the upper surface of the first insulation layer
pattern 220, which corresponds to the outside of the side surface
213 of the semiconductor chip 210.
[0090] The re-distribution lines 230 are formed of a conductive
material, for example, copper. When the re-distribution lines 230
to are formed of copper, the re-distribution lines 230 may include
metal seed patterns having substantially the same shape as the
re-distribution lines 230.
[0091] The second insulation layer pattern 240 is formed over both
the semiconductor chip 210 and the first insulation layer pattern
220. The second insulation layer pattern 240 may comprise an
organic layer containing an organic substance. Alternatively, the
second insulation layer pattern 240 may comprise an inorganic layer
containing an inorganic substance.
[0092] The second insulation layer pattern 240 includes openings
defined therein which expose portions of the first and second parts
232, 234 of the re-distribution lines 230.
[0093] The connection members 250 are electrically connected with
portions of the first re-distribution line parts 232 and portions
of the second re-distribution line parts 234 which are exposed
through the openings defined in the second insulation layer pattern
240. For example, the connection members 250 may comprise solder
balls containing solder.
[0094] FIGS. 5 through 7 are a plan view and cross-sectional views
illustrating a method for manufacturing the semiconductor package
in accordance with one embodiment of the present invention.
[0095] Referring to FIG. 5, in the manufacture a semiconductor
package, the step of locating or placing a plurality of
semiconductor chips 110 on a carrier substrate 10 is implemented.
In the present embodiment, the carrier substrate 10 may comprise,
for example, a dummy wafer.
[0096] The semiconductor chips 110 can include circuit sections
(not shown and bonding pads 115, which are electrically connected
with the circuit sections. The semiconductor chips 110 may further
include fuse boxes 117, which are electrically connected with the
circuit sections.
[0097] In order to locate or place the semiconductor chips 110 on
the carrier substrate 10, a plurality of semiconductor chips, which
are formed on a wafer (not shown), are inspected through an
electric die sorting (EDS) process, such that that it may be
determined which semiconductor chips are good semiconductor chips
and which are bad semiconductor chips, that is, determining which
semiconductor chips have sufficiently high quality for a given
application. Subsequently, the semiconductor chips are
individualized from the wafer through a sawing process. Then, the
good semiconductor chips are located or placed on the carrier
substrate 10 using a die pick-up device, etc. At this time, the
semiconductor chips 110 sorted as having good quality can be
located on the carrier substrate 10 in such a way as to adjoin one
another.
[0098] Referring to FIG. 6, after locating the semiconductor chips
110 sorted as having good quality on the carrier substrate 10, a
first insulation layer (not shown) is formed on the carrier
substrate 10 to cover the semiconductor chips 110 sorted as having
good quality by applying a flowable insulation material on the
carrier substrate 10.
[0099] According to an embodiment of the present invention, the
first insulation layer may include a photosensitive substance.
However, it should be understood that the first insulation layer
may also be formed of another material. Then, the flowable
insulation material covering the carrier substrate 10 is baked to
form the first insulation layer, which covers the carrier substrate
10.
[0100] The baked first insulation layer is patterned through a
patterning process that includes a lithographic process and a
development process. Through the patterning process, a first
insulation layer pattern 120 is formed to have openings 122 that
expose the bonding pads 115 of the semiconductor chips 110 and also
expose portions of the carrier substrate 10 between the
semiconductor chips 110.
[0101] Alternatively, the baked first insulation layer may be
patterned through a patterning process including a lithographic
process and a development process in a manner such that openings
122 for exposing only the bonding pads 115 of the semiconductor
chips 110 are defined. That is, the first insulation layer pattern
120 is formed on upper surfaces 111 of the respective semiconductor
chips 110 and is filled in between the semiconductor chips 110, by
which the first insulation layer pattern 120 covers side surfaces
113 of the semiconductor chips 110. In the present embodiment, the
upper surface of the first insulation layer pattern 120 becomes
parallel to the upper surfaces 111 of the semiconductor chips
110.
[0102] Referring to FIG. 7, after the first insulation layer is
pattern 120 is formed on the carrier substrate 10, re-distribution
lines 130 are formed over the carrier substrate 10.
[0103] In order to form the re-distribution lines 130, a metal seed
layer (not shown) is formed on the first insulation layer pattern
120 and the bonding pads 115 which are exposed through the first
insulation layer pattern 120. The metal seed layer can be formed,
for example, through a sputtering process, and may be formed of a
material such as titanium, nickel, vanadium, and copper.
[0104] After the metal seed layer is formed on the first insulation
layer pattern 120, photoresist patterns (not shown), which have
openings for forming the re-distribution lines 130, are formed on
the metal seed layer.
[0105] After the photoresist patterns are formed, a plating process
is conducted on the metal seed layer which is exposed through the
openings defined in the photoresist patterns, whereby the
re-distribution lines 130 are formed. In the present embodiment,
each re-distribution line 130 includes a first re-distribution line
part 132 and a second re-distribution line part 134. A first end of
the first re-distribution line part 132 is electrically connected
with the bonding pad 115, and the second re-distribution line part
134 extends from the opposite end of the first re-distribution line
part 132 along a portion of the upper surface of the first
insulation layer pattern 120 which corresponds to the outside of
the side surface 113 of the semiconductor chip 110. The
re-distribution lines 130 may be formed of a conductive material,
for example, copper.
[0106] After the re-distribution lines 130 having first
re-distribution line parts 132 and second re-distribution line
parts 134 are formed, a second insulation layer pattern 140 is
formed on the first insulation layer pattern 120.
[0107] The second insulation layer pattern 140 can comprise an
organic layer containing an organic substance. The second
insulation layer pattern 140 has openings corresponding to the
first and second re-distribution line parts 132, 134 which expose
the first re-distribution line parts 132 and the second
re-distribution line parts 134.
[0108] Connection members 150 are electrically connected with the
re-distribution lines 130 which are exposed through the openings
defined in the second insulation layer pattern 140. Subsequently,
the carrier substrate 10 is removed from the semiconductor chips
110, and the semiconductor chips 110 are individualized, and the
individualized semiconductor chips may then be utilized in the
manufacture of semiconductor packages.
[0109] In the present embodiment, the connection members 150 may be
located outside the side surfaces 113 of the semiconductor chips
110. Due to this fact, the connection members 150 can be formed on
the semiconductor chips 110 in accordance with the international
standard of JEDEC, even when a semiconductor chip 110 has an area
which is smaller than that prescribed in JEDEC as the international
standard for the location of the connection members 150. That is,
as the reduction of the size of semiconductor chips continues, the
surface area of the semiconductor chip becomes too small to form
connection members in accordance with the international standard of
JEDEC. However, according to an embodiment of the present
invention, connection members may be formed in accordance with the
international standard of JEDEC even on such semiconductor
chips.
[0110] FIG. 8 is a cross-sectional view of a semiconductor package
in accordance with another embodiment of the present invention.
[0111] Referring to FIG. 8, a semiconductor package 900 includes a
semiconductor chip 600, a chip receiving body 700, and
re-distribution lines 800.
[0112] The semiconductor chip 600 has the shape of, for example, a
rectangular hexahedron although it should be understood that the
semiconductor chip 600 may also have any number of other various
shapes. The semiconductor chip 600 having the shape of a
rectangular hexahedron has an upper surface 610, a lower surface
620 facing away from the upper surface 610, and side surfaces 630
connecting the upper surface 610 and the lower surface 620.
[0113] The semiconductor chip 600 includes a circuit section (not
shown) and bonding pads 640.
[0114] The circuit section includes a data storage part (not shown)
for storing data and a data processing part (not shown) for
processing data.
[0115] The bonding pads 640 are located on the upper surface 610 of
the semiconductor chip 600 and are electrically connected with the
circuit section. According to an embodiment of the present
invention, the bonding pads 640 may be formed on a central portion
of the upper surface 610 of the semiconductor chip 600.
Alternatively, the bonding pads 640 may be located along the edges
of the upper surface 610 of the semiconductor chip 600.
[0116] The chip receiving body 700 includes side walls 710 and a
bottom plate 720. The side walls 710 and the bottom plate 720 of
the chip receiving body 700 define a space for receiving the
semiconductor chip 600.
[0117] In the present embodiment, the bottom plate 720 has, for
example, the shape of a rectangle which is substantially similar to
the shape of the semiconductor chip 600. The side walls 710 are
formed on the side surfaces of the bottom plate 720. In the present
embodiment, the side surfaces of the bottom plate 720 contact the
inner surfaces of the side walls 710, as shown in FIG. 8.
[0118] In the present embodiment, the side walls 710 and the bottom
plate 720 may be made of any one of metal and synthetic resin. By
way of example, the bottom plate 720 may comprise a metal, and the
side walls 710 may comprise a synthetic resin. Alternatively, the
bottom plate 720 may be made of synthetic resin, and the side walls
710 may be made of metal. As yet another alternative, both the side
walls 710 and the bottom plate 720 may be made of synthetic resin,
or both the side walls 710 and the bottom plate 720 may be made of
metal.
[0119] In the present embodiment, the side walls 710 are made of
synthetic resin, and the bottom plate 720 is made of metal. The
bottom plate 720 comprises a metal which has excellent heat
conductivity such as, copper, aluminum, silver, or the like.
[0120] In the present embodiment, the semiconductor chip 600 is
secured in the chip receiving body 700 including the side walls 710
and the bottom plate 720, by an adhesive member 650 interposed
between the bottom plate 720 and the lower surface 620 of the
semiconductor chip 600. The adhesive member 650 can comprise, for
example, epoxy resin or a double-sided adhesive tape. It should be
understood that other means of adhesion may also be appropriate for
securing the semiconductor chip 600 within the chip receiving body
700. The adhesive member 650 may be placed on the lower surface 620
of the semiconductor chip 600 or the upper surface of the bottom
plate 720.
[0121] An insulation layer 660 is formed on the upper surface 610
of the semiconductor chip 600, which is received in the receiving
space of the chip receiving body 700. The insulation layer 660 may
comprise, for example, an organic layer. The insulation layer 660
includes openings exposing the bonding pads 640 formed on the upper
surface 610 of the semiconductor chip 600. In the present
embodiment, the insulation layer 660 is also formed on the upper
surfaces of the side walls 710 when the side walls 710 are made of
metal.
[0122] In the present embodiment, the total thickness of the bottom
plate 720, the adhesive member 650, the semiconductor chip and the
insulation layer 660 is substantially the same as the height of the
side walls 710.
[0123] The re-distribution lines 800 have the shape of a line when
viewed from above. An end of each re-distribution line 800 is
electrically connected with a corresponding bonding pad 640, which
is exposed through the opening of the insulation layer 660, and the
opposite end of each re-distribution line 800 extends onto the
upper surface of the side wall 710.
[0124] In the present embodiment, each re-distribution line
includes a first and a second re-distribution line part 810, 820,
the first re-distribution line part 810 being the portion of a
re-distribution line 800 formed on the upper surface 610 of the
semiconductor chip 600, and the second first re-distribution line
part 820 being the portion of the re-distribution line 800 formed
on the upper surface of the side wall 710.
[0125] The semiconductor package 900 according to the present
embodiment may further include a solder resist pattern 830. The
solder resist pattern 830 covers the upper surface of the resultant
semiconductor chip 600 and the sidewalls 710 having the
re-distribution lines 800 formed thereon. The solder resist pattern
830 includes a plurality of openings which expose, for example,
portions of the first re-distribution line parts 810 and the second
re-distribution line parts 820 of the re-distribution lines 800.
The openings defined in the solder resist pattern 830 are located
according to the international standard of JEDEC.
[0126] Connection members 835 comprising a low melting point metal,
such as solder, are located on the portions of the first
re-distribution line parts 810 and the second re-distribution line
parts 820 which are exposed through the openings defined in the
solder resist pattern 830. The connection members 835 are located
according to the international standard of JEDEC.
[0127] FIG. 9 is a cross-sectional view showing a semiconductor
package in accordance with still another embodiment of the present
invention.
[0128] Referring to FIG. 9, a semiconductor package 900 includes
semiconductor chips 662, 664, and 666, a chip receiving body 700,
and re-distribution lines 830, 840, and 850.
[0129] The chip receiving body 700 includes side walls 710 and a
bottom plate 720. The side walls 710 and the bottom plate 720 of
the chip receiving body 700 define a space for receiving the
semiconductor chips 662, 664, and 666.
[0130] In the present embodiment, the bottom plate 720 has the
shape of a rectangle, although it should be should understood that
other the bottom plate 720 may also have any number of other
various shapes. The side walls 710 are placed on the side surfaces
of the bottom plate 720. In the present embodiment, the side
surfaces of the bottom plate 720 contact the inner surfaces of the
side walls 710.
[0131] In the present embodiment, the side walls 710 and the bottom
plate 720 may be made of any one of metal and synthetic resin. For
example, the bottom plate 720 may be made of metal, and the side
walls 710 may be made of synthetic resin. Alternatively, the bottom
plate 720 may be made of synthetic resin, and the side walls 710
may be made of metal. As yet another alternative, both the side
walls 710 and the bottom plate 720 may be made of synthetic resin,
or both of the side walls 710 and the bottom plate 720 may be made
of metal.
[0132] In the present embodiment, the side walls 710 comprise a
synthetic resin, and the bottom plate 720 comprises a metal. The
bottom plate 720 is formed of a metal having excellent heat
conductivity such as copper, aluminum, or silver.
[0133] In the present embodiment, in order to secure the
semiconductor chips 662, 664, and 666 in the chip receiving body
700, an adhesive member 650 is interposed between the bottom plate
720 and the semiconductor chips 662, 664, and 666. By way of
example, the adhesive member 650 may comprise epoxy resin or a
double-sided adhesive tape. The adhesive member 650 may be placed
on the lower surfaces of the semiconductor chips 662, 664 and 666
or alternatively the adhesive member 650 may be placed on the upper
surface of the bottom plate 720.
[0134] The plurality of semiconductor chips 662, 664, and 666 are
located on the bottom plate 720 of the chip receiving body 700. The
plurality of semiconductor chips 662, 664, and 666 may be located
on the bottom plate 720 in the form of a matrix. For example, the
semiconductor chips 662, 664, and 666 may be located on the bottom
plate 720 in the form of a 3.times.1 matrix, a 3.times.2 matrix, a
3.times.3 matrix, etc. In the present embodiment, the semiconductor
chips 662, 664, and 666 are located in the form of a 3.times.1
matrix.
[0135] Hereinbelow, the middle semiconductor chip among the
semiconductor chips 662, 664, and 666 located on the bottom plate
720, is defined as a first semiconductor chip 662, and the
semiconductor chips, which are located on the sides of the first
semiconductor chip 662 are defined as a second semiconductor chip
664 and a third semiconductor chip 666 respectively. The first
semiconductor chip 662 has first bonding pads 663, the second
semiconductor chip 664 has second bonding pads 665, and the third
semiconductor chip 666 has third bonding pads 667.
[0136] In the present embodiment, the first through third
semiconductor chips 662, 664, and 666 may be the same kind of
semiconductor chips, or alternatively at least one of the first
through third semiconductor chips 662, 664, and 666 may be a
different kind of semiconductor chip. For example, the first
semiconductor chip 662 may be a system semiconductor chip, and the
second and third semiconductor chips 664 and 666 may be memory
semiconductor chips.
[0137] Hereinbelow, first re-distribution lines 830 are
electrically connected with the first bonding pads 663, second
re-distribution lines 840 are electrically connected with the
second bonding pads 665, and third re-distribution lines 850 are
electrically connected with the third bonding pads 667.
[0138] The first re-distribution lines 830 extend to the upper
surfaces of the second and third semiconductor chips 664 and 666,
and the second and third re-distribution lines 840 and 850 extend
to the upper surfaces of the side walls 710 of the chip receiving
body 700.
[0139] A solder resist pattern 835 is formed on first through third
re-distribution lines 830, 840, and 850. Openings are defined in
the solder resist pattern 835 which expose portions of the first
through third re-distribution lines 830, 840, and 850.
[0140] Connection members 855 are formed on the portions of the
first through third re-distribution lines 830, 840, and 850 which
are exposed through the openings defined in the solder resist
pattern 835. The connection members 855 contain a low melting point
metal such as solder.
[0141] FIG. 10 is a cross-sectional view showing a semiconductor
package in accordance with another embodiment of the present
invention.
[0142] Referring to FIG. 10, a semiconductor package 900 includes
semiconductor chips 672, 674, and 676, a chip receiving body 700,
and re-distribution lines 860, 870, and 880. The semiconductor
package 900 may further include a solder resist pattern 830 and
connection members 885.
[0143] The chip receiving body 700 includes side walls 710 and a
bottom plate 720.
[0144] The side walls 710 and the bottom plate 720 of the chip
receiving body 700 define a space for receiving the semiconductor
chips 672, 674 and 676.
[0145] In the present embodiment, the bottom plate 720 has, for
example, the shape of a rectangle, although it should be understood
that the bottom plate may alternatively have another shape. The
side walls 710 are placed on the side surfaces of the bottom plate
720. In the present embodiment, the side surfaces of the bottom
plate 720 contact, for example, the inner surfaces of the side
walls 710.
[0146] In the present embodiment, the side walls 710 and the bottom
plate 720 may be made of any one of metal and synthetic resin. For
example, the bottom plate 720 may be made of metal, and the side
walls 710 may be made of synthetic resin. Alternatively, the bottom
plate 720 may be made of synthetic resin, and the side walls 710
may be made of metal. As yet another alternative, both the side
walls 710 and the bottom plate 720 may be made of synthetic resin,
or both the side walls 710 and the bottom plate 720 may be made of
metal.
[0147] In the present embodiment, the side walls 710 and the bottom
plate 720 are made of metal. The bottom plate 720 is formed of a
material which has excellent heat conductivity, for example copper,
aluminum, or silver.
[0148] In the present embodiment, in order to secure the
semiconductor chip 672 in the chip receiving body 700 including the
side walls 710 and the bottom plate 720, an adhesive member 650 is
interposed between the bottom plate 720 and the semiconductor chip
672. The adhesive member 650 may comprise, for example, epoxy resin
or a double-sided adhesive tape. The adhesive member 650 may be
placed on the lower surface of the semiconductor chip 672 or the
upper surface of the bottom plate 720.
[0149] The plurality of semiconductor chips 672, 674, and 676 are
sequentially stacked on the bottom plate 720 of the chip receiving
body 700. Hereinbelow, the semiconductor chips, which are stacked
on the bottom plate 720, are respectively defined as first through
third semiconductor chips 672, 674, and 676.
[0150] The first semiconductor chip 672 is placed on the adhesive
member 650, the second semiconductor chip 674, is placed on the
first semiconductor chip 672, and the third semiconductor chip 676
is placed on the second semiconductor chip 674.
[0151] The first semiconductor chip 672 has first bonding pads 673,
the second semiconductor chip 674 has second bonding pads 675, and
the third semiconductor chip 676 has third bonding pads 677.
[0152] The first semiconductor chip 672 has first
through-electrodes 672a, the second semiconductor chip 674 has
second through-electrodes 674a, and the third semiconductor chips
676 has third through-electrodes 676a. In the present embodiment,
the first through third through-electrodes 672a, 674a, and 676a are
located at substantially the same position, such that the first
through third through electrodes 672a, 674a, and 676a are aligned
in the vertical direction.
[0153] In the present embodiment, the first through third
semiconductor chips 672, 674, and 676 may be the same kind of
semiconductor chips. Alternatively, at least one of the first
through third semiconductor chips 672, 674, and 676 may be a
different kind of semiconductor chip. For example, the first
semiconductor chip 672 may be a system semiconductor chip, and the
second and third semiconductor chips 674 and 676 may be memory
semiconductor chips.
[0154] Hereinbelow, first re-distribution lines 860 are
electrically connected with both the first bonding pads 673 and the
first through-electrodes 672a, second re-distribution lines 870 are
electrically connected with both the second bonding pads 675 and
the second through-electrodes 674a, and third re-distribution lines
880 are electrically connected with both the third bonding pads 677
and the third through-electrodes 676a.
[0155] According to the present embodiment, the first
re-distribution lines 860 are electrically connected with the
second through-electrodes 674a, and the second re-distribution
lines 870 are electrically connected with the third
through-electrodes 676a. Further, the third re-distribution lines
880 are formed to extend over the upper surfaces of the side walls
710 of the chip receiving body 700.
[0156] The solder resist pattern 830 is formed to cover the third
re-distribution lines 880 which extend over the upper surfaces of
the side walls 710. Openings are defined in the solder resist
pattern 830 which expose portions of the third re-distribution
lines 880.
[0157] Connection members 855 are electrically connected with the
portions of the third re-distribution lines 880 which are exposed
through the openings defined in the solder resist pattern 830. The
connection members 855 are formed of a low melting point metal, for
example solder.
[0158] The operation of semiconductor chips results in the
generation of heat. For example, as the data processing speed of
semiconductor chips in a semiconductor package increases, the
amount of heat generated may be such that the semiconductor package
fails to operate properly. In the present embodiment, a large
amount of heat generated in the semiconductor chips stacked upon
one another can be dissipated to the outside through the side walls
710 and the bottom plate 720 of the chip receiving body 700, such
that the data processing speed of the semiconductor package 900 can
be increased.
[0159] FIGS. 11 through 26 are plan views and cross-sectional views
showing a method for manufacturing the semiconductor package in
accordance with another embodiment of the present invention.
[0160] FIG. 11 is a plan view showing a bottom plate used for
manufacturing semiconductor packages according to the present
invention. FIG. 12 is a cross-sectional view taken along the line
III-III' of FIG. 11.
[0161] Referring to FIGS. 11 and 12, in order to manufacture
semiconductor packages, a bottom plate 701 is prepared. In the
present embodiment, the bottom plate 701 has the shape of a disc
when viewed from above. For example, the bottom plate 701 has the
same shape as a wafer, or a circular disc. In the present
embodiment, the bottom plate 701 is formed, for example, of a metal
having excellent heat conductivity, such as aluminum, aluminum
alloy, copper, or copper alloy. Alternatively, the bottom plate 701
may be formed of a synthetic resin.
[0162] FIG. 13 is a plan view showing the defining of through-holes
in the bottom plate shown in FIG. 11. FIG. 14 is a sectional view
taken along the line IV-IV' of FIG. 13.
[0163] Referring to FIGS. 13 and 14, through-holes 703 are defined
at regions 702 of the bottom plate 701 where partition walls are to
be formed as will be described later, such that the through-holes
703 adjoin one another. The regions 702 are defined in the form of
lattices on the bottom plate 701. The through-holes 703 adjoining
one another can be defined in the bottom plate 701, for example, by
conducting a pressing process in the regions 702. The through-holes
703 have the shape of slots when viewed from above.
[0164] FIG. 15 is a plan view showing the formation of partition
walls on the bottom plate shown in FIG. 13. FIG. 16 is a to
cross-sectional view taken along the line V-V' of FIG. 15.
[0165] Referring to FIGS. 15 and 16, after the through-holes 703
are defined in the bottom plate 701 as shown in FIG. 13, partition
walls 715 are formed along the regions 702 shown in FIG. 13.
Receiving spaces are defined on the bottom plate 701 by the
partition walls 715 which are formed to have a predetermined height
when measured from the upper surface of the bottom plate 701. In
the present embodiment, the partition walls 715 may be formed by a
process including, for example, pouring synthetic resin in molds.
The partition walls 715 may be arranged in a lattice pattern when
viewed from the top. The partition walls 715 pass through the
bottom plate 701 due to the presence of the through-holes 703.
Therefore, the side surfaces of the partition walls 715 contact the
side surfaces of the bottom plate 701. Alternatively, the partition
walls 715 may be formed by arranging metal plates, each having the
shape of a rectangular hexahedron, into a lattice pattern within
the through-holes 703.
[0166] A plurality of chip mounting regions 704 are defined on the
bottom plate 701, by the partition walls 715 having the lattice
pattern.
[0167] FIG. 17 is a plan view showing the formation of the adhesive
members in the chip mounting regions shown in FIG. 15. FIG. 18 is a
cross-sectional view taken along the line VI-VI' of FIG. 17.
[0168] Referring to FIGS. 17 and 18, after the partition walls 715
are formed on the bottom plate 701, adhesive members 650 are placed
in the respective chip mounting regions 704, which are defined by
the partition walls 715 on the bottom plate 701. The adhesive
members 650 may comprise an adhesive tape or a flowable adhesive
containing epoxy. Alternatively, the adhesive members 650, may be
placed on the lower surfaces of semiconductor chips, which are
subsequently placed in the respective chip mounting regions
704.
[0169] FIG. 19 is a plan view showing the locating of the
semiconductor chips in the chip mounting regions shown in FIG. 18.
FIG. 20 is a cross-sectional view taken along the line VII-VII' of
FIG. 19.
[0170] Referring to FIGS. 19 and 20, semiconductor chips 600 are
located in the respective chip mounting regions 704 defined by the
partition walls 715 and positioned on the bottom plate 701. Each
semiconductor chip 600 has an upper surface 610, a lower surface
620 which faces away from the upper surface 610, and side surfaces
630 which connect the upper surface 610 and the lower surface 620.
Each semiconductor chip 600 has the shape of, for example, a
rectangular hexahedron, although it should be understood that a
semiconductor chip may have any number of other shapes as well.
[0171] Bonding pads 640 are placed on the upper surface 610 of each
semiconductor chip 600. By way of example, the bonding pads 640 may
be placed on a central portion of the upper surface 610 of the
semiconductor chip 600.
[0172] The lower surface 620 of each semiconductor chip 600 is
placed on the bottom plate 701 and is bonded thereto by an adhesive
member 650. In the present embodiment, the partition walls 715
extend above the upper surfaces 610 of the semiconductor chips 600
by a predetermined amount.
[0173] FIG. 21 is a plan view showing the formation of an
insulation layer on the upper surfaces of the semiconductor chips
shown in FIG. 19. FIG. 22 is a sectional view taken along the line
VIII-VIII' of FIG. 21.
[0174] Referring to FIGS. 21 and 22, after the respective
semiconductor chips 600 are attached to the adhesive members 650,
an insulation material 650 is applied on the semiconductor chips
600, by which an insulation layer 660 for covering the upper
surfaces 610 of the semiconductor chips 600 is formed.
[0175] In order to form the insulation layer 660, a flowable
insulation material 665 is applied on the upper surfaces 610 of the
semiconductor chips 600. Then the flowable insulation material 665
is uniformly spread by a scraper 667, so as to form an insulation
layer 660 on the upper surfaces 610 of the semiconductor chips 600.
In the present embodiment, the total thickness of the bottom plate
701, the adhesive member 650, the semiconductor chip 600 and the
insulation layer 660 are substantially the same as the height of
the partition wall 715. As an alternative, in the present
embodiment, the insulation layer 660 may be formed on the partition
walls 715 in addition to the semiconductor chips 600.
[0176] FIG. 23 is a plan view showing the patterning of the is
insulation layer shown in FIG. 21. FIG. 24 is a cross-sectional
view taken along the line IX-IX' of FIG. 23.
[0177] Referring to FIGS. 23 and 24, openings exposing the bonding
pads 640 are defined by patterning the insulation layer 660 formed
on the semiconductor chips 600.
[0178] FIG. 25 is a cross-sectional view showing re-distribution
lines, a solder resist pattern, and connection members, which are
formed on the semiconductor chips shown in FIG. 24.
[0179] Referring to FIG. 25, re-distribution lines 800 are formed
on the semiconductor chips 600 and the partition walls 715. In the
present embodiment, an end of each re-distribution line 800 is
electrically connected with a corresponding bonding pad 640 of the
semiconductor chip 600, and the opposite end of each
re-distribution line 800 extends partially or entirely over the
upper surface of the partition wall 715.
[0180] A solder resist pattern 830 covers the upper surfaces 610 of
the semiconductor chips 600 and the upper surfaces of the partition
walls 715. Openings are defined by patterning the solder resist
pattern 830. The openings expose first re-distribution line parts
of the re-distribution lines 800, which correspond to the upper
surfaces 610 of the semiconductor chips 600, and second
re-distribution line parts of the re-distribution lines 800, which
correspond to the upper surfaces of the partition walls 715.
[0181] After the solder resist pattern 830 is patterned and the
openings are defined, connection members 835 are connected to
portions of the first and second re-distribution line parts of the
re-distribution lines 800, which are exposed through the openings
defined in the solder resist pattern 830.
[0182] FIG. 26 is a cross-sectional view showing a semiconductor
packages formed by cutting the partition walls shown in FIG.
25.
[0183] Referring to FIG. 26, after the connection members 835 are
placed on the re-distribution lines 800 of the semiconductor chips
600, the partition walls 715 are cut, such that, semiconductor
packages 900 each having side walls 710 and a bottom plate 720 are
manufactured.
[0184] Although it was described in the method for manufacturing a
semiconductor package according to the present embodiment that each
semiconductor chip 600 is placed in a chip mounting region 704
defined by the partition walls 715, it should be readily understood
that a plurality of semiconductor chips 662, 664, and 666 can be
placed in a chip mounting region in the form of a matrix as shown
in FIG. 9.
[0185] When the plurality of semiconductor chips 662, 664, and 666
are placed in each chip mounting region in the form of a matrix,
the semiconductor chips 662, 664, and 666 may each be the same kind
of semiconductor chips, or alternatively, the semiconductor chips
662, 664, and 666 may be different kinds of semiconductor
chips.
[0186] Also, while it was described in the method for manufacturing
a semiconductor package according to the present embodiment that
each semiconductor chip 600 is placed in a chip mounting region 704
defined by the partition walls 715, it should be readily understood
that a plurality of semiconductor chips 672, 674, and 676 may be
stacked in a chip mounting region and be connected with one another
by through-electrodes 672a, 674a, and 676a as shown in FIG. 10.
When the plurality of semiconductor chips 672, 674, and 676 are
stacked in a chip mounting region, the individual semiconductor
chips may be sequentially stacked upon one another in the chip
mounting region or a semiconductor chip module including a
plurality of stacked semiconductor chips may be placed in the chip
mounting region.
[0187] When the plurality of semiconductor chips 672, 674, and 676
are stacked in a chip mounting region, the semiconductor chips 672,
674, and 676 may be the same kind of semiconductor chips, or
alternatively, the semiconductor chips 672, 674, and 676 may be
different kinds of semiconductor chips.
[0188] As is apparent from the above description, in the present
invention, as the size of semiconductor chips and semiconductor
chip packages decreases, forming connection members according to
the international standard of JEDEC becomes increasingly more
difficult. According to the present invention, the connection
members can be located according to the international standard of
JEDEC by forming side walls which cover the side surfaces of the
semiconductor chip. Also, according to the present invention the
operational characteristics of the semiconductor chip can be
improved, because by placing a bottom plate having excellent heat
conductivity on the lower surface of the semiconductor chip, heat
generated in the semiconductor chip can be rapidly dissipated to
the outside.
[0189] Moreover, in the present invention, not only it is possible
to satisfy the standard ball layout prescribed in JEDEC, but the
number of the connection members in a semiconductor package, which
are needed to process data with a high density at a high speed, can
be increased.
[0190] Although specific embodiments of the present invention have
been described for illustrative purposes, those skilled in the art
will appreciate that various modifications, additions, and
substitutions are possible, without departing from the scope and
the spirit of the invention as disclosed in the accompanying
claims.
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